JPH11345545A - Gas recovery device and gas recovery method - Google Patents
Gas recovery device and gas recovery methodInfo
- Publication number
- JPH11345545A JPH11345545A JP10150916A JP15091698A JPH11345545A JP H11345545 A JPH11345545 A JP H11345545A JP 10150916 A JP10150916 A JP 10150916A JP 15091698 A JP15091698 A JP 15091698A JP H11345545 A JPH11345545 A JP H11345545A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- container
- vacuum pump
- gas recovery
- separation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Gas-Insulated Switchgears (AREA)
- Driving Mechanisms And Operating Circuits Of Arc-Extinguishing High-Tension Switches (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はガス絶縁開閉装置の
ガス回収装置に係わり、特にＳＦ6 ガスと他のガスとの
混合ガスを回収するのに好適なガス絶縁開閉装置用のガ
ス回収装置に関する。The present invention relates to relates to gas recovery device relates to, in particular gas recovery apparatus for suitable gas insulated switchgear to recover a mixed gas of SF 6 gas and other gases in the gas insulated switchgear .
【０００２】[0002]
【従来の技術】ＳＦ6 ガスと他のガスとの混合ガスを用
いたガス絶縁開閉装置用の従来の回収装置は、特開昭63
−26497 号公報に記載のように混合ガスを分離すること
なく回収容器に液化して回収している。2. Description of the Related Art A conventional recovery device for a gas insulated switchgear using a mixed gas of SF 6 gas and another gas is disclosed in
As described in -26497, the mixed gas is liquefied and collected in a collection container without being separated.
【０００３】[0003]
【発明が解決しようとする課題】特開昭63−26497 号公
報に記載の装置は、混合ガスの成分を分離することなく
すべてのガス成分を回収しているため、大容量の回収容
器が必要となる。一方、回収容器の容積を小さくする場
合、液化して回収するためには、ＳＦ6 ガス以外のガス
は一般的に液化温度が低く、この液化温度の低いガスを
冷却するためには大規模な冷却装置が必要となるという
問題があった。The apparatus described in JP-A-63-26497 recovers all gas components without separating the components of the mixed gas, so that a large-capacity recovery container is required. Becomes On the other hand, when the volume of the recovery container is reduced, gases other than SF 6 gas generally have a low liquefaction temperature in order to liquefy and recover, and a large-scale gas is required to cool the gas having a low liquefaction temperature. There was a problem that a cooling device was required.
【０００４】本発明の第１の目的は、小型の容器に分離
回収できるＳＦ6 ガスとの混合ガスを用いたガス絶縁開
閉装置のガス回収装置を提供することにある。A first object of the present invention is to provide a gas recovery device of a gas insulated switchgear using a mixed gas with SF 6 gas which can be separated and recovered in a small container.
【０００５】本発明の第２の目的は、混合ガスを液化し
ないでＳＦ6 ガスを回収できるガス絶縁開閉装置のガス
回収装置を提供することにある。A second object of the present invention is to provide a gas recovery device of a gas insulated switchgear which can recover SF 6 gas without liquefying a mixed gas.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明のガス絶縁開閉装置用のガス回収装置は、混
合ガスが封入されたガス絶縁開閉装置と、該ガス絶縁開
閉装置に真空ポンプを介して接続された分離装置と、該
分離装置内に設けられた気体分離膜で仕切られ前記真空
ポンプに連通する一方の室に接続されたＳＦ6 ガス回収
容器とを備えたことを特徴とする。In order to achieve the above object, a gas recovery apparatus for a gas insulated switchgear according to the present invention comprises: a gas insulated switchgear in which a mixed gas is sealed; A separation device connected via a pump, and an SF 6 gas recovery container connected to one chamber separated by a gas separation membrane provided in the separation device and connected to the vacuum pump. And
【０００７】又、前記真空ポンプと前記分離装置間に貯
溜容器が具備され、前記分離装置とＳＦ6 ガス回収容器
間に三方弁が設けられるものであって、前記三方弁を切
換えて前記貯溜容器内の混合ガスを前記分離装置，三方
弁，真空ポンプ，貯溜容器の順に循環させるものであ
る。又、前記気体分離膜が、ポリイミド膜，炭素膜，ゼ
オライト膜のいずれかで構成されているものである。
又、前記貯溜容器と分離装置間に減圧弁を設けたもので
ある。又、前記ＳＦ6 ガス回収容器が重量計に載置され
るものであって、該ＳＦ6 ガス回収容器および混合ガス
ボンベがガス混合容器，ポンプを介してガス絶縁開閉装
置に接続されているものである。Further, a storage container is provided between the vacuum pump and the separation device, and a three-way valve is provided between the separation device and the SF 6 gas recovery container, and the storage container is switched by switching the three-way valve. The mixed gas is circulated in the order of the separation device, the three-way valve, the vacuum pump, and the storage container. Further, the gas separation membrane is formed of any one of a polyimide membrane, a carbon membrane, and a zeolite membrane.
