JPH1128693A - Uniaxial robot - Google Patents

Uniaxial robot

Info

Publication number
JPH1128693A
JPH1128693A JP18151997A JP18151997A JPH1128693A JP H1128693 A JPH1128693 A JP H1128693A JP 18151997 A JP18151997 A JP 18151997A JP 18151997 A JP18151997 A JP 18151997A JP H1128693 A JPH1128693 A JP H1128693A
Authority
JP
Japan
Prior art keywords
ceiling cover
movable member
guide
ceiling
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP18151997A
Other languages
Japanese (ja)
Inventor
Takashi Tamura
孝史 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Motor Co Ltd
Original Assignee
Yamaha Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Motor Co Ltd filed Critical Yamaha Motor Co Ltd
Priority to JP18151997A priority Critical patent/JPH1128693A/en
Publication of JPH1128693A publication Critical patent/JPH1128693A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To prevent the collision of a ceiling cover with a movable member caused by the deflection of the ceiling cover. SOLUTION: A uniaxial robot 1 is constituted by integrally housing a movable member 8 and driving means for unaxially moving the movable member 8 in a casing 2. The casing 2 consists of a frame 4 and a ceiling cover 3. Both the ends in the longitudinal direction of the ceiling cover 3 are installed on the frame 4. The ceiling cover 3 at its central lower face is provided with a guide 30 through a leg. The movable member 8 at its upper part is provided with a slide contact member 32 consisting of a resin material which is slide- contacting the guide 30. A slit-like accepting port 33 opened to a side is formed in the slide contact member 32. The guide 30 is interposed in the accepting port 33. Thus, the ceiling cover 3 is supported through the guide 30 and the slide contact member 32 in the course of moving the movable member 8.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、単軸ロボットの改
良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single-axis robot.

【0002】[0002]

【従来の技術】従来から、例えば、可動部材をボールね
じ機構によりレールに沿って移動させるようにし、目的
に応じた各種ツールを上記可動部材に搭載できるようし
た単軸ロボットはよく知られている。
2. Description of the Related Art Conventionally, a single-axis robot in which, for example, a movable member is moved along a rail by a ball screw mechanism and various tools according to the purpose can be mounted on the movable member is well known. .

【0003】この種の単軸ロボットでは、箱型のケーシ
ングに可動部材や上記ボールねじ機構等の駆動手段を収
納し、例えば、ケーシングの左右両側に形成されたスリ
ット状の開口部から可動部材のツール取付部分を外部に
臨ませるように構成されている。
In this kind of single-axis robot, a box-shaped casing accommodates a movable member and driving means such as the ball screw mechanism, and, for example, a movable member through a slit-shaped opening formed on the left and right sides of the casing. The tool mounting portion is configured to face the outside.

【0004】ケーシングは一般に、底板部と側壁部とを
一体に備えたフレームと、このフレームの上部に装着さ
れる天井カバーとから構成されており、フレームの側壁
上端と天井カバーとの間に可動部材の移動方向に延びる
スリット状の開口部が形成されるようになっている。
A casing generally includes a frame integrally having a bottom plate and a side wall, and a ceiling cover mounted on an upper portion of the frame. The casing is movable between an upper end of the side wall of the frame and the ceiling cover. A slit-shaped opening extending in the moving direction of the member is formed.

【0005】[0005]

【発明が解決しようとする課題】上記のような単軸ロボ
ットでは、上述のようにスリット状の開口部を設ける必
要があるため、天井カバーは、一般に、フレームの側壁
上端から離間した状態で、長手方向両端部分でフレーム
に取付けられるようになっている。
In the single-axis robot as described above, since it is necessary to provide the slit-shaped opening as described above, the ceiling cover is generally placed in a state of being separated from the upper end of the side wall of the frame. It is designed to be attached to the frame at both ends in the longitudinal direction.

【0006】ところが、この構造の場合、可動部材の可
動ストロークが長くなると天井カバーが自重で撓む傾向
にあり、この撓みが大きい場合には、可動部材と天井カ
バーとが部分的に衝突して異音を生じさせたり、あるい
は天井カバーや可動部材を損傷する原因となる。そこ
で、天井カバーの板厚を厚くして剛性を高めることも考
えられるが、これではロボット重量の増大やコストアッ
プを招くことになり必ずしも有効ではない。
However, in the case of this structure, if the movable stroke of the movable member is long, the ceiling cover tends to bend under its own weight. If the deflection is large, the movable member and the ceiling cover partially collide with each other. It may cause abnormal noise or damage the ceiling cover and movable members. Therefore, it is conceivable to increase the thickness of the ceiling cover to increase the rigidity. However, this increases the weight of the robot and increases the cost, which is not always effective.

