JPH1154079A - Electron microscopic operation-interlocking television camera - Google Patents
Electron microscopic operation-interlocking television cameraInfo
- Publication number
- JPH1154079A JPH1154079A JP9208981A JP20898197A JPH1154079A JP H1154079 A JPH1154079 A JP H1154079A JP 9208981 A JP9208981 A JP 9208981A JP 20898197 A JP20898197 A JP 20898197A JP H1154079 A JPH1154079 A JP H1154079A
- Authority
- JP
- Japan
- Prior art keywords
- image
- television camera
- signal
- mode
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000003917 TEM image Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 244000145845 chattering Species 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は電子顕微鏡用のテレ
ビカメラに係わり、特に観察目的に応じて間欠画モード
と動画モードとを切り換えるようにした電子顕微鏡操作
連動型テレビカメラに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a television camera for an electron microscope, and more particularly to an electron microscope operation-linked television camera which switches between an intermittent image mode and a moving image mode according to the purpose of observation.
【０００２】[0002]
【従来の技術】透過電子顕微鏡用テレビカメラを開発す
るに当たり、観察上の操作性と記録上の高画質の観点か
ら、２種類の撮影モードが必要であった。このうちの１
つを動画モード、他方を間欠画モードと呼ぶ。動画モー
ドでは３０フレーム／秒のスピードで画像表示を行って
いるので、動的な被写体に適し、視野探し、フォーカス
合わせ、非点補正調整などに用いられる。一方、間欠画
モードの表示スピードは８フレーム／秒から０．５フレ
ーム／秒と遅くなっている。しかしＣＣＤのような受像
素子に蓄えられる電荷の量がその蓄積時間に比例して多
くなるので、大きな出力信号が得られる。2. Description of the Related Art In developing a television camera for a transmission electron microscope, two types of photographing modes are required from the viewpoint of operability in observation and high image quality in recording. One of these
One is called a moving image mode and the other is called an intermittent image mode. In the moving image mode, an image is displayed at a speed of 30 frames / second, so that it is suitable for a dynamic subject, and is used for searching for a visual field, adjusting a focus, and adjusting astigmatism. On the other hand, the display speed in the intermittent image mode is as slow as 8 frames / sec to 0.5 frames / sec. However, since the amount of charge stored in the image receiving element such as a CCD increases in proportion to the storage time, a large output signal can be obtained.
【０００３】その結果、後段の増幅器の増幅率を下げる
ことができ、電気的なノイズを低減できる。つまり、間
欠画モードではノイズの少ない高画質像を作ることがで
き、プリントアウトやデジタル化など記録的な用途に向
いている。また、被写体の細部を観察するのにも適して
いる。したがって、テレビカメラは被写体に対する観察
目的によってその撮影モードを切り換える必要があっ
た。[0003] As a result, the amplification factor of the subsequent amplifier can be reduced, and electrical noise can be reduced. That is, in the intermittent image mode, a high-quality image with little noise can be created, and is suitable for recording use such as printout and digitization. It is also suitable for observing details of a subject. Therefore, the television camera needs to switch its shooting mode depending on the purpose of observing the subject.
【０００４】[0004]
【発明が解決しようとする課題】透過電子顕微鏡の操作
は「視野探し」、「フォーカス合わせ」、「視野細部確
認」、「記録」を頻繁に繰り返す。この度毎にテレビカ
メラの２種類の撮影モード切り換えを手動で行っていた
のでは操作性が悪くなり、テレビカメラの透過電子顕微
鏡への導入が難しくなってきた。In the operation of the transmission electron microscope, "field search", "focusing", "field detail confirmation", and "recording" are frequently repeated. If the two types of shooting modes of the television camera were manually switched each time, the operability deteriorated, and it became difficult to introduce the television camera into the transmission electron microscope.
【０００５】本発明は上記課題を解決するためのもの
で、観察目的に応じて撮影モードを自動的に切り換え可
能にして操作性を向上させること目的とする。An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to improve operability by automatically switching a photographing mode according to an observation purpose.
