JPH1171445A - Epoxy resin composition and semiconductor device sealed therewith - Google Patents

Epoxy resin composition and semiconductor device sealed therewith

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Publication number
JPH1171445A
JPH1171445A JP24783597A JP24783597A JPH1171445A JP H1171445 A JPH1171445 A JP H1171445A JP 24783597 A JP24783597 A JP 24783597A JP 24783597 A JP24783597 A JP 24783597A JP H1171445 A JPH1171445 A JP H1171445A
Authority
JP
Japan
Prior art keywords
epoxy resin
resin composition
epoxy
polyfunctional
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24783597A
Other languages
Japanese (ja)
Inventor
Isao Yamamoto
功 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP24783597A priority Critical patent/JPH1171445A/en
Publication of JPH1171445A publication Critical patent/JPH1171445A/en
Pending legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a high-reliability composition giving a package reduced in warpage, having good flowability, excellent moldability, free from the formation of resin crack, having good adhesiveness and excellent humidity resistance after mounting, by using a specified epoxy resin and a specified phenolic resin. SOLUTION: This composition essentially consists of an epoxy resin (A) containing a polyfunctional epoxy resin (a) represented by formula I(wherein R<1> , R<2> and R<3> are each hydrogen or a 1-10C alkyl) and an epoxy-modified polybutadiene (b) in an a/b weight ratio of l-100, a polyfunctional phenolic resin (B) represented by formula II (wherein n is 0 or an integer of 1 or greater), an inorganic filler (C) and a cure accelerator (D) and contains component C in an amount of 25-93 wt.% based on the composition. A semiconductor chip is sealed with a cured product of this composition to form a BGA type sealed semiconductor device.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、耐湿性、半田耐熱
性に優れたエポキシ樹脂組成物およびその組成物によっ
て半導体チップが封止されたBGA(Ball Grid Array
)型半導体封止装置に関する。
The present invention relates to an epoxy resin composition excellent in moisture resistance and solder heat resistance, and a BGA (Ball Grid Array) in which a semiconductor chip is sealed with the composition.
) Type semiconductor sealing device.

【0002】[0002]

【従来の技術】近年、半導体集積回路の分野において、
チップの高集積化に伴う大型化、多極化が進む一方、パ
ッケージ外径寸法は、携帯型情報通信機器を中心に小
型、軽量化の要求はますます強くなっている。
2. Description of the Related Art In recent years, in the field of semiconductor integrated circuits,
While the size and the number of electrodes are increasing with the increase in the degree of integration of chips, the demand for smaller and lighter package outer diameters is increasing, especially for portable information communication devices.

【0003】このため、リードが周辺配列されているQ
FP(Quad Flat Package )では、多電極化に伴う狭ピ
ッチ化が加速し、現状0.3 mmピッチにまで進み一括リ
フローソルダリングの限界にある。
For this reason, the Q in which the leads are
In the case of FP (Quad Flat Package), the narrowing of the pitch due to the increase in the number of electrodes is accelerating and the current pitch is 0.3 mm, which is the limit of batch reflow soldering.

【0004】そこで、リードをパッケージ下面にエリア
アレイ状に配置したBGA型に移行して電極ピッチを1.
5 mm〜1.0 mmに保ってソルダリングを容易にする動
きが数年前より米国を中心に活発化してきた。
[0004] Therefore, the BGA type in which the leads are arranged in an area array on the lower surface of the package is shifted to an electrode pitch of 1.
Movement to keep solder at 5 mm to 1.0 mm to facilitate soldering has been active mainly in the United States since several years ago.

