JPH11287731A - Flaw inspection method - Google Patents
Flaw inspection methodInfo
- Publication number
- JPH11287731A JPH11287731A JP8779498A JP8779498A JPH11287731A JP H11287731 A JPH11287731 A JP H11287731A JP 8779498 A JP8779498 A JP 8779498A JP 8779498 A JP8779498 A JP 8779498A JP H11287731 A JPH11287731 A JP H11287731A
- Authority
- JP
- Japan
- Prior art keywords
- pressure space
- pressure
- negative pressure
- inspection
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は樹脂製品等を検査対
象物とする欠陥検査方法に係り、特に、ピンホールや亀
裂等の検査に用いて有効な欠陥検査方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect inspection method using a resin product or the like as an object to be inspected, and more particularly to a defect inspection method effective for inspection of a pinhole or a crack.
【０００２】[0002]
【従来の技術】例えば樹脂製のボトルやトレイにおける
ピンホールや亀裂等の欠陥を検査する場合、ボトルの口
部あるいはトレイの凹面側を閉塞し、ボトル内あるいは
トレイの凹面側に空気を供給し、その結果ボトル内ある
いはトレイの凹面側に形成された陽圧空間内の気圧を検
査する方法が採用されている。この方法では、ボトルや
トレイに欠陥があると、陽圧空間内の空気が欠陥を介し
て漏洩し、陽圧空間内の気圧が低下する。そこで、陽圧
空間内の圧力が低下した際に、検査中のボトルやトレイ
が欠陥を有していると判断する。2. Description of the Related Art For example, when inspecting for defects such as pinholes or cracks in a resin bottle or tray, the mouth of the bottle or the concave side of the tray is closed, and air is supplied into the bottle or the concave side of the tray. As a result, a method of checking the atmospheric pressure in the bottle or the positive pressure space formed on the concave side of the tray is adopted. In this method, if a bottle or tray has a defect, air in the positive pressure space leaks through the defect, and the pressure in the positive pressure space decreases. Therefore, when the pressure in the positive pressure space decreases, it is determined that the bottle or tray under inspection has a defect.
【０００３】[0003]
【発明が解決しようとする課題】ところで、上記従来の
欠陥検査方法の場合、合成樹脂製品等においては、物理
的強度を考慮すると、１気圧以上の差を設けることは不
適当な場合があるため、陽圧空間内の気圧を通常１．５
気圧程度となるよう調整する。一方、ボトルの外部ある
いはトレイの凸面側における気圧は約１気圧である。そ
のため、欠陥により陽圧空間内の空気が漏洩しても、陽
圧空間内の圧力変化は、最大でも１．５気圧→１気圧、
すなわち、２／３程度しか変化しない。更に、微少な欠
陥の場合、両空間の圧力が短時間では平衡に到達しない
場合が生じる。In the case of the above-mentioned conventional defect inspection method, it is sometimes inappropriate to provide a difference of 1 atm or more in a synthetic resin product or the like in consideration of physical strength. , The pressure in the positive pressure space is usually 1.5
Adjust to about atmospheric pressure. On the other hand, the air pressure outside the bottle or on the convex side of the tray is about 1 atm. Therefore, even if the air in the positive pressure space leaks due to a defect, the pressure change in the positive pressure space is 1.5 atm → 1 atm at maximum.
That is, it changes only about 2/3. Further, in the case of a minute defect, the pressure in both spaces may not reach equilibrium in a short time.
【０００４】このように、上記従来の検査方法では、空
気の漏洩に伴う陽圧空間内の圧力変化率が小さいため検
査感度が低く、その結果、特に微少な欠陥に対しては、
十分に欠陥を検知できない可能性があり、かつ検査時間
が長くなるという問題があった。本発明は上記事情に鑑
みてなされたもので、従来の検査方法に比して検査感度
が高く、検査時間の短い欠陥検査方法の提供をその目的
としている。As described above, in the above conventional inspection method, the inspection sensitivity is low because the rate of pressure change in the positive pressure space due to air leakage is low, and as a result, particularly for minute defects,
There has been a problem that the defect may not be sufficiently detected, and that the inspection time becomes long. The present invention has been made in view of the above circumstances, and has as its object to provide a defect inspection method that has higher inspection sensitivity and a shorter inspection time than conventional inspection methods.
