JPH118499A - Paste-coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify positioning by performing coating, in a state where a work is slanted by newly using a sloped stage which can have a slope angle, as a stage in a work support mechanism. SOLUTION: This device comprises a work support mechanism having a stage (with three-axes of X-axis 13, Y-axis 12 and θ-axis 11) capable of high- precision positioning drive, and a needle-accompanied syringe 3 supported by a Z-axis movement mechanism 7 and a bracket 6 set to have an arbitrary angle. A work position detection mechanism uses image processing by a CCD camera 1. The X, Y and θ three-axial structure, as the stage of the work support mechanism, has the sloped stage which can be set to have a slope angle. Dynamic image processing is performed when the work is driven in a slope direction so as to be slanted, while the CCD camera is driven by a linearly- driven uniaxial stage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste coating apparatus, and more particularly, to a paste coating apparatus using a dispenser, and more particularly to a precision coating of silver paste used for forming electrodes and conducting electrodes. Liquid or fluid other than silver paste, that is, in a paste application device that performs precise application such as an adhesive or cream solder,
It is suitable to be applied to the case where wire drawing coating is performed precisely.

[0002]

2. Description of the Related Art Japanese Patent Laying-Open No. 6-334319 (adhesive applying apparatus) relates to an adhesive applying apparatus for applying an adhesive for fixing an electronic component on a circuit board, and recognizes an applied state of the adhesive. At the time of inspection, there has been disclosed an adhesive applying apparatus capable of clearly confirming only an adhesive from the background of a complicated circuit board, accurately controlling the amount of the adhesive applied, and realizing stable application.

Japanese Patent Application Laid-Open No. Hei 5-90799 (Method and Apparatus for Adhesive Adhesion to Printed Circuit Board) discloses an image processing method for determining the positional relationship between each printed circuit board and a dispenser without complicating the machine. There is disclosed an adhesive application device which makes use of correction to perform highly accurate and efficient adhesive application work.

[0004]

As described above, there are several coating apparatuses using a dispenser. However, there is no precision coating apparatus capable of connecting electrodes of minute components and forming electrodes. In particular, there is no coating apparatus having an accuracy that can be used for forming electrodes of a PZT type inkjet printer head and a positioning accuracy of ± 25 μm. At present, application is performed manually, and there are problems such as application stability, long tact time, and low yield. In addition, when considering use in mass production equipment, it is necessary to further control the quality of assembled parts, respond to automatic mass production lines, and ensure safety. Therefore, an object of the present invention is to develop a paste coating apparatus that solves the above problems.

Conventionally, the connection between the end face electrode of PZT and the substrate electrode has been performed by applying a paste material such as silver paste with needles arranged in an oblique direction.
In order to control the paste material flowing out to the substrate electrode side, control is impossible unless needle detection accuracy and work detection accuracy can be detected with high accuracy. Further, it is very difficult to control the quality such as the viscosity of the paste material and the discharge pressure of the dispenser. Accordingly, an object of the present invention is to provide a stage used for a work supporting mechanism using a tilt stage capable of newly setting a tilt angle, and to provide a margin for the viscosity of the paste material and the dispenser discharge pressure. Since the application is performed in a state where the work is inclined, it is synonymous with the application to the V-shaped groove, and the positioning is simplified.

Conventionally, it has been extremely difficult to measure a coating shape such as measuring a coating width of a coated paste material or measuring a height direction of an end face coating. In view of this, a second aspect of the present invention provides a moving image process in which the work is driven in the tilting direction by the tilting stage, and the image of the coated portion is captured and processed while being linearly driven in the drawing application direction while the work is tilted. By doing so, the object is to measure and inspect the application width, application height, and application shape.

The object of the third aspect of the present invention is to provide a CCD camera for image processing having an automatic focusing function when inspecting and measuring a coating shape by the method of the second aspect of the present invention. Accordingly, an object of the present invention is to perform an inspection measurement of an application shape in which an application height change amount is equal to or more than a depth of focus.

