JPH1130356A - Actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a load to a rotor, to reduce input of an exciting coil and to miniaturize a driving part. SOLUTION: A stator 32 having an exciting coil 33 and standing still and a rotor 30 to rotationally work are made to work without generating contact resistance for airtight sealing by separating them airtight by a bulkhead 40. Additionally, energizing force of an energizing body 39 to energize a flow regulating body 38 in the axial direction is made to work between itself and a moving body 36, and it is devised so that the energizing force of the energizing body 39 does not become load resistance against rotation of the rotor 30 in the middle of movement of the moving body 36. Consequently, it is possible to prevent frictional resistance loss by airtight sealing in certain airtight sealing structure by the bulkhead, to reduce a load to the rotor by eliminating load resistance by energizing force to the flow regulating body, to reduce input of the exciting coil and to miniaturize a driving part of the rotor or the stator, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator for controlling a flow of a fluid in a flow path.

[0002]

2. Description of the Related Art Conventionally, there is an actuator of this type as disclosed in Japanese Patent Laid-Open No. Hei 5-71655. The configuration will be described below with reference to FIGS. FIG.
Is a first conventional example, in which a valve body 2 is provided facing a valve seat 1 in a fluid passage. The valve body 2 is mounted on a flange 5 attached to an opening 4 of the fluid passage 3. It is attached via a spring 6 which urges in the direction of pressing on 1. 7
Is a valve stem having one end connected to the valve body 2. The valve stem 7 extends through the through hole 8 of the flange 5 to the outside of the fluid passage. A feed male screw 9 is formed. Reference numeral 10 denotes a feed female screw formed on the inner peripheral surface of the rotor 11. The feed female screw 10 is screwed to the feed male screw 9. Reference numeral 12 denotes a permanent magnet provided on the outer peripheral side of the rotor 11;
Reference numeral 3 denotes a stationary electromagnetic coil provided to face the permanent magnet 12 with a gap therebetween, 14 denotes bearings provided at both ends of the rotor 11 to support the rotation of the rotor 11, and 15 denotes a mounting plate fixed to the flange 5. . Reference numeral 16 denotes an O-ring provided in the through hole 8 for preventing the fluid in the fluid passage 3 from leaking to the outside from the gap between the valve rod 7 and the flange 5. Reference numeral 17 denotes a rotation preventing portion provided at an end of the valve stem 7 for preventing rotation of the valve stem 7. In this configuration, the power supply to the electromagnetic coil 13 is controlled to rotate the rotor 11, and the valve stem 7 screwed to the rotor 11 is linearly moved in the axial direction.

FIG. 10 shows a second conventional example, in which the O-ring 16 contacting the valve rod 7 of the first conventional example is eliminated. Reference numeral 18 denotes a rotor provided with a permanent magnet 19 on the outer peripheral side. A rotary shaft 20 fixed to the rotor 18 has a feed male screw 21 at an end thereof. Reference numeral 22 denotes a non-magnetic pipe arranged with a gap on the outer peripheral side of the rotor 18,
An electromagnetic coil 23 is provided on the outer peripheral side of the pipe 22, and O-rings 2 serving as sealing members are provided on both ends of the pipe 22.
4 to form a motor, the motor mounting plate 25 and the valve body 2
A valve body moving means 27 connected to the valve body 2 at one end thereof is provided with a spring 26 therebetween, and is screwed to the feed male screw 21 of the rotary shaft 20. Reference numeral 28 denotes a rotation preventing portion for preventing rotation of the valve body moving means 27 mounted on the motor mounting plate 25. In this configuration, the fluid in the fluid flow path 3 is prevented from leaking to the outside by the O-ring 24 of the pipe 22.

[0004]

However, in the first conventional example, the O-ring 1 provided between the through hole 8 and the valve stem 7 is not provided.
6, the O-ring 16 is in close contact with the valve stem 7, so that the driving force must be increased by generating frictional resistance to move the valve stem 7, thereby increasing the size of the drive unit of the shut-off valve. Large input was caused. In addition, the O-ring 16 adheres to the valve stem 7 due to aging, and the operation of the valve body 2 is hindered, so that there is a problem in reliability.

