JPH11273599A - Rotation anode x-ray tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotation anode X-ray tube capable of highly efficiently releasing high heat generated at the time of generating X-ray providing high output, operating continuously for a long duration, and prolonging the life of a bearing. SOLUTION: This rotation anode X-ray tube is provided with a target 3, a rotor 5, a shaft 6, rolling bearing 7, 7, and a bearing housing 8 supporting the rolling bearing 7, 7. A storing part 10 for storing Ga or a Ga alloy is composed of the center part of the shaft 6 between the bearings 7, 7 and the inner face of the bearing housing 8. Pumping grooves 14, 14 and labyrinth grooves 15, 15 are formed in the outer side than the storing part 10 in the axial direction to prevent leakage of Ga or the Ga alloy in the storing part 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotating anode X-ray tube capable of efficiently discharging high heat generated when X-rays are generated.

[0002]

2. Description of the Related Art Conventionally, there is a rotary anode X-ray tube as shown in FIG. In this rotating anode X-ray tube 50,
When the electron beam 51 is irradiated from a cathode (not shown) toward the target 52 in a vacuum, the X-ray 5
3 occurs. At the same time, most of the kinetic energy of the electron beam 51 changes to heat, and the target 52 generates high heat. The heat of the target 52 is directly radiated from the target 52 and the rotor 54 to the outside of the vacuum tube 55 by radiation, and the shaft 56 and the bearing 57 by heat conduction.
Through the bearing housing 58 and exits outside.

[0003]

However, in the conventional rotary anode X-ray tube 50 described above, the heat of the shaft 56 is transferred to the bearing 5.
7 is transmitted from the shaft 56 to the bearing housing 58 only through a very small surface where the ball 59 and the ball 59 are in contact with each other, and there is a problem that the heat of the shaft 56 does not escape efficiently.

As described above, since the heat of the shaft 56 does not efficiently escape, the cooling of the target 52 connected to the shaft 56 becomes insufficient.
There was a problem that continuous operation of the line can not be achieved.

[0005] Further, since the heat of the shaft 56 does not efficiently escape, the temperature of the shaft 56 and the bearing 57 in contact with the shaft 56 become high, and the performance of the solid lubricant in the bearing 57 is impaired. There is a problem that the life of the device is extremely short.

Accordingly, an object of the present invention is to provide a rotating anode X-ray tube capable of efficiently discharging high heat generated at the time of X-ray generation, achieving high output, long-time continuous operation, and long bearing life. It is in.

[0007]

According to a first aspect of the present invention, there is provided a rotary anode X-ray tube, comprising: a supported member connected to a target; and a support for supporting the supported member via a rolling bearing. It is characterized by comprising a member, an accommodating portion formed between the supported member and the supporting member, and a liquid metal accommodated in the accommodating portion and substantially not evaporating even in a vacuum.

[0008] According to the rotary anode X-ray tube of the first aspect of the invention, the liquid metal is accommodated in the accommodating portion formed between the supported member and the support member. Therefore, the heat transmitted from the target to the supported member is efficiently transmitted to the supporting member via the liquid metal and is released to the outside.
Liquid metal also functions as a coolant. Therefore, the temperature rise of the target, the supported member, and the bearing is prevented,
It is possible to increase the output of the X-ray tube, continuously operate for a long time, and extend the life of the bearing.

According to a second aspect of the present invention, in the rotary anode X-ray tube according to the first aspect, the liquid metal is Ga or a Ga alloy, and the Ga or the Ga
The housing portion in contact with the alloy is characterized by being made of a corrosion-resistant metal or a corrosion-resistant ceramic having corrosion resistance to the Ga or the Ga alloy.

In the rotary anode X-ray tube according to the second aspect of the present invention, the liquid metal is Ga or a Ga alloy, and the accommodating portion is a corrosion-resistant metal or a corrosion-resistant ceramic having corrosion resistance to the Ga or the Ga alloy. Has been produced. Therefore, the accommodation portion is not corroded by Ga or a Ga alloy.

According to a third aspect of the present invention, in the rotary anode X-ray tube according to the first aspect, the liquid metal is Ga or a Ga alloy, and the Ga or the Ga
The storage part in contact with the alloy is made of stainless steel or tool steel coated with TiN.

In the rotary anode X-ray tube according to the third aspect of the present invention, since the housing is made of stainless steel or tool steel coated with TiN, the housing may be corroded by Ga or a Ga alloy. There is no. Moreover, since the above-mentioned accommodation part coats stainless steel or tool steel with TiN, it can be manufactured at a lower cost than when the whole is made of a material resistant to corrosion to Ga or a Ga alloy.

