JPH11311707A - Color filter and method and device for manufacturing color filter and color display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-fineness color filter at low cost, specially, a manufacturing method for a color filter which makes it easy to peel an original disk off an ink reception layer. SOLUTION: This manufacturing method includes a 1st process for preparing the original disk 24 having plural projection parts 22 in specific array, a 2nd process for forming the ink reception layer 32 having plural recessed parts 36 transferred from the projection parts 22 between the surface of the original disk 24 which has the projection parts 22 and a reinforcing plate 28, a 3rd process for peeling the original disk 24 off the ink reception layer 32, and a coloring process for forming a colored layer 40 by charging coloring ink in the ink reception layer 32 at some certain point after the 1st process; and the reinforcing plate 28 has a tapered surface 29 at its end part 28a and in the 3rd process, a jig is engaged with the tapered surface 29 to peel the original disk 24 off the ink reception layer 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter such as a liquid crystal display device, a method of manufacturing the same, a device for manufacturing the same, and a color display device.

[0002]

BACKGROUND OF THE INVENTION As a method of manufacturing a color filter such as a liquid crystal display panel, a printing method has a drawback in terms of accuracy, and an electrodeposition method has a drawback that a pattern is limited.
Conventionally, a dyeing method and a pigment dispersion method have been mainly used.

[0003] However, the dyeing method and the pigment dispersion method are the first.
A lithography step is required each time a pixel (colored layer) of each of the colors, the second color, and the third color is formed, which has been a great hindrance to improving the mass productivity of color filters.

As a method of forming a pixel without repeating a lithography process for each color, Japanese Patent Application Laid-Open No.
JP-A-5205, JP-A-61-245106, JP-A-7-146406 and the like disclose a method of manufacturing a color filter by an ink jet method.

Further, a method has been developed in which an ink receiving layer having a plurality of concave portions is formed, and each concave portion is filled with a coloring ink or a light-shielding ink by an ink-jet method to form a colored layer or a light-shielding layer. The light-shielding layer serves as a black matrix.

Here, the ink receiving layer having concave portions is transferred to an ink receiving layer precursor by using a master having an uneven pattern, the ink receiving layer precursor is solidified, and then the master is peeled off. By doing so, it can be easily formed.

However, in the step of peeling the master from the ink receiving layer, peeling may be difficult due to the combination of the materials of the master and the ink receiving layer, or due to an increase in size. As a result, it is conceivable that the time required for peeling becomes longer and the productivity is reduced.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for manufacturing a high-definition color filter at a low cost. It is an object of the present invention to provide a method of manufacturing a filter, a color filter manufactured by the method, a manufacturing apparatus thereof, and a color display device.

[0009]

(1) A color filter according to the present invention comprises a first step of preparing a master having a plurality of convex portions arranged in a predetermined arrangement, and a surface of the master having the convex portions and a reinforcing plate. A second step of forming an ink receiving layer having a plurality of concave portions transferred from the convex portions, a third step of separating the master from the ink receiving layer, and a step after the first step. At that time, a coloring step of filling the ink receiving layer with a coloring ink to form a coloring layer, including an engagement portion at least one end of the master and the reinforcing plate, In the third step, the jig is engaged with the engaging portion, and the master is separated from the ink receiving layer.

In short, this is a method in which an ink receiving layer having a concave portion is formed by transfer using a master as a mold, and a colored ink is filled to form a colored layer. Once the master is manufactured, it can be used as many times as the durability permits, so that the master can be omitted in the manufacturing process of the second and subsequent color filters, and the number of processes and cost can be reduced.

Further, according to the present invention, since the engaging portion is formed at at least one end of the master and the reinforcing plate,
The master can be easily peeled from the ink receiving layer by engaging a jig with the engaging portion.

(2) The engaging portion has any one of a tapered shape, a stepped shape and a groove shape, and the jig has a claw shape corresponding to the shape of the engaging portion. Good.

(3) In the color filter according to the present invention, a first step of preparing a master having a plurality of convex portions arranged in a predetermined arrangement, and a step of:
A second step of forming an ink receiving layer having a plurality of concave parts transferred from the convex parts, a third step of peeling the master from the ink receiving layer, and at any point after the first step, A coloring step of forming a colored layer by filling the ink receiving layer with a colored ink, wherein the third step comprises:
The master is peeled from the ink receiving layer while blowing a high-pressure gas onto the interface between the master and the ink receiving layer.

In short, this is a method in which an ink receiving layer having a concave portion is formed by transfer using a master as a mold and filled with a coloring ink to form a coloring layer. Once the master is manufactured, it can be used as many times as the durability permits, so that the master can be omitted in the manufacturing process of the second and subsequent color filters, and the number of processes and cost can be reduced.

Further, according to the present invention, since the high-pressure gas is blown to the interface between the master and the ink receiving layer, the interface is easily peeled off, and the two can be easily peeled off.

(4) In the present invention, the high-pressure gas may be blown from the sides of the master and the ink receiving layer.

(5) At least one of the master and the reinforcing plate may have a hole penetrating toward the ink receiving layer, and the high-pressure gas may be blown through the hole.

(6) In the color filter according to the present invention, a first step of preparing a master having a plurality of convex portions arranged in a predetermined arrangement, and a step of:
A second step of forming an ink receiving layer having a plurality of concave parts transferred from the convex parts, a third step of peeling the master from the ink receiving layer, and at any point after the first step, A coloring step of forming a colored layer by filling the ink receiving layer with a colored ink, one of the master and the reinforcing plate has a shape that avoids opposing a part of the other, In a third step, a pin is pressed against the part of the other side, where the one side is prevented from being opposed to each other, and the master is peeled from the ink receiving layer.

In short, this is a method in which an ink receiving layer having a concave portion is transferred and formed using a master as a mold, and a colored ink is filled to form a colored layer. Once the master is manufactured, it can be used as many times as the durability permits, so that the master can be omitted in the manufacturing process of the second and subsequent color filters, and the number of processes and cost can be reduced.

According to the present invention, one of the master and the reinforcing plate has a shape avoiding a part of the other. Thus, the pin can be pressed against the other of the master and the reinforcing plate to easily peel the master from the ink receiving layer.

(7) The one of the master and the reinforcing plate may be formed smaller than the other, and the pin may be located on the outer peripheral side of the one and press the outer peripheral end of the other. .

(8) The one of the master and the reinforcing plate has a hole penetrating toward the ink receiving layer, and the pin penetrates through the ink receiving layer through the hole. Then, the other may be pressed.

(9) The first step may include a step of forming a resist layer having a predetermined pattern on a substrate, and then forming the projections on the substrate by etching to obtain the master. .

According to this step, the shape and surface roughness of the projection can be controlled with high precision and freely by changing the etching conditions.

(10) The substrate may be made of silicon or quartz.

