JPH11194209A - Color filter and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the method which manufacture the high-definition color filter having no unevenness of color density at low cost. SOLUTION: This manufacturing method includes a process for forming an original disk 10 with an uneven pattern 19, a process for forming a duplicate disk 20 having an uneven pattern transferred from the uneven pattern, a process for forming an ink filling layer 30 having ink filled recessed parts 30 transferred from the uneven pattern, a process for forming a colored pattern layer 40 by filling the ink filled recessed parts 32 with ink of previously set ink, and a process for forming a light-transmissive layer 46 on the ink filling layer where the colored pattern layer is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a color filter used for a liquid crystal display panel and the like and a method of manufacturing the same.

[0002]

BACKGROUND OF THE INVENTION As a method of manufacturing a color filter such as a liquid crystal display panel, a printing method has a drawback in terms of accuracy, and an electrodeposition method has a drawback that a pattern is limited.
Conventionally, a dyeing method and a pigment dispersion method have been mainly used.

[0003] However, the dyeing method and the pigment dispersion method are the first.
A lithography step is required each time a pixel (colored pattern layer) of each of the colors, the second color, and the third color is formed, which has hindered the improvement of mass productivity of the color filter.

As a method of forming a colored pattern layer without repeating the lithography process for each color, JP-A-59-75205 and JP-A-61-245106 disclose a method for forming a colored pattern layer.
And Japanese Patent Application Laid-Open No. 7-146406 disclose a method of manufacturing a color filter by an ink jet method. However, in order to manufacture a high-definition color filter, an adjacent colored pattern when a colored ink is injected is used. In order to prevent color mixing between layers and to control the shape of the formed colored pattern layer, a pixel partitioning portion (which may have a black matrix function) is required. In order to form the pixel partitioning portion, Costly lithography steps are required for each product, thereby reducing the advantages of the inkjet system.

In order to compensate for the above-mentioned drawbacks, an ink-filled layer having an ink-filled concave portion is formed by transfer using a master having unevenness corresponding to the shape of the colored pattern layer to be formed. The concave portions are filled with ink of a predetermined color by an ink jet method to form a colored pattern layer, and a light-transmissive resin layer is formed on the ink filled layer on which the colored pattern layer is formed to form a color filter. Have been proposed.

In short, this method eliminates the need for a lithography process for each product by transferring and forming an ink-filled layer having an ink-filled concave portion for filling with colored ink using a master as a mold. Once a master has been manufactured, it can be used repeatedly as long as durability is allowed.
The higher the durability of the master, the lower the master cost per product is, which leads to a lower cost of the product.

However, in this method of manufacturing a color filter, since a master is used for each product, there is a problem that deterioration such as contamination, wear and deformation of the pattern of the master is quick. Since the master is manufactured by applying the lithography process, high cost is required to remanufacture the master, and an increase in the frequency of manufacturing the master causes a cost increase of the product.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to reduce the frequency of producing expensive masters, thereby producing a high-definition color filter at a low cost, and producing the same by the method. The purpose of the present invention is to provide a color filter.

[0009]

(1) A method of manufacturing a color filter according to the present invention includes a first step of forming a master having a first concave-convex pattern, and a first step of transferring the first concave-convex pattern from the first concave-convex pattern. A second step of forming a duplicated disc having a concave-convex pattern of No. 2, a third step of forming an ink-filled layer having a concave part for ink filling transferred from the second concave-convex pattern, The method includes a fourth step of forming a colored pattern layer by filling ink of a preset color, and a fifth step of forming a light-transmitting layer on the ink-filled layer on which the colored pattern layer is formed.

In short, the present invention is a method for duplicating a duplicate disc from a master having an uneven pattern corresponding to the ink filling recess, and forming an ink filling layer having the ink filling recess for each product using the duplicate disc. It is.

According to the present invention, since an expensive master is used only when a duplicate master is manufactured, the frequency of remanufacturing the master is reduced, and the manufacturing cost of the color filter can be reduced.

(2) The first concave / convex pattern of the master may be formed by etching through a lithography method.

[0013] Etching via lithography is well known as a highly accurate processing method. Since the first concave-convex pattern serves as a base of the ink filling concave portion, such processing by etching is effective.

(3) In the master, a resist layer patterned according to the first uneven pattern is formed on a base, and a conductive layer is formed on a surface of the base on which the resist layer is formed. May be formed, a metal layer may be formed on the conductive layer by an electroforming method (electroplating method), and the metal layer may be peeled off from the base.

As described above, the method of forming the metal layer by the electroforming method is excellent in that the concavo-convex pattern can be transferred at low cost and with high accuracy.

(4) The master may be made of silicon or quartz. Silicon or quartz has excellent flatness,
Good workability when etching through lithography.

(5) The master is made of a conductive material, and the duplicate master is formed by forming a metal layer on the surface of the master on which the first concave / convex pattern is formed by an electroforming method. From the master.

Here, the conductive substance refers to a substance capable of forming a metal layer by an electroforming method (electroplating method) without conducting treatment.

(6) The master is made of an insulating material, and in the duplicate master, a conductive layer is formed on a surface of the master on which the first concave-convex pattern is formed, and an electric layer is formed on the conductive layer. A metal layer may be formed by a casting method, and the metal layer may be obtained by peeling the metal layer from the master.

Here, the insulating material refers to a material that needs to be made conductive in order to form a metal by an electroforming method.

(7) In the method of manufacturing a color filter according to the present invention, a first step of forming a master having a first uneven pattern, and a second step of transferring from the first uneven pattern are performed.
A second step of forming an intermediate plate having an uneven pattern of
A third step of forming a duplicate disc having a third concavo-convex pattern transferred from the second concavo-convex pattern, and a third step of forming an ink-filled layer having an ink-filled concavity transferred from the third concavo-convex pattern. A fourth step, a fifth step of forming a colored pattern layer by filling the ink filling recess with ink of a predetermined color, and a light transmitting layer on the ink filled layer on which the colored pattern layer is formed. A sixth step of forming

As described above, in the method of forming a duplication disc from the master disc via the intermediate disc, the degree of freedom of the materials constituting the master disc and the duplication disc and the method of forming the duplication disc is increased, so that a highly accurate unevenness is obtained. It becomes easy to transfer the pattern shape and to further improve the durability of the master and duplicate masters.

(8) The master may be made of silicon or quartz. Silicon or quartz has excellent flatness and good workability when performing etching via a lithography method.

