JPH11295232A - Device and method for inspecting surface, and device and method for generating data - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quickly judge the material of the surface of a sample such as a semiconductor circuit by a simple device. SOLUTION: A laser beam enters the surface of a sample 2 at a specific angle, and reflection intensity Ros and Rop between s and p polarization constituents is surveyed. The actually measured ratio Ros/Rop and an actually measured product value Ros×Rop are calculated for successively comparing with a theoretical ratio Rs/Rp and a sample product value Rs×Rp being set to a database means in advance, a plurality of candidates that approximate the actually measured ratio are selected from a plurality of the theoretical ratios, and one value that approximates the actually measured product value is selected from the sample product values of a plurality of candidates. One selected material is judged as the material of the sample 2, thus judging the material of the surface of the sample 2 according to the ratio and product value of the reflection intensity of s/p polarization.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inspection apparatus and method for determining a material forming a surface of a sample such as a semiconductor wafer and a glass substrate, and a database used in such a surface inspection apparatus and method. And a data generating apparatus and method for generating the data.

[0002]

2. Description of the Related Art Conventionally, in a process of manufacturing a semiconductor device, various parts are formed on a surface of a semiconductor wafer with various materials. However, a device failure or an operation error occurs in such a manufacturing process, and a layer film may be formed on the surface of the semiconductor wafer with a material different from an intended one.

In such a case, a malfunction occurs in the completed semiconductor device. Therefore, it is important to determine the material of each part formed on the surface of the semiconductor wafer and to specify a device failure or a work error. . Since several types of materials are used in the manufacturing process of a semiconductor device, one material may be specified as a plurality of candidates.

[0004]

As described above, in the process of manufacturing a semiconductor device, when a layer film is formed on the surface of the semiconductor wafer with a material different from the intended one, the material of each part formed on the surface of the semiconductor wafer The methods for realizing this are X-ray fluorescence analysis, Auger electron spectroscopy, and EPMA (Electron Probe Microanalysis).
Law, etc.

[0005] However, all of the above-mentioned techniques are specialized techniques, require large-scale and expensive equipment, and require time for analysis. In other words, it is actually difficult to easily and quickly determine the material of a fine layer film even if there are several types of candidates. Cannot be identified quickly.

The present invention has been made in view of the above-mentioned problems, and has a surface inspection apparatus and method capable of determining a material forming a surface of a sample without requiring much time and cost; It is an object of the present invention to provide a data generation device and method for creating a database used in such a surface inspection device and method.

[0007]

According to one aspect of the present invention, there is provided a surface inspection apparatus for holding a sample having a surface formed of at least one of several materials expected in advance;
Laser irradiation means for condensing a laser beam on the surface of the sample held by the sample holding means and making the laser beam incident at a predetermined angle; and each of an s-polarized component and a p-polarized component of the laser beam reflected on the sample surface. Polarization detecting means for individually measuring the intensity "Ros, Rop", and a ratio "R" of the reflection intensity "Ros, Rop" of the s / p polarization component actually measured by the polarization detecting means.
os / Rop ”as an actual measurement ratio;
For each of several materials expected to form the sample, the theoretical value of the reflection intensity of the s / p polarization component on the smooth surface "Rs, R"
The theoretical ratio “Rs / Rp”, which is the ratio of “p”, is approximated to the actual measurement ratio calculated by the actual measurement calculating unit from the database unit in which the theoretical ratio “Rs / Rp” is set in advance and a plurality of theoretical ratios set in the database unit. The apparatus includes numerical value selecting means for selecting one, and material determining means for determining one material selected by the numerical value selecting means as a sample material.

Therefore, in the surface inspection apparatus of the present invention, the sample holding means holds the sample whose surface is formed of at least one of several kinds of materials expected in advance, and the sample holding means holds the sample on the surface of the held sample. Laser irradiation means condenses the laser beam and makes it incident at a predetermined angle. The polarization detecting means individually measures the respective intensities “Ros, Rop” of the s-polarized component and the p-polarized component of the laser beam reflected on the surface of the sample, and the reflected intensity of the actually measured s / p polarized component. The actual measurement calculation means calculates the ratio “Ros / Rop” of “Ros, Rop” as the actual measurement ratio. On the other hand, the theoretical ratio “Rs / Rp”, which is the ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component on the smooth surface, is set for each of several materials expected to form the sample. Since it is set in the database means in advance, the numerical value selecting means selects one which is close to the actual measurement ratio calculated by the actual measurement calculating means from a plurality of theoretical ratios set in the database means. Since one material selected by the numerical value selecting means is determined by the material determining means as the material of the sample, the material on the surface of the sample is determined from the ratio of the reflection intensity of the s / p polarized light.

According to another aspect of the present invention, there is provided a surface inspection apparatus for holding a sample having a surface formed of at least one of several materials expected in advance, and holding the sample by the sample holding unit. A laser irradiating means for converging a laser beam on the surface of the sample and making the laser beam incident at a predetermined angle, and individually determining the intensities “Ros, Rop” of the s-polarized component and the p-polarized component of the laser beam reflected on the sample surface And the ratio "Ros / Rop" of the reflection intensity "Ros, Rop" of the s / p polarization component actually measured by the polarization detecting means is calculated as the measured ratio, and the product value "Ros * Rop" is calculated. And the ratio of the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface for each of several types of materials expected to form the sample. To the product of the theoretical ratio "Rs / Rp" The corresponding sample product value “Rs × R
p ”is selected in advance from database means, and from a plurality of theoretical ratios set in the database means, a plurality of candidates approximate to the actual measurement ratio calculated by the actual measurement calculation means are selected. Numerical value selecting means for selecting one approximating to the actual product value from the sample product values of the plurality of candidates, and material determining means for determining one material selected by the numerical value selecting means as a sample material ing.

Therefore, in the surface inspection apparatus of the present invention, the sample holding means holds the sample whose surface is formed of at least one of several kinds of materials expected in advance, and attaches the sample to the surface of the held sample. Laser irradiation means condenses the laser beam and makes it incident at a predetermined angle. The polarization detecting means individually measures the respective intensities “Ros, Rop” of the s-polarized component and the p-polarized component of the laser beam reflected on the surface of the sample, and the reflected intensity of the actually measured s / p polarized component. The actual measurement calculating means calculates the ratio “Ros / Rop” of “Ros, Rop” as the actual measurement ratio, and calculates the product value “Ros × Rop” as the actual measurement product value. On the other hand, a theoretical ratio “Rs / Rp”, which is a ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component on the smooth surface, for each of several materials expected to form the sample. Since the sample product value “Rs × Rp” corresponding to the product value is set in the database means in advance, the numerical value selection means was calculated by the actual measurement calculation means from a plurality of theoretical ratios set in the database means. After selecting a plurality of candidates that approximate the actual measurement ratio, one that approximates the actual measurement product value is selected from the sample product values of the plurality of candidates. Since one material selected by the numerical value selecting means is determined by the material determining means as the material of the sample, the material on the surface of the sample is determined from the ratio of the reflection intensity of the s / p polarized light and the product value.

