JPH1170487A - Robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To design a robot for use in a small-sized apparatus by reducing its interference area and improving its operability. SOLUTION: Multistage frames 12a to 12d have a telescopic structure telescopically movable in the Z-axis direction. The upper end of the frames 12a to 12d is covered with an end cover 30 and their sides with side covers 31 to 33. In a clean room or the like, when a work such as a semiconductor wafer is worked on the topmost work handling unit, this system causes no dust-based contamination and executes effective working automatically in a limited space.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot capable of automatically performing various tasks even in a small space.

[0002]

2. Description of the Related Art Conventionally, for applications requiring a large vertical movement stroke, for example, a cylindrical coordinate type robot 1 as shown in FIG. 21 is a robot for handling a work 2 such as a semiconductor wafer even in a clean room. Has been used as As shown in FIG. 21A, a columnar Z-axis frame 4 is erected upward from the surface of the base unit 3 for rotating and conveying in the θ-axis direction in a horizontal plane. The wafer handling unit 5 can reciprocate along the Z-axis frame 4 between a lower end position shown in FIG. 21A and an upper end position shown in FIG. 21B. FIG.
As shown in (b), the wafer handling unit 5 can expand and contract in the horizontal direction (X-axis direction) in a horizontal plane, and the Z-axis frame 4 can be angularly displaced in the θ direction around the Z axis.

FIG. 22 shows an articulated robot 6 which is a more general industrial robot than the cylindrical coordinate type robot 1 shown in FIG. In the articulated robot 6, a wafer handling unit 8 is mounted on a distal end of an arm 7 whose base end is mounted on the base unit 3. The arm 7 includes a plurality of joints 9a,
The wafer handling unit 8 has a displacement in the Z-axis direction between a raised position shown in FIG. 22A and a lowered position shown in FIG. 22B. It is possible. As shown in FIG. 22B, the wafer handling unit 8 can be extended and contracted in the X-axis direction in a horizontal plane, and the arm 7 can be angularly displaced in the θ direction around the Z-axis.

An articulated robot 6 as shown in FIG.
When the arm 7 is bent at a large angle to reduce the length in the Z-axis direction as shown in FIG.
For example, the protrusion amount in the horizontal direction X becomes large, and it becomes easy to interfere with the surroundings. Therefore, it is difficult to reduce the size of the apparatus using the articulated robot 6 as a whole. In clean rooms and clean booths where very high levels of cleanliness are required, air purification equipment can be quite expensive. It is preferable to make the device smaller, so that the devices are arranged vertically. For this reason, the robot also requires a large amount of work in the Z-axis direction, requires a long stroke, and uses the cylindrical coordinate type robot 1 as shown in FIG.

In the semiconductor wafer handling apparatus, a slide mechanism of a horizontal multi-stage stroke system is also used. For example, Japanese Patent Application Laid-Open Nos.
297085, JP-A-9-36200, and the like disclose prior art of a wafer handling apparatus using a multi-stage slide mechanism. However, in these prior art configurations, it is difficult to change the drive shaft from the horizontal direction to the vertical direction, and further to any direction. In addition, since one long belt is connected to form a driving belt and a spring is provided at the end, it is difficult to increase rigidity. The position of each step is determined by the engagement or friction between the belt and the pulley. Since the holding force of each stage is determined by friction, when a highly rigid belt such as a stainless steel belt or a stainless steel wire is used, the frictional force with the pulley becomes small, and the holding force of each stage cannot be kept high.

[0006]

In the cylindrical coordinate type robot 1 as shown in FIG. 21, as shown in a plan view in FIG. 23, the robot 1 is located beside the space of the wafer handling unit 5 for transporting the work 2 in the X-axis direction. Space for the Z-axis unit 4 is required, and the interference area 10 is expanded. The interference area 10 is shown in FIG.
Although it is smaller than the interference area of the articulated robot 6 shown in FIG. 2B, it further hinders further downsizing of the apparatus using the cylindrical coordinate robot 1.

Further, when a plate-shaped work 2 such as a semiconductor wafer or a glass electrode for a liquid crystal is handled in a horizontal posture, dust is generated from the upper part of the Z-axis frame 4 located above the work 2 and dust is generated. There is a risk of falling on the surface of the work 2 and contaminating it. For this reason, it is difficult to maintain the cleanness required for the work 2.

Further, since the Z-axis frame 4 has a length longer than the displacement stroke of the wafer handling unit 5 in the Z-axis direction, installation and maintenance are difficult. In particular, when carrying in and out of the clean room, it must be handled in a long state, and workability is poor.
Transportation from the manufacturing plant to the point of use is susceptible to damage if left too long, and is not space efficient.

An object of the present invention is to provide a robot which has a small interference area, is easy to handle, and can be used for a compact device.

Another object of the present invention is to provide a robot which does not contaminate a work in a clean environment such as a clean room.

[0011]

According to the present invention, a vertical drive shaft of a robot having a plurality of drive shafts is divided into a plurality of frames from a base end to a distal end, and the plurality of frames are divided into a plurality of frames. It is possible to extend and contract as a whole between a stretched state in which the distal end extends continuously with respect to the proximal end in the drive axis direction and a contracted state in which the distal end approaches the proximal end while overlapping in the drive axial direction. A robot is provided with expansion / contraction means for relatively displacing a frame adjacent in the drive axis direction with respect to a stepped frame and expanding / contracting the frame as a whole in a plurality of steps.