Further, a pressure reducing valve is provided between the storage container and the separation device. Further, the SF 6 gas recovery container is mounted on a weighing scale, and the SF 6 gas recovery container and the mixed gas cylinder are connected to a gas insulated switchgear via a gas mixing container and a pump. is there.
【０００８】本発明のガス回収方法は、混合ガスが封入
されたガス絶縁開閉装置から真空ポンプにより気体分離
膜を具備した分離装置に混合ガスを流し、気体分離膜に
よりＳＦ6 ガス以外のガスを分離し、純度が高められた
ＳＦ6 ガスをＳＦ6 ガス回収容器に回収することを特徴
とする。[0008] In the gas recovery method of the present invention, the mixed gas is passed from the gas insulated switchgear in which the mixed gas is sealed to a separation device having a gas separation membrane by a vacuum pump, and a gas other than SF 6 gas is removed by the gas separation membrane. The method is characterized in that the SF 6 gas having been separated and having a higher purity is recovered in a SF 6 gas recovery container.
【０００９】[0009]
【発明の実施の形態】以下、本発明の一実施例を図１に
より説明する。図１は本実施例のガス絶縁開閉装置及び
ガス回収装置の構成を示す図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a diagram showing a configuration of a gas insulated switchgear and a gas recovery device of the present embodiment.
【００１０】ＳＦ6 ガスとその他のガス、例えば窒素ガ
ス、空気との混合ガスが封入されたガス絶縁開閉装置１
には、ガス配管４が接続されており、止弁１３を介して
真空ポンプ９に接続されている。真空ポンプ９は貯蔵容
器５に接続されており、この貯蔵容器５では真空ポンプ
９によって回収された混合ガスを一時貯蔵している。貯
蔵容器５は減圧弁１６を介して混合ガスの分離装置３
（濾過装置３ともいう）に接続されている。この分離装
置３内には、気体分離膜２が設けられており、気体分離
膜２で仕切られた一方の室２ａに混合ガスが流れるよう
になっている。室２ａは三方弁１５に接続されている。
気体分離膜２で仕切られた他方の室２ｂは、ポンプ１０
に接続されポンプ１０の他端は大気開放になっている。
そのため、ポンプ１０により気体分離膜２で分離された
気体を外気に放出するようになっている。A gas-insulated switchgear 1 in which a mixed gas of SF 6 gas and other gases, for example, nitrogen gas and air is filled.
Is connected to a gas pipe 4, and is connected to a vacuum pump 9 via a stop valve 13. The vacuum pump 9 is connected to the storage container 5, and the storage container 5 temporarily stores the mixed gas recovered by the vacuum pump 9. The storage vessel 5 is connected to the mixed gas separation device 3 through a pressure reducing valve 16.
(Also referred to as a filtration device 3). A gas separation membrane 2 is provided in the separation device 3, and a mixed gas flows into one chamber 2 a partitioned by the gas separation membrane 2. The chamber 2a is connected to the three-way valve 15.
The other chamber 2b partitioned by the gas separation membrane 2 has a pump 10
And the other end of the pump 10 is open to the atmosphere.
