JPH1137662A - Baking device of plate to be baked - Google Patents

Baking device of plate to be baked

Info

Publication number
JPH1137662A
JPH1137662A JP19218597A JP19218597A JPH1137662A JP H1137662 A JPH1137662 A JP H1137662A JP 19218597 A JP19218597 A JP 19218597A JP 19218597 A JP19218597 A JP 19218597A JP H1137662 A JPH1137662 A JP H1137662A
Authority
JP
Japan
Prior art keywords
fired
plate
crucible
plates
firing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19218597A
Other languages
Japanese (ja)
Other versions
JP3440981B2 (en
Inventor
Yoshihiro Ohinata
義宏 大日向
Masaharu Yamada
雅治 山田
Hideo Oshima
秀夫 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP19218597A priority Critical patent/JP3440981B2/en
Publication of JPH1137662A publication Critical patent/JPH1137662A/en
Application granted granted Critical
Publication of JP3440981B2 publication Critical patent/JP3440981B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To simultaneously bake a plurality of plates to be baked with uniform quality, by eliminating the contact resistance with an inner bottom surface of a baking furnace or a crucible of the plates to be baked to unify the force to be applied to the plates to be baked. SOLUTION: A baking device is provided with a holding block 13 having a perpendicular surface 13 which is arranged on each side of a plurality of plates 12 to be baked arranged in a baking furnace or a crucible 11 in an upright condition, and an upwardly inclined surface 13b formed on the opposite side thereto, and a block 14 for a pair of weights having a downwardly inclined surface 14b arranged on each side of the holding block and an end face 14a formed in contact with an inner wall of the crucible 11. A receiving plate for the plate to be baked of the same material as that of the plate 12 to be baked is provided between an inner bottom surface 11a of the crucible 11 and a lower end face of a plurality of plates 12 to be baked. The receiving plate 16 and a pair of holding blocks 13 are placed on the inner bottom surface 11a of the crucible through a plurality of small balls 17, and a plurality of projecting bars are preferably formed on the upwardly inclined surface 13b.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、各種のセラミック
スからなる板状の被焼成物を焼成、熱処理する被焼成板
の焼成装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sintering apparatus for sintering a plate-like object made of various ceramics and heat-treating the object.

【0002】[0002]

【従来の技術】この種の板状の被焼成物を平板用の焼成
治具を用いて焼成する場合、被焼成物が小さいときには
焼成炉又はルツボ内部に単品毎に上向きに並べて配置し
て焼成される。一方、被焼成板が大きいときには複数枚
重ねた状態で焼成される。この被焼成板を上下方向に複
数枚重ねた状態で一度に焼成した場合には、下方に位置
する被焼成板と上方に位置する被焼成板とでは焼成時に
かかる荷重が異なり、焼成後における焼成板の品質にば
らつきが生じる不具合がある。また、焼成時にかかる荷
重を均一化するために溝付きの焼成用台板を使用して被
焼成板をその溝に複数枚立てて焼成することも考えられ
るが、焼成時における被焼成板の変形を防止することが
できない問題点がある。
2. Description of the Related Art When a plate-shaped object to be fired is fired using a firing jig for a flat plate, if the object to be fired is small, it is arranged in a firing furnace or a crucible, and is arranged in an upward direction for each item. Is done. On the other hand, when the plate to be fired is large, it is fired in a state where a plurality of sheets are stacked. When a plurality of plates to be fired are fired at a time in a state where a plurality of the plates to be fired are vertically stacked, the load applied at the time of firing differs between the plate to be fired located below and the plate to be fired located above. There is a problem that the quality of the plate varies. In order to equalize the load applied during firing, it is conceivable to use a firing base plate with a groove and to fire a plurality of plates to be fired in the grooves. There is a problem that cannot be prevented.