In another aspect of the above-described surface inspection apparatus, at least one of the laser irradiating means and the sample holding means is moved so that a laser beam irradiating a sample is two-dimensionally divided for each predetermined analysis area. Relative scanning means for performing a scanning operation, wherein the actual measurement calculating means comprises s /
An average value in a plurality of analysis regions is used as the reflection intensity “Ros, Rop” of the p-polarized component.

Accordingly, the relative scanning means moves at least one of the laser irradiating means and the sample holding means to two-dimensionally scan the laser beam irradiating the sample for each predetermined analysis area, thereby obtaining the s / p polarization component. Reflection intensity "Ros, Rop"
As the actual measurement calculation means uses the average value in a plurality of analysis areas, the reflection intensity “R” used for the calculation by the actual measurement calculation means
os, Rop ”has high accuracy.

According to one surface inspection method of the present invention, a sample having a surface formed of at least one of several materials expected in advance is held, and a laser beam is focused on the surface of the held sample. Each of the s-polarized light component and the p-polarized light component of the laser beam reflected on the surface of the sample is irradiated with light, and the intensity “R
os, Rop "are individually measured, and the ratio" Ros / Rop "of the actually measured reflection intensity" Ros, Rop "of the s / p polarization component is calculated as the actually measured ratio, and it is expected that a sample is formed. The theoretical ratio "Rs" which is the ratio of the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface for each of several types of materials.
/ Rp ”is set in advance, one that approximates the measured ratio calculated from the set theoretical ratios is selected, and one selected material is determined as the material of the sample. Therefore, in the surface inspection method of the present invention, the material of the surface of the sample is determined from the ratio of the reflection intensity of the s / p polarized light.

According to another surface inspection method of the present invention, a sample having a surface formed of at least one of several materials expected in advance is held, and a laser beam is focused on the surface of the held sample. Each of the s-polarized light component and the p-polarized light component of the laser beam reflected on the surface of the sample is irradiated with light, and the intensity “R
os, Rop ”are individually measured, the ratio“ Ros / Rop ”of the actually measured reflection intensity“ Ros, Rop ”of the s / p polarization component is calculated as the measured ratio, and the product value“ Ros × Rop ”is measured. The theoretical ratio "Rs" which is calculated as a product value and is the ratio of the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarized light component on the smooth surface for each of several materials expected to form the sample.
/ Rp ”and a sample product value“ Rs × Rp ”corresponding to the product value are set in advance, and a candidate that approximates the measured ratio calculated from the set theoretical ratios is selected. One approximating the sample product value calculated from the sample product values of the selected candidates is selected, and the selected one material is determined as the material of the sample. In, the material on the surface of the sample is determined from the ratio of the reflection intensity of the s / p polarized light and the product value.

[0015] One data generating apparatus of the present invention provides a method for calculating the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface for each of several kinds of materials expected to form a sample. Data calculating means for calculating a theoretical ratio “Rs / Rp” as a ratio; and a theoretical ratio “Rs” calculated by the data calculating means.
/ Rp "stored in a predetermined information storage medium together with the corresponding material identification data to generate database means.

Therefore, in the data generating apparatus of the present invention, the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface is obtained for each of several kinds of materials which are expected to form the sample.
The data calculating means calculates the theoretical ratio "Rs / Rp", which is the ratio of the data, and stores the calculated theoretical ratio "Rs / Rp" together with the identification data of the corresponding material in a predetermined information storage medium. For example, the database means is used in the surface inspection method of the surface inspection apparatus of the present invention.

According to another data generating apparatus of the present invention, the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface is determined for each of several types of materials expected to form a sample. Data calculating means for calculating a theoretical ratio “Rs / Rp” as a ratio and a sample product value “Rs × Rp” corresponding to the product value; and a theoretical ratio “Rs / Rp” calculated by the data calculating means and a sample Data setting means for generating a database means by storing the product value “Rs × Rp” together with the corresponding material identification data in a predetermined information storage medium.

Therefore, in the data generating apparatus of the present invention, the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface is obtained for each of several kinds of materials expected to form the sample.
The data calculating means calculates the theoretical ratio “Rs / Rp”, which is the ratio of the above, and the sample product value “Rs × Rp” corresponding to the product value, and calculates the calculated theoretical ratio “Rs / Rp” and the sample product value “ Rs × R
Since the data setting means stores the data "p" in a predetermined information storage medium together with the identification data of the corresponding material to generate the database means, for example, this database means is used in the surface inspection method of the surface inspection apparatus of the present invention. You.

According to another aspect of the data generation apparatus as described above, the data calculation means includes a data processing device for calculating the theoretical ratio "Rs /
Rp ”is calculated from the Fresnel amplitude reflectance“ rs, rp ”as“ (rs × rs ^* ) / (rp × rp ^* ) ”by the complex conjugate amount *.
Therefore, the theoretical ratio “Rs / Rp” is calculated from the known dielectric constant for each material.

According to another aspect of the data generation apparatus as described above, the data calculation means uses a sample product value “Rs ×
Rp is calculated as “(Pn / a) ² (Ps × Pp)” by the specular reflection intensity “Ps, Pp” of the s / p polarized light, the irregular reflection intensity Pn in the substantially vertical direction of the laser beam incident at a predetermined angle, and the device constant a. Therefore, the sample product value “R” corresponding to the theoretical product value is calculated as
s × Rp ″ is calculated for each material in consideration of the characteristics inherent to the apparatus. The predetermined angle at which the laser beam is incident is preferably, for example, about 60 degrees.

According to another aspect of the data generating apparatus as described above, the device constant a of the data calculating means is such that the specular reflection intensity "Ps," actually measured by a surface inspection device from a sample having a clean surface and a clear material. Pp ”, the diffuse reflection intensity Pn, and the theoretical product value“ (rs) of the material of the sample sample calculated from the complex reflectance amount * from the Fresnel amplitude reflectance “rs, rp”.
× rs ^* ) × (rp × rp ^* ) ”and“ Pn / √ {(rs × rs ^* ) × (r
p × rp ^* ) / (Ps × Pp)} ”. Therefore, the specular reflection intensity“ Ps, Pp ”and the irregular reflection intensity Pn actually measured from the sample sample by the surface inspection device and the material of the sample sample The device constant a of the data calculation means is calculated from the theoretical product value “(rs × rs ^* ) × (rp × rp ^* )”.

In one data generation method of the present invention, the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface is determined for each of several types of materials expected to form a sample. The theoretical ratio "Rs / Rp", which is a ratio, is calculated, and the calculated theoretical ratio "Rs / Rp" is stored in a predetermined information storage medium together with the identification data of the corresponding material to generate database means. I made it. Therefore, the data generation method of the present invention generates the database means used in the surface inspection method of the surface inspection apparatus of the present invention.

