JPH11317895A - Optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical device for an electronic image pickup system, an electronic display system or a board unit that is a component of the systems such as digital camera, an electronic endoscope, a PDA(personal digital assistants), a video telephone set, a VTR camera, by unifying components such as an image pickup element and an optical element through a method such as lithography so as to attain miniaturization and to reduce the cost. SOLUTION: An image pickup unit 180 uses lenses 181, 182, 183, a mirror 185, a prism 184 or the like to configure an image pickup optical system with optical elements 181, 182, 184, 185, 183 and a reflecting mirror 52. A board unit 186 on which the reflecting mirror 52, a thin film 53 and a solid-state image pickup element 55 are mounted is placed on a printed circuit board 56.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an optical device.

[0002]

2. Description of the Related Art A conventional digital camera 170 is shown in FIG.
, The CCD 55, the lens 171, the aperture 17
3, the shutter 174, the lens focusing solenoid 175, etc., are collected as separate parts and assembled.

[0003]

Therefore, the number of parts increases, the assembly is troublesome, and the product can be reduced in size and accuracy.
There was a limit to cost reduction. Therefore, the present invention provides a digital camera, an electronic endoscope, a PDA (Personal Digital Assistant), which can be reduced in size and cost by integrating components such as an imaging element and an optical element using a method such as lithography.
It is an object to provide an optical device such as a video phone, a VTR camera, an electronic imaging system such as a video camera, an electronic display system, or a plate unit that constitutes a part thereof.

[0004]

In order to solve the above-mentioned problems, an optical device according to the present invention comprises at least one of an optical element, a shutter, an aperture, and a display element on one substrate, an image pickup element, Is arranged.

Further, the optical device according to the present invention is constituted by arranging two or more of an optical element, a shutter, an aperture, a display element, an image pickup element and the like on one substrate.

Further, the optical device according to the present invention is constituted by arranging at least one of an imaging element, an optical element, a shutter, and an aperture, and a display element on a single substrate. .

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the optical device according to the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a first embodiment of the present invention. The optical device according to the present embodiment includes lenses 181 and 18
2, 183, a prism 184, a mirror 185, and the like. In addition,
In the drawing, reference numeral 52 denotes an aluminum-coated thin film 53 and an electrode 5
4, a reflecting mirror, 55 is a solid-state imaging device, 56 is a substrate,
57 is a power supply, 58 is a switch, and 59 is a variable resistor.

The reflecting mirror 52 is, for example, an optics
Communications (Optics Communi)
When a voltage is applied between the thin film 53 and the electrode 54, the thin film 53 is deformed by electrostatic force and the focal length is reduced, as in a membrane mirror shown in Vol. 140, No. 140 (1997), pp. 187 to 190. This allows the focus to be adjusted. In the optical device according to the present embodiment, the light 60 from the object is refracted by the respective entrance and exit surfaces of the lenses 181 and 182 and the prism 184 as the optical elements, reflected by the reflecting mirror 52, and reflected by the mirror 185. And is refracted by the lens 183 before entering the solid-state imaging device 55.

As described above, in the optical apparatus of the present embodiment, the optical elements 181, 182, 184, 185, 183 and the reflecting mirror 52 constitute an imaging optical system. In the configuration of the present embodiment, in particular, the aberration of the object image can be minimized by optimizing the surface and thickness of each optical element.

In the optical device shown in FIG. 1, the shape of the reflecting mirror 52 is preferably an ellipse which is long in the Y-axis direction in order to correct astigmatism and the like. It is preferable that the shape be long elliptical along the direction in which the plane containing the light and the light emitted from the reflecting mirror 52 and the reflecting mirror 52 intersect. Also,
In the optical device of FIG. 1, the reflecting mirror 52 and the solid-state imaging device 55 are separately formed, and are arranged on the substrate 56. However, since the reflecting mirror 52 can be formed by a silicon lithography process or the like, the substrate 56 may be formed of silicon, and at least a part of the reflecting mirror 52 may be formed on the substrate 56 by a lithography process together with the solid-state imaging device 55. .

Thus, the solid-state imaging device 55 and the reflecting mirror 52, which is one of the optical devices, are integrated, which is advantageous in terms of miniaturization and cost reduction. Also, the reflecting mirror 52
May be configured as a fixed focus mirror. Even in this case, the reflecting mirror 52 can be made by a lithography process. The reflecting mirror 52, the solid-state imaging device 55, the substrate 56
Together will be referred to as a plate-shaped unit 186. The plate unit is an example of the optical device.

Although not shown, a display device such as a reflective liquid crystal display or a transmission liquid crystal display, which is one of the display devices, may be integrally formed on the substrate 56 by a lithography process. Note that this substrate 56
May be formed of a transparent substance such as glass or quartz. In that case, a solid-state imaging device or a liquid crystal display may be formed on the glass substrate by using a technique such as a thin film transistor. Alternatively, these display elements may be formed separately and arranged on the substrate 56.

Optical elements 181, 182, 184, 18
5,183 can easily form a curved surface of any desired shape by being formed with a plastic mold, a glass mold, or the like, and is easy to manufacture. Note that, in the imaging device of the present embodiment, only the lens 181 is
4 is formed apart from the optical element 1 so that the aberration can be removed without providing the lens 181.
If the optical elements 82, 183, 184, 185, and 52 are designed, the optical elements except for the reflecting mirror 52 become one optical block, which facilitates assembly.

FIG. 2 is a diagram showing a second embodiment of the present invention. In the imaging device of the present embodiment, the reflecting mirror 52, the micro shutter 188 made by micro-machine technology and moved by electrostatic force, the imaging device 55, and the like on one silicon substrate 187 are made by a lithography process. Then, by combining the silicon substrate 187 and a free-form surface prism 189 made of a mold, a compact digital camera imaging unit 180 can be completed as an optical device. Note that the micro shutter 188 can also serve as an aperture.

The free-form surface prism 189 can be made inexpensively if it is made of a plastic mold. Further, it is preferable that the free-form surface prism 189 is made of an energy-curable resin because it has higher durability than a thermoplastic resin. In addition, the free-form surface prism 189 may be configured using a material having a property of absorbing infrared light to have an infrared cut filter effect. Alternatively, an interference film that reflects infrared light may be provided on any surface in the optical path of the free-form surface prism 189 to cut off infrared light. The mirror 190 is formed by processing a silicon substrate 187 into a concave surface and coating it with aluminum. Micro shutter 188
For example, an improved shutter as shown in FIGS. 8 and 9 of JP-A-10-39239 can be used.

FIG. 3 is an enlarged view of the vicinity of the micro shutter 188 when the optical device of FIG. 2 is viewed from above. The micro shutter 188 can open and close the two light shielding plates 192 left and right by electrostatic force by giving a potential difference to the electrodes 193 provided on the fixed electrode 191 and the light shielding plate 192, respectively. I have. Here, each of the two light shielding plates 192 is attached to the other light shielding plate 1.
A triangular concave portion is provided at the center near the side 92, and two light shielding plates 192 are installed at different levels, and if imaging is performed with the light shielding plate 192 opened halfway, it operates as an aperture. When completely closed, it becomes a shutter. The power source 196 can change the polarity of + and −, and accordingly, the two light shielding plates 192 move in opposite directions. Also, two light shielding plates 1
The 92 is designed to overlap slightly when fully closed, as shown in FIG. Micro shutter 188
Is advantageous in that it can be manufactured together with the reflecting mirror 52 and the solid-state imaging device 55 by a lithography process. As the micro shutter 188, other than the above, a micro shutter as shown in FIG. 47 of JP-A-10-39239 may be used. Alternatively, as a shutter used in the imaging apparatus of the present embodiment, a shutter operated by a spring, like a shutter of a normal film camera, may be manufactured and installed on the silicon substrate 187.