A rotary anode X-ray tube according to a fourth aspect of the present invention is the rotary anode X-ray tube according to any one of the first to third aspects, wherein an injection hole for injecting the liquid metal into the housing portion. It is characterized by having.

The rotary anode X-ray tube according to the fourth aspect of the present invention is provided with an injection hole for injecting the liquid metal into the storage section, so that the liquid metal can be easily injected into the storage section. In particular, even if the liquid metal is consumed during use, it can be easily replenished.

According to a fifth aspect of the present invention, in the rotary anode X-ray tube according to the fourth aspect, the injection hole is threaded and the injection hole is closed with a screw stopper. It is characterized by having.

In the rotary anode X-ray tube according to the fifth aspect of the present invention, since the injection hole is threaded and the injection hole is closed with a screw stopper, liquid metal leaks out of the injection hole. Never.

According to a sixth aspect of the present invention, there is provided a rotary anode X-ray tube according to the first aspect, wherein the accommodating portion is provided at a substantially central portion in the axial direction between the plurality of rolling bearings. In addition, the accommodating portion is characterized in that it has the largest diameter at the center in the axial direction and has a tapered surface whose diameter decreases toward the end in the axial direction.

[0018] In the rotary anode X-ray tube according to the sixth aspect of the present invention, the accommodating portion has the largest central diameter in the axial direction.
Further, it has a tapered surface whose diameter decreases toward the end in the axial direction. Therefore, the liquid metal can be easily filled in the accommodation portion without any gap. In addition, when the shaft rotates, the centrifugal force acts on the liquid metal, so that the liquid metal is collected at the center in the axial direction having the largest diameter of the storage section. Therefore, it is possible to prevent the liquid metal from leaking from the storage section.

A rotary anode X-ray tube according to a seventh aspect of the present invention is the rotary anode X-ray tube according to any one of the first to sixth aspects, wherein the supported member and the support member are disposed axially outside the accommodating portion. A rotating anode X-ray tube, wherein a gap between the member and the member is 0.2 mm or less.

[0020] In the rotary anode X-ray tube according to the present invention, the gap between the supported member and the support member at the axially outer side of the accommodating portion is 0.2 mm or less. Liquid metal is prevented from leaking. This has been confirmed by experiment.

The rotary anode X-ray tube according to the invention of claim 8 is the rotary anode X-ray tube according to claim 7, wherein the liquid metal in the gap between the supported member and the support member is stored in the storage portion. The pumping groove for pushing back is formed in the supported member or the supporting member.

In the rotary anode X-ray tube according to the eighth aspect of the present invention, the supported member or the pumping groove formed in the support member is provided with a liquid metal in a gap between the supported member and the support member. Push it back into the storage section. Therefore,
The liquid metal is prevented from leaking from the storage section.

A rotary anode X-ray tube according to a ninth aspect of the present invention is the rotary anode X-ray tube according to the eighth aspect, wherein a labyrinth groove for storing liquid metal is formed adjacent to the outside of the pumping groove. It is characterized by having.

In the rotary anode X-ray tube according to the ninth aspect of the present invention, even if the liquid metal leaks out of the accommodating portion and further leaks out of the pumping groove, it is possible to prevent the liquid metal from leaking out of the pumping groove. The labyrinth groove formed adjacent to the outside is
Capture the liquid metal.

According to a tenth aspect of the present invention, there is provided a rotary anode X-ray tube according to the eighth or ninth aspect, wherein the angle of the pumping groove is perpendicular to a plane perpendicular to the axial direction of the supported member. 10 to 20 degrees.

In the rotary anode X-ray tube according to the tenth aspect of the present invention, the angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the supported member.
The pumping groove secures the pumping force for pushing back the liquid metal to the storage portion when the supported member is rotating, and suppresses the leakage of the liquid metal from the pumping groove when the supported member is at rest. . If the groove angle of the pumping groove exceeds 20 degrees, the pumping force increases and pushes the liquid metal back to the housing during operation.
When the groove length becomes short, the liquid metal leaks to the outside through the pumping groove at the time of rest. Conversely, if the groove angle is less than 10 degrees, the length of the groove becomes longer, making it difficult for the liquid metal to leak to the outside when stationary, but the pumping force is reduced during operation and the liquid metal is pushed back to the storage portion. Weakens. This has been confirmed by experiment.