Conventionally, in order to detect the position of a certain work, the position of another work having a different shape and the measurement of an irregular three-dimensional shape have been conventionally detected by using an illumination fixedly installed. Was very difficult. Therefore, claim 4
By driving the lighting in multiple angles,
It is an object of the present invention to enable position detection of works having different shapes and to measure an application shape that is an irregular three-dimensional shape.

The object of the present invention is to provide an image processing apparatus in which the luminance information obtained when an image is picked up is fed back in real time, so that the illumination luminance is controlled optimally and stable. The purpose is to perform image processing.

(Object of the invention of claim 6) Conventionally, the discharge amount is managed by the operator manually measuring the discharge weight. However, the invention of claim 6 is that the precision electronic balance is replaced with a syringe. An object of the present invention is to automatically measure a discharge weight of a paste material such as a silver paste and to control an application amount by being set on a stage drive or a replacement work position.

(Object of the invention of claim 7) Conventionally, the defoaming work of the syringe was manually performed by the operator, but the invention of claim 7 is directed to centrifugal separation on the driving of the syringe replacement stage or on the replacement work position. The purpose of the present invention is to automatically perform a defoaming operation of a paste material by installing a vessel.

(Object of the Invention of Claim 8) Conventionally, the operator has taken out the frozen and stored paste material and performed freezing and thawing. The aim is to shorten the tact time by automatically performing the thawing work.

The object of the ninth aspect of the present invention is to provide a system in which a detector such as a photoelectric sensor is mounted on the outer periphery of an apparatus so that an operator can erroneously enter a coating apparatus during operation. The purpose is to safely stop the device.

[0014] The object of the tenth aspect of the present invention is to provide a needle cleaning function so as to clean and reuse a needle after a predetermined paste material has been applied. .

[0015]

According to a first aspect of the present invention, there is provided a work support mechanism comprising a three-axis stage capable of high-precision positioning drive of an X-axis, a Y-axis, and a θ-axis, and a Z-axis moving mechanism. And a stage provided with a needle-equipped syringe supported by a bracket capable of freely setting an angle. In a paste coating apparatus using image processing by a CCD camera as a work position detection mechanism, the stage is a stage of the work support mechanism. A tilt stage capable of giving a tilt angle is provided in the three-axis stage configuration of X, Y, and θ, thereby using a tilt stage capable of giving a tilt angle to the works support mechanism. This makes it possible to simplify positioning, provide a margin for the viscosity of the paste material and the discharge pressure of the dispenser, simplify the equipment, shorten the process, and reduce costs. It is intended to reduce it.

According to a second aspect of the present invention, in the first aspect of the present invention, the moving image is obtained by driving the target work in the tilting direction to tilt the work, and driving the CCD camera by a linearly driven uniaxial stage. It is characterized by performing the processing, the work is tilted, and the moving image processing of taking in the image of the coated part while linearly driving the CCD camera by uniaxial drive is performed, so that the coating width, coating height, coating The shape can be measured, and the inspection and measurement of the application state are automatically performed, thereby shortening the inspection process.

According to a third aspect of the present invention, in the second aspect of the present invention, the focus of the CCD camera is auto-focused on a coating surface. By having an automatic focusing function, it is possible to inspect various coating shapes, and it is possible to handle a wide variety of products.

According to a fourth aspect of the present invention, in the first aspect of the present invention, a stage capable of being driven in multiple angles is added to the illumination for image processing, thereby driving the illumination in multiple angles. Thus, it is possible to detect the position of a work having a different shape, measure and inspect an irregular three-dimensionally applied shape, and perform automatic inspection, multi-product handling, and the like.

According to a fifth aspect of the present invention, in the first aspect of the present invention, there is provided a function of feeding back luminance information of an image in real time, whereby the luminance information at the time of capturing an image is fed back in real time. Thus, the illumination brightness can be optimally controlled, stable image processing can be performed, and operation can be performed for 24 hours following illumination changes in the external environment.