(9) The step of forming the intermediate disk includes a step of applying an intermediate disk precursor on the surface of the master disk on which the first uneven pattern is formed, and a step of solidifying the intermediate disk precursor to form an intermediate disk. The method may include a step of forming a disc and a step of peeling the intermediate disc from the master disc.

(10) The intermediate precursor may include a substance which can be cured by applying energy.

(11) The energy includes at least one of light and heat.

(12) The intermediate precursor may be a substance having thermoplasticity.

(13) The intermediate plate may be formed of a resin.

(14) The present invention may include a step of attaching a base to the intermediate plate.

(15) In the duplication board, a conductive layer is formed on the surface of the intermediate board on which the second uneven pattern is formed, and a metal layer is formed on the conductive layer by electroforming. Then, the metal layer may be obtained by peeling from the master.

(16) The step of forming the ink filling layer includes:
A step of applying an ink-filled layer precursor on the surface of the replica disc on which the concavo-convex pattern is formed; a step of solidifying the ink-filled layer precursor to form an ink-filled layer; Removing the filling layer.

(17) The ink-filled layer precursor may contain a substance which can be cured by applying energy.

(18) The energy includes at least one of light and heat.

(19) The ink filling layer precursor may be a substance having thermoplasticity.

(20) The ink filling layer may be formed of a resin.

(21) In the present invention, before applying the ink-filled layer precursor on the surface of the duplication disc on which the concavo-convex pattern is formed, the concave portions of the concavo-convex pattern of the duplication disc are filled with light-shielding ink. And forming a light-shielding layer by
After solidifying the ink-filled layer precursor, the ink-filled layer is obtained by peeling off the light-shielding layer integrally with the ink-filled layer from the replica disc, and the ink-filled layer is formed by the ink-filled recess. May be provided around the light-shielding layer.

The light-shielding layer formed around the ink filling recess serves as a black matrix.

(22) The light-shielding ink may be filled by an ink-jet method.

According to the ink jet system, by applying the technology practically used for the ink jet printer,
The ink filling speed can be increased, and the ink use efficiency can be made almost 100%, so that the ink is not wasted.

(23) The concave portion of the duplication board may have a bottom surface smaller than an opening portion.

By doing so, the top end surface of the light-shielding layer becomes small, and a narrow black matrix can be obtained. Further, according to the concave portion having such a shape, the releasability of the light-shielding layer and the ink-filled layer is improved.

(24) The concave portion of the duplication disk may have an opening tapered.

By doing so, a black matrix having a small width can be obtained, and the releasability of the light-shielding layer and the ink-filled layer is improved.

(25) In the step of forming the ink-filled layer, the holding plate is in close contact with the duplicate disk via the ink-filled layer precursor, and in the step of forming the colored pattern layer and the light transmitting layer, The layer may be advanced in close contact with the holding plate, and after the formation of the light transmissive layer, the holding plate may be removed from the ink-filled layer.

As described above, the flatness of the ink-filled layer can be improved by forming the ink-filled layer precursor for forming the ink-filled layer on the holding plate.

(26) The holding plate is provided with a recess for forming a spacer on a surface which is in close contact with the precursor of the ink filling layer, and the ink filling layer has a recess for the spacer corresponding to the recess for forming the spacer. A projection may be formed.

By doing so, a color filter integrated with a spacer can be easily manufactured.

(27) A release layer having low adhesion to the ink-filled layer precursor may be formed on the holding plate.

By doing so, the ink filling layer can be easily peeled from the holding board.

(28) In the step of forming the light-transmitting layer, the light-transmitting layer is formed by applying a light-transmitting material on the ink-filled layer, and the light-transmitting layer is formed on the material. May be mounted.

(29) In the step of forming the colored pattern layer, the ink may be filled by an ink jet method.

According to the ink jet system, by applying the technology practically used for the ink jet printer,
The ink filling speed can be increased, and the ink use efficiency can be made almost 100%, so that the ink is not wasted.

(30) The color filter according to the present invention comprises:
It is manufactured by the above method.

[0054]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1A to 4C
FIG. 1 is a diagram illustrating a first embodiment of the present invention. 1 (A) to 1 (E) are views showing steps of manufacturing a master in the first embodiment.

First, as shown in FIG.
A resist layer 14 is formed thereon. The substrate 12 is for etching the surface to form the master 10 (see FIG. 1 (E)), and is not particularly limited as long as it is an etchable material. This is preferable because it is easy to form an uneven pattern with high accuracy.

The material for forming the resist layer 14 includes
For example, a commercially available positive resist in which a diazonaphthoquinone derivative is blended as a photosensitive agent with a cresol novolak resin, which is generally used in the manufacture of semiconductor devices, can be used as it is. Here, the positive resist is a substance that can be selectively removed by a developer when exposed to radiation according to a predetermined pattern.

The method for forming the resist layer 14 is as follows.
Spin coating, dipping, spray coating,
It is possible to use a method such as a roll coating method and a bar coating method.

Next, as shown in FIG.
6 is disposed on the resist layer 14, and only predetermined regions of the resist layer 14 are exposed to radiation 18 via the mask 16.

The mask 16 is formed such that the radiation 18 is transmitted only in a region corresponding to the region where the concavo-convex pattern 19 shown in FIG. 1E is formed.

The radiation has a wavelength of 200 nm to 5 nm.
It is preferable to use light in the region of 00 nm. The use of light in this wavelength region makes it possible to use the photolithography technology established in the liquid crystal panel manufacturing process and the like and the equipment used therefor, and to reduce costs.

After the resist layer 14 is exposed to radiation 18 and then developed under predetermined conditions,
As shown in FIG. 1 (C), only the resist layer 14 in the exposed area 17 of the radiation 18 is selectively removed to expose the surface of the substrate 12, and the other areas remain covered by the resist layer 14. State.

When the resist layer 14 is thus patterned, the substrate 12 is etched to a predetermined depth using the resist layer 14 as a mask, as shown in FIG.

As a method of etching, there is a wet method or a dry method.
An optimal method and conditions may be selected from the viewpoint of the etching cross-sectional shape, the etching rate, and the like. In terms of controllability, the dry method is superior, for example, a parallel plate type reactive ion etching (RIE) method, an inductive coupling type (ICP) method, an electron cyclotron resonance (ECR) method, and a helicon wave excitation method. , A magnetron system, a plasma etching system, an ion beam etching system, and the like can be used. By changing conditions such as an etching gas type, a gas flow rate, a gas pressure, and a bias voltage, the uneven pattern 19 can be processed into a rectangular shape, Etching into a desired shape can be performed by adding a taper or roughening the surface.

