JPH1131480A - Discharging body for dielectric barrier discharge lamp, dielectric barrier discharge lamp, dielectric barrier discharge lamp device and ultraviolet irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently guide emission in a required direction, form in various shapes, easily manufacture in a rigid structure and facilitate handling. SOLUTION: A dielectric barrier discharge lamp has plural counter electrodes 1b on the surface of aninsulating base 1a and stored in a discharge chamber, in which excimer generated gas is guided by using a discharging body 1 covered with a dielectric film 1c and an emission guide window provided in the discharge chamber in opposition to the counter electrodes for the discharging body. Excimer emission is provided uniformly from the whole area, where the counter electrodes for the discharging body are formed, and guided from the emission guide window to the outside at it is. The excimer generated gas can be of a supply type or a sealed type. A dielectric barrier discharge lamp device is composed of the dielectric barrier discharge lamp and a high frequency generating means. For an ultraviolet irradiation device, the dielectric barrier discharge lamp of an excimer generated gas supply type is used to apply ultraviolet ray while guiding inert gas into an ultraviolet radiation chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a discharge member for a dielectric barrier discharge lamp, a dielectric barrier discharge lamp using the same, a dielectric barrier discharge lamp device, and an ultraviolet irradiation device.

[0002]

2. Description of the Related Art An excimer discharge lamp in which a rare gas such as xenon or a mixed gas such as a rare gas such as xenon or krypton and chlorine is subjected to electrodeless discharge to generate radiation close to a specific monochromatic color is described in, for example, the following document. Has been known for some time.

(1) B. Gellert and U. Kogelschatz "Gene
ration of Excimer Emission inDielectric Barrier Di
scharges "Applied Physics B 52, 14-21 (2) Japanese Unexamined Patent Application Publication No. 7-272693 (3) Japanese Unexamined Patent Application Publication No. 7-220687 FIG. 8 is a sectional view of a dielectric barrier discharge lamp showing the prior art (3). is there.

In the figure, reference numeral 81 denotes a coaxial cylindrical discharge vessel,
82 is a conductive mesh electrode, 83 is a conductive thin film electrode, 84 is a base, and 85 is a power supply.

[0005] The coaxial cylindrical discharge vessel 81 includes an inner tube 81a.
The outer tube 81b is spaced from the outer tube 81b so that both ends are closed by an annular end plate and a circular end plate. And the outer tube 81
b also serves as a radiation extraction window.

The conductive mesh electrode 82 is provided with a coaxial discharge vessel 81.
Is mounted on the outer tube 81b.

The conductive thin-film electrode 83 is connected to the coaxial discharge vessel 8.
It is made of an aluminum thin film formed on one inner tube 81a, and also serves as a reflector.

The base 84 is used to support a dielectric barrier discharge lamp.

The power supply 85 applies a voltage between the conductive mesh electrode 82 and the conductive thin film electrode 83 to supply electric energy required for dielectric barrier discharge.

[0010] Thus, the radiation generated by the dielectric barrier discharge is guided in a required direction from between the meshes of the conductive mesh electrode 82. Radiation in a direction different from the required direction is reflected by a conductive thin film electrode 83 also serving as a reflector and a reflector (not shown) surrounding the coaxial discharge vessel 81 and guided to the required direction.

Further, in order to obtain a required radiation amount, a plurality of the dielectric barrier discharge lamps are used in parallel.

[0012]

However, in the above-mentioned conventional dielectric barrier discharge lamp of this kind, the wavelength of radiation is considerably short, so that the reflection efficiency by the reflector is low, and the efficiency of the whole apparatus is deteriorated. There's a problem.

In addition, since the coaxial discharge vessel is used, the diameter of the tube located inside the vessel becomes excessively large, which hinders the miniaturization of the dielectric barrier discharge lamp. There is also the problem of bulkiness.

The present invention is easy to manufacture, robust, and easy to handle.
It is an object of the present invention to provide a dielectric barrier discharge lamp discharger capable of obtaining any desired shape such as a rod, a dielectric barrier discharge lamp using the discharger, a dielectric barrier discharge lamp device, and an ultraviolet irradiation device. .

[0015]

According to a first aspect of the present invention, there is provided a discharger for a dielectric barrier discharge lamp, comprising: an insulating substrate; a plurality of opposed electrodes formed on a surface of the insulating substrate; And a dielectric film adhered to the insulating substrate, and configured to operate in an excimer-producing gas atmosphere.

In the present invention and each of the following inventions, definitions and technical meanings of terms are as follows unless otherwise specified.

The term “discharger” means that a voltage is applied between opposed electrodes in an excimer generated gas atmosphere,
It means a main part of a dielectric barrier discharge lamp configured to generate a dielectric barrier discharge, and is composed of an insulating base, a counter electrode, and a dielectric film.

Regarding the Insulating Substrate The term "insulating substrate" refers to a material which is insulative and has heat resistance to withstand the heat generated at the time of dielectric barrier discharge, and which is unlikely to release an impurity gas during operation. A member that supports a counter electrode formed using soft or hard glass, ceramics, or a single crystal thereof.

The shape and dimensions of the insulating substrate are not limited. That is, the insulating substrate may have any desired shape such as a plate shape, a column shape, a tubular shape, a rod shape, and the size thereof is also free. As the plate shape, a flat shape, a curved shape, for example, an arc shape, a corrugated plate shape, and the like are allowed. Further, the surface area of the insulating substrate can be arbitrarily set according to a required value of the radiation amount.

