JPH11329211A - Impregnated negative electrode and manufacture thereof and electron gun thereof - Google Patents
Impregnated negative electrode and manufacture thereof and electron gun thereofInfo
- Publication number
- JPH11329211A JPH11329211A JP13239398A JP13239398A JPH11329211A JP H11329211 A JPH11329211 A JP H11329211A JP 13239398 A JP13239398 A JP 13239398A JP 13239398 A JP13239398 A JP 13239398A JP H11329211 A JPH11329211 A JP H11329211A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- impregnated cathode
- impregnated
- electron emission
- barium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Microwave Tubes (AREA)
- Solid Thermionic Cathode (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、例えば進行波管
（ＴＷＴ）の電子ビーム発生源に用いられる含浸型陰極
および電子銃の構造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of an impregnated cathode and an electron gun used for an electron beam source of a traveling wave tube (TWT), for example.
【０００２】[0002]
【従来の技術】図８は、例えば“Ｍｏｄｅｒｎ ｄｉｓ
ｐｅｎｓｅｒ ｃａｔｈｏｄｅｓ”ｂｙ Ｊ．Ｌ．Ｃｒ
ｏｎｉｎ，Ｐｈ．Ｄ．（ＩＥＥＰＲＯＣ．，Ｖｏｌ．１
２８．ＰＴ．Ｉ，Ｎｏ．１，ＦＥＢＲＵＡＲＹ １９８
１）等に示されている従来の含浸型陰極の概略断面図で
ある。図９，図１０は、この図８に示す含浸型陰極を含
む特開昭６１−２００６４２等に示されている従来のＴ
ＷＴ用電子銃の概略構成図である。各図において、１は
先端面が湾状に窪む含浸型陰極、２は筒体より成る電子
放出体保持部、３は含浸型陰極１の下部に位置するヒー
ター、４は含浸型陰極１の表面である電子放出面、５は
上記ヒーター３を被うヒーター絶縁材、６は含浸型陰極
１とヒーター絶縁材５との間に介在された遮蔽板、７は
陰極表面に密着されたマスク電極、８は上記マスク電極
より微少間隔離れて位置するビーム引き出し電極であ
る。2. Description of the Related Art FIG. 8 shows, for example, "Modern dis
penner cathodes "by JL Cr
onin, Ph. D. (IEPROC., Vol. 1
28. PT. I, No. 1, FEBRUARY 198
It is a schematic sectional drawing of the conventional impregnation type cathode shown in 1) etc. FIGS. 9 and 10 show a conventional T-type transistor including the impregnated cathode shown in FIG.
It is a schematic structure figure of an electron gun for WT. In each of the figures, reference numeral 1 denotes an impregnated cathode whose tip surface is depressed in a bay shape, 2 denotes an electron emitter holding portion formed of a cylindrical body, 3 denotes a heater located below the impregnated cathode 1, and 4 denotes an impregnated cathode 1. The surface is an electron emission surface, 5 is a heater insulator covering the heater 3, 6 is a shielding plate interposed between the impregnated cathode 1 and the heater insulator 5, and 7 is a mask electrode adhered to the cathode surface. Reference numerals 8 denote beam extraction electrodes located at a minute distance from the mask electrode.
【０００３】以上の構成において、現在一般に利用され
ているバリウム−カルシウムアルミネートを含浸させて
いる含浸型陰極を例に挙げると、この種の含浸型陰極１
は、一般に基体金属である多孔質タングステンにＢａ
Ｏ、ＣａＯ、Ａｌ2Ｏ3からなる電子放出材料を適当なモ
ル比で含浸させたものであり、ヒーター絶縁材５で覆わ
れたヒーター３をこの含浸型陰極１の非電子放出面のあ
る下面で接触させて、これらを電子放出体保持部２内に
収容して固定したものである。電子放出時は、アルミナ
等からなるヒーター絶縁材５で覆われたヒーター３に通
電し、ヒーター３を加熱する。加熱されたヒーター３
は、ヒーター絶縁材５及び遮蔽板６を介して含浸型陰極
１のヒーター部接触面を加熱する。接触面より加熱され
た含浸型陰極１では、含浸型陰極１内の含浸材が拡散
し、電子放出面４上にバリウムの単原子層が形成され
る。電子放出面４上にできたバリウムの単原子層が双極
子になり電位障壁を下げる働きをし、カソードとしての
仕事関数を下げて電子を放出する。In the above configuration, an example of an impregnated cathode impregnated with barium-calcium aluminate, which is generally used at present, is given as an example.