In the second conventional example, since the valve body 2 is constantly urged by the spring 26, the motor constantly receives resistance due to the urging force of the spring 26 during its operation. That is, when the valve is opened, it is necessary to overcome the urging force of the spring 26 to move the valve body 2.
Is applied to the feed screw portion as axial thrust to generate frictional resistance. Since the urging force of the spring 26 acts as a load resistance to the motor, it is necessary to increase the output of the motor, thereby increasing the motor input and increasing the size of the motor. There were challenges.

[0006] In particular, when a motor is driven by a battery having a limited capacity or a limited voltage, low input and high output have been major issues in deciding the feasibility of practical use.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides an air-tight seal by separating a stationary stator having an exciting coil and a rotatable rotor by a partition wall. Operate without generating contact resistance, and apply the urging force of the urging body that urges the flow regulating body in the axial direction between the moving body and the urging force of the urging body during the movement of the moving body. Is designed not to become a load resistance to the rotation of the rotor.

According to the above-mentioned invention, a reliable hermetic seal structure using a partition wall can prevent a frictional resistance loss due to the hermetic seal, and a load on a rotor can be reduced by eliminating a load resistance due to an urging force applied to a flow regulating member. Low input of the exciting coil and downsizing of a drive unit such as a rotor or a stator can be realized.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention provides a rotor having magnetic poles, a stator having an exciting coil, a rotor rotating shaft provided on the rotor, a feeding means provided on the rotor rotating shaft, and a screw provided on the feeding means. The moving body to be engaged or engaged, the rotation preventing body for restricting the rotation of the moving body, and the urging body for urging in the axial direction are interposed and movably connected to the moving body in the axial direction. A flow restrictor, and a partition disposed on the gap between the rotor and the stator and on one end face side of the rotor and integrally formed to airtightly separate the stator and the rotor on the fluid side. is there. Then, a reliable and highly reliable airtight seal structure can be formed by the partition wall, and the frictional resistance loss can be prevented by the airtight seal, and the urging force to the flow restricting body can be prevented from acting as a load resistance on the rotation of the rotor, The input of the stator can be reduced and the size of the drive unit such as the rotor or the stator can be reduced.

[0010] Further, there is provided a shaft hole provided at the center of the rotor rotation shaft, and a support shaft inserted into the shaft hole to support the rotation of the rotor, wherein the support shaft is fixed to the partition. . The rotor is supported at the small diameter portion by the support shaft, the frictional resistance is reduced by the reduction of the contact radius, the low input is promoted, and the downsizing of the shaft support configuration enables the actuator to be downsized.

Further, one end of the support shaft is joined to the shaft support,
This shaft support is joined to the partition. Even when the partition is made of an extremely thin material, the support shaft can be securely and securely attached to the partition with increased bonding strength. Reliability can be improved.

The shaft support is made of a magnetic material. Even if the partition wall is made of a non-magnetic material, the magnetic material can be arranged on the side surface of the rotor, so that the magnetic resistance of the magnetic circuit between the rotor and the stator can be reduced, the magnetic driving force can be improved, and the rotational power can be increased. realizable.

Further, a sealing portion is provided on the flow regulating body side of the shaft hole of the rotor rotating shaft. In addition, it is possible to prevent dust, foreign matter, and the like from entering the support shaft portion from the flow restricting body side, thereby maintaining stable rotation and improving reliability. Further, it is possible to prevent wear powder generated on the support shaft portion or applied lubricant from flowing out to the fluid side, and it is possible to use the fluid for a clean fluid.

Further, the flow restricting body and the moving body are connected by a locking portion provided with a play in the radial direction, and the flow restricting body can be swung with respect to the moving body. When there is an error in the mounting of the actuator to the fluid passage, for example, even when the actuator is installed inclined with respect to the valve seat, the flow regulating body can normally close the valve seat of the fluid passage by the swinging operation, and reliable fluid control is achieved. The operation is performed, and the reliability can be further improved.

Further, the bearing has a bearing for supporting the outer periphery of the rotor rotating shaft and a bearing holding portion integrally formed with the partition, and the bearing is held by the bearing holding portion. Since the bearing holding portion is formed integrally with the partition wall, the gap between the rotor and the partition wall is further reduced by high-precision processing without misalignment, and the strength of the partition wall can be improved by forming irregularities, so that the partition wall is thinned. And the rotational force of the rotor can be improved.

