JPH11339237A - Grinding method and grinding jig for magnetic head slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic head slider grinding method and grinding jig, capable of abolishing a work in which man-hours are spent such as that magnetic head sliders are taken out from a product feeding case one by one to be permuted on a grinding jig plate, and moreover, which is capable of finishing a throat height with high accuracy in a grinding process for forming a positive crown and a positive camber on the air sliding surface of the magnetic head slider. SOLUTION: Plural pieces of magnetic head sliders 9 from a product feeding case are mounted and adherently held on a grinding jig plate 10 in a package transfer type, as they are kept in a matrix arrangement which is in the product feeding case by providing a sheet shaped adhesive member 40 on the grinding jig plate 10 and moreover by making it engageable with the produced feeding case. The sheet-shaped adhesive member 40 to be provided on the plate 10 is made to be an elastic body having an elastically compressed deformation which is sufficiently large than the amount of variation of thickness dimensions of plural magnetic head sliders which are to be ground simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic head slider used for a magnetic recording / reproducing apparatus, and more particularly to a method and a jig for manufacturing a magnetic head slider for a hard disk drive. More specifically, the present invention relates to a polishing method and a polishing jig for an air sliding surface of a magnetic head slider.

[0002]

2. Description of the Related Art In recent years, it has been strongly demanded that a magnetic head of a hard disk drive be provided with a capability of recording and reproducing at a higher density. In addition, miniaturization of hard disk drives has been progressing in response to miniaturization of electronic devices, and magnetic head sliders for hard disk drives are required to be smaller and have higher performance. In particular,
Magnetic head sliders are required to promote stable low flying height, high reliability of CCS (contact start / stop), and measures to prevent the magnetic head slider from sticking to the surface of the magnetic recording medium. ing.

Therefore, as a measure to satisfy these requirements, as shown in FIG. 2, the air sliding surface S1 of the magnetic head slider S has a gentle curvature in the longitudinal direction of the magnetic head slider S. It is designed as a convex surface C1 (referred to as a crown), and similarly designed as a convex surface C2 (referred to as a camber) having a gentle curvature also in the width direction. That is, it is desirable that the air sliding surface S1 of the magnetic head slider S be a convex spherical surface having a gentle curvature and have a positive (convex) crown C1 and a positive (convex) camber C2. It is rare.

Under such circumstances, in order to obtain a stable flying characteristic of the magnetic head slider, conventionally, the air sliding surface of the magnetic head slider is polished as described below to form a positive crown on the air sliding surface. And form a positive camber. Hereinafter, a conventional technique will be described with reference to FIGS.

In the prior art, first, as shown in FIG. 3, a magnetic head slider S is held on a polishing jig plate 10 in a radial arrangement on a back surface S2 opposite to an air sliding surface S1. Next, as shown in FIG. 4, on the polishing surface 20a of the polishing platen 20 having the concave spherical polishing surface 20a,
The air sliding surface S1 of the magnetic head slider S held on the polishing jig plate 10 is pressed against the air sliding surface S1.
Has been polished.

That is, the concave spherical shape of the concave spherical polishing surface 20a of the polishing platen 20 is transferred to the air sliding surface S1 of the magnetic head slider S as a convex spherical surface, and the air sliding surface S1 of the magnetic head slider S is transferred. Thus, a positive crown and a positive camber are formed.

[0007]

The size of a magnetic head slider S currently used in a hard disk drive is 1.6 mm wide × 2.05 mm long × 0.43 mm thick or 1.0 mm wide × Length 1.25
The magnetic head slider S is a small chip-shaped component having a size of mm × thickness 0.3 mm. In the process of manufacturing such a small chip-shaped part, when goods are transferred or conveyed between processes in the manufacturing process, the items are usually arranged in a matrix as shown in FIG. A delivery case 30 provided with a pocket 30a capable of storing items individually in an organized manner is used. Also in the manufacturing process of the magnetic head slider, a delivery case 30 having a form as shown in FIG. 5 is used. In the manufacturing process of the magnetic head slider, the delivery case 3 having the form shown in FIG.
Items are usually transferred and transported between processes in a state where the magnetic head slider S is stored in a position 0. Here, in the delivery case 30 shown in FIG. 5, the number of pockets 30a for storing the magnetic head slider S is set to 25 in 5 rows and 5 columns.
Although omitted as individual pieces, in a delivery case actually used in the manufacturing process of the magnetic head slider, the number of rows and columns of the pockets 30a is both about 15 to 25, and the pockets 30a of about 200 to 600 pieces are formed. Is provided,
Approximately 200 to 600 magnetic head sliders S are stored.