Therefore, the gas separated by the gas separation membrane 2 by the pump 10 is discharged to the outside air.
【００１１】三方弁１５の一方側は止弁１３と真空ポン
プ９とを接続する配管の途中に接続されており、三方弁
１５の他方の側は、ポンプ１１を介してＳＦ6 ガス回収
容器６に接続されている。ＳＦ6 ガス回収容器６は重量
計１７に載置されており、ＳＦ6 ガス回収容器６の重さ
を計量するようになっている。ＳＦ6 ガス回収容器６
は、ガス混合容器８に接続されており、このガス混合容
器８にはＳＦ6 ガス以外のガスの混合ガスボンベ７と接
続されている。ガス混合容器８の出口側は、ポンプ１
２，止弁１４を介してガス絶縁開閉装置１に接続されて
いる。One side of the three-way valve 15 is connected in the middle of a pipe connecting the stop valve 13 and the vacuum pump 9, and the other side of the three-way valve 15 is connected via the pump 11 to the SF 6 gas recovery container 6. It is connected to the. The SF 6 gas recovery container 6 is placed on a weighing scale 17, and weighs the SF 6 gas recovery container 6. SF 6 gas recovery container 6
It is connected to a gas mixing vessel 8, and is connected to the mixed gas cylinder 7 of gases other than SF 6 gas in the gas mixing vessel 8. The outlet side of the gas mixing container 8 is
2. It is connected to the gas insulated switchgear 1 via the stop valve 14.
【００１２】このように構成されたガス絶縁開閉装置の
ガス回収装置のガス回収について説明する。最初、止弁
１３，１４，三方弁１５は閉じた状態にある。この状態
で止弁１３を開くと真空ポンプ９により、ガス絶縁開閉
装置１内の混合ガスが貯蔵容器５に回収される。貯蔵容
器５に回収された混合ガスは、減圧弁１６により減圧さ
れて分離装置３に送られる。分離装置３内の気体分離膜
２は、分子径の大きなＳＦ6 ガスは透過させないが、混
合ガスに含まれる窒素，酸素のような分子径の小さなガ
スは透過させるものを用いている。気体分離膜２として
は、ポリイミド膜，炭素膜，ゼオライト膜のいずれかが
適用される。従って、この気体分離膜２では、ＳＦ6 ガ
スは、室２ａ内に残留し、ＳＦ6 ガス以外のガスは、気
体分離膜２を透過して室２ｂ内に移動する。室２ｂ内に
移動したＳＦ6 以外のガスは、ポンプ１０により排気さ
れ大気中に放出される。The gas recovery of the gas recovery device of the gas insulated switchgear thus configured will be described. First, the stop valves 13, 14, and the three-way valve 15 are in a closed state. When the stop valve 13 is opened in this state, the mixed gas in the gas insulated switchgear 1 is collected in the storage container 5 by the vacuum pump 9. The mixed gas collected in the storage container 5 is depressurized by the pressure reducing valve 16 and sent to the separation device 3. The gas separation membrane 2 in the separation device 3 does not allow passage of SF 6 gas having a large molecular diameter but allows passage of gas having a small molecular diameter such as nitrogen and oxygen contained in a mixed gas. As the gas separation membrane 2, any of a polyimide membrane, a carbon membrane, and a zeolite membrane is applied. Therefore, in the gas separation membrane 2, the SF 6 gas remains in the chamber 2a, and gases other than the SF 6 gas pass through the gas separation membrane 2 and move into the chamber 2b. The gas other than SF 6 that has moved into the chamber 2b is exhausted by the pump 10 and released into the atmosphere.