【0005】しかし、BGA型のパッケージは、片面封
止のため、従来のノボラック型エポキシ樹脂等のエポキ
シ樹脂、ノボラック型フェノール樹脂およびシリカ粉末
からなる樹脂組成物によって封止した場合、パッケージ
の反りが大きいという欠点があった。また、ボンディン
グワイヤの長ループ化により、成形時にワイヤ流れが起
こるという欠点があった。
However, since the BGA type package is sealed on one side, when the package is sealed with a resin composition comprising a conventional novolak type epoxy resin such as a novolak type epoxy resin, a novolak type phenol resin, and silica powder, the package warp. There was a disadvantage of being large. In addition, there is a disadvantage that the wire flows during molding due to the long loop of the bonding wire.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記の欠点
を解消するためになされたもので、パッケージの反りが
少なく、かつ流動性が良好で成形性に優れ、また、実装
時の半田耐熱性に優れ、樹脂クラックの発生がなく、接
着性も良好であり、また、実装後の耐湿性に優れ、長期
の信頼性を保証するエポキシ樹脂組成物及びBGA型半
導体封止装置を提供しようとするものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks, and has a small package warpage, good fluidity, excellent moldability, and a low heat resistance during mounting. To provide an epoxy resin composition and a BGA-type semiconductor encapsulation device that have excellent resistance, have no resin cracks, have good adhesiveness, have excellent moisture resistance after mounting, and guarantee long-term reliability. Is what you do.

【0007】[0007]

【課題を解決するための手段】本発明者らは、上記の目
的を達成しようと鋭意研究を重ねた結果、特定のエポキ
シ樹脂、特定のフェノール樹脂を用いることによって、
耐湿性、半田耐熱性に優れた樹脂組成物が得られること
を見いだし、本発明を完成したものである。
Means for Solving the Problems The present inventors have made intensive studies to achieve the above object, and as a result, by using a specific epoxy resin and a specific phenol resin,
The inventors have found that a resin composition having excellent moisture resistance and solder heat resistance can be obtained, and have completed the present invention.

【0008】即ち、本発明は、(A)(a)次の一般式
で示される多官能エポキシ樹脂と、
That is, the present invention provides (A) and (a) a polyfunctional epoxy resin represented by the following general formula:

【0009】[0009]

【化5】 (但し、式中、R1 、R2 、R3 は水素原子又は炭素数
1 〜10のアルキル基を表す) (b)エポキシ変性ポリブタジエンとを、重量比
[(a)/(b)]として1 〜100 の割合で含有するエ
ポキシ樹脂、(B)次の一般式で示される多官能フェノ
ール樹脂、
Embedded image (Wherein, R 1 , R 2 , and R 3 represent a hydrogen atom or a carbon atom
(Representing an alkyl group of 1 to 10) (b) an epoxy resin containing an epoxy-modified polybutadiene in a weight ratio [(a) / (b)] of 1 to 100, and (B) an epoxy resin represented by the following general formula: Polyfunctional phenolic resin,

【0010】[0010]

【化6】 (但し、式中nは 0又は 1以上の整数を表す) (C)無機質充填剤および(D)硬化促進剤を必須成分
とし、樹脂組成物に対して前記(C)無機質充填剤を25
〜93重量%の割合で含有してなることを特徴とするエポ
キシ樹脂組成物である。また、別の本発明は、このエポ
キシ樹脂組成物の硬化物で、半導体チップが封止された
てなることを特徴とするBGA型の半導体封止装置であ
る。
Embedded image (Wherein, n represents an integer of 0 or 1 or more) (C) An inorganic filler and (D) a curing accelerator are essential components, and the (C) inorganic filler is added to the resin composition in an amount of 25%.
An epoxy resin composition characterized in that it is contained in a proportion of up to 93% by weight. Another embodiment of the present invention is a BGA-type semiconductor encapsulation device, wherein a semiconductor chip is encapsulated with a cured product of the epoxy resin composition.

【0011】以下、本発明を詳細に説明する。Hereinafter, the present invention will be described in detail.