Can be obtained by adding Ba to porous tungsten, which is generally a base metal.
An electron emitting material composed of O, CaO, and Al 2 O 3 is impregnated at an appropriate molar ratio, and a heater 3 covered with a heater insulating material 5 is provided on a lower surface of the impregnated cathode 1 having a non-electron emitting surface. , And these are accommodated and fixed in the electron emitter holding section 2. At the time of electron emission, the heater 3 covered with the heater insulating material 5 made of alumina or the like is energized to heat the heater 3. Heated heater 3
Heats the heater contact surface of the impregnated cathode 1 via the heater insulating material 5 and the shielding plate 6. In the impregnated cathode 1 heated from the contact surface, the impregnating material in the impregnated cathode 1 diffuses, and a barium monoatomic layer is formed on the electron emission surface 4. The monoatomic layer of barium formed on the electron emission surface 4 becomes a dipole and functions to lower the potential barrier, and lowers the work function as a cathode to emit electrons.
【０００４】このような含浸型陰極１を有する電子銃
は、図９，図１０で示したように上記含浸型陰極１の電
子放出面４の全面に配置されるマスク電極７およびマス
ク電極７の前面に設置されるビーム引き出し電極８とか
ら構成される。マスク電極７は、複数の開口部７ａを有
して格子状となっており、電子放出面４に密着されてお
り、マスク電極７の開口部からのみ電子が放出され、放
出された電子は格子状のビーム引き出し電極８によって
加速される。An electron gun having such an impregnated cathode 1 has a mask electrode 7 disposed on the entire electron emission surface 4 of the impregnated cathode 1 as shown in FIGS. And a beam extraction electrode 8 installed on the front surface. The mask electrode 7 has a lattice shape with a plurality of openings 7a, is in close contact with the electron emission surface 4, and emits electrons only from the openings of the mask electrode 7. It is accelerated by the beam extraction electrode 8 having the shape.
【０００５】[0005]
【発明が解決しようとする課題】従来の含浸型陰極を用
いた進行波管電子銃では、マスク電極７を電子放出面４
に密着させる構造になっているため、十分な密着ができ
ていないとこれらの間に発生したギャップから電子が放
出されてしまい、設計とは異なる電子放出がおこる。ま
た、電子放出面４に対してマスク電極７およびビーム引
き出し電極８の２枚の電極を同軸上に接地する構造にな
っているため各電極で軸ずれが生じるとビームが設計軌
道からずれ、進行波管としての性能低下が起こる等の問
題点があった。In a conventional traveling-wave tube electron gun using an impregnated cathode, the mask electrode 7 is connected to the electron emission surface 4.
If the contact is not sufficient, electrons are emitted from the gap generated between them, and electron emission different from the design occurs. Further, since the two electrodes of the mask electrode 7 and the beam extraction electrode 8 are coaxially grounded with respect to the electron emission surface 4, when an axis shift occurs in each electrode, the beam shifts from the design trajectory and proceeds. There have been problems such as a decrease in performance as a waveguide.
【０００６】この発明は上記のような問題点を解決する
ためになされたもので、陰極表面の電子放出面とマスク
電極との密着性を向上して、電子放出を設計通り正確に
行えるようにするとともに、電極の軸ずれが生じにくい
陰極及び電子銃を得ることを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and improves the adhesion between an electron emission surface of a cathode surface and a mask electrode so that electron emission can be performed accurately as designed. It is another object of the present invention to obtain a cathode and an electron gun in which the electrode is less likely to be misaligned.
【０００７】[0007]
【課題を解決するための手段】請求項１に記載の発明
は、含浸型陰極の電子放出面に電子放出部と電子非放出
部とを同時に形成したものである。According to the first aspect of the present invention, an electron emitting portion and an electron non-emitting portion are simultaneously formed on an electron emitting surface of an impregnated cathode.