Regarding the Counter Electrode The term "counter electrode" refers to an electrode in which a pair of electrodes are disposed on the same surface so as to face each other, and a power supply voltage is applied between them. Then, a plurality of sets of the counter electrode are formed on the insulating substrate.

A preferred configuration for forming a plurality of opposing electrodes on the surface of the insulating substrate is to form the electrodes in a comb-tooth shape (hereinafter referred to as a comb-tooth-shaped electrode). The electrode can be easily manufactured using a printed wiring technique.

When a comb-shaped electrode is employed, each comb-shaped portion of the pair of comb-shaped electrodes, that is, an electrode piece acts as one of the opposing electrodes, but the opposite poles are brought closer to each other to a required degree. In this case, a pair of comb blade electrodes are inserted into each other. By arranging in this manner, a plurality of counter electrodes can be effectively disposed without waste.

Depending on the shape of the insulating substrate, the counter electrode may preferably have a structure other than the comb-shaped electrode. For example, when the insulating substrate has a columnar shape or a cylindrical shape, the counter electrode can be easily formed by forming a pair of parallel electrode wires in a spiral.

When the counter electrode is formed by a printed wiring technique, a conductive and durable substance such as tungsten, molybdenum, and carbon can be used. Then, for example, a screen printing method can be adopted.

In screen printing, a conductive paste is screen-printed in a desired pattern, and after drying the paste,
By baking, a counter electrode can be formed on the surface of the insulating substrate.

However, the counter electrode can be formed without using a printing technique. For example, a counter electrode can be formed by bonding a metal wire to the surface of an insulating substrate using a vitreous adhesive. Further, the counter electrode may be formed by plating.

The distance between the opposing electrodes is, for example, 1 mm or less, preferably 0.1-0.
It is desirable to set it to about 5 mm.

The width of each electrode is preferably small in order to arrange as many opposing electrodes as possible in a predetermined area, but it is necessary to prevent the required power from being transmitted. 1 mm or less, preferably 0.2 to 0.5
mm.

Regarding the Dielectric Film The dielectric film is applied to the surface of the insulating substrate so as to fill the space between the opposing electrodes of the insulating substrate and to cover the opposing electrode.
The dielectric film intervenes between the counter electrodes and acts as a dielectric during dielectric barrier discharge.

As the material of the dielectric film, a material having excellent insulation and durability such as silica and alumina can be used.

The thickness of the dielectric film is preferably 1 mm or less.

Operation A required voltage is applied to the discharger of the present invention between the opposed electrodes in an excimer generated gas atmosphere. Since a capacitance is formed between the opposing electrodes with the dielectric film interposed therebetween, the capacitance is formed on the dielectric film at the moment when a voltage is applied from the outside of the discharge chamber to the opposing electrodes of the discharge body housed in the discharge chamber. Electrons are generated from the negative electrode and move toward the positive electrode. That is, creeping discharge occurs, and this capacitance is charged. When the capacitance is charged, the creeping discharge stops. Therefore, the creeping discharge is instantaneous.

Next, when the polarity of the applied voltage is reversed, the movement of electrons in the opposite direction, that is, creeping discharge occurs.

The electrons of the creeping discharge excite the excimer generated gas to form excimer molecules. When the excimer molecule dissociates, it emits radiation of a unique wavelength. This is excimer light emission.

Excimer light emission uniformly emits light over the entire area of the discharge plate where the counter electrode is provided.

Therefore, the excimer light emission can be used for a desired process by leading the light to the outside.

As described above, in the present invention, since the discharger is formed by forming a counter electrode on the surface of the insulating substrate and covered with the dielectric film, the discharger is housed in the discharge chamber and voltage is applied. Then, excimer light emission can be obtained by generating a dielectric barrier discharge.

Therefore, the discharge body is easy to manufacture, robust and easy to handle.

Also, since the insulating substrate may be in various shapes, any desired shape may be adopted according to the desired shape of the dielectric barrier discharge lamp, and the desired amount of excimer light emission may be employed. And an appropriate area can be obtained.

Furthermore, if a radiation lead-out window is provided in the discharge chamber containing the discharge body so as to face the discharge body, the excimer light emission can be directly led out, so that the reflector is not essential.
For this reason, even if the excimer light emission is ultraviolet light having a short wavelength, for example, 172 nm of the characteristic spectrum of xenon, it is possible to prevent the light from being absorbed by the reflector, so that the efficiency can be kept high. However, depending on the shape of the insulating substrate and the direction in which excimer light is emitted, it may be convenient to use a reflector. Therefore, the use of the reflector is not excluded in practicing the present invention.

When the insulating base is formed in a plate shape, the discharge body itself can be made thinner.
Along with this, the discharge chamber can be formed thin,
The device can be made compact.

According to a second aspect of the present invention, there is provided a discharger for a dielectric barrier discharge lamp according to the first aspect, wherein the plurality of opposing electrodes are provided with a large number of electrode pieces staggered alternately. And a pair of comb-shaped electrodes.

The comb-shaped electrode can be formed relatively easily by the printed wiring technique. However, the present invention is not limited to this. As described above, metal strips can be attached,
It can also be formed by plating.

The present invention is effective when the counter electrode is provided as much as possible in a large area of the discharge body.