[0016] Further, there is provided an attachment body to which the partition wall, the stator and the rotation preventing body are fixed, and a bearing body for receiving a thrust load in the axial direction of the rotor rotating shaft, between the attachment body and the rotor. And. While preventing the rotor from moving in the axial direction due to the thrust load generated in the axial direction and coming into contact with components such as the partition wall or the mounting body,
Prevents dust and foreign matter from entering the rotor side from the fluid side to maintain stable rotation and improve reliability.

[0017]

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiments 1 and 2) FIG. 1 is a sectional view showing the valve-opened state of an actuator according to Embodiments 1 and 2 of the present invention, and FIG. 2 is a sectional view showing Embodiments 1 and 2 of the present invention. It is sectional drawing which shows the valve-closing state of 2 actuators. In FIG. 1, reference numeral 30 denotes a rotor having a magnetic pole 31 formed of a permanent magnet on an outer peripheral portion, 32 denotes a stator surrounding an excitation coil 33 and formed of a magnetic material, and the stator 32 faces the outside of the magnetic pole 31 of the rotor 30. Are located. 34
Numeral denotes a rotor rotating shaft provided on the rotor 30. A feeding means 35 is provided on an outer peripheral portion of the rotor rotating shaft 34. In this embodiment, a male screw formed by a spiral groove (or projection) is used as the feeding means 35. . Reference numeral 36 denotes a moving body provided with a female screw screwed to the feeding means 35, and 37 denotes a rotation preventing body for preventing the moving body 36 from rotating with respect to the rotor rotation shaft 34. Numeral 38 denotes a flow restricting member which is disposed in the fluid passage 3 and regulates the flow state of the fluid. The flow restricting member 38 is connected to the moving member 36 so as to be movable in the axial direction.
An urging member 39 is interposed between the moving body 36 and the flow restricting member 38 and applies an urging force to move away from each other in the axial direction. The flow restricting body 38 is a valve rubber plate 38a abutting on the valve seat 1.
Is attached to the valve rubber holding portion 38b and is fixed by the valve rubber retainer 38c. 40 is a rotor 30 on the fluid side
And the flow restrictor 38 side and the stator 32 side which are connected thereto are airtightly separated from the stator 32 side.
Cylindrical portion 4 arranged at a small distance (0.05-0.2 mm) from rotor 30 in the gap between
0a and a side surface portion 4 arranged on one end surface side of the rotor 30
0b is integrally formed of a non-magnetic material.
Reference numeral 41 denotes a support shaft having one end fixed to the cylindrical portion 40 a of the partition wall 40. The support shaft 41 is inserted into a shaft hole 42 provided at the center of the rotor rotation shaft 34 to support the rotation of the rotor 30. Reference numeral 41a denotes a relief portion provided on the support shaft 41, so that the front end portion and the root portion of the support shaft 41 reliably contact the shaft hole. Here, the feeding means 35 and the moving body 3
In the case of No. 6, the case was considered in which the spiral ridges and grooves were screwed together. However, the spiral ridges and grooves may be discontinuous. A point contact method having points may be used. Reference numeral 43 denotes a mounting body on which the partition wall 40 and the stator 32 are mounted. The mounting body 43 is provided with a through hole 43a through which the rotor rotating shaft 34 passes. 44 is a side surface portion 40b of the stator 32 and the partition wall 40.
45 is a flange portion 40c of the partition wall 40.
An O-ring 46 provided between the mounting member 43 and the airtight seal 46;
Is an O-ring for hermetically sealing between the fluid passage 3 and the mounting body 43.