Another method for generating data according to the present invention is to calculate the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface for each of several kinds of materials expected to form a sample. The theoretical ratio “Rs / Rp”, which is a ratio, and a sample product value “Rs × Rp” corresponding to the product value are calculated, and the theoretical ratio “Rs / Rp” thus calculated and the sample product value “Rs × Rp” are calculated. Is stored in a predetermined information storage medium together with the identification data of the corresponding material to generate the database means. Therefore, the data generation method of the present invention generates the database means used in the surface inspection method of the surface inspection apparatus of the present invention.

Here, the basic principle of the present invention will be verified below. First, in the case of metal wiring of circuit parts whose samples are mass-produced, the surface is unlikely to be microscopically smooth,
The laser beam irradiated here is substantially irregularly reflected. Accordingly, in the present invention, the reflection intensity “Ros, Rop” of s / p polarized light actually measured from such a rough surface is as follows: Ros = Rou × Rs (1a) Rop = Rou × Rp (1b) Approximately calculated as

Rou is the actual reflection intensity on the rough surface as described above, and corresponds to the surface roughness. “Rs, Rp”
Is the theoretical value of the reflection intensity of s / p polarized light on the smooth surface,
It is theoretically calculated by the Fresnel reflection formula.

The ratio of the above formulas (1a) and (1b) is the actually measured ratio “Ros / Rop”, which is represented by the following formula (2): Ros / Rop = (Rou × Rs) / ( Rou × Rp) = Rs / Rp (2) In the above equation (2), since the constants depending on the surface roughness of the sample and the characteristics of the apparatus are offset, the theoretical ratio “R
s / Rp "with high precision.

The theoretical ratio "Rs / Rp"
Theoretical value "Rs, Rp" of the reflection intensity of s / p polarized light which forms
Rs = rs × rs ^* (3a) Rp = rp × rp ^* from the Fresnel amplitude reflectivity “rs, rp” and the complex conjugate quantity * as shown in the following equations (3a) and (3b). It is calculated as (3b).

The Fresnel amplitude reflectance “rs, rp” is
From the dielectric constant inherent to the material and the incident angle of the light ray, the Fresnel reflection formula gives

[0029]

(Equation 1) Is calculated as a theoretical value.

When the theoretical ratio "Rs / Rp" of the reflection intensity of the s / p polarized light is calculated for each of the various materials as described above, the result is as shown in FIG. If a search is performed using the numerical value of “Ros / Rop”, the material of the sample can be determined. But A
Materials such as u, Ag, and Cu are frequently used in the manufacture of circuit devices, and the theoretical ratio of the reflection intensity of the s / p polarized light is “Rs / R”.
p "is approximate, and it is expected that it is difficult to determine the material even when compared with the measured ratio" Ros / Rop ".

Therefore, in the present invention, as a second condition, the sample product value “Rs × Rp” corresponding to the theoretical product value is also stored in the database, and the measured ratio “Ros / Rop” is used to calculate the theoretical ratio “Rs / Rop”.
If only a plurality of candidates can be selected by searching for “s / Rp”, a sample product value “Rs × Rp” is searched for using the actual product value “Ros × Rop” of the plurality of candidates, and one is selected. .

However, in the actual measurement ratio "Ros / Rop", constants depending on the roughness of the surface of the sample and the characteristics of the apparatus were canceled out, but this is raised to the power in the actual measurement product value "Ros × Rop". Even if the measured product value “Ros × Rop” is directly compared with the theoretical product value, the error is large.

Therefore, in the present invention, a sample product value “Rs × Rp” is prepared corresponding to the theoretical product value in consideration of the surface roughness of the sample and the characteristics of the apparatus, and this is used as the actual product value “Ros”. ×
Rop ”. This sample product value“ Rs × Rp ”
As shown in the following equation (5), Rs is obtained from the specular reflection intensity “Ps, Pp” of the s / p polarized light, the irregular reflection intensity Pn of the laser beam incident at a predetermined angle in the substantially vertical direction, and the device constant a. × Rp = (Pn / a) ² (Ps × Pp)

The specular reflection intensity “Ps, Pp” of the s / p polarized light and the irregular reflection intensity Pn of the laser beam incident at a predetermined angle in the substantially vertical direction are actually measured for each material. Is a constant that is unique to The device referred to here is
Since the surface inspection apparatus of the present invention is actually used for the determination of the material of the sample, the database generated by the data generation apparatus of the present invention is specific to a specific surface inspection apparatus in which at least various parameters are known. is there.

The surface constant of the surface inspection device a is a clean surface.
The material is measured by the surface inspection device from the obvious specimen sample.
Specular reflection intensity "Ps, Pp" and incident at about 60 degrees
The irregular reflection intensity Pn in the vertical direction of the laser beam and the sample test
Theoretical product value of the material of the material “(rs × rs ^*) × (rp × rp^*) "
As shown in the following equation (6), a = Pn / √ {(rs × rs^*) × (rp × rp^*) / (Ps × Pp)}.

As described above, if the device constant a of the surface inspection device is determined, the specular reflection intensity "Ps, Pp" of the s / p polarized light and the perpendicularity of the laser beam incident at a predetermined angle are determined for each material by the surface inspection device. If the diffuse reflection intensity Pn in the direction is actually measured, a sample product value “Rs × Rp” is prepared. Therefore, when a database in which a theoretical ratio “Rs / Rp” and a sample product value “Rs × Rp” are set for each material is generated, as shown in FIG.
A material that is difficult to specify only with the theoretical ratio “Rs / Rp” can be determined.

The various means referred to in the present invention only need to be formed so as to realize their functions. For example, dedicated hardware, a computer provided with appropriate functions by a program, a computer provided by an appropriate program , The functions realized inside, and the combination thereof are allowed.

The information storage medium referred to in the present invention may be any medium that can store various data in a computer-readable state. For example, the information storage medium may be a ROM (Read Only) that is fixed to an apparatus including a computer. Only Memory) and HDD
(Hard Disc Drive), CD (Compact Disc) -ROM or F
D (Floppy Disc), etc. are allowed.

The computer mentioned here may be any device that can read a program made of software and execute the corresponding processing operation.
entral Processing Unit)
And RAM (Random Access Memory) and I / F (Interface)
Various devices such as are allowed to be connected if necessary.

[0040]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a schematic side view showing a surface inspection apparatus that also serves as a data generation apparatus according to the present embodiment.

First, the sample 2 to be inspected by the surface inspection apparatus 1 which is also the data generation apparatus of the present embodiment is, for example, a connection pad made of Au of a hybrid IC (Integrated Circuit). Inspection device 1
As shown in FIG. 1, a sample holding stage 3 is provided as sample holding means for holding the sample 2 as described above.

The sample holding stage 3 is movably supported in the X and Y directions by an X / Y stage 4 as a relative scanning means. The X direction and the Y direction referred to here are directions that are both horizontal but orthogonal to each other. For example, the X direction is the front-back direction and the Y direction is the left-right direction.