The imaging apparatus according to the present embodiment is, for example,
As shown in FIG. 2, a configuration in which an aperture 197 is separately provided may be employed. The diaphragm 197 may be an iris diaphragm used for a lens of a film camera, or may have a configuration in which a plurality of perforated plates are slid as shown in FIG. Alternatively, a fixed stop in which the aperture area of the stop does not change may be used. As the aperture, the micro shutter 188 may be operated only as an aperture, and the shutter function may be performed by using the element shutter of the solid-state imaging device 55. Further, the imaging apparatus of the present embodiment may be configured such that at least one of the electrode 54, the mirror 190, the micro shutter 188, and the imaging element 55 is formed as a separate component, and is disposed on one substrate together with the remaining members. As shown in FIG. 5, the image pickup apparatus according to the present embodiment is a liquid crystal variable mirror in which a liquid crystal variable focus lens is disposed on the front surface of a mirror as another example of the reflection mirror 52 which is one of the optical characteristic variable optical elements. 252 and the like may be provided.

FIG. 5 is a diagram showing an example of an image pickup device using the liquid crystal variable mirror 252 (image pickup device 253). The liquid crystal variable mirror 252 has a configuration in which a twisted nematic liquid crystal 257 is arranged between a transparent electrode 254 and an electrode 256 coated on the surface of a Fresnel lens-shaped substrate 255. The helical pitch P of the twisted nematic liquid crystal 257 satisfies P <3λ (1). Here, λ is the wavelength of light. When formula (1) is satisfied, the twisted nematic liquid crystal 2
Since the refractive index 57 is substantially isotropic regardless of the polarization direction of the incident light, a variable focus mirror without blur can be obtained without providing a polarizing plate. In a low-cost digital camera or the like, even if the helical pitch P of the twisted nematic liquid crystal 257 is P <15λ (2), it may be practically usable.

FIG. 6 is a diagram showing a third embodiment of the present invention. The optical device 204 of the present embodiment includes a transparent substrate 198
Reflective LCD 199, reflecting mirror 52, solid-state image sensor 55
And a free-form surface prism 18 as an optical block
9 are combined. The transparent substrate 198 includes
Lens 200 as an optical element, low-pass filter 20
1. The IC 203 is also provided, and these form a transparent plate-shaped unit 202. IC20
Reference numeral 3 denotes an IC that drives the reflection type LCD 199, the reflection mirror 52, the solid-state imaging device 55, and the like, or an LSI that has functions such as a CPU and a memory that perform control and calculation. Solid-state image sensor 55, reflecting mirror 52, reflective LCD 199, IC
203 may be separately manufactured and bonded to the transparent substrate 198, but amorphous silicon, low-temperature polysilicon, and continuous grain boundary crystal silicon (Asahi Shimbun with '98 .1.14) are provided on the surface of the transparent substrate 198. Forming such a material using a thin film transistor technique is advantageous in terms of miniaturization, weight reduction, and high precision.

FIG. 7 is a perspective view of a low-pass filter 201 used in the optical device 204 of the present embodiment. The low-pass filter 201 is a pupil-division type low-pass filter, and includes two planes having a twist relationship. The low-pass filter 201 is also one of the optical elements. In addition, in this embodiment, the transparent substrate 19
8 is preferably made of a glass or resin mold.

The optical device 204 of the present embodiment can easily correct aberration because light reflecting and refracting surfaces can be provided on both the free-form surface prism 189 and the transparent plate unit 202. Are superior to the imaging unit 180 of the embodiment shown in FIG. Note that the optical element such as a lens may be made by attaching a curved resin thin film 205 to the surface of a transparent member, for example, like the lens 200b. Such a method is called a thin film lens technology.

FIG. 8 is a diagram showing a fourth embodiment of the present invention. The optical device 207 of this embodiment is configured by combining a transparent plate unit 202 and a plate unit 186. Note that providing the lens 208 separately from the transparent substrate 198 increases the degree of freedom of aberration correction, which is advantageous for aberration correction. However, the lens 208 need not be provided. The transparent plate-shaped unit 202 is provided with a display 209 and an IC 203, and further provided with lenses 210 and 211 manufactured by thin-film lens technology. The lens 212 is formed integrally with the transparent substrate 198 by a molding technique when the transparent substrate 198 is manufactured. The plate unit 186 is configured similarly to the plate unit 186 of the embodiment shown in FIG. Shaded area 21
4 is a black light-shielding film for removing stray light,
It is made by three-layer deposition of CrO ₂ —Cr, painting with black paint, or printing. Note that the hatched portion 214 may be provided on the surface, side surface, or inside of the transparent substrate 198 as needed, and may not be provided in some cases.

A liquid crystal display, which is an example of the display 209, can be formed on a transparent substrate such as glass by a thin film transistor technique, but it is difficult to form the solid-state image sensor 55 and the like only on a silicon substrate. Since the optical device 207 of this embodiment is configured by separately providing the substrate on which the solid-state imaging device 55 and the display 209 are provided, the cost can be reduced as compared with the case where the optical device 207 is formed on the same substrate. Note that the material of the transparent substrate 198 or the lens 211 of the optical device 207 of the present embodiment may be made to have an infrared light absorbing effect so as to have a role of an infrared cut filter. Or thin film 5
An interference film having an infrared cut function may be provided on the surface of the lens 3, the lens 212, the transparent substrate 198, or the like. Further, the optical device 207 of the present embodiment may be configured as a display device in which the solid-state imaging device 55 is removed and the optical system has an observation function such as, for example, an opera glass.

FIG. 9 is a diagram showing a fifth embodiment of the present invention. The optical device 246 of the present embodiment is
45 and a free-form surface prism 189. The plate-shaped unit 245 includes one substrate 2
On the substrate 40, a reflecting mirror 52, a mirror 190, and a micro shutter 188 are provided on a substrate 241 made of low quality silicon or the like.
And a plate unit 244 in which a substrate 240 and an IC 203 are formed on a substrate 242 made of high-quality silicon. It is difficult to form the solid-state image sensor 55, the IC 203, and the like unless they are made of high-quality silicon.
According to the optical device 246 of this embodiment, since the plate units 243 and 244, which are optical units, are formed on separate substrates of different quality, the amount of high-quality silicon used can be reduced accordingly, and the cost can be reduced. It is more advantageous. The free-form surface prism 189 is provided with feet 247 and 248. When the feet 247 and 248 are integrated with the plate unit 245, the optical length between the faces can be adjusted to a desired design value. It has become.

FIG. 10 is a diagram showing a sixth embodiment of the present invention. The optical device according to the present embodiment includes a free-form surface prism 1
An image pickup device for a digital camera is configured by combining the plate-shaped unit 243 and the solid-state image sensor 55 with the image sensor 89. According to the optical device of the present embodiment, since the solid-state imaging device 55 is separated from the substrate 241 made of low-quality silicon or the like, a commercially available CCD or the like can be used as the solid-state imaging device 55, thereby reducing costs. can do. Although not shown, a liquid crystal display or the like may be further provided in the optical device of the present embodiment to be used as a viewfinder of a digital camera.