According to a sixth aspect of the present invention, in the first aspect of the present invention, there is provided a moving stage for exchanging a syringe, and a high-precision electronic balance is installed on the stage drive or on a syringe exchanging work position. By installing a precision electronic balance, it is possible to automatically control the application weight of paste material at the time of syringe replacement without human intervention, thereby reducing labor costs and processes. .

According to a seventh aspect of the present invention, in the first aspect of the present invention, a centrifugal separator, particularly a rotation revolving centrifugal separator, is installed on the driving of the moving stage for syringe replacement or on the syringe replacement work position. By installing a centrifugal separator, the paste material can be automatically defoamed, thereby reducing labor costs and processes.

According to an eighth aspect of the present invention, in the first aspect of the invention, there is provided a function of automatically taking out a syringe frozen and stored in a state of being filled with a paste material from a freezing apparatus and automatically thawing the syringe. Thus, by automatically taking out the syringe from the freezing apparatus and performing the thawing operation, the labor cost and the number of steps are reduced.

According to a ninth aspect of the present invention, in the first aspect of the present invention, a sensor intruder detection is added on the outer periphery of the apparatus, and the apparatus is stopped when the sensor is activated. By mounting a detector such as a photoelectric sensor on the outer periphery of the apparatus, when an operator accidentally enters the operating application apparatus, the apparatus can be stopped safely and the safety of the operator can be ensured.

According to a tenth aspect of the present invention, in the first aspect of the present invention, an automatic needle cleaning function is provided.
It is possible to wash and reuse the needles on which a specified number of paste materials have been applied, thereby reducing costs.

[0025]

FIG. 1 is a side view showing a basic structure of a silver paste coating apparatus to which the present invention is applied, and FIG.
The vertical syringe 3 connected to the dispenser is fixed to the device by a syringe fixing bracket 6 as shown in FIG.
, A vertical needle 5 is attached, and the distal end of the needle 5 is fixed by a vertical needle fixing bracket 4. In addition, the syringe fixing bracket 6 has a configuration in which the oblique syringe 8 can be arranged, and the angle θ can be freely set. The oblique needle 10 is fixed by the oblique syringe fixing bracket 9 so as to fit within the imaging field of view of the CCD camera 1.

The Z-axis stage 7 is used to drive the needle up and down. The resolution of the Z-axis stage 7 is 6 [μ
m], and the positioning accuracy is ± 6 [μm]. The CCD camera 1 is fixed to the apparatus by a CCD camera fixing bracket 2. The camera illumination 16 is fixed by an illumination bracket 15, and the illumination 16 has an angle and a position so as to obtain a necessary and sufficient luminance for performing image processing.

The workpiece (PZT type ink jet printer head) 17 to be coated is fixed on the θ-axis stage 11 by vacuum suction. A Y-axis stage 12 is arranged below the θ-axis stage, and an X-axis stage 13 is arranged below the Y-axis stage, and these are fixed to a base 14.
It can be driven in the directions of Y and θ. Each axis stage is capable of high resolution and high precision positioning. Resolution and positioning brightness are θ = 3.6 [sec] and ± 5, respectively.
[Sec], X = 0.5 [μm], ± 0.5 [μm], Y =
0.25 μm and ± 1 μm. The work is precisely moved on the above stages. Hereinafter, embodiments of the present invention will be described in detail based on the silver paste coating apparatus having the above basic configuration.

FIG. 3 is a structural view of the tilt stage for a work supporting mechanism according to the first aspect of the present invention. As shown in FIG. 1
It is installed above a work supporting mechanism composed of a three-axis stage of 2.theta. Axis 11, and a table for adsorbing the work 17 is installed on the upper surface of the movable part of the tilt stage. When the coating is actually performed, the tilt stage 18 is driven to perform the end face electrode-substrate electrode connection coating while the work 17 is tilted as shown in FIG. 3B. The application syringe can apply the vertical syringe 3 in at least one configuration, and the syringe mounting angle can be set freely. As shown in an enlarged view of a portion C in FIG. 3B in FIG. 3C, by applying a paste material 19 such as a silver paste, the end surface electrode of the PZT 20 and the substrate 21 are coated.
Electrical connection with the upper electrode is enabled.

