JPH1190131A - Parallel flow type filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an excellent parallel flow type filter excellent in removing performance of impurity particles and an outgas (gaseous impurity) and easily providing a super purified air. SOLUTION: The parallel type filter is constituted so as to pack a corrugated structural body formed into one form of a winding structure or a plural pieces laminated structure using a sheet for corrugated structural body composed of a liner and a central core in the outside frame of the filter, the corrugated structural body is fixed to the outside frame by compressed packing pressure of the corrugated structural body and the content of a solvent eluted resin in the filter is <=0.1 wt.%.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an excellent parallel flow filter which has excellent removability of impurity gas and impurity particles and can easily provide ultra-clean air.

[0002]

2. Description of the Related Art In recent years, a functional filter for removing gas from air has been used in a production process of semiconductors and liquid crystals. These filters include a direct flow type and a parallel flow type, and each contains a functional substance that decomposes and adsorbs gas components in air in or on the surface of the filter substrate.

[0003] Among the above two types of filters, a parallel flow type filter is widely used taking advantage of its low pressure loss. Most of these filters are manufactured by laminating and fixing a corrugated structure with an adhesive. The corrugated structure is formed in a corrugated form by passing a corrugated sheet through a corrugated roll, and after applying an adhesive to the top of the corrugated sheet, the corrugated structure is laminated with another sheet-shaped material called a liner. A corrugated structure having a corrugated structure is obtained. Usually, this structure is further joined and overlapped with an adhesive to produce a three-dimensional filter medium, which is then put into a filter case to form a final filter.

However, in the above-mentioned conventional parallel flow type filter, since a large amount of adhesive is used at the time of laminating and fixing the corrugated structure and at the time of manufacturing the corrugated structure, outgas (impure gas) is generated from the adhesive. There was a problem. This problem has been particularly problematic in a filter used for the purpose of removing outgas, since the filter itself has an outgas removal function while generating outgas.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide an excellent parallel flow filter which is excellent in removing impure particles and outgas (impurity gas) and can easily provide ultra-clean air.

[0006]

The present invention employs the following means to solve the above-mentioned problems. That is, the parallel flow type filter of the present invention uses a corrugated structure sheet including a liner and a core, and filters the corrugated structure formed in any form of a winding structure or a multi-layered structure. A parallel flow filter configured to be filled in an outer frame, wherein the corrugated structure is fixed to the outer frame by a compression filling pressure of the corrugated structure, and a solvent-eluting resin of the filter is provided. Is 0.1% by weight or less.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention has intensively studied a filter which is excellent not only in removing impure particles but also in removing outgas (impure gas), that is, a filter which can easily provide ultra-clean air. However, when a filter sheet with a specific structure was compressed and filled in the outer frame and a filter was made without using a solvent-eluting resin (adhesive), it was found that this problem could be solved at once. Things.

According to the present invention, a corrugated structure sheet comprising a liner and a core is used, and a corrugated structure formed by winding the corrugated structure sheet or a multi-layered structure is used. As a method of filling the corrugated structure into the filter outer frame, the corrugated structure is cut into a fixed length so as to fit the inner dimensions of the filter outer frame, and compressed and filled. In this case, a compression filling pressure is applied. After the required amount is wound up or stacked, filling is performed in the thickness direction.

[0009] The compression filling pressure can be generated by compressing the corrugated structure in the thickness direction. As one method of generating compression, by excessively stacking a fixed length corrugated structure sheet on a filter outer frame having one upper side removed, filling and fixing the upper frame while compressing the corrugated structure. Can be achieved. At the time of compression filling at this time, it is preferable to set the pressure to 0.
5% to 20%, more preferably 1% to 5%
Compression filling in the range of If the amount of compression is less than 0.5%, sufficient fixation cannot be achieved, and if it exceeds 20%, the corrugated structure is significantly deformed, and the uniformity of in-plane pressure loss required as a filter is impaired. Occur.

In order to constantly maintain the compression filling pressure, it is preferable to dispose an elastic layer on at least one of the upper surface, the lower surface, and the inner layer of the corrugated structure.
Various foam sheets and rubbers can be used as the elastic body. Among them, a polyolefin-based foam which generates little outgas is preferably used. As a method of filling the corrugated structure, it is more preferable to have at least two layers of a vertical stack and a horizontal stack in the depth direction. According to this method, the compression directions are generated vertically and horizontally, and the corrugated structures of the respective layers can be fixed more stably. Further, according to this method, there is an advantage that the turbulence is generated because the air flow path changes at the boundary between layers, and the removal efficiency is improved as compared with the case where the gas is used for gas removal.

The shape of the outer frame of the filter is not particularly limited, but it is preferable to have a flange at both ends in the depth direction since the filled corrugated structure can be fixed more stably.

The filter of the present invention has a solvent-eluting resin content, that is, an adhesive content of 0.1% by weight or less. That is, the filter of the present invention does not use a solvent-eluting resin as an adhesive or contains only such an amount that it is not discharged into the air as an impurity gas. The solvent-eluting resin mentioned here does not include the following heat-weldable substances.

Further, in the corrugated structure, it is preferable that the liner and the core are adhered to each other via a heat-welding fiber or a heat-welding particle contained in the liner and / or the core. By using such a corrugated structure, a filter can be formed without using any coating type adhesive. By not using a coating type adhesive, generation of outgas due to decomposition of the solvent contained in the adhesive or the adhesive itself can be completely avoided. For heat welding,
At least one of the liner substrate and the core substrate contains heat-welding fibers or heat-welding particles. The heat-welding substance preferably contains fibers that can be contained from the papermaking stage. The softening point of the fiber or particle is 50 to 200 ° C, further 10 to 150 ° C
Are preferred. The amount is preferably 0.01 to 50% by weight with respect to the contained base material.

Examples of the heat-welding substance include nylon, polyester, acrylic, and polyolefin polymers each having the above softening point. In particular, a heat-fused fiber having a core-sheath structure in which a low-melting polymer is disposed on the outer sheath portion can be preferably used. Also, as the base material of the base material for the liner or the base material for the core, not limited to fibrous compounds, glass, inorganic fibers such as carbon fibers,
Organic fibers such as cellulose, pulp, and synthetic fibers can be used.

The method of manufacturing the heat-welded corrugated structure is as follows.
Prepare a base material for liner or a base material for the core, pass the base material for the core through a roll having irregularities on the surface, and after performing corrugation, a roll with a corrugated shape on the core side, on the liner side The liner substrate and the core substrate are sandwiched between flat-shaped rolls, and the wave peaks of the core substrate are partially pressed against the liner substrate and heated. A corrugated structure in which only a part of the core wave is welded is obtained.

The filter can be particularly preferably used as a gas removal filter medium because there is no fear of outgassing due to the adhesive. As a filter for removing gas, its function can be imparted by containing or attaching a gas-adsorbing and / or gas-decomposable substance to at least one of the liner and the core. Activated carbon,
Activated carbon fibers, those carrying various chemical substances on them, metal powder having decomposition catalytic properties, resins or fibers having ion exchange properties, and the like can be used in appropriate combination. The gas to be removed is ammonia
In the case of an ionic substance such as a gas, an ion exchange resin or fiber can be particularly preferably used.

The ion-exchange fiber preferably has a multifilament sea-island structure and is easily separable or easily fibrillated. In the case where the ion-exchange substance is previously mixed with the core substrate or the liner substrate of the corrugated structure, the use of this fiber makes it possible to wet the papermaking easily due to its splitting property. There is an advantage. Further, by dividing or fibrillating, the surface area contributing to ion exchange can be greatly improved, which is extremely convenient.

The component of the sea-island is not particularly limited as long as at least one of the components has an ion exchange property. In order to increase the ion exchange capacity per unit weight, polystyrene having an ion-exchange group added to the sea component, It is particularly preferable to use reinforcing / split polypropylene for the island component.

[0019]

EXAMPLES The present invention will be specifically described below with reference to examples. Example 1 Multifilament sea-island type ion-exchange fiber comprising polystyrene having a sulfone group added to the sea component, polypropylene for reinforcement / division being provided to the island component, natural pulp, and polyester heat-melting material having a low melting point component provided on the outer sheath. 60:20:20
(Weight%), and wet papermaking was performed to prepare a liner substrate and a core substrate.

The base material is processed in a corrugating machine (single facer for No. 5 stage) in the order of a roll (120 ° C.) having a corrugated surface shape, a core, a base material for a liner, and a pressure roll having a flat surface shape. Then, each roll was rotated while applying pressure between the rolls, and the base material for the core and the base material for the liner were adhered by heating and pressure to produce a corrugated structure. This structure was cut into a width of 100 mm and a length of 125 mm.
Stacked. At this time, the height of the corrugated laminate under no load was 128 mm.

Also, a height of 125 mm × aluminum is used.
Width 125mm x depth 100mm (opening 100mm x 100m
m, the outer edge of the filter was 12.5 mm on all four sides), and 56 fixed-length cut corrugated structures were filled while being compressed. At this time, the compression amount was 3%.

As a result, it was possible to produce a filter having a uniform filling density and in which each sheet does not come off even if the case is shaken. This filter had no odor peculiar to a product using an adhesive and had a small pressure loss of air, and was very suitable as an air filter for removing gas.

Example 2 A single-sided corrugated sheet was prepared in the same manner as in Example 1,
This sheet was cut into a width of 50 mm and a length of 125 mm. This cut sheet is 125 mm high × 125 mm wide × 10 deep.
In an aluminum filter case of 0 mm (opening 100 mm × 100 mm), 56 sheets were stacked and filled in two layers in the depth direction such that the front side was vertically stacked and the back side was horizontally stacked.

This filter also has no outgas from the adhesive and the air flow path is changed on the way, so that the gas removal efficiency is improved and the filter is more suitable as a gas removal filter.

[0025]

According to the present invention, it is possible to provide a parallel flow filter suitable for a gas removal filter free of outgas by an adhesive.

Claims (9)

[Claims] 1. A filter outer frame is filled with a corrugated structure formed in a form of either a winding structure or a multi-layered structure using a corrugated structure sheet including a liner and a core. Wherein the corrugated structure is fixed to the outer frame by the compression filling pressure of the corrugated structure, and the content of the solvent-eluting resin in the filter is 0. 1% by weight
A parallel flow filter characterized by the following. 2. The method according to claim 1, wherein the compression filling pressure has a thickness of 0.5 when no load is applied.
The parallel flow filter according to claim 1, wherein the filter is provided by a compression amount of from 20% to 20%. 3. The parallel flow filter according to claim 1, wherein the corrugated structure has an elastic layer disposed on at least one of an upper surface, a lower surface, a side surface, and an inner layer. 4. The parallel flow type filter according to claim 1, wherein the filling form of the corrugated structure has at least two layers of a vertical stack and a horizontal stack in a depth direction. 5. The parallel flow filter according to claim 1, wherein the outer frame of the filter has a structure having flanges at both ends in a depth direction. 6. The corrugated structure is characterized in that the liner and the core are welded through at least one type of heat-welding fiber and heat-welding particles contained in the liner and / or the core. 5. The method according to claim 1, wherein the sealing is performed.
The parallel flow filter according to any one of the above. 7. The corrugated structure according to claim 1, wherein at least one of the liner and the core contains a gas-adsorbing and / or gas-decomposable substance.
7. The parallel flow type filter according to any one of claims 6 and 7. 8. The parallel flow filter according to claim 7, wherein the gas-adsorbing substance is at least one selected from particles and fibers having ion exchange properties. 9. The parallel flow filter according to claim 8, wherein the ion-exchangeable fiber is a fiber having a multifilament sea-island structure and having easy dividing or fibrillating properties.