JPH11327651A - Stopping method and stopping mechanism for movable body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stop a movable body at a fixed position in a shortest time with less impact. SOLUTION: This stopping mechanism is constituted of a drive source 5 for rotationally moving a movable body 1, a position detector 6 for detecting the rotating position of the movable body 1 and a controller 7 for controlling driving power to be applied to the drive source based on the output signals of the position detector 6. The stopping method comprises a step of moving the movable body 1 to a deceleration start point O at a high speed, a step of reducing the speed of the movable body 1 from the deceleration start point O to a driving power release point P and a step of moving the movable body 1 from the point P to a stop position Q by utilizing gravity G and inertia acting on the movable body 1, and the movable body 1 moved by the gravity G and the inertia is abutted to a stopper 2 provided on the stop position Q and stopped.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for stopping a movable body by contacting a stopper provided at a stop position of the movable body and a mechanism for stopping the movable body. The present invention relates to a method for stopping a movable body at a fixed position and a mechanism for stopping the method.

[0002]

2. Description of the Related Art A physical stopper is generally used as a method for accurately locking a movable body at a fixed position. That is, by bringing the movable body into contact with the stopper, it is easy to always maintain the stop position of the movable body at the fixed position. However, if the movable body moving at high speed abuts the stopper provided at the stop position as it is, in the case of a lightweight movable body, it hits the stopper and rebounds, so it is difficult to hold the movable body in a fixed position. is there. on the other hand,
When the movable body is heavy, the impact applied to the stopper becomes excessive, and the stopper and the movable body may be damaged due to the impact.

FIG. 4 shows a stopper 2 provided at a fixed position Q.
2 schematically shows a state where the movable body 1 is brought into contact with and stopped. In the figure, a movable body 1 is rotatingly moved about a rotation shaft 3 in the illustrated direction. As shown in the figure, in order to provide the stopper 2 at the fixed position Q and stop the movable body 1 at the fixed position Q without generating unnecessary impact, the moving speed of the movable body at the fixed position Q becomes zero. So that
The rotational movement of the movable body 1 must be controlled with high precision. In particular, when the movable body 1 is rotating and moving at a high speed, in order to smoothly stop the movable body 1 at the fixed position Q, a driving source that rotationally drives the movable body 1 is positioned with high precision and strong control. Control means (not shown) is required. Also,
When the movable body 1 is a heavy object, as shown in FIG. 5, mechanical braking means 4 such as a shock absorber for reducing the moving speed of the movable body and absorbing the impact applied to the stopper.
Needs to be provided near the stop position of the movable body.

[0004]

In the above-mentioned conventional movable body stopping mechanism, in order to smoothly stop the movable body at the fixed position Q, the positioning of the drive source for driving the movable body to rotate is controlled with high precision and power. Although a control means and a mechanical braking means such as a shock absorber are provided, a powerful and high-precision positioning control means imposes a large load on the driving source of the movable body, and also increases the cost of the apparatus. Providing a separate mechanical braking means has the disadvantages of increasing the cost of the apparatus and complicating the adjustment of the stop position. Therefore, an object of the present invention is to provide a method and a mechanism capable of stopping a movable body at a fixed position quickly and reliably with a simple configuration.

[0005]

In the movable body stopping method of the present invention, first, the moving speed of the movable body is reduced, and then immediately before the stop position of the movable body, that is, immediately before the movable body comes into contact with the stopper. Then, the power supply to the drive source of the movable body is stopped. After that, using the gravity and inertia acting on the movable body,
The above problem was solved by moving the movable body to the stop position and bringing the movable body into contact with the stopper.

That is, in the moving body stopping method of the present invention, the moving body is moved to the deceleration start position at a high speed, and the moving speed of the movable body is moved from the deceleration start position to the power release position. A step of decelerating, and a step of moving the movable body using gravity or inertia acting on the movable body from the power release position to the stop position, the movable body moving by the gravity or inertia being stopped at the stop position This is a method of stopping by contacting the stopper provided in the above.

