JPH11328644A - Manufacture for head slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacture for a head slider whereby a face of the head slider opposed to an information recording medium can be simply formed in a spherical shape. SOLUTION: A slider substrate 14 set at a holding member 18 of silicon is kept in a recessed part 18a which can hold the slider substrate 14. The holding member 18 is arranged on an abrasive disc 17 having an abrasive face of a predetermined curvature. One face of the slider substrate 14 is slid along the abrasive face by oscillating the holding member 18, thereby being processed to a curve of the predetermined curvature.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a head slider having a magnetic head for recording and reproducing information on and from an information recording medium such as a magnetic disk and a magneto-optical disk.

[0002]

2. Description of the Related Art For example, in a computer system, a hard disk device is used as a magnetic disk device. Magnetic films are formed on both surfaces of a magnetic disk built in this hard disk device, and a magnetic head mounted on a head slider that turns while floating on the surface of a rotating magnetic disk,
Information is recorded on the magnetic film in the form of a track, and information recorded on the magnetic film in the form of a track is reproduced.

FIG. 5 is a perspective view showing an example of a general head slider. The head slider 1 has an air bearing surface (A) on both sides of the surface 1a facing the magnetic disk and parallel to the rotation direction of the magnetic disk.
Rails 1b and 1c acting as BS) are formed. A surface 1d orthogonal to the surface 1a facing the magnetic disk and orthogonal to the rotation direction of the magnetic disk
, A thin-film magnetic head 2 is mounted.

When the head slider 1 approaches the surface of a rotating magnetic disk, the head slider 1 flies due to the airflow flowing between the rails 1b and 1c and the surface of the magnetic disk as the magnetic disk rotates. Since the magnetic disk is subjected to the force, the magnetic disk levitates and travels at a minute interval (flying height) from the surface of the magnetic disk. Then, the head slider 1 performs a seek operation on the magnetic disk, and the thin-film magnetic head 2 records and reproduces information on and from a predetermined track of the magnetic disk in a non-contact manner.

Here, in general, in order to improve the electromagnetic conversion characteristics of a magnetic head, it is effective to reduce the magnetic spacing between the magnetic head and the magnetic disk. As a method of reducing the magnetic spacing in the above-described hard disk drive, there is a method of reducing the flying height of the head slider 1. However, when the flying height of the head slider 1 is reduced, the head slider 1 may come into contact with the magnetic disk.

When the head slider 1 comes into contact with the magnetic disk, the rails 1b, 1c of the head slider 1
May damage the surface of the magnetic disk. Therefore, in order to round the edges of the rails 1b and 1c, the surfaces (A
As shown in FIGS. 6A and 6B, the BS surface is formed in a spherical shape (crown shape) having a radius of curvature R.

FIGS. 7 and 8 are process diagrams showing an example of a conventional method of manufacturing a head slider. First, a plurality of thin-film magnetic heads 2 are formed on the upper surface of a wafer 10 which is a substrate of the head slider 1 (FIG. 7A). This wafer 1
0 is cut into a bar along the thin-film magnetic head 2 (FIG. 7B). That is, a plurality of thin film magnetic heads 2 are arranged in a line on the bar 11.

Next, the surface of the bar 11 orthogonal to the surface on which the thin film magnetic head 2 is formed is attached to a depth polishing jig 12 using an adhesive such as wax, and the bar 11 is opposed to the attached surface. Polishing surface to a predetermined depth (FIG. 7)
(C)). When the depth polishing is completed, the bar 11 is removed from the depth polishing jig 12, and the rail 1 is etched.
Groove grooves 13 for regulating the widths of b and 1c, that is, the width of the ABS surface, are formed on the polished surface so as to correspond to the thin-film magnetic head 2 (FIG. 7D). The polished surface on which the groove 13 is formed becomes the ABS surface.

After the groove 13 is formed, the bar 11 is cut along the groove 13 into a chip 14 serving as the head slider 1 (FIG. 8A). The chips 14 are attached to the spherical polishing jig 16 using an adhesive such as a pad or an adhesive such as wax so that the ABS faces outward one by one (FIG. 8B). Polishing board 17 in which the ABS surface of chip 14 attached to spherical polishing jig 16 is finished into a spherical shape having a predetermined radius of curvature R.
And contact.

[0010] While the diamond slurry or the like is dropped on the polishing plate 17, the spherical polishing jig 16 is swung in the direction of arrow a in the drawing to slide the ABS surface along the polishing plate 17, thereby obtaining the ABS surface. Is polished into a Crown shape (FIG. 8C). When the spherical polishing is completed, the chip 14 is removed from the spherical polishing jig 16 to complete the head slider 1 (FIG. 8D).

[0011]

In the above-described conventional method for manufacturing a head slider, the chips 14 are set one by one on a spherical polishing jig 16 by using an adhesive 15 called a pad or an adhesive such as wax. Since a resetting operation and an operation of cleaning the adhesive material 15 or the adhesive adhered to the chip 14 are required, there is a problem that the number of steps is increased and the operation efficiency is poor. There is also a problem that automation is difficult because these operations are complicated.