Next, after the completion of the etching, FIG.
When the resist layer 14 is removed as shown in FIG.
Since an uneven pattern 19 is formed on the master 10
Becomes The concave / convex pattern 19 includes a concave portion 19 a and a convex portion 19.
b. Here, the concave portion 19a is formed so as to correspond to the ink filling concave portion 32 shown in FIG.

In the present embodiment, the master 10 is economical because once manufactured, it can be used as many times as the durability permits. Further, the manufacturing process of the master 10 can be omitted in the manufacturing process of the second and subsequent color filters,
The number of steps and cost can be reduced.

In the above embodiment, a positive resist was used to form the concavo-convex pattern 19 on the substrate 12, but the region exposed to the radiation became insoluble in the developing solution and was exposed to the radiation. A negative type resist in which no area can be selectively removed by a developer may be used,
In this case, a mask whose pattern is inverted from that of the mask 16 is used. Alternatively, without using a mask,
The resist may be directly exposed in a pattern by laser light or electron beam.

Next, as shown in FIG.
The metal film 22 is formed in order to make the surface of the uneven pattern 19 side conductive. As the metal film 22, for example, nickel (Ni) may be formed to a thickness of 500 Å to 1000 Å. As a method for forming the metal film 22, a method such as sputtering, CVD, vapor deposition, or electroless plating can be used. This step is unnecessary if the surface of the master 20 on the side of the concavo-convex pattern 19 has conductivity.

Then, Ni is further electrodeposited by electroforming using the metal film 22 as a cathode and the chip-shaped or ball-shaped Ni as an anode to form a thick metal layer 24 as shown in FIG. Form. An example of the electroplating solution is shown below.

Nickel sulfamate: 550 g / l Boric acid: 35 g / l Nickel chloride: 5 g / l Leveling agent: 20 mg / l Then, as shown in FIG. 2C, the metal layer 24 and the metal film 22 were This is used as a duplicate disc 20 by peeling it off and washing it if necessary. In this duplicate board 20,
An uneven pattern 26 is formed corresponding to the uneven pattern 19 of the master 10. Specifically, the concavo-convex pattern 26 has a concave portion 26 a corresponding to the convex portion 19 b of the first pattern 19.
And a convex portion 26b corresponding to the concave portion 19a. The uneven pattern 26 is an inverted pattern for forming the ink filling recess 32 shown in FIG. 4A by transfer.

When the master 10 is formed of a metal, the metal film 22 (or the metal layer 24 when the conductor is not subjected to a conductive treatment) is strongly adhered to the master 10, and the master 10 is not peeled off from the master 10. It can be difficult. In such a case, before forming the metal film 22 (or the metal layer 24 if the conductive process is not performed) on the uneven pattern 19 of the master 10, the surface of the master 10 on the side of the uneven pattern 19 is subjected to a peeling process. Is preferred. As the peeling treatment, for example, the master 10
Is formed from nickel, an oxygen plasma treatment, an anodic oxidation treatment, or the like is effective.

Although it is not always necessary to remove the metal film 22 from the duplication disc 20, it is necessary to remove the metal film 22 from the master disc 10 or to form the ink filling layer 30 in a subsequent step.
When a part of the metal film 22 is peeled off, it is preferable to remove the part.

Next, FIGS. 3A to 3C are views showing steps of forming an ink-filled layer having an ink concave portion.

First, as shown in FIG.
0 is arranged with its uneven pattern 26 facing upward. Next, as shown in FIG. 3B, an ink filling layer 30 is formed on the duplicate disc 20. Specifically, the ink filling layer 30
Is placed on or applied to at least one of the replica plate 20 and the holding plate 34, and the ink-filled layer precursor is formed via the ink-filled layer precursor as shown in FIG. The duplication board 20 and the holding board 34 are stuck together.
In addition, the holding board 34 becomes a base in a color filter manufacturing process thereafter. Also, if necessary, the copy board 20 may be used.
When attaching the holding plate and the holding plate, pressure may be applied via at least one of the duplication plate 20 and the holding plate.

Here, the ink filling layer precursor is preferably a liquid or liquefiable substance. By making the ink-filled layer precursor a liquid, the recess 2
6a can be easily filled. As the liquid substance, a substance that can be cured by applying energy can be used, and as the liquefiable substance, a plastic substance can be used.

When the ink filling layer precursor was formed, the ink filling layer precursor was colored pattern layer 40 (FIG. 4).
(A) is not particularly limited as long as it does not affect the color characteristics of (A), but is preferably a resin. As the resin, a resin having energy curability or a resin having plasticity is easily obtained, and is preferable.

Examples of the resin having energy curability include:
Desirably, it can be cured by applying at least one of light and heat. For the use of light and heat, a general-purpose exposure apparatus, a heating apparatus such as a baking furnace or a hot plate can be used, and the equipment cost can be reduced.

Examples of such an energy-curable resin include acrylic resins, epoxy resins,
Melamine-based resins, polyimide-based resins, and the like can be used. In particular, the acrylic resin cures in a short time by irradiation of light by using various commercially available precursors and photosensitizers (photopolymerization initiators) to form the ink filling layer 30 having excellent optical characteristics. It is preferable because it can be formed.

Specific examples of the basic composition of the photocurable acrylic resin include a prepolymer or oligomer, a monomer, and a photopolymerization initiator.

As the prepolymer or oligomer,
For example, acrylates such as epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, and spiroacetal acrylates; methacrylates such as epoxy methacrylates, urethane methacrylates, polyester methacrylates, and polyether methacrylates; Is available.

Examples of the monomer include 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidone, carbitol acrylate, tetrahydrofurfuryl acrylate, isovol Monofunctional monomers such as nyl acrylate, dicyclopentenyl acrylate, and 1,3-butanediol acrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, neopentyl glycol diacrylate,
Bifunctional monomers such as neopentyl glycol dimethacrylate, ethylene glycol diacrylate, polyethylene glycol diacrylate, pentaerythritol diacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate,
Polyfunctional monomers such as pentaerythritol triacrylate and dipentaerythritol hexaacrylate can be used.