However, in the conventional method of polishing the air sliding surface of a magnetic head slider and the polishing jig according to the prior art, the magnetic head slider S is held in a radial arrangement on the polishing jig plate 10 as shown in FIG. I have to do it. Therefore, when the air sliding surface S1 of the magnetic head slider S is polished by the above-mentioned conventional technique, the magnetic head sliders S arranged and arranged in a matrix in the delivery case 30 are taken out one by one. Therefore, there is a problem that a very labor-intensive operation such as rearranging one by one in a radial arrangement on the polishing jig plate 10 must be performed.

Further, during the manufacturing process of the magnetic head slider S, the polishing step of the air sliding surface S1 is performed by the air sliding surface S1.
1 has a throat height dimension S3 (shown in FIG. 2), which has a great influence on the electromagnetic conversion characteristics considered to be the most important for the magnetic head, at the same time as adjusting the shape to a convex spherical surface having a gentle curvature, to 1 micron or less. This is a step of determining with high accuracy. Therefore, in the polishing process of the air sliding surface S1, the polishing removal amount in the throat height dimension S3 direction is not varied,
It is important to polish evenly.

However, it is not guaranteed that the thickness dimensions of a plurality of magnetic head sliders which are polished at the same time as in the prior art are uniform with an accuracy of 1 micron or less. At present, the thickness tolerance in the completed state of the magnetic head slider is usually about ± 15 μm, so that there is a thickness variation of about 30 μm in width. When a plurality of magnetic head sliders having variations in thickness are radially arranged on the polishing jig plate 10 and polished by the above-described conventional technique, the magnetic head slider having a larger thickness naturally has a throat height S3. The amount of polishing removed in the direction increases, and the amount of polishing removed among a plurality of magnetic head sliders varies, resulting in variations. That is, when the air sliding surface S1 of the magnetic head slider S is polished by the above-described conventional technique, the polishing removal amount varies due to the thickness variation of the plurality of magnetic head sliders to be polished at the same time. There is a problem that it is difficult to cause variation in the throat height dimension S3 and determine the throat height dimension S3 with a high accuracy of 1 micron or less.

As described above, according to the conventional technique, the magnetic head sliders S must be taken out one by one from the transport case 30 and rearranged one by one on the polishing jig plate 10 in a radial manner. And a problem that the throat height dimension S3 cannot be determined with high precision because the throat height dimension S3 also varies due to variations in the thickness dimension between a plurality of magnetic head sliders that are polished at the same time.

Accordingly, the present invention has been made in view of such a problem, and an object of the present invention is to take out the magnetic head sliders S arranged in a matrix in the delivery case 30 one by one. A time-consuming operation such as rearrangement in a radial arrangement on the polishing jig plate 10 is eliminated, and a variation in the polishing removal amount due to a variation in the thickness dimension of a plurality of magnetic head sliders to be polished simultaneously is suppressed. An object of the present invention is to provide a polishing method and a polishing jig for a magnetic head slider, which can finish the height dimension S3 with high accuracy.

[0013]

In order to achieve the above object, a magnetic head slider polishing method and a polishing jig according to the present invention employ the following means.

In the present invention, the invention described in claim 1 is:
The back surface S2 of the magnetic head slider S opposite to the air sliding surface S1 of the magnetic head slider S is held on the polishing jig plate 10, and the air sliding surface S1 of the magnetic head slider S is replaced with the concave spherical polishing surface 20a. Polishing on a polishing platen 20 having
By transferring the shape of the concave spherical polishing surface 20a of the polishing platen 20 to the air sliding surface S1 of the magnetic head slider S as a convex spherical surface, the air sliding surface S of the magnetic head slider S is transferred.
The air sliding surface S of the magnetic head slider S which forms a positive crown C1 and a positive camber C2 in FIG.
In one polishing method, a plurality of magnetic head sliders S are held in a matrix on the lower surface of the polishing jig plate 10, and the air sliding surfaces S1 of the plurality of magnetic head sliders S are simultaneously placed. It is characterized in that polishing processing is performed at once.

In the invention according to the second aspect of the present invention, the matrix-like arrangement state includes a step of polishing the air sliding surface, a step of polishing the air sliding surface during the manufacturing process of the magnetic head slider S. The magnetic head slider S is arranged in the same manner as the magnetic head slider S in the transport case 30 in the transport case 30 used to transfer and convey the magnetic head slider S between the processes in the front-back relationship. .