Next, the operation will be described. First, a drive circuit (not shown) connected to the exciting coil 33 of the stator 32 sequentially energizes the exciting coil 33 in the valve closing direction so that the rotor 3
An electromagnetic force is applied to the zero magnetic pole to rotate the rotor 30 around the support shaft 41, and a force is applied to the moving body 36 screwed to the rotor rotation shaft 34. The moving body 36 is stopped by the rotation preventing body 37 and moves toward the valve seat 1 with the rotation of the rotor rotation shaft 34. At this time, the flow restricting body 38 connected to the moving body 36 moves toward the valve seat 1 together with the moving body 36, and during this movement, the urging force of the urging body 39 is less than the load of the rotating force of the rotor 30. No. However, when the flow regulating member 38 comes into contact with the valve seat 1, the urging force of the urging member 39 acts as a load on the rotor 30, and the rotational force of the rotor 30 moves so as to compress the urging member 39 by a small dimension. The body 36 is moved toward the valve seat 1. When the urging body 39 is slightly compressed to stop the rotation of the rotor 30, the urging body 3 is pressed so that the flow regulating body 38 is pressed against the valve seat 1.
9 is applied, and the valve is closed with a stable valve closing force applied. FIG. 2 shows a state in which the flow restricting body 38 closes the valve seat 1 in a state where a valve closing force is applied.

Next, when the flow regulating member 38 is moved away from the valve seat 1 in the direction in which the valve is opened, the drive circuit (not shown) is switched so that the rotation direction of the rotor 30 is reversed. I do. In the process of applying the urging force of the urging body 39 to the valve seat 1 in the valve opening operation, the urging force is applied to the rotor 3.
Since it acts as a force for rotating 0 in the valve opening direction, the load for rotating the rotor 30 is reduced. In particular, when the pressure difference of the fluid occurs between the upstream and downstream of the valve seat 1 when the valve is closed and the flow regulating body 38 side in the drawing has a high pressure, the force pressing the flow regulating body 38 against the valve seat 1. (Back pressure), but the urging force of the urging body 39 acts in a direction to reduce the back pressure, so that the load at the time of opening the valve is reduced. Flow control body 38
Is released from the valve seat 1, the urging force of the urging body 39 is applied to the rotor 30.
Irrespective of the load, the rotation of the rotor 30 moves the flow restrictor 38 to the valve opening position (shown in FIG. 1), and the rotation of the rotor 30 is stopped by the drive circuit (not shown). By configuring the rotor 30 and the stator 32 as a so-called stepping motor that drives the rotation of the rotor 30 in a stepwise manner, the accuracy of the valve closing position and the valve opening position can be easily increased, and the driving frequency applied to the exciting coil 33 can be improved. (Pulse rate) can be changed according to the load.

The rotation of the rotor 30 is rotatably supported by a support shaft 41 inserted into a shaft hole 42 provided at the center of the rotor rotation shaft 34. By using the peripheral surface as a sliding surface to reduce the contact radius, torque loss due to frictional force is reduced.

In the above operation, since the stator 32 having the exciting coil 33 is provided outside the fluid passage by the partition wall 40 crossing the magnetic circuit, the contact resistance by the hermetic seal is eliminated and the hermetic seal to the rotor 30 is eliminated. The load is eliminated. Although the flow restricting body 38 is urged in the axial direction by the urging body 39, the urging body 39
Is an internal force applied between the moving body 36 and the flow regulating body 38, and the moving body 36, the flow regulating body 38, and the urging body 39 move integrally. For this reason, the urging force only applies to the rotor 30 when the flow restricting member 38 contacts the valve seat 1, and when the flow restricting member 38 moves away from the valve seat 1, the urging force is applied to the rotor 30. In this case, the load can be reduced without causing a load on the flow restricting body 38. When the flow restricting body 38 is separated from the valve seat 1, the urging force of the urging body 39 acts to reduce the back pressure applied to the flow restricting body 38. The load on the rotor 30 when the valve is opened can be reduced. Further, the support shaft 41 is connected to the rotor rotation shaft 34.
The shaft support structure does not need to be provided in the axial direction by inserting into the shaft hole 42 provided in the inner diameter direction, so that the size of the shaft support structure can be reduced, and the hollowness of the rotor shaft 34 reduces the moment of inertia with respect to rotation. Thus, the load on the rotor 30 can be reduced, or the responsiveness when the rotor 30 rotates can be improved.

As described above, in the first embodiment, a reliable hermetic seal structure using the partition wall 40 and the frictional resistance loss due to the hermetic seal can be prevented, and the load resistance is reduced by the urging force between the moving body 36 and the flow regulating body 38. As a result, the load on the rotor can be reduced, and the input of the stator 32 as the drive unit can be reduced, and the drive unit such as the rotor 30 or the stator 32 can be downsized.