As the photopolymerization initiator, for example, 2,2-
Acetophenones such as dimethoxy-2-phenylacetophenone, butylphenones such as α-hydroxyisobutylphenone and p-isopropyl-α-hydroxyisobutylphenone, p-tert-butyldichloroacetophenone, p-tert-butyltrichloroacetophenone, α, halogenated acetophenones such as α-dichloro-4-phenoxyacetophenone, benzophenone,
Benzophenones such as N, N-tetraethyl-4,4-diaminobenzophenone; benzyls such as benzyl and benzyldimethylketal; benzoins such as benzoin and benzoin alkyl ether; 1-phenyl-1,2
Oximes such as -propanedione-2- (o-ethoxycarbonyl) oxime, 2-methylthioxanthone,
-Xanthones such as chlorothioxanthone, benzoin ethers such as benzoin ether and isobutyl benzoin ether, and radical generating compounds such as Michler's ketone and benzyl methyl ketal can be used.

If necessary, a compound such as an amine may be added to prevent curing inhibition by oxygen, or a solvent component may be added to facilitate coating. The solvent component is not particularly limited, and various organic solvents, for example, propylene glycol monomethyl ether acetate, methoxymethyl propionate, ethoxyethyl propionate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, etc. Available.

As shown in FIG. 3 (B), such a resin having energy curability is applied to the duplication plate 20 and the holding plate 34.
Between them, and perform a curing process according to the resin. For example, in the case of using a photo-curable resin, the ink-filled layer 30 is formed by solidifying by irradiating light under predetermined conditions.

The ink filling layer 3 is made of a photocurable substance.
When 0 is formed, at least one of the holding plate 34 and the duplicate plate 20 needs to have light transmittance.

As the resin having plasticity, for example, thermoplastic resins such as polycarbonate resin, polymethyl methacrylate resin, and polyolefin resin can be used. Such a resin is plasticized by heating it to a temperature equal to or higher than the softening point to form a liquid, and FIG.
As shown in (2), after being sandwiched between the duplication board 20 and the holding plate 34, when the plasticized resin is cooled and solidified, the ink filling layer 30 is formed.

As described above, by forming the ink-filled layer precursor from a substance curable by application of energy or a substance having plasticity, when the precursor is applied to and adhered to the duplication disc 20, The ink-filled layer precursor is filled into the fine portions of the concave portions 26 a of the concave-convex pattern 26 formed on the substrate 20. When the ink-filled layer 30 is formed by performing a solidification process in accordance with the ink-filled layer precursor to form the ink-filled layer 30, the uneven pattern 2
6 can be precisely transferred to the ink filling layer 30.

When the ink filling layer 30 is formed on the copy disk 20 in this manner, as shown in FIG. 3C, the ink filling layer 30 and the holding plate 34 are peeled off from the copy disk 20 integrally. Filling layer 3 having ink filling recess 32
0 is obtained.

The steps after forming the ink filling layer 30 having the ink filling recesses 32 on the holding board 34 are shown in FIGS. 4A to 4C. In FIG. 4A,
A head 42 that ejects ink by an ink jet method is disposed so as to face the ink filling recess 32 formed in the ink filling layer 30 on the holding plate 34.

The head 42 has been put into practical use, for example, for an ink jet printer, and can be a piezo jet type using a piezoelectric element or a bubble jet type using an electrothermal converter as an energy generating element. The coloring area and the coloring pattern can be set arbitrarily.

For example, the head 42 is driven at a driving frequency of 1
At 4.4 kHz (14400 ejections per second), 20 ejection openings for ejecting the ink 44 are arranged for each of the red ink R, the green ink G, and the blue ink B, and the ejection openings are arranged in one ink filling recess 32. Assuming that the ink 44 is ejected three drops at a time,
The time required to fill the ink 44 into the ink filling recess 32 for a color filter of 10-type VGA with about 900,000 pixels is 900,000 × 3 drops / (14400 times × 20 pieces × 3 colors) = about 3
Seconds. Here, even if the time for the head 42 to move between the ink filling recesses 32 is considered, the ink 4
4 can be filled.

According to the pigment dispersion method, since the formation time for each color by the lithography method takes at least 30 minutes, R, G, B,
A minimum of about 90 minutes is required for three colors. In comparison with this, in the present embodiment, the filling of the ink 44 takes 2 to 3 minutes, and the subsequent steps from resin application to separation take 3 to 3 minutes.
The color filter can be formed in about 5 minutes, and the color filter can be formed in a shorter time than in the related art.

In FIG. 4A, for example, R, G, and B color inks 44 are supplied by the head 42 to the ink filling recess 3.
2 shows a state in which the colored pattern layer 40 is formed by ejecting the colored pattern layer 40. The inks 44 used for these may include a substance containing a coloring material and curable by energy application.

Such components are not particularly limited as long as they do not affect the color characteristics of the color material of each color and do not cause a problem such as solidification in the ink.
Examples of the resin include a resin containing a component that can be cured by light curing or heat curing, or by both light and heat.
Specifically, an acrylic resin, an epoxy resin, or the like is preferably used because various photosensitive agents, curing agents, and the like can be used as commercial products.

Then, the ink 44 is filled into all the ink filling recesses 32. When the ink 44 contains a solvent component, the solvent of the ink 44 is volatilized by performing a heat treatment. The conditions of this heat treatment are determined in consideration of the boiling point of the solvent component contained in the ink 44 and the like. The solvent component used in the ink 44 is not particularly limited, and water or various organic solvents can be used. However, the ink 44
It is preferable to use a solvent having a relatively high boiling point in order to prevent the ink 44 from solidifying and clogging in the ink discharge ports and the ink flow paths of the head 42 due to volatilization of the solvent during use. Specifically, the range of the boiling point of the solvent is preferably from 80 to 200 ° C. in view of the workability of removing the solvent. The heat treatment condition in this case is 50 to 200 ° C.
It is preferable that the heating is performed for about 2 to 10 minutes when using a hot plate and about 20 to 30 minutes when using a baking furnace.

The colored pattern layer 40 contracts when the solvent is removed, but it is necessary to fill the ink amount enough to secure the required color density with the thickness after the contraction.

Next, as shown in FIG. 4B, a light-transmitting layer 46 is formed on the ink-filled layer 30 on which the colored pattern layer 40 is formed, and a light-transmitting reinforcement is further formed thereon. The plate 48 is placed. Placing the reinforcing plate 48 increases the strength of the color filter.