【０００５】[0005]
【課題を解決するための手段】本発明に係る欠陥検査方
法では、表裏２面を有する検査対象物を境界として陰圧
空間を形成し、この陰圧空間内の圧力を測定することに
より、検査対象物の欠陥を判定している。In the defect inspection method according to the present invention, a negative pressure space is formed by using an inspection object having two front and rear surfaces as a boundary, and the pressure in the negative pressure space is measured to perform the inspection. The defect of the object is determined.
【０００６】ここで、検査対象物の表面または裏面の一
方を陽圧空間とし、他方を陰圧空間としてもよい。Here, one of the front surface and the back surface of the inspection object may be a positive pressure space, and the other may be a negative pressure space.
【０００７】また、検査対象物がトレイ状ないしはボト
ル状をなす凹面及び凸面を有する成形品である場合に
は、検査対象物の凹面側を大気圧または陽圧空間とし、
検査対象物の凸面側を陰圧空間とする。In the case where the object to be inspected is a molded article having a concave or convex surface in the shape of a tray or a bottle, the concave side of the object to be inspected is set to an atmospheric pressure or a positive pressure space,
The convex side of the inspection object is defined as a negative pressure space.
【０００８】一方、検査対象物がシート状をなす場合に
は、検査対象物を表側及び裏側から気密的に挟み、検査
対象物を境界として表面側を大気圧または陽圧空間、裏
面側を陰圧空間とする容器を用意し、検査対象物を前記
容器間に挟まれた状態で長手方向に沿って搬送しつつ、
陰圧空間内の圧力を測定することも可能である。On the other hand, when the object to be inspected is in the form of a sheet, the object to be inspected is hermetically sandwiched from the front side and the back side. Prepare a container as a pressure space, while transporting the inspection object along the longitudinal direction in a state sandwiched between the containers,
It is also possible to measure the pressure in the negative pressure space.
【０００９】[0009]
【発明の実施の形態】以下、図面に基づき、本発明の実
施形態について説明する。本発明をボトル状をなす検査
対象物に対し実施した場合の例を図１に示す。図中符号
１はボトル（検査対象物）で、その口部１ａには、空気
供給用の管路２が、コネクタ３を介して気密的に連結さ
れている。符号４は、ボトル１の周囲を気密的に覆う容
器で、容器４には、容器４内の空気を吸引する吸気口４
ａが設けられている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example in which the present invention is applied to a bottle-shaped inspection object. In the figure, reference numeral 1 denotes a bottle (object to be inspected), and a pipe 2 for supplying air is hermetically connected to a mouth 1 a through a connector 3. Reference numeral 4 denotes a container that hermetically covers the periphery of the bottle 1. The container 4 has an air inlet 4 that sucks air in the container 4.
a is provided.
【００１０】ボトル１の欠陥を検査するには、まず、ボ
トル１の口部１ａをコネクタ３に連結した後、ボトル１
の周囲を容器４で覆う。次いで、管路２からボトル１内
に空気を供給し、ボトル１内を所定気圧まで昇圧して陽
圧空間Ｓ1とするとともに、容器４内の空気を吸気口４
ａから吸引し、容器４内を所定気圧まで減圧して陰圧空
間Ｓ2とする。In order to inspect the bottle 1 for defects, first, the mouth 1a of the bottle 1 is connected to the connector 3, and then the bottle 1 is inspected.
Is covered with a container 4. Next, air is supplied into the bottle 1 from the pipeline 2, and the pressure in the bottle 1 is increased to a predetermined pressure to form the positive pressure space S 1, and the air in the container 4 is supplied to the intake port 4.
aspirated from a, a negative pressure space S 2 by reducing the pressure in the vessel 4 to a predetermined pressure.
