JPH11280707A - Slide cylinder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize a device by arranging relatively compactly a prescribed number of rollers for supporting a moving part. SOLUTION: In this cylinder, a moving part 5 reciprocating upon receiving the supply of hydraulic pressure is disposed between a pair of side walls 1b provided in a fixed part 7. Linear guide mechanisms 6 are provided between the side walls 1b and the moving part 5. Each linear mechanism 6 comprises a first guide surface 31 formed with an upward extending inclined surface provided in the side wall 1b, a second guide surface 33 formed with a downward extending inclined surface provided in the upper side of the first guide surface 31, a first roller 35 rotatably provided in the moving part 5 and abutting on the first guide surface 31 so as to freely roll and a second roller rotatably provided in the moving part 5 and abutting on the second guide surface 33 so as to freely roll. The first roller 35 and the second roller are arranged in the moving direction of the moving part 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the transfer of a workpiece such as a part or a product in a process such as processing or assembly.
The present invention relates to a slide cylinder that performs supply or removal.

[0002]

2. Description of the Related Art Conventionally, a slide cylinder shown in FIG. 10 has been known and is configured as follows.

That is, a pair of left and right first guide surfaces 62 is provided on the shoulder of the fixed portion 61, and a pair of left and right second guide surfaces 64 are also formed on the side surface of the guide portion 63 protruding from the upper surface of the fixed portion 61. A required number of rolling wheels 66, 67 rotatably provided on the moving portion 65 are in rolling contact with the two-to-four guide surfaces 62, 64, respectively. Roller wheel 6 in contact with first guide surface 62 on the left side in the figure
6 and only the rolling wheels 67 that contact the second guide surface 64 on the right side in the figure are shown). The first guide surfaces 62 are each formed by a horizontal plane. Each of the second guide surfaces 64 is formed of a downwardly extending inclined surface, and the second guide surface 64 is formed in a pair of left and right sides in a downwardly extending C-shape. Cylinder chamber 6 provided inside fixed portion 61
When compressed air, which is a fluid pressure, is supplied to the piston 8, a piston (not shown) arranged in the cylinder chamber 68 moves, and a moving part 65 connected to the piston via a connecting part 69.
Moves along the guide surfaces 62, 64 while rotating the rollers 66, 67, and transfers a work such as a component or a product mounted on the mounting surface 70 (see Japanese Utility Model Publication No. 7-12726).

However, in this slide cylinder, since the first guide surface 62 is formed of a horizontal surface as described above, when the load F is applied to the moving portion 65 from the side, the first guide surface 62 is moved. The left and right wheels 66 abutting on the surface 62 do not support the load F at all. Therefore, the load F must be supported by only one of the left and right wheels 67 (when a load F is applied from the left side in the figure, the left wheel not shown) when contacting the second guide surface 64. Therefore, the position or direction of the support is limited, and the support may be extremely unstable.

Conventionally, as shown in FIG. 11, there has been developed a slide cylinder in which the two-to-four guide surfaces 72 and 73 provided on the fixed portion 71 are formed of inclined surfaces. When a load F is applied to the moving portion 74 from the side, any one of the left and right rolling wheels 75 abutting against the first guide surface 72 (when the load F is applied from the left side in the drawing, the left rolling wheel ) And the second guide surface 73
The load F is supported by either one of the left and right wheels 76 (when the load F is applied from the left side in the figure and also the left wheel), so that the support is relatively stable. See JP-A-8-177806).

However, in the slide cylinder shown in FIG. 11, a pair of first guide surfaces 72 on the upper and lower sides in the figure are formed in a C-shape expanding upward, and a pair of second guide surfaces 73 on the upper side in the figure are formed. The rollers 75 and 76 are formed in a downwardly extending C-shape, and the rollers 75 and 76 are in rolling contact with the guide surfaces 72 and 73, respectively. It is arranged in four rows for each. Each row extends in parallel with the moving direction of the moving section 74, and a required number of wheels 75, 76 are arranged in a row for each row. Therefore, in the illustrated cross section cut along a plane perpendicular to the moving direction of the moving unit 74, the rolling wheels 75, 76 occupy four rows of space, and the occupying area of the rolling wheels 75, 76 is large. Cannot be reduced in size.

[0007]

SUMMARY OF THE INVENTION In view of the above, the present invention provides a slide in which a required number of wheels for supporting a moving part can be arranged relatively compactly, and the apparatus can be reduced in size. It is intended to provide a cylinder.

[0008]

In order to achieve the above object, a slide cylinder according to the present invention is provided with a moving part which reciprocates upon receiving a supply of fluid pressure between a pair of side walls provided on a fixed part, A slide cylinder provided with a linear guide mechanism between the side wall and a moving part, wherein the linear guide mechanism includes a first guide surface formed of an upwardly extending inclined surface provided on the side wall, and the first guide surface. A second guide surface formed of a downwardly extending inclined surface provided on the upper side of the vehicle; a first rolling wheel rotatably provided on the moving portion and rotatably abutting on the first guide surface; And a second rolling wheel rotatably provided on the second guide surface and rotatably contacting the second guide surface, wherein the first rolling wheel and the second rolling wheel are arranged in the moving direction of the moving unit. I made it.

When the first rolling wheel and the second rolling wheel are arranged in the moving direction of the moving portion as in the slide cylinder of the present invention having the above-described structure, the rolling wheel train which has conventionally been four rows has the same function. Although it is provided, it is configured in two rows, and the device can be downsized accordingly.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a slide cylinder according to the embodiment, FIG. 2 is a partially cutaway plan view, and FIG.
4, FIG. 4 is an enlarged left side view, FIG. 5 is an enlarged cross-sectional view taken along line BB or B'-B 'in FIG. 2, and FIG. 6 is CC or C'- in FIG. It is a C 'line expanded sectional view.

The slide cylinder according to the embodiment has a guide rail 1 (also referred to as a guide rail) having a bottom wall 1a and a pair of left and right side walls 1b integrally formed and having a substantially U-shaped cross section. End plates 2 are fixed to both ends of the guide rail 1 in the longitudinal direction, and a cylinder tube 3 is installed between the pair of end plates 2 in parallel with the guide rail 1.
A piston 4 is inserted inside the cylinder tube 3 so as to be able to reciprocate freely, and a driven portion 5 driven by the piston 4 is inserted outside the cylinder tube 3. A linear guide mechanism 6 is provided between the section 5 and the side wall 1b of the guide rail 1. The guide rail 1, the pair of end plates 2, and the cylinder tube 3 together form a fixed portion 7 which is an installation-side element of the slide cylinder. The guide rail 1 is formed of a material that is easy to process, lightweight, and has high rust prevention, for example, an extruded material of an aluminum alloy.

As shown in FIG. 7, a piston 4 has an annular magnetic pole member 9 and an annular permanent magnet 10 between a pair of non-magnetic piston members 8 in the axial direction.
Are alternately arranged, a tie rod 11 made of a non-magnetic material is inserted in the center, and nuts 12 are tightened from both ends to integrate these components. The permanent magnets 1 arranged in the axial direction with the magnetic pole member 9 interposed therebetween
0 makes the same poles face each other in the axial direction. A piston seal 13 and a wear ring 14 are attached to the outer periphery of one piston member 8 on the left side in the figure, and an O-ring 15 is attached to the inner periphery. A wear ring 16 is mounted on the outer periphery of the other piston member 8 on the right side in the drawing, and an O-ring 17 is mounted on the inner periphery.

The cylinder tube 3 in which the piston 4 is inserted in a reciprocating manner is formed of a non-magnetic material into a cylindrical shape, and end covers 18 are fitted to both ends of the cylinder tube 3, respectively. The covers 18 are respectively fitted to the end plates 2. Each of the end covers 18 has O-rings 19 and 20 mounted on the outer periphery thereof, and a passage 21 penetrating in the axial direction is provided inside. Each of the end plates 1 has a passage 2
A piping port 22 leading to 1 is provided.

The driven section 5 includes a driven table 23 having a substantially rectangular parallelepiped shape, and a pair of end covers 24 fixed at both ends of the driven table 23 by bolts (also referred to as reamer bolts) 25. The driven portion 5 is provided with a through-hole 26 having a circular cross section and into which the cylinder tube 3 is inserted so as to be relatively displaceable. The driven table 23 is formed in a substantially rectangular shape by a magnetic material.
Are formed of resin, respectively.