The liquid metal sealing device according to an eleventh aspect of the present invention is a liquid metal sealing device, wherein a cylindrical support member and a circular supported member which rotate relative to each other, and a liquid metal filled between the support member and the supported member. And a pumping groove formed in the support member or the supported member, wherein the groove angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the supported member. It is characterized by being.

In the liquid metal sealing device according to the eleventh aspect of the present invention, the angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the circularly supported member. The pumping groove secures the pumping force for pushing back the liquid metal to the storage portion when the cylindrical supported member is rotating, and the liquid metal from the pumping groove when the cylindrical supported member is stationary. Leakage is suppressed. If the groove angle of the pumping groove exceeds 20 degrees, the pumping force increases and pushes the liquid metal back into the housing during operation. However, the groove length decreases, and the liquid metal passes through the pumping groove at rest. It leaks out. Conversely, if the groove angle is less than 10 degrees,
Although the length of the groove is increased, the liquid metal is less likely to leak to the outside when stationary, but the pumping force is reduced during operation, and the function of pushing the liquid metal back to the storage portion is weakened. This has been confirmed by experiment.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the illustrated embodiments.

FIG. 1 is a sectional view of a rotary anode X-ray tube 1 according to one embodiment of the present invention. The rotating anode X-ray tube 1 is placed in a stepped cylindrical vacuum tube 2 in a disk-shaped target 3.
And a shaft 6 as a supported member connected to the center of the target 3, and a cylindrical rotor 5 attached to the shaft 6 coaxially with the shaft 6. Further, the rotary anode X-ray tube 1 includes a cylindrical bearing housing 8 and ball bearings 7 as supporting members, and supports the shaft 6 via the ball bearings 7. The bearing housing 8 includes a portion 8a and a portion 8b, and the portion 8a is made of stainless steel, and the portion 8b is made of Mo, Mo alloy, Ta, W, or the like which has corrosion resistance to Ga or a Ga alloy. It is made of metal or ceramics. The shaft 6 is made of a corrosion-resistant metal or ceramic such as Mo, Mo alloy, Ta, W, or the like, which has corrosion resistance to Ga or a Ga alloy, and is provided with deep grooves 4, 4 as raceway surfaces in the circumferential direction. . Further, a housing portion 10 is formed by the central portion of the shaft 6 and the inner surface of the portion 8b of the bearing housing 8. This accommodation unit 10
Tapered surfaces 11, 11 having the largest diameter at the central portion in the axial direction and decreasing in diameter toward the end in the axial direction.
And has a so-called abacus ball shape. The clearance between the shaft 6 outside the housing 10 and the bearing housing 8 is set to 0.2 mm or less. And
A threaded injection hole 13 is communicated with an upper portion in the center of the housing 10 in the axial direction, and a screw stopper 12 is screwed into the injection hole 13. The storage section 10 stores Ga or a Ga alloy which is a liquid metal that does not substantially evaporate even in a vacuum. The shaft 6 and the portion 8b of the bearing housing 8 forming the housing portion 10 are formed of a corrosion-resistant metal such as Mo, a Mo alloy, Ta, or W or a ceramic having corrosion resistance to Ga or a Ga alloy, and thus are corroded. Never.

On the other hand, spiral pumping grooves 14, 14 are provided on the outer shaft 6 at both ends of the housing portion 10. The pumping groove 14 stores Ga in the gap between the shaft 6 and the bearing housing 8 in the housing 10.
It has a function to push it back. The groove angle of the pumping groove 14 with respect to a plane perpendicular to the axial direction of the shaft 6 is set to 10 to 20 degrees. Further, a labyrinth groove 15 is provided on the shaft 6 outside the pumping groove 14.

In the rotary anode X-ray tube 1 having the above-described structure, a high voltage is applied between a cathode unit (not shown) and the target 3 as an anode in the vacuum tube 2 in a vacuum state, and an electron beam 16 is applied to the cathode unit. When generated, the electron beam 16 collides with the target 3. At this time, X-rays 17 are generated from the target 3. At the same time, high heat is generated in the target 3. Part of the heat generated in the target 3 is directly emitted from the target 3 and the rotor 5 to the outside of the vacuum tube 2 by heat radiation. The other part of the heat generated in the target 3 is transmitted to the shaft 6 via the bearings 7 and 7 and via the liquid metal Ga or the Ga alloy in the housing 10.
It is transmitted to the bearing housing 8.