According to the third aspect of the present invention, on the lower surface of the polishing jig plate 10, a sheet-like adhesive member 40 having an adhesive force to which the magnetic head slider S can be attached and detached is provided. The back surface S2 of the magnetic head slider S is adhesively held by the sheet-like adhesive member 40.

In the invention according to a fourth aspect of the present invention, the polishing jig plate 10 having the sheet-shaped adhesive member 40 provided on the lower surface of the polishing jig plate 10 includes And a shape that can be fitted in the form of a cover with the delivery case 30 so as to face the magnetic head slider storage surface.

In the invention according to claim 5 of the present invention, the polishing jig plate 10 is fitted in a lid shape with the delivery case 30 accommodating a plurality of magnetic head sliders S, and the top and bottom are adjusted. By reversing the upside down and disengaging from the delivery case, a plurality of magnetic head sliders S
Are placed on the polishing jig plate 10 and held by suction in a state of being arranged in a matrix in the transport case 30.

According to the sixth aspect of the present invention, the sheet-shaped adhesive member 40 is made of an elastic material, and when a predetermined polishing pressure is applied to the air sliding surface S1 of the magnetic head slider S. The amount of elastic compressive deformation in the thickness direction of the sheet is generated to be sufficiently larger than the dimensional variation of the thickness of the plurality of magnetic head sliders S to be polished at the same time.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below.
This will be described with reference to the drawings.

FIG. 1 is an explanatory view showing a method of polishing a magnetic head slider and a polishing jig according to the present invention, in which the air sliding surfaces S1 of a plurality of magnetic head sliders S are simultaneously polished collectively. Is shown. A plurality of magnetic head sliders S have a back surface S2 opposite to the air sliding surface S1.
Thus, the polishing jig plate 10 is held in a matrix arrangement. Then, the air sliding surfaces S1 of the plurality of magnetic head sliders S held on the polishing jig plate 10 are pressed against the polishing surface 20a of the polishing platen 20 having the concave spherical polishing surface 20a, and the air is pressed. The sliding surface S1 is polished. That is, the concave spherical polishing surface 20a of the polishing platen 20
The concave spherical shape of the air sliding surface S1 of the magnetic head slider S
Is transferred as a convex spherical surface, and a positive crown and a positive camber are formed on the air sliding surface S1 of the magnetic head slider S. Polishing jig plate 10
The lower surface of the magnetic head slider S, that is, the surface holding the magnetic head slider S, is polished by being rubbed in advance with a concave spherical polishing surface 20a of the polishing platen 20, and the concave spherical polishing surface 20a of the polishing platen 20 is It is a transferred spherical surface.

Here, the matrix arrangement in which the plurality of magnetic head sliders S are held on the polishing jig plate 10 means that each of the plurality of magnetic head sliders S is held during the manufacturing process of the magnetic head slider as shown in FIG. Delivery of goods between processes,
This is exactly the same as the arrangement and arrangement of the magnetic head sliders S in the transport case 30 used for carrying. Also, in the delivery case 30 shown in FIG. 5 and FIG. 1, the aligned arrangement of the magnetic head sliders S is omitted and shown as 25 rows and 5 columns, but actually the configuration of the number of rows and columns is omitted. Are around 15 to 25, and 200 to 60
About 0 magnetic head sliders S are arranged and arranged.

As means for holding the plurality of magnetic head sliders S on the polishing jig plate 10, a sheet-like adhesive member 40 having an adhesive force to which the magnetic head slider S can be attached and detached is provided on the lower surface of the polishing jig plate 10. It is attached to and provided. The magnetic head slider S is adhesively held by the adhesive force of the adhesive member 40.

Further, the polishing jig plate 10 has a lower surface provided with a sheet-like adhesive member 40 attached thereto, and the lower surface of the polishing jig plate 10 faces the magnetic head slider housing surface of the transmission case 30 shown in FIG. It has a shape that fits like a lid. Specifically, the polishing jig plate 1
0, the outer shape and dimensions of the delivery case 3 shown in FIG.
The polishing jig plate 10 has the same shape and the same size as the inside shape of the outer frame 30b so that the polishing jig plate 10 fits into a state like a lid of the delivery case 30.