【0003】これらの点を解消するために、従来図4に
示すように、複数枚の被焼成板2を立てて並べて、その
立てに並んだ複数枚の被焼成板2の両側に、両側の被焼
成板2の面と滑動できる縦面と反対側に斜面6を有する
重量部材5を置き、この斜面6に滑動できる斜面7を内
側にそれぞれ有する固定部材4を有する焼成用治具1が
提案されている(特開平5−296670)。この焼成
用治具1では、複数枚の被焼成板2を立てて並べて焼成
すると、被焼成板2が加熱されて収縮していくに従い、
その両側にある重量部材5が固定部材4の斜面7に沿っ
て自重により降下していくことにより、その力で立てて
並べられた複数枚の被焼成板2を両側から押すようにな
っている。このため、立てて並べられた複数枚の被焼成
板2は常に両側から支持される形になり、倒れることが
なく変形が抑制されて複数枚の被焼成板が同時に焼成さ
れることが期待されている。
In order to solve these problems, conventionally, as shown in FIG. 4, a plurality of plates 2 to be fired are erected and arranged on both sides of the plurality of plates 2 to be fired. A firing jig 1 is proposed in which a weight member 5 having a slope 6 is placed on a side opposite to a vertical surface slidable with the surface of the plate 2 to be fired, and a fixing member 4 having a slidable slope 7 inside on the slope 6 is provided. (JP-A-5-296670). In this firing jig 1, when a plurality of fired plates 2 are erected and fired side by side, as the fired plate 2 is heated and contracted,
The weight members 5 on both sides thereof are lowered by their own weight along the slope 7 of the fixing member 4, so that the plurality of fired plates 2 arranged vertically by the force are pushed from both sides. . For this reason, the plurality of fired plates 2 arranged vertically are always supported from both sides, and it is expected that the deformation is suppressed without falling down and the plurality of fired plates are fired simultaneously. ing.

【0004】[0004]

【発明が解決しようとする課題】しかし、上述した治具
1では被焼成板2の加熱収縮に従って、立てて並べた複
数枚の被焼成板2の両側の重量部材5が、固定部材4の
斜面7に沿って降下する必要から、必然的に重量部材5
の下部は被焼成板2に接触しておらず、複数枚の被焼成
板2を両側から押す力が被焼成板2に均一に加わらない
未だ解決すべき課題が残存していた。また、立てて並べ
られた複数枚の被焼成板2の下端面は焼成炉又はルツボ
の内底面3と接触するために被焼成板2の加熱収縮に伴
う移動がその内底面3との接触抵抗力により阻害される
恐れもある。本発明の目的は、被焼成板と焼成炉又はル
ツボの内底面と接触抵抗力をなくし、被焼成板に加わる
力を均一化して被焼成板を複数枚同時に均一な品質で焼
成し得る被焼成板の焼成装置を提供することにある。
However, according to the jig 1 described above, the weight members 5 on both sides of the plurality of fired plates 2 arranged vertically stand on the slope of the fixing member 4 in accordance with the heat shrinkage of the fired plate 2. 7, the weight member 5
Is not in contact with the plate 2 to be fired, and the force to press the plurality of plates 2 from both sides is not uniformly applied to the plate 2 to be fired. In addition, since the lower end surfaces of the plurality of fired plates 2 arranged vertically are in contact with the inner bottom surface 3 of the firing furnace or crucible, the movement caused by the heat shrinkage of the fired plate 2 causes the contact resistance with the inner bottom surface 3. There is also a risk of being hindered by force. The object of the present invention is to eliminate the contact resistance between the plate to be fired and the inner bottom surface of the firing furnace or crucible, to make the force applied to the plate to be fired uniform, and to fire a plurality of plates to be fired simultaneously with uniform quality. An object of the present invention is to provide an apparatus for firing a plate.

【0005】[0005]