In the comb-shaped electrode, adjacent electrodes become opposite electrodes, respectively. Therefore, for example, one electrode piece which becomes a negative electrode when the polarity of a power supply voltage is at a certain moment is two adjacent two electrodes on both sides. Since the electrode piece becomes a positive electrode, these three
Two sets of opposing electrodes are formed by the individual electrode pieces.

According to a third aspect of the present invention, there is provided a discharger for a dielectric barrier discharge lamp according to the first or second aspect, wherein the counter electrode is formed by printing. .

By forming the counter electrode by printing, even if the interval between the electrodes and / or the width of the electrode is small, the interval and / or the width can be accurately aligned.

A counter electrode of a so-called thick film can be formed by a printing technique.

According to a fourth aspect of the present invention, there is provided the discharger for a dielectric barrier discharge lamp according to any one of the first to third aspects, wherein the insulating base is:
At least the surface on the counter electrode side is UV-reflective.

In order to make the surface of the insulating substrate on the counter electrode side ultraviolet-reflective, for example, the insulating substrate may be formed of ceramics containing zirconia or alumina as a main component, or the surface of the counter electrode side may be made of alumina or zirconia. The white powder may be applied using a suitable binder.

Since the excimer emission ultraviolet light is well reflected on the surface of the insulating substrate, even if the dielectric film is a silica film which transmits ultraviolet light well, the amount of ultraviolet light that can be used can be utilized. Can be increased.

According to a fifth aspect of the present invention, there is provided a discharger for a dielectric barrier discharge lamp according to any one of the first to third aspects, wherein the dielectric film is UV-reflective. It is characterized by:

In order to form an ultraviolet reflective dielectric film,
For example, after a counter electrode is disposed on an insulating substrate in advance, a dielectric film in which an ultraviolet-reflecting and insulating white powder such as alumina or zirconia is dispersed in a binder such as silica is used as the counter electrode. May be formed over the entire surface of the insulator.

The ultraviolet light of excimer emission generated on the surface of the dielectric film is well reflected by the dielectric film, so that the amount of available ultraviolet light can be increased.

According to a sixth aspect of the present invention, there is provided a discharge for a dielectric barrier discharge lamp according to any one of the first to fifth aspects, wherein the counter electrode has a surface with a depth of 1 μm or less. It is characterized in that irregularities of 1 mm are formed.

In order to form the above-mentioned irregularities on the surface of the counter electrode, the irregularities are formed on the counter electrode itself, or the irregularities are formed on at least the surface of the insulating substrate where the counter electrode is to be formed. The electrodes may be formed to have a substantially uniform thickness.

If the surface of the opposing electrode has irregularities, the electric field is concentrated near the convex portion to facilitate discharge, and the discharge energy can be easily applied, so that the excimer light emission amount can be increased. Therefore, the ultraviolet radiation efficiency is improved, and the discharge starting voltage is reduced.

If the depth of the surface of the counter electrode is less than 1 μm, the effect of enhancing the electric field strength due to the surface unevenness is not sufficient. Further, if it exceeds 1 mm, it is difficult to form a practically uneven surface.

In practicing the present invention, it is more effective to form an ultraviolet-reflective dielectric film or to make the surface side of the insulating substrate ultraviolet-reflective. In general, the uneven surface generally has a light emissivity close to 1 and absorbs light, so that the ultraviolet radiation efficiency tends to decrease.
This is because the improvement in the ultraviolet reflectance compensates for this.

According to a seventh aspect of the present invention, there is provided a dielectric barrier discharge lamp according to any one of the first to fifth aspects, wherein the counter electrode is ultraviolet-reflective. I have.

In the present invention, the amount of ultraviolet light which can be used by making the counter electrode ultraviolet reflective is increased.

In order to make the opposing electrode UV-reflective, for example, spherical metal fine particles may be used as the electrode material.
When the metal particles are spherical, the ultraviolet reflectance increases.
Further, the counter electrode may be formed by plating.

An eighth aspect of the present invention provides a dielectric barrier discharge lamp according to any one of the first to seventh aspects, further comprising: a discharge body for a dielectric barrier discharge lamp according to any one of the first to seventh aspects; It is characterized by comprising: a discharge chamber provided with an opposed radiation outlet window; and an excimer product gas introduced into the discharge chamber.

In the present invention, the radiation extraction window does not need to face all parts of the counter electrode of the discharger for the dielectric barrier discharge lamp. What is necessary is just to face at least one part. Therefore, when the insulating base is, for example, columnar or cylindrical, even if a counter electrode is provided around the insulating base, the insulating base is insulated like a dielectric barrier discharge lamp having a conventional coaxial airtight container. About half of the substrate may be embedded in a cooling block or the like. This is because even in this case, ultraviolet rays can be extracted from the radiation extraction window.

About the discharge chamber The discharge chamber has a discharge body disposed therein and contains an excimer generated gas.
A radiation window is provided for guiding the excimer light generated by the excimer discharge to the outside.

To dispose the discharge body inside the discharge chamber means that the discharge body faces the discharge chamber and the dielectric barrier discharge only needs to be generated in the discharge chamber. Therefore,
It is permissible that the discharge body also serves as a part of the discharge chamber. For example, the bottom plate portion of the discharge chamber can be used also as the insulating base of the discharge body, and such a configuration is also said to have the discharge body disposed inside the discharge chamber.