【０００６】[0006]
【課題を解決するための手段】本発明は、撮影画像取込
み時間が可変な電子顕微鏡用テレビカメラにおいて、観
察する画像を変化させる信号または観察する画像自体の
変化信号を検出し、検出信号に応じて撮影画像取込み時
間を変化させて撮影するようにしたことを特徴とする。
また、本発明は、動画モードと間欠画モードで撮影画像
取込み時間が切り換えられ、さらに間欠画モードにおい
て複数種類の撮影画像取込み時間が選択可能であること
を特徴とする。SUMMARY OF THE INVENTION According to the present invention, there is provided a television camera for an electron microscope in which a captured image capturing time is variable, a signal for changing an image to be observed or a change signal of the image to be observed itself is detected, and the detected signal is changed. In this case, the photographing is performed while changing the photographed image taking time.
Further, the present invention is characterized in that a captured image capturing time is switched between a moving image mode and an intermittent image mode, and that a plurality of types of captured image capturing times can be selected in the intermittent image mode.
【０００７】[0007]
【発明の実施の形態】以下、本発明の実施の形態につい
て説明する。図１は本発明の電子顕微鏡操作連動型テレ
ビカメラの実施の形態の例を示すブロック図である。１
は透過電子顕微鏡（以下、ＴＥＭと言う）の操作部であ
り、試料移動ノブ１１、フォーカスノブ１２、輝度調整
ノブ１３が設けられ、これらを操作すると、その操作量
を表すパルス信号がパルス発生器２１〜２３から発生す
る。パルス発生器２１は、試料駆動機構３の駆動回路３
１に接続され、駆動回路３１で試料台３２をＸ、Ｙ軸方
向へモータ駆動するようになっている。したがって、試
料移動ノブ１１を操作することにより、操作者の意図に
応じて試料を移動させることができる。Embodiments of the present invention will be described below. FIG. 1 is a block diagram showing an example of an embodiment of an electron microscope operation-linked television camera according to the present invention. 1
Reference numeral denotes an operation unit of a transmission electron microscope (hereinafter, referred to as a TEM), which is provided with a sample moving knob 11, a focus knob 12, and a brightness adjustment knob 13. When these are operated, a pulse signal indicating the operation amount is generated by a pulse generator. Generated from 21-23. The pulse generator 21 is a driving circuit 3 of the sample driving mechanism 3.
The driving circuit 31 drives the sample stage 32 in the X and Y directions. Therefore, by operating the sample movement knob 11, the sample can be moved according to the operator's intention.
【０００８】フォーカスノブ１２を操作すると、パルス
発生器２２から操作に応じたパルス信号が発生して本体
ＣＰＵ２４に取り込まれる。本体ＣＰＵ２４は取り込ん
だ信号に応じてレンズ電流制御回路２５を通して対物レ
ンズの励磁電流を変え、蛍光板に表示される試料のＴＥ
Ｍ像のフォーカス状態を変化させる。When the focus knob 12 is operated, a pulse signal corresponding to the operation is generated from the pulse generator 22 and is taken into the main body CPU 24. The main body CPU 24 changes the excitation current of the objective lens through the lens current control circuit 25 in accordance with the received signal, and changes the TE of the sample displayed on the fluorescent screen.
The focus state of the M image is changed.
【０００９】輝度調整ノブ１３を操作すると、パルス発
生器２３から操作に応じたパルス信号が発生して本体Ｃ
ＰＵ２４に取り込まれる。本体ＣＰＵ２４は取り込んだ
信号に応じてレンズ電流制御回路２５を通して照射系レ
ンズの励磁電流を変え、試料上に照射される電子線密度
を変化させる。この電子線密度の変化に伴ってＴＥＭ像
の明るさが変化する。When the brightness adjustment knob 13 is operated, a pulse signal corresponding to the operation is generated from the pulse generator 23, and the main body C
The data is taken into the PU 24. The main body CPU 24 changes the excitation current of the irradiation system lens through the lens current control circuit 25 according to the received signal, and changes the electron beam density irradiated on the sample. As the electron beam density changes, the brightness of the TEM image changes.