Depending on the shape of the polishing jig plate 10 which is fitted into the delivery case 30 in a lid shape,
The plurality of magnetic head sliders S can be collectively placed on the polishing jig plate 10 by suction while being arranged in a matrix in the transfer case 30 and held by suction.
In the following, a plurality of magnetic head sliders S
A method of collectively mounting and adsorbing and holding onto the polishing jig plate 10 in a batch manner while keeping the matrix arrangement within 0 will be specifically described according to the procedure. First, the polishing jig plate 10 is fitted in a lid shape to the delivery case 30 in which the plurality of magnetic head sliders S are stored in the pockets 30a with the air sliding surface facing downward. Next, with the product case 30 and the polishing jig plate 10 fitted together, the top and bottom are turned upside down. Then, the plurality of magnetic head sliders S housed in the pockets 30a of the transport case 30 fall down to the polishing jig plate 10 while being arranged in the matrix in the transport case 30, and are transferred collectively. It is placed in a formula and is adhesively held by a sheet-like adhesive member 40 provided on the polishing jig plate 10. Finally, the fitting between the polishing jig plate 10 and the delivery case 30 is released,
When the delivery case 30 is removed from the polishing jig plate 10, a state is obtained in which a plurality of magnetic head sliders S are suction-held on the polishing jig plate 10 in a matrix arrangement in the delivery case 30. is there.

Further, in the embodiment of the present invention, as a means for holding a plurality of magnetic head sliders S on the polishing jig plate 10, a sheet-like adhesive member 40 attached to the lower surface of the polishing jig plate 10 is provided. Is a sheet-like adhesive member made of the following elastic body. That is, the air sliding surface S of the magnetic head slider S
An elastic body in which the amount of elastic compressive deformation in the thickness direction of a sheet generated when a predetermined polishing pressure is applied to 1 is sufficiently larger than the thickness variation of a plurality of magnetic head sliders which are simultaneously polished at once. Sheet adhesive member. As a result, variations in the thickness of the plurality of magnetic head sliders S, which are simultaneously polished at the same time, are canceled by the elastic compressive deformation of the sheet-like adhesive member made of an elastic material, and the thickness (height) is reduced. The air sliding surfaces S1 of a plurality of different magnetic head sliders S can be aligned in the same plane. That is, the polishing jig plate 1
By making the sheet-like adhesive member 40 attached to the lower surface of the magnetic head slider S to be a sheet-like adhesive member made of an elastic body as described above, the air sliding surfaces S1 of the plurality of magnetic head sliders S to be simultaneously polished are polished. The unevenness of the polishing removal amount of the air sliding surface S1 due to the uneven thickness of the magnetic head slider S is suppressed by uniformly contacting the concave spherical surface 20a of the surface plate 20.

As described in the section of the prior art, since the thickness tolerance of the magnetic head slider S is usually about ± 15 μm at present, there is a thickness variation of about 30 μm in width. doing. Therefore, in one example of the embodiment of the present invention, the amount of elastic compressive deformation in the sheet-like thickness direction generated when a predetermined polishing pressure is applied to the air sliding surface S1 of the magnetic head slider S is specifically described. Uses a sheet-like adhesive member 40 made of an elastic material of 30 microns or more. Here, the predetermined polishing pressure is a pressure at which a load of 20 grams is applied to one air sliding surface S1.

[0028]

As apparent from the above description, in the polishing method and the polishing jig of the magnetic head slider according to the present invention, a plurality of magnetic head sliders S are arranged in a matrix on the lower surface of the polishing jig plate 10. While maintaining the arrangement state, the air sliding surfaces S1 of the plurality of magnetic head sliders S are simultaneously polished at once.

During the manufacturing process of the magnetic head slider S, the magnetic head slider S is transferred and conveyed between the air sliding surface polishing step and the step which is in front of the air sliding surface polishing step during the manufacturing process of the magnetic head slider S. Of the magnetic head sliders S in the transfer case 30 in the transfer case 30 used for the transfer.

On the lower surface of the polishing jig plate 10, a sheet-like adhesive member 40 having an adhesive force to which the magnetic head slider S can be attached and detached is provided, and the back surface S2 of the magnetic head slider S is attached to the sheet-like The adhesive member 40 holds the adhesive.

The polishing jig plate 10 having the sheet-like adhesive member 40 provided on the lower surface thereof is provided with the sheet-like adhesive member face facing the magnetic head slider housing surface of the delivery case 30. The shape is such that it can be fitted to the case 30 in a lid shape.

The polishing jig plate 10 is fitted in a lid shape with the delivery case 30 containing a plurality of magnetic head sliders S, and the top and bottom are turned upside down. By unwinding, the plurality of magnetic head sliders S are placed on the polishing jig plate 10 and held by suction in a state of being arranged in a matrix in the transfer case 30.

The sheet-like adhesive member 40 is made of an elastic material, and the amount of elastic compressive deformation in the sheet-like thickness direction caused when a predetermined polishing pressure is applied to the air sliding surface S1 of the magnetic head slider S is as follows. The thickness variation of the plurality of magnetic head sliders S to be polished simultaneously at the same time is sufficiently larger than the dimensional variation.

Therefore, the time-consuming operation of taking out the magnetic head sliders S arranged and stored in the transfer case 30 one by one and rearranging them in a radial arrangement on the polishing jig plate 10 is eliminated. In addition, a method of polishing a magnetic head slider capable of finishing a throat height dimension S3 with high precision by suppressing a variation in a polishing removal amount due to a thickness dimension variation of a plurality of magnetic head sliders S to be simultaneously polished. A polishing jig was provided.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a method of polishing a magnetic head slider and a polishing jig according to the present invention.

FIG. 2 is an explanatory diagram showing a crown and a camber and a throat height on an air sliding surface of a magnetic head slider.

FIG. 3 is an explanatory view showing a polishing jig plate and an arrangement of a magnetic head slider in a conventional technique.

FIG. 4 is an explanatory view showing a method of polishing an air sliding surface of a magnetic head slider in a conventional technique.

FIG. 5 is an explanatory view showing a delivery case used in a manufacturing process of a small chip-shaped component and a magnetic head slider.

[Explanation of symbols]

 S Magnetic head slider S1 Air sliding surface S2 Back surface C1 Crown C2 Camber 10 Polishing jig plate 20 Polishing platen 20a Polishing surface 30 Sending case 40 Adhesive member

Claims (6)

[Claims] A polishing jig plate for holding the back surface of the magnetic head slider opposite to the air sliding surface of the magnetic head slider, and polishing the air sliding surface of the magnetic head slider with a concave spherical polishing surface; By polishing on the surface plate and transferring the concave spherical surface shape of the polishing surface plate to the air sliding surface of the magnetic head slider as a convex spherical surface, a positive crown and a positive surface are formed on the air sliding surface of the magnetic head slider. In the polishing method of the air sliding surface of the magnetic head slider forming a camber, a plurality of magnetic head sliders are held on a lower surface of the polishing jig plate in a matrix arrangement. A polishing method for a magnetic head slider, wherein the air sliding surfaces of the head slider are simultaneously polished at once. 2. The method according to claim 1, wherein the step of polishing the air sliding surface and the step of polishing the air sliding surface are performed during a manufacturing process of the magnetic head slider. 2. The method according to claim 1, wherein the magnetic head sliders are arranged in the same manner as the magnetic head sliders in the transport case used in the transport. 3. A lower surface of the polishing jig plate is provided with a sheet-like adhesive member having an adhesive force to which the magnetic head slider can be attached and detached, and a back surface of the magnetic head slider is covered with the sheet-like adhesive member. A polishing jig for a magnetic head slider, which is held by adhesion. 4. The polishing jig provided with the sheet-shaped adhesive member on a lower surface thereof, wherein the sheet-shaped adhesive member face and the magnetic head slider storage surface of the transport case are connected to the polishing case. The polishing jig for a magnetic head slider according to claim 3, wherein the polishing jig has a shape that can be fitted in a lid shape. 5. After the polishing jig of the magnetic head slider according to claim 4 is fitted in a lid shape with the delivery case accommodating a plurality of magnetic head sliders, and after the head is turned upside down. The polishing jig of the magnetic head slider according to claim 4, wherein the plurality of magnetic head sliders are kept in a matrix arrangement in the transport case by releasing the fitting with the transport case. 3. The method for polishing a magnetic head slider according to claim 2, wherein the magnetic head slider is mounted and sucked and held collectively. 6. The sheet-like pressure-sensitive adhesive member is an elastic body,
Regarding the amount of elastic compressive deformation in the sheet-like thickness direction that occurs when a predetermined polishing pressure is applied to the air sliding surface of the magnetic head slider, the thickness of the plurality of magnetic head sliders that are simultaneously polished simultaneously is determined. A polishing jig for a magnetic head slider, wherein the polishing jig is sufficiently larger than the dimensional variation.