Further, in this embodiment, instead of disposing the reflecting mirror 52, the mirror 190, and the micro shutter 188 on one substrate, as shown in FIG. It may be arranged. In this case, since the optical components such as the reflecting mirror 52, the mirror 190, and the micro shutter 188 can be separately formed, these components can be shared with components of other products. Also, even when the yield of each optical component (pass rate at the time of production) is poor, products can be made by collecting only good components, so that each optical component can be manufactured on a single substrate. The yield as a product can be improved.

As shown in FIG. 10, a liquid crystal shutter 249, which is one of the transmittance variable elements, may be arranged on the front surface of the solid-state image sensor 55. In this case, the micro shutter 188 may operate as an aperture, or may operate as a shutter together with the liquid crystal shutter 249. Alternatively, omit the micro shutter 188 and
The shutter may be operated by the liquid crystal shutter 249 and the element shutter function of the solid-state imaging device 55. In addition,
Since the liquid crystal shutter 249 has no mechanically movable part, the structure without the micro shutter 188 can simplify the mechanical structure.

FIG. 12 is a view showing a seventh embodiment of the present invention. The optical device 217 of this embodiment has a configuration in which a footed lens 216, which is an example of a movable optical element, is provided. The optical device 217 has a configuration in which a solid-state imaging device 55 and a free-form surface prism 189 are combined with a transparent substrate 198 in addition to the footed lens 216. The footed lens 216 has free space optics (MC Wu, L.-Y. Lin, SS. Lee, KS) below the lens 218.
J. Pister, Sensors and Actuators A50 (1995) 127-1
34 etc.) 21
The foot 219 configured with 9 is connected to an electrode 219b (FIG. 13) that slides by electrostatic force and corresponds to an electrode 193b shown in FIG.
The angle θ shown in FIG. 13 is changed by sliding b. Intersection points P ₁ , P ₂ with foot 219
Move on the surface of the transparent substrate 198 when the angle θ changes. The lens with foot 216 can be adjusted in focus by changing the angle θ of the foot 219 and changing the distance Z between the lens 218 and the transparent substrate 198. Note that a slight air gap is provided between the transparent substrate 198 and the free-form surface prism 189 shown in FIG. 12 so that the light 60 from the object is totally reflected at the point A. FIG. 13 shows a modified example of the present embodiment, in which the lens with foot 216, the transparent substrate 198, and the solid-state image sensor 55 are used.
FIG. 3 is a diagram illustrating an example of an imaging device having a simple configuration obtained by combining the above.

FIG. 14 is a diagram showing an eighth embodiment of the present invention. The optical device according to the present embodiment constitutes a viewfinder of a digital camera as an example of an observation device. The optical device of the present embodiment has a configuration in which a mirror 216B with a foot is provided in which the lens 218 of the lens with foot 216 shown in FIGS. 12 and 13 is replaced with a mirror 218B. The optical device of the present embodiment includes a plate-shaped unit 186 including a transparent substrate 198 and a lens 211, and a free-form surface prism 189, in addition to the foot mirror 216B. The optical device of the present embodiment can adjust the diopter by sliding the foot 219 to change the distance Z between the mirror 218B and the transparent substrate 198.

The legged lens 216 shown in FIGS.
Is used as an example of a movable lens that is one of the movable optical elements. Another example of the movable lens is an electrostatic lens. FIG. 15 is a schematic configuration diagram of an electrostatic lens showing another example of the movable lens used in the embodiment of the present invention. The electrostatic lens 220 includes a lens 218, an electrode 221,
222, a damper 223, and the like. The electrostatic lens 220 includes an electrode 221 and an electrode 222
By applying a voltage between the lens and the lens
The distance between the transparent substrate 18 and the transparent substrate 198 can be changed for focusing, zooming, and the like. Note that the damper 223 holds the lens 218 and reduces the impact when the lens 218 moves. The lens 218 may be replaced with a mirror 225 as shown in FIG. 16 to form a movable mirror 226, which may be used as a movable optical element used in the embodiment of the present invention.

FIG. 16 is a diagram showing a ninth embodiment of the present invention. The optical device 228 according to the present embodiment is an example of a reflecting mirror 52 that is one of the optical characteristic variable optical elements, a movable mirror 226 that is one of the movable optical elements, and a movable lens that is one of the movable optical elements. The configuration includes a running lens 227. The optical device 228 further includes a silicon substrate 187 and a free-form surface prism 189.
The optical device 228 can perform ZOOM and focusing by changing the focal length of the reflecting mirror 52 and the positions of the self-propelled lens 227 and the mirror 225. Note that the free-form surface prism 189 used in the present embodiment may have an infrared cut effect by using a material that absorbs infrared light. Self-propelled lens 227
As shown in FIG. 17, it is configured to include electrodes 193a and 193b and a lens 218 fixed to the electrode 193b, and to apply a potential difference between the two comb-shaped electrodes 193a and 193b to generate electrodes by electrostatic force. The lens 218 fixed to 193b can be moved.

In recent years, it has been desired to reduce the size of digital cameras. In particular, thin card-type digital cameras have excellent portability and are convenient. However, there is a limit to miniaturization in a conventional imaging apparatus combining an optical system and an electric system as shown in FIG. Therefore, the present invention can provide an imaging device and an optical device used for a thin card type digital camera and the like.

FIG. 18 is a diagram showing a tenth embodiment of the present invention. The optical apparatus according to the present embodiment uses a digital camera 232 using an imaging unit 231 in which a plate-shaped unit is combined with a free-form surface prism 230 that is one of optical blocks.
Is composed. The digital camera 232 further includes a display 209 such as a liquid crystal display.
Is provided. The digital camera 232 according to the present embodiment includes an imaging unit 231 in which the digital camera 23
2 can capture an object located in a direction parallel to the thickness direction. 19 and 20 are diagrams showing the shape of the free-form surface prism 230 in detail.
Is a view of the free-form surface prism 230 as viewed from above, and FIG. 20 is a view of the free-form surface prism 230 as viewed from the object side. The free-form surface prism 230 transmits the light 60 from the object to the reflection surface R.
1 and changes its direction in the XY plane and in the direction toward the reflecting mirror 52, and after being reflected by the reflecting mirror 52, is reflected by the reflecting surface R2 to form an image with the solid-state imaging device 55. It is formed as follows. In this manner, the shape of the free-form surface prism 230 can be formed so that the incident light 60 entering the free-form surface prism 230 from the object and the light beam m exiting the free-form surface prism 230 and entering the solid-state imaging device 55 have a twisted relationship. For example, the thickness of the digital camera 232 can be made as thin as the width W of the solid-state imaging device 55. Note that, instead of the free-form surface prism 230, a lens and a prism normally used and the optical block 189 shown in FIG. 2 are used so that the light beam m incident on the solid-state imaging device 55 and the incident light 60 from the object have a twisted relationship. An optical system may be formed by arranging such optical elements such as a free-form surface prism. Further, an interference film 233 for cutting infrared light may be provided on a surface in the optical path of the free-form surface prism 230 to cut infrared light.

FIG. 21 is a view showing an eleventh embodiment of the present invention. The optical device according to the present embodiment is another example different from the digital camera shown in FIG. 18, and uses a small digital camera imaging unit 180 shown in FIG.
4. The digital camera 234 of the present embodiment is a small digital camera imaging unit 18.
0 indicates that an object in the direction perpendicular to the thickness direction of the digital camera 234 can be imaged. According to the digital camera 234 of the present embodiment, since the small digital camera imaging unit 180 is arranged so that the incident light 60 from the object and the thickness direction of the digital camera 234 are orthogonal to each other, the digital camera 234 Can be reduced in thickness. Note that, in addition to the imaging units shown in FIGS. 18 and 21, any of the plate-shaped units and devices of the present invention may be used for the imaging system of the digital camera. Further, the plate-shaped unit and the device of the present invention are not limited to a digital camera, such as a PDA.
May be used for the optical system and the imaging device.