【０００８】請求項２に記載の発明は、含浸型陰極の基
体金属にＣａＯとＡｌ2Ｏ3のいずれか又は両方を含浸す
る。According to the invention of claim 2, the base metal of the impregnated cathode is impregnated with one or both of CaO and Al 2 O 3 .
【０００９】請求項３に記載の発明は、含浸材としてＳ
ｃ2Ｏ3を混ぜたものか、Ｗ粉末にＢａＯとＳｃ2Ｏ3とを
混ぜたものを用いる。[0009] The invention according to claim 3 is that the impregnating material is S
A mixture of c 2 O 3 or a mixture of Ba powder and Sc 2 O 3 in W powder is used.
【００１０】請求項４に記載の発明は、含浸型陰極の表
面に所定パターンの溝を付加することで、表面に上記電
子非放出部を形成したものである。According to a fourth aspect of the present invention, the electron non-emitting portion is formed on the surface of the impregnated cathode by adding grooves of a predetermined pattern to the surface.
【００１１】請求項５に記載の発明は、含浸型陰極の表
面に所定パターンに水分を付着させることで、表面に上
記電子非放出部を形成したものである。According to a fifth aspect of the present invention, the electron non-emitting portion is formed on the surface of the impregnated cathode by adhering moisture to the surface of the cathode in a predetermined pattern.
【００１２】請求項６に記載の発明は、請求項１又は請
求項２のいずれかに記載の含浸型陰極の表面側に、一定
間隔離れてビーム引き出し電極を配置して構成したもの
である。According to a sixth aspect of the present invention, a beam extraction electrode is arranged at a predetermined interval on the surface side of the impregnated cathode according to the first or second aspect.
【００１３】[0013]
【発明の実施の形態】実施の形態１．図１は、本発明に
おける含浸型陰極１の実施の形態１の断面概略図であ
り、図８〜図１０と同じものは同一符号を用いている。
この図において、９は含浸型陰極１の表面（電子放出面
４）に一体に形成される電子放出部、１０は上記電子放
出部９形成されてない部分より成る電子非放出部であ
り、これ等は同時に、すなわち一体的に電子放出面４内
に形成されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is a schematic cross-sectional view of Embodiment 1 of an impregnated cathode 1 according to the present invention, and the same components as those in FIGS. 8 to 10 are denoted by the same reference numerals.
In this figure, reference numeral 9 denotes an electron emitting portion integrally formed on the surface (electron emitting surface 4) of the impregnated cathode 1, and 10 denotes an electron non-emitting portion which is a portion where the electron emitting portion 9 is not formed. Are formed in the electron emission surface 4 at the same time, that is, integrally.
【００１４】通常、電子は、含浸型陰極１の電子放出面
４上にバリウムの単原子層が形成されることで放出され
る。このため、電子の放出を必要としない部分にはバリ
ウムの単原子層の形成は不要である。本実施の形態で
は、電子放出面４内で電子放出の必要がない部分にはバ
リウムが拡散によって電子放出面４上に現れないように
電子放出面４の改質を施すことにより、電子非放出部９
を形成したものである。この電子放出面４の改質は、機
械的に含浸材の拡散経路を遮断する方法で実施する。例
えば、図２に示すように電子放出面４の表面を格子状の
パターンに沿って削り加工などで、溝１０ａを作ること
で、この溝１０ａ部分の表面近傍の多孔質タングステン
を破壊し、加熱にもとづくバリウムの拡散経路を遮断す
る。加熱時に拡散経路が遮断されるとバリウムは表面上
に現れないためこの部分が電子非放出部１０となり、他
の表面は電子放出部９となる。このようにしたできた含
浸型陰極１は、電子放出面４上に電子放出部９と電子非
放出部１０を同時に、すなわち一体的に持つものであ
る。つまり、溝１０ａを形成した場合は、図３に示すよ
うに、溝１０ａに相当する部分からのバリウムの拡散は
認められない。この場合、含浸型陰極１における含浸材
はＢａＯ，ＣａＯ，Ａｌ2Ｏ3であり、この含浸材は約
１，１００度で次式の反応を起こす。Usually, electrons are emitted by forming a monoatomic layer of barium on the electron emission surface 4 of the impregnated cathode 1. For this reason, it is unnecessary to form a barium monoatomic layer in a portion that does not require electron emission. In the present embodiment, the electron emission surface 4 is modified so that barium does not appear on the electron emission surface 4 by diffusion in a portion of the electron emission surface 4 that does not need to emit electrons, so that electron emission is not performed. Part 9