【課題を解決するための手段】請求項1に係る発明は、
図1に示すように、焼成炉又はルツボ11の内部に立て
て並べておかれる複数枚の被焼成板12の両側に配置さ
れ被焼成板12の両端に密着可能に形成された鉛直面1
3aと鉛直面13aと反対側に形成された上向き傾斜面
13bとを有する一対の保持用ブロック13,13と、
一対の保持用ブロック13,13の両側に配置され上向
き傾斜面13bと同一傾斜角度で形成された下向き傾斜
面14bと下向き傾斜面14bと反対側に形成されルツ
ボ11の内壁に接触可能に形成された端面14aとを有
する一対の重し用ブロック14,14とを備え、ルツボ
11の内底面11aと複数の被焼成板12の下端面との
間に被焼成板12と同一材質を有する被焼成板の受け板
16が設けられた被焼成板の焼成装置である。
The invention according to claim 1 is
As shown in FIG. 1, a vertical surface 1 which is disposed on both sides of a plurality of fired plates 12 arranged vertically inside a firing furnace or crucible 11 and which is formed to be in close contact with both ends of the fired plate 12.
3a and a pair of holding blocks 13, 13 having an upwardly inclined surface 13b formed on the opposite side to the vertical surface 13a;
A downwardly inclined surface 14b, which is disposed on both sides of the pair of holding blocks 13, 13 and is formed at the same inclination angle as the upwardly inclined surface 13b, is formed on the opposite side to the downwardly inclined surface 14b and is formed so as to be able to contact the inner wall of the crucible 11. And a pair of weight blocks 14 and 14 having an end surface 14a formed between the inner bottom surface 11a of the crucible 11 and the lower end surfaces of the plurality of plates 12 to be fired. This is a firing device for a plate to be fired provided with a plate receiving plate 16.

【0006】複数の被焼成板12を受け板16の上に複
数枚立てて並べて焼成することにより一度の焼成作業に
より複数の被焼成板を同時に焼成することを可能にす
る。保持用ブロック13,13の両側に配置された一対
の重し用ブロック14,14は自重により降下すること
により保持用ブロック13を移動させ、立てて並べられ
た複数の被焼成板12が加熱収縮する際に一対の保持用
ブロック13,13を介して両側から均一な力で押す。
受け板16は焼成時における被焼成板12の収縮と同一
の速度及び比率で収縮し、被焼成板12と焼成炉又はル
ツボ11の内底面11aとの間に生じる接触抵抗力を解
消する。
By firing a plurality of plates 12 to be fired side by side on a receiving plate 16, a plurality of plates 12 can be fired simultaneously by a single firing operation. The pair of weight blocks 14, 14 disposed on both sides of the holding blocks 13, 13 are moved by their own weight to move the holding block 13, and the plurality of fired plates 12 arranged upright shrink under heat. When pushing, it pushes with uniform force from both sides via a pair of holding blocks 13 and 13.
The receiving plate 16 contracts at the same speed and rate as the contraction of the fired plate 12 during firing, and eliminates the contact resistance generated between the fired plate 12 and the inner bottom surface 11a of the firing furnace or crucible 11.

【0007】請求項2に係る発明は、請求項1に係る発
明であって、受け板16と一対の保持用ブロック13,
13が複数の小球17を介し焼成炉又はルツボ11の内
底面11aに置かれた被焼成板の焼成装置である。小球
17は被焼成板12の焼成時における受け板16の収縮
及び保持用ブロック13の移動を回転することにより容
易にする。請求項3に係る発明は、請求項1又は2に係
る発明であって、図3に示すように、上向き傾斜面13
bに傾斜方向に沿って複数の凸条13cが形成された被
焼成板の焼成装置である。複数の凸条13cを保持用ブ
ロック13に形成することにより、凸条13cにおける
頂点のみが重し用ブロック14の下向き傾斜面14bに
接触し、上向き傾斜面13bと下向き傾斜面14bとの
接触面積を縮小させ、重し用ブロック14が自重により
降下する際に発生する摺動抵抗を低減させる。
The invention according to claim 2 is the invention according to claim 1, wherein the receiving plate 16 and the pair of holding blocks 13,
Reference numeral 13 denotes a firing apparatus for firing a plate to be fired placed on the inner bottom surface 11a of the firing furnace or crucible 11 via a plurality of small balls 17. The small balls 17 facilitate the contraction of the receiving plate 16 and the movement of the holding block 13 during the firing of the plate 12 to be fired. The invention according to claim 3 is the invention according to claim 1 or 2, and as shown in FIG.
This is a firing apparatus for a plate to be fired, in which a plurality of ridges 13c are formed in b along an inclined direction. By forming the plurality of ridges 13c on the holding block 13, only the vertices of the ridges 13c contact the downwardly inclined surface 14b of the weight block 14, and the contact area between the upwardly inclined surface 13b and the downwardly inclined surface 14b. To reduce the sliding resistance generated when the weight block 14 descends by its own weight.