The reinforcing plate 48 is selected according to the color filter to be manufactured. For example, a glass substrate or a plastic such as polycarbonate, polyarylate, polyether sulfone, amorphous polyolefin, polyethylene terephthalate or polymethyl methacrylate is used. It is composed of a substrate or a film.

The substance constituting the light transmitting layer 46 includes
There is no particular limitation as long as it does not affect the color characteristics of the colored pattern layer 40, and various resins can be used. In particular, the photocurable acrylic resin uses various commercially available precursors and photosensitizers (photopolymerization initiators),
It is preferable because it can be cured in a short time by light irradiation and form a resin layer having excellent optical characteristics.
Specific examples of the basic composition of the photocurable acrylic resin include:
Since the same one as described in the formation of the ink filling layer 30 can be used, the description is omitted.

The light-curable resin is applied on the colored pattern layer 40 to form the light-transmitting layer 46. Then, the reinforcing plate 48 is placed thereon to apply energy,
The light transmitting layer 46 is cured so as to adhere to the reinforcing plate 48.

In particular, when the colored pattern layer 40 and the light transmissive layer 46 are set so as to be curable with the same energy, the light transmissive layer 46 is formed before the colored pattern layer 40 is cured. By applying a resin to be applied and simultaneously applying energy and curing at the same time, it is possible to integrate strongly.

When the ink filling layer 30, the colored pattern layer 40, the light transmissive layer 46, and the reinforcing plate 48 are integrated as described above, they are separated from the holding plate 34 to complete the color filter shown in FIG. Goods can be obtained.

Note that depending on the material, the adhesion between the holding plate 34 and the ink-filled layer 30 may be increased, and the two may be difficult to peel off. In this case, as shown in FIG. 5, a release layer 36 made of a material having low adhesion to the ink filling layer 30 may be formed on the holding plate 34. As the release layer 36, for example, Ni, Cr, Ti, Al, C
A metal made of any one of u, Ag, Au, and Pt, an alloy made of two or more of these, or a compound containing at least one of these is preferable.
These substances generally have low adhesion to an acrylic resin, which is preferably used in terms of excellent light transmittance as a substance for forming the ink filling layer 30, and are formed by a vacuum film forming method such as sputtering, vapor deposition, or CVD. By using this, a film can be formed with good controllability. In addition, such a release layer 36
May have a thickness of about several tens to several thousand angstroms.

(Second Embodiment) FIGS. 6A to 8C
FIG. 4 is a view for explaining a second embodiment of the present invention, and more specifically, a view for explaining steps which can be applied in place of the steps shown in FIGS. 1 (A) to 2 (C) to form a duplicate disc. It is.

First, as shown in FIG.
2 is formed with a resist layer 114. The substrate 112 is used for etching the surface to form the master 110 (see FIG. 6E), and is not particularly limited as long as it is an etchable material. This is preferable because it is easy to form an uneven pattern with high accuracy.

As a material and a method for forming the resist layer 114, the same materials and methods as those shown in the first embodiment (see FIG. 1A) can be used, and the description is omitted.

Next, as shown in FIG.
16 is disposed on the resist layer 114, and only a predetermined area of the resist layer 114 is exposed to radiation 118 through a mask 116.
Exposure by.

The mask 116 is patterned so as to transmit the radiation 118 only in a region other than the region corresponding to the projection to be formed.
Only in that the pattern is inverted from the mask 16 shown in FIG.

The radiation has a wavelength of 200 nm to 5 nm.
It is preferable to use light in the region of 00 nm. The use of light in this wavelength region makes it possible to use the photolithography technology established in the liquid crystal panel manufacturing process and the like and the equipment used therefor, and to reduce costs.

Then, the resist layer 114 is irradiated with radiation 118.
After exposure, the substrate 112 is selectively removed by exposing only the exposed region 117 by the radiation 118, and the other regions are exposed to resist, as shown in FIG. 6C. The state remains covered by the layer 114.

When the resist layer 114 is patterned in this way, as shown in FIG.
Using the mask 14 as a mask, the substrate 112 is etched to a predetermined depth. As an etching method, the first embodiment (FIG. 1)
(Refer to (D)), the same method as that described in (D) can be used, and the description is omitted.

Next, when the etching is completed, FIG.
As shown in (E), the resist layer 114 is removed to obtain the master 110. Once manufactured, the master 110 is economical because it can be used repeatedly as many times as durability permits.

Next, FIGS. 7A and 7B are diagrams showing steps of forming an intermediate plate.

The intermediate master 100 is formed on the surface of the master 110 on which the uneven pattern 119 is formed. For more information,
An intermediate master precursor for forming the intermediate master 100 was used as the master 1
7A, the master 110 and the base 120 are bonded together via an intermediate master precursor as shown in FIG. 7A.
The base 120 is used to reinforce the intermediate board 100 in the steps shown in FIGS. 7A to 8C and is not always necessary.

Here, the intermediate precursor is preferably a liquid or liquefiable substance in consideration of workability. By making the precursor of the intermediate disc liquid, it becomes easy to transfer the shape of the irregularities 119 on the master disc 110. As the liquid substance, a substance that can be cured by applying energy can be used, and as the liquefiable substance, a plastic substance can be used.

Further, the master 110 is used as an intermediate master precursor.
Good mold releasability and transferability of the concavo-convex pattern from the intermediate plate, and have a process resistance in the process of forming a duplicated plate from the intermediate plate in the subsequent process, and the concavo-convex pattern from the intermediate disc to the duplicated disc. The material is not particularly limited as long as it has good transferability, but a resin is preferable. A resin having energy curability or plasticity can be easily obtained. In addition, resin is preferable because it has good mold releasability from silicon or quartz, which is excellent as a master material in that high-precision etching is possible.

Examples of the resin having energy curability include:
Desirably, it can be cured by applying at least one of light and heat. For the use of light and heat, a general-purpose exposure apparatus, a heating apparatus such as a baking furnace or a hot plate can be used, and equipment cost can be reduced. Specifically, an acrylic resin, an epoxy resin, a melamine resin, a polyimide resin, or the like is preferably used.

As the resin having plasticity, specifically, thermoplastic resins such as polycarbonate resin, polymethyl methacrylate resin, and polyolefin resin are preferably used. Such a resin is plasticized by heating to a temperature equal to or higher than the softening point, and is used in a liquid state.