Further, in the movable body stopping mechanism of the present invention, a detector for detecting the rotational position of the movable body is provided on the drive shaft of the movable body. Decrease the moving speed of the moving object. Then
By the position signal of the detector issued immediately before the stop position of the movable body, the power supply to the driving source is configured to be stopped, and after the power supply is stopped, the gravity or inertia acting on the movable body is used. The movable body is moved to stop the movable body by abutting the stopper provided at the stop position.

That is, a mechanism for stopping the movable body fixed to the drive shaft and rotatably abutting on the stopper provided at the stop position, wherein the movable body is rotatably moved. A drive source, a position detector that detects a rotational position of the movable body, and a control device that controls power applied to the drive source based on an output signal of the position detector, and a moving speed of the movable body. After decelerating, immediately before the stop position of the movable body, the movable body is set in a free motion state, and the movable body is brought into contact with a stopper provided at the stop position using gravity or inertia acting on the movable body to stop the movable body. Configured.

[0009]

Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing a configuration example of the stop mechanism of the present invention. FIG.
4 is an operation chart of the stop mechanism.

(Movable Body Stopping Mechanism) First, the structure of the movable body stopping mechanism of the present invention will be described. FIG. 1 is a block diagram illustrating a configuration example of a movable body stopping mechanism. In the figure, 1
Is a movable body. Reference numeral 2 denotes a stopper for holding the movable body 1 at a fixed position. Reference numeral 3 denotes a drive shaft for driving the movable body 1 to rotate. The drive shaft 3 is connected to a drive source 5 for rotating and driving the movable body 1 and a position detector 6 for detecting the rotational position of the movable body 1.

As the drive source 5, various electric motors, air motors, hydraulic motors and the like can be used. As a specific example of the electric motor, a motor whose rotation speed can be controlled, such as an induction motor, a synchronous motor, a pulse motor, and a DC motor, can be used, and the mass and inertia moment of the movable body, the rotational speed of the movable body, and the like can be used. It is advisable to select as appropriate in consideration of the above. If necessary, a speed reducer having an appropriate reduction ratio may be incorporated in the power transmission path between the drive source 5 and the drive shaft 3.

As the position detector 6, for example, a rotary encoder that generates several tens to several thousands of pulses per rotation is used. The position detector 6 may use an absolute encoder, or may be of a type that can output a discrimination signal in the rotation direction. In that case, a mechanism for generating a rotational position signal based on the output signal of the encoder is provided. Specifically, a photoelectric pulse encoder, an electromagnetic pulse encoder, or the like can be used. In addition,
When the encoder used for the position detector 6 is operated while being connected to the drive shaft 3, a stable position detection signal can be obtained in the entire range of operation from the stop of the drive shaft 3 to the maximum rotation speed. Need to be done.

On the other hand, the motor of the drive source 5 is
, And is configured to drive the motor forward or backward in response to a signal from an operation commander (not shown). Further, an output signal of a position detector 6 connected to the drive shaft 3 of the movable body 1 is connected so as to be input to the control device 7, and the movable body 1 is controlled inside the control device 7 based on the output signal. The rotation speed signal and the rotation position signal are generated, and the rotation number of the motor can be controlled while detecting the rotation position of the movable body 1.

(Operation Preparation Operation) Next, the operation preparation operation of the movable body stopping mechanism having the above-described configuration will be described.
In the movable body stopping mechanism shown in FIG. 1, an operation preparation operation is performed prior to a normal operation operation. This operation preparation operation is an operation for causing the control device 7 to learn the stop position of the movable body 1.
The stop position of the movable body 1 is a contact position Q with the stopper 2. In order for the control device 7 to learn this stop position Q,
First, a signal is applied to the learning L of the control device 7 and the command terminal of the normal rotation F. The control device 7 rotates the motor of the drive source 5 at a low speed based on the command signal, and rotates and moves the movable body 1 in the direction of the arrow shown in the figure. The movable body 1 is rotationally moved toward the stopper 2 by the drive source 5 and contacts the stopper 2 and stops at the stop position Q.

When the stop time of the movable body 1 at the stop position Q reaches a certain time, that is, when the output signal of the position detector 6 connected to the drive shaft 3 of the movable body 1 does not change for a certain time, the control is performed. The position information generated by the output signal of the position detector 6 is set in a rotation position storage means (not shown) incorporated in the device 7. Thereby, the movable body 1
Is stored in the control device 7.