The discharge chamber is roughly classified into two types. One is an excimer product gas supply type, and the other is an excimer product gas shut-off type. The present invention is applicable to both systems.

The excimer product gas supply system will be described.

The discharge chamber of this type has a configuration in which an excimer generated gas is supplied from outside the discharge chamber. for that reason,
The discharge chamber has an excimer generated gas introduction section and an excimer generated gas discharge section.

The excimer generated gas sealing type will be described.

In the discharge chamber of this type, a required amount of excimer generating gas is initially sealed at a required pressure. Therefore, although the structure is simple, hermeticity is required.

In any of the above methods, when the excimer product gas contains halogen, the inner surface of the excimer gas is made of fluororesin, silica, or the like so that the discharge chamber is not damaged by the halogen.
It is preferable to coat with an unreactive substance such as alumina.

As the excimer generation gas, a rare gas alone such as xenon, krypton or argon, or a mixed gas of a rare gas and a halogen such as fluorine, chlorine, bromine or iodine can be used.

In the present invention, the discharger for a dielectric barrier discharge lamp according to any one of claims 1 to 7 is housed in a discharge chamber into which an excimer generated gas has been introduced, so that the structure is simple. , An excimer generation gas supply system and an excimer generation gas sealing system. For this reason, a dielectric barrier discharge lamp meeting various needs can be provided.

The dielectric barrier discharge lamp according to the ninth aspect of the present invention is the dielectric barrier discharge lamp according to the eighth aspect,
The discharge chamber is characterized by having an excimer generated gas introduction section and an excimer generated gas discharge section.

The present invention is a dielectric barrier discharge lamp of an excimer generated gas supply type.

The excimer generated gas is introduced from the excimer generated gas supply tank into the excimer generated gas introduction section of the discharge chamber, and the surplus or used excimer generated gas is recovered in the recovery tank, or the excimer generated gas is simply a rare gas. If so, it can be released into the atmosphere.

However, the excimer product gas can be configured in a circulating system that is shielded from the atmosphere, and after removing the impure gas from the used excimer product gas, the gas can be recirculated and reused.

When the excimer product gas is constituted by a reflux system,
Since the lighting can be continued while removing the mixed impurity gas, the lighting can be performed for a long time.

In the present invention, since the excimer product gas can be discharged at atmospheric pressure or a pressure close thereto, the discharge chamber does not need to have a high degree of airtightness. This means that the discharge chamber can be manufactured in any desired shape and the structure can be simplified.

Therefore, it is possible to form a discharge chamber having a convenient shape and size from the standpoint of utilizing excimer light emission.

According to a tenth aspect of the present invention, there is provided the dielectric barrier discharge lamp according to the eighth aspect, wherein the discharge chamber is formed airtight; and the excimer product gas is sealed in the discharge chamber. Is characterized by:

The present invention is a dielectric barrier discharge lamp of the excimer product gas sealed type.

Since the discharge chamber is hermetically sealed and the excimer generated gas is sealed in the discharge chamber, the structure of the discharge chamber is simplified.
However, it is necessary to pay attention to airtightness.

According to an eleventh aspect of the present invention, there is provided the dielectric barrier discharge lamp according to any one of the eighth to tenth aspects, wherein the excimer generated gas in the discharge chamber has a pressure of 101 to 130 KPa. It is characterized by.

The pressure of the excimer product gas is 101 to 13
0 kPa is appropriate. When the pressure of the excimer product gas is increased as described above, it is not necessary to control the hermeticity of the discharge chamber so severely.

Further, it becomes difficult for an external impurity gas to be mixed into the excimer generated gas. Especially when the pressure is higher than the atmospheric pressure,
There is no impurity gas such as H ₂ , and therefore, there is no possibility that the impurity gas is mixed during lighting and lighting becomes difficult.

According to a twelfth aspect of the present invention, there is provided a dielectric barrier discharge lamp device, wherein a high frequency voltage is applied between the dielectric barrier discharge lamp according to any one of the eighth to eleventh aspects and a counter electrode of the dielectric barrier discharge lamp. And a high-frequency generating means.

The high frequency generating means has a frequency of 1 KHz to 2 KHz.
It is preferable to apply a high frequency voltage of 00 KHz and an applied voltage of 300 to 800 V to the dielectric barrier discharge lamp.

The ultraviolet irradiation apparatus according to the invention of claim 13 includes the dielectric barrier discharge lamp according to any one of claims 8 to 11, and an ultraviolet irradiation chamber provided outside the radiation outlet window of the dielectric barrier discharge lamp. It is characterized by having.

The dielectric barrier discharge lamp according to any one of claims 8 to 11 is provided with a radiation exit window facing the discharge plate, so that the radiation can be effectively emitted without using a reflector if necessary. And highly efficient ultraviolet irradiation can be performed.

Further, by providing the excimer generation gas introduction section in the discharge chamber and providing the excimer generation gas supply means, the excimer generation gas in the discharge chamber can be discharged at a pressure close to the atmospheric pressure or a pressure close to the atmospheric pressure before and after the discharge. And it is not necessary to make the discharge chamber airtight. Therefore, the discharge chamber can be formed in a thin shape which is desirable for ultraviolet irradiation.

Further, short-wavelength ultraviolet light generated by the dielectric barrier discharge lamp is easily absorbed by oxygen, moisture, and the like. However, by providing an inert gas supply means for circulating an inert gas in the ultraviolet light irradiation chamber, it becomes inactive. The ultraviolet irradiation treatment can be performed in an active gas atmosphere, and the ultraviolet light is not undesirably attenuated due to mixing of oxygen, moisture, and the like.