According to the present invention, since the drive shaft composed of a plurality of frames in the vertical direction expands and contracts, the cost per unit area can be reduced, and the equipment can be efficiently used in a facility where the work in the vertical direction is increased. Can be. In particular, when using in a clean environment such as a clean room, install a work handling unit at the upper end of the multi-stage frame, use the robot without the robot mechanism above the work, and use If a cover such as a structure is put on the frame, it can be used in a state where the possibility of contamination on the work is small. Since the plurality of frames can be entirely extended and contracted in the vertical drive shaft direction, it can be used for a compact device without causing interference around the drive shaft. Since loading and unloading to and transporting from and to the apparatus can be performed in a state where the plurality of frames are contracted by the expansion and contraction means, the apparatus can be easily handled.

Further, according to the present invention, at least one drive shaft of a robot having a plurality of drive shafts is divided into a plurality of stages of frames from a base end to a front end, and the frames of each stage are formed in a columnar shape inside. It has a space and is formed so that the shape is sequentially reduced from the proximal end side to the distal end side in the drive axis direction,
The frames of a plurality of stages are in an extended state in which the distal end extends continuously with respect to the base end in a continuous manner in the drive axis direction, and between the adjacent frames, the front end frame is sequentially housed in the space in the base end frame. In the contracted state in which the distal end approaches the base end while overlapping in the drive axis direction, the entire frame can be expanded and contracted, and the frame adjacent to the drive axis direction is relatively displaced with respect to the frame of each stage, A robot comprising an expansion / contraction means for expanding / contracting an entire frame of a step.

According to the present invention, since a plurality of frames can be extended and contracted as a whole in the direction of the drive shaft, the frame can be used in a compact device without causing interference around the drive shaft. In a state in which the frames of a plurality of stages are contracted by the expansion / contraction means, the columnar frame is arranged such that the frame on the distal end side is sequentially housed in the space in the frame on the proximal end side between adjacent frames, and overlaps in the drive axis direction. Since the device can be loaded and unloaded and transported, the device can be easily handled.

In the present invention, the at least one drive shaft direction is a vertical direction.

According to the present invention, since the drive shaft composed of a plurality of frames in the vertical direction expands and contracts in the vertical direction, the cost per unit area can be reduced, and the equipment can be used efficiently in the vertical direction. Can be.

The present invention also provides a cable for electrically connecting between the distal end and the proximal end of the plurality of frames,
In each frame, every other or every second frame is supported at an interval, and an intermediate portion between the supporting portions is suspended in a U-shape in a space or a recess of the frame, and is adjacent to each other. The intermediate portions are characterized by including a suspended cable with a displaced or varied bend radius.

According to the present invention, the cables for electrically connecting the front end and the base end of the plurality of frames can be processed only by the U-shaped bending, even when the cables are multi-stage.
Since special processing such as coil processing is not required, cost reduction can be achieved. Adjacent U-shaped bends
By shifting the position or changing the bending radius, interference does not occur and there is no possibility of disconnection, so that reliability can be improved.

The present invention also provides a cover provided for each frame of each stage so as to cover the frames of the plurality of stages and the expansion / contraction means, wherein the frame is located at the most front end in the drive axis direction. It consists of a tip cover that covers the end face and the side face, and a side cover that covers the side face of the frame for each frame except the foremost side in the drive axis direction, and the tip cover or the side cover is a base end in the drive axis direction. Each of the side covers has an inner diameter larger than the outer diameter of the side cover adjacent to the side, and is formed such that each side cover enters the front end cover or the side cover adjacent to the front end side in the drive axis direction in a contracted state of the frame. The cover is provided.

According to the present invention, the cover can be entirely expanded and contracted in accordance with the overall expansion and contraction of the plurality of frames. If the clearance between the adjacent covers is appropriately set, the inside and outside of the cover can be sealed to reduce dust generation to the surroundings when used in a clean room or the like. Further, when used in a painting booth or the like, it is also possible to prevent contamination of the multi-stage frame inside the cover due to the surrounding atmosphere.

In the present invention, the end cover and the side cover of each step each have a substantially regular polygonal cross-sectional shape, and a connecting member disposed on a ridge line parallel to the drive shaft direction. And a rectangular plate mounted between the members.

According to the present invention, many types of covers can be formed at low cost by using a common coupling member and changing the external dimensions of the rectangular plate little by little. By extruding the common coupling member, rigidity and dimensional accuracy can be increased, the clearance between the covers can be minimized, and the degree of sealing can be increased.

Further, the present invention is characterized in that a blower for sucking or discharging air from the inside of the cover is provided at a base end of the plurality of frames in conjunction with the expansion and contraction of the frame by the expansion and contraction means. .

According to the present invention, even if the clearance of the cover is reduced and the degree of sealing is increased, the internal air is sucked or exhausted by the blowing means, so that the expansion and contraction can be performed quickly, and the working speed can be reduced. Can be improved.

Further, in the present invention, the expansion and contraction means simultaneously displaces the frames of the plurality of stages with respect to the adjacent frames by the same amount.

According to the present invention, since the frames of each stage are simultaneously displaced by the same amount with respect to the adjacent frames, large expansion and contraction displacement can be rapidly performed for the entire frame of the plurality of stages.

Further, in the present invention, the expansion and contraction means is provided for any three stages of frames adjacent in the drive axis direction.
Mutual displacement means for displacing the frames on both sides in the drive axis direction in the direction opposite to the drive axis direction around the intermediate frame, and displacement regulation for restricting the displacement between adjacent frames only in the drive axis direction Means, and a driving means for displacing in the drive axis direction between a base end frame on the base end side in the drive axis direction and a frame adjacent to the base end frame among the plurality of frames. .

According to the present invention, a combination of three adjacent frames is newly added to a combination of one frame as a new intermediate frame and the original intermediate frame as the other frame. By repeating the addition of the frame, it is formed in a chain from the other side to one side, so that the entire expansion and contraction can be performed quickly and efficiently.