Silicon or quartz is easily obtained with high purity and has good workability when performing etching by lithography. Since the master serves as a mold for forming the concave portions, such processing by etching is effective.

(11) In the first step, a resist layer having a predetermined pattern is formed on a base, the base and the resist layer are converted into a conductor, and the metal is formed by electroforming (electroplating). May be electrodeposited to form a metal layer, and then the metal layer is separated from the base and the resist layer to obtain the master.

The metal master obtained in this step is:
Generally excellent in durability and peelability.

(12) In the second step, an ink receiving layer precursor is brought into close contact between the master and the reinforcing plate, and the ink receiving layer precursor is solidified to form the ink receiving layer. Is also good.

(13) The ink receiving layer precursor may be a substance which can be cured by applying energy.

By using such a substance, it is possible to easily fill the ink receiving layer forming material even in the fine portions between the convex portions on the master, and therefore, to accurately transfer the shape of the convex portions on the master. It becomes possible to form a concave portion.

(14) The energy may be at least one of light and heat.

In this manner, a general-purpose exposure apparatus, a baking furnace, and a hot plate can be used, so that equipment cost can be reduced and space can be saved.

(15) The ink receiving layer precursor may be an ultraviolet curable resin.

As the UV-curable resin, an acrylic resin is preferable because it has excellent transparency and various commercially available resins and photosensitive agents can be used.

(16) In the present invention, the coloring step may be performed after the third step, and in the coloring step, the concave portions of the ink receiving layer may be filled with the colored ink.

(17) In the present invention, the coloring step is performed before the second step. In the coloring step, the colored ink is filled between the concave portions in the ink receiving layer, and the colored ink is filled. After the three steps, a step of filling the concave portion of the ink receiving layer with a light-shielding ink to form a light-shielding layer may be included.

The light-shielding layer becomes a black matrix.

(18) The light-shielding ink may be filled by an ink-jet method.

According to the ink jet method, the speed of filling the ink can be increased, and the ink is not wasted.

(19) The colored ink may be filled by an ink jet system.

According to the ink jet system, the speed of filling the ink can be increased, and the ink is not wasted.

(20) The color filter according to the present invention comprises:
It is manufactured by the above method.

(21) The color display device according to the present invention comprises:
The color filter is provided.

(22) A color filter manufacturing apparatus according to the present invention includes the jig.

(23) The apparatus for manufacturing a color filter according to the present invention supplies the high-pressure gas.

(24) A color filter manufacturing apparatus according to the present invention includes the pins.

[0048]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

(First Embodiment) FIGS. 1A to 4B
FIG. 3 is a diagram illustrating a method for manufacturing a color filter according to the first embodiment of the present invention.

First, as shown in FIG.
A resist layer 12 is formed thereon.

The surface of the substrate 10 is etched to form the master 2
4 (see FIG. 1E), in which a silicon substrate is used. The technology for etching a silicon substrate has been established in semiconductor device manufacturing technology, and enables highly accurate etching. In addition,
The substrate 10 is not limited to a silicon substrate as long as it is a material that can be etched, and for example, a substrate or a film of quartz, glass, resin, metal, ceramic, or the like can be used.

The material for forming the resist layer 12 includes
For example, a commercially available positive resist in which a diazonaphthoquinone derivative is blended as a photosensitive agent with a cresol novolak resin, which is generally used in the manufacture of semiconductor devices, can be used as it is. Here, the positive resist is a substance that can be selectively removed by a developer when exposed to radiation according to a predetermined pattern.

The method for forming the resist layer 12 is as follows.
Spin coating, dipping, spray coating,
It is possible to use a method such as a roll coating method and a bar coating method.

Next, as shown in FIG.
4 is placed on the resist layer 12, and only a predetermined area of the resist layer 12 is exposed to radiation 16 via the mask 14 to form a radiation-exposed area 18.

The mask 14 is formed by patterning at least a region corresponding to the projection 22 shown in FIG. 1E so that the radiation 16 is not transmitted.

Further, the convex portion 22 is provided with a concave portion 36 for forming each colored layer 40 of the color filter to be manufactured.
(See FIG. 4 (A)) for transfer formation.
It is formed according to the shape and arrangement of the coloring layer 40. For example, in a 10-inch VGA liquid crystal panel, about 100 μm
900,000 pixels in 640 × 480 × 3 (color) at m pitch,
That is, about 900,000 convex portions 22 are formed on the master 24.

The radiation 16 has a wavelength of 200 nm.
It is preferable to use light in the region of -500 nm. The use of light in this wavelength region makes it possible to use the photolithography technology established in the liquid crystal panel manufacturing process and the like and the equipment used therefor, and to reduce costs.

After exposing the resist layer 12 with the radiation 16 and performing development processing under predetermined conditions, FIG.
As shown in (C), only the resist in the radiation-exposed area 18 is selectively removed to expose the substrate 10, and the other area remains covered by the resist layer 12.

When the resist layer 12 is patterned in this manner, as shown in FIG. 1D, the substrate 10 is etched to a predetermined depth by the etchant 20 using the resist layer 12 as a mask.

As a method of etching, there is a wet method or a dry method.
An optimum method and conditions may be selected from the viewpoint of the etching cross-sectional shape, etching rate, in-plane uniformity, and the like. In terms of controllability, the dry method is superior, for example, a parallel plate type reactive ion etching (RIE) method, an inductive coupling type (ICP) method, an electron cyclotron resonance (ECR) method, and a helicon wave excitation method. , A magnetron system, a plasma etching system, an ion beam etching system or the like can be used, and by changing conditions such as an etching gas type, a gas flow rate, a gas pressure, and a bias voltage, the convex portion 22 can be processed into a rectangular shape, Etching into a desired shape can be performed by forming a taper or roughening the surface.

Next, after the etching is completed, as shown in FIG. 1E, when the resist layer 12 is removed, a convex portion 22 is obtained on the substrate 10, which is used as a master 24. Convex part 22
A recess 30 is formed between them.

Then, as shown in FIG. 2A, the master 24 and the reinforcing plate 28 are brought into close contact with each other via the ink receiving layer precursor 26. The ink receiving layer precursor 26 is a material of the ink receiving layer 32 shown in FIG.

The material of the reinforcing plate 28 preferably satisfies the characteristics required for a color filter, such as light transmittance and mechanical strength. For example, as a material of the reinforcing plate 28, a glass substrate, a plastic substrate such as polycarbonate, polyarylate, polyethersulfone, amorphous polyolefin, polyethylene terephthalate, polymethyl methacrylate, or a film substrate may be used.