(Invention of claim 2) Since the work 17 is inclined, the flow of the silver paste to the outside of the substrate electrode 21 is reduced, so that the application of the silver paste can be minimized. The tilt stage 18 drives the semicircular stage movable section shown in FIG. 3 by a configuration such as a rack and pinion or a sliding friction drive, and FIG. 4 (FIG. 4A is a plan view, FIG. B) is a shaft drive tilt stage as shown in the front view). The shaft drive tilt stage has a drive shaft 24 directly attached to the support side stage 23 of the work 22, and the drive shaft 24 is connected to the work 22 via a coupling 25 so that the rotational drive of the drive shaft 24 is directly the tilt drive of the work 22. The work 22 is tilted by connecting the rotary shaft 26 to the line shaft of the rotary motor 26 to drive the motor 26.

FIG. 5 (A) shows a state before the tilt stage 18 is driven.
((B) is a diagram showing a state after driving), in which 27 is an autofocus camera, 28 is a line illumination LED, and the autofocus camera 27 adjusts the camera focus in proportion to the tilt angle when performing image processing. Since it changes, it is used to automatically focus and enable stable image processing. There are a method using an existing autofocus camera, a method in which a Z-axis stage is installed on a work support side stage, and the stage is driven to focus the camera.

(Invention of Claim 4) FIG. 6 (FIG. 6A)
FIG. 6 (B) is a view of FIG. 6 (A) as viewed from the direction of the line BB). FIG. 6 (B) is a view in which the stage capable of multi-angle driving according to claim 4 is used as a lighting support mechanism for image processing. In the figure, a linear stage 30 is arranged on a movable portion of a drive stage 29 that can be driven in the circumferential direction so as to be orthogonal to the circumferential surface. Therefore, the movable part of the circumferential stage is driven together with the linear stage. By installing the image processing illumination device 31 on the linear stage, an illumination structure that realizes driving in multiple angles is obtained. The work stage is fixed, the illumination stage is driven, and the application shape is calculated from the gradation information of the application unit obtained from the image processing information at a plurality of locations and the illumination position information at the time of imaging.

According to a fifth aspect of the present invention, luminance information at the time of capturing an image is fed back in real time, and an illumination power supply controllable from the host side is used for image processing illumination. The optimum luminance is calculated from the gradation information of the coating section obtained from the processing information and fed back to the illumination power supply side. This is to cope with a sudden change in the external environment lighting due to a temporal change in the external environment lighting in the facility in the factory and an accident or a failure.

(Invention of Claim 6) FIG. 7 is a view showing a syringe exchanging stage for newly exchanging a syringe, in which a syringe exchanging stage according to claim 6 and an electronic balance are installed. The electronic balance 33 is installed at a position where syringe replacement is performed. The syringe exchange stage is moved to the syringe exchange position, that is, above the electronic balance 33, and the syringe support side Z-axis stage 3 is moved.
4 is lowered, a silver paste is applied to a measuring cup in the electronic balance 33, and the weight is measured. By automatically performing the above operation, it is possible to control the applied weight at the time of replacing the syringe or after the suspension.

(Invention of Claim 7) FIG. 8 is a view showing a paste application device provided with the centrifugal separator according to claim 7, in which a syringe loading robot 35 is newly installed, and the syringe supporting robot 35 is moved from the syringe supporting stage. It is possible to take out. By adding this function, the syringe defoamed by the centrifugal separator 36 is charged into the syringe supporting stage using the robot.

(Invention of Claim 8) FIG. 9 is a diagram showing an automatic thawing function of the frozen storage syringe according to claim 8.
As shown in (A), a refrigerating device 37 having a function of automatically opening and closing a door is installed near the device. In the refrigerating device 37, a syringe into which a paste material such as a silver paste has been injected is stored frozen. The syringe stored in a frozen state is transported to the thawing space 38 by using the syringe loading robot 35. Fig. 9
As shown in an enlarged manner in (B), the syringe detection sensor 39
Is installed and monitors the thawing time. After thawing, it is put into the centrifugal separator 36 to perform centrifugal defoaming.
The application device that has been put into the syringe support side stage, which is the application stage, and has undergone syringe replacement, is restarted.