In the present invention, the mutual displacement means includes a direction changing member attached to one end of the intermediate frame in the direction of the drive shaft, and a flexible member that is folded over the direction changing member. The both ends of the folded flexible member are respectively joined to a frame adjacent to one or the other of the drive shafts.

According to the present invention, since the length between both ends of the flexible member folded back by the direction changing member is constant, when the frame adjacent to one of the drive shafts is displaced with respect to the intermediate frame, The frame adjacent to the other of the drive shafts can be displaced in the opposite direction.

In the present invention, the mutual displacement means includes a pair of endless flexible members mounted on the intermediate frame at an interval in the direction of the drive shaft, and on which the flexible members are stretched. One or other portion of the flexible member that is stretched between the stretching members and displaced in opposite directions to each other is joined to a frame adjacent to one or the other of the drive shafts, respectively. It is characterized by the following.

According to the present invention, the flexible member stretched between the pair of stretch members produces two portions displaced to one or the other of the drive shaft. Since these two portions are respectively joined to the frame adjacent to one or the other in the drive axis direction with respect to the intermediate frame, the frames adjacent to the one and the other of the drive shaft with respect to the intermediate frame are opposite to each other. Direction.

Further, in the present invention, the mutual displacement means adjacent in the drive shaft direction are formed such that the strength of the flexible member is greater on the base end side in the drive shaft direction than on the distal end side. It is characterized by being.

According to the present invention, the driving means relatively displaces the frames in the direction of the drive axis at the base end side of the plurality of frames, and applies the driving force to the distal end side through the mutual displacement means between the adjacent frames. , The load on the flexible member is greater at the proximal end than at the distal end. For example, the number, size, or material of the flexible member on the base end side is changed so as to increase the strength, so that the necessary strength as a whole can be appropriately secured.

Further, in the present invention, the mutual displacement means includes a pair of screw shafts mounted on the intermediate frame in parallel with the drive shaft direction, and one of the screw shafts, and the one in the drive shaft direction. One ball screw attached to the adjacent frame, the other ball screw screwed to the other screw shaft and attached to the frame adjacent to the other in the drive axis direction, and one ball screw and the other ball screw And a transmission mechanism for transmitting a rotational force between the one and the other screw shafts so as to be displaced in opposite directions.

According to the present invention, when one screw shaft rotates, the one ball screw moves the frame in the direction of the drive shaft with respect to the intermediate frame, and the frame on which the ball screw is mounted also displaces. On the other hand, the other ball screw moves in the other direction in the drive shaft direction, and the frame on which the ball screw is mounted can be displaced in the opposite direction.

Further, in the present invention, the mutual displacement means is provided between the intermediate frame and a frame adjacent to one and the other in the direction of the drive shaft so as to be displaced in opposite directions to each other. And a link mechanism.

According to the present invention, when the frame adjacent to one of the intermediate frames in the drive axis direction is displaced,
With the link mechanism, the frame adjacent to the other in the drive axis direction can be displaced in the opposite direction.

Also, in the present invention, the frame of each stage has a substantially rectangular or U-shaped cross section perpendicular to the drive shaft, and a frame at the tip end side in the drive shaft direction is provided between adjacent frames. The frames are formed so as to be shifted in frame size so as to enter the frame on the base end side, and the mutual displacement means adjacent in the drive axis direction are phase-shifted step by step so as to be located on opposite side surfaces of the same frame. Are shifted and arranged on the side surfaces of the frames of each stage.

According to the present invention, the mutual displacement means are alternately arranged on the opposing side surfaces with the phase shifted by one step, so that even if the frame is contracted, interference with the cable can be suppressed.

Further, in the present invention, the frame of each stage has a substantially rectangular or U-shaped cross section perpendicular to the drive shaft, and each surface can be divided, and the mutual displacement means and the displacement The mounting surface of the restricting means is shared by the frames of each stage.

According to the present invention, since the mounting surfaces of the mutual displacement means and the displacement restricting means are shared by the frames of the respective stages, they can be assembled using the same jig, thereby improving the assemblability. Can be planned.

[0043]

FIG. 1 shows a simplified basic cross-sectional structure of a telescopic robot 11 suitable for use in a clean room or the like as a first embodiment of the present invention. The robot 11 has a plurality of frames 12
Each of a, 12b, 12c, and 12d has a telescopic structure that can be expanded and contracted as a whole in a manner similar to a barrel of a telescope. The direction of expansion and contraction is the vertical direction parallel to the Z axis, and the first stage frame 12a from the base end side is provided with a screw shaft 14 of a ball screw portion 13 as a driving means. The screw shaft 14 is rotationally driven by a motor 15, and the rotational force is converted by a ball screw nut 16 into a vertical driving force in the Z-axis direction. Since the ball screw nut portion 16 is mounted on the second-stage frame 12b, the second-stage frame 12b can be moved up and down with respect to the first-stage frame 12a by rotating the motor 15. .

A pulley 17 and an auxiliary pulley 18 are respectively mounted on the second-stage frame 12b at an interval above and below. The axes of the pulley 17 and the auxiliary pulley 18 are parallel to each other and horizontal. A belt 19 as a flexible member is stretched between the pulley 17 and the auxiliary pulley 18 as the stretching member. The belt 19 stretched between the pulley 17 and the auxiliary pulley 18 is
And are joined to the third-stage and first-stage frames 12c and 12a, respectively. The combination of the pulley 17, the auxiliary pulley 18, and the belt 20, which are mutual displacement means, provides a displacement driving force between the first and second frames 12 a, 12 b by the ball screw portion 13.
The signal is transmitted for displacement between the first and third frames 12b and 12c.