If, for example, a stop position is set in the reversing direction of the movable body 1 in addition to the stop position Q shown in FIG. 1 and a stopper is provided similarly to the stop position Q, The stop position is stored in the control device 7 in the same manner as described above. That is, a signal is applied to the learning L of the control device 7 and the command terminal of the inversion B, the motor of the drive source 5 is reversely rotated at a low speed, and the movable body 1 abuts the stopper at the stop position, and the stop position in the inversion direction is stopped. When the stop time of the movable body 1 at the time has reached a certain time, that is, when the output signal of the position detector 6 connected to the drive shaft 3 of the movable body 1 has not changed for a certain time, The position information is set in an inverted position storage means (not shown). Thereby, the position information of the movable body 1 corresponding to the other stop position is stored in the control device 7.

By the above-described preparation operation, information on the stop position of the movable body 1 is stored in the control device 7. Then
An operation position required for the stop operation of the movable body 1 is calculated and stored by an arithmetic unit (not shown) included in the control device 7 based on the information on the stop position. In the example shown in FIG. 1, the deceleration start position O of the movable body and the power release position P of the drive source are calculated back from the stop position Q of the movable body and stored. Since such position information is semi-permanently stored in a non-volatile storage unit (not shown) of the control device 7, the above-described preparation operation is performed each time in the method of stopping the movable body and the operation of the stop mechanism described below. No need.

(Method of stopping movable body) Next, a method of stopping the movable body of the present invention will be described. FIG. 2 is an operation chart showing a relationship between a rotation position and a rotation speed of the movable body in the movable body stopping mechanism shown in FIG. In the figure, the vertical axis indicates the rotation speed of the movable body 1, and the horizontal axis indicates the rotation position of the movable body 1. In the movable member stopping mechanism of the present invention, as shown in FIG.
The moving speed of the movable body is controlled so as to stop smoothly. That is, the movable body 1 is connected to the drive source 5 shown in FIG.
Is rotated at a high speed toward the deceleration start position O at an angular velocity ω. At this time, a pulse signal is generated at a time interval inversely proportional to the rotation speed of the movable body 1 from the position detector 6 connected to the drive shaft 3 of the movable body 1, and the control device 7 rotates the motor based on this pulse signal. You control the number.

The output signal of the position detector 6 is converted into a position signal of the movable body 1 inside the controller 7, and the controller 7 monitors the rotational position of the movable body. In this state, when detecting that the movable body 1 has reached the deceleration start position O, the control device 7 reduces the rotational speed of the motor so that the rotational speed of the movable body 1 becomes the angular velocity Δω. The moving speed of the movable body 1 is reduced until the angular speed becomes Δω with the deceleration of the motor. Next, the movable body 1 continues to rotate at the angular velocity Δω decelerated toward the power release position P. Thereafter, when the control device 7 detects the power release position P based on the output signal of the position detector 6, the control device 7 stops the supply of the power applied to the motor of the drive source 5, and the movable body 1 and The drive source 5 connected to the movable body 1 via the rotating shaft 13 enters a free motion state.

In the free motion state, the movable body 1
Due to the gravity G and the inertia, the movable body 1 is in a free falling state, and continues to rotate toward the stop position Q. Thereafter, the movable body 1 reaches the stop position Q while being accelerated by the gravity G, and comes into contact with the stopper 2 and stops. Movable body 1 is stopper 2
When the distance between the power release position P and the stop position Q is short, the rotational speed at which the movable body 1 comes into contact with the rotational speed becomes approximately the rotational speed Δω of the decelerated movable body 1.

That is, by making the distance between the power release position P and the stop position Q as short as possible,
The speed when abuts against the stopper 2 approaches the angular speed Δω, and the impact force generated at the time of abutment decreases,
The time required for the movable body 1 to reach the stop position Q from the power release position P in the free fall state is reduced. The angular velocity Δω of the movable body 1 at the time of deceleration is set as large as possible within a range where the impact force is allowed, so that the movable body 1 is moved from the deceleration start position O to the stop position Q. And the time required for stopping the movable body 1 is reduced.