The end 28a of the reinforcing plate 28 has a tapered shape as an engaging portion. That is, the tapered surface 29 is a side end surface of the reinforcing plate 28, and can be engaged with a claw-shaped member. The surface 28 b of the reinforcing plate 28, whose area is reduced by the tapered surface 29, is in close contact with the ink receiving layer 26. End portion 28a as this engagement portion
Is used in a step of peeling the reinforcing plate 28 described later.

As the ink receiving layer precursor 26, a colored layer 40 formed on the ink receiving layer 32 (see FIG. 4B)
In the thickness of the formation region, there is no particular limitation as long as it has a light transmittance that does not impair the color characteristics of the colored layer 40, and various substances can be used, but the material can be cured by application of energy. Preferably, it is a substance. Such a substance can be handled as a low-viscosity liquid at the time of forming the ink receiving layer 32, and can easily reach a fine portion of the concave portion 30 formed between the convex portions 22 of the master 24 even at normal temperature and normal pressure. Can be easily filled.

The energy is preferably at least one of light and heat. By doing so, a general-purpose exposure apparatus, a baking furnace, and a hot plate can be used, and low equipment cost and space saving can be achieved. As a substance used for the ink receiving layer precursor 26, for example, there is an ultraviolet curable resin. Acrylic resin is suitable as the UV-curable resin. By using various commercially available resins and photosensitizers, it is possible to obtain an ultraviolet-curable acrylic resin which is excellent in transparency and can be cured in a short time.

Specific examples of the basic composition of the ultraviolet-curable acrylic resin include a prepolymer or oligomer, a monomer, and a photopolymerization initiator.

As the prepolymer or oligomer,
For example, acrylates such as epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, and spiroacetal acrylates; methacrylates such as epoxy methacrylates, urethane methacrylates, polyester methacrylates, and polyether methacrylates; Is available.

Examples of the monomer include 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidone, carbitol acrylate, tetrahydrofurfuryl acrylate, isovol Monofunctional monomers such as nyl acrylate, dicyclopentenyl acrylate, and 1,3-butanediol acrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, neopentyl glycol diacrylate,
Bifunctional monomers such as neopentyl glycol dimethacrylate, ethylene glycol diacrylate, polyethylene glycol diacrylate, pentaerythritol diacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate,
Polyfunctional monomers such as pentaerythritol triacrylate and dipentaerythritol hexaacrylate can be used.

As the photopolymerization initiator, for example, 2,2-
Acetophenones such as dimethoxy-2-phenylacetophenone, butylphenones such as α-hydroxyisobutylphenone and p-isopropyl-α-hydroxyisobutylphenone, p-tert-butyldichloroacetophenone, p-tert-butyltrichloroacetophenone, α, halogenated acetophenones such as α-dichloro-4-phenoxyacetophenone, benzophenone,
Benzophenones such as N, N-tetraethyl-4,4-diaminobenzophenone; benzyls such as benzyl and benzyldimethylketal; benzoins such as benzoin and benzoin alkyl ether; 1-phenyl-1,2
Oximes such as -propanedione-2- (o-ethoxycarbonyl) oxime, 2-methylthioxanthone,
-Xanthones such as chlorothioxanthone, benzoin ethers such as benzoin ether and isobutyl benzoin ether, and radical generating compounds such as Michler's ketone can be used.

If necessary, a compound such as an amine may be added for the purpose of preventing curing inhibition by oxygen, or a solvent component may be added for the purpose of facilitating coating.

The solvent component is not particularly limited, and various organic solvents such as propylene glycol monomethyl ether acetate, propylene glycol monopropyl ether, methoxymethyl propionate, ethoxyethyl propionate, ethyl cellosolve, Ethyl cellosolve acetate, ethyl lactate,
One or more kinds selected from ethyl pyruvate, methyl amyl ketone, cyclohexanone, xylene, toluene, butyl acetate and the like can be used.

As shown in FIG. 2A, a predetermined amount of such an ink-receiving layer precursor 26 made of an ultraviolet-curable acrylic resin or the like is dropped on the master 24.

Then, as shown in FIG. 2B, the ink receiving layer precursor 26 is spread to a predetermined area.
As shown in (C), the ink receiving layer precursor 26 is cured by irradiating a predetermined amount of ultraviolet rays 34 from the reinforcing plate 28 side, and the ink receiving layer 32 is formed between the reinforcing plate 28 and the master 24.

When expanding the ink receiving layer precursor 26 to a predetermined area, a predetermined pressure is applied as necessary to the reinforcing plate 28.
And the master 24.

Although the ink receiving layer precursor 26 is dropped on the master 24 here, it may be dropped on the reinforcing plate 28 or on both the reinforcing plate 28 and the master 24.

Further, a spin coating method, a dipping method,
The ink receiving layer precursor 26 may be applied to one or both of the reinforcing plate 28 and the master 24 by using a method such as a spray coating method, a roll coating method, or a bar coating method.

Next, the step of integrally separating the reinforcing plate 28 and the ink receiving layer 32 from the master 24 will be described. FIG.
FIG. 3A shows a color filter manufacturing apparatus 100 used in the peeling step, and FIG. 3B shows a part of the manufacturing apparatus 100 in an enlarged manner.

The manufacturing apparatus 100 includes a table 102 and this table 1
And a movable plate 104 that oscillates on the movable plate 02. Stand 102
Above the movable plate 104, the integrated master 2
4. The ink receiving layer 32 and the reinforcing plate 28 are placed with the master 24 facing down. The base 102 and the master 24 are connected to each other by, for example, providing an engaging portion and an engaged portion to each other or by vacuum suction.

The movable plate 104 is an actuator 1 for applying a force by rotating the roller 106b about the eccentric shaft 106a.
At 06, one end is pressed to swing so that the other end jumps up. A jig 108 is provided at an end of the movable plate 104 that jumps up. The jig 108 has a claw shape to be engaged with the tapered surface 29 of the reinforcing plate 28 located on the base 102, and can be slid so as to be able to engage and disengage. Jig 10
The engagement of the tapered surface 8 with the tapered surface 29 of the reinforcing plate 28 ensures that the end 28a of the reinforcing plate 28 is held.

The manufacturing apparatus 100 has a high-pressure gas pump 110, and a high-pressure gas 114 is blown from an opening 112 a of a supply pipe 112 connected to the high-pressure gas pump 110. The opening 112a is shown in FIG.
As shown in (B), high-pressure gas 114 is blown from the side toward the interface between the master 24 and the ink receiving layer 32. By doing so, air enters between the master disk 24 and the ink receiving layer 32, and both are easily separated.

The manufacturing apparatus 100 has the above configuration, and its operation will be described. First, with the movable plate 104 flipped up, the integrated master 24, the ink receiving layer 32 and the reinforcing plate 28 are placed on the base 102 with the master 24 facing down. The master 24 is placed on the base 10 by means (not shown).
Connect to 2. Then, the movable plate 104 is placed on the reinforcing plate 28.
And the jig 108 is engaged with the tapered surface 29 of the reinforcing plate 28.