【0008】[0008]

【発明の実施の形態】次に本発明の実施の形態を図面に
基づいて詳しく説明する。図1及び図2に示すように、
本発明の焼成装置はルツボ11の内部に立てて並べてお
かれる複数枚の被焼成板12の両側に配置された一対の
保持用ブロック13,13と、その一対の保持用ブロッ
ク13,13の両側に配置された一対の重し用ブロック
14,14とを備える。保持用ブロック13は被焼成板
12の両端に密着可能に形成された鉛直面13aと、こ
の鉛直面13aと反対側に形成された上向き傾斜面13
bとを有し、図3に示すように、上向き傾斜面13bに
は傾斜方向に沿って複数の凸条13cが形成される。本
実施の形態における凸条13cは断面が三角形状を有し
ており、頂点が後述する重し用ブロック14の下向き傾
斜面14bと接触するように構成される。保持用ブロッ
ク13の材質は、被焼成板12との接触による反応が極
力少ないものが選定され、MgO、Al23、Zr
2、人造黒鉛等が例示される。
Embodiments of the present invention will now be described in detail with reference to the drawings. As shown in FIGS. 1 and 2,
The firing apparatus according to the present invention includes a pair of holding blocks 13, 13 disposed on both sides of a plurality of plates to be fired 12, which are arranged vertically inside the crucible 11, and both sides of the pair of holding blocks 13, 13. And a pair of weighting blocks 14 and 14 arranged at the same time. The holding block 13 includes a vertical surface 13a formed so as to be in close contact with both ends of the plate 12 to be fired, and an upwardly inclined surface 13 formed on the opposite side to the vertical surface 13a.
b, and as shown in FIG. 3, a plurality of ridges 13c are formed on the upwardly inclined surface 13b along the inclined direction. The ridge 13c in the present embodiment has a triangular cross section, and is configured so that its apex contacts a downwardly inclined surface 14b of the weight block 14 described later. The material of the holding block 13 is selected so that the reaction by contact with the plate to be fired 12 is as small as possible, such as MgO, Al 2 O 3 , Zr.
O 2 and artificial graphite are exemplified.

【0009】図1及び図2に戻って、一対の保持用ブロ
ック13,13の両側に配置される一対の重し用ブロッ
ク14,14は、保持用ブロック13の上向き傾斜面1
3bと同一傾斜角度で形成された下向き傾斜面14b
と、この下向き傾斜面14bと反対側にはルツボ11の
内壁に接触可能に形成された端面14aが形成される。
重し用ブロック14は下向き傾斜面14bが保持用ブロ
ック13の上向き傾斜面13bに接触して、自重で降下
することにより保持用ブロック13を移動させるように
構成され、立てて並べられた複数枚の被焼成板12がな
ければ、ルツボ11の内底面下まで落ちてしまうもので
ある。従って、被焼成板12を、図のように、複数枚の
被焼成板12を立てて並べたときには、その被焼成板1
2により、図示のように、ある程度上昇した位置で留め
られることになる。
Returning to FIG. 1 and FIG. 2, a pair of weight blocks 14, 14 arranged on both sides of the pair of holding blocks 13, 13 are provided on the upwardly inclined surface 1 of the holding block 13.
Downward inclined surface 14b formed at the same inclination angle as 3b
On the side opposite to the downwardly inclined surface 14b, an end surface 14a formed so as to be able to contact the inner wall of the crucible 11 is formed.
The weight block 14 is configured such that the downwardly inclined surface 14b comes into contact with the upwardly inclined surface 13b of the holding block 13 and moves down by its own weight to move the holding block 13. If the plate 12 to be fired does not exist, the crucible 11 will fall to below the inner bottom surface. Therefore, as shown in the figure, when a plurality of the to-be-fired plates 12 are arranged side by side as shown in FIG.
As a result, as shown in FIG. 2, the position is maintained at a somewhat elevated position.