As described above, in the present invention, the power release position P with respect to the driving source 5 for rotating the movable body 1 is set at a predetermined position immediately before the movable body 1 comes into contact with the stopper 2, and the movable body 1 By stopping the power supply to the drive source 5 when passing through the power release position P, the movable body 1
Is in a state of free movement. Thereafter, the movable body 1 is brought into contact with the stopper 2 by utilizing the gravity G and inertia acting on the movable body 1 so that the movable body 1 can be moved to a predetermined position without generating an excessive impact on the movable body 1 and the stopper 2. Stop position Q
It can be stopped smoothly.

The speed at which the movable body 1 comes into contact with the stopper 2 is limited to the mass and inertia moment of the movable body 1 and the movable body 1 and the stopper 2 within an allowable range of the impact force.
May be appropriately set in consideration of the impact resistance of the device. Further, the deceleration start position O of the movable body 1 is set back from the power release position P from the braking distance until the angular velocity of the movable body 1 reaches ω from ω, including an appropriate margin angle. do it.

(Embodiment) Next, an embodiment of the moving body stopping method and the stopping mechanism of the present invention will be described. FIG. 3 is a side view illustrating an example of an apparatus using the above-described movable body stopping method and the stopping mechanism.

(Structure of Apparatus) The apparatus shown in FIG. 3 is an application apparatus for applying an application liquid to a thin plate-shaped substrate. In the figure, reference numeral 10 denotes a main body of the coating apparatus. S denotes a substrate to be coated with a coating liquid, and 11 denotes a substrate holding member that sucks and holds the substrate S to be coated. The substrate holding member 11
It is a movable body described in the above-mentioned stopping method and stopping mechanism. The substrate holding member 11 has a flat holding plane for holding the substrate S to be coated on a plane, and the holding plane has a plurality of suction holes (not shown) for sucking the substrate S to be coated. Is provided, and the suction hole is connected to a suction device (not shown). The substrate holding member 11 is formed of hard aluminum, duralumin, stainless steel, hard plastic, or the like, which is lightweight, has mechanical strength, and has rust resistance.

The substrate holding member 11 includes a coating portion pivot 14
Is fixed to a rotating shaft 13 which is rotatably supported. Rotating shaft 13
Is the drive shaft described in the stop method and stop mechanism described above. The rotating shaft 13 is connected to a motor M1 fixed to a coating unit pivot 14 via a conductive means, and by driving the motor M1, the substrate holding member 11 is coated with a substrate S for coating a coating liquid. Between the application position R indicated by a solid line in the drawing holding the substrate downward and the substrate attaching / detaching position Q indicated by an imaginary line with the holding plane facing upward for mounting and unloading the substrate S to be coated. It can rotate in the direction of the arrow. The application position R and the substrate attaching / detaching position Q are:
Both correspond to the stop position described in the above-described stop method and stop mechanism.

In the substrate attaching / detaching position Q, the position of the substrate holding member 11 is regulated by a stopper 20A whose relative position with respect to the rotating shaft 13 is fixed. On the other hand, the substrate S to be coated can be placed or unloaded by a substrate supply / discharge device (not shown). On the other hand, at the coating position R, the position of the substrate holding member 11 is regulated by the stopper 20B provided on the coating portion pivot 14, and is held by the downward holding plane of the substrate holding member 11 positioned at a predetermined angle. The application liquid is applied to the application substrate S.

In a state where the substrate holding member 11 is locked at the stopper 20B and located at the coating position R, the substrate holding member 11 is held parallel to the downwardly coated surface of the substrate S to be coated and held on the holding plane of the substrate holding member 11. The linear guide 15 is inclined and fixed to the application unit pivot 14 so as to form the linear guide 15. On the linear guide 15, an application unit including an application head 12 for applying an application liquid onto a downward application surface of the substrate S to be applied is slidably held.

The application means including the application head 12 is engaged with a ball screw arranged along the linear guide 15. The ball screw is connected to a motor M2, and by driving the motor M2, the coating head 1 is rotated.
2 in parallel with the coating surface of the substrate S to be coated,
It can slide along the linear guide 15.
The sliding range of the application unit including the application head 12 is as follows.
It is possible to move at least the entire length of the substrate S to be coated held by the substrate holding member 11.