【００１０】一方、パルス発生器２１〜２３は変化検出
回路４に接続されており、ＴＥＭ像に何らかの変化を与
える操作部１の各操作ノブ１１〜１３の操作に応じてパ
ルス発生器２１〜２３から発生したパルス信号は、変化
検出回路４の論理和回路４１に導かれ、ＴＥＭ像に変化
があったことが検出される。論理和回路４１の出力は後
述する動画／間欠画切り換え信号であり、チャタンリン
グを防止するための遅延回路４２を通してテレビカメラ
コントロールユニット５に加えられる。On the other hand, the pulse generators 21 to 23 are connected to the change detection circuit 4 and operate in accordance with the operation of each of the operation knobs 11 to 13 of the operation section 1 for giving a certain change to the TEM image. Is supplied to the OR circuit 41 of the change detection circuit 4 to detect that the TEM image has changed. The output of the OR circuit 41 is a moving image / intermittent image switching signal to be described later and is applied to the television camera control unit 5 through a delay circuit 42 for preventing chattering.
【００１１】テレビカメラコントロールユニット５で
は、遅延回路４２からの動画／間欠画切り換え信号が、
バッファ増幅器５１、切り換えスイッチ５２を通してカ
メラ制御回路５４の入力ポートに加えられる。ＴＥＭ像
に変化があった場合は変化に追随できるように動画モー
ドに切り換えられて１／３０秒読み取り周期の入力ポー
トに信号が加えられ、テレビカメラ６は、例えばＣＣＤ
読み取りセンサで１／３０秒周期で選択された視野の像
を読み取り、読み取った画像信号をフレーム・メモリ５
５に送り、フレーム・メモリからは30フレーム／秒で画
像信号が出力される。ＴＥＭ像に変化がなく、間欠画モ
ードが選択された場合には、選択スイッチ５３で選択さ
れた読み取り周期の入力ポートに動画／間欠画切り換え
信号が加えられ、テレビカメラ６は選択された読み取り
周期で、視野の像を読み取り、読み取った画像信号をフ
レーム・メモリ５５に送る。選択スイッチ５３での読み
取り周期の設定は、カメラ画像を観察しながら最適なも
のに設定される。なお、テレビカメラ６による電子顕微
鏡像の撮影は、画像観察領域７として示すように、鏡筒
７１の一部に設けられた鉛ガラス７２を通して行われ、
投影レンズ７６から電子線７５によって蛍光板７４上に
投影される像によって生ずる蛍光を反射鏡７３を介して
ＣＣＤに取込むことによって行われる。In the television camera control unit 5, the moving picture / intermittent picture switching signal from the delay circuit 42 is
The signal is applied to an input port of a camera control circuit 54 through a buffer amplifier 51 and a changeover switch 52. When there is a change in the TEM image, the mode is switched to the moving image mode so that the change can be followed, and a signal is applied to the input port with a 1/30 second reading cycle.
An image of the selected visual field is read by the reading sensor at a period of 1/30 second, and the read image signal is stored in the frame memory 5.
5 and an image signal is output from the frame memory at 30 frames / sec. When there is no change in the TEM image and the intermittent image mode is selected, a moving image / intermittent image switching signal is applied to the input port of the reading period selected by the selection switch 53, and the television camera 6 sets the selected reading period. Then, the image of the visual field is read, and the read image signal is sent to the frame memory 55. The setting of the reading cycle by the selection switch 53 is set to an optimum one while observing the camera image. The photographing of the electron microscope image by the television camera 6 is performed through a lead glass 72 provided on a part of a lens barrel 71 as shown as an image observation region 7.
Fluorescence generated by an image projected onto the fluorescent screen 74 by the electron beam 75 from the projection lens 76 is taken into the CCD via the reflecting mirror 73.
【００１２】次に、図２のタイムチャートを参照しなが
らより詳細に動作を説明する。ＴＥＭ操作部１の各操作
ノブ１１〜１３のいずれかを操作することによりパルス
発生器２１〜２３からは、図２（ａ）に示すように、例
えばパルス間隔ｔ（ｓ）のパルスが発生し（図のＨ：駆
動信号）、論理和回路４１を通して遅延回路４２に加え
られる。図２（ｂ）に示すように、遅延回路４２からは
最初のパルスの立ち上がりをトリガとして出力が立ち上
がり、時間遅れｔd （ｓ）（ｔ＜ｔd ）で立ち下がる
（Ｈ：動画モード信号、Ｌ：間欠画モード信号）ので、
ｔd 以内にパルスが入力されると出力は連続した「Ｈ」
レベル波形となる。Next, the operation will be described in more detail with reference to the time chart of FIG. By operating any of the operation knobs 11 to 13 of the TEM operation unit 1, the pulse generators 21 to 23 generate, for example, pulses at a pulse interval t (s) as shown in FIG. (H: drive signal in the figure) is applied to the delay circuit 42 through the OR circuit 41. As shown in FIG. 2B, the output rises from the delay circuit 42 triggered by the rise of the first pulse, and falls with a time delay t d (s) (t <t d ) (H: moving image mode signal, L: intermittent image mode signal)
and output pulse is input within t d was continuous "H"
It becomes a level waveform.