【0010】ルツボ11の内底面と立てて並べられた複
数の被焼成板12の下端面との間には被焼成板12と同
一材質を有する被焼成板の受け板16が設けられる。受
け板16は立てて並べられた複数枚の被焼成板12の下
端面が形成する四角形状より僅かに小さい四角状の外形
寸法に形成され、複数枚の被焼成板12の両側に配置さ
れた一対の保持用ブロック13,13の間に位置するよ
うに構成される。この受け板16と一対の保持用ブロッ
ク13,13は複数の小球17を介してルツボ11の内
底面11aにおかれ、受け板16と一対の保持用ブロッ
ク13,13はルツボ11の内底面11aに対して移動
が容易に行われるようになっている。なお、小球17の
材質は、焼成時の温度に十分耐え得るものが選定され、
MgO、Al23、ZrO2、サイアロン等からなる直
径が4〜30mm程度のものが好ましい。
Between the inner bottom surface of the crucible 11 and the lower end surfaces of the plurality of fired plates 12 arranged vertically, a fired plate receiving plate 16 made of the same material as the fired plate 12 is provided. The receiving plate 16 is formed to have a rectangular outer shape slightly smaller than the rectangular shape formed by the lower end surfaces of the plurality of fired plates 12 arranged vertically, and is disposed on both sides of the plurality of fired plates 12. It is configured to be located between the pair of holding blocks 13, 13. The receiving plate 16 and the pair of holding blocks 13, 13 are placed on the inner bottom surface 11 a of the crucible 11 via a plurality of small balls 17, and the receiving plate 16 and the pair of holding blocks 13, 13 are connected to the inner bottom surface of the crucible 11. 11a is easily moved. The material of the small ball 17 is selected from materials that can withstand the temperature during firing.
MgO, Al 2 O 3, ZrO 2, the diameter composed of a sialon and the like is preferably about 4 to 30 mm.

【0011】このように構成された被焼成板の焼成装置
では、複数枚の被焼成板12を受け板16の上に複数枚
立てて並べて焼成すると、被焼成板12は加熱されて収
縮する。この場合、受け板16は被焼成板12の収縮と
同一の速度及び比率で収縮し、被焼成板12のルツボ1
1の内底面11aとの間に生じる接触抵抗力を解消す
る。また、保持用ブロック13,13の両側に配置され
た一対の重し用ブロック14,14は図1の実線矢印で
示すように、自重で降下することにより被焼成板12の
収縮に伴い、保持用ブロック13を図の破線で示すよう
に移動させる。即ち、一対の重し用ブロック14,14
には、自重により常に降下しようとする力があり、その
力で、並べられた複数枚の被焼成板12を、一対の保持
用ブロック13,13を介して両側から均一な力で押す
ようになっている。
In the apparatus for firing a plate to be fired configured as described above, when a plurality of the sheets to be fired 12 are erected and fired side by side on a receiving plate 16, the plate to be fired shrinks. In this case, the receiving plate 16 contracts at the same speed and at the same rate as the contraction of the plate 12 to be fired, and the crucible 1 of the plate 12 to be fired.
The contact resistance generated between the inner bottom surface 11a and the inner bottom surface 11a is eliminated. The pair of weight blocks 14, 14 disposed on both sides of the holding blocks 13, 13 are lowered by their own weight as shown by solid arrows in FIG. Block 13 is moved as shown by the broken line in the figure. That is, the pair of weight blocks 14, 14
Has a force that always tends to descend by its own weight, and the force is used to push the plurality of fired plates 12 arranged side by side with a uniform force via a pair of holding blocks 13, 13. Has become.

【0012】受け板16の収縮及び保持用ブロック13
の移動の際、小球17は受け板16の収縮及び保持用ブ
ロック13の移動を回転することにより容易にし、保持
用ブロック13に形成された複数の凸条13cは、凸条
13cにおける頂点のみが重し用ブロック14の下向き
傾斜面14bと接触することにより接触面積を縮小さ
せ、重し用ブロック14が自重により降下する際に発生
する摺動抵抗を低減させる。なお、上述した実施の形態
ではルツボ11を使用して説明したが、ルツボの代りに
焼成炉を使用しても良い。
Block 13 for contraction and holding of receiving plate 16
During the movement, the small ball 17 facilitates the contraction of the receiving plate 16 and the movement of the holding block 13 by rotating, and the plurality of ridges 13c formed on the holding block 13 are formed only at the apex of the ridge 13c. The contact area is reduced by contacting the downwardly inclined surface 14 b of the weight block 14, and the sliding resistance generated when the weight block 14 descends by its own weight is reduced. Although the above embodiment has been described using the crucible 11, a firing furnace may be used instead of the crucible.