As the inert gas, for example, xenon,
Krypton, argon, nitrogen, and the like can be used.

The ultraviolet irradiation device of the present invention can be applied to a semiconductor stepper, a light cleaning device, a photocrosslinking resin curing device, a photocurable ink drying device, and the like.

[0096]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a partially cutaway cross-sectional view showing a first embodiment of a discharge member for a dielectric barrier discharge lamp and a dielectric barrier discharge lamp according to the present invention.

FIG. 2 is a plan view of the discharge body.

FIG. 3 is an enlarged conceptual sectional view of a principal part of the discharge body.

In the figure, 1 is a discharge body, 2 is a discharge chamber, 3
Is the power supply.

The discharge body 1 comprises a plate-like insulating substrate 1a, a counter electrode 1b and a dielectric film 1c.

The insulating substrate 1a is made of flat quartz glass.

The counter electrode 1b is composed of a pair of comb-shaped electrodes, and has a large number of electrode pieces 1b1 and a common conductor 1b2 connected to one end of each electrode piece 1b1. The common conductor 1b2 is connected to the power supply 3.

The counter electrode 1b is a printed wiring formed by screen-printing a conductive paste containing tungsten as a main component on the surface of the insulating substrate 1a, drying and firing.

Further, the width of the counter electrode 1b is 0.5 mm,
The distance between adjacent counter electrodes is 0.5 mm.

The dielectric film 1c is made of a silica film having a thickness of 0.6 mm.

The discharge chamber 2 includes a discharge chamber main body 2a, a radiation outlet window 2b, an excimer generated gas introduction section 2c, an excimer generated gas discharge section 2d, and a discharge member support 2e.

The discharge chamber main body 2a has a box shape.

The radiation outlet window 2b is provided in the discharge chamber 2 on the side of the discharge body 1 where the counter electrode 1b is formed, that is, on the portion facing the light emitting side. And the radiation extraction window 2b
Is made of quartz glass.

The excimer generated gas introduction part 2c is opened at a position above the discharge body 1 on one side wall of the discharge chamber main body 2a.

The excimer product gas discharge section 2d is opened at a position below the discharge body 1 on the other side wall of the discharge chamber main body 2a.

Then, the excimer generated gas introduction section 2c
Receives the supply of excimer generation gas from an excimer generation gas tank (not shown) and maintains the pressure in the discharge chamber 2 at a value substantially equal to the atmospheric pressure. The excimer product gas discharged from the excimer product gas discharge part 2d is configured so that the impurity gas is removed and returned to the excimer product gas tank.

The discharge member supporting portion 2e holds the discharge member 1 in the discharge chamber 2
In a suitable position within

The power supply 3 applies a voltage of 50 KHz and 6000 V to the counter electrode 2b.

Next, the discharge mechanism will be described with reference to FIG.

In the figure, assuming that the counter electrode 1b has the polarity shown in the figure, the negative electrode acts as a negative electrode,
The adjacent + polarity electrode acts as a positive electrode. Due to the application of the voltage, a creeping discharge is instantaneously generated, electrons are emitted from the negative electrode and move to the positive electrode side. At this time, the capacitance between the opposing electrodes is in a charged state, and the creeping discharge stops with the completion of the charging.

When the polarity of the applied voltage is reversed, the opposite electrode 1
The polarity of b is also inverted, and a creeping discharge in the opposite direction occurs to discharge the charged charges. Further, the charging in the reverse direction is performed and the creeping discharge stops.

As described above, when electrons are generated by creeping discharge, the electrons collide with an excimer generated gas such as xenon. This collision excites xenon to form an exciter of Xe ₂ molecules. Then, when the exciter of the Xe ₂ molecule is dissociated, light is emitted to generate ultraviolet light of 172 nm.

FIG. 4 is a cross-sectional view showing a second embodiment of the dielectric barrier discharge lamp discharge body and the dielectric barrier discharge lamp according to the present invention.

In the figure, the same parts as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.

The present embodiment is different from the first embodiment in that the excimer generated gas is sealed off.

The discharge chamber 2 'is composed of an airtight container made of alumina ceramics.

The discharge body 1 'is formed using a part of the discharge chamber 2', for example, the bottom surface. That is, the discharge body 1 '
The insulating base 1a also serves as the bottom plate of the discharge chamber 2.

The radiation outgoing window 1c is made of quartz glass.
It is arranged on the upper surface of the discharge chamber 2.

Although not shown, the opposing electrode is formed of a conductive paste containing molybdenum as a main component with a width of 0.2 mm and an interval of 0.2 mm by a screen printing method. The dielectric film 1c is formed of alumina.

As the excimer producing gas, a mixed gas of krypton and chlorine is sealed.

[0127] Then, between the opposing electrodes, 30 kHz, 20
When a high-frequency voltage of 00 V was applied, it was possible to obtain 222 nm monochromatic radiation.

FIG. 5 is a side view showing an insulating substrate in a third embodiment of the dielectric barrier discharge lamp discharger of the present invention.

The present embodiment is different in that the surface of the insulating substrate 1a is formed in a waveform. That is, since the surface of the insulating substrate 1a is corrugated, the surface area is larger than that of a flat plate.