In the coating apparatus 10 of this embodiment, the substrate holding member 11 fixed to the rotating shaft 13 is rotatably supported, and the coating head 1 is moved via the linear guide 15.
An application unit pivot 14 for slidably holding the application unit including the second unit 2 is configured to be rotatable about the rotation shaft 13. With this configuration, the stopper 20B
The substrate holding member 11 and the linear guide 15 slidably holding the coating head 12 are tiltably and variably tilted on a circular orbit about the rotation shaft 13 while maintaining their relative positions. This makes it possible to set the inclination angle θ with respect to the horizontal direction to an optimal application condition in accordance with the viscosity characteristics of the application liquid and the like.

Further, by setting the rotation center of the coating unit pivot 14 at the same axial center position as the rotation center of the substrate holding member 11, even if the coating unit pivot 14 is at an arbitrary rotation position. ,
The substrate attaching / detaching position Q regulated by the stopper 20A is always a fixed position, and the holding plane of the substrate holding member 11 can be kept horizontal. Therefore, the unloading of the substrate S after coating at the substrate attaching / detaching position Q and the mounting of a new substrate S can always be performed at a fixed position, and adjustment accompanying the setting of the coating conditions of the coating apparatus 10 can be performed. Time can be reduced.

In the coating apparatus 10, when performing the coating process on the substrate S to be coated sucked and held on the substrate holding member 11, first, the substrate holding member 11 is brought into contact with the stopper 20B at the coating position R, and is turned downward. Position it at an angle.
Next, a coating (not shown) provided with a strip (not shown) extending upward and having a certain gap with the coating surface of the substrate S to be coated, which is suction-held in a downwardly inclined manner on the substrate holding member 11. The coating liquid is supplied to the head 12 and the coating target substrate S
A liquid pool of the coating liquid is formed in a gap between the coating surface of the coating liquid and the coating head 12.

Next, the coating head 12 in which the liquid pool is formed is moved to the linear guide 15 in parallel with the application surface of the substrate S while maintaining a constant gap with respect to the application surface of the substrate S to be inclined. By moving the coating liquid obliquely downward, the coating liquid in the liquid pool is sequentially attached to the coating surface, and a coating film is formed on the substrate S to be coated.

(Operation of Apparatus) Next, the operation of coating the substrate S to be coated in the above-described coating apparatus will be described in more detail. The coating apparatus 10 first drives the motor M1 to rotate the substrate holding member 11 about the rotation shaft 13 and to rotate to the substrate attaching / detaching position Q indicated by an imaginary line. At this time, the substrate holding member 11 comes into contact with the stopper 20A provided at the substrate attaching / detaching position Q, stops and is positioned horizontally.

In the coating apparatus 10, the substrate S to be coated is mounted on the holding plane of the substrate holding member 11 facing upward by a substrate supply device (not shown) at the substrate attaching / detaching position Q. Next, the substrate holding member 11 holding the substrate S to be coated is rotated by driving the motor M1 to a coating position R indicated by a solid line in FIG. The substrate holding member 11 that has reached the application position R is provided with a stopper 20B provided on the application unit pivot 14.
And is stopped at the inclination angle θ.

Next, the coating means including the coating head 12
It is driven by the motor M2 and is slid obliquely downward along the linear guide 15 from the application start position shown in the figure. When the coating head 12 is slid, the coating liquid in the liquid pool formed in the gap between the coating liquid discharge slit (not shown) of the coating head 12 and the coating surface of the substrate S facing downward is coated. It is sequentially adhered to the application surface of the application substrate S to form an application film. The coating head 2 that has completed the coating process over the entire length of the substrate S to be coated,
Stop at the coating end position.

Next, the motor M1 is driven to rotate the rotating shaft 13, the substrate holding member 11 is again rotated toward the substrate attaching / detaching position Q, and comes into contact with the stopper 20A to stop. Next, the substrate to be coated S that has been coated and held on the substrate holding member 11 is carried out by a substrate discharge device (not shown), and is transported to a coating film drying process in a later process.