In recent years, electronic imaging devices such as electronic cameras and video cameras have been increasing. They are shown in FIG.
In most cases, the solid-state imaging device 1 is combined with the lens system 2 as shown in FIG. However, the above-mentioned structure has a complicated structure, so that the number of parts is large, assembly is troublesome, and there is a limit to downsizing and cost reduction. In view of the above, the present invention can provide a small and inexpensive electronic imaging device.

The optical device of the present invention that achieves the above object is as follows:
At least an imaging element and an optical element are arranged on the surface of a single transparent substrate, and have an imaging function by itself or by adding another component.

FIG. 23 is a diagram showing a twelfth embodiment of the present invention. The imaging apparatus according to the twelfth embodiment has free-form surfaces 4, 6 as optical elements and a diffractive optical element (hereinafter referred to as DOE) 5 formed on both surfaces of a single transparent substrate 3 made of glass, crystal, plastic, or the like. Further, the solid-state imaging device 1 is formed by using a silicon thin film technology or the like. This is called a plate-shaped imaging unit 7. The free-form surface is a surface formed of a non-rotationally symmetric surface, and is a curved surface having only one symmetric surface or having no symmetric surface. The free-form surface is used for both refraction and reflection. In the present embodiment, light 7 ′ from an object (not shown) is refracted by the free-form surface 4, is deflected and reflected by the off-axis DOE 5, is reflected by the free-form surface 6, and forms an image on the solid-state imaging device 1. Since aberrations are corrected by the free-form surfaces 4, 6, and the DOE 5, a good image similar to that formed by a normal lens system enters the solid-state imaging device 1. The free-form surfaces 4 and 6 may be formed simultaneously with the solid-state imaging device 1 by a method such as molding, and the DOE 5 may be formed by a method such as molding or lithography. The solid-state imaging device 1 may be formed directly on the transparent substrate 3 by a lithography method. However, if it is difficult, the solid-state imaging device 1 may be separately manufactured and integrated with the transparent substrate 3 later. Good. Alternatively, although not shown, a component such as a lens may be added to the outside of the plate-like imaging unit 7 so that the plate-like imaging unit 7 and the plate-like imaging unit 7 have an imaging function.

FIG. 24 is a diagram showing a thirteenth embodiment of the present invention. The optical device of the thirteenth embodiment is a portable information terminal device in which the imaging unit 7 of the twelfth embodiment is formed on a transparent substrate 3 together with a TFT liquid crystal display 8, an IC 9 of a peripheral circuit, and a microprocessor 10. Unit. The imaging unit 7 may be further formed with an IC (LSI) having functions such as a memory and a telephone. Further, a finder 11 of an electronic imaging device is also formed on the transparent substrate 3. This may be as simple as providing a field frame on the transparent substrate 3 or as shown in FIG. 25, a concave lens 12 and a convex lens 13 are provided on both sides of the transparent substrate 3 to form a Galileo telescope type finder. And so on. Alternatively, at least one of the concave lens 12 and the convex lens 13 may be provided outside the transparent substrate 3 and combined with the lens on the transparent substrate 3 to form a finder.

FIG. 26 is a diagram showing a fourteenth embodiment of the present invention. The optical device according to the fourteenth embodiment is a plate-shaped imaging unit capable of adjusting the focus. When the focus is adjusted by the plate-shaped imaging unit 14, it is impossible to mechanically move the positions of the DOE 5, the free-form surface 6, and the like shown in FIG. Therefore, in the plate-shaped imaging unit 14 of the present embodiment,
An optical element 15 having a variable focal length is used. FIG. 27 shows an example of the optical element 15, which is a variable focus DOE 17 using a polymer dispersed liquid crystal 16. On at least one surface of the transparent substrate 18, a groove having a wavelength of light is formed.
, The refractive index of the polymer-dispersed liquid crystal 16 is lowered. On the other hand, if no voltage is applied, the direction of the liquid crystal molecules 20 is random, so that the refractive index of the polymer dispersed liquid crystal 16 increases. Accordingly, the variable focus DOE 17 is turned on and off by the voltage.
The focal length can be switched by the FF. The polymer-dispersed liquid crystal 16 becomes almost solid if the weight ratio to the liquid crystal molecules 20 is increased to a certain level or more (for example, 25% or more). Further, as shown in FIG.
6 and the left surface of the transparent substrate 18 are curved surfaces 21
Then, it may be used for lens action and aberration correction. FIG.
In the example shown in FIG. 29 and FIG. 29, the right surface of the transparent substrate 18 may be a Fresnel surface instead of the DOE surface. At this time, the DOE 17 functions as a variable focus Fresnel lens. Further, as shown in FIG. 54, the right surface of the transparent substrate 18 may be a curved surface like a normal lens.

Further, the above-mentioned transparent substrates 3 and 18 may have an effect of an infrared cut filter. FIG. 30 is a diagram showing a fifteenth embodiment of the present invention. The optical device according to the fifteenth embodiment is a plate-shaped imaging unit using a reflection type variable focal point Fresnel mirror 22. The varifocal Fresnel mirror 22 is provided with a reflection surface 23 as shown in FIG. 31, and the refractive power of the Fresnel surface 26 is changed by opening / closing a switch 24 or changing the voltage by a variable resistor 25. Operates as a Fresnel mirror.
DOE may be used instead of the Fresnel surface 26.

Note that the variable focus D in the above embodiment is
The OE 17 and the Fresnel mirror 22 are used for the plate-shaped imaging unit 7.
As shown in FIG. 32, it may be used for a normal imaging device or a variable focus lens for an optical disk having a different thickness, an electronic endoscope, a TV camera, a film camera, or the like. Further, when a tolan-based liquid crystal such as Dai Nippon Ink DON-605: N-1 (JCIA February 1997, p.14 to p.18) is used as the liquid crystal, the optical anisotropy becomes large. (Δn = 0.283; Δn represents optical anisotropy and is the difference between the lengths of the main axes of the refractive index ellipsoids), the viscosity of the liquid crystal is low, and the switching of the focal length at a high speed is more preferable. Next, a light source optical system for a light guide used in an endoscope such as an electronic endoscope or a fiberscope, a rigid scope, or an industrial inspection device, which is one of the electronic imaging systems, will be described.

In the prior art, as shown in FIG. 34, an aspheric lens 32
The light from 3 is collected on the end face of the light guide 31. The lamp 33 may be a light source other than the lamp, for example, a semiconductor laser. Assuming that the angle formed by the incident light with respect to the normal to the incident surface of the light guide 31 is θ and the incident light intensity is I, the relationship between θ and I is as shown in FIG. The value of I keeps a substantially constant value with respect to θ, and becomes 0 because there is no light beam at θL. Considering the solid angle of the incident light beam, the maximum incident light energy is near θ = θL. Therefore, the light guide 31 needs to satisfy NA ≧ θL (3) so that the light having the incident angle θL can be transmitted. However, as the NA is increased, the glass of the light guide is colored yellow, which causes a problem that color reproduction and transmission light amount are reduced.