Therefore, it is possible to increase the light emission amount by increasing the number of the counter electrodes.

FIG. 6 is a side view showing an insulating substrate in a fourth embodiment of the dielectric barrier discharge lamp discharger according to the present invention.

The present embodiment is different in that the surface of the insulating substrate 1a is formed in an arc shape.

That is, since the surface of the insulating substrate 1a is arc-shaped, the surface area is larger than that of a flat plate, so that the amount of light emission can be increased.

Further, the discharge body of the present embodiment is formed of an insulating substrate 1
Near the center P of the arc a, a certain concentration of light emission can be obtained.

FIG. 7 is a partially cutaway perspective view showing a first embodiment of the ultraviolet irradiation apparatus of the present invention.

In the figure, 4 is a dielectric barrier discharge lamp, 5 is an ultraviolet irradiation chamber, and 6 is a belt conveyor.

The dielectric barrier discharge lamp 4 has the same structure as that shown in FIG. Therefore, the same parts as those in FIG.

A power cable 4a is connected to a high-frequency generating means (not shown), and is connected to a counter electrode in the dielectric barrier discharge lamp 4. 4b is an insulating bush.

The ultraviolet irradiation chamber 5 is provided with a dielectric barrier discharge lamp 4 on its top surface with its radiation outlet window facing downward. Further, a lower part of the ultraviolet irradiation chamber 5 is provided with an insertion part 5a that enables the belt conveyor 6 to move, and has an inert gas introduction part 5b. An inert gas seal portion 5a1 is attached to the insertion portion 5a.

The belt conveyor 6 is provided so that the object 7 to be illuminated is passed through the ultraviolet irradiation chamber 5.

Then, the ultraviolet light emitted from the dielectric barrier discharge lamp 4 passes through the radiation outlet window and passes through the ultraviolet irradiation chamber 5.
Will be introduced. Since the inside of the ultraviolet irradiation chamber 5 is filled with the inert gas introduced from the inert gas introduction part 5b, it is possible to prevent O ₂ , H ₂ and H ₂ O from entering the ultraviolet irradiation chamber 5 and Reduce the attenuation of short wavelength ultraviolet light. That is, it is possible to prevent ultraviolet light having a short wavelength such as 1720 nm from being attenuated by O ₂ , H _2, or H ₂ O ₂ before reaching the irradiation object 7.

The seal portion 5a1 prevents the inert gas from leaking from the ultraviolet irradiation chamber 5 to the outside.

FIG. 9 is a perspective view showing a fifth embodiment of the dielectric barrier discharge lamp discharger according to the present invention.

In the figure, the same parts as those in FIG.

The present embodiment is different in that the insulating base 1a has a columnar shape.

The counter electrode 1b extends in the circumferential direction of the insulating base 1a and is separated in the axial direction.

The illustration of the dielectric film is omitted.

FIG. 10 is a perspective view showing a sixth embodiment of the discharger for a dielectric barrier discharge lamp according to the present invention.

In the figure, the same parts as those in FIG.

The present embodiment is different in that the counter electrode 1b is composed of two spiral electrodes 1b3 and 1b4 which are separated from each other.

FIG. 11 is a perspective view showing a seventh embodiment of the dielectric barrier discharge lamp discharger of the present invention.

In the figure, the same parts as those in FIG.

In this embodiment, the opposing electrodes 1b extend in the axial direction of the insulating substrate 1a and are spaced apart in the circumferential direction.

FIG. 12 is a perspective view showing an eighth embodiment of the discharger for a dielectric barrier discharge lamp according to the present invention.

In the figure, the same parts as those in FIG.

This embodiment is different from the first embodiment in that the insulating substrate 1a has a cylindrical shape.

FIG. 13 is an enlarged sectional view of a main part of a ninth embodiment of the dielectric barrier discharge lamp discharger according to the present invention.

In the figure, the same parts as those in FIG.

The present embodiment is different from the first embodiment in that an ultraviolet reflective film 1d is provided on the surface of the insulating substrate 1a, and the surface of the counter electrode is formed uneven.

The insulating substrate 1a is made of quartz glass,
The ultraviolet reflection film 1d on the surface is formed by laminating white powder composed of alumina fine particles using silica as a binder.

The dielectric film 1c is made of a silica film, and this film is transparent to ultraviolet rays.

Thus, the ultraviolet rays generated by the dielectric barrier discharge are reflected well by the ultraviolet reflection film 1d, so that the amount of usable ultraviolet rays increases.

The surface of the counter electrode 1b has a depth of about 10 μm.
Because of the irregularities of m, the electric field is concentrated on the irregularities and it is easy to discharge, and the power can be supplied efficiently. As a result, the ultraviolet radiation efficiency is remarkably improved and the amount of usable ultraviolet light is increased. it can.

FIG. 14 is an enlarged sectional view of a main part of a discharge member for a dielectric barrier discharge lamp according to a tenth embodiment of the present invention.

In the figure, the same parts as those in FIG.

The present embodiment is different in that the dielectric film 1c 'is UV-reflective.

The dielectric film 1c 'is formed by forming a white powder made of zirconia fine particles on the insulating substrate 1a and the counter electrode 1b using silica as a binder.

The insulating substrate 1a is made of alumina ceramics.

Thus, the ultraviolet light generated near the surface of the dielectric film 1c 'is reflected by the dielectric film, so that the amount of usable ultraviolet light increases.