Further, in the second embodiment, since the rotor 30 is supported by the small-diameter support shaft 41, the frictional resistance is reduced by the reduction of the contact radius, and the input to the drive section is promoted.
Further, the size of the actuator can be reduced by reducing the size of the shaft supporting structure.

(Embodiments 3 and 4) FIG. 3 is a sectional view of an actuator according to Embodiments 3 and 4 of the present invention. In the drawings, the same members and the same functions as those in the embodiment of FIGS. 1 and 2 are denoted by the same reference numerals, detailed description thereof will be omitted, and different portions will be mainly described.

Reference numeral 47 denotes a shaft support to which one end of the support shaft 41 is joined.
b is connected to the fluid passage 3 side. The shaft support 47 is precisely finished so that its outer shape follows the inner shape of the cylindrical portion 40a of the partition 40, and an opening 47a is provided at the center thereof to fit the end of the support shaft 41 to fit the cylindrical portion of the partition 40. The support shaft 41 is arranged at the center of 40a without misalignment. The joining of the support shaft 41 to the shaft support 47 and the joining of the shaft support 47 to the partition wall 40 can be easily performed by welding or the like. Reference numeral 48 denotes a thrust bearing for receiving a thrust load in the axial direction of the rotor 30, which ensures smooth operation of the rotor rotating shaft 34 even when the urging force of the urging body 39 is applied when the valve is closed. In addition, by using the magnetic material for the shaft support 47, the magnetic material can be arranged near the side surface of the magnetic pole 31 of the rotor 30, and the magnetic resistance of the magnetic circuit on the side surface of the rotor 30 and the stator 32 is reduced.

For this reason, by increasing the thickness of the shaft support 47, the strength of the support shaft 41 can be increased and the support shaft 41 can be supported. Further, by joining the shaft support 47 having strength to the partition 40, the strength of the partition 40 can be improved. Can be increased. By the way, the magnetic gap, which is the distance between the rotor 30 and the stator 32, should be set as small as possible because it becomes the resistance of the magnetic circuit. Therefore, the partition wall 40 disposed between the rotor 30 and the stator 32 has a small thickness. Required. In particular, when the partition wall 40 is formed by drawing with excellent productivity, the side surface portion 40 is formed.
b becomes a thin material, and it is difficult to directly join the support shaft 41 in terms of strength. However, the strong shaft support 47
When the support shaft 41 is installed through the support, formation of the partition wall 40 by drawing of an ultra-thin plate and reinforcement of the partition wall 40 can be achieved at the same time, and productivity can be improved. Further, when the shaft support 47 is made of a magnetic material, the magnetic circuit resistance between the rotor 30 and the stator 32 facing each other is reduced.
When a current is supplied to the magnetic gap, a larger magnetic flux can be generated in the magnetic gap portion where the cylindrical portion 40a of the partition wall 40 intervenes, and the electric input to the exciting coil 33 for increasing the rotational force of the rotor 30 and obtaining a predetermined rotational force is reduced. Can be reduced. In particular, since the partition wall 40 is disposed between the rotor 30 and the stator 32 facing each other, the partition wall 40 must be made of a non-magnetic material. When the cylindrical portion 40a and the side surface portion 40b are integrally formed, the shaft support 4 made of a magnetic material is required.
7, the magnetic circuit can be improved by reducing the magnetic resistance.

As described above, according to the third embodiment, even when the partition wall 40 is formed of an extremely thin material, the support shaft 41 can be securely attached to the partition wall 40 with increased bonding strength.
By increasing the thickness of the structure, it is possible to enhance the reliability such as durability by increasing the output of the rotational force and the strength of the structure, and further improve the productivity.

Further, in the fourth embodiment, even when the partition wall 40 is made of a non-magnetic material, the magnetic material can be arranged on the side surface of the rotor 30, so that the magnetic resistance of the magnetic circuit between the rotor 30 and the stator 32 can be reduced, and the magnetic drive The power can be improved, and a higher output of the rotational force or a lower input of the drive unit can be realized.