The base end of the first stage frame 12a is
0 on a turntable 21 on the surface. A motor 22 is mounted on the turntable 21, and a pinion gear 23 is mounted on an output shaft thereof. The ring gear 24 meshing with the pinion gear 23 is formed on a base 25 of the base 20. When the motor 22 is driven to rotate, the turntable 21 can be angularly displaced relative to the base 25 in the circumferential direction θ in a horizontal plane. A cross roller bearing 26 is interposed between the outer peripheral portion of the turntable 21 and the inner peripheral portion of the base portion 25 to facilitate the angular displacement of the turntable 21.

A pulley 27 and an auxiliary pulley 28 are mounted on the third-stage frame 12c at an interval vertically. The axes of the pulley 27 and the auxiliary pulley 28 are parallel to each other and horizontal. A belt 29 as a flexible member is stretched between the pulley 27 as a stretching member and the auxiliary pulley 28. The belt 29 stretched between the pulley 27 and the auxiliary pulley 28
And are joined to the fourth and second stage frames 12d and 12b, respectively. The combination of the pulley 27, the auxiliary pulley 28, and the belt 29, which are mutual displacement means,
The displacement driving force between b and 12c is transmitted for displacement between the third and fourth stage frames 12c and 12d.

When a frame continues after the fourth frame 12d, the telescopic structure can be continued by providing the mutual displacement means. In such a telescopic-type multi-stage frame, the displacement amount of the base-side ball screw portion 13 with respect to the second-stage frame 12b is set as a multiplier that is one less than the number of stages, and a plurality of frames 12a, 12b, and 12c are used. , 12d can be expanded and contracted. In addition, the ball screw portion 13 and the motor 22 for angular displacement, which are driving means, are actually arranged on a side different from the mutual displacement means, as described later.

The upper surface and the side surfaces of the uppermost frame, that is, the fourth frame 12 d are covered with an end cover 30. The side surfaces of the frames 12c, 12b, 12a in the third to first stages are covered with side covers 31, 32, 33, respectively. In each of the covers 30 to 33, the upper inner diameter is slightly larger than the lower outer diameter, and the clearance of the gap is suppressed to a certain value or less. With such covers 30 to 33, the frame 12a,
Since the mechanical parts related to 12b, 12c, and 12d can be sealed from the outside, when the robot 11 is used in a clean room or the like, it is possible to prevent the influence of dust inside from affecting the surroundings. If a work handling unit 34 is provided on the end face cover 30, when handling a work such as a semiconductor wafer, there is no mechanical element for configuring the robot 11 above the work.
The possibility of contaminating the surface of the work can be eliminated.

FIG. 2 shows the multi-stage frame 12a, 1 of FIG.
The configuration related to 2b, 12c, and 12d is shown. The frames 12a, 12b, 12c, and 12d are in the shape of a quadrangular prism, and a vertical rail 35 is mounted on the outer surface of the second frame 12b to which the ball screw nut 16 of the ball screw 13 is joined. . A bearing portion 36 that is guided by a rail portion 35 and that can be displaced up and down is attached to the inner side surface of the first-stage frame 12a. The rail part 35 and the bearing part 36 constitute a displacement restricting means for restricting the displacement direction so that the displacement between the frames 12a and 12b is only in the vertical direction. The displacement restricting means and the mutual displacement means having the same configuration include the frames 12a, 12b,
Since they are alternately arranged on the opposing side surfaces of 12c and 12d, mutual interference can be avoided even during contraction.

FIG. 3 shows the overall shape of the robot 11 of FIG. 1 in a state where the frames 12a to 12f of a total of six steps are extended. Base cover 3 around base 20
7 are provided. At the bottom of the first stage frame 12a,
A fan 38 is provided. The frame 12 controls the suction of air into the cover 39 for a total of six stages and the discharge of air from the inside of the
The adjustment is performed in accordance with the expansion and contraction of a to 12f, so that the clearance of the cover 39 is reduced so that the expansion and contraction can be quickly performed even if air circulation becomes difficult. In addition, frame 1
Driving means such as a ball screw portion 13 for expansion and contraction of 2a to 12f and a motor 22 for angular displacement are quadrangular prism-shaped frames 12a to 12f, and mutual displacement means as shown in FIGS. Unlike the side faces that are provided alternately and are opposed to each other, they are arranged on the side faces that are out of phase by 90 °. Cover 39
The work handling unit 3
The driving motor 40 is also attached.

The air pressure inside the cover 39 is adjusted by the fan 38. In a clean room or the like, a negative pressure is applied to the surrounding pressure so that air is not blown out from the gap between the covers 39, but rather is sucked in. By doing so, dust generation countermeasures can be taken more effectively.
In a painting booth or the like, the inside of the cover 39 can be kept clean by keeping the inside of the cover 39 at a positive pressure and blowing air from the gap between the covers 39.

FIG. 4 shows the frame 1 of the robot 11 of FIG.
The state which contracted 2a-12f is shown. The frames 12a to 12f of each stage are sequentially accommodated in the hollow portions of the frames of the lower stage. The cover 39 accommodates the lower cover sequentially in the upper cover, and as a whole the base cover 3
7 can be accommodated. The expanded state shown in FIG.
The difference in height of the work handling unit 34 between the contracted state and the contracted state shown in (1) is the vertical stroke realized by the robot 11 having the telescopic structure.

FIG. 5 shows a horizontal section of the frames 12a to 12f. Each of the frames 12a to 12f is in the shape of a hollow quadrangular prism, and opposing side surfaces are formed by extruded members 41 and 42.
They are connected at 44. Pulleys 17 and 27, auxiliary pulleys 18 and 28, and belt 1
9, 29, the rail 35 and the bearing 36 are attached. The mounting positions on the push members 41 and 42 are shared, and assembly can be performed with high accuracy. In addition, in the case of vertical drive, when an acceleration larger than 1 G of gravitational acceleration is not required, a configuration without the auxiliary pulleys 18 and 28 may be employed.

The cover 39 has a substantially regular octagonal cross-sectional shape, and a side surface is formed by combining a connecting member 45 arranged on the ridge and a side plate 46 for connecting the connecting members. The clearance between the upper and lower covers can be accurately kept at a small value by changing the size of the side plate 46.

FIG. 6 shows a horizontal sectional configuration of the robot 11 of FIG. The frames 12a to 12f, the screw shafts 14, and the motors 15 and 22 of each stage are arranged according to the regular octagonal cross-sectional shape of the cover 39, and the space is efficiently used. In addition, the joint member 45 having rigidity is used in common, so that the clearance between the steps of the cover 39 is accurately maintained, and the cover 39 is formed at a low cost.

FIGS. 7 and 8 show a state in which the end cover 30 and the side covers 31 to 33 constituting the cover 39 are assembled. The size of the cover at each stage is slightly different, and the clearance, which is the gap between the covers, must be kept below a certain value. Therefore, the horizontal cross-sectional shape is made into a regular polygonal shape, and the top portion, that is, the ridge line portion is made common to all the covers by using the joining member 45 formed by extrusion, and the cover shape is maintained by providing rigidity.

As shown in FIG. 9, an upper end plate 50 and an end plate 51 are attached to the end surfaces of the end cover 30 and the side covers 31 to 33 with bolts 53 with a corner reinforcing member 52 interposed therebetween. As shown in FIGS. 7 and 8, between the connecting members 45, side plates 46 whose sizes in the width direction are slightly different depending on the position of the cover are provided by the same number as the connecting members 45, that is, a regular polygon. Bolts 53
Install with. In the regular octagonal cross-sectional shape shown in the figure, eight coupling members 45 and eight side plates 46 of the size of each stage are used in all stages of the cover. The end plates 51 of the side covers 31 to 33 are changed in size little by little, and pass through the upper part of the frames 12a to 12f, the mutual displacement means, the rail 35 and the bearing 36 in the center. A cross-shaped through-hole 54 is formed to allow the cross-section to be formed.

FIG. 10 shows a case where the cover has a cylindrical shape. As shown in FIG. 10A, the shape of the cover is generally a combination of a disc-shaped upper end face plate 55 or end face plate 56 and a cylindrical side face plate 57 with bolts 58 or the like. It is believed that there is. However, it is very difficult to accurately form the welded portion 59 for making the side plate 57 cylindrical, and distortion is likely to occur as shown in FIG. If the roundness of the cross-sectional shape is poor, the clearance between the covers cannot be secured. Since the covers have different sizes individually, manufacturing covers with different sizes one by one with a more accurate processing method causes an increase in manufacturing cost.

FIG. 11 shows four stages of hollow frames 12a to 12a.
The processing state of the cable 60 within 12d is shown. The cables pass through the spaces inside the frames 12a to 12d of each stage, and the work handling unit 34 at the upper end and the base 2 at the lower end.
Make an electrical connection to 0. Brackets 61a, 1st, 2nd and 4th tier frames 12a, 12b, 12d
61b and 61d are provided, respectively, to support the cable 60 in the middle. The cable 60 between the portions supported by the brackets 61a, 61b, 61d hangs down in a U-shape. As shown in FIG. 11A, between the second-stage and fourth-stage frames 12b and 12d, the cables 60 are connected to the brackets 12b and 1 every other stage except for the third-stage frame 12c.
2d, the first and second stage frames 12
a, 12b, brackets 61 for each adjacent frame.
a, 61b are provided, and the cable 60 is suspended in a U-shape. As shown in FIG. 11B, the portion of the cable 60 between the brackets 61a and 61b and the bracket 61
By changing the U-shaped bending radius between the portion between b and 61d, interference can be avoided even in the contracted state of the frame.

FIG. 12 shows another concept of the cable processing. As shown in FIG.
When the space between a and 12b is in a contracted state, the cable 60 is suspended in a U-shape. As shown in FIG.
When the 2a and 12b are in the extended state, the cable 60 also follows and displaces while maintaining the U-shape. As shown in FIG. 12 (c), when the vicinity of the cable 60 is viewed in a plan view, the portions of the adjacent cables 60 are suspended in a U-shape at positions shifted in phase so that the positions of the adjacent cables 60 are different in the horizontal plane. prevent. Since the drive shaft directions of the frames 12a to 12d are vertical, the positions of the adjacent cables 60 are shifted in the horizontal direction. Even if the drive shaft direction is any other direction, if the spatial positions of the adjacent cables 60 are shifted, interference can be similarly avoided.

As shown in FIG. 13, the space for processing the cable 60 by the U-shaped bending is formed by the frames 12a to 12a.
This is ensured by the substantially rectangular cross-sectional shape of 12d. However, in addition to such a hollow columnar shape, a concave portion having a U-shaped cross section can also be used as a storage space for the cable 60.

FIG. 14 shows the conventional concept of cable processing. Generally, as shown in FIG. 14A, the cable 60 corresponding to a long stroke is densely wound in a coil shape in a contracted state of the frame. FIG.
As shown in (b), when the frame is extended, it is expected that the winding of the coil will be extended. However, due to the weight of the cable 60, as shown in FIG. 14 (c), only the upper side can be extended and contracted while the lower side remains down, and extreme stress occurs there, leading to disconnection. Cheap. Generally, disconnection of a cable is a major cause of impairing the reliability of a robot, and there is a demand for highly reliable cable processing. In particular, in the case of the telescopic structure, the up-and-down stroke is long and the size in the contracted state is small, so that the processing of the cable becomes more difficult. In the present embodiment, since the processing is performed by bending into a U-shape, the reliability can be improved and the maintenance can be easily performed.

FIG. 15 shows a basic configuration of the mutual displacement means of the present embodiment, that is, the first embodiment. FIGS. 16 and 17 show the basic configuration of the second and third embodiments of the mutual displacement means. In the first embodiment, belts 19 and 29 as flexible members are stretched between pulleys 17 and 27 as auxiliary stretching means and auxiliary pulleys 18 and 28 at both ends of the intermediate frame 12. The belts 19 and 29 are, for example, endless thin stainless steel strips, and the attachment portions 68 and 69 are respectively joined to adjacent frames. Wires can be used instead of the belts 19 and 29.

In the second embodiment shown in FIG. 16, the mutual displacement means is formed by the ball screw portion 70 mounted on the intermediate frame 12. The pair of screw shafts 71 and 72 are arranged in parallel with the Z-axis direction, and are coupled by a gear 73 so as to rotate in mutually opposite directions. Two screw shafts 71, 72
Are engaged with ball screw nut portions 74 and 75, respectively, and are respectively joined to vertically adjacent frames. In the mutual displacement means of the third embodiment shown in FIG.
A pair of link mechanisms 76,
77 are provided, and the central portions are connected by connecting pins 78. One ends of the link mechanisms 76 and 77 are swingably displaceable about swing shafts 79 and 80, respectively.
Displacement pins 81 and 82 respectively joined to adjacent frames are engaged with the other end sides of the link mechanisms 76 and 77, respectively. For example, on the link mechanism 76 side, the displacement pin 81
When approaching the pivot shaft 79 side, the link mechanism 77 side
The displacement pin 82 is displaced away from the pivot axis.

FIGS. 18, 19 and 20 show the basic configuration of the mutual displacement means and the overall extended state of the robot 91 according to the fourth embodiment of the present invention. For example, as shown in FIG.
2b is an intermediate frame, and a pulley 17 as a direction changing member is mounted on the upper end thereof. A belt 92, which is a flexible member, is wound around the pulley 17, and both ends of the belt 92 are joined to vertically adjacent frames 12c and 12a by attachment portions 93 and 94, respectively. Belt 92
Is formed of, for example, a stainless steel strip. FIG.
As shown in (b), the rail portion 35 is fixed in parallel with the belt 92, and is combined with the bearing portion 36 joined to the frame 12c to form a linear guide portion.

FIG. 19 shows a state in which the second stage frame 12b is displaced upward with respect to the first stage frame 12a by the same driving means as the ball screw portion 13 shown in FIG. The belt 19 between the pulley 17 and the mounting portion 94 is pulled and lengthened, and the belt 19 between the pulley 17 and the mounting portion 93 is shortened.
2c rises by twice the stroke of the second stage frame 12b.

FIG. 20 shows the overall configuration of the robot 91. Assuming that the weight distribution of each part is W1 to W4, each belt 92a, 92b,
The load tensions Ta, Tb, Tc, Td of 92c, 92d are
They can be expressed as the following first to fourth formulas, respectively.

Ta = 4 × W1 + 3 × W2 + 2 × W3 + W4 (1) Tb = 3 × W1 + 2 × W2 + W3 (2) Tc = 2 × W1 + W2 (3) Td = W1 (4) Therefore, the belts 19a, 19b, The tensions of 19c and 19d have a relationship as shown in the following Expression 5.

Ta>Tb>Tc> Td (5) In consideration of the overall stiffness balance, the belts 19 a and 19 are arranged in the same order as the order of the magnitude of the tension in the fifth formula.
It is necessary to give b, 19c and 19d strength. When each of the belts 19a, 19b, 19c, and 19d is formed by laminating a plurality of stainless steel strips or the like, the value of the number of laminations n can be increased by increasing the value of the number of laminations in the lower belt according to the fifth formula. With the structure, the required strength can be ensured only by changing the number of belts to be stacked. This concept can also be applied to the first embodiment shown in FIG. When a wire is used as the flexible member, the strength can be adjusted by the number of wires used. It is also possible to adjust the strength by changing the material of the flexible member.
Note that the robot 91 of FIG. 20 can be used in a clean room or the like if it is covered with a cover like the robot of FIG.

In each of the embodiments described above, the telescopic structure of the multi-stage frame is expanded and contracted in the Z-axis direction, which is the vertical direction of the robots 11 and 91, but is expanded and contracted in an arbitrary direction such as the horizontal direction. It is also possible to make it. In addition, a plurality of telescopic structures can be provided, and a multistage system can cope with expansion and contraction displacement in a plurality of directions. One of the plurality of stages of mutual displacement means may be directly driven to extend and contract the frame as a whole.

[0071]

As described above, according to the present invention, since the drive shaft composed of a plurality of stages of frames expands and contracts in the vertical direction, the area required for the installation is reduced, and the equipment for performing the operations in the vertical direction is more efficient. Can be used well. Especially when used in a clean environment such as a clean room,
The robot can be used in a state where the robot mechanism does not exist above the work, and can be used in a state where the possibility of contamination of the work is small. It can be used in a compact device without causing interference around the drive shaft, and can be easily handled when carrying in and out, and when transporting.

Further, according to the present invention, a plurality of frames can be compactly contracted as a whole by accommodating adjacent frames in the contracted state in the drive shaft direction in the internal space.

Further, according to the present invention, since the drive shaft composed of a plurality of stages of frames expands and contracts in the vertical direction, the area required for installation is reduced, and the equipment for performing the vertical operations is increased.
It can be used efficiently. In particular, when the robot is used in a clean environment such as a clean room, the robot can be used in a state where the mechanical part of the robot does not exist above the work, and can be used in a state where the possibility of contamination of the work is small.

Further, according to the present invention, the cable for electrically connecting the front end and the base end of the plurality of frames is processed only by the U-shaped bending, so that there is no possibility of disconnection and the reliability is improved. Can be used in high condition.

Further, according to the present invention, the cover can be entirely expanded and contracted in accordance with the overall expansion and contraction of the frames in a plurality of stages. The generation of dust to the surroundings can be reduced. Further, when used in a painting booth or the like, contamination of the inside of the cover due to the surrounding atmosphere can be prevented.

Further, according to the present invention, many types of covers can be formed at low cost and with high precision by using a common coupling member.

Further, according to the present invention, since the internal air is sucked or exhausted by the blowing means, rapid expansion and contraction can be performed, and the working speed can be improved.

Further, according to the present invention, since the frame of each stage is simultaneously displaced by the same amount with respect to the adjacent frame, large expansion and contraction displacement can be rapidly performed for the entire frame of the plurality of stages.

Further, according to the present invention, a combination of three adjacent frames can be formed in a chain so that the entire frame can be expanded and contracted quickly and efficiently.

According to the present invention, with a simple structure, when the frame adjacent to one of the drive shafts is displaced with respect to the intermediate frame, the frame adjacent to the other of the drive shafts can be displaced in the opposite direction. it can.

Further, according to the present invention, the two portions of the flexible member stretched between the pair of stretching members are respectively joined to the intermediate frame to the frame adjacent to one or the other in the drive shaft direction. The frames adjacent to one and the other of the drive shafts with respect to the intermediate frame can be displaced in directions opposite to each other.

Further, according to the present invention, the load of the flexible member is set to be larger at the proximal end than at the distal end, and the strength is increased at the proximal end. The necessary strength can be appropriately secured.

According to the present invention, one frame and the other frame can be displaced in opposite directions by using a ball screw.

According to the present invention, one frame and the other frame can be displaced in opposite directions by utilizing the link mechanism.

Further, according to the present invention, the mutual displacement means are alternately arranged on the opposing side surfaces with the phase shifted by one step, so that interference is less likely to occur even in the contracted state of the frame.

Further, according to the present invention, since the mounting surfaces of the mutual displacement means and the displacement restricting means are shared by the frames of the respective stages, they can be assembled using the same jig, and the assemblability can be improved. Can be achieved.

[Brief description of the drawings]

FIG. 1 is a front sectional view schematically showing a basic configuration of a robot 11 according to a first embodiment of the present invention.

FIG. 2 is a schematic perspective view of the frame of the embodiment of FIG.

FIG. 3 is a front sectional view showing an extended state of the robot 11 of the embodiment of FIG. 1;

FIG. 4 is a front sectional view showing a contracted state of the robot 11 of the embodiment of FIG. 1;

FIG. 5 is a horizontal sectional view of the frames 12a to 12f of FIGS. 3 and 4;

FIG. 6 is a horizontal sectional view of the robot 11 of the embodiment of FIG.

FIG. 7 is an exploded perspective view of the end cover 30 of the embodiment of FIG.

8 is an exploded perspective view of the side covers 31 to 33 of the embodiment in FIG.

FIG. 9 is a partial exploded perspective view showing end portions of the end cover 30 and the side covers 31 to 33 in the embodiment of FIG. 1;

FIG. 10 is an exploded perspective view and a plan view when a cover is formed into a cylindrical shape according to a conventional concept.

FIG. 11 is a simplified front sectional view showing a state in which a cable is processed in a frame in the embodiment of FIG. 1;

FIG. 12 is a partial front sectional view showing a state where a cable is processed in a frame in the embodiment of FIG. 1;

FIG. 13 is a partial plan sectional view showing a space formed in the frame in the embodiment of FIG. 1;

FIG. 14 is a perspective view showing a state in which a cable is processed in a frame according to a conventional concept.

FIG. 15 shows pulleys 17 and 27, auxiliary pulleys 18,
FIG. 3 is a perspective view showing a configuration of a mutual displacement unit using a belt 28 and belts 19 and 29.

FIG. 16 is a perspective view illustrating a configuration of a mutual displacement unit according to a second embodiment of the present invention.

FIG. 17 is a perspective view showing a configuration of a mutual displacement unit according to a third embodiment of the present invention.

FIG. 18 is a partial side sectional view and a front view showing a configuration of a mutual displacement unit according to a fourth embodiment of the present invention.

FIG. 19 is a partial side sectional view showing an extended state of the mutual displacement means of FIG. 18;

20 is a simplified side sectional view showing an extended state of a robot 91 having a mutual displacement unit according to the embodiment of FIG. 18;

FIG. 21 is a perspective view showing a telescopic displacement state of a conventional cylindrical coordinate type robot 1.

FIG. 22 is a perspective view showing a state of expansion and contraction displacement of a conventional articulated robot 6;

FIG. 23 is a plan view showing an interference area 10 of the cylindrical coordinate robot 1 shown in FIG.

[Explanation of symbols]

 11, 91 Robot 12, 12a to 12f Frame 13, 70 Ball screw part 14, 71, 72 Screw shaft 15, 22, 40 Motor 16, 74, 75 Ball screw nut part 17, 27 Pulley 18, 28 Auxiliary pulley 19, 29 , 92, 92a to 92d Belt 20 Base 21 Turntable 25 Base part 30 End cover 31 to 33 Side cover 34 Work handling unit 35 Rail part 36 Bearing part 38 Fan 39 Cover 41, 42 Extruding member 43, 44 Transfer member 45 Coupling Member 46,57 Side plate 50,55 Upper end plate 51,56 End plate 52 Corner reinforcement 60 Cable 76,77 Link mechanism

Continuing on the front page (72) Inventor Souichi Nishimura 322 Hashizushi Furukawacho, Fushimi-ku, Kyoto-shi, Kyoto Dainippon Screen Mfg. Co., Ltd.

Claims (16)

[Claims] 1. A vertical drive shaft of a robot having a plurality of drive shafts is divided into a plurality of frames from a base end to a tip, and the plurality of frames are continuously arranged in the drive shaft direction. The entire shaft can be extended and contracted between an extended state in which the distal end extends continuously with respect to the proximal end and a contracted state in which the distal end approaches the proximal end while overlapping in the drive axis direction. A robot comprising: an expansion / contraction unit that relatively displaces frames adjacent in a direction and expands / contracts the entire frame in a plurality of stages. 2. A robot having a plurality of drive shafts, wherein at least one drive shaft is divided into a plurality of frames from a base end to a front end, and each of the frames has a column-shaped space inside. The shape is sequentially reduced from the base end side to the distal end side in the drive axis direction, and the frames of the plurality of stages are in an extended state in which the distal end extends continuously with respect to the base end in the drive axis direction. , Between adjacent frames, the frame on the distal end side is sequentially housed in the space in the frame on the proximal end side, and is entirely expandable and contractible between a contracted state in which the distal end approaches the proximal end while overlapping in the drive axis direction. A robot, comprising: an expansion / contraction unit that relatively displaces a frame adjacent in the drive axis direction with respect to a frame in each stage, and expands / contracts the entire frame in a plurality of stages. 3. The robot according to claim 2, wherein the direction of the at least one drive axis is a vertical direction. 4. A cable for electrically connecting between the distal end and the proximal end of the plurality of frames, wherein each of the frames is supported at intervals of one frame or every other frame. An intermediate portion between the support portions is suspended in a U-shape in the space of the frame, and adjacent intermediate portions include cables suspended at different positions or with different bending radii. The robot according to claim 2 or 3, wherein: 5. A cover provided for each frame of each stage so as to cover said plurality of frames and said expansion / contraction means, wherein an end surface and a side surface of the frame are located at the most front end side in the drive axis direction. For the end cover that covers the
A side cover that covers the side surface of the frame, wherein the distal end cover or the side cover has an inner diameter that is larger than the outer diameter of the side cover that is adjacent to the base end side in the drive axis direction, and each side cover is in a contracted state of the frame. The robot according to any one of claims 1 to 4, wherein the cover is provided with a cover formed so as to enter a front end cover or a side cover adjacent to a front end side in the drive axis direction. 6. The coupling member disposed on a ridge line parallel to the drive axis direction, wherein the end cover and the side cover of each step have a substantially regular polygonal cross-sectional shape. The robot according to claim 5, further comprising a rectangular plate to be mounted. 7. A blower means for sucking or discharging air from the inside of the cover in conjunction with an expansion and contraction operation of the frame by the expansion and contraction means, at a base end of the plurality of frames. Or the robot according to 6. 8. The robot according to claim 1, wherein the expansion and contraction unit simultaneously displaces the frames of each of the plurality of stages with respect to an adjacent frame by the same amount. 9. The expansion / contraction means is such that, for any three frames adjacent to each other in the drive axis direction, the frames on both sides in the drive axis direction are mutually opposite in the direction opposite to the drive axis direction, centering on an intermediate frame. Mutual displacement means for displacing; displacement regulating means for regulating displacement between adjacent frames only in the drive axis direction; base frame on the base end side in the drive axis direction of the plurality of frames; 9. The robot according to claim 8, further comprising driving means for displacing a frame adjacent to the end frame in a driving axis direction. 10. The mutual displacement means includes: a direction changing member attached to one end of the intermediate frame in the direction of the drive shaft; and a flexible member that is folded over the direction changing member. 10. The robot according to claim 9, wherein both ends of the flexible member are respectively joined to a frame adjacent to one or the other of the drive shafts. 11. An endless flexible member, said pair of stretching members being attached to said intermediate frame at an interval in said drive shaft direction, said flexible member being stretched. Wherein one or other portion of the flexible member stretched between the stretching members and displaced in opposite directions is joined to a frame adjacent to one or the other of the drive shafts, respectively. The robot according to claim 9, wherein: 12. The mutual displacement means adjacent to each other in the drive axis direction is formed such that the strength of the flexible member is greater on the base end side in the drive axis direction than on the distal end side. The robot according to claim 10 or 11, wherein: 13. A pair of screw shafts attached to the intermediate frame in parallel with the drive shaft direction, and a frame which is screwed with one screw shaft and is adjacent to one of the drive shaft directions. The other ball screw, which is screwed with the other screw shaft and is mounted on the frame adjacent to the other in the drive axis direction, is connected in the opposite direction with the other ball screw. The robot according to claim 9, further comprising: a transmission mechanism that transmits a rotational force between one and the other screw shafts so as to be displaced. 14. A pair of link mechanisms respectively connected between the intermediate frame and a frame adjacent to one and the other in the drive shaft direction so as to be displaced in mutually opposite directions. 10. The robot according to claim 9, comprising: 15. The frame of each stage has a substantially rectangular or U-shaped cross section perpendicular to the drive shaft, and between adjacent frames, a frame on a distal end side in a drive axis direction is a base end side. The mutual displacement means adjacent to each other in the drive axis direction are shifted in phase by one step so as to be located on the opposite side surfaces of the same frame. The robot according to any one of claims 9 to 14, wherein the robot is arranged on a side surface of each frame. 16. The frame of each step has a substantially rectangular or U-shaped cross section perpendicular to the drive shaft, and each surface is dividable. The robot according to any one of claims 9 to 15, wherein the mounting surface is shared by the frames of each stage.