FIG. 15 is an enlarged sectional view of a principal part showing an eleventh embodiment of the dielectric barrier discharge lamp discharger of the present invention.

In the figure, the same parts as those in FIG. 13 are denoted by the same reference numerals, and description thereof will be omitted.

The present embodiment is different in that the surface of the counter electrode 1b 'is formed so as to reflect ultraviolet rays.

The opposing electrode 1b 'is formed of spherical metal particles. Spherical metal particles have good ultraviolet reflectivity.

The dielectric film 1c is made of silica, and is transparent to ultraviolet rays.

The ultraviolet light incident on the counter electrode is
Because it is reflected, the amount of available UV light increases.

FIG. 16 is an enlarged sectional view of a main part of a twelfth embodiment of the discharger for a dielectric barrier discharge lamp according to the present invention.

In the figure, the same parts as those in FIG.

In the present embodiment, the unevenness 1a1 is formed on the surface of the insulating substrate 1a, the surface of the counter electrode 1b 'is formed with the unevenness having a depth of about 1 mm, and the dielectric film 1c' is formed. It differs in that it is ultraviolet reflective.

The insulating substrate 1a is made of alumina ceramics, and is formed by pressing a mold at the time of molding to form a large number of uneven stripes 1a1 on the surface, and after drying, sintering.

Since the counter electrode 1b 'is formed by printing a conductive paint along the irregularities 1a1 on the surface of the insulating substrate 1a, the irregularities 1a1 of the insulating substrate 1a become dull.

Thus, since the surface of the counter electrode 1b 'is formed unevenly, the same effect as that of the ninth embodiment can be obtained.

Further, since the dielectric layer 1c 'is UV-reflective, the same effects as in the tenth embodiment can be obtained.

FIG. 17 shows a second embodiment of the ultraviolet irradiation apparatus according to the present invention.
It is a key map showing an embodiment.

In the figure, reference numeral 11 denotes a discharge member for a dielectric barrier discharge lamp, and reference numeral 12 denotes a work.

The discharge body 11 for a dielectric barrier discharge lamp is
It has a cylindrical shape as shown in FIGS.

The work 12 has a ring shape, and the inner surface of the ring is to be irradiated with ultraviolet rays to be processed.

Then, the discharge member 11 for the dielectric barrier discharge lamp is inserted into the work 12 in a substantially concentric manner as shown in the figure, and is housed in a discharge chamber (not shown) to discharge the discharge for the dielectric barrier discharge lamp. When a high-frequency voltage is applied between the opposing electrodes of the body, ultraviolet rays are radiated around the discharge body 11, so that the inside of the work 12 is favorably irradiated with ultraviolet rays.

[0188]

According to the first to seventh aspects of the present invention, a plurality of counter electrodes are provided on the surface of an insulating substrate, covered with a dielectric film, and operated in an excimer generated gas. As a result, the discharge for a dielectric barrier discharge lamp is easy to manufacture, robust, and easy to handle, and can obtain any desired shape such as a plate, a cylinder, a column, and a bar. Body can be provided.

According to the second aspect of the present invention, in addition, since the plurality of opposing electrodes are formed by a pair of comb-shaped electrodes, it is easy to arrange as many opposing electrodes as possible in a large area of the discharge body. A discharger for a barrier discharge lamp can be provided.

According to the third aspect of the present invention, it is possible to provide a discharge element for a dielectric barrier discharge lamp in which the counter electrode is formed by printing, so that the discharge electrode is formed accurately even if the interval and / or width of the counter electrode is small. Can be.

According to the invention of claim 4, in addition, since at least the surface of the insulating substrate on the side of the counter electrode is UV-reflective, the discharge for the dielectric barrier discharge lamp in which the amount of usable UV-light is increased. Body can be provided.

According to the fifth aspect of the present invention, it is possible to provide a discharger for a dielectric barrier discharge lamp in which the amount of ultraviolet light that can be used is increased because the dielectric film is ultraviolet-reflective. .

According to the sixth aspect of the present invention, in addition, the unevenness having a depth of 1 μm to 1 mm is formed on the surface of the counter electrode, so that the electric field is easily concentrated on the unevenness and the discharge is facilitated. It is possible to provide a discharger for a dielectric barrier discharge lamp in which the amount of ultraviolet rays is increased because the discharger can be easily supplied.

According to the seventh aspect of the present invention, it is possible to provide a discharger for a dielectric barrier discharge lamp in which the amount of ultraviolet light that can be used is increased by making the counter electrode ultraviolet reflective.

According to an eighth aspect of the present invention, the discharge body for a dielectric barrier discharge lamp according to any one of the first to seventh aspects is housed in a discharge chamber provided with a radiation outlet window, and excimer generation occurs in the discharge chamber. By introducing the gas, the effects of claims 1 to 7 can be achieved, and the amount of ultraviolet light that can be efficiently derived and used in the required direction without using a reflector can be increased, and a compact dielectric material can be used. A barrier discharge lamp can be provided.

According to the ninth aspect of the present invention, in addition, the discharge chamber is of an excimer generated gas supply type, so that the discharge chamber can be lit for a long period of time and can have a desired shape. Can be supplied.

According to the tenth aspect of the present invention, a dielectric barrier discharge lamp having a simplified structure of the discharge chamber can be provided by additionally providing the discharge chamber with an excimer generated gas sealing type.