(Embodiment 5) FIG. 4 is a sectional view of an actuator according to Embodiment 5 of the present invention. In the figures, FIGS.
The same members and the same functions as those of the embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and different portions will be mainly described.

Reference numeral 49 denotes a shaft hole 42 formed in the rotor rotation shaft 34.
Is a sealing portion provided on the flow regulating body 38 side so as not to open to the flow regulating body 38 side.

Therefore, it is possible to prevent dust and foreign matter from entering the support shaft 41 from the flow regulating body 38 facing the fluid passage 3 and to prevent wear dust generated on the support shaft 41 or to be applied. It is possible to prevent the lubricant and the like from leaking to the fluid passage 3 side. The shaft hole 42 may be a blind hole that is opened from the rotor 30 so that the tip does not open. However, a sealing plug is provided after the processing as a through hole that allows high-precision processing and allows the dimensions of the inlet and the tip to be confirmed. By forming the sealing portion 49, the workability and reliability of the shaft hole 42 can be improved.

As described above, it is possible to prevent dust and foreign matter from entering the support shaft 41 from the flow restricting body 38 side, to maintain stable rotation and to improve durability and reliability. Further, it is possible to prevent abrasion powder generated on the support shaft 41 or applied lubricant from leaking out to the fluid passage side, thereby preventing contamination of the fluid and using it for a clean fluid, thereby expanding the applicable range. be able to.

(Embodiment 6) FIG. 5 is a partial sectional view of an actuator according to Embodiment 6 of the present invention. In the figures, FIGS.
The same members and the same functions as those in the embodiment of FIG. 4 are denoted by the same reference numerals, detailed description is omitted, and different portions will be mainly described.

Reference numeral 50 denotes an outer circumferential projection 36a provided on the moving body 36 and extending in the outer circumferential direction and the valve rubber holding portion 38 of the flow regulating body 38.
b is an engaging portion that is engaged with an inner peripheral projection 38d extending in the inner peripheral direction and is engaged with the inner peripheral projection 38d. The outer peripheral projection 36a is formed so as to provide a play (gap) with the inner peripheral wall 38e of the flow regulating body 38. , The inner peripheral projection 38d is provided on the outer peripheral wall 36b of the moving body 36.
And play (gap).

For this reason, as shown in FIG.
When an external force P substantially in the axial direction is applied to the valve 8 in the valve opening direction, the flow restricting body 38 is inclined by an angle θ with respect to the moving body 36 or the rotor rotation shaft 34, and a so-called swinging operation occurs. Therefore, even when the actuator is installed inclined with respect to the valve seat of the fluid passage, the flow regulating body 38 swings freely so as to adjust to the inclination of the valve seat, and the valve can be reliably closed.

As described above, when there is an error in the attachment of the actuator to the fluid passage, for example, even when the actuator is installed inclined with respect to the valve seat, the flow regulating body can normally close the valve seat of the fluid passage by the swinging operation. As a result, a reliable fluid control operation is performed, and the reliability can be further improved.

(Embodiment 7) FIG. 7 is a sectional view of an actuator according to Embodiment 7 of the present invention. In the figures, FIGS.
The same members and the same functions as those of the embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and different portions will be mainly described.

Reference numeral 51 denotes a first bearing provided on the side surface portion 40b side of the partition wall 40 and supporting the outer periphery of the rotor rotating shaft 34. This bearing 51 is housed in a bearing holding portion 52 integrally formed on the side surface portion 40b of the partition wall 40. Has been retained. The bearing holding portion 52 is formed on the side surface portion 40b by drawing to form an annular protrusion 4.
0d and a recess 40e in the center. Reference numeral 53 denotes a second bearing provided on the mounting body 43 side and supporting the outer periphery of the rotor rotation shaft 34, and the bearing 53 is fixed to the mounting body 43. Here, the first bearing 5
The case where the first and second bearings 53 rotatably support the rotor rotating shaft 34 has been described. However, it is possible to increase the axial length of the first bearing 51 and eliminate the second bearing 53 to provide cantilever support. it can.

For this reason, the bearing holding portion 52 can be formed by drawing work without any misalignment with respect to the cylindrical portion 40a of the partition wall 40, and the bearing 51 can be accurately arranged at the center of rotation. The partition 40 formed of an extremely thin plate has an annular protrusion 40d.
In addition, the reinforcement can be provided by forming the unevenness of the central concave portion 40e.