Hereinafter, a light source optical system capable of solving the above-mentioned problems of the prior art will be described. In the first example, as shown in FIG. 36, a DCC lens 34 is provided, and the center and the periphery of the light beam from the lamp 33 are inverted by total reflection on the side surface 34 'of the DCC lens 34 to collect light. The light is incident on the lens 35. The DCC lens 34 is a K.Ko
no et al .: Opt. Rev. 4 (1997) 423. As described in 423., both ends are conical dents and the side is a cylindrical optical element that reflects light. The light is reflected or reflected by attaching a metal film to the side surface, and the central ray a and the peripheral ray b of the incident light beam are inverted. The light beam b is made incident. In this case, as shown in FIG. 37, the relationship between θ and I is high at the center (theoretical infinity) and low at the periphery (theoretical 0).
A large amount of light can be transmitted even with a light guide having a small A, and the above-mentioned problem is solved. The DCC lens 34 can be formed by molding or grinding a transparent substance such as glass, plastic, rubber, or the like. DCC3 of the shape shown in FIG.
If it is difficult to machine the member 4, it may be divided into two members 36 and 37 as shown in FIG. 38. In particular, if the member is divided into two members having the same shape, the mold can be shared and the cost is advantageous. It is.

A design example of a DCC lens is shown below. FIG.
As shown in FIG. 9, the center thickness of the DCC lens 34 is t, the refractive index is n, the incident light flux height (= emission light flux height) is h, 1/2 of the apex angle of the DCC lens is α, and φ is the following equation (5). ), T = {1−cot α · cot (α + φ)} · h / cot (α + φ) (4) sin φ = cos α / n (5) Here, n = 1.53, h = 12.7m
If m and α = 45 °, φ = 27.527 ° and t = 2
7.645 mm, but the diameter D of the DCC lens 34 is
Assuming a margin of 30 mm, t needs to be as large as t 'in the following equation (6).

T ′ = (D / 2−h) · tan (90 ° −α−φ) (6) Therefore, it is preferable that t = 28.369 mm. On the other hand, if D is larger than 2h, it is disadvantageous in terms of cost, and it is preferable to satisfy D ≦ 3h + 5 (7). Therefore, t is preferably determined so as to satisfy the following condition (8).

0.6 × {(1-cot α · cot (α + φ) / cot (α + φ)} × h ≦ t ≦ {(1-cot α · cot (α + φ)) / cot (α + φ)} × h + 5 ( D / 2-h) · cot (α + φ) (8) If the value falls below the lower limit of the condition (8), vignetting of the light beam near the center of the light source occurs. If the value exceeds the upper limit, vignetting of the light beam around the light source occurs. As described above, the center thickness t of the DCC lens may be determined so as to satisfy the above conditions (5) and (8), as shown in FIG.
Is divided into two, the above conditions (5), (7), and (8) can be applied if the sum of the respective center thicknesses of 36 and 37 is taken as the center thickness t. Also, as shown in FIG. 40, the central portion of the light beam emitted from the lamp 33 may be blackened due to the filament at the central portion of the lamp 33. That is, there is no light energy in the hatched portion having the diameter d. However, also in this case, the DCC lens 34 can eliminate black spots in the emitted light beam.

In the second example, as shown in FIG.
One of the members 38 obtained by dividing the lens into two is a curved surface having a convex lens function. In this case, since the condenser lens can be omitted, there is an advantage that the cost can be reduced. Assuming that the radius of the convex curve 38 'of the cross section of the member 38 is R, the focal length of the omitted condenser lens is f, and the refractive index of the member 38 is n, 1 / f ≒ (n-1) / R (1) 9) R may be determined so as to satisfy Also in the present embodiment, the members 36 and 38 may be formed into an integral shape. Similarly, when the light beam emitted from the lamp 33 is not a parallel light beam, the cross-sectional shape of the incident surface 36 'of the member 36 may be curved so that the light beam passing through the member 36 becomes a parallel light beam. In addition to the above, the exit surface of the member 36 and the entrance surface of the member 38 may be curved surfaces.

According to the light source optical system described above, the NA
However, a large amount of light can be transmitted even with a light guide that is relatively small and less colored. Next, a method for aligning the microlenses on the substrate will be described.

In a light guide device for a light guide used for an endoscope or the like, an optical system in which a concave lens 100 is arranged on an end face of a light guide 104 as shown in FIG. 42 is generally known. As a method for improving the light distribution characteristics without increasing the size of the light guide optical system, in the related art, as shown in FIG. 43, a spherical lens array in which spherical lenses 101 are two-dimensionally arranged on a substrate 102 is arranged. A method of providing the light guide 103 on the end face of the light guide 104 has been considered. To obtain good light distribution characteristics, it is desirable that the spherical lenses 101 are densely arranged as shown in FIG. However, the spherical lens used here is several μm
As a means for densely arranging such fine particles, a method using gravity can be considered.
It is extremely difficult to regularly align fine particles of about to several tens of μm two-dimensionally using gravity. In addition, when mass production is considered industrially, it is necessary to form a substrate having a relatively large area in a short time.

Hereinafter, a method capable of solving the above-mentioned problems of the prior art will be described. When a substrate is placed in a liquid in which a spherical member is dispersed and the substrate is lifted from the liquid, a flow occurs due to the surface tension of the liquid and the evaporation of the liquid near the boundary, and the fine particles are aligned in a crystalline form on the substrate. The phenomenon is known (K. Nagayama ed.:"Protein Array -An Altern
ative Biomolecular System ", Adv. Biophys. (Tokyo) 3
4 (1997), Japan Scientific Soc. Press). The first example utilizes this self-integration phenomenon as means for aligning the microlenses on the substrate. As shown in FIG. 45, the member to be the substrate 102 is immersed in the liquid 105 in which the microspherical lens 101 is dispersed, and the substrate 102 is vertically or horizontally pulled up and the liquid is evaporated, so that the microspherical lens 101 is Densely aligned on 102,
A spherical lens array can be made.

In the second example, as shown in FIG.
By distributing the spherical lenses 101 on the substrate 02 and vibrating the substrate 102, the spherical lenses 101 can be aligned with the substrate 102.

If the spherical lenses aligned by the above-described method are fixed with an adhesive or the like, a regularly arranged spherical lens array can be easily manufactured. In particular, a substrate having a relatively large area can be easily manufactured, which is industrially advantageous.

When the spherical lens array 103 has two layers as shown in FIG. 47, the light distribution characteristics are further improved.
FIG. 48 shows the light distribution characteristics of the light source device, that is, the angle θ of the emitted light.
3 shows the distribution of the intensity I with respect to. Solid line is light guide 10
In the case where a concave lens is arranged on the end face of No. 4, the broken line indicates the first,
When the single-layer lens array of the second example is arranged, the dashed line indicates the case where the two-layer lens array shown in FIG. 47 is arranged, and when the two-layer lens array is arranged, the light distribution characteristics are improved. .

Further, as shown in FIG. 49, the spherical lens array manufactured by the present method can be applied to light collection of a backlight of a liquid crystal display element. In this figure, a light beam from a backlight 109 passes through a spherical lens array 103 and illuminates a liquid crystal display element 110. Thus, light from the backlight 109 can be efficiently collected, and a bright liquid crystal display device can be realized.

Further, as shown in FIG. 50, by providing the spherical lens array 103 manufactured by this method immediately before the image pickup device 111 such as a CCD, the aperture efficiency of the image pickup device is greatly improved.