By bonding the master 110 and the base 120 via the liquid or liquid intermediate precursor as described above, the intermediate master precursor has a shape corresponding to the irregularities 119 of the master 110. When the master 110 and the base 120 are bonded together as necessary, the master 110 and the base 1
The pressure may be applied via at least one of the two. By applying the pressure, the time required for the intermediate master precursor to be deformed according to the irregularities 119 of the master 110 can be shortened, so that workability is improved, and filling of the concaves with the irregularities 119 is ensured.

Then, the intermediate plate precursor is solidified by subjecting the intermediate plate precursor to a solidification treatment, whereby the intermediate plate 100
Is formed, and then, as shown in FIG.
The intermediate plate 100 and the base 120 are peeled from 0.

The intermediate plate 100 thus obtained has an uneven pattern 102 corresponding to the unevenness 119 on the master 110.
Are formed. The concavo-convex pattern 102 on the intermediate disc 100 has the same shape as the master disc 10 shown in FIG.
02a and a convex portion 102b.

FIGS. 8A to 8C show a process of forming a duplicate disc from an intermediate disc. First, as shown in FIG. 8A, the concavo-convex pattern 102 formed on the intermediate board 100 is formed.
A metal film 132 is formed thereon, and as shown in FIG.
A metal layer 134 is further formed on the metal film 132, and FIG.
As shown in (C), the metal film 132 and the metal layer 134
Is separated from the intermediate board 100 to obtain a duplicate board 130.

Note that this step is performed in the steps shown in FIGS.
Since the process is the same as the process shown in FIG. In this step, the intermediate board 100 can be repeatedly used as long as durability is allowed.

By the above-described steps, a duplicate disc 130 is obtained as in the first embodiment.
A color filter can be manufactured by steps similar to those shown in FIGS.

(Third Embodiment) FIGS. 9A to 9C
FIG. 3 is a view for explaining a third embodiment of the present invention. More specifically, FIGS. 3A to 3C show a method for forming an ink-filled layer having a light-shielding layer (black matrix). It is a figure showing a process which can be applied instead of a process.

In FIG. 9A, the concavo-convex pattern 226 of the duplication disc 220 obtained by any of the above-mentioned methods is shown.
A head 234 that ejects ink by an ink jet method is arranged so as to face the surface on which is formed.

As the head 234, the ink-jet type head 42 used to fill the R, G, and B inks 44 into the ink filling recesses 32 in the step of FIG. The description can be omitted because the object can be used.

Further, the concave and convex pattern 226 of the duplication board 220
4A correspond to the ink filling recess 32 shown in FIG. 4A, and the recess 226a corresponds to a region between the colored pattern layers 40.

In FIG. 9A, the head 234
The ink 235 having a light-shielding property is applied to the concave portion 2
The state in which the light-shielding layer 236 is formed by discharging the ink to the substrate 26a is shown.

The ink 235 having a light-shielding property is not particularly limited. Specifically, for example, an ink containing carbon, a black pigment or a black dye can be suitably used.

The light-shielding ink 235 may include a substance which can be cured by applying energy. Such components are not particularly limited as long as they do not impair the light-shielding properties of the ink and do not cause a problem such as coagulation in the ink. For example, photocuring or thermosetting or both light and heat Resins containing a component curable by any of them can be used. Specifically, an acrylic resin, an epoxy resin, or the like is preferably used because various photosensitive agents, curing agents, and the like can be used as commercial products.

When the light-shielding layer 236 is formed as described above, the adhesion between the duplicate disk 220 and the light-shielding layer 236 may be increased depending on the material. And
When the light-shielding layer 236 and the ink-filled layer 211 are solidified and peeled off from the duplication plate 220 integrally (see FIG. 9C)
In addition, the occurrence rate of defective products such as the lack of the light-shielding layer 236 and the ink filling layer 211 and the occurrence of cracks are increased, the time required for peeling is reduced, and the productivity is reduced.
It is conceivable that the durability of the copy board 220 is reduced.

Therefore, it is preferable to add a release agent to the ink 235 having a light-shielding property in advance so that the light-shielding layer 236 can be easily released from the duplication plate 220.

The ink 235 containing a solvent component is subjected to a heat treatment to evaporate the solvent of the ink. The conditions for this heat treatment are determined in consideration of the boiling point of the solvent component contained in the ink. As the solvent component used in the ink,
There is no particular limitation, and water or various organic solvents can be used. However, it is preferable to use a relatively high boiling point ink in order to prevent the ink from being solidified and clogged in the ink discharge ports and the ink flow paths of the head 234 due to the volatilization of the solvent during use of the ink.
Specifically, the range of the boiling point of the solvent is preferably from 80 to 200 ° C. in consideration of the workability of removing the solvent. The heat treatment conditions in this case are desirably 50 to 200 ° C. for about 2 to 10 minutes when using a hot plate, and about 20 to 30 minutes when using a bake furnace.

The light-shielding layer 236 shrinks when the solvent is removed, but it is necessary to fill the ink amount enough to secure the required light-shielding property with the thickness after the shrinkage.

Next, as shown in FIG. 9B, an ink-filled layer 211 is formed on the light-shielding layer 236, and the holding plate 210 is mounted thereon.

As the substance for forming the ink filling layer 211, the same substance as described above can be used, and a substance having good adhesion to the light-shielding layer 236 is particularly preferable.

When a liquid material that can be cured by applying energy is used as a material for forming the ink filling layer 211, the ink filling layer 211 is formed by curing and solidifying by applying energy.

Particularly, the light-shielding layer 236 and the ink-filled layer 2
In the case where both are set so that they can be cured by applying the same energy, the ink-filled layer 211 is formed before the light-shielding layer 236 is cured, and the energy is simultaneously applied and cured simultaneously. , And can be firmly integrated.

Further, the holding plate 210 is provided in the above-mentioned FIG.
Is omitted since it is the same as the holding plate 34 shown in FIG.

Then, as shown in FIG. 9C, the holding plate 210, the ink filling layer 211, and the light-shielding layer 236 are integrally peeled off from the duplication plate 220, and the ink in which the light-shielding layer 236 is integrated is formed. An ink filling layer 211 having a filling recess 212 is formed.

Further, subsequently, FIGS.
Similarly to the step shown in FIG. 3C, a colored pattern layer 240 is formed in the ink filling recess 212, and the light transmitting layer 2
46 is formed, and a reinforcing plate 248 is placed thereon. Thus, as shown in FIG.
Is obtained.