(Invention of claim 9) The safety sensor according to claim 9 is arranged mainly around the periphery of the apparatus, especially around the drive stage during coating, around the syringe replacement stage, around the syringe loading robot, and on the sensor. When a person or an object passes through the device, the device stops immediately to ensure the safety of the operator.

(Invention of Claim 10) FIG.
FIG. 2 is a view showing a paste application device provided with a needle cleaning device described in No. 0. The needle cleaning device 40 is provided with a function of removing a needle from a syringe, and is carried by the syringe loading robot 35. After washing, the needle is reused.

[0038]

According to the first aspect of the present invention, a work supporting mechanism composed of a three-axis stage of X-axis, Y-axis, and θ-axis capable of high-precision positioning drive and a Z-axis moving mechanism are provided. And a needle-equipped syringe supported by a bracket capable of freely setting an angle. In a paste coating apparatus using image processing by a CCD camera as a work position detection mechanism, the X and Y stages of the work support mechanism are used. , Θ, the stage configuration has a tilting stage that can be tilted, so that the works supporting mechanism can be tilted by using a tilting stage, so that positioning can be simplified and paste material can be used. Margins for the viscosity and dispenser discharge pressure can be provided, simplifying equipment, shortening processes, and reducing costs. You.

According to a second aspect of the present invention, in the first aspect of the present invention, the target workpiece is driven in an inclined direction to tilt the workpiece, and the moving image is formed while the CCD camera is driven by a linearly driven uniaxial stage. Since the image processing is performed, the workpiece is tilted, and the moving image processing that captures and processes the image of the coated part while linearly driving the CCD camera by uniaxial drive is performed, so that the coating width, coating height, coating shape Can be measured, and the inspection and measurement of the application state can be performed automatically, and the inspection process can be shortened.

According to a third aspect of the present invention, in the second aspect of the present invention, the focus of the CCD camera is auto-focused on the coating surface. , It is possible to inspect various application shapes, and it is possible to cope with various kinds.

According to a fourth aspect of the present invention, in the first aspect of the present invention, a stage which can be driven in multiple angles is added to the illumination for image processing. In addition to enabling detection of the position of different workpieces, measurement and inspection of an irregular three-dimensionally applied shape can be performed, and automatic inspection, multi-product handling, and the like can be performed.

According to a fifth aspect of the present invention, in the first aspect of the present invention, a function of feeding back luminance information of an image in real time is provided. Can be controlled optimally, stable image processing can be performed, and operation can be performed for 24 hours following illumination changes in the external environment.

According to the sixth aspect of the present invention, in the first aspect of the present invention, there is provided a moving stage for exchanging a syringe, and a high-precision electronic balance is provided for driving the stage or for a syringe exchanging work position. By installing the electronic balance, it is possible to automatically control the application weight of the paste material at the time of syringe replacement without manual intervention, and it is possible to reduce labor costs and processes.

According to the seventh aspect of the present invention, in the first aspect of the present invention, the centrifuge is provided on the driving of the syringe replacement moving stage or on the syringe replacement work position. It enables automatic defoaming of materials, which can reduce labor costs and processes.

According to an eighth aspect of the present invention, in the first aspect of the present invention, there is provided a function of automatically taking out a syringe frozen and stored in a state of being filled with a paste material from a refrigerating apparatus and automatically thawing the syringe. Therefore, by automatically taking out the syringe from the freezer and performing the thawing operation, it is possible to reduce labor costs and the number of steps.

According to the ninth aspect of the present invention, in the first aspect of the present invention, a sensor for detecting an intruder is added on the outer periphery of the device, and the device is stopped when the sensor is activated. When an operator accidentally enters the coating apparatus, the apparatus can be safely stopped to ensure the safety of the operator.

According to the tenth aspect of the present invention, in the first aspect of the present invention, an automatic needle cleaning function is provided, so that the needles on which a predetermined number of paste materials have been applied are cleaned and reused. And cost reduction can be achieved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram (side view) showing an example of a silver paste coating device.