As a method of fixing the aligned fine particles on the substrate, as shown in FIG. 51, the use of an adhesive 113 can be considered. However, if a highly viscous adhesive is used, the arrangement of the aligned particles can be reduced. There is a risk of being disturbed. Further, the transmittance may decrease due to a chemical change of the adhesive itself. Particularly in the case of a medical endoscope, a sterilization operation at a high temperature is indispensable, so a method using no adhesive is desirable. Therefore, as shown in FIG. 52, a method of sandwiching the other base material 112 and sealing both ends is conceivable. Further, FIG.
As shown in (1), the substrate or the spherical lens can be melted by heating and fixed to each other.

According to the method described above, minute spherical lenses can be easily and densely arranged on a substrate, the endoscope end can be reduced in size, a bright backlight of a liquid crystal display device, and a solid-state imaging device can be used. It is possible to improve the light collection efficiency and the like.

As described above, it is preferable that the optical device, the image pickup device, the display device, the image forming device and the like according to the present invention have the following features. Note

1. Optical element, shutter,
An optical device provided with two or more of the apertures and the like.

[0061] 2. The optical device according to any one of claims 1 to 3, wherein the optical element is an optical characteristic variable optical element.

3. 3. The optical device according to claim 2, wherein the optical characteristic variable optical element is a variable focus optical element.

4. 3. The optical device according to claim 2, wherein the optical characteristic variable optical element is a variable focus mirror.

5. The optical device according to any one of claims 1 to 3, wherein the optical element is a movable optical element.

6. The optical device according to any one of claims 1 to 3, wherein the optical element is made by using a thin film lens technique.

7. The optical device according to claim 1, wherein the optical element is a mirror.

8. The optical device according to any one of claims 1 to 3, wherein the optical element has an infrared light cut function.

9. 9. The optical device according to claim 1, wherein the optical device is formed on a silicon substrate.

10. The said board | substrate is transparent, The claim 1 thru | or claim 8 characterized by the above-mentioned.
An optical device according to any one of the preceding claims.

11. The optical device according to claim 10, wherein the substrate has an infrared light removing function.

12. The optical device according to claim 1, wherein at least a part of the substrate is opaque.

13. 13. The optical device according to claim 1, wherein a lithography process is used to manufacture the optical device.

14. 14. The optical device according to claim 1, wherein the optical device includes various ICs or LSIs.

15. 4. An optical system according to claim 1, further comprising an optical block and said optical device.
An apparatus according to any of the preceding claims.

16. The apparatus according to any one of claims 1 to 3, further comprising an optical element, an optical block, and the optical device.

17. 17. The apparatus according to claim 15, wherein the optical block has an infrared light cutting function.

18. Claims 1 to 3 and additional claim 1
An apparatus in which the optical device according to any one of the additional items 8 and 14 is combined with the transparent optical device according to any one of the additional items 10 to 12.

19. An optical device comprising at least one of an optical element, a shutter, an aperture, a display element, and an image sensor, and an optical block.

20. An optical device including two or more of an optical element, a shutter, an aperture, a display element, and an image sensor, and an optical block.

21. An optical device in which two or more of an optical element, a shutter, an aperture, a display element, and an image pickup element are arranged to face a plurality of surfaces of an optical block.

22. The ZOOM is performed by including at least one optical element having a variable optical property or a movable optical element.
20. An optical device comprising the optical device according to any one of the additional items 1 to 14, or the optical device according to any one of the additional items 15 to 18.

23. Claims 1 to 3 and additional claim 1
23. An imaging device comprising the device according to any one of additional items 22.

24. An imaging apparatus comprising the apparatus according to any one of claims 1 to 3 and 1 to 22.

25. An optical device in which an imaging or observation direction and a light beam incident on an imaging element or an eye are in a torsional relationship.

26. An imaging apparatus using an optical device in which an imaging or observation direction and a light beam incident on an imaging element or an eye are in a torsion relationship.

27. The optical device according to any one of claims 1 to 3, and the additional items (1) to (14), wherein the imaging or observation direction and the light beam incident on the image sensor or the eye are in a torsional relationship. Item 22
An optical device comprising the device of any of the preceding claims.

28. An optical device including a free-form surface prism in which a light beam entering the free-form surface prism and a light beam exiting the free-form surface prism are in a torsional relationship.

29. Claims 1 to 3 and additional claim 1
29. The optical device according to attachment 28, comprising the optical device according to any one of attachments 14 to 14 or the device according to any one of attachments 15 to 22.

30. The optical device according to any one of claims 1 to 3, and the optical device or any one of the additional items 15 to 22, wherein the imaging or observation direction is substantially perpendicular to the thickness direction. 30. An imaging device including the device according to item 30 or the optical device according to item 29.

31. 15. The optical device according to claim 1, wherein an imaging or observation direction is substantially parallel to the thickness direction, or the optical device according to any one of the additional items 1 to 14, or the additional items 15 to 22, and the additional device. Item 25,
An imaging device including the device according to any one of additional items 28.

32. A movable optical element including an optical element and an actuator, including a lithography process in a manufacturing process.

33. 33. An optical element with foot according to attachment 32.

34. Item 33. The electrostatic optical element according to additional item 32.

35. 33. The self-propelled optical element according to additional item 32.

36. 33. An optical device comprising the movable optical element according to additional item 32 for performing focus or zoom.

37. A diaphragm manufactured by a processing method including a lithography process driven by electrostatic force or electromagnetic force.

38. A shutter manufactured by a processing method including a lithography process driven by electrostatic force or electromagnetic force.

39. A shutter that is also used as a diaphragm manufactured by a processing method including a lithography process driven by electrostatic force or electromagnetic force.

40. An imaging device using an element shutter function of a solid-state imaging device.

41. Item 40 having a variable transmittance element
An imaging device according to claim 1.

42. Claims 1 to 3 and additional claim 1
40. The imaging device according to claim 37 or 40.

43. The substrate is opaque. (It has a light shielding effect and can suppress flare and ghost.)

44. The substrate is transparent on the optical path, and the light shielding means is provided at least partially outside the optical path. (Because the optical system can be configured via the substrate, the thickness can be reduced, and flare and ghost can be suppressed.)

45. An optical element and an image sensor were arranged in parallel on one surface of the substrate.

46. The optical element and the display element were arranged in parallel on one surface of the substrate.

47. A plurality of optical means were arranged in parallel on one surface of the substrate. (The optical system and the entire device can be made thinner.)

48. The substrate is transparent and partially has an internal reflection surface. (Because the optical path can be folded back in the substrate, the overall optical system can be made thinner.)

49. The optical element and the image sensor are eccentric to each other.

50. The substrate is a transparent substantially parallel flat plate, and a part of the surface is an optical surface constituted by a curved surface.

51. The principal ray or optical axis is bent.

52. An optical device in which a plurality of optical elements, a shutter, an aperture, a display element, and an imaging element are non-coaxially arranged on a single substrate.

53. An optical device in which at least one of an optical element, a shutter, an aperture, and a display element and an imaging element that is not coaxial with the element are arranged on one substrate.

54. Along with disposing the optical characteristic variable optical element on the substrate, further on the substrate, a display element, an imaging element,
An optical device in which any one of the other optical elements is arranged.

55. An optical device in which a movable optical element is disposed on a substrate and any one of a display element, an imaging element, and another optical element is further disposed on the substrate.

56. An optical device in which one of a display element, an imaging element, and another optical element is further disposed on a substrate having a reflective surface.

57. An optical device in which any one of a display element, an imaging element, and another optical element is further disposed on a substrate having an infrared cut filter.