【0007】本発明は、上記問題を解決するためになさ
れたものであり、天井カバーの撓みによる天井カバーと
可動部材との衝突を防止することができる単軸ロボット
を提供することを目的としている。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and has as its object to provide a single-axis robot capable of preventing a collision between a ceiling cover and a movable member due to bending of the ceiling cover. .

【0008】[0008]

【課題を解決するための手段】本発明は、ケーシング内
に一軸方向に移動可能な可動部材とその駆動手段とが収
納され、上記ケーシングが、フレームと一軸方向両端で
前記フレームに取付けられる天井カバーとを有している
単軸ロボットにおいて、上記可動部材に、天井カバーを
支持しつつこれに摺接する摺接部材を設けたものである
(請求項1)。
According to the present invention, there is provided a ceiling cover in which a movable member movable in one axis direction and driving means for the movable member are housed in a casing, and the casing is attached to the frame at both ends in a single axis direction. A movable member provided with a sliding member that supports the ceiling cover and slides on the ceiling cover.

【0009】この構成によれば、可動部材が摺接部材を
介して天井カバーを支持しながら摺動する。そのため、
天井カバーの自重によるたわみが抑制され、かつ、多少
撓んでいる場合でも、常に可動部材と天井カバーとが摺
接している状態が保たれて、移動途中で可動部材が天井
カバーに衝突するといった事態を有効に回避することが
可能となる。
According to this configuration, the movable member slides while supporting the ceiling cover via the sliding contact member. for that reason,
A situation in which the flexure of the ceiling cover due to its own weight is suppressed and the movable member and the ceiling cover are always in sliding contact with each other even when the ceiling cover is slightly bent, and the movable member collides with the ceiling cover during movement. Can be effectively avoided.

【0010】特に、上記天井カバーの下面に一軸方向に
延びるガイド部材を設け、上記摺接部材がこのガイド部
材に上下方向位置を規制するように係合した状態で、こ
のガイド部材を介して天井カバーを支持するように構成
すれば(請求項2)、天井カバーと可動部材との上下方
向の位置関係を一定に保つことができるので、可動部材
と天井カバーとの断続的な接触による天井カバーの振動
等の発生を回避することが可能となる。
Particularly, a guide member extending in a uniaxial direction is provided on the lower surface of the ceiling cover, and the sliding contact member is engaged with the guide member so as to regulate the vertical position, and the ceiling member is connected to the ceiling member via the guide member. If the cover is configured to be supported (claim 2), the vertical positional relationship between the ceiling cover and the movable member can be kept constant, so that the ceiling cover due to intermittent contact between the movable member and the ceiling cover. , Etc., can be avoided.

【0011】この場合、ガイド部材として上記天井カバ
ーの下面に一軸方向に延びる略水平な板状ガイドを突設
する一方、摺接部材として略水平なスリット状の開口を
有した突出部を上記可動部材の上部に設け、上記板状ガ
イドを前記突出部のスリット状の開口内に介装する(請
求項3)ようにすれば、簡単な構成で上記作用効果を得
ることが可能となる。
In this case, a substantially horizontal plate-like guide extending in a uniaxial direction is protruded from the lower surface of the ceiling cover as a guide member, and a protrusion having a substantially horizontal slit-like opening as a sliding contact member is moved by the movable member. By providing the plate-shaped guide in the upper part of the member and interposing the plate-shaped guide in the slit-shaped opening of the projecting portion (claim 3), it is possible to obtain the above-described operation and effect with a simple configuration.

【0012】[0012]

【発明の実施の形態】本発明の実施の形態について図面
を用いて説明する。
Embodiments of the present invention will be described with reference to the drawings.