As described above, since the bearing holding portion is formed integrally with the partition wall, the gap between the rotor and the partition wall can be further reduced by high-precision processing without misalignment, and the strength of the partition wall can be improved by forming irregularities. Can be further promoted, and the rotational force of the rotor can be further improved by reducing the magnetic gap between the stator and the rotor.

(Eighth Embodiment) FIG. 8 is a sectional view of an actuator according to an eighth embodiment of the present invention. In the figures, FIGS.
The same members and the same functions as those of the embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and different portions will be mainly described.

Numeral 54 is a bearing member which receives an axial thrust load of the rotor rotating shaft 34 which is rotatably supported by the supporting shaft 41. The bearing body 54 is provided in contact with the outer peripheral portion of the rotor rotating shaft 34, and a through hole 43 a through which the rotor rotating shaft 34 penetrates is provided in the mounting body 43 to which the partition wall 40, the stator 32 and the rotation preventing body 37 are fixed. It is arranged so as to close the through hole 43a between the holes 30.

For this reason, when the valve is opened when a back pressure is applied to the flow restricting body 38, when the flow restricting body 38 is pulled away from the valve seat 1, the axial reaction force acts as a thrust force through the bearing member 54 via the bearing member 54. Join. The rotor 3 is
0 is prevented from contacting the mounting body 43 and the like, and the friction loss is reduced by forming the bearing body 54 with a sliding material having a small frictional resistance. Further, the bearing body 5
4 is disposed so as to close the through hole 43a of the mounting body 43, so that dust, foreign matter,
It can be prevented from entering the zero side. In addition, since the thrust bearing and the dust intrusion prevention lid can be used together, the size can be reduced or the productivity can be improved.

As described above, it is possible to prevent the rotor from moving in the axial direction due to the thrust load generated in the axial direction and coming into contact with components such as the partition wall or the mounting body, and to remove dust, foreign matter, etc. from the fluid side to the rotor side. Can be prevented from penetrating, stable rotation can be maintained, reliability can be improved, and further downsizing or productivity can be improved.

[0046]

As is apparent from the above description, the following effects can be obtained according to the actuator of the present invention.

A flow restricting body movably connected in the axial direction to the moving body via an urging body for urging in the axial direction;
Since a partition is provided on the gap between the rotor and the stator and on one end face side of the rotor and formed integrally to separate the stator and the rotor on the fluid side in an airtight manner, a reliable hermetic seal structure by the partition is provided. Loss of frictional resistance due to the hermetic seal can be prevented, and the load on the rotor can be reduced by reducing the load resistance by the urging force between the moving body and the flow restricting body, and the input of the stator as the drive unit can be reduced. This has the effect, and can further reduce the size of the drive unit such as the rotor or the stator.

Further, since the shaft hole provided at the center of the rotor rotation shaft and the support shaft inserted into the shaft hole and supporting the rotation of the rotor are fixed to the partition wall, the rotor is supported by the support shaft at the small diameter portion. In addition, the reduction of the contact radius has the effect of reducing the frictional resistance and promoting the reduction of the input, and furthermore, the downsizing of the shaft supporting structure can realize the downsizing of the actuator.

The support shaft has one end joined to the shaft support,
Since this shaft support is joined to the partition, there is an effect that even when the partition is formed of an extremely thin material, the support shaft can be securely and securely attached to the partition with increased bonding strength. As a result, reliability such as durability can be enhanced by increasing the output of the rotational force and increasing the strength of the structure.

Since the shaft support is made of a magnetic material, the magnetic resistance between the rotor and the stator can be reduced by arranging the magnetic material on the side of the rotor even if the partition is made of a non-magnetic material. The magnetic driving force can be improved, and the output of the rotational force can be increased.

Also, since the sealing portion is provided on the flow regulating body side of the shaft hole of the rotor rotating shaft, it is possible to prevent dust and foreign matter from entering the supporting shaft portion from the flow regulating body side and maintain stable rotation. This has the effect of improving durability and reliability. Further, there is an effect that abrasion powder generated in the support shaft portion or applied lubricant is prevented from flowing out to the fluid side, so that it can be used for a clean fluid.