【0012】本発明に用いる(A)エポキシ樹脂のう
ち、(a)成分の多官能エポキシ樹脂としては、前記の
一般式化5で示されたものが使用され、(b)成分のエ
ポキシ変性ポリブタジエンとしては、具体的な銘柄とし
て、E−1800−6.5、E−1000−6.5(日
本石油社製、商品名)などが挙げられる。(A)エポキ
シ樹脂としては、(a)多官能エポキシ樹脂と(b)エ
ポキシ変性ポリブタジエンとは、[(a)成分/(b)
成分]の重量比が1 〜100 の割合になるように配合され
る。
Among the (A) epoxy resins used in the present invention, as the polyfunctional epoxy resin of the component (a), those represented by the aforementioned general formula 5 are used, and the epoxy-modified polybutadiene of the component (b) is used. Specific brands include E-1800-6.5 and E-1000-6.5 (trade names, manufactured by Nippon Oil Co., Ltd.). As the epoxy resin (A), (a) a polyfunctional epoxy resin and (b) an epoxy-modified polybutadiene are represented by [(a) component / (b)
Component) in a weight ratio of 1 to 100.

【0013】また、この(A)エポキシ樹脂には、ノボ
ラック系エポキシ樹脂やエピビス系エポキシ樹脂、その
他の一般公知のエポキシ樹脂を併用することができる。
The epoxy resin (A) can be used in combination with a novolak epoxy resin, an epibis epoxy resin, and other generally known epoxy resins.

【0014】本発明に用いる(B)多官能フェノール樹
脂としては、前記の一般式化6で示されたものが使用さ
れる。具体的な化合物としては、例えば
As the polyfunctional phenol resin (B) used in the present invention, those represented by the aforementioned general formula (6) are used. Specific compounds include, for example,

【0015】[0015]

【化7】 Embedded image

【0016】[0016]

【化8】 Embedded image

【0017】[0017]

【化9】 等が挙げられる。Embedded image And the like.

【0018】また、この多官能フェノール樹脂の他にフ
ェノール、アルキルフェノール等のフェノール類と、ホ
ルムアルデヒド或いはパラホルムアルデヒドとを反応さ
せて得られるノボラック型フェノール樹脂およびこれら
の変性樹脂を併用することができる。
In addition to the polyfunctional phenol resin, a novolak-type phenol resin obtained by reacting phenols such as phenol and alkylphenol with formaldehyde or paraformaldehyde, and modified resins thereof can be used in combination.

【0019】本発明に用いる(C)無機質充填剤として
は、一般に使用されているものが広く使用されるが、そ
れらの中でも不純物濃度が低く、平均粒径30μm以下の
シリカ粉末が好ましく使用することができる。平均粒径
が30μmを超えると耐湿性および成形性が劣り好ましく
ない。無機質充填剤の配合割合は、全体の樹脂組成物に
対して25〜93重量%の割合で含有することが望ましい。
その割合が25重量%未満では、樹脂組成物の吸湿性が大
きく、半田浸漬後の耐湿性に劣り、また、93重量%を超
えると極端に流動性が悪くなり、成形性に劣り好ましく
ない。
As the inorganic filler (C) used in the present invention, those generally used are widely used. Among them, silica powder having a low impurity concentration and an average particle diameter of 30 μm or less is preferably used. Can be. If the average particle size exceeds 30 μm, the moisture resistance and the moldability are poor, which is not preferable. The inorganic filler is desirably contained in a proportion of 25 to 93% by weight based on the whole resin composition.
If the proportion is less than 25% by weight, the resin composition has a large hygroscopicity and is inferior in moisture resistance after immersion in solder, and if it exceeds 93% by weight, the fluidity becomes extremely poor and the moldability is inferior.