【0013】図1乃至図3は、本発明に係る単軸ロボッ
トの一例を示している。これらの図に示すように、単軸
ロボット1は、一軸方向に延びる細長のケーシング2を
有しており、このケーシング2の内部に可動部材8とそ
の駆動機構とを備えた構成となっている。
FIGS. 1 to 3 show an example of a single-axis robot according to the present invention. As shown in these drawings, the single-axis robot 1 has an elongated casing 2 extending in one axis direction, and has a configuration in which a movable member 8 and a driving mechanism thereof are provided inside the casing 2. .

【0014】ケーシング2は、主にケーシング2の底部
及び側壁部を構成する断面U字型のフレーム4と、その
上部に配設される天井カバー3とからなり、天井カバー
3がフレーム4のカバー取付部5を介してその長手方向
両端部でフレーム4に取付けられた構成となっている。
天井カバー3とフレーム4とは、共にアルミ、あるいは
スチール等の金属材料から形成されており、図3に示す
ように、フレーム4の側壁部の上端と天井カバー3と間
に一定の隙間が形成されるように相互に取付けられてい
る。これによってケーシング2の左右両側に長手方向に
延びるスリット状の開口部7が形成されている。なお、
図1及び図2において6は、フレーム4の一端側に取付
けられたモーターカバーである。
The casing 2 mainly comprises a frame 4 having a U-shaped cross section which forms the bottom and side walls of the casing 2 and a ceiling cover 3 disposed on the upper part thereof. It is configured to be mounted on the frame 4 at both ends in the longitudinal direction via the mounting portion 5.
The ceiling cover 3 and the frame 4 are both formed of a metal material such as aluminum or steel, and a certain gap is formed between the upper end of the side wall of the frame 4 and the ceiling cover 3 as shown in FIG. Mutually attached to be done. Thus, a slit-shaped opening 7 extending in the longitudinal direction is formed on both left and right sides of the casing 2. In addition,
In FIGS. 1 and 2, reference numeral 6 denotes a motor cover attached to one end of the frame 4.

【0015】上記可動部材8は、上記ケーシング2の内
部において一軸方向に移動可能に配設され、ケーシング
2の一端側に配設されるモータ14により駆動されるよ
うになっている。
The movable member 8 is provided so as to be movable in one axis direction inside the casing 2 and is driven by a motor 14 provided at one end of the casing 2.

【0016】詳しく説明すると、上記フレーム4の底部
には一軸方向に延びる互いに平行な一対の固定レール1
0が配設され、この固定レール10にスライドユニット
12を介して可動部材8が移動自在に装着されている。
また、モータ14の近傍に一体回転可能な大小2つのプ
ーリ18,22が支持され、モータ14の出力軸に装着
されたプーリ16と、上記プーリ18とにわたってタイ
ミングベルト20が装着されるとともに、上記プーリ2
2と、ケーシング2の他端側、すなわちモータ14の配
設側と反対側に配設されたプーリ24とにわたって駆動
ベルト26が装着されている。そして、図3に示すよう
に、上記駆動ベルト26が取付部材9を介して上記可動
部材8に接続されている。
More specifically, a pair of parallel fixed rails 1 extending in a uniaxial direction are provided on the bottom of the frame 4.
The movable member 8 is movably mounted on the fixed rail 10 via a slide unit 12.
Two large and small pulleys 18 and 22 that can rotate integrally are supported in the vicinity of the motor 14, and a timing belt 20 is mounted over the pulley 16 mounted on the output shaft of the motor 14 and the pulley 18. Pulley 2
A drive belt 26 is attached to the other end of the casing 2, that is, a pulley 24 disposed on the opposite side of the motor 14. Then, as shown in FIG. 3, the drive belt 26 is connected to the movable member 8 via a mounting member 9.

【0017】すなわち、モータ14が正逆回転駆動され
ると、その回転力がプーリ16,タイミングベルト2
0、プーリ18,22を介して駆動ベルト26に伝達さ
れ、これによって駆動ベルト26が移動することにより
可動部材8が固定レール10に沿って往復移動するよう
になっている。
That is, when the motor 14 is driven to rotate in the forward and reverse directions, the rotation force is applied to the pulley 16 and the timing belt 2.
The movable member 8 is transmitted to the drive belt 26 via the pulleys 18 and 22 so that the drive belt 26 moves, whereby the movable member 8 reciprocates along the fixed rail 10.