【００１３】次に止弁１３を閉じて三方弁１５を図１中
に矢印ロで示す方向に流れるように切換える。この状態
では、分離装置３内の室２ａ内のＳＦ6 ガスとの混合ガ
スは、真空ポンプ９により貯蔵容器５，減圧弁１６を介
して分離装置３内に再び循環され、再度分離が行われ
る。この過程を繰り返すことにより、気体分離膜２を透
過されず室２ａ内に残留したＳＦ6 ガス以外のガスが室
２ｂ内に移動して濾過され、ＳＦ6 ガスの純度が高ま
る。この純度は、図示しない検出器により検出され、こ
の純度が予め設定された純度に達したら、三方弁１５を
図１中の矢印イで示す方向に流れるように切換える。こ
の状態で、ポンプ１１によりＳＦ6 ガスをＳＦ6 ガス回
収容器６に送られて貯溜される。ＳＦ6 ガス回収容器６
に蓄えられたＳＦ6 ガスの重量は、重量計１７により計
量される。Next, the stop valve 13 is closed and the three-way valve 15 is switched so as to flow in the direction shown by the arrow B in FIG. In this state, the mixed gas with the SF 6 gas in the chamber 2a in the separation device 3 is circulated again into the separation device 3 by the vacuum pump 9 via the storage container 5 and the pressure reducing valve 16, and the separation is performed again. . By repeating this process, gases other than the SF 6 gas remaining in the chamber 2a without passing through the gas separation membrane 2 move into the chamber 2b and are filtered, thereby increasing the purity of the SF 6 gas. The purity is detected by a detector (not shown), and when the purity reaches a preset purity, the three-way valve 15 is switched so as to flow in a direction indicated by an arrow A in FIG. In this state, the SF 6 gas is sent to the SF 6 gas recovery container 6 by the pump 11 and stored therein. SF 6 gas recovery container 6
Weight of SF 6 gas stored in is weighed by the weight meter 17.
【００１４】このようにして回収されたＳＦ6 ガスを混
合ガスとしてガス絶縁開閉装置１に充填する場合は、次
のようにして行う。止弁１３を閉状態，止弁１４を開状
態，三方弁１５を矢印ロの方向に切換える。ＳＦ6ガス
回収容器６に蓄えられたＳＦ6ガスをガス混合容器８に
導くとともに、混合ガスボンベ７に蓄えられたＳＦ6 以
外のガスをガス混合容器８に導く。ここで、混合ガスボ
ンベ７には、ＳＦ6 ガス以外のガスを混合したもの、あ
るいはＳＦ6 ガス以外の単独のガスが封入されている。
ガス混合容器８内では、ＳＦ6 ガスとＳＦ6 以外のガス
とが混合され、ポンプ１２により止弁１４を介してガス
絶縁開閉装置１に充填される。ＳＦ6 ガスに混合するＳ
Ｆ6 以外のガスの量は、重量計１７で計量したＳＦ6 ガ
スの重量の変化量をもとに、予め設定された混合比とな
るように調整される。When the gas insulated switchgear 1 is filled with the SF 6 gas thus recovered as a mixed gas, the following procedure is performed. The stop valve 13 is closed, the stop valve 14 is opened, and the three-way valve 15 is switched in the direction of arrow B. The SF 6 gas stored in the SF 6 gas recovery container 6 guides the gas mixing vessel 8, guides the SF 6 gas other than that stored in the mixed gas cylinder 7 to the gas mixing container 8. Here, the mixing gas cylinder 7, as a mixture of gases other than SF 6 gas or SF 6 except gas alone gas is enclosed.
In the gas mixing container 8, SF 6 gas and a gas other than SF 6 are mixed and filled in the gas insulated switchgear 1 by the pump 12 via the stop valve 14. S mixed with SF 6 gas
The amount of the gas other than F 6 is adjusted based on the change in the weight of SF 6 gas measured by the weigh scale 17 so as to have a preset mixing ratio.
【００１５】本実施例では、以上述べたように、気体分
離膜を利用した分離装置でＳＦ6 ガスとＳＦ6 ガス以外
のガスを分離しているので、混合ガスを液化する必要が
なく、大規模な冷却装置を設置する必要がない。又、貯
蔵容器に貯蔵された混合ガスを循環させて分離させてい
るので、ＳＦ6 ガスの純度を高くすることができ、再利
用が可能である。又、気体分離膜で分離されたＳＦ6 ガ
ス以外のガスは大気放出できるので、ＳＦ6 ガス回収容
器を小型にできる。又、重量計でＳＦ6 ガス回収容器に
回収されたＳＦ6 ガスの重量を計量しているので、混合
ガスの混合比を設定でき、ガス絶縁開閉装置に予め設定
された混合比の混合ガスを充填できる。[0015] In this embodiment, as mentioned above, since the separation of the SF 6 gas and SF 6 gas other than the gas in the separation device using a gas separation membrane, it is not necessary to liquefy the mixed gas, large There is no need to install a large-scale cooling device. Further, since the mixed gas stored in the storage container is circulated and separated, the purity of the SF 6 gas can be increased, and the gas can be reused. Further, since gases other than the SF 6 gas separated by the gas separation membrane can be released to the atmosphere, the SF 6 gas recovery container can be downsized. In addition, since the weighed weight of the SF 6 gas recovered in SF 6 gas recovery container weighing scale, it can set the mixture ratio of the mixed gas, a mixed gas of a predetermined mixing ratio in the gas insulated switchgear Can be filled.
【００１６】[0016]
【発明の効果】以上説明したように、本発明によれば、
混合ガスを液化させる必要がなく、ＳＦ6 ガスを小型の
容器に分離回収できるガス絶縁開閉装置用のガス回収装
置を提供できる。As described above, according to the present invention,
There is no need to liquefy the mixed gas, and it is possible to provide a gas recovery device for a gas insulated switchgear that can separate and recover SF 6 gas in a small container.
【図１】本発明の一実施例であるガス絶縁開閉装置及び
ガス回収装置の構成を示す図である。FIG. 1 is a diagram showing a configuration of a gas insulated switchgear and a gas recovery device according to one embodiment of the present invention.
１…ガス絶縁開閉装置、２…気体分離膜、３…分離装
置、４…ガス配管、５…貯蔵容器、６…ＳＦ6 ガス回収
容器、７…混合ガスボンベ、８…ガス混合容器、９…真
空ポンプ、１０，１１，１２…ポンプ、１３，１４…止
弁、１５…三方弁、１６…減圧弁、１７…重量計。1 ... Gas-insulated switchgear, 2 ... a gas separation membrane, 3 ... separator, 4 ... gas pipe, 5 ... storage container, 6 ... SF 6 gas collecting container, 7 ... mixed gas cylinder, 8 ... gas mixing vessel, 9 ... vacuum Pumps, 10, 11, 12: pumps, 13, 14, stop valves, 15: three-way valves, 16: pressure reducing valves, 17: weight scales.
Claims (6)
と、該ガス絶縁開閉装置に真空ポンプを介して接続され
た分離装置と、該分離装置内に設けられた気体分離膜で
仕切られ前記真空ポンプに連通する一方の室に接続され
たＳＦ6 ガス回収容器とを備えたことを特徴とするガス
回収装置。1. A gas-insulated switchgear filled with a mixed gas, a separator connected to the gas-insulated switchgear via a vacuum pump, and a gas separation membrane provided in the separator. A gas recovery device comprising: a SF 6 gas recovery container connected to one chamber communicating with a vacuum pump.
器が具備され、前記分離装置とSF6ガス回収容器間に三
方弁が設けられるものであって、前記三方弁を切換えて
前記貯溜容器内の混合ガスを前記分離装置，三方弁，真
空ポンプ，貯溜容器の順に循環させる請求項１に記載の
ガス回収装置。2. A storage container is provided between the vacuum pump and the separation device, and a three-way valve is provided between the separation device and the SF 6 gas recovery container. The storage container is switched by switching the three-way valve. The gas recovery device according to claim 1, wherein the mixed gas in the gas is circulated in the order of the separation device, the three-way valve, the vacuum pump, and the storage container.
膜，ゼオライト膜のいずれかで構成されている請求項１
又は２に記載のガス回収装置。3. The gas separation membrane according to claim 1, wherein the gas separation membrane is made of any one of a polyimide membrane, a carbon membrane, and a zeolite membrane.
Or the gas recovery device according to 2.