Next, the actuator 106 swings the movable plate 104 so as to jump up while blowing the high-pressure gas 114 from the opening 112 a of the supply pipe 112 toward the interface between the master 24 and the ink receiving layer 32.

In this manner, the master 2 is
4 and the ink receiving layer 32 are easily separated from each other.
The end portion 28 a of the reinforcing plate 28 securely held by 8 is moved away from the master 24. Then, as shown in FIG. 3C, the integrated reinforcing plate 28 and the ink receiving layer 32 are integrated.
From the master 24.

In this embodiment, both the jig 108 and the high-pressure gas 114 are used. However, the adhesion between the master 24 and the ink receiving layer 32 depends on the strength of the reinforcing plate 28 and the ink receiving layer 32.
If it is smaller than the adhesion force, the high-pressure gas 114 may be omitted. Such a difference in adhesion can be obtained by changing the materials of the master 24 and the reinforcing plate 28. Alternatively, if the adhesive force between the master 24 and the ink receiving layer 32 can be made extremely small at least at the end of the ink receiving layer 32 by using the high-pressure gas 114, both of them can be used without using the jig 108. Peeling may be possible in some cases.

When the ink receiving layer 32 and the reinforcing plate 28 having the concave portions 36 are peeled off from the master 24 in this manner, as shown in FIGS. 4A and 4B, the respective concave portions 36 are formed. Is filled with a preset coloring ink 38 to form a coloring layer 40.

The method of filling the concave portion 36 with the coloring ink 38 is not particularly limited, but an ink jet system is preferable. According to the ink jet method, it is possible to fill the ink at high speed and economically without waste by applying the technology practically used for the ink jet printer.

FIG. 4A shows the ink jet head 4.
2 shows that the concave portions 36 are filled with, for example, red, green, and blue colored inks 38.

The ink-jet head 42 is arranged so as to face the concave portion 36 on the reinforcing plate 28, and each colored ink 38 is discharged into each concave portion 36.

The ink jet head 42 has been put into practical use, for example, for an ink jet printer, and a piezo jet type using a piezoelectric element or a bubble jet type using an electrothermal converter as an energy generating element can be used. , Coloring area and coloring pattern can be arbitrarily set.

For example, the ink jet head 42
Are arranged at a discharge frequency of 14.4 kHz (1440 seconds per second) by arranging 20 discharge ports for discharging three colors of ink.
If three droplets are ejected into one recess 36 at a time (0 ejections), the time required to fill the coloring ink 38 into the recess 36 for a color filter of 10-type VGA of about 900,000 pixels is 900,000. × 3 drops / (14400 times × 20 pieces × 3 colors)
= About 3 seconds. Here, even if the time for the inkjet head 42 to move between the concave portions 36 is taken into consideration, all the concave portions 36 can be filled with the coloring ink 38 in about 2 to 3 minutes.

When the coloring ink 38 contains a solvent component, the solvent is volatilized by performing a heat treatment. In addition, since the coloring ink 38 contracts when the solvent component is volatilized,
It is necessary to fill an amount capable of securing a necessary color density after shrinkage. Thus, as shown in FIG.
A color filter including the reinforcing plate 28, the ink receiving layer 32, and the coloring layer 40 is obtained. The reinforcing plate 28 may be peeled off if it is not necessary as a component of the color filter.

In the above embodiment, a positive resist is used to form the projections 22 on the master 24. However, the area exposed to the radiation is insolubilized in the developing solution and is exposed to the radiation. A negative resist in which the unremoved area can be selectively removed by a developer may be used,
In this case, a mask having an inverted pattern is used as the mask 14. Alternatively, without using a mask,
The resist may be directly exposed in a pattern by laser light or electron beam.

In the present invention, the method for forming the colored layer is not limited to the above embodiment, and the colored layer may be formed by a pigment dispersion method or the like.

Further, in the above embodiment, the engaging portion is formed on the reinforcing plate 28. Conversely, the engaging portion may be formed on the master 24 and the jig 108 may be engaged.

(Second Embodiment) FIGS. 5A to 6B
FIG. 7 is a view illustrating a method for manufacturing a color filter according to a second embodiment of the present invention. The present embodiment provides another method of manufacturing the master in the first embodiment.

First, as shown in FIG.
A resist layer 52 is formed thereon. Since the material of the base 50 serves as a support when the resist layer 52 is patterned by a lithography method, it has mechanical strength and chemical solution resistance required for process flow, The type is not limited as long as it has good adhesion to the resist layer 52 and can be closely attached. For example, as the material of the base 50, glass, quartz, silicon wafer, resin,
Metals, ceramics, etc. can be used. In this embodiment,
After the surface is polished flat using a cerium oxide-based abrasive, a washed and dried glass base is used.

The material and the method of forming the resist layer 52 are the same as those in the first embodiment, and the description is omitted.

Next, as shown in FIG. 5B, the resist layer 52 is exposed by irradiating a radiation 56 while covering the resist layer 52 with a mask 54 corresponding to a predetermined pattern.

The mask 54 is a shielding member on which a pattern is formed so that the radiation 56 is transmitted only in a region corresponding to the radiation exposure region 58. This pattern is for transmitting the radiation 56 to a region corresponding to the concave portion 36 (see FIG. 4A) of the pixel region. That is, as compared with the first embodiment, the relationship between the region that transmits radiation and the region that does not transmit radiation is reversed. Of course, the above relationship can be reversed by using a negative resist.

The radiation has a wavelength of 200 nm to 500 nm.
It is preferable to use light in the nm range. The use of light in this wavelength region makes it possible to use the photolithography technology established in the liquid crystal panel manufacturing process and the like and the equipment used therefor, and to reduce costs.

Next, after exposing the resist layer 52 with radiation 56, as shown in FIG. 5C, development processing is performed under a certain condition to remove the resist material in the radiation exposed area 58. By this processing, the resist material in the radiation exposure area 58 that has been exposed to the radiation 56 is selectively removed, leaving the base 50 exposed.

Next, as shown in FIG.
And a patterned conductive layer 60
To make the surface conductive. As a material of the conductive layer 60, it is sufficient to have conductivity for growing the plating (metal) layer 62 shown in FIG.
Is formed to a thickness of 500 to 1000 Å (10 ⁻¹⁰ m). As a method for forming the conductive layer 60, various methods such as a sputtering method, a CVD method, an evaporation method, and an electroless plating method can be applied. This step is unnecessary if the plating layer 62 can be grown without forming the conductive layer 60.

Then, as shown in FIG. 6B, a plating layer 62 is grown. First, an electrode of a plating apparatus (not shown) is connected using the resist layer 52 and the base 50, which are made conductive by the conductive layer 60, as a cathode and using chip-shaped or ball-shaped Ni as an anode. Then, Ni is electrodeposited by an electroforming method (electroplating method) to form a plating layer 62.

