JPH1131315A - Magnetic head with protective film and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the occurrence of spacing loss by removal of a protective film existing in the upper part of a thin-film element by working the floating surface of a floating magnetic head to a flat surface or a recessed surface and forming the protective film on the worked surface, then subjecting the floating surface formed with the protective film for imparting a crown to spherical lapping. SOLUTION: The thin-film element 2 is formed on the flank of a slider body 4 and the floating surface protective film 3 is formed atop this slider body 4. Next, the protective film is subjected to spherical lapping by increasing the lapping quantity nearer both ends of the slider body 4 exclusive of the floating surface protective film 3 in the central part of the slider body until the upper part of the thin-film element 2 is exposed. The protective film 6 remaining after the spherical lapping does not remain on a magnetic pole part 7 and the upper part of a magnetic pole 8 is exposed. As a result, the spacing loss may be eliminated by executing such spherical lapping in such a manner that the front surface of the thin-film element 2 is exposed after the formation of the floating protective film 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic head with a protective film and a method for manufacturing the same.

[0002]

2. Description of the Related Art A conventional method of manufacturing a magnetic head with a protective film will be described in detail with reference to the drawings.

FIGS. 3A to 3D are a process side view and a partially enlarged side view for explaining a conventional example. FIG.
(A) shows the state after throat height polishing, and FIG.
3B shows a state in which a crown is provided by a spherical wrap, and FIG. 3C shows a shape of the air bearing surface protective film 3a in a final finished state and a pattern in which the film is also present above the thin film element 2. FIG. 3 is an enlarged view of the magnetic pole portion 7a.
(D). (See, for example, JP-A-07-006340 and JP-A-04-372703).
Referring to (d), it can be seen that there is a spacing loss 10 due to the retreat of the magnetic pole of the reverse sputtering and a spacing loss 9 due to the air bearing surface protection film 3a. Spacing loss 10
Is caused by the fact that the magnetic pole portion is etched and receded from the air bearing surface 11 by reverse sputtering before film formation performed to improve the adhesion of the air bearing surface protective film 3a, thereby moving the magnetic pole away from the air bearing surface. In the spacing loss 9, since the surface of the protective film on the magnetic pole portion becomes the floating surface, the medium and the distance between the magnetic poles at the time of floating are the sum of the floating amount and the protective film thickness. As compared with a magnetic head, the write and read capabilities are degraded.

[0004]

The above-mentioned prior art has a disadvantage that two kinds of spacing losses occur.

[0005]

According to a first aspect of the present invention, there is provided a method of manufacturing a magnetic head with a protective film, comprising: forming a protective film on the processed surface by processing a floating surface of the floating magnetic head into a flat surface or a concave surface having a depth of several nm; The spherical surface lap is performed on the air bearing surface on which the protective film is formed in order to provide a rear crown.

According to a second aspect of the present invention, in the method of manufacturing a magnetic head with a protective film according to the first aspect, the spherical lapping step selectively removes the protective film formed on the entire air bearing surface. The magnetic pole portion and the protective film around the magnetic pole portion are removed to expose the magnetic pole portion.

According to a third aspect of the present invention, there is provided a method of manufacturing a magnetic head with a protective film, wherein the floating surface of the floating type magnetic head is processed into a flat surface or a concave surface having a depth of several nm. A curved surface lap is performed on the air bearing surface on which the protective film is formed.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a magnetic head with a protective film according to the third aspect, wherein the curved surface lapping step selectively removes the protective film formed on the entire floating surface. The magnetic pole portion and the protective film around the magnetic pole portion are removed to expose the magnetic pole portion.

According to a fifth aspect of the present invention, there is provided a method of manufacturing a magnetic head with a protective film, comprising: forming a thin film element on a side surface of a slider body; forming an air bearing surface protective film on an upper surface of the slider body; And increasing the wrapping amount toward the both sides while leaving the air bearing surface protective film at the center of the thin film element, and wrapping until the upper portion of the thin film element is exposed.

A magnetic head with a protective film according to a sixth aspect of the present invention is the magnetic head with a protective film, wherein a thin film element is provided on one side surface of the slider body and a protective film is provided on the upper surface of the slider body. Starting from the point where the thin film element is joined to the slider body, the thickness of the protective film gradually increases toward the center of the slider body, and from the center of the slider body to the second part of the slider body. The thickness of the protective film is gradually reduced toward the side surface of the second device, and the height of the protective film with respect to the upper surface of the thin film element is slope-controlled.