58. A plate-shaped imaging unit, wherein at least an imaging element and an optical element are arranged on a surface of a single transparent substrate and have an imaging function.

59. What is claimed is: 1. A plate-shaped imaging unit, comprising: an imaging element, at least one of a diffractive optical element, a curved lens, and a free-form surface provided on a surface of a single transparent substrate, and having an imaging function.

60. A plate-shaped imaging unit having a finder, an imaging element, and at least one of a diffractive optical element, a curved lens, and a free-form surface disposed on a surface of a single transparent substrate and having an imaging function. .

61. A plate-shaped plate having an imaging function on a surface of a single transparent substrate, having at least one of an imaging element, a display device, and at least one of a diffractive optical element, a curved lens, a free-form surface, and a finder. Imaging unit.

62. Additional items 58 to 6 characterized in that a lithography process is used in the manufacturing stage.
2. The plate-shaped imaging unit according to any one of 1.

63. 63. The plate-shaped imaging unit according to any one of the additional items 58 to 62, further comprising a variable focus optical element.

64. 63. The plate-shaped imaging unit according to any one of additional items 58 to 63, wherein the transparent substrate has an infrared cut filter effect.

65. 66. An imaging apparatus comprising the plate-shaped imaging unit according to any one of Additional Items 58 to 64.

66. A portable information terminal device comprising the plate-shaped imaging unit according to any one of additional items 58 to 64.

67. A variable refractive power optical element comprising a single transparent substrate and a polymer-dispersed liquid crystal formed on the surface thereof.

68. A variable focus optical element comprising a single transparent substrate and a polymer-dispersed liquid crystal formed on the surface thereof.

69. A variable-focus diffractive optical element comprising a single transparent substrate and a polymer-dispersed liquid crystal formed on the surface thereof.

70. The weight ratio of polymer to liquid crystal is 25
%. The optical element according to any one of additional items 67 to 69, wherein the optical element is set to not less than%.

71. 71. The optical element according to any one of the additional items 67 to 70, wherein the transparent substrate has an infrared cut filter effect.

72. 72. An imaging apparatus comprising the optical element according to any one of the additional items 67 to 71.

73. A light source optical system for a light guide, comprising: at least one optical element through which a light ray is transmitted is a concave curved surface, and a side face reflects the light ray.

74. A light source optical system for a light guide, characterized in that one surface is a concave curved surface through which light rays are transmitted, and two side surfaces are provided with two optical elements of the same shape that reflect light rays.

75. A light guide optical system for a light guide, wherein both ends are concave curved surfaces through which light rays are transmitted, and side surfaces are provided with optical elements that reflect light rays.

76. 75. The light source optical system for a light guide according to any one of the additional items 73 to 75, wherein the following conditions (5) and (8) are satisfied. sin φ = coS α / n (5) 0.6 × {(1-cot α · cot (α + φ)) / cot (α + φ)} × h ≦ t ≦ ｛(1-cot α · cot (α + φ )) / Cot (α + φ)｝ × h + 5 (D / 2−h) · cot (α + φ) (8) where φ is the angle defined by equation (5), and α is the apex angle of the DCC lens. 1/2, n is the refractive index of the DCC lens, h is the height of the incident light beam, t is the center thickness of the DCC lens, and D is the diameter of the DCC lens.

77. Additional terms 73 to 75 characterized by satisfying the following conditions (5), (7) and (8):
The light source optical system for a light guide according to any one of the above. sin φ = cos α / n (5) D ≦ 3h + 5 (7) 0.6 × {(1-cot α · cot (α + φ)) / cot (α + φ)} × h ≦ t ≦≦ (1−cot α · cot (α + φ)) / cot (α + φ)｝ × h + 5 (D / 2−h) · cot (α + φ) (8) where φ is the angle defined by equation (5) , Α is １ ／ of the apex angle of the DCC lens, n is the refractive index of the DCC lens, h is the height of the incident light beam, t is the center thickness of the DCC lens, and D is the diameter of the DCC lens.

78. 78. The light source optical system for a light guide according to any one of additional items 73 to 75, wherein a cross-sectional shape of the light exit surface satisfies the following condition (9). 1 / f ≒ (n-1) / R (9) where R is the radius of the convex curve of the cross section of one of the members obtained by dividing the DCC lens into two having a curved surface having a convex lens function. R and n are the refractive index of the member, and f is the focal length of the condenser lens which can be omitted.

79. 79. A light source device comprising the optical system according to any one of Supplementary Items 73 to 78.

80. A method for manufacturing a spherical lens array using a self-integration phenomenon as means for densely aligning spherical lenses on a substrate.

81. A method of manufacturing a spherical lens array in which a substrate or a spherical lens is vibrated as a means for densely aligning the spherical lenses on a substrate.

82. Item 90. The method according to Item 80 or 81, wherein the spherical lens is glass.

83. Item 90. The method according to Item 80 or 81, wherein the spherical lens is a resin.

84. An illumination optical system including a lens array manufactured by the method according to additional item 80 or 81.

85. An illumination optical system for an endoscope, comprising a lens array manufactured by the method according to additional item 80 or 81.

86. An illumination optical system for a microscope, comprising a lens array manufactured by the method according to additional item 80 or 81.

87. A backlight illumination optical system for a liquid crystal display device including a lens array manufactured by the method according to additional item 80 or 81.

88. 81. An imaging device including a lens array manufactured by the method according to supplementary item 80 or 81.

89. A method for fixing a spherical lens manufactured by the method according to supplementary item 80 or 81 using an adhesive.

90. 81. A method for fixing a spherical lens manufactured by the method according to Additional Item 80 or 81 to a substrate by sandwiching the spherical lens using another substrate.

91. A method for fixing the spherical lens or the substrate by heating the spherical lens or the substrate as means for fixing the spherical lens manufactured by the method according to Additional Item 80 or 81 to the substrate.

92. A spherical lens array manufactured by the method according to additional item 80 or 81.

93. A manufacturing apparatus for manufacturing a spherical lens array by the method according to additional item 80 or 81.

94. A plate-shaped imaging unit in which at least an imaging element and an optical element are arranged on a surface of a single transparent substrate.

95. A plate-shaped imaging unit in which an imaging element and at least one of a diffractive optical element, a curved lens, and a free-form surface are disposed on a surface of a single transparent substrate.

96. A plate-shaped imaging unit in which a finder, an imaging element, and at least one of a diffractive optical element, a curved lens, and a free-form surface are disposed on a surface of a single transparent substrate.

97. A plate-like imaging unit in which an imaging element, a display device, and at least one of a diffractive optical element, a curved lens, a free-form surface, and a finder are provided on a surface of a single transparent substrate.

98. Item 94 to Item 9 wherein a lithography process is used in the production stage.
7. The plate-shaped imaging unit according to any one of 7.

99. 98. The plate-shaped imaging unit according to any one of the additional items 94 to 98, comprising a variable focus optical element.

100. 100. The plate-shaped imaging unit according to any one of additional items 94 to 99, wherein the transparent substrate has an infrared cut filter effect.

101. An imaging apparatus comprising the plate-shaped imaging unit according to any one of Supplementary Items 94 to 100.

102. A portable information terminal device comprising the plate-shaped imaging unit according to any one of Supplementary Items 94 to 100.

[0162]

As described above, according to the present invention,
It is possible to realize a small and inexpensive optical device such as an imaging device or an observation device or a component such as a unit used for the optical device.

[Brief description of the drawings]

FIG. 1 is a diagram showing a first embodiment of the present invention.

FIG. 2 is a diagram showing a second embodiment of the present invention.