【0013】[0013]

【発明の効果】以上述べたように、本発明によれば、焼
成炉又はルツボの内部に立てて並べておかれる複数枚の
被焼成板の両側に上向き傾斜面を有する一対の保持用ブ
ロックを配置し、その一対の保持用ブロックの両側に下
向き傾斜面を有する一対の重し用ブロックを配置したの
で、複数の被焼成板を複数枚立てて並べて焼成すること
が可能になり、一対の重し用ブロックは自重で降下する
ことにより立てて並べられた複数枚の被焼成板が加熱収
縮する際にその被焼成板を一対の保持用ブロックを介し
て両側から均一な力で押す。この結果、被焼成板の焼成
時における変形が抑制され、かつ被焼成板に加わる力を
均一化することができる。
As described above, according to the present invention, a pair of holding blocks having upwardly inclined surfaces are arranged on both sides of a plurality of plates to be fired which are arranged vertically inside a firing furnace or crucible. Since a pair of weight blocks each having a downwardly inclined surface are arranged on both sides of the pair of holding blocks, a plurality of plates to be fired can be erected and fired side by side. When the plurality of plates to be fired are heated and shrunk, the plates to be fired are pressed by a uniform force from both sides through a pair of holding blocks when the plurality of plates to be fired are heated and shrunk by descending under their own weight. As a result, deformation of the plate to be fired during firing can be suppressed, and the force applied to the plate to be fired can be made uniform.

【0014】また、焼成炉又はルツボの内底面と複数の
被焼成板の下端面との間に被焼成板と同一材質を有する
受け板を設けるので、受け板は焼成時における被焼成板
と同一の速度及び比率で収縮する。この結果、被焼成板
と焼成炉又はルツボの内底面との間に生じる接触抵抗力
を解消して被焼成板を複数枚同時に均一な品質で焼成す
ることができる。また、受け板と一対の保持用ブロック
を複数の小球を介して焼成炉又はルツボの内底面に置け
ば、小球が被焼成板の焼成時における受け板の収縮及び
保持用ブロックの移動を回転することにより容易にす
る。更に、上向き傾斜面に傾斜方向に沿って複数の凸条
を形成すれば、凸条における頂点のみが重し用ブロック
の下向き傾斜面に接触し、上向き傾斜面と下向き傾斜面
との接触面積を縮小させ、重し用ブロックが自重で降下
する際に発生する摺動抵抗を低減させることができる。
Further, since a receiving plate having the same material as the plate to be fired is provided between the inner bottom surface of the firing furnace or crucible and the lower end surfaces of the plurality of plates to be fired, the receiving plate is the same as the plate to be fired during firing. At a rate and rate of As a result, the contact resistance generated between the plate to be fired and the inner bottom surface of the firing furnace or crucible can be eliminated, and a plurality of plates to be fired can be simultaneously fired with uniform quality. In addition, if the receiving plate and the pair of holding blocks are placed on the inner bottom surface of the firing furnace or crucible via the plurality of small balls, the small balls can cause the receiving plate to shrink and move the holding blocks during firing of the plate to be fired. Easy to rotate. Furthermore, if a plurality of ridges are formed on the upward slope along the slope direction, only the vertices of the ridge contact the downward slope of the weighting block, and the contact area between the upward slope and the downward slope is reduced. The sliding resistance can be reduced when the weight block is lowered by its own weight.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の焼成装置を示す図2のA−A線断面
図。
FIG. 1 is a sectional view taken along the line AA of FIG. 2 showing a firing apparatus of the present invention.

【図2】その装置の斜視図。FIG. 2 is a perspective view of the device.

【図3】その装置の保持用ブロックを示す斜視図。FIG. 3 is a perspective view showing a holding block of the device.

【図4】従来例を示す図1に対応する図。FIG. 4 is a diagram corresponding to FIG. 1 showing a conventional example.