According to the method of manufacturing a color filter according to the present embodiment, a high-definition color filter having excellent flatness and having no uneven color density can be obtained at low cost. Also,
It is also possible to incorporate the BM economically and with high accuracy.

(Fourth Embodiment) FIGS. 11A to 11
(C) is a diagram showing a manufacturing process of the color filter according to the fourth embodiment of the present invention, and is a diagram illustrating a process that can be applied instead of the process shown in FIGS. 3 (A) to 4 (C). .

First, as shown in FIG. 11A, an ink filling layer 311 is formed. Specifically, a liquid ink filling layer precursor is provided on the holding plate 310, and the ink filling layer precursor is solidified to form the ink filling layer 311. Here, the ink filling layer precursor also flows into the spacer forming recesses 328 of the holding plate 310, so that the spacers 330 protruding from the ink filling layer 311 are formed corresponding to the spacer forming recesses 328. In addition, the ink filling layer 3
11, the ink filling recess 312 is formed by the method described in the above embodiment or the like.

Thereafter, as in the steps shown in FIGS. 4A and 4B, all the ink filling recesses 312 are filled with ink to form a colored pattern layer 315. Then, a light transmitting layer 316 is formed, and a reinforcing plate 317 is placed thereon. Then, the ink filling layer 31
The holding plate 310 is peeled from 1.

Thus, the color filter shown in FIG. 11C is obtained.

According to the present embodiment, the ink filling layer 31
A spacer 330 is integrally formed on the side opposite to the ink filling recess 312 in FIG. Therefore, a color filter integrated with a spacer can be manufactured.
The spacer 330 can be formed in a desired shape corresponding to the shape of the spacer forming concave portion 328, for example, a stripe pattern, a square pillar or a columnar isolated pattern. Regardless of the shape, the width or diameter is 10 to 20
It is preferably set to μm. In the case of a stripe pattern, although the strength is higher than that of an isolated pattern, the stripe pattern may be conspicuous when incorporated in a liquid crystal panel. In the case of an isolated pattern, a columnar shape without corners can reduce alignment unevenness of the liquid crystal near the spacer structure.

It is preferable that the spacers 330 are provided between the colored pattern layers 315 to be pixels in order to make the spacers inconspicuous when a liquid crystal panel is formed.

(Other Embodiments) Next, FIG.
FIGS. 12A to 12C are diagrams illustrating a process of manufacturing a color filter according to the fifth embodiment of the present invention. In this embodiment,
This is a modification of the shape of the concave portion 226a of the duplication board 220 shown in FIG.

That is, as shown in FIG. 12A, the bottom surface 428b of the concave portion 428 formed in the duplication board 426 is smaller than the opening 428a by being tapered. By using this duplication board 426, FIG.
As shown in (B), the light-shielding layer 436 is formed by filling the recess 428 with ink having light-shielding properties, and the ink-filled layer 411 is formed thereon.

Then, the ink-filled layer 411 and the light-shielding layer 436 are integrally peeled off from the duplicating plate 426 to obtain the ink-filled layer 411 having the ink-filled recesses 412 in which the light-shielding layer 436 is integrated. After that, as shown in FIG. 12C, the ink filling recess 412 is filled with ink to form a colored pattern layer 415.

According to the color filter thus obtained, as shown in FIG.
A light-shielding layer 436 smaller than the opening 428a of the M.28 is formed. That is, in the present embodiment, it is easy to fill the concave portion 428 of the duplication plate 426 with the ink having the light-shielding property, and it is possible to meet the demand for the finer light-shielding layer accompanying the recent increase in the aperture ratio of the color filter. . Moreover, in the present embodiment, as shown in FIG. 12A, the opening 428 a of the concave portion 428 is larger than the bottom surface 428, so that the ink filling layer 411 and the light shielding layer 412 can be easily separated from the duplicate plate 426. It can be carried out.

The recess 428 may be modified as shown in FIGS. 13A and 13B. That is, as shown in FIG.
58 is provided with a taper 458a at the opening. According to the concave portion 458, as shown in FIG. 13B, the ink filling concave portion 442 of the ink filling layer 441 is
Although the bottom surface has a shape with a taper 442a, the light-shielding layer 466 has an upright shape.
According to this embodiment, the light-blocking layer 466 is formed as shown in FIG.
Can be formed in the same shape as the light-shielding layer 236 shown in FIG.

[0155]

[Brief description of the drawings]

FIGS. 1A to 1E are diagrams showing a process of manufacturing a master according to a first embodiment.

FIGS. 2A to 2C are diagrams illustrating a process of manufacturing a duplicate disc from a master in the first embodiment.

FIGS. 3A to 3C are diagrams illustrating a process of forming an ink-filled layer having an ink recess in the first embodiment.

FIGS. 4A to 4C are views showing a process of forming a colored pattern layer in a concave portion for ink to obtain a color filter in the first embodiment.

FIG. 5 is a diagram illustrating a modification of the first embodiment;

FIGS. 6 (A) to 6 (E) are views showing steps of manufacturing a master in the second embodiment.

FIGS. 7A and 7B are diagrams illustrating a process of manufacturing an intermediate master from a master according to the second embodiment.

FIGS. 8A to 8C are diagrams showing a process of manufacturing a duplicate disc from an intermediate disc in the second embodiment.

FIGS. 9A to 9C are diagrams illustrating a process of forming an ink-filled layer having a light-shielding layer in the third embodiment.

FIG. 10 is a diagram illustrating a color filter obtained according to a third embodiment.

FIGS. 11A to 11C are diagrams illustrating a process of manufacturing a color filter according to a fourth embodiment of the present invention.

FIGS. 12A to 12C are diagrams illustrating a process of manufacturing a color filter according to another embodiment of the present invention.