FIG. 3 is an enlarged view of the vicinity of a micro shutter when the optical device of FIG. 2 is viewed from above.

FIG. 4 is a view showing a modification of a diaphragm used in the second embodiment of the present invention.

FIG. 5 shows a modification of the second embodiment of the present invention, in which a liquid crystal variable focus lens which is another example of the variable focus mirror which is one of the optical characteristics variable optical elements is disposed in front of the mirror. FIG. 3 is a diagram illustrating an example of an imaging device used.

FIG. 6 is a diagram showing a third embodiment of the present invention.

FIG. 7 is a perspective view of a low-pass filter used in an imaging apparatus according to a third embodiment of the present invention, showing a pupil-dividing low-pass filter including two planes in a torsional relationship.

FIG. 8 is a diagram showing a fourth embodiment of the present invention.

FIG. 9 is a diagram showing a fifth embodiment of the present invention.

FIG. 10 is a diagram showing a sixth embodiment of the present invention.

FIG. 11 is a view showing a modification of the sixth embodiment of the present invention.

FIG. 12 is a diagram showing a seventh embodiment of the present invention.

FIG. 13 is a diagram illustrating an example of an imaging device having a simple configuration in which a footed lens, a transparent substrate, and a solid-state imaging device are combined as a modification of the seventh embodiment of the present invention.

FIG. 14 is a diagram showing an eighth embodiment of the present invention.

FIG. 15 is a diagram illustrating an electrostatic lens as another example of the movable lens used in the embodiment of the present invention.

FIG. 16 is a diagram showing a ninth embodiment of the present invention.

FIG. 17 is a schematic structural diagram of a self-propelled lens used in a ninth embodiment of the present invention.

FIG. 18 is a diagram showing a tenth embodiment of the present invention.

FIG. 19 is a diagram of a free-form surface prism used in the tenth embodiment of the present invention as viewed from above.

FIG. 20 is a diagram of a free-form surface prism used in the tenth embodiment of the present invention, as viewed from the object side.

FIG. 21 is a diagram showing an eleventh embodiment of the present invention.

FIG. 22 is a diagram showing a conventional example of a digital camera.

FIG. 23 is a diagram showing a twelfth embodiment of the present invention.

FIG. 24 is a diagram showing a thirteenth embodiment of the present invention.

FIG. 25 is a sectional view of a finder section according to a thirteenth embodiment of the present invention.

FIG. 26 is a diagram showing a fourteenth embodiment of the present invention.

FIG. 27 is a diagram illustrating an optical element used in a fourteenth embodiment of the present invention.

FIG. 28 is a diagram illustrating a state of liquid crystal molecules when a voltage is applied.

FIG. 29 is a diagram showing a modification of the optical element.

FIG. 30 is a diagram showing a fifteenth embodiment of the present invention.

FIG. 31 is a diagram showing a variable focus Fresnel mirror used in a fifteenth embodiment of the present invention.

FIG. 32 is a diagram illustrating an application example of the variable focus DOE.

FIG. 33 is a diagram illustrating a conventional example of an imaging device.

FIG. 34 is a diagram showing a conventional example of a light source optical system for a light guide.

FIG. 35 is a diagram showing a relationship between an incident angle and incident light intensity in a conventional example.

FIG. 36 is a diagram illustrating a first example of a light source optical system.

FIG. 37 is a diagram illustrating a relationship between an incident angle and incident light intensity in the first example.

FIG. 38 is a view showing a modification of the DCC lens.

FIG. 39 is a diagram for describing a design example of a DCC lens.

FIG. 40 is a diagram showing the effect of the DCC lens.

FIG. 41 is a diagram illustrating a second example of the light source optical system.

FIG. 42 is a view showing a conventional example of a distal end portion of a light guide.

FIG. 43 is a diagram showing an example in which a spherical lens array is provided at the tip of a light guide.

FIG. 44 is a diagram showing a state in which spherical lenses are densely arranged.

FIG. 45 is a diagram illustrating a first example of a method of aligning micro lenses on a substrate.

FIG. 46 is a diagram illustrating a second example of the method of aligning the microlenses on the substrate.

FIG. 47 is a diagram showing an example in which a spherical lens array has two layers.

FIG. 48 is a diagram comparing light distribution characteristics of various light source devices.

FIG. 49 is a diagram illustrating an application example of a spherical lens array.

FIG. 50 is a diagram showing another application example of the spherical lens array.

FIG. 51 is a diagram illustrating a method of fixing aligned microparticles on a substrate.

FIG. 52 is a view showing another method of fixing the aligned microparticles on the substrate.

FIG. 53 is a view showing still another method for fixing aligned microparticles on a substrate.

FIG. 54 is a view showing another modification of the optical element used in the third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Solid-state imaging device 2 Lens system 3, 18, 198 Transparent substrate 4, 6 Free-form surface 5 Diffractive optical element (DOE) 7, 14 Plate-shaped imaging unit 7 'light 8 TFT liquid crystal display 9, 203 IC 10 Microprocessor 11 Finder 12 , 100 concave lens 13 convex lens 15 optical element 16 polymer dispersed liquid crystal 17 variable focal point DOE 19 transmission electrode 20 liquid crystal molecule 21 curved surface 22 variable focal point Fresnel mirror 23 reflecting surface 24, 58 switch 25 variable resistance 26 Fresnel surface 31, 104 light guide 32 non Spherical lens 33 Lamp 34 DCC lens 34 'Side surface 35 Condensing lens a, b Light beam 36, 37, 38 Member 36' Incident surface 38 'Convex curve 52 Variable focus mirror 53 Thin film 54, 193, 193a, 193b, 219b, 22
1, 222, 256 electrodes 55 Solid-state imaging device, CCD 56, 102, 240 Substrate 57, 196 Power supply 59 Variable resistor 60 Light from object 101 Spherical lens 103 Spherical lens array 105 Liquid 109 Backlight 110 Liquid crystal display device 111 Imaging device 112 base material 113 adhesive 170, 232, 234 digital camera 171, 181, 182, 183, 200, 200b,
208, 210, 211, 212, 218 Lens 173, 197 Aperture 174 Shutter 175 Lens focusing solenoid 180 Electronic imaging unit 184 Prism 185, 190, 218B, 225 Mirror 186, 243, 244, 245 Plate unit 187 Silicon substrate 188 Micro Shutter 189, 230 Free-form surface prism 191 Fixed electrode 192 Shielding plate 199 Reflective LCD 201 Low-pass filter 202 Transparent plate-like unit 204, 207, 217, 228, 246, 253
Imaging device 205 Curved resin thin film 209 Display 214 Shaded portion 216 Footed lens 216B Footed mirror 219, 247, 248 Foot 220 Electrostatic lens 223 Damper 226 Movable mirror 227 Self-propelled lens 231 Imaging unit 233 Interference film 241 Low quality Substrate made of silicon etc. 242 Substrate made of high quality silicon 249 Liquid crystal shutter 252 Liquid crystal variable mirror 254 Transparent electrode 255 Fresnel lens-shaped substrate 257 Twisted nematic liquid crystal

Claims (3)

[Claims] 1. An optical device comprising at least one of an optical element, a shutter, an aperture, and a display element and an image pickup element disposed on a single substrate. 2. An optical device in which two or more of an optical element, a shutter, an aperture, a display element, an image pickup element and the like are provided on one substrate. 3. An optical device comprising at least one of an imaging element, an optical element, a shutter, and an aperture, and a display element disposed on one substrate.