Is formed. The modification of the electron emission surface 4 is performed by a method of mechanically blocking the diffusion path of the impregnating material. For example, as shown in FIG. 2, by forming a groove 10a by shaving the surface of the electron emission surface 4 along a lattice-like pattern, the porous tungsten near the surface of the groove 10a is destroyed and heated. To block the diffusion path of barium. If the diffusion path is cut off during heating, barium does not appear on the surface, so this portion becomes the electron non-emitting portion 10 and the other surface becomes the electron emitting portion 9. The impregnated cathode 1 thus produced has an electron emitting portion 9 and an electron non-emitting portion 10 on the electron emitting surface 4 simultaneously, that is, integrally. That is, when the groove 10a is formed, as shown in FIG. 3, diffusion of barium from a portion corresponding to the groove 10a is not recognized. In this case, the impregnating material in the impregnated cathode 1 is BaO, CaO, Al 2 O 3 , and this impregnating material causes the following reaction at about 1,100 degrees.
【００１５】[0015]
【数１】 (Equation 1)
【００１６】なお、バリウムの拡散は約１，０００度か
ら起こるといわれている。次に電子放出の動作について
説明する。説明には、現在一般に利用されているバリウ
ム−カルシウムアルミネートを含浸させている含浸型陰
極を例に挙げる。含浸型陰極１は、一般に基体金属であ
る多孔質タングステンにＢａＯ、ＣａＯ、Ａｌ2Ｏ3から
なる電子放出材料を適当なモル比で含浸させたものであ
り、ヒーター絶縁材５で被われたヒーター３を含浸型陰
極１の非電子放出面のある下面で接触させて、これらを
電子放出体保持部２に内に収容して固定したものであ
る。It is said that the diffusion of barium occurs from about 1,000 degrees. Next, the operation of electron emission will be described. In the description, an impregnated cathode impregnated with barium-calcium aluminate, which is currently generally used, will be described as an example. The impregnated cathode 1 is generally obtained by impregnating porous tungsten, which is a base metal, with an electron-emitting material composed of BaO, CaO, and Al 2 O 3 at an appropriate molar ratio. 3 is brought into contact with the lower surface of the impregnated cathode 1 having the non-electron emission surface, and these are housed and fixed in the electron emitter holder 2.
【００１７】電子放出時は、アルミナ等からなるヒータ
ー絶縁材５で被われたヒーター３に通電し、ヒーター３
を加熱する。加熱されたヒーター３は、ヒーター絶縁材
５および遮蔽板６を介して含浸型陰極１のヒーター部接
触面を加熱する。接触面より加熱された含浸型陰極１で
は、含浸型陰極１内の含浸材料が拡散し、電子放出面４
上にバリウムの単原子層が形成される。電子放出面４上
にできたバリウムの単原子層が双極子になり電位障壁を
下げる働きをし、カソードとしての仕事関数を下げて電
子を放出する。At the time of electron emission, the heater 3 covered with a heater insulating material 5 made of alumina or the like is energized,
Heat. The heated heater 3 heats the heater unit contact surface of the impregnated cathode 1 via the heater insulating material 5 and the shielding plate 6. In the impregnated cathode 1 heated from the contact surface, the impregnated material in the impregnated cathode 1 diffuses and the electron emission surface 4
A monolayer of barium is formed thereon. The monoatomic layer of barium formed on the electron emission surface 4 becomes a dipole and functions to lower the potential barrier, and lowers the work function as a cathode to emit electrons.