The penetrating portion 2 inside the driven table 23
6, the same number of magnetic pole members 27 protruding in a ring shape as the magnetic pole members 9 are provided so as to face each magnetic pole member 9, and the magnetic pole portions 27 are provided at both ends in the axial direction of the magnetic pole member 27 group. Maintain coaxial with the cylinder tube 3, and
A wear ring 28 for maintaining a predetermined distance between the cylinder ring 3 and the wear ring 28 is mounted. Magnetic pole member 9 and magnetic pole part 27
Are attracted to each other by magnetic force, the driven portion 5
The piston 4 is driven by the compressed air supplied into the cylinder tube 3 and moves. A scraper 2 for preventing the outside dust from entering the magnetic pole portion 27 is provided on each of the peripheral edges of the opening of the penetrating portion 26 in the end cover 24.
9 is mounted so as to slide on the outer peripheral surface of the cylinder tube 3. On both sides of the upper surface of the driven table 23, a required number of mounting screws 30 for mounting a work such as a part, a product, or a jig are screwed around the magnetic pole portion 27.

The linear guide mechanism 6 is configured as follows.

That is, as shown in FIGS. 5 and 6, first, a first guide surface 31 composed of an upwardly sloping inclined surface is provided on the inner surface of the left and right side walls 1b of the guide rail 1, respectively. 31 has a pair of left and right sides forming an upwardly extending C-shape. Above the first guide surface 31, a ridge portion 32 having a substantially triangular cross section is provided so as to protrude laterally, and further above the ridge line portion 32, a second guide surface 33 composed of a downwardly extending inclined surface is provided. The second guide surface 33 has a pair of left and right sides forming a downwardly extending C-shape. If the ridge 32 is not provided, the first guide surface 31 and the second guide surface 33 together have a substantially U-shaped cross section. The first guide surface 31, the ridge line portion 32, and the second guide surface 33 all extend along the longitudinal direction of the guide rail 1 and are provided over the entire length of the guide rail 1. . The first guide surface 31 and the second guide surface 33 are each provided with a surface member 34 made of a high-hardness material having a thin plate shape, but when the magnitude of the applied load is not so large, the guide rail 1 The extruded material of the aluminum alloy constituting the above may be used directly as the guide surface. It is also conceivable to subject the extruded material of the aluminum alloy to a hardening treatment as required.

As shown in FIG. 6, first rolling wheels 35, which rollably contact the first guide surface 31, are pivotally mounted diagonally upward on the left and right side surfaces of the moving portion 5, respectively. Rolling wheel 36 that rollably contacts the second guide surface 33 as described above.
Are pivotally attached diagonally downward to the left and right side surfaces of the moving unit 5, respectively.

Each of the first rolling wheels 35 shown in FIG. 6 has a commercially available rolling bearing 37 such as a ball bearing and a pin (also referred to as a shaft) for rotatably supporting the rolling bearing 37.
The pin 38 is inserted and fixed in a shaft hole 39 provided obliquely in the moving part 5, and an inner race 40 of a rolling bearing is fitted and fixed to the pin 38. Required number of balls 4
The outer race 42 that relatively rotates via 1 is in rolling contact with the first guide surface 31 so as to be freely rotatable. Two first rolling wheels 35 are disposed on each of the left and right sides of the moving unit 5. The side surface of the moving part 5 is recessed so as to be able to accommodate a part of the rolling bearing 37, but this side part is a space where the mounting screw 30 is screwed to avoid interference with the magnetic pole part 27, It is not a space newly provided for providing the rolling wheel 35. The rolling bearing 37 and the pin 38 are formed from a ferromagnetic material, heat-treated to obtain a predetermined hardness, and then ground so as to have precise dimensions and shapes.

Each of the second rolling wheels 36 shown in FIG. 5 comprises a commercially available rolling bearing 43 also composed of a ball bearing or the like, and a pin (also referred to as a shaft) 44 for rotatably supporting the rolling bearing 43. , A pin 44 is inserted and fixed in a shaft hole 45 provided obliquely in the moving portion 5, and an inner race 46 of a rolling bearing 43 is fitted and fixed to the pin 44, and a required number of balls 47 are fixed to the inner race 46. The outer race 48 that relatively rotates through the roller is in rolling contact with the second guide surface 33 so as to be freely rotatable. Two second wheels 36 are also arranged on each of the left and right sides of the moving unit 5. The side surface of the moving part 5 is a rolling bearing 43
Is recessed to accommodate a portion of the mounting screw 30 so as to avoid interference with the magnetic pole portion 27.
Is not a space newly provided for providing the rolling wheel 36. The rolling bearing 43 and the pin 44 are formed of a ferromagnetic material, heat-treated to obtain a predetermined hardness, and then ground to be finished to have a precise size and shape.

The two first rolling wheels 35 and the two second rolling wheels 36 arranged on one side of the moving unit 5 are preferably four
Are arranged in a line in the moving direction of the moving unit 5 in the second, first, first and second order. The arrangement of the rolling wheels 35 and 36 is not limited to this, but since the load that can be supported does not vary depending on the direction of the applied load, the above arrangement is extremely well-balanced. Also, the number of wheels 35 and 36 is not limited to eight.

In the second wheel 36 shown in FIG. 5, an adjusting mechanism 49 for adjusting the sliding contact between the wheel 36 and the guide surface 33 is provided on the second wheel 36 on the left side in the figure. I have.

That is, the insertion portion 44a of the pin 44 inserted and fixed in the shaft hole 45, and the projection portion 44b projecting out of the shaft hole 45 and fittingly fixing the inner race 46 of the rolling bearing 43 are eccentric to each other. When the insertion portion 44a is rotated in the shaft hole 45,
The protruding portion 44b and the rolling bearing 43 rotate about the central axis of the shaft hole 45 and the insertion portion 44a. Therefore, the position of the rolling wheel 36 in the contact / separation direction with respect to the guide surface 33 can be changed steplessly, thereby preventing a gap from being formed between the rolling wheel 36 and the guide surface 33, Or the degree of sliding contact between the guide surface 33 and the guide surface 33 can be adjusted. After the insertion portion 44a of the pin 44 is rotated for adjustment, the rotation position is fixed by the locking set screw 50.

A screw hole (not shown) is provided in each of the pair of end plates 2, and a shock absorber 51 is screwed into each of the screw holes so as to be able to advance and retreat toward the driven portion 5. Each of the shock absorbers 51 is disposed substantially coaxially with a bolt 25 attached to fix the end cover 24 to the driven table 23,
Therefore, the heads of the bolts 25 adjust the end position of the movement of the moving part 5 so as to be adjustable.
It functions as a stopper receiver that comes into contact with 1. Alternatively, the shock absorber 51 may be a bolt-shaped stopper having no cushioning function.

Mounting grooves 1c are respectively provided on the outer surfaces of the left and right side walls 1b of the guide rail 1 along the longitudinal direction of the guide rails, and magnetic proximity switches (not shown) are respectively mounted in the mounting grooves 1c. It has become. When operating this magnetic proximity switch, a permanent magnet (not shown) is attached to the side surface of the moving unit 5, and the position of the moving unit 5 is detected by the switch detecting the magnetic force of the magnet.

When the slide cylinder is used in an environment where there is a lot of dust, it is preferable to attach a dust seal (not shown) in order to prevent dust from interfering with the wheel mounting portion.

Next, the operation of the slide cylinder having the above configuration will be described.

FIGS. 2 and 3 show a right cylinder chamber in the cylinder tube 3 defined by the piston 4 from a compressed air supply source and a switching valve (not shown) via a piping port 22 and a passage 21 on the right side in the figure. A state is shown in which compressed air is supplied to 52 and the cylinder chamber 53 on the opposite side, that is, the left cylinder chamber 53 is opened to the atmosphere via the left passage 21, the piping port 22, and the switching valve. In this state, the piston 4 is pressed to the left by the compressed air, and the driven table 23 magnetically driven by the piston 4 has the head 25 of the upper left bolt 25 in FIG.
Stopped by contact with. When an external force acts on the driven table 23 in this state, the driven table 23, the cylinder tube 3, the guide rail 1, and the like are not deformed because the linear guide mechanism 6 strongly supports the external force. Further, even when the linear guide mechanism 6 supports the external force, the driven table 23 can smoothly displace relative to the guide rail 1 via the linear guide mechanism 6.

Next, by switching a switching valve (not shown), compressed air is supplied to the left cylinder chamber 53 through the piping port 22 and the passage 21 on the left side in the figure, and the right cylinder chamber 52 is connected to the right passage 21, When the air is released to the atmosphere via the piping port 22 and the switching valve, the piston 4 is pressed rightward by the compressed air, and the driven table 23 is simultaneously driven rightward. In the driven table 23, the head of the bolt 25 at the upper right in FIG.
Stops when it comes into contact with. When an external force acts on the driven table 23 in this state, the driven table 23, the cylinder tube 3, the guide rail 1, and the like are not deformed because the linear guide mechanism 6 strongly supports the external force. Further, even when the linear guide mechanism 6 supports the external force, the driven table 23 can smoothly displace relative to the guide rail 1 via the linear guide mechanism 6.