【0020】本発明に用いる(D)硬化促進剤として
は、リン系硬化促進剤、イミダゾール系硬化促進剤、D
BU系硬化促進剤、その他の硬化促進剤等が広く使用さ
れる。これらは単独又は 2種以上併用することができ
る。硬化促進剤の配合割合は、樹脂組成物に対して0.01
〜5 重量%含有するように配合することが望ましい。そ
の割合が0.01重量%未満では樹脂組成物のゲルタイムが
長く、硬化特性も悪くなり、また、5 重量%を超えると
極端に流動性が悪くなって成形性に劣り、さらに電気特
性も悪くなり耐湿性に劣り好ましくない。
The (D) curing accelerator used in the present invention includes a phosphorus-based curing accelerator, an imidazole-based curing accelerator,
BU-based curing accelerators and other curing accelerators are widely used. These can be used alone or in combination of two or more. The compounding ratio of the curing accelerator is 0.01% with respect to the resin composition.
It is desirable to mix them so as to contain up to 5% by weight. If the proportion is less than 0.01% by weight, the gel time of the resin composition is long and the curing property is deteriorated. If it exceeds 5% by weight, the fluidity is extremely deteriorated, the moldability is deteriorated, and the electric properties are also deteriorated, and the moisture resistance is deteriorated. Inferior in properties and not preferred.

【0021】本発明のエポキシ樹脂組成物は、前述した
特定のエポキシ樹脂、特定のフェノール樹脂、無機質充
填剤および硬化促進剤を必須成分とするが、本発明の目
的に反しない限度において、また必要に応じて、例えば
天然ワックス類、合成ワックス類、直鎖脂肪酸の金属
塩、酸アミド類、エステル類、パラフィン類等の離型
剤、三酸化アンチモン等の難燃剤、カーボンブラック、
ベンガラ等の着色剤、シランカップリング剤、ゴム系や
シリコーン系の低応力付与剤等を適宜、添加配合するこ
とができる。
The epoxy resin composition of the present invention contains the above-mentioned specific epoxy resin, specific phenol resin, inorganic filler and curing accelerator as essential components. Depending on, for example, natural waxes, synthetic waxes, metal salts of linear fatty acids, acid amides, esters, release agents such as paraffins, flame retardants such as antimony trioxide, carbon black,
A coloring agent such as redwood, a silane coupling agent, a rubber-based or silicone-based low-stress imparting agent, and the like can be appropriately added and blended.

【0022】本発明のエポキシ樹脂組成物を成形材料と
して調製する場合の一般的な方法としては、前述した特
定のエポキシ樹脂、特定のフェノール樹脂、無機質充填
剤および硬化促進剤その他の成分を所定の組成比に選択
した原料成分を配合し、ミキサー等によって十分均一に
混合した後、さらに熱ロールによる溶融混合処理又はニ
ーダ等による混合処理を行い、次いで冷却固化させ、適
当な大きさに粉砕して成形材料とすることができる。こ
うして得られた成形材料は、半導体装置をはじめとする
電子部品あるいは電気部品の封止、被覆、絶縁等に適用
すれば、優れた特性と信頼性を付与させることができ
る。
As a general method for preparing the epoxy resin composition of the present invention as a molding material, a specific epoxy resin, a specific phenol resin, an inorganic filler, a curing accelerator, and other components described above are mixed with a predetermined component. After blending the raw material components selected in the composition ratio and mixing sufficiently uniformly with a mixer or the like, further perform a melt mixing treatment with a hot roll or a mixing treatment with a kneader or the like, then solidify by cooling, and pulverize to an appropriate size. It can be a molding material. If the molding material thus obtained is applied to sealing, coating, insulating, etc. of electronic parts or electric parts such as semiconductor devices, excellent properties and reliability can be imparted.