The present invention has been made in view of the above circumstances, and has as its object to provide a method of manufacturing a head slider in which a surface of the head slider facing an information recording medium can be easily formed in a spherical shape. I do.

[0013]

According to the present invention, there is provided a method of manufacturing a head slider on which a magnetic head for recording / reproducing information on / from a disk-shaped information recording medium is mounted. The magnetic head is formed thereon, and the slider substrate is held in a recess capable of holding the slider substrate provided on a holding member made of silicon, and the holding member is placed on a polishing plate having a polishing surface having a predetermined curvature. The slider substrate is slid along the polished surface by swinging the holding member, and the slider substrate is processed into the curved surface having the predetermined curvature. .

According to the above construction, since the holding member for spherical polishing is formed of silicon having high elasticity, the slider substrate is easily fitted only by fitting the slider substrate into the recess provided in the holding member. The slider substrate can be held, and the slider substrate can be easily removed only by pressing the peripheral portion of the concave portion. Therefore, the step of forming one surface of the slider substrate into a spherical shape can be easily performed.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The embodiment described below is a preferred specific example of the present invention, and thus various technically preferable limitations are added. However, the scope of the present invention particularly limits the present invention in the following description. It is not limited to these forms unless otherwise stated.

FIGS. 1 and 2 are process diagrams showing an embodiment of the method of manufacturing a head slider according to the present invention. First, a plurality of thin-film magnetic heads 2 are formed on the upper surface of a wafer 10 which is a substrate of the head slider 1 (FIG. 1A). The wafer 10 is cut into a bar along the thin-film magnetic head 2 (FIG. 1B). That is, this bar 11
A plurality of thin-film magnetic heads 2 exist in a line.

Next, the surface of the bar 11 perpendicular to the surface on which the thin film magnetic head 2 is formed is attached to a depth polishing jig 12 using an adhesive such as wax, and the bar 11 is opposed to the attached surface. The surface to be ground is polished to a predetermined depth (Fig. 1
(C)). When the depth polishing is completed, the bar 11 is removed from the depth polishing jig 12, and the rail 1 is etched.
Groove grooves 13 for controlling the widths b and 1c, that is, the width of the ABS surface, are formed on the polished surface so as to correspond to the thin film magnetic head 2 (FIG. 1D). The polished surface on which the groove 13 is formed becomes the ABS surface.

After the groove 13 is formed, the bar 11 is cut along the groove 13 into a chip 14 to be the head slider 1 (FIG. 2A). Next, chip 14
The process enters the step of spherically polishing the ABS surface. Here, FIG.
As shown in (b), a holding member 18 for holding the chip 14 is attached to the tip end surface of the spherical polishing jig 16 with an adhesive or the like.

The holding member 18 is made of, for example, silicon (trade name: TSE3450, manufactured by Toshiba Silicone, trade name: S
T silicon, manufactured by Sanshin Bussan, trade name: Fujipoly EM (Sakon GR), manufactured by Fuji Kogyo Kogyo) or rubber (JIS-A Shore hardness: 40 to 50 degrees, surface adhesive strength: 1 g / m)
m ² ), and is formed on the surface opposite to the surface to be attached to the spherical polishing jig 16, that is, on the polishing surface.
A rectangular parallelepiped concave portion 18a having a width and length slightly smaller than the width and length of the chip 14 and a depth smaller than the thickness of the chip 14 is provided.

The concave portion 18 of the holding member 18 having such a configuration.
The chip 14 is pushed and fitted into the “a” so that the ABS faces outward (FIG. 2B). This makes chip 1
4 is held by the elasticity / restoring force of the edge of the concave portion 18a.
Next, the chip 1 held in the concave portion 18a of the holding member 18
The ABS surface of No. 4 is opposed to and brought into contact with the polishing plate 17 finished in a spherical shape having a predetermined radius of curvature R. Then, while the diamond slurry or the like is dropped on the polishing plate 17, the spherical polishing jig 16 is swung in the direction of arrow a in the drawing to slide the ABS surface along the polishing plate 17, thereby polishing the ABS surface. To form a Crown shape (FIG. 2C).

When the spherical polishing is completed, the periphery of the concave portion 18a of the holding member 18 is pressed, whereby the bottom surface of the concave portion 18a is elastically deformed and the chip 14 is pushed out from the concave portion 18a.
The head slider 1 is completed (FIG. 2D). Since the chips 14 can be easily removed from the holding member 18 in this manner, the chips 14 as in the prior art can be individually attached to the spherical polishing jig 16 by using an adhesive 15 called a pad or an adhesive such as wax. Since the work of setting / resetting and the work of cleaning the adhesive material 15 or the adhesive adhered to the chip 14 are not required, the man-hour can be reduced and the work efficiency can be improved, and automation can be easily realized. it can.