As the electroplating solution, for example, a plating solution having the following composition can be used.

Nickel sulfamate: 500 g / l Boric acid: 30 g / l Nickel chloride: 5 g / l Leveling agent: 10 mg / l Alternatively, nickel sulfamate: 900 g / l Boric acid: 60 g / l Nickel chloride: 8 g / l Leveling Agent: 30 mg / l Subsequently, as shown in FIG. 6C, the conductive layer 60 and the plating layer 62 are separated from the base 50 and the resist layer 52. After the peeling, the master 64 can be completed by washing as necessary. The conductive layer 60
May be removed from the plating layer 62 by performing a peeling treatment as needed.

The color filter of the present invention can be manufactured by using the master 64 manufactured as described above as the master in the first embodiment.

Although a positive resist is used for forming the resist layer 52, a negative resist may be used. In this case, a mask in which the relationship between the exposed portion and the non-exposed portion is reversed is used as the mask 54.

As an exposure method, a method may be used in which the resist is directly exposed in a pattern by a laser beam or an electron beam without using a mask.

As described above, according to the present embodiment, it is possible to manufacture an original master suitable for manufacturing a color filter by an electroforming method. Since the master produced by the present embodiment is made of metal and is robust, it has good durability and has an effect that the production cost can be further reduced.

(Third Embodiment) FIGS. 7A to 7D
FIG. 9 is a view showing a reinforcing plate according to a third embodiment, and any of them can be used instead of the reinforcing plate 28 of the first embodiment. The reinforcing plate 70 shown in FIG. 7A has a side surface that is formed by a surface 70a that is perpendicularly connected to the surface and a tapered surface 70b. The end having the tapered surface 70b is the engaging portion. At the end of the reinforcing plate 72 shown in FIG.
The engagement portion is formed by forming 2a. FIG.
An end portion of the reinforcing plate 74 shown in (C) is formed with a surface 74a that is curved in a gently convex shape, thereby forming an engaging portion. The V-shaped groove 76a is formed at the end of the reinforcing plate 76 shown in FIG.

In any of the reinforcing plates 70, 72, 74, and 76, the same effects as in the first embodiment can be achieved by engaging with the jig 108 shown in FIG. . Alternatively, these shapes may be changed to the master 24 of the first embodiment.
May be engaged with the jig 108.

(Fourth Embodiment) FIG. 8 is a diagram showing a method of manufacturing a color filter according to a fourth embodiment.
4 shows a step of separating the master and the ink receiving layer.

FIG. 8 shows a state where the ink receiving layer 32 is provided between the reinforcing plate 28 and the master 120 in close contact with each other. The master 120 differs from the master 24 of the first embodiment in having at least one hole 122 penetrating toward the ink receiving layer 32. The method of forming the hole 122 is not limited as long as the hole 122 opens toward the interface between the ink receiving layer 32 and the master 120, but it is preferable to open the hole near the end of the ink receiving layer 32.

In this embodiment, a high-pressure gas 124 is supplied from the hole 122 of the master 120 toward the interface between the ink receiving layer 32 and the master 120. By doing so, the ink receiving layer 32 and the master 120 can be easily separated. Then, the ink receiving layer 32 is separated from the master 120. At this time, the manufacturing apparatus 100 according to the first embodiment may be used. In that case, the high-pressure gas 1
It is preferable to provide a pump for supplying 24 and a supply pipe.

Alternatively, a hole may be formed in the reinforcing plate 28 at a position avoiding the light transmitting area as a color filter,
High pressure gas may be blown from this hole.

(Fifth Embodiment) FIG. 9 is a diagram showing a method of manufacturing a color filter according to a fifth embodiment.
4 shows a step of separating the master and the ink receiving layer.

FIG. 9 shows a state in which the ink receiving layer 132 is provided between the reinforcing plate 134 and the master 130 in close contact. In the master 130, a hole 130a penetrating toward the ink receiving layer 132 is formed. Hole 130a
Is preferably opened near the end of the ink receiving layer 132. It is preferable that the master 130 be connected to a table or the like, like the master 24 of the first embodiment.

In the present embodiment, the holes 130a
Then, the reinforcing plate 134 is pressed by inserting the pin 136 into the hole.
The pins 136 may directly press the reinforcing plate 134, or may press the reinforcing plate 134 via the ink receiving layer 132. When the reinforcing plate 134 is directly pressed, a hole 132a communicating with the hole 130a may be formed in the ink receiving layer 132 in advance, or the pin 1
36 may penetrate the ink receiving layer 132.

In this way, the reinforcing plate 134 pressed by the pin 136 tends to separate from the master 130. At this time, if the adhesive force between the reinforcing plate 134 and the ink receiving layer 132 is larger than the adhesive force between the master 130 and the ink receiving layer 132, peeling occurs at the latter interface. Such a difference in adhesion may be caused by the materials of the reinforcing plate 134 and the master 130. Alternatively, as in the first embodiment,
A high-pressure gas may be sprayed on the interface between the master 130 and the ink receiving layer 132. Then, the ink receiving layer 132 is peeled off from the master 130. Also in the present embodiment, the master 13
0 can be easily peeled off.

(Sixth Embodiment) FIG. 10 is a view showing a method of manufacturing a color filter according to a sixth embodiment, and particularly shows a step of separating an original master from an ink receiving layer.

FIG. 10 shows a reinforcing plate 144 and a master 140.
3 shows a state in which the ink receiving layer 142 is provided in close contact therewith. The master 140 is reinforced with respect to the reinforcing plate 144.
It is shaped to avoid at least partially opposing. That is, the outer shape of the master 140 is smaller than the outer shape of the reinforcing plate 144, or is partially
It has a shape that goes inside the outside diameter of the. The master 140 is similar to the master 24 of the first embodiment.
It is preferable to connect to a table or the like.

In this embodiment, a pin 146 located on the outer peripheral side of the master 140 is pressed against the end of the reinforcing plate 144. By doing so, the reinforcing plate 144 pressed by the pins 146 tends to separate from the master 140. At this time, the adhesion between the reinforcing plate 144 and the ink receiving layer 142 is
If the adhesive force between the master 140 and the ink receiving layer 142 is larger than the former, peeling occurs at the latter interface. Such a difference in adhesion may be caused by the materials of the reinforcing plate 144 and the master 140. Alternatively, as in the first embodiment, the master 140
High-pressure gas may be blown to the interface between the ink and the ink receiving layer 142. Then, the ink receiving layer 142 is peeled off from the master 140. Also in the present embodiment, the master 140 can be easily peeled off.

(Seventh Embodiment) FIGS. 11A to 15
(B) is a figure which shows the manufacturing method of the color filter which concerns on 7th Embodiment of this invention.