【0023】本発明の半導体封止装置は、上述した成形
材料を用いて、半導体チップを封止することにより容易
に製造することができる。封止を行う半導体チップとし
ては、例えば、集積回路、大規模集積回路、トランジス
タ、サイリスタ、ダイオード等で特に限定されるもので
はない。封止の最も一般的な方法としては、低圧トラン
スファー成形法があるが、射出成形、圧縮成形、注型等
による封止も可能である。成形材料は封止の際に加熱し
て硬化させ、最終的にはこの硬化物によって封止された
半導体封止装置が得られる。加熱による硬化は、150 ℃
以上に加熱して硬化させることが望ましい。
The semiconductor encapsulation device of the present invention can be easily manufactured by encapsulating a semiconductor chip using the above-mentioned molding material. The semiconductor chip to be sealed is not particularly limited to, for example, an integrated circuit, a large-scale integrated circuit, a transistor, a thyristor, a diode, and the like. The most common sealing method is a low-pressure transfer molding method, but sealing by injection molding, compression molding, casting or the like is also possible. The molding material is heated and cured at the time of sealing, and finally a semiconductor sealing device sealed with the cured product is obtained. 150 ° C for curing by heating
It is desirable to cure by heating as described above.

【0024】[0024]

【作用】本発明のエポキシ樹脂組成物およびBGA型半
導体封止装置は、前述した特定のエポキシ樹脂、特定の
フェノール樹脂を用いたことによって、樹脂組成物の吸
水性を低減し、熱機械特性と低応力性が向上し、半田浸
漬、半田リフロー後の樹脂クラックの発生がなくなり、
耐湿性劣化が少なくなるものである。
The epoxy resin composition and the BGA type semiconductor encapsulation device of the present invention use the specific epoxy resin and the specific phenol resin described above to reduce the water absorption of the resin composition and to improve the thermomechanical properties. Improved low stress properties, eliminates solder cracks after solder immersion and solder reflow,
Deterioration in moisture resistance is reduced.

【0025】[0025]

【実施例】次に本発明を実施例によって説明するが、本
発明はこれらの実施例によって限定されるものではな
い。以下の実施例及び比較例において「%」とは「重量
%」を意味する。
Next, the present invention will be described with reference to examples, but the present invention is not limited to these examples. In the following Examples and Comparative Examples, “%” means “% by weight”.

【0026】実施例1 前述した化5のエポキシ樹脂 6.2%、エポキシ変性ポリ
ブタジエン0.5 %、前述した化7のフェノール樹脂 4.8
%、シリカ粉末88%、硬化促進剤 0.3%、エステルワッ
クス 0.3%およびシランカップリング剤 0.4%を常温で
混合し、さらに90〜95℃で混練してこれを冷却粉砕して
成形材料(A)を製造した。
Example 1 6.2% of the epoxy resin of the above formula 5, 0.5% of epoxy-modified polybutadiene, and 4.8 of the phenol resin of the above formula 7
%, Silica powder 88%, curing accelerator 0.3%, ester wax 0.3% and silane coupling agent 0.4% are mixed at room temperature, kneaded at 90-95 ° C, and cooled and pulverized to form a molding material (A). Was manufactured.

【0027】実施例2 実施例1で用いた化5のエポキシ樹脂6.6 %、エポキシ
変性ポリブタジエン0.5 %、実施例1で用いた化7のフ
ェノール樹脂3.1 %、フェノールノボラック樹脂1.3
%、シリカ粉末88%、硬化促進剤 0.3%、エステルワッ
クス 0.3%およびシランカップリング剤 0.4%を常温で
混合し、さらに90〜95℃で混練してこれを冷却粉砕して
成形材料(B)を製造した。
Example 2 6.6% of the epoxy resin of Chemical formula 5 used in Example 1, 0.5% of epoxy-modified polybutadiene, 3.1% of the phenol resin of Chemical formula 7 used in Example 1, and 1.3 of phenol novolak resin
%, Silica powder 88%, curing accelerator 0.3%, ester wax 0.3% and silane coupling agent 0.4% are mixed at room temperature, further kneaded at 90-95 ° C, and cooled and pulverized to form a molding material (B). Was manufactured.