【００１８】実施の形態２．実施の形態２として、化学
反応を応用して電子放出面の改質を施すことにより、電
子非放出部１０を形成する場合について説明する。本実
施の形態２によってできる含浸型陰極は図１に示すもの
と同等の形状および効果を持つものである。本実施の形
態２の電子放出面４の改質は、化学反応を利用し含浸材
の拡散経路を遮断する方法で実施する。例えば、図４に
示すように電子放出面４の表面に格子状の開口部に対応
してマスク９ａを被着し、マスク９ａの開口部を介して
微量の水分を付着して含ませた含浸型陰極１を１，００
０度以上の温度にさらして、表面近傍の多孔質タングス
テンおよび含浸材を反応させることで、バリウムの拡散
経路を遮断する。拡散経路が遮断されるとバリウムは表
面上に現れないため図５に示すようにこの水分と反応し
てバリウムを供給できない領域Ｒが生成されて、この部
分が格子状の電子非放出部１０となりマスク９ａを除去
した表面が電子放出部９となる。すなわち本例は、含浸
材が一般に水分（多湿雰囲気）に弱く、水分と反応する
とＢａを供給するための反応ができなくなる。この性質
を利用して、電子非放出部１０に対応する個所に水分を
与え供給反応を妨げたものである。このようにしてでき
た含浸型陰極は、電子放出面４内に電子放出部９と電子
非放出部１０を同時に、すなわち、一体的に持つものと
なる。図６には微量の水分を付けた所ＧからバリウムＢ
ａの拡散が遮断される様子を示す。Embodiment 2 FIG. As a second embodiment, a case where the electron non-emitting portion 10 is formed by modifying the electron emitting surface by applying a chemical reaction will be described. The impregnated cathode made according to the second embodiment has the same shape and effect as those shown in FIG. The modification of the electron emission surface 4 according to the second embodiment is performed by a method of blocking the diffusion path of the impregnating material using a chemical reaction. For example, as shown in FIG. 4, impregnation in which a mask 9a is applied to the surface of the electron emission surface 4 corresponding to the lattice-shaped openings and a small amount of moisture is attached and contained through the openings of the mask 9a Type cathode 1
By exposing the porous tungsten and the impregnating material near the surface to the temperature of 0 ° C. or more, the diffusion path of barium is blocked. When the diffusion path is cut off, barium does not appear on the surface, so that as shown in FIG. 5, a region R where barium cannot be supplied by reacting with this moisture is generated, and this portion becomes a grid-like electron non-emission portion 10. The surface from which the mask 9a has been removed becomes the electron emission portion 9. That is, in this example, the impregnating material is generally weak to moisture (humid atmosphere), and if it reacts with moisture, the reaction for supplying Ba cannot be performed. Utilizing this property, water is given to a portion corresponding to the electron non-emission portion 10 to hinder the supply reaction. The impregnated cathode thus formed has the electron emission portion 9 and the electron non-emission portion 10 in the electron emission surface 4 at the same time, that is, integrally. FIG. 6 shows the barium B from the place G with a small amount of moisture.
4 shows how the diffusion of a is blocked.
【００１９】実施の形態３．実施の形態３として、上記
実施の形態１または上記実施の形態２による含浸型陰極
を用いた進行波管の電子銃について述べる。本実施の形
態３では、上記各実施の形態１，２の含浸型陰極を使用
するため、従来設置されていたマスク電極７の機能が含
浸型陰極の電子放出面４上にあるため従来のマスク電極
７は不要となる。そのため、図７に示すように引き出し
電極８を電子放出部９および電子非放出部１０が同時に
形成されている電子放出面４前面に設置することで従来
と同様の効果を持つ電子銃が得られる。なお、本実施の
形態１，２，３で用いる含浸型陰極１の含浸材はＢａ
Ｏ、ＣａＯ、Ａｌ2Ｏ3を任意のモル比で化合したものが
主であるが、本発明では、上記含浸材にＳｃ2Ｏ3を混ぜ
るものやＷ粉末にＢａＯ、Ｓｃ2Ｏ3を混ぜるものを用い
てもよい。ただし、ＢａＯは、電子放出のための必須酸
化物である。Embodiment 3 As Embodiment 3, an electron gun of a traveling wave tube using the impregnated cathode according to Embodiment 1 or 2 will be described. In the third embodiment, since the impregnated cathode of each of the first and second embodiments is used, the function of the mask electrode 7 which has been conventionally provided is on the electron emission surface 4 of the impregnated cathode. The electrode 7 becomes unnecessary. Therefore, as shown in FIG. 7, by installing the extraction electrode 8 on the front surface of the electron emission surface 4 where the electron emission portion 9 and the electron non-emission portion 10 are formed at the same time, an electron gun having the same effect as that of the related art can be obtained. . The impregnating material of the impregnated cathode 1 used in the first, second, and third embodiments is Ba.