The slide cylinder moves various workpieces such as components or products mounted on the driven table 23 of the moving section 5 by the above-described operation, and is characterized in that the above-described configuration has the following operational effects. Have.

That is, first, the guide surface of each linear guide mechanism 6 is composed of a first guide surface 31 composed of an upwardly sloping inclined surface provided on the side wall 1 b of the guide rail 1, and a first guide surface 31 of the first guide surface 31. The first guide is configured by a combination with a second guide surface 33 formed of a downwardly sloping inclined surface provided on the upper side, and the guide surfaces of the pair of right and left linear guide mechanisms 6 form an upwardly spreading C-shape. Surface 31 and a second guide surface 33 that is provided on the upper side of the first guide surface 31 and has a downwardly extending C shape.
And a first rolling wheel 35 or a second rolling wheel 36 for each of the guide surfaces 31, 33.
Are rollably in contact with each other, so that even if a load is applied to the slide cylinder from the side direction, any one of the four rolling wheels 35 and 36 is provided for each pair. Acts to support the load. Therefore, unlike the prior art shown in FIG. 10, only a very small part of the wheels does not operate to support the load. Therefore, it is necessary to strengthen and stabilize the load supporting action of the wheels 35 and 36. it can.

In each of the linear guide mechanisms 6, two first rolling wheels 35 contacting the first guide surface 31 and the second guide surface 3
Since the four rolling wheels of the two second rolling wheels 36 abutting on 3 are arranged in a row in the moving direction of the moving unit 5, the guide surfaces 31, 33 are two-to-four in the slide cylinder. Meanwhile, the rolling wheels 35 and 36 are configured in two rows. Therefore, since the four wheel trains which have been conventionally provided with the same function are configured in two rows, the cylinder device can be downsized accordingly.

Further, there are the following features.

Since the commercially available rolling bearings 37 and 43 can be used for the first rolling wheel 35 and the second rolling wheel 36, respectively, the linear guide mechanism 6 can be configured at low cost.

Since the fixing portion 7 can be made of an aluminum alloy extruded material or the like which is easy to process, is lightweight, and can be made of a material having high rust-preventive force, the fixing portion 7 can be made lightweight and inexpensive. it can.

By providing the rolling wheel train, it is not necessary to newly provide an installation space, so that the size of the slide cylinder can be reduced in the height direction and the width direction.

Since the distance between the left and right wheel trains can be set relatively long, even if the work is performed at a position offset in a direction perpendicular to the axis, the wheels 35 and 36 may be damaged, The guide surfaces 31, 33 do not sag.

Since the adjusting mechanism 49 for adjusting the degree of sliding contact between the wheel 36 and the guide surface 33 is provided, the position of the wheel 36 with respect to the guide surface 33 in the contact / separation direction can be changed steplessly. This makes it possible to prevent a gap from being formed between the rolling wheel 36 and the guide surface 33, and to adjust the degree of sliding contact between the rolling wheel 36 and the guide surface 33.
Further, since the sliding contact between the rolling wheel 36 and the guide surface 33 can be suitably adjusted only by changing the positions of the two rolling wheels 36, the adjustment operation can be easily performed.

The bolt 25 is connected to the shock absorber 51
, The displacement of the moving unit 5 at the movement end position is extremely small. In addition, the displacement is limited to the horizontal plane (the yawing direction), and the shock absorber 5
The direction of the generated moment can be selected depending on the mounting position of (1).

Even if a shock absorber 51, a stroke adjusting mechanism, and a position detecting mechanism by magnetic force, which are additional functions necessary for this type of linear moving device, are provided, the slide cylinder does not become large. Installation space does not change even if additional functions increase.

In the above embodiment, the case where the present invention is applied to a rodless type slide cylinder has been described. However, the present invention can be applied to a double rod type slide cylinder. As shown in FIGS. 8 and 9, for example, this double rod type slide cylinder has a piston 4 slidably inserted inside a moving part 5 and a hollow between the piston 4 and each end plate 2. And a rod 54 of
The cylinder chambers 52, 5
When the compressed air is alternately supplied to 3, the moving unit 5 is relatively displaced with respect to the fixed unit 7.