た請求項２に記載のガス回収装置。4. The gas recovery device according to claim 2, wherein a pressure reducing valve is provided between the storage container and the separation device.
れるものであって、該ＳＦ6 ガス回収容器および混合ガ
スボンベがガス混合容器、ポンプを介してガス絶縁開閉
装置に接続されている請求項１から４のいずれかに記載
のガス回収装置。5. The SF 6 gas recovery container is mounted on a weighing scale, wherein the SF 6 gas recovery container and the mixed gas cylinder are connected to a gas insulated switchgear via a gas mixing container and a pump. The gas recovery device according to any one of claims 1 to 4.
ら真空ポンプにより気体分離膜を具備した分離装置に混
合ガスを流し、気体分離膜によりＳＦ6 ガス以外のガス
を分離し、純度が高められたＳＦ6 ガスをＳＦ6 ガス回
収容器に回収することを特徴とするガス回収方法。6. A mixed gas is flowed from a gas-insulated switchgear in which the mixed gas is sealed to a separator equipped with a gas separation membrane by a vacuum pump, and gases other than SF 6 gas are separated by the gas separation membrane to increase purity. gas recovery method comprising recovering SF 6 gas which is in SF 6 gas recovery container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15091698A JP3728927B2 (en) | 1998-06-01 | 1998-06-01 | Gas recovery device and gas recovery method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15091698A JP3728927B2 (en) | 1998-06-01 | 1998-06-01 | Gas recovery device and gas recovery method |
Publications (2)
| Publication Number | Publication Date |
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| JPH11345545A true JPH11345545A (en) | 1999-12-14 |
| JP3728927B2 JP3728927B2 (en) | 2005-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15091698A Expired - Fee Related JP3728927B2 (en) | 1998-06-01 | 1998-06-01 | Gas recovery device and gas recovery method |
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| JP (1) | JP3728927B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003190744A (en) * | 2001-12-26 | 2003-07-08 | Ube Ind Ltd | Apparatus for separating and recovering halogen compound gas and separation and recovering method using the same |
| US6921428B2 (en) | 2001-01-25 | 2005-07-26 | Ube Industries, Ltd. | Device and method for separating and collecting halide gas |
| CN103322408A (en) * | 2013-05-28 | 2013-09-25 | 国家电网公司 | System for pumping and inflating SF6 for gas insulated switchgear |
| CN103495443A (en) * | 2013-09-29 | 2014-01-08 | 广州供电局有限公司 | Centralized control recycling device and method for waste gas in laboratory |
| KR20160009895A (en) * | 2014-07-17 | 2016-01-27 | 한국과학기술연구원 | Apparatus and method for recovery of retentate |
| KR20160009894A (en) * | 2014-07-17 | 2016-01-27 | 한국과학기술연구원 | Apparatus and method for recovery of retentate |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101505920B1 (en) * | 2013-10-02 | 2015-03-25 | 한국과학기술연구원 | Apparatus and method for recovery of sulfur hexafluoride |
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1998
- 1998-06-01 JP JP15091698A patent/JP3728927B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6921428B2 (en) | 2001-01-25 | 2005-07-26 | Ube Industries, Ltd. | Device and method for separating and collecting halide gas |
| JP2003190744A (en) * | 2001-12-26 | 2003-07-08 | Ube Ind Ltd | Apparatus for separating and recovering halogen compound gas and separation and recovering method using the same |
| CN103322408A (en) * | 2013-05-28 | 2013-09-25 | 国家电网公司 | System for pumping and inflating SF6 for gas insulated switchgear |
| CN103495443A (en) * | 2013-09-29 | 2014-01-08 | 广州供电局有限公司 | Centralized control recycling device and method for waste gas in laboratory |
| KR20160009895A (en) * | 2014-07-17 | 2016-01-27 | 한국과학기술연구원 | Apparatus and method for recovery of retentate |
| KR20160009894A (en) * | 2014-07-17 | 2016-01-27 | 한국과학기술연구원 | Apparatus and method for recovery of retentate |
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| Publication number | Publication date |
|---|---|
| JP3728927B2 (en) | 2005-12-21 |
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