First, as shown in FIG.
A resist layer 212 is formed on 10.

The substrate 210 is for etching the surface to form a master 220 (see FIG. 11E).
The material can be selected from materials usable as the substrate 10 of the embodiment. The end 210a of the substrate 210 has a tapered shape. That is, the tapered surface 211 is
0 side end surface.

The material and forming method of the resist layer 212 are the same as those of the resist layer 12 shown in FIG.

Next, as shown in FIG. 11B, a mask 214 is disposed on the resist
Only a predetermined area of the resist layer 212 through the radiation 21
6 to form a radiation exposed area 218. The radiation 216 is similar to the radiation 16 shown in FIG.

The mask 214 has at least the structure shown in FIG.
The area corresponding to the convex portion 217 shown in FIG. 7 is patterned so that the radiation 216 does not transmit.

The convex portion 217 is for transferring and forming a concave portion 229 (see FIG. 15A) for forming a black matrix of a color filter to be manufactured. It is formed according to. Further, a plurality of pixel regions are partitioned by the convex portions 217, and the partitioned regions are colored. For example, in a 10-inch VGA liquid crystal panel, about 100 μm
900,000 pixels in 640 × 480 × 3 (color) at m pitch,
That is, about 900,000 regions are defined by the convex portions 217.

Then, the resist layer 212 is irradiated with the radiation 216.
After performing exposure processing under a predetermined condition,
As shown in FIG. 11C, only the resist in the radiation exposure area 218 is selectively removed, exposing the substrate 210,
Other regions remain covered by the resist layer 212.

When the resist layer 212 is patterned in this way, as shown in FIG.
The substrate 210 is etched to a predetermined depth by the etchant 215 using the mask 12 as a mask. The etching method is the same as in the first embodiment.

Next, after the completion of the etching, FIG.
When the resist layer 212 is removed as shown in FIG.
A convex portion 217 is obtained on 10 and is used as a master 220. A recess 213 is formed between the protrusions 217.

Since the end 210a of the substrate 210 has a tapered shape, the end 220a
Also have a tapered shape. That is, the tapered surface 221
Is the side end surface of the master 220. The end portion 220a having such a tapered shape serves as an engagement portion, and is used as a master 22 to be described later.
It is used in the step of removing 0.

Next, as shown in FIG.
2 is prepared, and the ink receiving layer precursor 224 is sandwiched between the master 220 and the base 222. The base 222 has a flat surface and is for flattening the ink receiving layer precursor 224. The ink receiving layer precursor 224 is a material of the ink receiving layer 226 shown in FIG. In FIG. 12A, the master 220 is located below, but the base 222 may be located below.

As the ink receiving layer precursor 224, the ink receiving layer 226 can absorb the colored ink 230 (see FIG. 13A), and the colored layer 234 (see FIG. 13A).
The material is not particularly limited as long as it has a light transmittance that does not impair the color characteristics of (A)), and various substances can be used. For example, an aqueous solution of hydroxypropylcellulose can be used.

Furthermore, the ink receiving layer precursor 224 is
It is preferably a substance that can be cured by application of energy. By performing the curing treatment, a robust ink-receiving layer can be formed, and FIG.
14C, when the base 222 or the master 220 is peeled off from the ink receiving layer 226, cracks may occur in the ink receiving layer, or the ink receiving layer 226 may be partially missing. Defects can be reduced.

Such an ink receiving layer precursor 224 is
As shown in FIG. 12A, a predetermined amount is dropped on the master 220.

Then, as shown in FIG. 12 (B), the ink receiving layer precursor 224 is spread to a predetermined area, and then the ink receiving layer precursor 224 is solidified, and An ink receiving layer 226 is formed.

When expanding the ink receiving layer precursor 224 to a predetermined area, a predetermined pressure is applied to the master 22 if necessary.
0 and at least one of the base 222.

Here, the ink receiving layer precursor 224 is dropped on the master 220, but it may be dropped on the base 222 or on both the master 220 and the base 222.

Further, a spin coating method, a dipping method,
The ink receiving layer precursor 224 may be applied to one or both of the master 220 and the base 222 by using a method such as a spray coating method, a roll coating method, and a bar coating method.

Then, as shown in FIG. 12C, the base 222 is peeled off from the ink receiving layer 226. Note that the base 222 has a flat surface that is in close contact with the ink receiving layer 226, so that it is relatively easy to peel it off. Thus, the ink receiving layer 226 having a flat surface is formed on the master 220. The ink receiving layer 226 includes the master 220
A concave portion 229 is formed on the side.

Subsequently, as shown in FIG. 13A, from the side opposite to the recess 229 in the ink receiving layer 226,
A preset coloring ink 230 is ejected. Specifically, the colored ink 2 is applied to the area defined by the recess 229.
Then, the colored ink 230 is absorbed in the area.

The method for injecting the colored ink 230 is not particularly limited, but an ink jet method is preferred. According to the ink jet method, it is possible to fill the ink at high speed and economically without waste by applying the technology practically used for the ink jet printer.

In FIG. 13A, for example, the red, green and blue colored inks 2
30 is shown to be ejected to the ink receiving layer 226. More specifically, the inkjet head 232 is disposed so as to face the side opposite to the ink receiving layer 226, and each colored ink 230 is ejected to a region defined by the concave portion 229.

The structure and operation of the ink jet head 232 are the same as those of the ink jet head 42 shown in FIG.

Thus, as shown in FIG. 13B, a coloring layer 234 is formed on the ink receiving layer 226. The coloring layer 234 is formed by the ink receiving layer 226 partially absorbing the coloring ink 230.

Next, as shown in FIG. 14A, the ink receiving layer 226 including the coloring layer 234 and the reinforcing plate 238 are attached to each other.
The protective film precursor 236 is brought into close contact therewith. The protective film precursor 236 is applied to the ink receiving layer 226 or the reinforcing plate 23 by a method such as spin coating or roll coating.
8 may be adhered to each other after they are spread over the top surface 8.

The protective film precursor 236 is not particularly limited as long as it has a light transmitting property.
It can be selected from a plurality of substances forming the ink receiving layer precursor 26 of the embodiment.

A glass substrate is generally used as the reinforcing plate 238, but is not particularly limited as long as it satisfies the characteristics such as light transmittance and mechanical strength required for a color filter. For example, as the reinforcing plate 238,
A plastic substrate or a film substrate such as polycarbonate, polyarylate, polyether sulfone, amorphous polyolefin, polyethylene terephthalate, and polymethyl methacrylate may be used.

Then, by performing a curing treatment in accordance with the composition of the protective film precursor 236, this is cured to obtain the protective film precursor 236 shown in FIG.
A protective film 240 is formed as shown in FIG. In the case where an ultraviolet-curable acrylic resin is used, the protective film precursor 236 is cured by irradiating ultraviolet rays under predetermined conditions.