【0028】比較例1 o−クレゾールノボラック型エポキシ樹脂7 %、ノボラ
ック型フェノール樹脂4%、シリカ粉末88%、硬化促進
剤 0.3%、エステルワックス 0.3%およびシランカップ
リング剤 0.4%を混合し、さらに90〜95℃で混練してこ
れを冷却粉砕して成形材料(C)を製造した。
Comparative Example 1 7% of o-cresol novolak type epoxy resin, 4% of novolak type phenol resin, 88% of silica powder, 0.3% of curing accelerator, 0.3% of ester wax and 0.4% of silane coupling agent were mixed. The mixture was kneaded at 90 to 95 ° C and cooled and pulverized to produce a molding material (C).

【0029】比較例2 エピビス型エポキシ樹脂9 %、ノボラック型フェノール
樹脂 2%、シリカ粉末8 8 %、硬化促進剤 0.3%、エス
テルワックス 0.3%およびシランカップリング剤 0.4%
を混合し、さらに90〜95℃で混練してこれを冷却粉砕し
て成形材料(D)を製造した。
Comparative Example 2 Epibis epoxy resin 9%, novolak phenol resin 2%, silica powder 88%, curing accelerator 0.3%, ester wax 0.3% and silane coupling agent 0.4%
Were mixed and kneaded at 90 to 95 ° C., and the mixture was cooled and pulverized to produce a molding material (D).

【0030】こうして製造した成形材料(A)〜(D)
を用いて、175 ℃に加熱した金型内にトランスファー注
入し、硬化させて半導体チップを封止して半導体封止装
置を製造した。これらの半導体封止装置について、諸試
験を行ったのでその結果を表1に示したが、本発明のエ
ポキシ樹脂組成物及び半導体封止装置は、耐湿性、半田
耐熱性に優れており、本発明の顕著な効果を確認するこ
とができた。
The molding materials (A) to (D) thus produced
Was used to transfer and inject into a mold heated to 175 ° C. and cured to seal the semiconductor chip, thereby producing a semiconductor sealing device. Various tests were performed on these semiconductor sealing devices, and the results are shown in Table 1. The epoxy resin composition and the semiconductor sealing device of the present invention are excellent in moisture resistance and solder heat resistance. The remarkable effect of the invention could be confirmed.

【0031】[0031]

