JPH1176956A5 - - Google Patents

Info

Publication number
JPH1176956A5
JPH1176956A5 JP1997252704A JP25270497A JPH1176956A5 JP H1176956 A5 JPH1176956 A5 JP H1176956A5 JP 1997252704 A JP1997252704 A JP 1997252704A JP 25270497 A JP25270497 A JP 25270497A JP H1176956 A5 JPH1176956 A5 JP H1176956A5
Authority
JP
Japan
Prior art keywords
open publication
workpieces
immersing
washed
past
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997252704A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1176956A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9252704A priority Critical patent/JPH1176956A/ja
Priority claimed from JP9252704A external-priority patent/JPH1176956A/ja
Priority to US09/136,508 priority patent/US6058950A/en
Publication of JPH1176956A publication Critical patent/JPH1176956A/ja
Publication of JPH1176956A5 publication Critical patent/JPH1176956A5/ja
Pending legal-status Critical Current

Links

JP9252704A 1997-09-02 1997-09-02 流水式洗浄装置における加圧式給液・整流機構 Pending JPH1176956A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9252704A JPH1176956A (ja) 1997-09-02 1997-09-02 流水式洗浄装置における加圧式給液・整流機構
US09/136,508 US6058950A (en) 1997-09-02 1998-08-19 Pressurized liquid-supply and straightening mechanism in a water-flow washing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9252704A JPH1176956A (ja) 1997-09-02 1997-09-02 流水式洗浄装置における加圧式給液・整流機構

Publications (2)

Publication Number Publication Date
JPH1176956A JPH1176956A (ja) 1999-03-23
JPH1176956A5 true JPH1176956A5 (https=) 2005-06-02

Family

ID=17241096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9252704A Pending JPH1176956A (ja) 1997-09-02 1997-09-02 流水式洗浄装置における加圧式給液・整流機構

Country Status (2)

Country Link
US (1) US6058950A (https=)
JP (1) JPH1176956A (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19934300C2 (de) * 1999-07-21 2002-02-07 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten
TWI228956B (en) * 1999-12-17 2005-03-01 Matsushita Electric Industrial Co Ltd Cleaning apparatus for substrate material
US7481695B2 (en) 2000-08-22 2009-01-27 Lam Research Corporation Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head
US6640155B2 (en) 2000-08-22 2003-10-28 Lam Research Corporation Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head
US6652357B1 (en) 2000-09-22 2003-11-25 Lam Research Corporation Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing
US6585572B1 (en) 2000-08-22 2003-07-01 Lam Research Corporation Subaperture chemical mechanical polishing system
US6471566B1 (en) * 2000-09-18 2002-10-29 Lam Research Corporation Sacrificial retaining ring CMP system and methods for implementing the same
US6443815B1 (en) 2000-09-22 2002-09-03 Lam Research Corporation Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing
JP4813233B2 (ja) * 2006-04-04 2011-11-09 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 洗浄装置及び洗浄方法
US8707971B2 (en) * 2008-05-16 2014-04-29 Xyratex Corporation Laminated walls for uniform fluid flow
MY147281A (en) * 2008-07-31 2012-11-30 Invenpro M Sdn Bhd An apparatus for washing a workpiece
JP3171198U (ja) * 2011-08-08 2011-10-20 東京エレクトロン株式会社 空気清浄用フィルタ装置
KR102538179B1 (ko) 2018-09-04 2023-06-01 삼성전자주식회사 습식 식각 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014957B2 (ja) * 1996-02-14 2000-02-28 スピードファムクリーンシステム株式会社 流水式洗浄装置
US5836325A (en) * 1996-02-20 1998-11-17 Speedfam Clean System Co., Ltd. Running water type washing machine

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