Subsequently, as shown in FIG. 14B, the master 220 is peeled off from the ink receiving layer 226. The step is similar to the step shown in FIG. Jig 1
08 instead of the tapered surface 221
The shape of the end of the reinforcing plate 70, 72, 74, shown in FIG.
76 may be the same as any one of the ends. Or,
Instead of engaging the master 220 with the jig 108, an engaging portion may be formed at an end of the reinforcing plate 238, and the reinforcing plate 238 may be engaged with the jig 108.

In this embodiment, as shown in FIG. 14C, the master 220 can be easily peeled off, as in the first embodiment.

Next, in order to form a black matrix, a light-shielding material 242 is filled in the concave portion 229 of the ink receiving layer 226 as shown in FIG. Note that the recess 229 is located between the coloring layers 234. By filling this region with the light-blocking material 242, a black matrix can be formed.

As the light-shielding material 242, various materials can be used as long as they are non-light-transmitting materials, have durability, and do not penetrate into the ink receiving layer 226. However,
In this embodiment, the light-shielding material 242 is ejected from the inkjet head 244.

Therefore, it is necessary to secure the fluidity of the light-shielding material 242 to some extent. For example, a resin obtained by dissolving a black resin such as a negative resin black manufactured by Fuji Film Ohlin Co., a resist HRB- # 01 for a high insulating black matrix manufactured by Toppan Printing Co., Ltd., a resin black manufactured by Japan Synthetic Rubber (JSR) Co., Ltd. in an organic solvent. Is used as the light-shielding material 242.

The organic solvent is not particularly limited to its kind, but various organic solvents can be applied. For example, propylene glycol monomethyl ether acetate, propylene glycol monopropyl ether, methoxymethyl propionate, methoxyethyl propionate, ethyl cellosolve, ethyl cellosolve acetate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, cyclohexanone, xylene, toluene,
One or more mixed solutions of butyl acetate and the like can be used.

When filling the light-shielding material 242, the driving position is controlled by moving the ink-jet head 244 or the like so that the concave portion 229 formed in the master 220 is filled in a uniform amount. When the light-shielding material 242 is uniformly filled up to every corner of the concave portion 229, the filling is completed. When a solvent component is contained, the solvent component is removed from the light-shielding material 242 by heat treatment. Since the light-shielding material 242 shrinks when the solvent component is removed, it is necessary to fill a sufficient amount of the light-shielding material that can secure the necessary light-shielding property even after the shrinkage.

Thus, as shown in FIG. 15B, a light-shielding layer 246 made of a light-shielding material 242 is integrally formed on the ink receiving layer 226, and a color filter is obtained. This color filter has an ink receiving layer 226 on which a colored layer 234 and a light shielding layer 246 as a black matrix are formed. Note that the light shielding layer 226
A protective film may be formed so as to cover the top, and a reinforcing plate may be bonded.

According to the present embodiment, a concave portion 229 is formed, and a light-shielding material 242 is filled in the concave portion 229 to form a light-shielding layer 246 as a black matrix. Therefore,
Since there is no lithography step, material use efficiency is high and the number of steps can be reduced. For this reason,
The cost can be reduced as compared with the conventional color filter.

In the present embodiment, once the master 220 is manufactured, it can be used repeatedly as long as its durability is allowed. Accordingly, in the manufacturing process of the second and subsequent color filters, the manufacturing process of the master 220 can be omitted, the number of processes can be reduced, and the cost can be reduced as compared with the conventional color filter.

In the above embodiment, the projection 2
In forming 17, a positive resist was used.
A negative resist may be used in which the region exposed to the radiation becomes insoluble in the developer and the region not exposed to the radiation can be selectively removed by the developer. In this case, a mask having an inverted pattern is used as the mask 214. Alternatively, the resist may be directly exposed in a pattern by using a laser beam or an electron beam without using a mask.

FIG. 16 shows a TFT (Thin) incorporating the color filter 1 manufactured by the method according to the first embodiment.
FIG. 3 is a cross-sectional view of a (Film Transistor) color liquid crystal panel. The color liquid crystal panel includes a color filter 1 and a glass substrate 300 facing the liquid crystal panel, and a liquid crystal composition 301 is sealed therebetween. The color filter 1 includes a reinforcing plate 28,
It has an ink receiving layer 32 and a colored layer 40, and a protective film 308 is formed on the ink receiving layer 32 and the colored layer 40, and a common electrode 303 is formed on the protective film 308.

On the other hand, a transparent pixel electrode 304 and a TFT (not shown) are formed on a matrix inside the glass substrate 300. Outside the liquid crystal composition 301, alignment films 305 and 306 are formed. Alignment films 305, 30
A spacer 307 is sealed in a region (cell gap) surrounded by 6 in order to keep the gap of the cell gap constant. As the spacer 307, spherical silica, polystyrene, or the like is used.

By irradiating the liquid crystal panel with backlight, the liquid crystal composition 301 functions as an optical shutter for changing the transmittance of the backlight, whereby color display can be performed.

FIG. 17 shows a TFT (Thin) incorporating the color filter 7 manufactured by the method according to the seventh embodiment.
FIG. 3 is a cross-sectional view of a (Film Transistor) color liquid crystal panel. The color liquid crystal panel includes a color filter 7 and a glass substrate 400 opposed thereto, and a liquid crystal composition 401 is sealed therebetween. The color filter 7 includes a reinforcing plate 23.
8, protective film 240, coloring layer 234, ink receiving layer 22
6. The light-shielding layer 246 is provided. Further, the ink receiving layer 2
A protective layer 402 and a common electrode 403 are sequentially formed on the light-shielding layer 246 and the light-shielding layer 246.

On the other hand, a transparent pixel electrode 404 and a TFT (not shown) are formed on a matrix inside the glass substrate 400. Outside the liquid crystal composition 401, alignment films 405 and 406 are formed. Alignment films 405, 40
A spacer 407 is sealed in a region (cell gap) surrounded by 6 in order to keep the gap of the cell gap constant. As the spacer 407, spherical silica, polystyrene, or the like is used.

By irradiating the liquid crystal panel with backlight, and causing the liquid crystal composition 401 to function as an optical shutter for changing the transmittance of the backlight, color display can be performed.

[0170]

[Brief description of the drawings]

FIGS. 1A to 1E are diagrams illustrating a method of manufacturing a color filter according to a first embodiment.

FIGS. 2A to 2C are diagrams illustrating a method of manufacturing a color filter according to the first embodiment.

FIGS. 3A to 3C are diagrams illustrating a method of manufacturing a color filter according to the first embodiment.

FIGS. 4A and 4B are diagrams illustrating a method of manufacturing a color filter according to the first embodiment.