FIG. 3 is a perspective view showing another example of the holding member. The holding member 19 is made of, for example, silicon (trade name: TSE3450, manufactured by Toshiba Silicone, trade name: ST silicon, manufactured by Sanshin Bussan, trade name: Fujipoly EM (Sakon GR), Fuji Polymer) Industrial) and rubber (JIS-A Shore hardness: 40 to 50 degrees)
Surface adhesive strength: 1 g / mm ² ), but is formed in a rectangular parallelepiped shape. The polished surface has a width and length slightly smaller than the width and length of the chip 14 and a depth smaller than the thickness of the chip 14. A plurality (four in this example) of rectangular parallelepiped concave portions 19a are provided. Holding member 19 having such a configuration
According to this, a plurality of chips 14 can be polished at the same time, and the working efficiency can be further improved.

FIG. 4 is a perspective view showing still another example of the holding member. The holding member 20 is provided with the holding member 19.
Similarly, for example, silicon (trade name: TSE3450,
Made by Toshiba Silicone, trade name: ST Silicon, made by Sanshin Bussan, trade name: Fujipoly EM (Sakorn GR), made by Fuji Kogyo Kogyo) or rubber (JIS-A Shore hardness: 40 degrees to 5 degrees)
Although it is formed in a rectangular parallelepiped shape having 0 ° and a surface adhesive force of 1 g / mm ² ), the polishing surface has a width that is the full width of the holding member 20 and is slightly smaller than the length of the chip 14. ,
A rectangular parallelepiped concave portion 20a having a depth smaller than the thickness of the chip 14
Is provided.

The recess 18 of each of the holding members 18 and 19 described above
a and 19a are configured to hold the four side surfaces of the chip 14, but the concave portion 20a of the holding member 20 holds two (in this example, four) side surfaces of the chip 14 in the length direction. After a plurality of chips 14 are simultaneously polished, by pressing both ends in the longitudinal direction of the recess 20a in the direction of the arrow a in the drawing, the periphery of the recess 20a in the short direction is shown by the arrow b in the drawing. The plurality of chips 14 can be simultaneously removed by elastically deforming in the direction, and the working efficiency can be further improved.

According to the method of manufacturing the head slider as described above, the adhesive 15 called a pad, which has been conventionally used, is used.
Alternatively, there is no need to use an adhesive such as wax, and the working efficiency can be greatly improved. In addition, the occurrence of defects such as chipping and scratches generated when handling the chip 14 is eliminated, and the yield can be greatly improved.

[0026]

As described above, according to the present invention, the surface of the head slider facing the information recording medium can be easily formed in a spherical shape, and the number of steps can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is a first process chart showing an embodiment of a method of manufacturing a head slider according to the present invention.

FIG. 2 is a second process chart showing an embodiment of the method for manufacturing a head slider according to the present invention.

FIG. 3 is a perspective view showing another example of a holding member used in the embodiment of the method for manufacturing a head slider of the present invention.

FIG. 4 is a perspective view showing still another example of the holding member used in the embodiment of the method of manufacturing a head slider according to the present invention.

FIG. 5 is a perspective view showing an example of a general head slider.

FIG. 6 is a side view of the head slider shown in FIG. 5;

FIG. 7 is a first process chart showing an example of a conventional method for manufacturing a head slider.

FIG. 8 is a second process diagram showing an example of a conventional method for manufacturing a head slider.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Head slider, 1b, 1c ... Rail, 2
... Thin film magnetic head, 10 ... Wafer, 11 ...
Bar, 12: depth polishing jig, 13: groove groove, 14: chip, 16: spherical polishing jig, 1
7 ... polishing machine, 18, 19, 20 ... holding member, 1
8a, 19a, 20a ... recess

Claims (3)

[Claims] 1. A method of manufacturing a head slider on which a magnetic head for recording / reproducing information on / from a disk-shaped information recording medium is mounted, comprising: forming the magnetic head on a slider substrate; Holding the slider substrate in a concave portion capable of holding the slider substrate provided, disposing the holding member on a polishing plate having a polishing surface having a predetermined curvature, and swinging the holding member to form the slider A method for manufacturing a head slider, wherein one surface of a substrate is slid along the polishing surface, and one surface of the slider substrate is processed into a curved surface shape having the predetermined curvature. 2. A method of manufacturing a head slider having a magnetic head for recording and reproducing information on and from a disk-shaped information recording medium, comprising: forming the magnetic head on a slider substrate; Holding the slider substrate in a concave portion capable of holding the slider substrate provided, disposing the holding member on a polishing plate having a polishing surface having a predetermined curvature, and swinging the holding member to form the slider A method for manufacturing a head slider, wherein one surface of a substrate is slid along the polishing surface, and one surface of the slider substrate is processed into a curved surface shape having the predetermined curvature. 3. The rubber has a Shore hardness of 40 to 50 degrees.
^{3. The} method for manufacturing a head slider according to claim 2, wherein the head slider has a characteristic that the surface adhesive strength is 1 g / mm ² or more.