13 (A) and 13 (B) are views showing a process for manufacturing a color filter according to another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Master disk 12 Substrate 19 Concavo-convex pattern 20 Duplicating board 26 Concavo-convex pattern 30 Ink filling layer 32 Ink filling recess 34 Holding board 40 Colored pattern layer 46 Light transmission layer 48 Reinforcement plate

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Mutsumi Yoshizawa 3-3-5 Yamato, Suwa City, Nagano Prefecture Inside Seiko Epson Corporation (72) Inventor Atsushi Takakuwa 3-3-5 Yamato Suwa City, Nagano Prefecture Seiko Epson Inside the company

Claims (30)

[Claims] A first step of forming a master having a first uneven pattern; a second step of forming a replica having a second uneven pattern transferred from the first uneven pattern; A third step of forming an ink-filled layer having an ink-filled concave portion transferred from the uneven pattern of No. 2, and forming a colored pattern layer by filling the ink-filled concave portion with ink of a preset color. A method for manufacturing a color filter, comprising: four steps; and a fifth step of forming a light-transmitting layer on the ink-filled layer on which the colored pattern layer is formed. 2. The method for manufacturing a color filter according to claim 1, wherein the first concave / convex pattern of the master is formed by etching through a lithography method. 3. The method of manufacturing a color filter according to claim 1, wherein the master forms a resist layer patterned on the base in accordance with the first uneven pattern, and the resist on the base is formed on the base. A method for producing a color filter obtained by forming a conductive layer on a surface on which a layer is formed, forming a metal layer on the conductive layer by electroforming, and peeling the metal layer from the base. 4. The method for manufacturing a color filter according to claim 2, wherein the master is made of silicon or quartz. 5. The method for manufacturing a color filter according to claim 1, wherein the master is made of a conductive material, and the duplicate master is formed by electroforming on a surface of the master on which the first uneven pattern is formed. After forming a metal layer by
A method for producing a color filter obtained by peeling the metal layer from the master. 6. The method for manufacturing a color filter according to claim 1, wherein the master is made of an insulating material, and the duplicate master is a conductive layer formed on a surface of the master on which the first uneven pattern is formed. And forming a metal layer on the conductive layer by an electroforming method, and peeling the metal layer from the master to produce a color filter. 7. A first step of forming a master having a first uneven pattern, a second step of forming an intermediate board having a second uneven pattern transferred from the first uneven pattern, A third step of forming a duplicate disc having a third concavo-convex pattern transferred from the second concavo-convex pattern, and a fourth step of forming an ink-filled layer having an ink-filled concavity transferred from the third concavo-convex pattern A fifth step of forming a colored pattern layer by filling the ink filling recess with ink of a preset color; and forming a light-transmitting layer on the ink filled layer on which the colored pattern layer is formed. A color filter manufacturing method comprising: 8. The method for manufacturing a color filter according to claim 7, wherein the master is made of silicon or quartz. 9. The method for manufacturing a color filter according to claim 7, wherein in the step of forming the intermediate disk, an intermediate disk precursor is formed on a surface of the master disk on which the first uneven pattern is formed. A method for producing a color filter, comprising: a step of applying; a step of solidifying the intermediate disk precursor to form an intermediate disk; and a step of separating the intermediate disk from the master disk. 10. The method of manufacturing a color filter according to claim 9, wherein the intermediate plate precursor contains a substance curable by application of energy. 11. The method for manufacturing a color filter according to claim 10, wherein the energy is at least one of light and heat. 12. The method for manufacturing a color filter according to claim 9, wherein the intermediate plate precursor is a substance having thermoplasticity. 13. The method for manufacturing a color filter according to claim 7, wherein the intermediate plate is made of a resin. 14. The method for producing a color filter according to claim 7, further comprising a step of attaching a base to said intermediate plate. 15. The method for manufacturing a color filter according to claim 7, wherein the duplicated disc has a conductive layer on a surface of the intermediate disc on which the second uneven pattern is formed. And forming a metal layer on the conductive layer by electroforming, and peeling the metal layer from the master to produce a color filter. 16. The method for manufacturing a color filter according to claim 1, wherein the step of forming the ink filling layer includes filling the ink on a surface of the duplicate disc on which the concavo-convex pattern is formed. A method for producing a color filter, comprising: applying a layer precursor; solidifying the ink-filled layer precursor to form an ink-filled layer; and peeling the ink-filled layer from the replica. 17. The method for manufacturing a color filter according to claim 16, wherein the ink-filled layer precursor contains a substance curable by application of energy. 18. The method of manufacturing a color filter according to claim 17, wherein the energy is at least one of light and heat. 19. The method for manufacturing a color filter according to claim 16, wherein the ink-filled layer precursor is a substance having thermoplasticity. 20. The method of manufacturing a color filter according to claim 1, wherein the ink-filled layer is made of a resin. 21. The method for producing a color filter according to claim 16, wherein before the ink filling layer precursor is applied on the surface of the duplicate disc on which the uneven pattern is formed. Forming a light-shielding layer by filling light-shielding ink into the concave portions of the concave-convex pattern of the replica disc; after solidifying the ink-filling layer precursor, the light-shielding layer is integrated with the ink-filling layer. A method for manufacturing a color filter, wherein the ink-filled layer is obtained by peeling the ink-filled layer from the duplicate disc, and the ink-filled layer has the light-shielding layer around the ink-filled recess. 22. The method for manufacturing a color filter according to claim 21, wherein the light-shielding ink is filled by an ink-jet method. 23. The method of manufacturing a color filter according to claim 21, wherein the concave portion of the duplicate disc has a bottom surface smaller than an opening. 24. The method of manufacturing a color filter according to claim 21, wherein the concave portion of the duplicate disc has a tapered opening. 25. The method for manufacturing a color filter according to claim 16, wherein in the step of forming an ink-filled layer, a holding board is in close contact with the duplicate disc via the ink-filled layer precursor. In the step of forming the colored pattern layer and the light-transmitting layer, the ink-filled layer is advanced in a state in which the ink-filled layer is in close contact with the holding plate. Of producing a color filter to be removed from a color filter. 26. The method of manufacturing a color filter according to claim 25, wherein the holding plate is provided with a recess for forming a spacer on a surface on a side in contact with the ink filling layer precursor. And a method of manufacturing a color filter in which a spacer convex portion corresponding to the spacer forming concave portion is formed. 27. The method for manufacturing a color filter according to claim 25, wherein a release layer having low adhesion to the ink-filled layer precursor is formed on the holding plate. 28. The method of manufacturing a color filter according to claim 1, wherein in the step of forming the light-transmitting layer, the light-transmitting layer is made of a light-transmitting material. A method for manufacturing a color filter, wherein the color filter is formed by being applied on an ink filling layer, and a light-transmitting reinforcing plate is placed on the material. 29. The method for manufacturing a color filter according to claim 1, wherein the ink is filled by an ink jet method in the step of forming the colored pattern layer. 30. A color filter manufactured by the method according to claim 1. Description: