JPH1189176A - Reduction mechanism-integrated servo actuator - Google Patents

Reduction mechanism-integrated servo actuator

Info

Publication number
JPH1189176A
JPH1189176A JP9256024A JP25602497A JPH1189176A JP H1189176 A JPH1189176 A JP H1189176A JP 9256024 A JP9256024 A JP 9256024A JP 25602497 A JP25602497 A JP 25602497A JP H1189176 A JPH1189176 A JP H1189176A
Authority
JP
Japan
Prior art keywords
reduction mechanism
magnetic field
servo
drive unit
input gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9256024A
Other languages
Japanese (ja)
Inventor
Kazunari Matsuzaki
一成 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP9256024A priority Critical patent/JPH1189176A/en
Publication of JPH1189176A publication Critical patent/JPH1189176A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a reduction mechanism-integrated servo actuator which does not restrict the degrees of freedom of an actuator shape and which is small and thin. SOLUTION: An actuator is provided with a rotation drive part 2, which is composed of a shaft 23 having a rotor 24 on the outer circumference and of a stator 21 having a stator winding 22 installed to face the rotor 24, a reduction mechanism 3 which is connected to the load side of the shaft 23 at the rotation drive part 2 and which has a plurality of gears for reducing rotation from the rotation drive part 2 to be transmitted identically and a servo sensor part 4 which detects the position and the speed of the rotation drive part 2. In this case, the servo sensor part 4 is constituted of a magnetization part 43 which is formed on the surface of an input gear 33 at the reduction mechanism 3 to face the load side of the shaft 23 at the rotation drive part 2 and which has at least one set of magnetic poles, and a magnetic-field detection means 41 such as Hall element or the like installed via a gap in a position facing the magnetization part 43 at the input gear 33.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は微小空間で使用され
る小型、薄型の減速機構一体型サーボアクチュエータに
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small and thin servo actuator integrated with a speed reduction mechanism used in a minute space.

【0002】[0002]

【従来の技術】従来の減速機構一体型サーボアクチュエ
ータの概略図を図4に示す。1は減速機構一体型サーボ
アクチュエータ、2はサーボアクチュエータ1の回転駆
動部、21は回転駆動部2に設けられ、内部に複数のス
ロットを有する固定子、22は固定子21に巻回された
固定子巻線、23は固定子21の内側に設けた回転軸、
24は回転軸23の外周に嵌着された回転子、25a、
25bは回転軸23をブラケット26a、26bとの間
で支持する軸受、27はフレーム、3は回転軸23の負
荷側に接続された減速機構、31は減速機構3の出力
軸、32は軸受、33は円板状で片側に歯を形成した入
力ギヤ、34は入力ギヤ33と噛合する中間ギヤ、35
は中間ギヤ34と噛合する出力ギヤ、36はフレーム、
37はブラケット、5は回転駆動部2の回転軸2の反負
荷側に直列に接続されたサーボセンサ部である。このよ
うな構成で、回転軸23はその負荷側に直列に設けた入
力ギヤ33と、中間ギヤ34と出力ギヤ35よりなる遊
星ギヤとで構成する減速機構に接続されて、回転軸の2
1の出力を減速して出力軸31より伝達する。また、回
転子24の位置および速度はサーボセンサ部5により検
出される。なお、サーボアクチュエータの位置、速度検
出器を構成するサーボセンサ部には、通常、光式のエン
コーダや電磁式の回転センサが用いられている(例え
ば、特開昭59ー61702号公報)。
2. Description of the Related Art FIG. 4 is a schematic view of a conventional servo actuator integrated with a speed reduction mechanism. Reference numeral 1 denotes a servo actuator integrated with a deceleration mechanism, 2 denotes a rotation drive unit of the servo actuator 1, 21 denotes a stator provided in the rotation drive unit 2 and has a plurality of slots therein, and 22 denotes a stator wound around the stator 21. A child winding, 23 is a rotating shaft provided inside the stator 21;
24 is a rotor fitted to the outer periphery of the rotating shaft 23, 25a,
25b is a bearing for supporting the rotating shaft 23 between the brackets 26a and 26b, 27 is a frame, 3 is a reduction mechanism connected to the load side of the rotating shaft 23, 31 is an output shaft of the reduction mechanism 3, 32 is a bearing, Reference numeral 33 denotes an input gear having a disk shape and teeth formed on one side, reference numeral 34 denotes an intermediate gear meshing with the input gear 33,
Is an output gear that meshes with the intermediate gear 34, 36 is a frame,
Reference numeral 37 denotes a bracket, and reference numeral 5 denotes a servo sensor unit connected in series to the non-load side of the rotation shaft 2 of the rotation drive unit 2. In such a configuration, the rotating shaft 23 is connected to a reduction mechanism composed of an input gear 33 provided in series on the load side thereof and a planetary gear composed of an intermediate gear 34 and an output gear 35, and is connected to the rotating shaft 23.
1 is decelerated and transmitted from the output shaft 31. Further, the position and speed of the rotor 24 are detected by the servo sensor unit 5. In general, an optical encoder or an electromagnetic rotation sensor is used for a servo sensor unit that constitutes a position and speed detector of a servo actuator (for example, Japanese Patent Application Laid-Open No. Sho 59-61702).

【0003】[0003]

【発明が解決しようとする課題】従来、減速機構一体型
サーボアクチュエータは、その構成要素である回転駆動
部と減速機構部とサーボセンサ部が個別かつ直列に配置
されているため、このような構成では、小型化した場
合、軸方向に長くなってしまい、サーボアクチュエータ
の形状そのものの自由度が束縛されてしまうといった問
題があった。そこで、本発明は減速機構歯車の一部に位
置・速度検出機能を有する着磁構造を持たせ、且つ、減
速機構と磁界検出手段を組み合わせてサーボセンサを構
成することで、アクチュエータ形状の自由度を束縛する
ことなく、小型、薄型の減速機構一体型サーボアクチュ
エータ提供することを目的する。
Conventionally, a servo actuator integrated with a speed reduction mechanism has such a configuration because a rotary drive unit, a speed reduction mechanism unit, and a servo sensor unit, which are its components, are individually and serially arranged. Then, when the size is reduced, there is a problem that the length becomes longer in the axial direction, and the degree of freedom of the shape of the servo actuator itself is restricted. Therefore, the present invention provides a degree of freedom in the shape of the actuator by providing a magnetized structure having a position / speed detection function in a part of the reduction mechanism gear and configuring a servo sensor by combining the reduction mechanism and the magnetic field detection means. It is an object of the present invention to provide a small and thin servomotor with a built-in deceleration mechanism without restraining the servo actuator.

【0004】[0004]

【課題を解決するための手段】上記問題を解決するた
め、本発明は次のような構成にしたものである。 (1) 外周に回転子を有する回転軸と前記回転子に対向し
て設けた固定子巻線を有する固定子よりなる回転駆動部
と、この回転駆動部の回転軸の負荷側に接続され、前記
回転駆動部からの回転を減速して同一的に伝達する複数
のギヤを有する減速機構と、前記回転駆動部の位置・速
度を検出するサーボセンサ部と、を備え、前記サーボセ
ンサ部からの信号により前記回転駆動部の位置・速度の
制御を行う減速機構一体型サーボアクチュエータにおい
て、前記サーボセンサ部は、前記回転駆動部の回転軸の
負荷側に対向して前記減速機構の入力ギヤの表面に形成
された少なくとも一組の磁極を有する着磁部と、前記入
力ギヤの着磁部と対向する位置に空隙を介して設けた磁
界検出手段とから構成され、前記減速機構の回転に応じ
て変化する信号を前記磁界検出手段により検出するよう
にしたものである。 (2) 前記磁界検出手段は、ホール素子としたものであ
る。 (3) 前記磁界検出手段は、磁気抵抗素子としたものであ
る。 (4) 前記磁界検出手段は、フラックスゲートとしたもの
である。 上記手段により、減速機構一体型サーボアクチュエータ
は、減速機構の入力ギヤの一部に位置・速度検出機能を
有する着磁構造を持たせ、且つ、減速機構の入力ギヤと
磁界検出手段を組み合わせてサーボセンサを構成したの
で、従来の位置・速度検出装置で必要であった検出用の
スリットや歯車が不要となると共に、アクチュエータ形
状の自由度を束縛することなく、小型、薄型化が図れる
ようになる。
In order to solve the above problems, the present invention has the following arrangement. (1) a rotation drive unit including a rotation shaft having a rotor on the outer periphery and a stator having a stator winding provided to face the rotor, and a rotation drive unit connected to a load side of the rotation shaft of the rotation drive unit; A speed reduction mechanism having a plurality of gears for transmitting the rotation from the rotation drive unit in a decelerated manner, and a servo sensor unit for detecting the position and speed of the rotation drive unit; and In the servo actuator integrated with a speed reduction mechanism that controls the position and speed of the rotation drive unit by a signal, the servo sensor unit is disposed on a surface of an input gear of the speed reduction mechanism facing a load side of a rotation shaft of the rotation drive unit. And a magnetic field detecting means provided through a gap at a position facing the magnetized portion of the input gear, according to the rotation of the speed reduction mechanism. Before the changing signal The magnetic field is detected by the magnetic field detecting means. (2) The magnetic field detecting means is a Hall element. (3) The magnetic field detecting means is a magnetoresistive element. (4) The magnetic field detecting means is a flux gate. By the above-mentioned means, the servo actuator integrated with the speed reduction mechanism has a magnetized structure having a position / speed detection function in a part of the input gear of the speed reduction mechanism, and performs servo control by combining the input gear of the speed reduction mechanism with the magnetic field detection means. The sensor configuration eliminates the need for slits and gears for detection, which were required in conventional position / speed detectors, and allows the actuator to be smaller and thinner without restricting the degree of freedom of the actuator shape. .

【0005】[0005]

【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図1は、本発明の実施例を示す減速機構
一体型サーボアクチュエータの側断面図である。図2
は、サーボセンサ部を説明したものであって、(a) は磁
界検出手段を有するディスクの平面図、(b) は一組の磁
極が着磁された入力ギヤの平面図であり、着磁部と磁界
検出部を見開きにした形で表している。従来例と同じ構
成要素は同じ符号を付してその説明を省略し、異なるも
のに対して説明する。図1において、従来例と異なる点
は、従来、回転駆動部2の反負荷側にあったサーボセン
サ部を取り除き、減速機構3のうち、入力ギヤ33の一
部を利用して位置・速度検出機能を有する一組の磁極が
着磁をされた着磁部43を形成し、着磁部43と対向す
る位置に磁界検出手段41を有するディスク42を負荷
側のブラケット26aに設けたものである。また、図2
において、41aと41bはそれぞれ磁界検出手段とし
てホール素子を用いた例であり、両者の位置関係は、一
組の磁極が着磁された入力ギヤ33の磁極ピッチをλと
し、nを自然数とすると、(n+1/4) λの距離を介して同
一円周上に配置されている。このような構成で、回転駆
動部2からの出力は回転軸23から減速機構3の入力ギ
ヤ33、中間ギヤ34へ伝達される。減速機構の入力ギ
ヤ33は回転軸23と同一的に回転しており、入力ギヤ
33に設けた着磁部43とブラケット26aに固定され
たディスク42に設けたホール素子等の磁界検出手段4
1a、41bにより得られる電圧信号の変化を演算処理
することで、回転軸23の位置、回転速度を検出するこ
とができる。したがって、磁界検出手段41a、41b
から得られる電圧信号をもとに磁極ピッチの1/4 の分解
能で位置検出が可能となり、また、位置信号を微分する
ことで、速度情報を得ることができる。その他の実施例
として、図3に入力ギヤの着磁部を多極着磁したものを
示す。(a) は磁界検出手段を有するディスクの平面図、
(b) は多極着磁された入力ギヤの平面図であり、着磁部
と磁界検出部を見開きにした形で表している。ホール素
子は、一組の磁極が着磁された入力ギヤの場合と同様
に、磁極ピッチをλ、nを自然数として、(n+1/4) λの
距離を介して同一円周上に配置されている。このような
構成において、一組の磁極が着磁された入力ギヤと同じ
作用効果を奏するので、その説明は省略する。なお、減
速機構の入力ギヤの着磁部は、表面に替えて歯面に着磁
して、歯先部で磁界の変化を検出する構成においても同
様の効果を得ることができる。また、磁界検出手段は、
ホール素子に替えて、磁気抵抗素子若しくはフラックス
ゲートを用いても構わない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a side sectional view of a servo actuator integrated with a speed reduction mechanism showing an embodiment of the present invention. FIG.
FIGS. 4A and 4B illustrate a servo sensor unit, FIG. 4A is a plan view of a disk having magnetic field detecting means, and FIG. 4B is a plan view of an input gear having a pair of magnetic poles. The part and the magnetic field detection part are shown in a form with a spread. The same components as those in the conventional example are denoted by the same reference numerals, the description thereof will be omitted, and different components will be described. In FIG. 1, the point different from the conventional example is that the servo sensor unit which was conventionally on the non-load side of the rotation drive unit 2 is removed, and the position / speed detection is performed by using a part of the input gear 33 of the speed reduction mechanism 3. A set of magnetic poles having a function forms a magnetized portion 43 magnetized, and a disk 42 having a magnetic field detecting means 41 is provided on a bracket 26a on the load side at a position facing the magnetized portion 43. . FIG.
, 41a and 41b are examples in which a Hall element is used as a magnetic field detecting means, respectively, and the positional relationship between the two is such that the magnetic pole pitch of the input gear 33 in which a set of magnetic poles is magnetized is λ, and n is a natural number , (N + 1/4) λ on the same circumference. With such a configuration, the output from the rotation drive unit 2 is transmitted from the rotation shaft 23 to the input gear 33 and the intermediate gear 34 of the reduction mechanism 3. The input gear 33 of the speed reduction mechanism rotates in the same manner as the rotating shaft 23, and includes a magnetized portion 43 provided on the input gear 33 and a magnetic field detecting means 4 such as a Hall element provided on a disk 42 fixed to the bracket 26a.
By calculating the change of the voltage signal obtained by 1a, 41b, the position and rotation speed of the rotating shaft 23 can be detected. Therefore, the magnetic field detecting means 41a, 41b
The position can be detected with a resolution of 1/4 of the magnetic pole pitch on the basis of the voltage signal obtained from the above, and speed information can be obtained by differentiating the position signal. As another embodiment, FIG. 3 shows a case where the magnetized portion of the input gear is multipolar magnetized. (a) is a plan view of a disk having magnetic field detecting means,
(b) is a plan view of the multipolar-magnetized input gear, in which the magnetized portion and the magnetic field detection portion are shown with a spread. Hall elements are arranged on the same circumference via a distance of (n + 1/4) λ, where λ is the magnetic pole pitch and n is a natural number, as in the case of the input gear in which a pair of magnetic poles are magnetized. Have been. In such a configuration, the same operation and effect as those of the input gear in which one set of magnetic poles is magnetized are provided, and thus the description thereof is omitted. The same effect can be obtained in a configuration in which the magnetized portion of the input gear of the reduction mechanism is magnetized on the tooth surface instead of the surface, and the change in the magnetic field is detected at the tooth tip. Further, the magnetic field detecting means includes:
Instead of the Hall element, a magnetoresistive element or a flux gate may be used.

【0006】[0006]

【発明の効果】以上述べたように本発明によれば、減速
機構の入力ギヤの一部に位置・速度検出機能を有する着
磁構造を持たせ、且つ、減速機構の入力ギヤと磁界検出
手段を組み合わせてサーボセンサを構成することで、従
来の位置、速度検出装置で必要であった検出用のスリッ
トや歯車が不要となると共に、アクチュエータ形状の自
由度を束縛することなく、小型、薄型の減速機構一体型
サーボアクチュエータを得る効果がある。
As described above, according to the present invention, a part of the input gear of the reduction mechanism is provided with a magnetized structure having a position / speed detection function, and the input gear of the reduction mechanism and the magnetic field detecting means are provided. By combining the servo sensors, the slits and gears for detection, which were necessary in the conventional position and speed detection devices, are not required, and the size and thickness of the actuator can be reduced without restricting the degree of freedom of the actuator shape. There is an effect of obtaining a servo actuator integrated with a reduction mechanism.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例を示す減速機構一体型サーボア
クチュエータの側断面図である。
FIG. 1 is a side sectional view of a speed reduction mechanism integrated servo actuator showing an embodiment of the present invention.

【図2】本発明の実施例を示すサーボセンサ部の構成を
示す説明図で、(a)は磁界検出手段を有するディスクの
平面図、(b) は一組の磁極が着磁された入力ギヤの平面
図である。
FIGS. 2A and 2B are explanatory diagrams showing a configuration of a servo sensor unit according to an embodiment of the present invention, wherein FIG. 2A is a plan view of a disk having magnetic field detecting means, and FIG. It is a top view of a gear.

【図3】その他の実施例を示すサーボセンサ部の構成を
示す説明図で、(a)は磁界検出手段を有するディスクの
平面図、(b) は多極着磁された入力ギヤの平面図であ
る。
3A and 3B are explanatory views showing the configuration of a servo sensor unit according to another embodiment, in which FIG. 3A is a plan view of a disk having a magnetic field detecting means, and FIG. 3B is a plan view of a multipolar magnetized input gear; It is.

【図4】従来の減速機構一体型サーボアクチュエータを
示す側断面図である。
FIG. 4 is a side sectional view showing a conventional servo actuator integrated with a speed reduction mechanism.

【符号の説明】[Explanation of symbols]

1:減速機構一体型サーボアクチュエータ 2:回転駆動部 21:固定子 22:固定子巻線 23:回転軸 24:回転子 3:減速機構 33:入力ギヤ 34:中間ギヤ 35:出力ギヤ 4:サーボセンサ部 41:磁界検出手段 41a、41b:ホール素子 42:ディスク 43:着磁部 1: Servo actuator integrated with reduction mechanism 2: Rotation drive unit 21: Stator 22: Stator winding 23: Rotating shaft 24: Rotor 3: Reduction mechanism 33: Input gear 34: Intermediate gear 35: Output gear 4: Servo Sensor part 41: magnetic field detecting means 41a, 41b: Hall element 42: Disk 43: Magnetized part

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 外周に回転子を有する回転軸と前記回転
子に対向して設けた固定子巻線を有する固定子よりなる
回転駆動部と、この回転駆動部の回転軸の負荷側に接続
され、前記回転駆動部からの回転を減速して同一的に伝
達する複数のギヤを有する減速機構と、前記回転駆動部
の位置・速度を検出するサーボセンサ部と、を備え、前
記サーボセンサ部からの信号により前記回転駆動部の位
置・速度の制御を行う減速機構一体型サーボアクチュエ
ータにおいて、前記サーボセンサ部は、前記回転駆動部
の回転軸の負荷側に対向して前記減速機構の入力ギヤの
表面に形成された少なくとも一組の磁極を有する着磁部
と、前記入力ギヤの着磁部と対向する位置に空隙を介し
て設けた磁界検出手段とから構成され、前記減速機構の
回転に応じて変化する信号を前記磁界検出手段により検
出することを特徴とする減速機構一体型サーボアクチュ
エータ。
1. A rotary drive unit comprising a rotary shaft having a rotor on the outer periphery and a stator having a stator winding provided opposite to the rotor, and connected to a load side of the rotary shaft of the rotary drive unit. A servo mechanism that detects a position and a speed of the rotary drive unit, and a speed reduction mechanism having a plurality of gears that reduce the rotation from the rotary drive unit and transmit the same speed. In the servo actuator integrated with a speed reduction mechanism that controls the position and speed of the rotation drive unit based on a signal from the control unit, the servo sensor unit includes an input gear of the speed reduction mechanism facing a load side of a rotation shaft of the rotation drive unit. And a magnetic field detecting means provided through a gap at a position facing the magnetized portion of the input gear, and a magnetic field detecting means provided at a position opposed to the magnetized portion of the input gear. Change according to A servo signal integrated with a speed reduction mechanism, wherein the signal is detected by the magnetic field detection means.
【請求項2】 前記磁界検出手段は、ホール素子である
請求項1記載の減速機構一体型サーボアクチュエータ。
2. The servo actuator according to claim 1, wherein said magnetic field detecting means is a Hall element.
【請求項3】 前記磁界検出手段は、磁気抵抗素子であ
る請求項1記載の減速機構一体型サーボアクチュエー
タ。
3. The servo actuator according to claim 1, wherein said magnetic field detecting means is a magnetoresistive element.
【請求項4】 前記磁界検出手段は、フラックスゲート
である請求項1記載の減速機構一体型サーボアクチュエ
ータ。
4. The servo actuator according to claim 1, wherein said magnetic field detecting means is a flux gate.
JP9256024A 1997-09-03 1997-09-03 Reduction mechanism-integrated servo actuator Pending JPH1189176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9256024A JPH1189176A (en) 1997-09-03 1997-09-03 Reduction mechanism-integrated servo actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9256024A JPH1189176A (en) 1997-09-03 1997-09-03 Reduction mechanism-integrated servo actuator

Publications (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110254385A1 (en) * 2010-04-14 2011-10-20 Kabushiki Kaisha Yaskawa Denki Direct acting rotation actuator
JP2014115234A (en) * 2012-12-12 2014-06-26 Iai Corp Mechanical absolute unit, mechanical absolute encoder, and actuator
JP2020041670A (en) * 2018-09-13 2020-03-19 ナブテスコ株式会社 Speed reducer, oil seal with encoder, industrial machine, and factory

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138567A (en) * 1984-07-31 1986-02-24 Toshiba Corp Driving device with speed detector for vehicle
JPS6251957U (en) * 1985-09-17 1987-03-31
JPS6348360U (en) * 1986-09-17 1988-04-01
JPH0268658U (en) * 1988-11-10 1990-05-24
JPH09121507A (en) * 1995-10-24 1997-05-06 Omron Corp Geared motor
JPH09210612A (en) * 1996-01-31 1997-08-12 Shimadzu Corp Position detection device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138567A (en) * 1984-07-31 1986-02-24 Toshiba Corp Driving device with speed detector for vehicle
JPS6251957U (en) * 1985-09-17 1987-03-31
JPS6348360U (en) * 1986-09-17 1988-04-01
JPH0268658U (en) * 1988-11-10 1990-05-24
JPH09121507A (en) * 1995-10-24 1997-05-06 Omron Corp Geared motor
JPH09210612A (en) * 1996-01-31 1997-08-12 Shimadzu Corp Position detection device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110254385A1 (en) * 2010-04-14 2011-10-20 Kabushiki Kaisha Yaskawa Denki Direct acting rotation actuator
JP2011239661A (en) * 2010-04-14 2011-11-24 Yaskawa Electric Corp Linear rotary actuator
JP2014115234A (en) * 2012-12-12 2014-06-26 Iai Corp Mechanical absolute unit, mechanical absolute encoder, and actuator
JP2020041670A (en) * 2018-09-13 2020-03-19 ナブテスコ株式会社 Speed reducer, oil seal with encoder, industrial machine, and factory

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