[0043]

The present invention has the following effects.

That is, in the slide cylinder of the present invention having the above-described structure, first, the guide surface of the linear guide mechanism includes a first guide surface formed of an upwardly sloping inclined surface provided on the side wall of the fixed portion and the first guide surface. The first guide, which is configured by a combination with a second guide surface formed of a downwardly sloping inclined surface provided on the upper side of the guide surface, wherein the guide surfaces of the pair of linear guide mechanisms form an upwardly spreading C-shape. Surface and a second guide surface having a downwardly extending C-shape provided on the upper side of the first guide surface, and a first wheel or a second roller is provided for each guide surface. Since the wheels are in rolling contact with each other, even when a load is applied to the slide cylinder from the side, a relatively large number of one of the pair of wheels can apply this load to each pair. Acts to support. Therefore, unlike the prior art, only a part of the rolling wheels does not operate to support the load, and thus the load supporting action by the rolling wheels can be strengthened and stabilized. In addition to the above effect, in each linear guide mechanism, a required number of first rolling wheels contacting the first guide surface and a required number of second rolling wheels contacting the second guide surface are provided in the moving portion. Since the slide cylinders are arranged in the moving direction, the slide wheels are formed in two rows while the guide surfaces are the first and second two-to-four surfaces. Therefore, since the four wheel trains which have been conventionally provided with the same function are configured in two rows, the cylinder device can be downsized accordingly.

[Brief description of the drawings]

FIG. 1 is a front view of a slide cylinder according to an embodiment of the present invention.

FIG. 2 is a partially cutaway plan view of the slide cylinder.

FIG. 3 is a sectional view taken along line AA in FIG. 2;

FIG. 4 is an enlarged left side view of the slide cylinder.

FIG. 5 is an enlarged sectional view taken along line BB or B′-B ′ in FIG. 2;

FIG. 6 is an enlarged sectional view taken along line CC or CC′-C ′ in FIG. 2;

FIG. 7 is an enlarged sectional view of a piston.

FIG. 8 is a partially cutaway plan view of a slide cylinder according to another embodiment of the present invention.

9 is a sectional view taken along line DD in FIG.

FIG. 10 is a sectional view of a slide cylinder according to a conventional example.

FIG. 11 is a cross-sectional view of a slide cylinder according to another conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Guide rail 1a Bottom wall 1b Side wall 1c Mounting groove 2 End plate 3 Cylinder tube 4 Piston 5 Moving part 6 Linear guide mechanism 7 Fixed part 8 Piston member 9 Magnetic pole member 10 Permanent magnet 11 Tie rod 12 Nut 13 Piston seal 14, 16, 28 Wear ring 15, 17, 19, 20 O-ring 18 End cover 21 Passage 22 Piping port 23 Follower table 24 End cover 25 Bolt 26 Penetrating part 27 Magnetic pole part 29 Scraper 30 Mounting screw 31 First guide surface 32 Ridge part 33 Second Guide surface 34 Surface material 35 First rolling wheel 36 Second rolling wheel 37,43 Rolling bearing 38,44 Pin 39,45 Shaft hole 40,46 Inner race 41,47 Ball 42,48 Outer race 44a Insertion part 44b Projection part 49 Adjustment mechanism 50 Lock Set screw 51 shock absorber 52, 53 the cylinder chamber 54 the rod 55 passage

Claims (1)

[Claims] A pair of side walls (1) provided on a fixing portion (7).
b) a moving part (5) reciprocating by receiving a supply of fluid pressure is arranged, and a slide cylinder provided with a linear guide mechanism (6) between the side wall (1b) and the moving part (5). Wherein the linear guide mechanism (6) is provided on the side wall (1b) with a first guide surface (31) comprising an upwardly sloping inclined surface;
A second guide surface (33) formed of a downwardly sloping inclined surface provided above the first guide surface (31), and a second guide surface (31) rotatably provided on the moving part (5); )
A first rolling wheel (35) rotatably abutting on the second guide surface (33), which is rotatably provided on the moving portion (5).
A second rolling wheel (36) abutting on the first rolling wheel (35) and the second rolling wheel (36) are arranged in the moving direction of the moving portion (5). A slide cylinder.