O, CaO, and Al 2 O 3 are mainly combined at an arbitrary molar ratio. In the present invention, BaO and Sc 2 O 3 are mixed with the impregnating material mixed with Sc 2 O 3 or W powder. A thing may be used. However, BaO is an essential oxide for electron emission.
【００２０】[0020]
【発明の効果】請求項１の発明によれば、含浸型陰極の
電子放出面に電子放出部と電子非放出部とを同時に形成
したので、電子放出部が電子放出面に一体化されるの
で、両者にギャップが発生せず、電子を確実に設計に見
合う量だけ放出できるとともに、ビームを設計軌道にし
たがって放射できる。According to the first aspect of the present invention, since the electron emitting portion and the non-electron emitting portion are simultaneously formed on the electron emitting surface of the impregnated cathode, the electron emitting portion is integrated with the electron emitting surface. In addition, there is no gap between the two, the electrons can be reliably emitted in an amount corresponding to the design, and the beam can be emitted according to the design trajectory.
【００２１】請求項２の発明によれば、含浸型陰極の基
体金属に、ＣａＯとＡｌ2Ｏ3のいずれか又は両方を含浸
させたので、電子放射特性を向上できる。According to the second aspect of the present invention, since the base metal of the impregnated cathode is impregnated with one or both of CaO and Al 2 O 3 , the electron emission characteristics can be improved.
【００２２】請求項３の発明によれば、Ｓｃ2Ｏ3、又は
ＷとＳｃ2Ｏ3とを含浸させたので、電子放射特性をさら
に向上できる。According to the third aspect of the present invention, since Sc 2 O 3 or W and Sc 2 O 3 are impregnated, the electron emission characteristics can be further improved.
【００２３】請求項４の発明によれば、含浸型陰極の表
面に溝を付加して電子非放出部を形成したので、この溝
を切削加工等で形成できるので、電子非放出部を高精度
で形成できる。According to the fourth aspect of the present invention, since a groove is added to the surface of the impregnated cathode to form the electron non-emitting portion, the groove can be formed by cutting or the like, so that the electron non-emitting portion can be formed with high precision. Can be formed.
【００２４】請求項５の発明によれば、所定パターンで
水分を付着させて加熱処理することにより、電子非放出
部を形成したので、製造が容易となる。According to the fifth aspect of the present invention, since the electron non-emitting portion is formed by applying moisture in a predetermined pattern and performing a heat treatment, the manufacturing becomes easy.
【００２５】請求項６の発明によれば、請求項１又は２
の含浸型陰極の表面側にビーム引き出し電極を配置して
構成したので、設計にもとづく電子ビームの放出が行え
る電子銃が得られる。According to the invention of claim 6, claim 1 or 2
Since the beam extraction electrode is arranged on the surface side of the impregnated cathode described above, an electron gun capable of emitting an electron beam based on the design can be obtained.
【図１】 本発明による含浸型陰極の一実施の形態を示
す断面図である。FIG. 1 is a sectional view showing one embodiment of an impregnated cathode according to the present invention.
【図２】 本発明による含浸型陰極の製造方法を説明す
る断面図である。FIG. 2 is a cross-sectional view illustrating a method for manufacturing an impregnated cathode according to the present invention.
【図３】 本発明による含浸型陰極のバリウム遮断の様
子を示す図である。FIG. 3 is a view showing a state of barium blocking of an impregnated cathode according to the present invention.
【図４】 本発明による含浸型陰極の製造方法を説明す
る断面図である。FIG. 4 is a cross-sectional view illustrating a method of manufacturing an impregnated cathode according to the present invention.
【図５】 本発明による含浸型陰極の製造方法を説明す
る断面図である。FIG. 5 is a cross-sectional view illustrating a method of manufacturing an impregnated cathode according to the present invention.