At one point on the surface of the sample 2 held on the sample holding stage 3 as described above, a laser irradiation device 5 as a laser irradiation device and a polarization detection device 6 as a polarization detection device are set to “60 ± 15”. The stereo microscopes 20 as image observation means are vertically opposed from directly above while being opposed at the incident angles.

The laser irradiation device 5 has a laser light source H
An e-Ne laser tube 7, a beam expander 8, and a condenser lens 9 are provided. The polarization detector 6 includes a polarizing plate 10 serving as a light beam polarizing unit and two pinhole plates 1.
1 and 12 and a photodetector 13 that is a photoelectric conversion unit.

The laser tube 7 emits, for example, a visible light laser beam having a wavelength of 633 (nm) and an output of 5.0 (mW), and the beam expander 8 enlarges the beam diameter of the laser beam emitted from the laser tube 7. I do. Since the condenser lens 9 condenses the laser beam expanded by the beam expander, the laser irradiator 5 applies the laser beam to an analysis area of 10 to 1000 μm square on the surface of the sample 2 held by the sample holding stage 3. The beam is condensed and incident at a predetermined angle.

The polarizing plate 10 is made of, for example, a Glan-Thompson prism, and is rotatably supported by a rotating mechanism (not shown) including a stepping motor and a gear mechanism so as to be rotatable around the optical axis. Then, each of the s-polarized light component and the p-polarized light component is individually extracted from the laser light reflected on the surface of the sample 2. The pinhole plates 11 and 12 transmit only the central part of the s / p polarization component extracted by the polarizing plate 10, and the photodetector 13 measures the reflection intensity of the extracted s / p polarization component.

A single integrated controller 14 is connected to the X / Y stages 5 and 6, the rotating mechanism of the polarizing plate 10, and the photodetector 13. Since the operation is integrally controlled, the polarization detection device 6
The respective intensities of the s-polarized light component and the p-polarized light component of the laser beam scanned two-dimensionally and reflected at various points on the surface of the sample 2 are individually measured.

An image generating device 15 is connected to the stereo microscope 20, and an image display device 16 and the above-mentioned integrated control device 14 are connected to the image generating device 15. The stereo microscope 20 observes an analysis area of 10 to 1000 μm square on the surface of the sample 2, and the image generating device 15 generates image data of the surface of the sample 2 observed by the stereo microscope 20, and the image display device 16 Displays and outputs image data of the surface of the sample 2 generated by the image generating device 15.

The integrated controller 14 to which image data is input from the image generator 15 also controls the operation of the X / Y stage 4 in accordance with the image data of the analysis area on the surface of the sample 2. The laser beam applied to the sample 2 is two-dimensionally scanned for each analysis area.

A microcomputer 17 is also connected to the integrated control device 14. The microcomputer 17 has a data input device 18 such as a keyboard as data input means and a data output device such as a display as data output means. The device 19 is connected.

The data input device 18 inputs various data such as instruction codes to the microcomputer 17 by manual operation of an operator, and the data output device 19 outputs various data such as display images generated by the microcomputer 17. Is output to the operator.

The microcomputer 17 has a CPU (Cen
tral Processing Unit) and RAM (Random Access Memor)
y), ROM (Read Only Memory), I / F (Interface), and other hardware.
Various functions are logically realized as various means by the CPU reading a control program, which is software stored in advance in an information storage medium such as M, and executing various operations.

That is, the microcomputer 17 includes:
Element database as database means, actual measurement calculation function as actual measurement calculation means, numerical value selection function as numerical value selection means, material determination function as material determination means, data calculation function as data calculation means, data setting as data setting means Functions and the like are logically realized.

The element database is composed of various data stored in the RAM in a readable state by the CPU, and as shown in Table 1 below, for each element of the identification data of the elements, which are several materials forming the sample 2. A theoretical ratio "Rs / Rp" which is a ratio of the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component on the smooth surface, and a sample product value "Rs × Rp" corresponding to the product value.
And are set in advance.

[0055]

[Table 1] As described above, the actual measurement calculation function performs the predetermined data processing by the CPU corresponding to the control program stored in the RAM or the ROM in advance, thereby obtaining the s / p polarization component actually measured by the polarization detector 6. Reflection intensity "Ros, Ro
The ratio “Ros / Rop” of “p” is calculated as the actually measured ratio, and the product value “Ros × Rop” is calculated as the actually measured product value.

Similarly, when the CPU executes predetermined data processing, the numerical value selection function becomes a plurality of candidates approximate to the actual measurement ratio calculated by the actual measurement calculation function from the plural theoretical ratios set in the element database. Is selected, one of the sample product values of the plurality of candidates that approximates the actual product value is selected.

The element determination function determines one element selected by the numerical value selection function as an element of the sample 2.
9 for display to the operator. In addition,
Naturally, when one element is selected by the numerical value selection function at the stage of comparing the theoretical ratio and the measured ratio, this is determined by the element determination function as a determination result.

As described above, since the analysis area irradiated with the laser beam on the surface of the sample 2 is two-dimensionally scanned, the actual measurement calculation function is performed by using the reflection intensity “Ro” of the s / p polarization component.
For example, an average value in a plurality of analysis regions such as one hundred is set as “s, Rop”.

The above-described element database, actual measurement calculation function, numerical value selection function, and material determination function are necessary functions when the surface inspection apparatus 1 of the present embodiment determines an element on the surface of the sample 2. However, since the setting contents of the element database required there depend on the characteristics of the surface inspection apparatus 1 and the sample 2, the above-described data calculation function and data setting function as functions for constructing the element database are also included in this embodiment. This is realized in the surface inspection device 1.

The data calculation function also performs predetermined data processing by the CPU, and performs the theoretical calculation of the reflection intensity of the s / p polarization component on the smooth surface for each of several elements of the sample 2 prepared as a sample. A theoretical product ratio “Rs / Rp” which is a ratio of the values “Rs, Rp” and a sample product value “Rs × R” corresponding to the product value
p ”is calculated.

The data setting function is based on the theoretical ratio “Rs / Rp” calculated by the data calculation function and the sample product value “Rs × R
p ”is stored in the storage area of the RAM as the information storage medium together with the identification data of the corresponding element,
Generate the above-mentioned element database.

The above-described data calculation function calculates the theoretical ratio “Rs / Rp” from the Fresnel amplitude reflectance “rs, rp” by using the complex conjugate amount “*” (rs × rs ^* ) / (rp × rp ^* ). And the sample product value “Rs × Rp” is calculated based on the specular reflection intensity “Ps, Pp” of the s / p polarized light, the irregular reflection intensity Pn of the laser beam incident at a predetermined angle in the substantially vertical direction, and the device constant a. (Pn /
a) It is calculated as ² (Ps × Pp) ”.

The device constant a of the data calculation function is a specular reflection intensity “Ps, Pp” and a diffuse reflection intensity Pn actually measured by a surface inspection device from a sample (not shown) whose surface is clean and whose elements are clear. Fresnel amplitude reflectance “rs, rp”
From the theoretical product value of the element of the sample “(rs × rs ^* ) × (rp × rp ^* )” calculated by the complex conjugate amount * from “Pn / √ {(r
s × rs ^* ) × (rp × rp ^* ) / (Ps × Pp)} ”.

The various functions of the microcomputer 17 as described above are realized by using hardware such as the data output device 19 if necessary.
It is realized by the operation of a CPU, which is a computer composed of hardware, corresponding to software stored in an information storage medium such as.

For example, the software required for the surface inspection apparatus 1 of the present embodiment to determine the element on the surface of the sample 2 is the reflection intensity “Ros, s / p polarization component of the s / p polarization component actually measured by the polarization detector 6. Calculating the ratio “Ros / Rop” of the “Rop” as the actually measured ratio and calculating the product value “Ros × Rop” as the actually measured product value, and calculating the product ratio “Ros × Rop” from the plurality of theoretical ratios set in the element database. Selecting a plurality of approximate candidates, selecting one that approximates the actual product value from the sample product values of the plurality of candidates, judging one selected element as an element of the sample 2, and outputting data. It is stored in an information storage medium such as a RAM as a control program for causing a CPU or the like to execute processing operations such as displaying and outputting to a worker on a display or the like of the device 19.

The software necessary for constructing the data file of the element database in the surface inspection apparatus 1 of the present embodiment is provided for each of the elements of several kinds of samples 2 prepared as specimens. Theoretical ratio "Rs" which is the ratio of the theoretical value "Rs, Rp" of the reflection intensity of the s / p polarization component.
/ Rp ”and a sample product value“ Rs × Rp ”corresponding to the product value, and calculating the calculated theoretical ratio“ Rs / Rp ”and the sample product value“ Rs × Rp ”of the corresponding element. Processing operations such as generating an element database by storing it in a storage area of a RAM, which is an information storage medium, together with identification data are described in C.
RAM as a control program to be executed by a PU or the like
And the like.

With the above configuration, the surface inspection method of the surface inspection apparatus 1 of the present embodiment will be sequentially described below. First, the sample 2 held by the sample holding stage 3
The laser beam is condensed and irradiated by the laser irradiation device 5 on the surface of the sample, and the sample holding stage 3 is moved by the X / Y stage 4 in this state.

Since the laser beam irradiated on the sample 2 is two-dimensionally scanned for each analysis area, the laser beam scanned two-dimensionally and reflected on the analysis area on the surface of the sample 2 in this manner. The intensity of each of the s-polarized component and the p-polarized component is individually measured by the polarization detector 6.

When the actually measured reflection intensity "Ros, Rop" of the s / p polarization component reaches a predetermined number, the average value is calculated by the microcomputer 17, and then the ratio "Ros / Rop" is actually measured. The product value “Ros × Rop” is calculated as an actually measured product value while being calculated as a ratio.

In the element database of the microcomputer 17, a theoretical ratio “Rs / Rp” and a sample product value “Rs × Rp” are set in advance for each of several elements used for forming the sample 2. The microcomputer 17
Selects a plurality of candidates that approximate the measured ratio "Ros / Rop" calculated from the plurality of theoretical ratios "Rs / Rp" set in the element database.

The microcomputer 17 that has selected a plurality of candidates as described above, sets the sample product value “Rs
× Rp ”, one of which is close to the actual measured value“ Ros × Rop ”is selected.One element thus selected is determined as an element of the sample 2. For example, the name of this element is used as the data output. The display is output to the user on the display of the device 19.

The surface inspection apparatus 1 according to the present embodiment can determine the elements on the surface of the sample 2 as described above. Even when the layer film is formed of a material different from the expected one, it is possible to determine the material of each part formed on the surface of the layer film and to specify the portion of the device failure or the work error.

Moreover, the surface inspection apparatus 1 of the present embodiment
Can determine the element on the surface of the sample 2 as described above from the ratio of the reflection intensity of the s / p polarized light and the product value, and the fluorescence X
Since there is no need for a large-scale and expensive device such as a line analysis method, an Auger electron spectroscopy method, and an EPMA method, the element on the surface of the sample 2 can be quickly determined by a simple device.

Further, the surface inspection apparatus 1 of the present embodiment
Since the laser beam irradiated on the sample 2 is two-dimensionally scanned for each predetermined analysis area, and the average value in a plurality of analysis areas is used as the reflection intensity “Ros, Rop” of the s / p polarization component. The element on the surface of the sample 2 can be determined with good accuracy.

Incidentally, the surface inspection apparatus 1 as described above is actually used.
As a result of actual measurement of Au as an element on the surface of Sample 2, the measured ratio "Ros / Rop" was "1.13" against the theoretical ratio "Rs / Rp" of "1.09". Similarly, when Al was measured, the theoretical ratio was "1.52" and the measured ratio was "1.41". When the silicon semiconductor wafer was measured, the theoretical ratio was "5.23" and the measured ratio was "5.44". Met. Although the theoretical ratio of stainless steel did not exist, the measured ratio was “4.20”.

As described above, the theoretical ratio of Au is Cu or Ag.
When all of these are used for the sample 2, it is difficult to specify the element only by comparing the measured ratio and the theoretical ratio. In such a case, the measured product value is also Preferably, it is calculated and compared with the sample product value.

However, if the element can be specified only by comparing the measured ratio and the theoretical ratio, it is not necessary to compare the measured product value with the sample product value. For example, an element in which an element having a similar theoretical ratio does not exist or an element having a similar theoretical ratio is sample 2
If not used, the element can be specified only by comparing the measured ratio and the theoretical ratio.

In order for the surface inspection apparatus 1 of this embodiment to determine the elements on the surface of the sample 2 as described above, an element database in which the elements used by the user and the characteristics unique to the apparatus are also taken into account. Since the surface inspection apparatus 1 according to the present embodiment needs to be properly constructed in advance, the surface inspection apparatus 1 also has a function of constructing an element database based on the actual measurement result of the sample.

The data generation method of the surface inspection apparatus 1 will be described below. First, the user first prepares a specimen sample whose surface is clean and whose elements are clear, and the surface inspection apparatus 1 is prepared.
Specular reflection intensity “P” when the laser beam is incident on the sample holding stage 3 at the same angle as in the element determination.
s, Pp "and the irregular reflection intensity Pn in the vertical direction when the laser beam is incident at about 60 degrees are actually measured by the polarization detector 6.

As described above, the specular reflection intensity “P
s, Pp "and the diffuse reflection intensity Pn are actually measured, and the theoretical product value of the elements of the sample sample calculated by the complex conjugate amount * from the amplitude reflectance" rs, rp "of Fresnel" (rs × rs ^* ) × (rp × r
p ^* ) ”is calculated by the microcomputer 17;
The device constant a is calculated as “Pn / √ {(rs × rs ^* ) × (rp × rp ^* ) / (Ps × Pp)}”.

The device constant a calculated in this manner is registered as a parameter for the arithmetic processing in the microcomputer 17, and a sample 2 of a necessary element is prepared as a sample in this state, and the s / p polarization component The reflection intensity "Rs,
Rp ”is actually measured, and the sample product value“ Rs × Rp ”corresponding to the product value of the theoretical value“ Rs, Rp ”of the reflection intensity of the s / p polarization component is calculated by the microcomputer 17 as“ (Pn / a) ² (Ps × P
p) ".

The theoretical ratio “Rs / Rp” which is the ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component of the element.
The microcomputer 17 calculates “(rs × r” from the amplitude reflectance “rs, rp” of the Fresnel by the microcomputer 17 using the complex conjugate amount *.
s ^* ) / (rp * rp ^* ) ".

When the theoretical ratio “Rs / Rp” and the sample product value “Rs × Rp” are calculated for each of several elements of the sample 2 as described above, the microcomputer 17 calculates the theoretical ratio “Rs / Rp”. “Rp” and the sample product value “Rs × Rp” are stored in the storage area of the RAM together with the identification data of the corresponding elements, and a data file of the element database is constructed.

As described above, the surface inspection apparatus 1 of this embodiment can easily construct an element database in which characteristics unique to the apparatus and types of elements used for the sample 2 are also taken into consideration. Sample 2 using element database
Can be determined with good accuracy.

The present invention is not limited to the above-described embodiment, but allows various modifications without departing from the gist of the present invention. For example, in the above embodiment, the X / Y stage 4 moves the holding stage in order to scan the laser beam irradiated on the surface of the sample 22.

However, it is also possible to move the laser irradiation device 5 and the polarization detection device 6. As a method for moving the laser irradiation device 5 and the polarization detection device 6 to scan the laser beam, for example, It is also possible to translate or rotate a deflecting optical system such as a reflecting mirror while keeping the laser light source and the photodetector fixed.

Further, in order to individually detect each of the s / p polarized lights by the polarization detecting device 6, the polarizing plate 10 is rotated at a right angle. However, for example, a pair of polarizing plates whose polarization directions are orthogonal to each other may be used. It is also possible to arrange them alternately on the optical path, and it is also possible to arrange alternately on the optical path a pair of polarization detectors that individually detect each of the s / p polarized light.

Further, in the above embodiment, the surface inspection apparatus 1 calculates both the measured ratio and the measured product value of the sample 2 from the beginning and compares them with the theoretical ratio and the sample product value in order. However, at first, it is also possible to calculate only the measured ratio and compare it with the theoretical ratio, and then calculate the measured product value and compare it with the sample product value only when the element is not determined.
Further, when the number of elements to be determined in the sample 2 is small and the determination can be sufficiently performed only by comparing the measured ratio and the theoretical ratio, the calculation of the measured product value and the setting of the sample product value can be omitted. is there.

Further, in the above-described embodiment, the user actually measures the sample with the surface inspection apparatus 1 and constructs the data file of the element database. However, for example, the manufacturer of the surface inspection apparatus 1 prepares the element database in advance. It is also possible to prepare and set. In such a case, element data that the user does not need is also registered in the element database of the surface inspection apparatus 1, so that, for example, the user edits the element database and corrects the element database to a necessary form. preferable.

In the above-described embodiment, the surface inspection apparatus 1 has been described as also serving as a data generation apparatus for constructing an element database, but such an apparatus may be formed separately. Further, in the above embodiment, it is assumed that the material on the surface of the sample 2 determined by the surface inspection device 1 is a single element. However, for example, a material such as an alloy including a plurality of elements is determined by the surface inspection device 1. Is also possible.

In the above embodiment, the CPU is executed in accordance with a control program stored as software in a RAM or the like.
It has been exemplified that various means are logically realized as various functions of the microcomputer 17 by the operation of. However, it is also possible to form each of these various means as unique hardware, and it is also possible to store a part as software in a RAM or the like and form a part as hardware.

[0092]

Since the present invention is configured as described above, it has the following effects.

The surface inspection apparatus according to the first aspect of the present invention comprises a sample holding means for holding a sample having a surface formed of at least one of several materials expected in advance, and a sample holding means for holding the sample. A laser irradiating means for converging a laser beam on the surface of the sample and entering the laser beam at a predetermined angle; and intensity "Ros, Rop" of each of an s-polarized component and a p-polarized component of the laser beam reflected on the sample surface. And the ratio “Ros / Rop” of the reflection intensity “Ros, Rop” of the s / p polarization component actually measured by the polarization detecting means.
Is calculated as an actual measurement ratio, and s on the smooth surface is determined for each of several materials expected to form the sample.
A database means in which a theoretical ratio “Rs / Rp” which is a ratio of the theoretical value “Rs, Rp” of the reflection intensity of the / p polarization component is set in advance, and a plurality of theoretical ratios set in the database means. Numerical value selection means for selecting one approximating the actual measurement ratio calculated by the actual measurement calculation means, and material determination means for determining one material selected by the numerical value selection means as a sample material, Since the material on the surface of the sample can be determined based on the ratio of the reflection intensity of the s / p polarized light, this determination can be quickly performed with a simple device.

According to a second aspect of the present invention, there is provided a surface inspection apparatus for holding a sample having a surface formed of at least one of several materials expected in advance, and holding the sample by the sample holding unit. A laser irradiating means for converging a laser beam on the surface of the sample and incident the laser beam at a predetermined angle; And the ratio “Ros / Rop” of the reflection intensity “Ros, Rop” of the s / p polarization component actually measured by the polarization detecting means.
And the product value “Ros × Rop”
Actual calculation means for calculating the actual product value, and s on the smooth surface for each of several types of materials expected to form the sample.
Database means in which a theoretical ratio “Rs / Rp”, which is a ratio of the theoretical value “Rs, Rp” of the reflection intensity of the / p polarization component, and a sample product value “Rs × Rp” corresponding to the product value are preset. And, from a plurality of theoretical ratios set in the database means, select a plurality of candidates that approximate the actual measurement ratio calculated by the actual measurement calculation means, and then, from the sample product values of these plurality of candidates to the actual measurement product values By providing a numerical value selecting means for selecting an approximating one, and a material determining means for determining one material selected by the numerical value selecting means as a material of the sample, the material on the surface of the sample is reduced to s. Since the determination can be made based on the ratio of the reflection intensity of the / p polarized light and the product value, this determination can be quickly performed by a simple device.

The third aspect of the present invention is the first or second aspect.
The surface inspection apparatus according to claim 1, wherein at least one of the laser irradiation unit and the sample holding unit is moved, and a relative scanning unit that two-dimensionally scans a laser beam irradiated on the sample for each predetermined analysis region is also provided. And the actual measurement calculating means includes a reflection intensity “Ros, Rop” of the s / p polarization component.
By using the average value in a plurality of analysis areas as the reflection intensity “Ros, Rop” actually measured from the surface of the sample.
Therefore, the material on the surface of the sample can be determined with good accuracy.

According to a fourth aspect of the present invention, there is provided a surface inspection method comprising: holding a sample having a surface formed of at least one of several kinds of materials expected in advance; and holding a laser beam on the surface of the held sample. Is condensed and irradiated, and the respective intensities “Ros, Rop” of the s-polarized component and the p-polarized component of the laser beam reflected by the surface of the sample are individually measured.
/ Ratio of reflection intensity “Ros, Rop” of polarization component “Ros /
Rop "is calculated as an actual measurement ratio, and is a ratio of the theoretical value" Rs, Rp "of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form a sample. The ratio “Rs / Rp” is set in advance, and one approximating the actually measured ratio calculated from the set theoretical ratios is selected, and the selected one material is used as a sample material. By making the determination, the material on the surface of the sample can be determined based on the ratio of the reflection intensity of the s / p polarized light, so that this determination can be quickly performed by a simple method.

According to a fifth aspect of the present invention, there is provided a surface inspection method comprising: holding a sample having a surface formed of at least one of several materials expected in advance; and holding a laser beam on the surface of the held sample. Is condensed and irradiated, and the respective intensities “Ros, Rop” of the s-polarized component and the p-polarized component of the laser beam reflected by the surface of the sample are individually measured.
/ Ratio of reflection intensity “Ros, Rop” of polarization component “Ros /
Rop ”is calculated as the measured ratio, and the product value“ Ros ×
Rop "is calculated as an actual measurement value, and is the ratio of the theoretical value" Rs, Rp "of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form the sample. Sample product value “Rs × Rp” corresponding to the theoretical ratio “Rs / Rp” and the product value
Is set in advance, and a candidate that approximates the actual measurement ratio calculated from the set theoretical ratios is selected, and the sample product value calculated from the sample product value of the selected candidate is approximated. By selecting one to do, and by making this one selected material as the material of the sample,
Since the material on the surface of the sample can be determined based on the ratio of the reflection intensity of the s / p polarized light and the product value, this determination can be quickly performed with a simple device.

[0098] The data generating apparatus of the invention according to claim 6 provides:
For each of several materials expected to form the sample, the theoretical value of the reflection intensity of the s / p polarization component on the smooth surface "Rs, R"
a data calculating means for calculating a theoretical ratio “Rs / Rp” which is a ratio of “p”, and the theoretical ratio “Rs / Rp” calculated by the data calculating means together with the identification data of the corresponding material in a predetermined information storage medium. With the provision of the data setting means for storing and generating the database means, the database means required for the surface inspection apparatus according to the first aspect of the present invention can be satisfactorily constructed with a simple apparatus.

[0099] According to the data generating apparatus of the invention described in claim 7,
For each of several materials expected to form the sample, the theoretical value of the reflection intensity of the s / p polarization component on the smooth surface "Rs, R"
data calculating means for calculating a theoretical ratio “Rs / Rp” which is a ratio of “p” and a sample product value “Rs × Rp” corresponding to the product value; and a theoretical ratio “Rs” calculated by the data calculating means.
/ Rp "and a sample product value" Rs x Rp "together with the corresponding material identification data in a predetermined information storage medium to generate a database means, comprising: a data setting means. The database means necessary for the surface inspection apparatus according to the invention described in 2 can be satisfactorily constructed with a simple apparatus.

The invention according to claim 8 provides the invention according to claim 6 or 7
2. The data generating apparatus according to claim 1, wherein said data calculation means calculates a theoretical ratio "Rs / Rp" by using a Fresnel amplitude reflectance "rs, r".
“(rs × rs ^* ) / (rp × rp ^* )” from the complex conjugate * from p
Since the theoretical ratio “Rs / Rp” can be properly calculated from the known dielectric constant for each material, the appropriate theoretical ratio “Rs / Rp” is stored in the database means.
Can be set.

According to the ninth aspect of the present invention, there is provided the seventh or eighth aspect.
The data generation device according to claim 1, wherein the data calculation means calculates the sample product value “Rs × Rp” by using the specular reflection intensity “P / s” of the s / p polarized light.
s, Pp "and the irregular reflection intensity Pn of the laser beam incident at a predetermined angle in a substantially vertical direction and the apparatus constant a," (Pn / a)
² (Ps × Pp) ”, the sample product value“ Rs × Rp ”corresponding to the theoretical product value can be properly calculated for each material in consideration of the characteristics unique to the apparatus. An appropriate sample product value “Rs × Rp” can be set in the database means.

According to a tenth aspect of the present invention, in the data generating apparatus according to the ninth aspect, the device constant a of the data calculating means is actually measured by a surface inspection device from a sample whose surface is clean and whose material is clear. Theoretical product value ((rs × rs ^* ) × () of the material of the sample sample calculated by the complex conjugate amount * from the specular reflection intensity “Ps, Pp” and the irregular reflection intensity Pn, and the Fresnel amplitude reflectance “rs, rp”. rp × rp ^* ) ”and“ Pn / √ {(rs
× rs ^* ) × (rp × rp ^* ) / (Ps × Pp)} ”, so that the apparatus constant a depending on the characteristics of the surface inspection apparatus can be properly calculated. , A proper sample product value “Rs × Rp” can be set.

According to the data generation method of the present invention, the theoretical value “R” of the reflection intensity of the s / p polarization component on the smooth surface is obtained for each of several kinds of materials expected to form the sample.
s, Rp ”, the theoretical ratio“ Rs / Rp ”is calculated,
By storing the calculated theoretical ratio “Rs / Rp” together with the corresponding material identification data in a predetermined information storage medium and generating database means,
The database means required for the surface inspection method according to the fourth aspect of the invention can be satisfactorily constructed by a simple method.

The data generation method according to the twelfth aspect of the present invention provides the data generation method of the present invention, wherein the theoretical value "R
s, Rp ”and a theoretical product ratio“ Rs / Rp ”corresponding to the product value and a sample product value“ Rs × Rp ”corresponding to the product value are calculated. Value “Rs × Rp”
Is stored in a predetermined information storage medium together with the identification data of the corresponding material to generate the database means, so that the database means required for the surface inspection method according to the fifth aspect of the present invention can be improved by a simple method. Can be built.

[Brief description of the drawings]

FIG. 1 is a schematic side view showing a surface inspection apparatus according to an embodiment of the present invention.

FIG. 2 shows that a number of elements, which are materials of a sample, are theoretically ratio "Rs
/ Rp ". FIG.

FIG. 3 shows that several elements which are materials of a sample are theoretically ratio "Rs
/ Rp "and a sample product value" Rs x Rp ".