FIGS. 5A to 5C are diagrams illustrating a method of manufacturing a color filter according to a second embodiment.

FIGS. 6A to 6C are diagrams illustrating a method of manufacturing a color filter according to a second embodiment.

FIGS. 7A to 7D are views showing a reinforcing plate used for a color filter according to a third embodiment.

FIG. 8 is a diagram illustrating a method for manufacturing a color filter according to a fourth embodiment.

FIG. 9 is a diagram illustrating a method for manufacturing a color filter according to a fifth embodiment.

FIG. 10 is a diagram illustrating a method of manufacturing a color filter according to a sixth embodiment.

FIGS. 11A to 11E are diagrams illustrating a method of manufacturing a color filter according to a seventh embodiment.

FIGS. 12A to 12C are diagrams illustrating a method of manufacturing a color filter according to a seventh embodiment.

FIGS. 13A and 13B are diagrams illustrating a method of manufacturing a color filter according to a seventh embodiment.

FIGS. 14A to 14C are diagrams illustrating a method of manufacturing a color filter according to a seventh embodiment.

FIGS. 15A and 15B are diagrams illustrating a method of manufacturing a color filter according to a seventh embodiment.

FIG. 16 is a diagram showing a color display device manufactured according to the present invention.

FIG. 17 is a diagram showing a color display device manufactured according to the present invention.

[Explanation of symbols]

 Reference Signs List 22 convex portion 24 master disk 26 ink receiving layer precursor 28 reinforcing plate 28a end portion (engaging portion) 32 ink receiving layer 36 concave portion 38 colored ink 40 colored layer

Claims (24)

[Claims] A first step of preparing a master having a plurality of projections in a predetermined arrangement; and a plurality of recesses transferred from the projections between a surface of the master having the projections and a reinforcing plate. A second step of forming an ink receiving layer having: a third step of separating the master from the ink receiving layer; and at any time after the first step, filling the ink receiving layer with colored ink. And a coloring step of forming a coloring layer by applying a jig to the engaging portion in the third step. A method for manufacturing a color filter, wherein the master is combined with the ink receiving layer and peeled off. 2. The method for manufacturing a color filter according to claim 1, wherein the engaging portion has one of a tapered shape, a stepped shape, and a groove shape, and the jig includes the engaging portion. A method for producing a nail-shaped color filter corresponding to the shape of the color filter. 3. A first step of preparing a master having a plurality of projections in a predetermined arrangement, and a plurality of recesses transferred from the projections between a surface of the master having the projections and a reinforcing plate. A second step of forming an ink receiving layer having: a third step of separating the master from the ink receiving layer; and at any time after the first step, filling the ink receiving layer with colored ink. Producing a color filter, wherein the third step peels off the master from the ink receiving layer while blowing a high-pressure gas onto an interface between the master and the ink receiving layer. Method. 4. The method for manufacturing a color filter according to claim 3, wherein the high-pressure gas is blown from a side of the master and the ink receiving layer. 5. The method for manufacturing a color filter according to claim 3, wherein at least one of the master and the reinforcing plate has a hole penetrating toward the ink receiving layer, and the high-pressure gas is supplied to the hole. Method of manufacturing a color filter sprayed through a filter. 6. A first step of preparing a master having a plurality of projections in a predetermined arrangement, and a plurality of recesses transferred from the projections between a surface of the master having the projections and a reinforcing plate. A second step of forming an ink receiving layer having: a third step of separating the master from the ink receiving layer; and at any time after the first step, filling the ink receiving layer with colored ink. And a coloring step of forming a colored layer by using the method. One of the master and the reinforcing plate has a shape that avoids opposing a part of the other, and in the third step, the one faces each other. A method of manufacturing a color filter, wherein a pin is pressed against the other part of the color filter to avoid the problem, and the master is peeled from the ink receiving layer. 7. The method for manufacturing a color filter according to claim 6, wherein the one of the master and the reinforcing plate is formed smaller than the other, and the pin is located on an outer peripheral side of the one, A method of manufacturing a color filter for pressing the other outer peripheral end. 8. The method for manufacturing a color filter according to claim 6, wherein the one of the master and the reinforcing plate has a hole penetrating toward the ink receiving layer, and the pin is inserted through the hole. And producing a color filter that penetrates the ink receiving layer and presses the other. 9. The method for manufacturing a color filter according to claim 1, wherein in the first step, a resist layer having a predetermined pattern is formed on a substrate, and then the resist layer is formed by etching. A method for manufacturing a color filter, comprising a step of forming the convex portion on a substrate to obtain the master. 10. The method according to claim 9, wherein the substrate is made of silicon or quartz. 11. The method for manufacturing a color filter according to claim 1, wherein the first step includes forming a resist layer having a predetermined pattern on a base, and then forming the resist layer on the base. Conducting the base and the resist layer, further forming a metal layer by electrodepositing a metal by electroforming, and then removing the metal layer from the base and the resist layer to obtain the master Production method. 12. The color filter manufacturing method according to claim 1, wherein in the second step, an ink receiving layer precursor is brought into close contact between the master and the reinforcing plate. A method for manufacturing a color filter, wherein the ink receiving layer precursor is solidified to form the ink receiving layer. 13. The method for manufacturing a color filter according to claim 12, wherein the ink receiving layer precursor is a substance curable by application of energy. 14. The method of manufacturing a color filter according to claim 13, wherein the energy is at least one of light and heat. 15. The method for producing a color filter according to claim 14, wherein the ink receiving layer precursor is an ultraviolet curable resin. 16. The method for manufacturing a color filter according to claim 1, wherein the coloring step is performed after the third step, and in the coloring step, the coloring of the ink receiving layer is performed. A method of manufacturing a color filter in which a concave portion is filled with the coloring ink. 17. The method for manufacturing a color filter according to claim 1, wherein the coloring step is performed before the second step, and in the coloring step, the ink receiving layer is formed. Filling the colored ink between the concave portions in the above, after the third step, in the concave portions of the ink receiving layer,
A method for manufacturing a color filter, comprising a step of forming a light-shielding layer by filling a light-shielding ink. 18. The method for manufacturing a color filter according to claim 17, wherein the light-shielding ink is filled by an ink-jet method. 19. The method for manufacturing a color filter according to claim 1, wherein the color ink is filled by an ink jet method. 20. A color filter manufactured by the method according to claim 1. 21. A color display device having the color filter according to claim 20. 22. An apparatus for manufacturing a color filter which is used in the method for manufacturing a color filter according to claim 1 or 2 and has the jig. 23. An apparatus for manufacturing a color filter, which is used in the method for manufacturing a color filter according to claim 3 and supplies the high-pressure gas. 24. An apparatus for manufacturing a color filter having the pins, which is used in the method for manufacturing a color filter according to claim 6. Description: