JPH11354602A - Cover latch device for pod opener - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cover latch device which can latch the cover of a cassette, even when a positioning accuracy between the cassette cover is relatively low. SOLUTION: A cover latch device 10 includes a key member 31, having a tip end 41 insertable in a key groove 30 of a cover 9 of a cassette and a key holder member 33 for holding a base part 32 of the key member 31. When the tip end 41 of the key member inserted in the key groove 30 is rotated, the key member tip end 41 latches the cover 9. The key holder member 33 is provided with a floating spring 49, which resiliently holds the key member 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lid latch device for a pod opener, and more particularly to a boundary between a high clean space and a low clean space for processing thin substrates such as semiconductor wafers. The present invention relates to a lid latch device for opening a lid of a cassette placed on a table of the pod opener installed in the pod opener.

[0002]

2. Description of the Related Art In processing thin substrates such as semiconductor wafers, it is needless to say that it is important to maintain a high degree of cleanliness in a working room. It is not preferable in terms of surface and the like. Therefore, the working room is usually divided into a high-clean space with a high degree of cleanness in which the processing apparatus is arranged, and a low-clean space with a low degree of cleanness in which a cassette containing a thin substrate as a processing object is arranged. A pod opener is installed at the boundary.

A pod opener allows a thin substrate in a cassette to be carried into a high clean space by connecting a low clean space and a high clean space prior to the start of processing, thereby enabling processing by a processing apparatus.

As shown in FIG. 6, a pod opener 1 has a partition plate 4 for partitioning a high clean space 2 and a low clean space 3 and a cassette 5 disposed on the low clean space 3 side. An opening 7 formed in the partition plate 4 and communicating the low clean space 3 and the high clean space 2; a door 8 arranged on the high clean space 2 side to open and close the opening 7; Cassette 5 arranged on the space 2 side
A lid latch device 10 for opening the lid 9 is provided, and the opening 8 is opened by moving the door 8 and the lid 9 obliquely to the lower right of the opening 7 so as to be in a state shown by a two-dot chain line in the drawing. The thin substrate 12 in the cassette 5 can be taken out and transferred to the processing device 13 by the transfer robot 11 arranged in the space 2.

Conventionally, the lid latch device 10 includes a key member having a tip end capable of entering the key groove of the lid 9 of the cassette 5,
A key holding member for holding the base of the key member, and the lid 9 is latched at the key member tip by being rotated by the rotary actuator 14 or the like with the key member tip entering the key groove. It is configured as follows.

[0006]

However, the conventional lid latch device employs a structure in which the base of the key member is firmly fixed to the key holding member. High accuracy is required for alignment with the key member.

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a lid latch device that can latch a lid even if the accuracy of alignment between a key groove of a cassette lid and a key member is relatively low. .

[0008]

According to the present invention, there is provided a lid latch device for a pod opener, comprising: a key member having a tip end capable of entering a key groove of a cassette lid; and a key holding member for holding a base of the key member. A lid latch device for a pod opener, wherein the key holding member is rotated by rotating the key member tip portion into the key groove so as to latch the lid at the key member tip portion. The key member is elastically held by the elastic member.

[0009]

FIG. 1 is a schematic structural view of a pod opener incorporating a lid latch device according to an embodiment of the present invention, and FIG. 2 shows the relationship between the lid latch device and a cassette lid. A perspective view, FIG. 3 is a side sectional view of the lid latch device, FIG. 4 is a front view of the lid latch device, and FIG. 5 is a schematic configuration diagram of a drive mechanism for driving the lid latch device.

In FIG. 1, a pod opener 1 includes a partition plate 4 for partitioning a high clean space 2 having a high clean degree and a low clean space 3 having a low clean degree.
The partition plate 4 has an opening 7 communicating the high clean space 2 and the low clean space 3.

On the high clean space 2 side of the partition plate 4, a door 8 for opening and closing the opening 7 is provided. Door 8
Is movable on the two parallel rails 16 in the horizontal direction of the drawing by the door drive mechanism 15 (movable to the right from the state shown by the solid line).

The rail 16 is provided on an elevating member 17, and the elevating member 17 can be moved up and down (down from the state shown in the figure) by an elevating mechanism 20 composed of an elevator 18, guide posts 19, 19 and the like. ing.

The door 8 has a plurality of lid latch devices 10, 1
0 is rotatably arranged. These lid latch devices 10 and 10 are rotated by a common drive mechanism 24 including an air cylinder 22, a link mechanism 23 and the like. The specific configuration of the lid latch device 10 will be described later. Further, the door 8 is provided with a plurality of elastic pressing members 25, 25. When the front surface of the lid 9 of the cassette 5 is pressed against the side surface of the partition plate 4 on the side of the low-clean space 3, the heads of the elastic pressing members 25 move rightward from the illustrated state against the urging force of the spring. It moves, the head applies a leftward pressing force to the front surface of the lid 9 by the biasing force of the spring, and cooperates with the key members 31, 31 of the lid latch devices 10, 10 to hold the lid 9 firmly. is there.

On the low clean space 3 side of the partition plate 4, two horizontal parallel rails 26 are provided. A table 27 is mounted on the parallel rail 26. The table 27 is movable in the left-right direction by a drive mechanism 28. On the table 27, a plurality of thin substrates 1
The cassette 5 containing 2, 12,..., 12 is placed. The cassette 5 includes a main body 29 and a lid 9 for closing a front opening of the main body 29. On the lid 9, the tip portions 41 of the key members 31, 31 of the lid latch devices 10, 10 are provided.
The key grooves 30, 30 are formed so that they can enter.

In FIGS. 2, 3, 4 and 5, each lid latch device 10 has a T
A key member 31 having a character shape and a key holding member 33 for holding a base 32 of the key member 31 are provided.

The base part 32 of the key member 31 is formed in a cylindrical shape, and a pin insertion hole 34 extending in the radial direction is formed in the base part 32.

The key holding member 33 has an adapter member 35 integrated with the base 32 of the key member 31. The adapter member 35 includes a main body 36 and a pin 37. A key insertion hole 38 into which the columnar base 32 of the key member 31 is inserted is formed in the front part of the main body 36.
Pin insertion holes 39 and 40 are formed on the left and right portions of the main body 36 so as to be located on the same straight line as the pin insertion holes 34 of the key member base 32 inserted into the key insertion holes 38, respectively. I have. The pin 37 is provided in the key insertion hole 3 of the main body 36.
8, the base portion 32 of the key member 31 is inserted, and the pin insertion holes 34 of the key member 31 and the pin insertion holes 39, 40 of the main body 36 are aligned with each other and inserted into the pin insertion holes 34, 39, 40. Then, the adapter member 35 is integrated with the key member 31. A plurality of front and rear push spring receiving holes 42, 42, 42, 42 are formed on the rear surface of the main body 36.

The key holding member 33 includes the adapter housing member 4
4 and a lid member 45. Adapter accommodation member 4
A front part insertion hole 46 through which the base part 32 of the key member 33 is inserted with a gap is formed in the front part of the key member 33. Further, floating spring receiving holes 47, 47, 4
7, 47 are formed.

The cover member 45 is fixed to the rear surface of the adapter housing member 44 by bonding or the like.

A gap is formed between the rear surface of the base portion 32 of the key member 31 and the rear surface of the main body portion 36 of the adapter member 35, and the front surface of the lid member 45. 45 front and rear push springs 4
3 are provided. The front-rear push spring 43 elastically presses the main body 36 of the adapter member 35 against the peripheral edge of the base insertion hole 46 of the adapter housing member 44 in a steady state, and the rear end of the front end 41 of the key member 31 is moved backward. When a pressing force is applied, the key member 31 acts to escape backward.

The main body 36 of the adapter member 35 is accommodated in the recess 50 of the adapter accommodating member 44 with a gap in the vertical and horizontal directions. The floating spring receiving hole 47 is formed by a female screw, and a male screw member 48 as a spring receiving member and a spring elastic force adjusting member is screwed into the floating spring receiving hole 47. A floating spring 49 is provided between the male screw member 48 and the upper and lower surfaces of the main body 36 of the adapter member 35. The floating spring 49 elastically holds the main body 36 of the adapter member 35 so as to be movable in the vertical and horizontal directions.

Next, the operation of the lid latch device 10 configured as described above will be described.

When the table 6 is moved closer to the door 8 by the drive mechanism 28 while the door 8 is in the closed state, the lid 9 of the cassette 5 on the table 6 comes closer to the door 8 and faces each other. The key enters a state in which the distal end portion 41 of each key member 31 enters the groove 30. At this time, if the distal end portion 41 of the key member 31 can enter without interfering with the periphery of the key groove 30, there is no problem. Since the tip of the member 31 can escape in the vertical and horizontal directions, the tip 41 of the key member 31 can enter the key groove 30.

When the front end 41 of the key member 31 enters the key groove 30 and the front surface of the lid 9 is pressed against the side surface of the partition plate 4 on the side of the low clean space 3, each elastic holding member 25 has its head. Moves rightward from the illustrated state against the urging force of the spring, and the head applies a leftward pressing force to the front surface of the lid 9 by the urging force of the spring.

Thereafter, when the lid latch device 10 is rotated by about 90 ° by the drive mechanism 24, the tip portion 41 of each key member 31 enters a lid latch state in which the lid 9 is latched. When the door 8 is moved by the door driving mechanism 15 in the lid latch state, the door 8 opens the opening 7 while holding the lid 9. Then, the door 8 is lowered by the lifting mechanism 20.
Thereby, the thin substrate 12 in the cassette 5 can be carried into the high clean space 2 through the opening 7.

As described above, in the lid latch device 10 according to the present embodiment, the key holding member 33 is provided with the elastic member (floating spring 49), and the key member 31 is elastically held by the elastic member. . For this reason, the lid 9 can be latched even if the positioning accuracy between the key groove 30 and the key member 31 of the lid 9 of the cassette 5 is relatively low. In the above embodiment, the floating spring is used as the elastic member. However, the use of an elastic rubber material, an elastic synthetic resin material, or the like does not mean that the operation is not possible.

[0027]

According to the present invention, since the elastic member holds the key member elastically, the lid can be latched even if the accuracy of the alignment between the key groove of the cassette lid and the key member is relatively low. .

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a pod opener in which a lid latch device according to an embodiment of the present invention is incorporated.

FIG. 2 is a perspective view showing a relationship between the lid latch device and a lid of a cassette.

FIG. 3 is a side sectional view of the same latch device.

FIG. 4 is a front view of the lid latch device.

FIG. 5 is a schematic configuration diagram of a drive mechanism for driving the lid latch device.

FIG. 6 is an explanatory view showing a use mode of a pod opener in which a conventional lid latch device is incorporated.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pod opener 5 Cassette 9 Lid 10 Lid latch device 30 Key groove 31 Key member 32 Former part 41 Tip part 33 Key holding member 49 Floating spring (elastic member)

Claims (2)

[Claims] 1. A key member having a leading end capable of entering a key groove of a cassette lid, and a key holding member for holding a base of the key member, wherein the leading end of the key member enters the key groove. A lid latching device for a pod opener, wherein the lid is latched at the tip of the key member by being rotated in a state in which the key member is provided, wherein an elastic member is disposed on the key holding member, and the key member is provided by the elastic member. A lid latch device for a pod opener, wherein the lid latch device elastically holds the lid. 2. The lid latch device for a pod opener according to claim 1, wherein said elastic member is made of a spring.