【００１１】この状態で陰圧空間Ｓ2内の圧力を測定す
ると、ボトル１に欠陥がない場合には、陰圧空間Ｓ2内
の圧力が当初設定した気圧のまま維持される。一方、ボ
トル１にピンホールや亀裂等の欠陥があると、陽圧空間
Ｓ1内の空気が欠陥を介して陰圧空間Ｓ2へと漏洩し、陰
圧空間Ｓ2内の気圧が上昇する。そこで、陰圧空間Ｓ 2内
の気圧が上昇した際に、検査中のボトル１が欠陥を有し
ていると判断する。In this state, the negative pressure space STwoMeasure the pressure inside
Then, if there is no defect in the bottle 1, the negative pressure space STwoInside
Is maintained at the initially set pressure. On the other hand,
If there is a defect such as a pinhole or a crack in the tor 1, a positive pressure space
S1Air in the vacuum space S through the defectTwoLeaked into the shade
Pressure space STwoThe pressure inside rises. Therefore, the negative pressure space S TwoInside
Bottle 1 under inspection has a defect when the air pressure of
Judge that
【００１２】この欠陥検査方法では、例えば陽圧空間Ｓ
1内の気圧を大気圧または１．５気圧、陰圧空間Ｓ2内の
気圧を０．５気圧とした場合、欠陥により陽圧空間Ｓ1
内の空気が漏洩すると、陰圧空間Ｓ2内の圧力は、陽圧
空間Ｓ1内の気圧が大気圧の場合、最大で０．５気圧→
１気圧となって、２倍に上昇する。また、陽圧空間Ｓ1
内の気圧が１．５気圧の場合には、最大で０．５気圧→
１．５気圧となって、３倍に上昇する。これに対し、上
述した従来の欠陥検査方法では、陽圧空間内の気圧を
１．５気圧としても、欠陥による空気の漏洩に伴う陽圧
空間内の圧力変化は、最大でも２／３程度にしかならな
い。In this defect inspection method, for example, the positive pressure space S
When the pressure in 1 is the atmospheric pressure or 1.5 atm, and the pressure in the negative pressure space S 2 is 0.5 atm, the positive pressure space S 1
The air of the inner leaks, the pressure in the negative pressure space S 2, when the air pressure in the positive pressure space S 1 is the atmospheric pressure up to 0.5 atm →
It becomes one atmosphere and rises twice. The positive pressure space S 1
If the inside pressure is 1.5 atm, the maximum is 0.5 atm →
It becomes 1.5 atm and rises three times. On the other hand, in the above-described conventional defect inspection method, even if the pressure in the positive pressure space is set to 1.5 atm, the pressure change in the positive pressure space due to the air leakage due to the defect is at most about 2/3. I can only do that.
【００１３】すなわち、この欠陥検査方法では、陰圧空
間Ｓ2内の圧力変化を基準としているので、陽圧空間内
の圧力変化を基準とした場合に比べ、圧力変化率が大き
くなり、従って検査感度も向上する。その結果、この検
査方法によれば、従来検知できなかった、微少な欠陥を
も検出することが可能となり、かつ単位時間あたりの圧
力変化も大きくなるので、検査時間も短縮される。[0013] That is, in this defect inspection method, since the basis of the pressure change in the negative pressure space S 2, compared to the case relative to the pressure changes in between positive pressure, the pressure change rate is large, therefore inspection Sensitivity also improves. As a result, according to this inspection method, it is possible to detect even a minute defect that could not be detected conventionally, and the pressure change per unit time increases, so that the inspection time is shortened.
【００１４】本発明をトレイ状をなす検査対象物に対し
実施した場合の例を図２に示す。図中符号５はトレイ
（検査対象物）、符号６，７は、検査に用いられる容器
である。容器６，７はいずれも椀状をなす上下一対の部
材で、その端面は、図２に示すようにトレイ５を上下か
ら挟んだ際に、上方または下方からトレイ５の端部に気
密的に当接した状態で、互いに対向するようになってい
る。また、上側の容器６には、空気供給用の給気口６ａ
が設けられ、下側の容器７には、空気吸引用の吸気口７
ａが設けられている。FIG. 2 shows an example in which the present invention is applied to a tray-shaped inspection object. In the figure, reference numeral 5 denotes a tray (object to be inspected), and reference numerals 6 and 7 denote containers used for inspection. Each of the containers 6 and 7 is a pair of upper and lower members having a bowl shape, and the end faces thereof are airtightly attached to the end of the tray 5 from above or below when the tray 5 is sandwiched from above and below as shown in FIG. In a contact state, they are opposed to each other. The upper container 6 has an air supply port 6a for air supply.