FIG. 2 shows the silver paste coating apparatus shown in FIG.
It is the figure seen from -II direction.

FIG. 3 is a main part configuration diagram for explaining a tilt stage for a work supporting mechanism.

FIG. 4 is a main part configuration diagram for explaining a shaft drive tilt stage.

FIG. 5 is a conceptual diagram of a main part for describing coating shape measurement by moving image processing.

FIG. 6 is a main part configuration diagram when a multi-angle drive stage is used for an illumination support mechanism for image processing.

FIG. 7 is a main part configuration diagram for explaining an example of a paste application device provided with an electronic balance.

FIG. 8 is a main part configuration diagram for explaining an example of a paste application device provided with a centrifuge.

FIG. 9 is a main part configuration diagram for explaining an example of a paste application device with a frozen storage syringe automatic thawing function.

FIG. 10 is a main part configuration diagram for explaining an example of a paste application device provided with a needle cleaning device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... CCD camera, 2 ... CCD camera fixing bracket, 3 ... Vertical syringe, 4 ... Vertical syringe fixing bracket, 5 ... Vertical needle, 6 ... Syringe fixing bracket, 7 ... Z axis stage, 8 ... Diagonal syringe, 9 ... bracket for fixing the oblique syringe, 10 ... oblique needle, 11 ...
θ-axis stage, 12: Y-axis stage, 13: X-axis stage, 14: Base, 15: Lighting fixing bracket, 16
... Illumination, 17 ... Work, 18 ... Tilt stage, 19 ... Paste material, 20 ... PZT, 21 ... Substrate, 22 ... Work, 23 ... Work support side stage, 24 ... Drive shaft, 25
... coupling, 26 ... rotary motor, 27 ... camera, 2
Reference numeral 8: line LED illumination, 29: drive stage that can be driven in the circumferential direction, 30: linear stage, 31: illumination for image processing, 32: syringe exchange stage, 33: electronic balance, 3
4: Z-axis stage on syringe support side, 35: Syringe loading robot, 36: Centrifuge, 37: Refrigerator, 38:
Thawing space, 39: syringe detection sensor, 40: needle washing device.

Claims (10)

[Claims] 1. X-axis, Y-axis capable of high-precision positioning drive
Work position detection mechanism consisting of a work support mechanism composed of a three-axis stage of the axis and the θ axis, and a needle-attached syringe supported by a Z-axis movement mechanism and supported by a bracket capable of freely setting an angle. In a paste application apparatus using an image processing by a CCD camera as a mechanism, a tilt stage capable of giving a tilt angle is provided in a stage configuration of three axes of X, Y, and θ, which are stages of the work supporting mechanism. Characteristic paste application equipment. 2. The moving image processing according to claim 1, wherein the target work is driven in a tilting direction so that the work is tilted, and the CCD camera is driven by a linearly driven one-axis stage to perform moving image processing. Paste application equipment. 3. The apparatus according to claim 2, wherein a focus of said CCD camera is automatically focused on a coating surface.
The paste application device according to the above. 4. The paste coating apparatus according to claim 1, wherein a stage drivable in multiple angles is added to the illumination for image processing. 5. The paste coating apparatus according to claim 1, further comprising a function of feeding back luminance information of the image in real time. 6. The paste coating apparatus according to claim 1, further comprising a syringe replacement moving stage, and a high-precision electronic balance on driving the stage or on a syringe replacement work position. 7. The paste coating apparatus according to claim 1, further comprising a centrifugal separator on a drive of the syringe replacement moving stage or on a syringe replacement work position. 8. The apparatus according to claim 1, further comprising a function of automatically taking out the syringe stored in a frozen state with the paste material packed therein from the freezer and automatically thawing the syringe.
The paste application device according to the above. 9. The paste application device according to claim 1, wherein an intruder detection sensor is added on the outer periphery of the device, and the device is stopped when the sensor is activated. 10. The paste application device according to claim 1, further comprising an automatic needle cleaning function.