【0018】可動部材8には、図3に示すようにその左
右両側に各種ツールを取付けるためのツール取付部11
が一体に形成されており、上記スリット状の開口部7を
介してこのツール取付部11がケーシング2の外部に臨
んでいる。
As shown in FIG. 3, the movable member 8 has a tool mounting portion 11 for mounting various tools on the left and right sides thereof.
Are formed integrally, and the tool mounting portion 11 faces the outside of the casing 2 through the slit-shaped opening 7.

【0019】ここで、この単軸ロボット1の特徴とし
て、上記天井カバー3の下面略中央には、脚29を介し
て左右両側に水平延びる薄板状のガイド30が可動部材
8の移動範囲にわたって設けられているとともに、可動
部材8の上部に、上記ガイド30に摺接する樹脂材料か
らなる摺接部材32が設けられている。そして、上記摺
接部材32に側方に開口するスリット状の受入口33が
形成され、この受入口33に上記ガイド30が介装され
るようになっている。これにより、摺接部材32を介し
て天井カバー3が支持されるようになっている。なお、
この受入口33の上下幅は、ガイド30の厚みよりも若
干広く設定されている。
Here, as a feature of the single-axis robot 1, a thin plate-like guide 30 extending horizontally on both left and right sides via legs 29 is provided substantially in the center of the lower surface of the ceiling cover 3 over the moving range of the movable member 8. In addition, a sliding member 32 made of a resin material that slides on the guide 30 is provided above the movable member 8. The sliding contact member 32 is formed with a slit-shaped receiving opening 33 that opens laterally, and the guide 30 is interposed in the receiving opening 33. Thereby, the ceiling cover 3 is supported via the sliding contact member 32. In addition,
The vertical width of the receiving port 33 is set slightly wider than the thickness of the guide 30.

【0020】以上のように構成された単軸ロボット1に
よれば、上述のようにモータ14が作動し、この回転力
の伝達を受けて可動部材8が固定レール10に沿って一
軸方向に移動する。そして、このような可動部材8の移
動中には、天井カバー3が摺接部材32及びガイド30
を介して支持されることとなる。そのため、可動部材8
の移動ストロークが長くなり、天井カバー3が自重で撓
んでその撓みが大きくなるような場合でも、可動部材8
の移動中に可動部材8と天井カバー3とが部分的に衝突
するようなことがなく、このような衝突による異音の発
生や、あるいは天井カバー3や可動部材8の損傷を有効
に回避することができる。
According to the single-axis robot 1 configured as described above, the motor 14 operates as described above, and the movable member 8 moves in the one-axis direction along the fixed rail 10 by receiving the rotation force. I do. During the movement of the movable member 8, the ceiling cover 3 is moved by the sliding member 32 and the guide 30.
Will be supported through. Therefore, the movable member 8
The moving stroke of the ceiling member 3 becomes longer due to its own weight, and the bending of the ceiling cover 3 becomes larger.
The movable member 8 does not partially collide with the ceiling cover 3 during the movement of the vehicle, and generation of abnormal noise due to such collision and damage to the ceiling cover 3 and the movable member 8 are effectively avoided. be able to.

【0021】なお、上記の構成では、天井カバー3にガ
イド30を設け、これを摺接部材32の受入口33に介
装するようにしているが、より簡単な構成として、ガイ
ド30を設けることなく、例えば、単に円弧状の摺接面
を上部に有した摺接部材を可動部材8の上部に設け、こ
れによって直接、天井カバー3の略中央部を支持するよ
うにしてもよい。また、この場合に摺接面を回転自在な
ローラやコロによって構成するようにしてもよい。但
し、これらの構成では、例えば、天井カバー3が長手方
向に波打っているような場合に、摺接部材と天井カバー
3とが断続的に接触して天井カバー3に振動を生じさせ
るような場合がある。そのため、望ましくは、上記実施
形態のような構成を採る方が好ましい。つまり、上記実
施形態の構成によれば、ガイド30が摺接部材32の受
入口33内に介装されて、天井カバー3と可動部材8と
の位置関係が一定に保たれるので、摺接部材と天井カバ
ー3とが断続的に接触して天井カバー3に振動を生じさ
せるようなことがない。
In the above configuration, the guide 30 is provided on the ceiling cover 3 and the guide 30 is interposed in the receiving port 33 of the sliding member 32. However, as a simpler configuration, the guide 30 is provided. Instead, for example, a sliding contact member having an arc-shaped sliding contact surface on the upper portion may be provided on the upper portion of the movable member 8 to directly support the substantially central portion of the ceiling cover 3. Further, in this case, the sliding contact surface may be constituted by a rotatable roller or roller. However, in these configurations, for example, when the ceiling cover 3 is waving in the longitudinal direction, the sliding contact member and the ceiling cover 3 intermittently come into contact with each other, causing the ceiling cover 3 to vibrate. There are cases. Therefore, it is desirable to adopt the configuration as in the above embodiment. That is, according to the configuration of the above embodiment, the guide 30 is interposed in the receiving port 33 of the sliding member 32, and the positional relationship between the ceiling cover 3 and the movable member 8 is kept constant. The members and the ceiling cover 3 do not intermittently contact with each other and do not cause the ceiling cover 3 to vibrate.