【００１３】テレビカメラコントロールユニット５の制
御は、動画／間欠画切り換え入力ポートへの信号レベル
が「Ｈ」のときに動画モード、「Ｌ」のときに間欠画モ
ードになるようにプログラムされているので、変化検出
回路４の出力に対応してテレビカメラ６の撮影モードが
切り換わる。つまり、操作者が各操作ノブ１１〜１３の
いずれかを操作すると同時に、テレビカメラは動画モー
ドに切り換わり、その操作を停止してからｔd （ｓ）後
に自動的に間欠画モードに切り換わる。ｔd （ｓ）の実
際の時間を１〜２秒程度に設定しておけば、この自動切
り換えは操作上何の不都合も感じられない。The control of the television camera control unit 5 is programmed so that the moving image mode is set when the signal level to the moving image / intermittent image switching input port is "H", and the intermittent image mode is set when the signal level is "L". Therefore, the shooting mode of the television camera 6 is switched according to the output of the change detection circuit 4. That is, at the same time when the operator operates any of the operation knobs 11 to 13, the TV camera switches to the moving image mode, and automatically switches to the intermittent image mode after t d (s) after stopping the operation. . If the actual time of t d (s) is set to about 1-2 seconds, this automatic switching does not cause any inconvenience in operation.
【００１４】本発明は上記例に限定されるものではな
く、いろいろな変形が可能である。例えば、図１の構成
では操作ノブからの信号を検出する形で説明したが、Ｔ
ＥＭ本体の制御を行っているＣＰＵ２４から変化信号を
受け取る方式としてもよい。また、テレビカメラ側で撮
影した画像に変化があれば、自動的に動画モードに切り
換わり、また、その画像に変化がなくなった時点で間欠
画に移行する方式としてもよい。また、動画／間欠画の
２種類のモードに分けて考えるのではなく、撮影取り込
み時間（シャッタ時間）を可変にする方式としてもよ
い。The present invention is not limited to the above example, and various modifications are possible. For example, although the configuration of FIG. 1 has been described by detecting a signal from the operation knob,
A method of receiving a change signal from the CPU 24 controlling the EM body may be adopted. Alternatively, if there is a change in the image captured by the television camera, the mode may be automatically switched to the moving image mode, and the image may be switched to an intermittent image when the image stops changing. Also, instead of considering the two modes of moving image / intermittent image separately, it is also possible to adopt a method in which the capturing time (shutter time) is made variable.
【００１５】[0015]
【発明の効果】以上のように本発明によれば、テレビカ
メラ側に外部入力による動画／間欠画切り換え端子を設
け、電子顕微鏡像に変化の出る操作がなされたこと、或
いは電子顕微鏡像自体に変化があったことが検出される
と、その検出信号が動画／間欠画切り換え信号として加
えられるので、動画／間欠画の自動切り換えが可能にな
る。また、操作者がその都度必要に応じて動画／間欠画
の切り換えスイッチを操作しなくてよいので、テレビ操
作フリーのシステムが可能となり、操作性を向上させる
ことができる。As described above, according to the present invention, a moving image / intermittent image switching terminal by external input is provided on the television camera side, and an operation of changing the electron microscope image is performed, or the electron microscope image itself is changed. When a change is detected, the detection signal is added as a moving image / intermittent image switching signal, so that automatic switching between the moving image and the intermittent image can be performed. In addition, since the operator does not need to operate the moving image / intermittent image changeover switch as needed each time, a TV operation free system is possible, and operability can be improved.
【図１】 本発明の電子顕微鏡操作連動型テレビカメラ
の実施の形態の例を示すブロック図である。FIG. 1 is a block diagram illustrating an example of an embodiment of an electron microscope operation-linked television camera according to the present invention.
【図２】 タイムチャートを示す図である。FIG. 2 is a diagram showing a time chart.
１…ＴＥＭ操作部、２…ＴＥＭ制御部、３…試料駆動機
構、４…変化検出回路、５…テレビカメラコントロール
ユニット、６…テレビカメラ、７…画像観察領域。DESCRIPTION OF SYMBOLS 1 ... TEM operation part, 2 ... TEM control part, 3 ... Sample drive mechanism, 4 ... Change detection circuit, 5 ... TV camera control unit, 6 ... TV camera, 7 ... Image observation area.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 家永勝治 東京都昭島市武蔵野三丁目１番２号 日本 電子株式会社内 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Katsuharu Ienaga 3-1-2 Musashino, Akishima-shi, Tokyo Japan Electronics Co., Ltd.
Claims (2)
用テレビカメラにおいて、観察する画像を変化させる信
号または観察する画像自体の変化信号を検出し、検出信
号に応じて撮影画像取込み時間を変化させて撮影するよ
うにしたことを特徴とする電子顕微鏡操作連動型テレビ
カメラ。1. A television camera for an electron microscope in which a captured image capturing time is variable, a signal for changing an observed image or a change signal of the observed image itself is detected, and the captured image capturing time is changed according to the detected signal. An electron microscope operation-linked television camera, characterized in that the camera is adapted to take pictures.
ドと間欠画モードで撮影画像取込み時間が切り換えら
れ、さらに間欠画モードにおいて複数種類の撮影画像取
込み時間が選択可能であることを特徴とする電子顕微鏡
操作連動型テレビカメラ。2. The apparatus according to claim 1, wherein a captured image capturing time is switched between a moving image mode and an intermittent image mode, and a plurality of types of captured image capturing times are selectable in the intermittent image mode. Television camera linked to electron microscope operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9208981A JPH1154079A (en) | 1997-08-04 | 1997-08-04 | Electron microscopic operation-interlocking television camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9208981A JPH1154079A (en) | 1997-08-04 | 1997-08-04 | Electron microscopic operation-interlocking television camera |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1154079A true JPH1154079A (en) | 1999-02-26 |
Family
ID=16565367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9208981A Withdrawn JPH1154079A (en) | 1997-08-04 | 1997-08-04 | Electron microscopic operation-interlocking television camera |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1154079A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001227932A (en) * | 1999-11-30 | 2001-08-24 | Minoru Ito | Mask inspection apparatus |
| JP2002505437A (en) * | 1998-03-05 | 2002-02-19 | ウェイク フォレスト ユニバーシティ | Method and apparatus for three-dimensional image generation using tomographic computed tomography |
| US6452237B1 (en) | 1998-08-07 | 2002-09-17 | Monolith Company, Ltd. | Artificial neuron on the base of β-driven threshold element |
| JP2004006219A (en) * | 2002-04-11 | 2004-01-08 | Keyence Corp | Electron microscope, operating method of electron microscope, operation program of electron microscope and recording medium capable of reading by computer |
-
1997
- 1997-08-04 JP JP9208981A patent/JPH1154079A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002505437A (en) * | 1998-03-05 | 2002-02-19 | ウェイク フォレスト ユニバーシティ | Method and apparatus for three-dimensional image generation using tomographic computed tomography |
| JP4816991B2 (en) * | 1998-03-05 | 2011-11-16 | ウェイク フォレスト ユニバーシティ | Method and apparatus for 3D image generation using tomographic computer tomography |
| US6452237B1 (en) | 1998-08-07 | 2002-09-17 | Monolith Company, Ltd. | Artificial neuron on the base of β-driven threshold element |
| JP2001227932A (en) * | 1999-11-30 | 2001-08-24 | Minoru Ito | Mask inspection apparatus |
| JP2004006219A (en) * | 2002-04-11 | 2004-01-08 | Keyence Corp | Electron microscope, operating method of electron microscope, operation program of electron microscope and recording medium capable of reading by computer |
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