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Surface inspection apparatus 2 Sample 3 Sample holding stage which is a sample holding means 4 X / Y stage which is a relative scanning means 5 Laser irradiation apparatus which is a laser irradiation means 6 Polarization detecting apparatus which is a polarization detecting apparatus 17 Micro which functions as various means Computer

Claims (12)

[Claims] 1. A sample holding means for holding a sample having a surface formed of at least one of several kinds of materials expected in advance, and a laser beam focused on a surface of the sample held by the sample holding means. A laser irradiating unit that emits light at a predetermined angle, and an s-polarized component and a
Polarization detecting means for individually measuring the intensity "Ros, Rop" of each of the polarization components; and a ratio "Ros / Rop" of the reflection intensity "Ros, Rop" of the s / p polarization component actually measured by the polarization detecting means. And a theoretical value “Rs, R” of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form the sample.
The theoretical ratio “Rs / Rp”, which is the ratio of “p”, is preliminarily set, and approximates the actual measurement ratio calculated by the actual measurement calculating unit from a plurality of theoretical ratios set in the database unit. A surface inspection apparatus comprising: a numerical value selecting unit for selecting one; and a material determining unit for determining one material selected by the numerical value selecting unit as a material of a sample. 2. A sample holding means for holding a sample having a surface formed of at least one of several kinds of materials expected in advance, and a laser beam focused on the surface of the sample held by the sample holding means. A laser irradiating unit that emits light at a predetermined angle, and an s-polarized component and a
Polarization detecting means for individually measuring the intensity "Ros, Rop" of each of the polarization components; and a ratio "Ros / Rop" of the reflection intensity "Ros, Rop" of the s / p polarization component actually measured by the polarization detecting means. Is calculated as an actual measurement ratio and the product value “Ros × Rop” is calculated as an actual measurement product value, and s / p polarization on a smooth surface for each of several materials expected to form a sample The theoretical value of the reflection intensity of the component "Rs, R
database means in which a theoretical ratio “Rs / Rp” which is a ratio of “p” and a sample product value “Rs × Rp” corresponding to the product value are set in advance, and a plurality of theoretical values set in the database means Numerical value selection means for selecting a plurality of candidates that approximate the actual measurement ratio calculated by the actual measurement calculation means from the ratio, and then selecting one that approximates the actual measurement value from the sample product values of the plurality of candidates, A material judging means for judging one material selected by the numerical value selecting means as a sample material. 3. A relative scanning means for moving at least one of the laser irradiation means and the sample holding means to two-dimensionally scan a laser beam irradiated on the sample for each predetermined analysis area. The measurement calculation means calculates the reflection intensity “Ro” of the s / p polarization component.
3. The surface inspection apparatus according to claim 1, wherein an average value in a plurality of analysis areas is used as "s, Rop". 4. A sample having a surface formed of at least one of several materials expected in advance is held, and the surface of the held sample is focused and irradiated with a laser beam. The s-polarized component of the laser beam reflected by the surface and p
The respective intensities “Ros, Rop” with the polarization components are individually measured, and the reflection intensities “Ros, Ro” of the actually measured s / p polarization components are measured.
The ratio “Ros / Rop” of the “p” is calculated as the actually measured ratio, and the theoretical value “Rs,” of the reflection intensity of the s / p polarization component on the smooth surface is calculated for each of several materials expected to form the sample. R
The theoretical ratio “Rs / Rp”, which is the ratio of “p”, is set in advance, and one approximating the actually measured ratio calculated from the set theoretical ratios is selected. A surface inspection method in which two materials are determined as materials of a sample. 5. A sample having a surface formed of at least one of several kinds of materials expected in advance, and holding and irradiating a laser beam on the surface of the held sample. The s-polarized component of the laser beam reflected by the surface and p
The respective intensities “Ros, Rop” with the polarization components are individually measured, and the reflection intensities “Ros, Ro” of the actually measured s / p polarization components are measured.
The ratio “Ros / Rop” of the “p” is calculated as the actually measured ratio, and the product value “Ros × Rop” is calculated as the actually measured product value, and the smooth surface is calculated for each of several materials that are expected to form the sample. The theoretical value of the reflection intensity of the s / p polarization component “Rs, R
The theoretical ratio “Rs / Rp” which is the ratio of “p” and the sample product value “Rs × Rp” corresponding to the product value are set in advance, and the actual measurement calculated from the set theoretical ratios Select a candidate that approximates the ratio, select one that approximates the sample product value calculated from the sample product value of the selected candidate, and determine this selected material as the material of the sample. Surface inspection method. 6. The theoretical ratio “Rs / Rp”, which is the ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form the sample. Data calculating means for calculating Rp, and a theoretical ratio "Rs / R" calculated by the data calculating means.
a data setting unit for storing database information by storing p ″ in a predetermined information storage medium together with identification data of a corresponding material. 7. The theoretical ratio “Rs / Rp”, which is the ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form the sample. Rp ”and a data calculating means for calculating a sample product value“ Rs × Rp ”corresponding to the product value; and a theoretical ratio“ Rs / R ”calculated by the data calculating means.
and a data setting means for storing the sample product value “Rs × Rp” and the corresponding material identification data together with the corresponding material identification data in a predetermined information storage medium to generate database means. 8. The data calculating means according to claim 1, wherein said data calculating means calculates a theoretical ratio "Rs /
8. The data generation device according to claim 6, wherein Rp is calculated as "(rs * rs ^* ) / (rp * rp ^* )" from the Fresnel amplitude reflectance "rs, rp" by a complex conjugate quantity *. 9. The data calculating means according to claim 6, wherein said sample product value “Rs ×
Rp is calculated as “(Pn / a) ² (Ps × Pp) by the specular reflection intensity“ Ps, Pp ”of the s / p polarized light, the irregular reflection intensity Pn of the laser beam incident at a predetermined angle in a substantially vertical direction, and the device constant a. 9. The data generating apparatus according to claim 7, wherein the data is calculated as "". 10. The data constant a of the data calculation means is a specular reflection intensity “Ps, Pp” and a diffuse reflection intensity Pn measured by a surface inspection device from a sample whose surface is clean and the material is clear, and an amplitude reflection of Fresnel. Theoretical product value ((r) of the material of the sample sample calculated from the ratio “rs, rp” by the complex conjugate amount *
s × rs ^* ) × (rp × rp ^* ) ”and“ Pn / √ {(rs × rs ^* ) ×
10. The data generation device according to claim 9, wherein the value is calculated as (rp ^* rp ^* ) / (Ps * Pp)} ". 11. A theoretical ratio “Rs / Rp” which is a ratio of a theoretical value “Rs, Rp” of a reflection intensity of an s / p polarization component on a smooth surface for each of several materials expected to form a sample. Rp ”
Is calculated, and the theoretical ratio “Rs / Rp” thus calculated is calculated.
And a database means for generating a database means by storing in a predetermined information storage medium together with identification data of a corresponding material. 12. The theoretical ratio “Rs / Rp”, which is the ratio of the theoretical value “Rs, Rp” of the reflection intensity of the s / p polarization component on the smooth surface for each of several materials expected to form the sample. Rp ”
And a sample product value “Rs × Rp” corresponding to the product value, and the theoretical ratio “Rs / Rp” thus calculated and the sample product value “Rs × Rp” are identified together with the corresponding material identification data. A data generation method for generating database means stored in a predetermined information storage medium.