[0011]

Next, the present invention will be described in detail with reference to the drawings.

1 (a) to 1 (d) are a process side view and a partially enlarged side view for explaining an embodiment of the present invention. In the method of manufacturing a magnetic head with a protective film shown in FIG. 1, a step of forming a thin film element 2 on a side surface of a slider body 4 (FIG.
(A)), the floating surface protection film 3 on the upper surface of the slider body 4
And a step of increasing the amount of wrapping toward both sides while leaving the air bearing surface protective film 3 at the center of the slider body 4 and wrapping until the upper part of the thin film element 2 is exposed (FIG. 1B). It is comprised including.

FIG. 1C shows the shape of the protective film 6 when the lapping process is completed. The state of the magnetic pole portion 7 is set so that no sparing loss occurs as shown in FIG.
The upper part of the magnetic pole 8 is exposed.

FIG. 2 is a perspective view showing a magnetic head with a protective film according to the present invention. The magnetic head with a protective film shown in FIG. 2 is a magnetic head with a protective film in which a thin film element is provided on one side surface of a slider main body and a protective film is provided on the upper surface of the slider main body. The thickness of the protective film 6 gradually increases toward the center of the slider body 4 starting from the point where it is joined to the slider body 4, and extends from the center of the slider body 4 to the second side surface of the slider body 4. The thickness of the protective film 6 is gradually reduced toward the lower side, and the height of the protective film 6 with respect to the upper surface of the thin film element 2 is slope-controlled.

[0015]

The magnetic head with a protective film and the method of manufacturing the same according to the present invention have an effect that by performing a lapping process such that the upper surface of the thin film element is exposed after forming the protective film, it is possible to eliminate the staking loss. .

[Brief description of the drawings]

1 (a) to 1 (d) are a process side view and a partially enlarged side view for explaining an embodiment of the present invention.

FIG. 2 is a perspective view showing a magnetic head with a protective film of the present invention.

FIGS. 3A to 3D are a process side view and a partially enlarged side view for explaining an example of the related art.

[Explanation of symbols]

 2 Thin film element 3 Floating surface protective film 4 Slider body 6 Protective film 7 Magnetic pole part 8 Magnetic pole

Claims (6)

[Claims] An air bearing surface of a flying magnetic head is processed into a flat surface or a concave surface having a depth of several nm, a protective film is formed on the processed surface, and a spherical wrap is formed on the air bearing surface on which the protective film is formed for giving a crown. A method for manufacturing a magnetic head with a protective film. 2. The method according to claim 1, wherein the spherical lapping step selectively removes a protective film formed on the entire air bearing surface, and removes the magnetic pole portion and the protective film around the magnetic pole portion to expose the magnetic pole portion. Item 3. A method for manufacturing a magnetic head with a protective film according to Item 1. 3. The flying surface of a floating type magnetic head is processed into a flat surface or a concave surface having a depth of several nm, and after forming a protective film on the processed surface, a curved surface lap is formed on the floating surface on which the protective film is formed for giving a crown. A method for manufacturing a magnetic head with a protective film. 4. The spherical wrapping step for selectively removing a protective film formed on the entire air bearing surface, wherein the magnetic pole portion and the protective film around the magnetic pole portion are removed to expose the magnetic pole portion. Item 4. A method for manufacturing a magnetic head with a protective film according to Item 3. 5. A step of forming a thin film element on a side surface of the slider body, a step of forming a floating surface protection film on an upper surface of the slider body, and both sides of the slider body leaving the floating surface protection film at a central portion of the slider body. A step of increasing the amount of wrap closer to the portion and wrapping until the upper portion of the thin film element is exposed. 6. A magnetic head with a protective film provided with a thin film element on one side surface of a slider main body and a protective film on an upper surface of the slider main body, exposing an upper surface of the thin film element and joining the thin film element to the slider main body. From the starting point, the thickness of the protective film gradually increases toward the center of the slider body, and the thickness of the protective film increases from the center of the slider body toward the second side surface of the slider body. A magnetic head with a protective film, characterized in that the thickness of the protective film is gradually reduced, and the height of the protective film with respect to the upper surface of the thin film element is slope-controlled.