The lower container 7 has an air inlet 7 for air suction.
a is provided.
【００１５】トレイ５の欠陥を検査するには、まず、ト
レイ５を、その凹面側を上方に、凸面側を下方に向けて
容器６，７間に設置し、容器６，７の端面にてトレイ５
の端部を上下から気密的に挟む。次いで、容器６内に給
気口６ａから空気を供給し、容器６とトレイ５の凹面側
とで囲まれた空間を所定気圧まで昇圧して陽圧空間Ｓ 1
とするとともに、容器７内の空気を吸気口７ａから吸引
し、容器７とトレイ５の凸面側とで囲まれた空間を所定
気圧まで減圧して陰圧空間Ｓ2とする。In order to inspect the tray 5 for defects, first,
Lay 5 with its concave side up and its convex side down
It is installed between the containers 6 and 7, and the tray 5
Airtight from above and below. Next, the water is supplied into the container 6.
Air is supplied from the air port 6a, and the concave side of the container 6 and the tray 5
And pressurize the space surrounded by 1
And the air in the container 7 is sucked through the air inlet 7a.
And a space defined by the container 7 and the convex side of the tray 5 is
Negative pressure space S after reducing pressure to atmospheric pressureTwoAnd
【００１６】そして、この状態で陰圧空間Ｓ2内の圧力
を測定し、陰圧空間Ｓ2内の気圧が上昇した際に、検査
中のトレイ５が欠陥を有していると判断する。この場合
も、陰圧空間Ｓ2内の圧力変化を基準としているので、
欠陥からの空気の漏洩により陰圧空間Ｓ2内の圧力が上
昇した際における圧力上昇率が大きくなり、検査感度が
向上する。[0016] Then, the pressure of the interlabial pressure in S 2 in this state is measured, when the air pressure in the negative pressure space S 2 is increased, the tray 5 under test is judged to have a defect. Again, since the basis of the pressure change in the negative pressure space S 2,
Rate of pressure rise becomes large at the time when the air pressure between the negative pressure in the S 2 by leakage from a defect increases, thereby improving the inspection sensitivity.
【００１７】本発明をシート状をなす検査対象物に対し
実施した場合の例を図３に示す。図中符号８はシート
で、その長手方向に沿って、矢印Ｆで示すように図中左
方から右方へと搬送可能となっている。また、検査に用
いられる容器６，７は、図２に示すものと同様である。FIG. 3 shows an example in which the present invention is applied to a sheet-like inspection object. Reference numeral 8 in the figure denotes a sheet, which can be conveyed from left to right in the figure as indicated by an arrow F along the longitudinal direction. The containers 6 and 7 used for the inspection are the same as those shown in FIG.
【００１８】シート８の欠陥を検査するには、まず、シ
ート８を容器６，７間に設置し、容器６，７の端面にて
シート８を上下から気密的に挟む。次いで、容器６内に
給気口６ａから空気を供給し、容器６とシート８の表面
（上面）とで囲まれた空間を所定気圧まで昇圧して陽圧
空間Ｓ1とするとともに、容器７内の空気を吸気口７ａ
から吸引し、容器７とシート８の裏面（下面）とで囲ま
れた空間を所定気圧まで減圧して陰圧空間Ｓ2とする。In order to inspect the sheet 8 for defects, first, the sheet 8 is placed between the containers 6 and 7, and the sheet 8 is hermetically sandwiched between the end surfaces of the containers 6 and 7 from above and below. Then, air is supplied from the air supply port 6a into the container 6, with a positive pressure space S 1 by boosting the was surrounded by the surface of the container 6 and the sheet 8 (upper surface) space to a predetermined pressure, the vessel 7 Air inside the intake port 7a
Sucked from the negative pressure space S 2 to depressurize the space surrounded by the rear surface (lower surface) of the container 7 and the sheet 8 to a predetermined pressure.