【0022】また、上記実施形態では、天井カバー3を
金属材料から形成し、摺接部材32を樹脂材料から形成
しているが、具体的な材料は、ガイド30と摺接部材3
2をより滑らかに摺接させることができるように適宜選
定するようにすればよい。
In the above-described embodiment, the ceiling cover 3 is formed from a metal material, and the sliding contact member 32 is formed from a resin material.
2 may be appropriately selected so as to make the sliding contact more smoothly.

【0023】[0023]

【発明の効果】以上説明したように、本発明は、ケーシ
ング内に一軸方向に移動可能な可動部材とその駆動手段
とを収納した端軸ロボットにおいて、可動部材に、上記
ケーシングの天井カバーを支持しつつこれに摺接する摺
接部材を設けるようにしたので、可動部材の移動ストロ
ークが長くなり、天井カバーが自重で大きく撓むような
場合でも、可動部材と天井カバーとの衝突による異音の
発生、あるいは天井カバーや可動部材の損傷を有効に回
避することができる。
As described above, according to the present invention, in an end axis robot in which a movable member movable in one axis direction and a driving means for the movable member are accommodated in a casing, the movable member supports the ceiling cover of the casing. The moving member has a long sliding stroke, and even if the ceiling cover flexes greatly due to its own weight, generation of abnormal noise due to the collision between the moving member and the ceiling cover. Alternatively, damage to the ceiling cover and the movable member can be effectively avoided.

【0024】特に、上記天井カバーの下面に一軸方向に
延びるガイド部材を設け、上記摺接部材がこのガイド部
材に上下方向位置を規制するように係合した状態で、こ
のガイド部材を介して天井カバーを支持するように構成
し、具体的には、ガイド部材として上記天井カバーの下
面に一軸方向に延びる略水平な板状ガイドを突設する一
方、摺接部材として略水平なスリット状の開口を有した
突出部を上記可動部材の上部に設け、上記板状ガイドを
前記突出部のスリット状の開口内に介装するようにすれ
ば、天井カバーと可動部材との上下方向の位置関係を一
定に保つことができ、これにより可動部材と天井カバー
との断続的な接触による天井カバーの振動の発生等を回
避することができる。
In particular, a guide member extending in a uniaxial direction is provided on a lower surface of the ceiling cover, and the sliding contact member is engaged with the guide member so as to regulate the vertical position, and the ceiling member is interposed through the guide member. The cover is configured to support the cover. Specifically, a substantially horizontal plate-like guide extending uniaxially is protruded from the lower surface of the ceiling cover as a guide member, while a substantially horizontal slit-like opening is provided as a sliding contact member. If a projection having a projection is provided above the movable member, and the plate-shaped guide is interposed in the slit-shaped opening of the projection, the vertical positional relationship between the ceiling cover and the movable member can be improved. It can be kept constant, thereby avoiding the occurrence of vibration of the ceiling cover due to intermittent contact between the movable member and the ceiling cover.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る端軸ロボットの一例を示す平面略
図である。
FIG. 1 is a schematic plan view showing an example of an end-axis robot according to the present invention.

【図2】端軸ロボットを示す図1のA−A断面図であ
る。
FIG. 2 is a sectional view taken along line AA of FIG. 1 showing the end-axis robot.