According to the eleventh aspect of the present invention, in addition, by setting the pressure of the excimer generated gas to 101 to 130 KPa, it is possible to provide a dielectric barrier discharge lamp in which the hermeticity of the discharge chamber does not easily become a problem.

According to the twelfth aspect, it is possible to provide a dielectric barrier discharge lamp device having the effects of the eighth to eleventh aspects.

According to the thirteenth aspect, it is possible to provide an ultraviolet irradiation apparatus having the effects of the eighth to eleventh aspects.

[Brief description of the drawings]

FIG. 1 is a partially cutaway sectional view showing a first embodiment of a discharge member for a dielectric barrier discharge lamp and a dielectric barrier discharge lamp of the present invention.

FIG. 2 is a plan view of the same discharge body.

FIG. 3 is an enlarged cross-sectional view of a conceptual main part of the discharger.

FIG. 4 is a cross-sectional view showing a second embodiment of a discharge member for a dielectric barrier discharge lamp and a dielectric barrier discharge lamp according to the present invention.

FIG. 5 shows a third example of the dielectric barrier discharge lamp discharger of the present invention.
Side view showing the insulating substrate in the embodiment of FIG.

FIG. 6 is a side view showing an insulating substrate according to a fourth embodiment of the discharger for a dielectric barrier discharge lamp of the present invention.

FIG. 7 is a partially cutaway perspective view showing a first embodiment of the ultraviolet irradiation apparatus of the present invention.

FIG. 8 is a sectional view of a dielectric barrier discharge lamp showing a conventional technique (3).

FIG. 9 is a perspective view showing a fifth embodiment of the discharger for a dielectric barrier discharge lamp of the present invention.

FIG. 10 is a perspective view showing a sixth embodiment of the discharger for a dielectric barrier discharge lamp of the present invention.

FIG. 11 is a perspective view showing a seventh embodiment of the discharger for a dielectric barrier discharge lamp of the present invention.

FIG. 12 is a perspective view showing an eighth embodiment of the discharger for a dielectric barrier discharge lamp of the present invention.

FIG. 13 is an enlarged sectional view showing a ninth embodiment of the dielectric barrier discharge lamp discharger of the present invention.

FIG. 14 is an enlarged sectional view showing a main part of a discharge member for a dielectric barrier discharge lamp according to a tenth embodiment of the present invention.

FIG. 15 is an enlarged sectional view of an essential part showing an eleventh embodiment of the discharge body for a dielectric barrier discharge lamp of the present invention.

FIG. 16 is an enlarged sectional view of a main part showing a twelfth embodiment of the discharge body for a dielectric barrier discharge lamp of the present invention.

FIG. 17 is a conceptual diagram showing a second embodiment of the ultraviolet irradiation device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Discharge body 1a ... Insulating base 1b ... Counter electrode 1c ... Dielectric film

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shihisa Kawatsuru 4-3-1 Higashishinagawa, Shinagawa-ku, Tokyo Inside Toshiba Litec Corporation

Claims (13)

[Claims] An excimer comprising: an insulating substrate; a plurality of opposing electrodes formed on the surface of the insulating substrate; and a dielectric film covering the opposing electrode and applied to the insulating substrate. A discharger for a dielectric barrier discharge lamp, wherein the discharger is configured to operate in a generated gas atmosphere. 2. The discharge for a dielectric barrier discharge lamp according to claim 1, wherein the plurality of opposed electrodes are formed by a pair of comb-shaped electrodes having a large number of electrode pieces interleaved. body. 3. The discharger for a dielectric barrier discharge lamp according to claim 1, wherein the counter electrode is formed by printing. 4. The discharge body for a dielectric barrier discharge lamp according to claim 1, wherein the insulating base has at least a surface on the side of the counter electrode which reflects ultraviolet light. 5. The discharge body for a dielectric barrier discharge lamp according to claim 1, wherein the dielectric film is UV-reflective. 6. The discharge body for a dielectric barrier discharge lamp according to claim 1, wherein the counter electrode has a surface having irregularities with a depth of 1 μm to 1 mm. 7. The discharge body for a dielectric barrier discharge lamp according to claim 1, wherein the counter electrode is UV-reflective. 8. A discharge for a dielectric barrier discharge lamp according to claim 1, wherein said discharge is housed and said discharge is provided with a radiation outlet window facing a counter electrode of said discharge. A discharge chamber comprising: a discharge chamber; and an excimer product gas introduced into the discharge chamber. 9. The dielectric barrier discharge lamp according to claim 8, wherein the discharge chamber has an excimer generated gas introduction part and an excimer generated gas discharge part. 10. The dielectric barrier discharge lamp according to claim 8, wherein the discharge chamber is formed airtight; and the excimer product gas is sealed in the discharge chamber. 11. The excimer product gas in the discharge chamber has a pressure of 101 to 130 KPs.
11. The dielectric barrier discharge lamp according to any one of claims 10 to 10. 12. A dielectric barrier discharge lamp according to any one of claims 8 to 11, and high frequency generating means for applying a high frequency voltage between opposed electrodes of the dielectric barrier discharge lamp.
A dielectric barrier discharge lamp device comprising: 13. An ultraviolet irradiation apparatus comprising: the dielectric barrier discharge lamp according to claim 12; and an ultraviolet irradiation chamber disposed outside a radiation outlet window of the dielectric barrier discharge lamp. apparatus.