【図６】 本発明による含浸型陰極のバリウム遮断の様
子を示す図である。FIG. 6 is a view showing a state of barium blocking of an impregnated cathode according to the present invention.
【図７】 本発明による含浸型陰極の他の実施の形態を
示す断面図である。FIG. 7 is a sectional view showing another embodiment of the impregnated cathode according to the present invention.
【図８】 従来の含浸型陰極の一例を示す図である。FIG. 8 is a diagram showing an example of a conventional impregnated cathode.
【図９】 従来の含浸型陰極を用いた電子銃の一例を示
す斜視図である。FIG. 9 is a perspective view showing an example of an electron gun using a conventional impregnated cathode.
【図１０】 従来の含浸型陰極を用いた電子銃の一例を
示す断面図である。FIG. 10 is a sectional view showing an example of a conventional electron gun using an impregnated cathode.
１ 含浸型陰極、２ 電子放出体保持部、３ ヒータ
ー、４ 電子放出面、５ ヒーター絶縁材、６ 遮蔽
板、７ 陰極表面マスク電極、８ ビーム引き出し電
極、９ 電子放出部、１０ 電子非放出部。REFERENCE SIGNS LIST 1 impregnated cathode, 2 electron emitter holder, 3 heater, 4 electron emission surface, 5 heater insulating material, 6 shield plate, 7 cathode surface mask electrode, 8 beam extraction electrode, 9 electron emission portion, 10 electron non-emission portion .
Claims (6)
が含浸材として含浸されている基体金属から成る含浸型
陰極において、この含浸型陰極の電子放出面に電子放出
部と電子非放出部とが同時に形成されて成ることを特徴
とする含浸型陰極。1. It has tungsten and at least BaO
An impregnated cathode comprising a base metal impregnated as an impregnating material, wherein an electron emitting portion and an electron non-emitting portion are simultaneously formed on an electron emitting surface of the impregnated cathode.
は両方を含むことを特徴とする請求項１に記載の含浸型
陰極。2. The impregnated cathode according to claim 1, wherein the impregnating material contains one or both of CaO and Al 2 O 3 .
Ｗ粉末にＢａＯとＳｃ2Ｏ3とを混ぜたものを用いて成る
請求項１に記載の含浸型陰極。3. A mixture of Sc 2 O 3 as an impregnating material,
Impregnated cathode according to claim 1, in W powder made using what mixed BaO, Sc 2 O 3.
付加することで、加熱に基づくバリウムの拡散経路を遮
断するようにし、この遮断された表面に上記電子非放出
部を形成したことを特徴とする請求項１に記載の含浸型
陰極の製造方法。4. A method in which a groove having a predetermined pattern is added to the surface of the impregnated cathode to block a diffusion path of barium due to heating, and that the non-electron-emitting portion is formed on the blocked surface. The method for producing an impregnated cathode according to claim 1.
を付着させることで、加熱に基づくバリウムの拡散経路
を遮断するようにし、この遮断された表面に上記電子非
放出部を形成したことを特徴とする請求項１に記載の含
浸型陰極の製造方法。5. A method in which water is adhered to a surface of the impregnated cathode in a predetermined pattern to block a diffusion path of barium due to heating, and to form the non-electron emission portion on the blocked surface. The method for producing an impregnated cathode according to claim 1.
の含浸型陰極の表面側に、一定間隔離れてビーム引きだ
し電極を配置して構成された電子銃。6. An electron gun comprising a beam extraction electrode arranged at a predetermined interval on the surface side of the impregnated cathode according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13239398A JPH11329211A (en) | 1998-05-14 | 1998-05-14 | Impregnated negative electrode and manufacture thereof and electron gun thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13239398A JPH11329211A (en) | 1998-05-14 | 1998-05-14 | Impregnated negative electrode and manufacture thereof and electron gun thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11329211A true JPH11329211A (en) | 1999-11-30 |
Family
ID=15080347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13239398A Pending JPH11329211A (en) | 1998-05-14 | 1998-05-14 | Impregnated negative electrode and manufacture thereof and electron gun thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11329211A (en) |
-
1998
- 1998-05-14 JP JP13239398A patent/JPH11329211A/en active Pending
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