【表1】 *1 :トランスファー成形によって直径50mm、厚さ3 mmの成形品を作り、これを 127℃, 2.5気圧の飽和水蒸気中に24時間放置し、増加した重量によって測定し た。 *2 :吸水率の場合と同様な成形品を作り、 175℃で 8時間の後硬化を行い、適 当な大きさの試験片とし、熱機械分析装置を用いて測定した。 *3 :JIS−K−6911に準じて試験した。 *4 :成形材料を用いて、 2本のアルミニウム配線を有するシリコン製チップを 、通常の42アロイフレームに接着し、175 ℃で 2分間トランスファー成形した 後、175 ℃で 8時間の後硬化を行った。こうして得た成形品を予め、40 ℃,90 %RH、100 時間の吸湿処理をした後、250 ℃の半田浴に10秒間浸漬した。その 後、127 ℃,2.5 気圧の飽和水蒸気中で耐湿試験を行い、アルミニウム腐食によ る50%断線(不良発生)の起こる時間を評価した。 *5 :8 ×8 mmダミーチップをBGA(27×27×1.2 mm)パッケージに納め 、成形材料を用いて、175 ℃で 2分間トランスファー成形した後、175 ℃で 8時 間の後硬化を行った。こうして製造した半導体封止装置を85℃,85%,24時間の 吸湿処理をした後、240 ℃の半田浴に1 分間浸漬した。その後、実体顕微鏡でパ ッケージ表面を過札し、外部樹脂クラックの発生の有無を評価した。 *6 :10×10mmダミーチップをBGA(30×30×1.2 mm)パッケージに納め 、成形材料を用いて、175 ℃で 2分間トランスファー成形した後、175 ℃で 8時 間の後硬化を行った。こうして製造した半導体封止装置の反り量を非接触式レー ザー測定機により測定した。[Table 1] * 1: A molded product with a diameter of 50 mm and a thickness of 3 mm was prepared by transfer molding, left in saturated steam at 127 ° C. and 2.5 atm for 24 hours, and measured by the increased weight. * 2: A molded product similar to that in the case of water absorption was prepared, post-cured at 175 ° C for 8 hours, and a test piece of appropriate size was measured using a thermomechanical analyzer. * 3: Tested according to JIS-K-6911. * 4: Using a molding material, a silicon chip with two aluminum wires is bonded to a normal 42 alloy frame, transfer molded at 175 ° C for 2 minutes, and post-cured at 175 ° C for 8 hours. Was. The molded article thus obtained was previously subjected to a moisture absorption treatment at 40 ° C., 90% RH and 100 hours, and then immersed in a solder bath at 250 ° C. for 10 seconds. After that, a humidity resistance test was performed in saturated steam at 127 ° C and 2.5 atm to evaluate the time at which 50% disconnection (defect occurrence) due to aluminum corrosion occurred. * 5: An 8 × 8 mm dummy chip is placed in a BGA (27 × 27 × 1.2 mm) package, transfer molded at 175 ° C for 2 minutes using molding materials, and post-cured at 175 ° C for 8 hours. Was. The semiconductor sealing device thus manufactured was subjected to a moisture absorption treatment at 85 ° C. and 85% for 24 hours, and then immersed in a solder bath at 240 ° C. for 1 minute. Then, the surface of the package was oversold with a stereoscopic microscope, and the presence or absence of external resin cracks was evaluated. * 6: A 10 × 10 mm dummy chip was placed in a BGA (30 × 30 × 1.2 mm) package, transfer-molded using a molding material at 175 ° C. for 2 minutes, and post-cured at 175 ° C. for 8 hours. . The amount of warpage of the semiconductor sealing device manufactured in this manner was measured by a non-contact laser measuring machine.

【0032】[0032]

【発明の効果】以上の説明及び表1から明らかなよう
に、本発明のエポキシ樹脂組成物及びBGA型半導体封
止装置は、パッケージ反りが少なく、かつ、流動性が良
好で、成形性に優れ、また、実装時の半田耐熱性に優
れ、樹脂クラックもなく、接着性も良好であり、また実
装後の耐湿性に優れ、長期間にわたって信頼性を保証す
ることができる。
As is apparent from the above description and Table 1, the epoxy resin composition and the BGA type semiconductor encapsulation device of the present invention have a small package warpage, good flowability, and excellent moldability. In addition, it has excellent solder heat resistance during mounting, has no resin cracks, has good adhesiveness, and has excellent moisture resistance after mounting, and can guarantee reliability for a long period of time.

フロントページの続き (51)Int.Cl.6 識別記号 FI // C08K 3/36 H01L 23/30 R 7/18 Continued on the front page (51) Int.Cl. 6 Identification symbol FI // C08K 3/36 H01L 23/30 R 7/18

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 (A)(a)次の一般式で示される多官
能エポキシ樹脂と、 【化1】 (但し、式中、R1 、R2 、R3 は水素原子又は炭素数
1 〜10のアルキル基を表す) (b)エポキシ変性ポリブタジエンとを、重量比
[(a)/(b)]として1 〜100 の割合で含有するエ
ポキシ樹脂、(B)次の一般式で示される多官能フェノ
ール樹脂、 【化2】 (但し、式中nは 0又は 1以上の整数を表す) (C)無機質充填剤および(D)硬化促進剤を必須成分
とし、樹脂組成物に対して前記(C)無機質充填剤を25
〜93重量%の割合で含有してなることを特徴とするエポ
キシ樹脂組成物。
(A) (a) a polyfunctional epoxy resin represented by the following general formula: (Wherein, R 1 , R 2 , and R 3 represent a hydrogen atom or a carbon atom
(Representing an alkyl group of 1 to 10) (b) an epoxy resin containing an epoxy-modified polybutadiene in a weight ratio [(a) / (b)] of 1 to 100, and (B) an epoxy resin represented by the following general formula: Polyfunctional phenolic resin, (Wherein, n represents an integer of 0 or 1 or more) (C) An inorganic filler and (D) a curing accelerator are essential components, and the (C) inorganic filler is added to the resin composition in an amount of 25%.
An epoxy resin composition characterized in that it is contained in a proportion of up to 93% by weight.
【請求項2】 (A)(a)次の一般式で示される多官
能エポキシ樹脂と、 【化3】 (但し、式中、R1 、R2 、R3 は水素原子又は炭素数
1 〜10のアルキル基を表す) (b)エポキシ変性ポリブタジエンとを、重量比
[(a)/(b)]として1 〜100 の割合で含有するエ
ポキシ樹脂、(B)次の一般式で示される多官能フェノ
ール樹脂、 【化4】 (但し、式中nは 0又は 1以上の整数を表す) (C)無機質充填剤および(D)硬化促進剤を必須成分
とし、樹脂組成物に対して前記(C)無機質充填剤を25
〜93重量%の割合で含有したエポキシ樹脂組成物の硬化
物で、半導体チップが封止されたことを特徴とするBG
A型半導体封止装置。
(A) (a) a polyfunctional epoxy resin represented by the following general formula: (Wherein, R 1 , R 2 , and R 3 represent a hydrogen atom or a carbon atom
(Representing an alkyl group of 1 to 10) (b) an epoxy resin containing an epoxy-modified polybutadiene in a weight ratio [(a) / (b)] of 1 to 100, and (B) an epoxy resin represented by the following general formula: Polyfunctional phenolic resin, (Wherein, n represents an integer of 0 or 1 or more) (C) An inorganic filler and (D) a curing accelerator are essential components, and the (C) inorganic filler is added to the resin composition in an amount of 25%.
BG characterized in that a semiconductor chip is sealed with a cured product of an epoxy resin composition containing at a ratio of up to 93% by weight.
A-type semiconductor sealing device.
JP24783597A 1997-08-28 1997-08-28 Epoxy resin composition and semiconductor device sealed therewith Pending JPH1171445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24783597A JPH1171445A (en) 1997-08-28 1997-08-28 Epoxy resin composition and semiconductor device sealed therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24783597A JPH1171445A (en) 1997-08-28 1997-08-28 Epoxy resin composition and semiconductor device sealed therewith

Publications (1)

Publication Number Publication Date
JPH1171445A true JPH1171445A (en) 1999-03-16

Family

ID=17169394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24783597A Pending JPH1171445A (en) 1997-08-28 1997-08-28 Epoxy resin composition and semiconductor device sealed therewith

Country Status (1)

Country Link
JP (1) JPH1171445A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1176159A1 (en) * 1999-04-22 2002-01-30 Ajinomoto Co., Inc. Thermosetting resin composition and flexible-circuit overcoating material comprising the same
JP2006152185A (en) * 2004-11-30 2006-06-15 Sumitomo Bakelite Co Ltd Epoxy resin composition and semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1176159A1 (en) * 1999-04-22 2002-01-30 Ajinomoto Co., Inc. Thermosetting resin composition and flexible-circuit overcoating material comprising the same
EP1176159A4 (en) * 1999-04-22 2002-07-31 Ajinomoto Kk Thermosetting resin composition and flexible-circuit overcoating material comprising the same
KR100554864B1 (en) * 1999-04-22 2006-02-24 아지노모토 가부시키가이샤 A thermosetting resin composition and flexible-circuit overcoating material, a flim carrier and a film carrier device using the same
JP2006152185A (en) * 2004-11-30 2006-06-15 Sumitomo Bakelite Co Ltd Epoxy resin composition and semiconductor device

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