【図3】端軸ロボットを示す図1のB−B断面図であ
る。
FIG. 3 is a sectional view taken along line BB of FIG. 1 showing the end axis robot.

【符号の説明】[Explanation of symbols]

1 単軸ロボット 2 ケーシング 3 天井カバー 4 フレーム 5 カバー取付部 6 モーターカバー 7 開口部 8 可動部材 9 取付部材 10 固定レール 11 ツール取付部 14 モータ 20 タイミングベルト 26 駆動ベルト 30 ガイド 32 摺接部材 33 受入口 DESCRIPTION OF SYMBOLS 1 Single axis robot 2 Casing 3 Ceiling cover 4 Frame 5 Cover mounting part 6 Motor cover 7 Opening 8 Movable member 9 Mounting member 10 Fixed rail 11 Tool mounting part 14 Motor 20 Timing belt 26 Drive belt 30 Guide 32 Sliding member 33 Receiving entrance

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ケーシング内に一軸方向に移動可能な可
動部材とその駆動手段とが収納され、上記ケーシング
が、フレームと一軸方向両端で前記フレームに取付けら
れる天井カバーとを有している単軸ロボットにおいて、
上記可動部材に、天井カバーを支持しつつこれに摺接す
る摺接部材を設けたことを特徴とする単軸ロボット。
A movable member movable in one axis direction and a driving means for the movable member are accommodated in a casing, and the casing has a frame and a ceiling cover attached to the frame at both ends in the one axis direction. In the robot,
A single-axis robot, wherein the movable member is provided with a sliding contact member that supports the ceiling cover while slidingly contacting the ceiling cover.
【請求項2】 上記天井カバーの下面に一軸方向に延び
るガイド部材を設け、上記摺接部材がこのガイド部材に
上下方向位置を規制するように係合した状態で、このガ
イド部材を介して天井カバーを支持するように構成され
ていることを特徴とする請求項1記載の単軸ロボット。
2. A guide member extending in a uniaxial direction is provided on a lower surface of the ceiling cover, and the sliding contact member is engaged with the guide member so as to regulate a vertical position, and the ceiling is interposed through the guide member. The single-axis robot according to claim 1, wherein the single-axis robot is configured to support the cover.
【請求項3】 ガイド部材として上記天井カバーの下面
に一軸方向に延びる略水平な板状ガイドを突設する一
方、摺接部材として略水平なスリット状の開口を有した
突出部を上記可動部材の上部に設け、上記板状ガイドを
前記突出部のスリット状の開口内に介装するようにした
ことを特徴とする請求項2記載の単軸ロボット。
3. A substantially horizontal plate-like guide extending in a uniaxial direction protruding from a lower surface of the ceiling cover as a guide member, and a protrusion having a substantially horizontal slit-like opening as a sliding contact member is provided on the movable member. The single-axis robot according to claim 2, wherein the plate-shaped guide is provided in an upper part of the robot, and the plate-shaped guide is interposed in a slit-shaped opening of the projecting portion.
JP18151997A 1997-07-07 1997-07-07 Uniaxial robot Withdrawn JPH1128693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18151997A JPH1128693A (en) 1997-07-07 1997-07-07 Uniaxial robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18151997A JPH1128693A (en) 1997-07-07 1997-07-07 Uniaxial robot

Publications (1)

Publication Number Publication Date
JPH1128693A true JPH1128693A (en) 1999-02-02

Family

ID=16102184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18151997A Withdrawn JPH1128693A (en) 1997-07-07 1997-07-07 Uniaxial robot

Country Status (1)

Country Link
JP (1) JPH1128693A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009034791A (en) * 2007-08-03 2009-02-19 Ulvac Japan Ltd Substrate carrying device
JP2014516812A (en) * 2011-05-16 2014-07-17 アドバンスド マニュファクチャー テクノロジー センター、チャイナアカデミー オブ マシーネリー サイエンス アンド テクノロジー Positioning beam and robot linear motion unit comprising the positioning beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009034791A (en) * 2007-08-03 2009-02-19 Ulvac Japan Ltd Substrate carrying device
JP2014516812A (en) * 2011-05-16 2014-07-17 アドバンスド マニュファクチャー テクノロジー センター、チャイナアカデミー オブ マシーネリー サイエンス アンド テクノロジー Positioning beam and robot linear motion unit comprising the positioning beam

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