【符号の説明】[Explanation of symbols]

11 ルツボ 11a 内底面 12 被焼成板 13 保持用ブロック 13a 鉛直面 13b 上向き傾斜面 13c 凸条 14 重し用ブロック 14a 端面 14b 下向き傾斜面 16 受け板 17 小球 DESCRIPTION OF SYMBOLS 11 Crucible 11a Inner bottom surface 12 Plate to be burned 13 Holding block 13a Vertical surface 13b Upward inclined surface 13c Convex ridge 14 Weight block 14a End surface 14b Downward inclined surface 16 Receiving plate 17 Small ball

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 焼成炉又はルツボ(11)の内部に立てて並
べておかれる複数枚の被焼成板(12)の両側に配置され前
記被焼成板(12)の両端に密着可能に形成された鉛直面(1
3a)と前記鉛直面(13a)と反対側に形成された上向き傾斜
面(13b)とを有する一対の保持用ブロック(13,13)と、 前記一対の保持用ブロック(13,13)の両側に配置され前
記上向き傾斜面(13b)と同一傾斜角度で形成された下向
き傾斜面(14b)と前記下向き傾斜面(14b)と反対側に形成
され前記焼成炉又はルツボ(11)の内壁に接触可能に形成
された端面(14a)とを有する一対の重し用ブロック(14,1
4)とを備え、 前記焼成炉又はルツボ(11)の内底面(11a)と前記複数の
被焼成板(12)の下端面との間に前記被焼成板(12)と同一
材質を有する被焼成板の受け板(16)が設けられたことを
特徴とする被焼成板の焼成装置。
1. A plurality of plates to be fired (12) arranged upright inside a firing furnace or crucible (11), and are formed so as to be in close contact with both ends of the plate to be fired (12). Vertical (1
3a) and a pair of holding blocks (13, 13) having an upwardly inclined surface (13b) formed on the side opposite to the vertical plane (13a), and both sides of the pair of holding blocks (13, 13). And a downwardly inclined surface (14b) formed at the same inclined angle as the upwardly inclined surface (13b), and an inner wall of the firing furnace or crucible (11) formed on the opposite side to the downwardly inclined surface (14b). A pair of weight blocks (14, 1) having an end surface (14a) formed to be
4), wherein a material having the same material as the fired plate (12) is provided between an inner bottom surface (11a) of the firing furnace or crucible (11) and lower end surfaces of the plurality of fired plates (12). An apparatus for firing a plate to be fired, comprising a receiving plate (16) for a firing plate.
【請求項2】 受け板(16)と一対の保持用ブロック(13,
13)が複数の小球(17)を介して前記焼成炉又はルツボ(1
1)の内底面(11a)に置かれた請求項1記載の被焼成板の
焼成装置。
2. A receiving plate (16) and a pair of holding blocks (13,
13) through a plurality of small balls (17) said firing furnace or crucible (1)
The apparatus for firing a plate to be fired according to claim 1, wherein the apparatus is placed on the inner bottom surface (11a) of (1).
【請求項3】 上向き傾斜面(13b)に傾斜方向に沿って
複数の凸条(13c)が形成された請求項1又は2記載の被
焼成板の焼成装置。
3. The apparatus for firing a plate to be fired according to claim 1, wherein a plurality of ridges (13c) are formed on the upward inclined surface (13b) along the inclined direction.
JP19218597A 1997-07-17 1997-07-17 Sintering device for plate to be fired Expired - Fee Related JP3440981B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19218597A JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19218597A JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Publications (2)

Publication Number Publication Date
JPH1137662A true JPH1137662A (en) 1999-02-12
JP3440981B2 JP3440981B2 (en) 2003-08-25

Family

ID=16287102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19218597A Expired - Fee Related JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Country Status (1)

Country Link
JP (1) JP3440981B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015198113A (en) * 2014-03-31 2015-11-09 株式会社荏原製作所 Substrate holding mechanism, substrate transfer device, and semiconductor manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015198113A (en) * 2014-03-31 2015-11-09 株式会社荏原製作所 Substrate holding mechanism, substrate transfer device, and semiconductor manufacturing device

Also Published As

Publication number Publication date
JP3440981B2 (en) 2003-08-25

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