Further, the next new substrate S to be subjected to the coating process is placed on the substrate holding member 11 by a substrate supply device (not shown). Thereafter, the motor M1 is driven again to rotate the rotating shaft 13, and the substrate holding member 11 holding the new substrate S to be coated is rotated toward the coating position R, and comes into contact with the stopper 20B to stop. During this time,
The application unit including the application head 12 returns to the application start position shown in the figure by the motor M2, and resumes the application process. By repeating the above-described series of operations, the coating process can be sequentially performed on the substrate S to be coated.

In the above-described coating apparatus, the movable body stopping method and the stopping mechanism of the present invention effectively work. That is, in the coating apparatus 10 described above, the substrate S to be coated with the coating liquid is moved from the substrate attaching / detaching position Q to the coating position R, or the substrate S having the coating liquid applied is moved from the coating position R to the substrate attaching / detaching position. In order to move to the position Q, the substrate holding member 11 holding the substrate S to be coated by suction is rotated by the motor M1 via the rotating shaft 13.

At this time, a stopper 20A is provided at the substrate attaching / detaching position Q. After the substrate holding member 11 comes into contact with the stopper 20A and is locked, the substrate holding member 11 is stopped.
The substrate S sucked and held on the substrate is carried out by a substrate discharge device (not shown). That is, when the substrate holding member 11 holding the substrate S to be coated after application is moved from the application position R to the substrate attaching / detaching position Q, the substrate holding member 11
When the movable body stopping method of the present invention is used, the substrate holding member 11 is smoothly and quickly moved without damaging the substrate S to be applied and held by an impact. It can be stopped at the attaching / detaching position Q.

Similarly, when the substrate holding member 11 holding the substrate S to be subjected to the coating process by suction is moved from the substrate attaching / detaching position Q to the coating position R, the substrate holding member 11 is provided on the coating portion pivot 14. When the movable body stopping method of the present invention is used, the substrate S sucked and held by the substrate holding member 11 does not fall off due to an impact, and the application position is smoothly and quickly stopped. R can stop.

By the way, before using the moving body stopping method and the stopping mechanism of the present invention, the coating processing time per one application was about 40 seconds, but by using the moving body stopping method and the stopping mechanism of the present invention, (1) The coating processing time per operation can be reduced to about 30 seconds, and the productivity of the coating processing step can be dramatically improved. The substrate S used for the coating process at this time has a width of 300 mm, a length of 400 mm,
It was a glass substrate having a thickness of 1 mm, and the coating speed of the coating head 2 on the substrate S to be coated was 50 mm per second. Further, a substrate holding member 11 for holding the substrate S by suction.
The rotation angle between the application position R and the substrate attachment / detachment position Q was about 150 degrees, and the rotation speed of the substrate holding member 11 was 90 degrees / second at the maximum.

Further, under the above operating conditions, the coating processing operation for the glass substrate was repeated many times, but the substrate was not damaged or dropped. Further, by using the movable body stopping method and the stopping mechanism of the present invention, an impact generated when the movable body comes into contact with the stopper causes a drive mechanism of the movable body including the movable body itself, and a pivotal body holding them. Could not find any disturbing effects.

(Other Embodiments) In the above-described movable body stopping mechanism, a rotary encoder is used to detect the rotational position of the movable body. However, the movable body detector is provided at a predetermined position near the rotation trajectory of the movable body. And a detector configured to detect a rotational position of the movable body by the detector. In that case, a movable body detector is provided at each of the deceleration start position and the power release position. As the movable body detector, for example, a reflection type or transmission type photoelectric sensor, or when the movable body is metal, an electromagnetic induction type proximity switch can be used.
When the rotational position of the movable body is detected by the movable body detector, the deceleration start position and the power release position can be set by adjusting the relative position between the stopper and the movable body detector. Become.

On the other hand, in the above description, after the rotational speed of the movable body is reduced, the power supply to the drive source is stopped when it is detected that the movable body has reached the power release position. When it is detected that the movable body has reached the predetermined deceleration speed, the power supply to the drive source may be stopped. The power release position in this case is a position where the rotation speed of the motor or the movable body has become equal to or lower than a predetermined speed.

After the rotation speed of the movable body is reduced, the movable body may be temporarily stopped near the power release position, and then the movable body may be brought into a free motion state. In that case,
For example, a motor with a brake is used as a drive source that rotationally drives the movable body. That is, when it is detected that the movable body has reached the deceleration start position, the power supply to the motor of the drive source is stopped and the power is applied to the brake to reduce the moving speed of the movable body. Next, after a certain period of time required for stopping the movable body has elapsed, the power supply to the brake is stopped.
Then, both the motor and the brake stop operating, so that the movable body is in a free motion state, falls by gravity, comes into contact with the stopper, and stops.

In the above description, the power supply to the motor of the driving source for rotating the movable body is stopped so that the movable body enters a free motion state. However, the movable body is fixed. Between the rotating shaft and the drive source motor,
You may comprise so that it may connect via power transmission control means, such as an electromagnetic clutch. In this case, by releasing the electromagnetic clutch, only the movable body and the rotating shaft are in a free motion state, and the dropping operation of the movable body is not directly transmitted to the motor of the driving source. The motor can be effectively prevented from being damaged by an impact when the motor contacts the motor.

[0048]

As described above in detail, according to the first aspect of the present invention, the movable body stopping method according to the present invention comprises the steps of: moving the movable body to the deceleration start position at a high speed; A step of reducing the moving speed of the movable body to the open position, and a step of moving the movable body using gravity or inertia acting on the movable body from the power release position to the stop position,
Since the movable body comes into contact with the stopper provided at the stop position and stops, the impact when contacting the stopper is small, and the movable body can be stopped in a short time.

Further, the movable body stopping mechanism of the present invention is a mechanism for stopping the movable body fixed to the drive shaft and rotating and rotating by contacting the stopper provided at the stop position. A driving source that rotationally moves the movable body, a position detector that detects a rotational position of the movable body, and a control device that controls power applied to the drive source based on an output signal of the position detector. After the moving speed of the movable body is reduced, immediately before the stop position of the movable body, the movable body is brought into a free motion state, and the stopper provided at the stop position by utilizing gravity or inertia acting on the movable body. Since the movable body is brought into contact with and stopped, a high-precision positioning mechanism and a braking means are not required, and the movable body can be smoothly stopped using a simple stop mechanism.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a configuration example of a stop mechanism.

FIG. 2 is an operation chart of a stop mechanism.

FIG. 3 is a schematic side view of a device incorporating a stop mechanism.

FIG. 4 is an example of a conventional movable body stopping mechanism.

FIG. 5 is another example of a conventional movable body stopping mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Movable body 2 Stopper 3 Drive shaft 4 Braking means 5 Driving source 6 Position detector 7 Control device 10 Coating device 11 Substrate holding member 12 Coating head 13 Rotation axis 14 Coating part pivot 15 Linear guide 16 Stand 20A, 20B Stopper M1, M2 Motor O Deceleration start position P Power release position Q Stop position (substrate attaching / detaching position) R Coating position (stop position) S Substrate to be coated

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Jun Takemoto 1-1-1, Ichigaya Kagacho, Shinjuku-ku, Tokyo Inside Dai Nippon Printing Co., Ltd. (72) Inventor Yasuhide Nakajima 1-chome, Ichigaga-cho, Shinjuku-ku, Tokyo No. 1 Dai Nippon Printing Co., Ltd. (72) Inventor Shunji Miyakawa 1-1 1-1 Ichigaya Kagacho, Shinjuku-ku, Tokyo

Claims (2)

[Claims] 1. A method for stopping a movable body by contacting a stopper provided at a stop position, wherein the movable body is moved to a deceleration start position at a high speed, and the movable body is moved from a deceleration start position to a power release position. A step of reducing the moving speed of the movable body, and a step of moving the movable body from the power release position to the stop position by utilizing gravity or inertia acting on the movable body. 2. A mechanism for stopping a movable body fixed to a drive shaft and rotating and moving by contacting a stopper provided at a stop position, wherein a driving source for rotating the movable body and a rotation of the movable body are provided. It comprises a position detector for detecting a position, and a control device for controlling the power applied to the drive source based on the output signal of the position detector. After the moving speed of the movable body is reduced, the movable body is stopped. A stop mechanism for a movable body, wherein the movable body is brought into a free motion state immediately before the position, and the movable body is stopped by abutting a stopper provided at a stop position using gravity or inertia acting on the movable body.