【００１９】そして、この状態で陰圧空間Ｓ2内の圧力
を測定し、陰圧空間Ｓ2内の気圧が上昇した際に、シー
ト８のうち、容器６，７で挟まれた範囲が欠陥を有して
いると判断する。この場合も、陰圧空間Ｓ2内の圧力変
化を基準としているので、欠陥からの空気の漏洩により
陰圧空間Ｓ2内の圧力が上昇した際における圧力上昇率
が大きくなり、検査感度が向上する。シート８を容器
６，７で挟みつつ長手方向に沿って搬送し、陰圧空間Ｓ
2内の圧力を連続的に測定することにより、シート８の
欠陥を連続的に検査することも可能である。In this state, the pressure in the negative pressure space S 2 is measured. When the pressure in the negative pressure space S 2 rises, the area of the sheet 8 sandwiched between the containers 6 and 7 is defective. Is determined to have. Again, since the basis of the pressure change in the negative pressure space S 2, the pressure increase rate is increased at the time when the pressure in the negative pressure space S 2 by air leakage from a defect increases, improved inspection sensitivity I do. The sheet 8 is conveyed along the longitudinal direction while being sandwiched between the containers 6 and 7, and the negative pressure space S
By continuously measuring the pressure in 2 , it is also possible to continuously inspect the sheet 8 for defects.
【００２０】なお、上記の各実施形態において、検査感
度の更なる向上と、検査時間の更なる短縮とを図るため
には、 陰圧空間Ｓ2内の圧力を低く設定することにより、基
準となる圧力を小さくして、圧力変化率を増大させる 陽圧空間Ｓ1内の圧力を高く設定することにより、空
気の漏洩量を増大させる 陰圧空間Ｓ2の容積を可能な限り小さく設定すること
により、空気の漏洩量に対する圧力変化率を増大させる 等の手段を講じることが望ましい。[0020] In each embodiment described above, and a further improvement in test sensitivity, in order to achieve a further reduction of inspection time, by setting a low pressure in the negative pressure space S 2, the reference and the pressure formed by small, by setting a higher pressure in the positive pressure space S 1 to increase the pressure change rate, setting as small as possible the volume of the negative pressure space S 2 to increase the amount of leakage air Therefore, it is desirable to take measures such as increasing the rate of pressure change with respect to the amount of air leakage.
【００２１】例えば、図２に示す容器６，７において、
容器６，７の形状をトレイ５の形状に相似させる等の措
置を講じることにより、陰圧空間Ｓ2の容積を可能な限
り小さく設定しておけば、相対的に少ない空気の漏洩量
であっても、空気の漏洩量を圧力変化率に反映させるこ
とが可能となる。For example, in containers 6 and 7 shown in FIG.
By measures such as to similarity of shape of the container 6,7 in the shape of the tray 5, by setting as much as possible the volume of the negative pressure space S 2 smaller, there in leakage amount of relatively less air However, the amount of air leakage can be reflected in the pressure change rate.
【００２２】また、検査対象物の材質としては、樹脂の
他、金属、樹脂が含浸された紙、更には樹脂と紙や金属
との積層体等、気密性を有するものであれば、本発明の
欠陥検査方法が適用可能である。検査対象物の形状につ
いても、検査対象物を境界として陽圧空間Ｓ1と陰圧空
間Ｓ2とが形成可能なものであれば特に限定されない。The material of the object to be inspected is not limited to resin, but may be metal, paper impregnated with resin, or a laminate of resin and paper or metal. Is applicable. For the shape of the test object it is not particularly limited as long as the positive pressure space S 1 and the negative pressure space S 2 the inspection object as a boundary can be formed.
【００２３】[0023]
【発明の効果】以上説明した通り、 本発明に係る欠陥
検査方法では、陰圧空間内の圧力変化を基準としている
ので、陽圧空間内の圧力変化を基準とした場合に比べ、
圧力変化率が大きくなり、従って検査感度も向上する。
その結果、この検査方法によれば、従来検知できなかっ
た、微少な欠陥をも検出することが可能となり、かつ単
位時間あたりの圧力変化も大きくなるので、検査時間も
短縮される。As described above, in the defect inspection method according to the present invention, since the pressure change in the negative pressure space is used as a reference, compared with the case where the pressure change in the positive pressure space is used as a reference,
The rate of pressure change is increased, and thus the inspection sensitivity is also improved.
As a result, according to this inspection method, it is possible to detect even a minute defect that could not be detected conventionally, and the pressure change per unit time increases, so that the inspection time is shortened.
【図１】 本発明をボトル状をなす検査対象物に対し実
施した場合の例を示す断面図である。FIG. 1 is a cross-sectional view showing an example in which the present invention is applied to a bottle-shaped inspection object.
【図２】 本発明をトレイ状をなす検査対象物に対し実
施した場合の例を示す断面図である。FIG. 2 is a sectional view showing an example in which the present invention is applied to a tray-shaped inspection object.
【図３】 本発明をシート状をなす検査対象物に対し実
施した場合の例を示す断面図である。FIG. 3 is a cross-sectional view showing an example in which the present invention is applied to a sheet-like inspection object.
１ ボトル（検査対象物） １ａ 口部 ５ トレイ（検査対象物） ６，７ 容器 ８ シート（検査対象物） Ｓ1 陽圧空間 Ｓ2 陰圧空間1 bottle (inspection object) 1a mouth 5 trays (inspection object) 6,7 container 8 sheets (test object) S 1 between positive pressure space S 2 negative pressure
Claims (4)
て陰圧空間を形成し、この陰圧空間内の圧力を測定する
ことにより、前記検査対象物の欠陥を判定することを特
徴とする欠陥検査方法。A negative pressure space is formed with an inspection object having two front and back surfaces as boundaries, and a defect in the inspection object is determined by measuring a pressure in the negative pressure space. Defect inspection method.
を陽圧空間とし、他方を前記陰圧空間とすることを特徴
とする請求項１記載の欠陥検査方法。2. The defect inspection method according to claim 1, wherein one of a front surface and a back surface of the inspection object is a positive pressure space, and the other is the negative pressure space.
ル状をなす凹面及び凸面を有する成形品であり、前記検
査対象物の凹面側を大気圧または前記陽圧空間とし、前
記検査対象物の凸面側を前記陰圧空間とすることを特徴
とする請求項１または２記載の欠陥検査方法。3. The test object is a molded article having a concave or convex surface in the form of a tray or a bottle, the concave side of the test object being atmospheric pressure or the positive pressure space, and the convex surface of the test object. 3. The defect inspection method according to claim 1, wherein a side is the negative pressure space.
検査対象物を表側及び裏側から気密的に挟み、前記検査
対象物を境界として表面側を大気圧または前記陽圧空
間、裏面側を前記陰圧空間とする容器を用意し、前記検
査対象物を前記容器間に挟まれた状態で長手方向に沿っ
て搬送しつつ、前記陰圧空間内の圧力を測定することを
特徴とする請求項１または２記載の欠陥検査方法。4. The inspection object has a sheet shape, the inspection object is airtightly sandwiched from the front side and the back side, and the front side is the atmospheric pressure or the positive pressure space, and the back side is the boundary of the inspection object. Preparing a container as the negative pressure space, measuring the pressure in the negative pressure space while transporting the test object along the longitudinal direction in a state sandwiched between the containers. Item 3. The defect inspection method according to Item 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779498A JPH11287731A (en) | 1998-03-31 | 1998-03-31 | Flaw inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779498A JPH11287731A (en) | 1998-03-31 | 1998-03-31 | Flaw inspection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11287731A true JPH11287731A (en) | 1999-10-19 |
Family
ID=13924897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8779498A Pending JPH11287731A (en) | 1998-03-31 | 1998-03-31 | Flaw inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11287731A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510885A (en) * | 2002-12-19 | 2006-03-30 | ダイムラークライスラー・アクチェンゲゼルシャフト | Leakage inspection method and apparatus |
| CN106017828A (en) * | 2016-06-22 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtight type air tightness detection apparatus |
-
1998
- 1998-03-31 JP JP8779498A patent/JPH11287731A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510885A (en) * | 2002-12-19 | 2006-03-30 | ダイムラークライスラー・アクチェンゲゼルシャフト | Leakage inspection method and apparatus |
| CN106017828A (en) * | 2016-06-22 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtight type air tightness detection apparatus |
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