Further, the flow restricting body and the moving body are connected by a locking portion provided with a play in the radial direction, and the flow restricting body can be swung freely. Therefore, even if there is an error in the mounting of the actuator to the fluid passage, it is ensured. A fluid control operation can be performed to improve the installation efficiency and the reliability of the fluid control.

Further, the bearing has a bearing for supporting the outer periphery of the rotor rotating shaft and a bearing holding part integrally formed with the partition, and the bearing is held by the bearing holding part. The gap between the rotor and the partition can be further reduced by performing high precision processing, and the strength of the partition can be improved by forming the unevenness, so that the partition can be further thinned and the rotational force of the rotor can be improved.

Further, since a mounting body to which the partition wall, the stator and the rotation preventing body are fixed, and a bearing body for receiving a thrust load in the axial direction of the rotor rotating shaft are provided between the mounting body and the rotor, In addition to preventing the rotor from moving in the axial direction due to the thrust load generated in the direction and coming into contact with components such as the partition wall or the mounting body, it prevents dust and foreign matter from entering the rotor side from the fluid side. Stable rotation can be maintained, reliability can be improved, and further downsizing or productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a valve-open state of an actuator according to a first embodiment and a second embodiment of the present invention.

FIG. 2 is a sectional view showing a valve closing state of the actuator.

FIG. 3 is a sectional view of an actuator according to a third embodiment and a fourth embodiment of the present invention.

FIG. 4 is a sectional view of an actuator according to a fifth embodiment of the present invention.

FIG. 5 is a partial sectional view of an actuator according to a sixth embodiment of the present invention.

FIG. 6 is a sectional view showing a swing operation of the actuator.

FIG. 7 is a sectional view of an actuator according to a seventh embodiment of the present invention.

FIG. 8 is a sectional view of an actuator according to an eighth embodiment of the present invention.

FIG. 9 is a sectional view of a conventional actuator.

FIG. 10 is a sectional view of another conventional actuator.

[Explanation of symbols]

 REFERENCE SIGNS LIST 30 rotor 31 magnetic pole 32 stator 33 excitation coil 34 rotor rotation shaft 35 feed means 36 moving body 37 rotation preventing body 38 flow regulating body 39 urging body 40 partition wall 41 support shaft 42 shaft hole 43 mounting body 47 shaft support 49 sealing Part 50 Locking part 51 Bearing 52 Bearing holding part 54 Bearing body

Claims (8)

[Claims] A rotor having magnetic poles, a stator having an exciting coil, a rotor rotating shaft provided on the rotor, a feeding means provided on the rotor rotating shaft, and a movement screwing or engaging with the feeding means. A body, a rotation preventing body that regulates the rotation of the moving body, a flow regulating body that is connected to the moving body in an axial direction with an urging body that urges in the axial direction interposed therebetween, An actuator having a gap between a rotor and the stator and a partition wall disposed at one end face side of the rotor and integrally formed to hermetically separate the stator and the rotor on the fluid side. 2. The rotor according to claim 1, further comprising a shaft hole provided at the center of the rotor rotation shaft, and a support shaft inserted into the shaft hole to support rotation of the rotor, wherein the support shaft is fixed to a partition. Actuator. 3. The actuator according to claim 2, wherein one end of the support shaft is joined to the shaft support, and the shaft support is joined to the partition. 4. The shaft support is made of a magnetic material.
An actuator as described. 5. The actuator according to claim 2, wherein a sealing portion is provided on the shaft hole side of the rotor rotating shaft on the side of the flow regulating body. 6. The actuator according to claim 1, wherein the flow restricting body and the moving body are connected by a locking portion provided with a play in the radial direction, and the flow restricting body can swing freely. 7. The actuator according to claim 1, further comprising a bearing for supporting the outer periphery of the rotor rotation shaft, and a bearing holding portion formed integrally with the partition, wherein the bearing is held by the bearing holding portion. 8. A mounting body to which a partition, a stator, and a rotation preventing body are fixed, and a bearing body for receiving a thrust load in an axial direction of a rotor rotating shaft is provided between the mounting body and the rotor.
The actuator according to any one of claims 6 to 6.