Since the contact area between the shaft 6 and the balls of the bearings 7 and 7 is extremely small, the amount of heat transmitted through the bearings 7 and 7 is extremely small. As for heat transmitted to the bearing housing 8, the shaft 6 and Ga or Ga alloy and Ga
Alternatively, since the area of direct contact between the Ga alloy and the bearing housing 8 is large and the heat transfer coefficient of Ga or the Ga alloy is large, the heat transfer efficiency is good. Further, Ga or G
The alloy a also functions as a coolant. Therefore, heat can be effectively released from the target 3 to the outside, and the target 3 can be cooled. Therefore, the temperature rise of the target 3, the shaft 6, and the bearings 7, 7 is prevented, the output of the X-ray tube can be increased, continuous operation can be performed for a long time, and the life of the bearing can be extended.

The shaft 6 and the portion 8b of the bearing housing 8 forming the housing portion 10 are formed of a corrosion-resistant metal such as Mo, Mo alloy, Ta, W or the like, which has corrosion resistance to Ga or Ga alloy, or ceramics. Because
Corrosion of the housing 10 can be prevented.

In the upper part of the accommodation part 10 at the center in the axial direction,
Since the threaded injection hole 13 is in communication, it is easy to inject Ga or Ga alloy into the housing 10. In particular, even if Ga or Ga alloy is consumed during use, it can be easily replenished. In addition, this injection hole 1
3 is closed by the screw plug 12, so that leakage of Ga or Ga alloy from the injection hole 13 can be prevented.

The accommodating portion 10 is in the form of a so-called abacus ball. The diameter of the central portion in the axial direction is largest, and the diameter of the accommodating portion 10 decreases toward the end in the axial direction. 11 is provided. Therefore, due to such a shape of the storage unit 10, Ga or a Ga alloy can be easily filled without a gap without bubbles or the like remaining in the storage unit 10.

In addition, Ga or Ga
The alloy does not leak out as follows.

FIG. 2 shows the relationship between the gap (mm) between the shaft 6 and the bearing housing 8 and the amount of leakage of Ga (g / h). From FIG. 2, it can be seen that when the gap between the shaft 6 and the bearing housing 8 is 0.2 mm or less, Ga in the housing 10 does not leak out. In the present embodiment, since the gap is set to 0.2 mm or less, Ga or G
The leakage of the a alloy is prevented.

The accommodating portion 10 has the shape of an abacus ball, and has the largest diameter at the central portion in the axial direction, and the diameter decreases toward the end in the axial direction.
11 is provided. For this reason, when Ga in contact with the shaft 6 starts to rotate with the rotation of the shaft 6, centrifugal force acts on Ga or a Ga alloy, and the centrifugal force acts on the Ga in the housing 1.
Push to the center of the largest diameter of 0. Therefore,
It becomes difficult for Ga in the accommodation portion 10 to leak out from both ends.

Further, the pumping grooves 14, 14 located on both outer sides of the housing portion are provided with screws when the shaft 6 rotates, even if Ga or a Ga alloy exists in the gap between the shaft 6 and the bearing housing 8. Ga or a Ga alloy is pushed toward the accommodation unit 10. Therefore, Ga or a Ga alloy does not leak outside from both ends.

As described above, the pumping groove 1 is formed on the shaft 6.
When the shaft 6 rotates, the pumping force of the pumping groove 14 allows the leaked Ga or Ga alloy to be stored in the housing portion 10 even if the gap between the shaft 6 and the bearing housing 8 exceeds 0.2 mm. G
The a or Ga alloy does not leak or hardly leaks from the housing portion 10.

When the rotation of the shaft 6 is stopped, if the pumping groove is short, Ga or Ga alloy may leak to the outside through the pumping groove. FIG.
Shows the relationship between the groove angle α and the dimensionless groove length L and the relationship between the groove angle α and the dimensionless pumping force M. The groove angle α is, as shown in FIG. 5, the angle of the groove with respect to a plane perpendicular to the axial direction of the shaft 6, and the dimensionless groove length L is between the axial length A of the shaft. Is a value obtained by dividing the groove length by the length A. FIG. 6 shows that the dimensionless groove length L becomes smaller as the groove angle α becomes larger. Accordingly, in order to increase the groove length and increase the leakage resistance, the groove angle α may be reduced. However, the pumping power is about 3
The maximum value is obtained at the groove angle α of 5 degrees, but if the groove angle α is reduced from 35 degrees, the pumping force rapidly decreases as shown in FIG. As can be seen from FIG. 6, when the groove angle α is 10 to 20 degrees, the pumping force of about 50 to 80% of the maximum value is obtained, and the leakage amount of Ga or Ga alloy is small. That is, when the groove angle α is 10 to 20 degrees, a sufficiently large pumping force can be obtained, and the leakage amount of the liquid metal Ga or the Ga alloy can be suppressed. This was derived from the following experimental results. If the groove angle is less than 10 degrees, the groove length becomes long, and it becomes difficult for Ga or Ga alloy to leak to the outside at rest, but the pumping force becomes small during operation and Ga or Ga alloy is contained in the housing portion. The function of pushing back has weakened. If the groove angle of the above-mentioned pumping groove is more than 20 degrees and not more than about 35 degrees, the pumping force is increased and Ga or Ga alloy is pushed back to the receiving portion at the time of operation. Ga or a Ga alloy leaked to the outside. When the groove angle exceeded 35 degrees, the pumping force was weakened, and at the same time, the amount of leakage of Ga or Ga alloy to the outside was increased. Thus, when the groove angle α is set to 10 to 20 degrees, a sufficiently large pumping force can be obtained, and the leakage amount of the liquid metal Ga or Ga alloy can be suppressed.

On the other hand, labyrinth grooves 15, 15 are provided outside the pumping grooves 14, 14. Therefore, for example, while the shaft 6 is stationary, Ga or Ga
Even if the alloy leaks out of the pumping grooves 14, 14, the Ga or Ga alloy is trapped in the labyrinth groove,
Ga or a Ga alloy can be prevented from leaking to the outside.

In this embodiment, the shaft 6 as the supported member is connected to the target 3 and the bearing housing 8 as the supporting member is fixed to the vacuum tube 2. May be connected to a target, and a shaft as a support member to be fitted in the sleeve may be fixed to a vacuum tube.

In the present embodiment, the shaft 6 forming the housing portion 10 and the portion 8b of the bearing housing 8 are
Mo or Mo alloy which has corrosion resistance to a or Ga alloy,
The shaft 76 and the portion 78b of the bearing housing 78 are made of stainless steel or SKH, as shown in FIG.
Part 78b of the bearing housing 78 and part 76 of the shaft 76 which are made of tool steel such as
a may be coated with a TiN film 70. Note that FIG. 3 is the same as FIG. 1 except for the members described above, and therefore the same members are given the same reference numerals and description thereof is omitted. As described above, when the tool steel such as stainless steel or SKH4 is coated with the TiN film 70, the entire bearing housing can be manufactured at a lower cost than the case where the bearing housing is made of the above-mentioned corrosion-resistant metal or ceramic.

In the present embodiment, the pumping groove 1
4 and 14 are provided on the shaft 6 side.
It may be provided on the side.

[0047]

As is apparent from the above description, in the rotary anode X-ray tube according to the first aspect of the present invention, the liquid metal is accommodated in the accommodating portion formed between the supported member and the supporting member. Therefore, heat transmitted from the target to the supported member can be efficiently transmitted to the supporting member via the liquid metal. Further, the liquid metal can also function as a coolant. For this reason, it is possible to prevent the temperature of the target, the supported member, and the bearing from rising, and it is possible to increase the output of the X-ray tube, operate continuously for a long time, and extend the life of the bearing.

In the rotary anode X-ray tube according to the second aspect of the present invention, the liquid metal is Ga or a Ga alloy, and the housing is made of a corrosion-resistant metal or a corrosion-resistant ceramic having corrosion resistance to the Ga or the Ga alloy. Therefore, it is possible to prevent the accommodation portion from being corroded by Ga or a Ga alloy.

In the rotary anode X-ray tube according to the third aspect of the present invention, since the housing is made of TiN-coated stainless steel, the housing can be prevented from being corroded by Ga or a Ga alloy. Moreover, since the above-mentioned accommodation part is formed by covering stainless steel or tool steel with TiN, it can be manufactured at a lower cost than making a material that is resistant to corrosion with respect to Ga or a Ga alloy.

The rotary anode X-ray tube according to the fourth aspect of the present invention is provided with an injection hole for injecting the liquid metal into the container, so that the liquid metal can be easily injected into the container. Can be easily replenished even if consumed during use.

In the rotary anode X-ray tube according to the fifth aspect of the present invention, since the injection hole is threaded and the injection hole is closed with a screw stopper, liquid metal leaks from the injection hole. Can be prevented.

The rotary anode X-ray tube according to the invention of claim 6 has a tapered surface in which the housing portion has the largest diameter at the center in the axial direction and decreases in diameter toward the end in the axial direction. Therefore, the liquid metal can be easily filled into the housing portion without any gap. Further, at the time of rotation of the shaft, the liquid metal is collected at the center in the axial direction having the largest diameter of the storage portion by the centrifugal force acting on the liquid metal, so that the liquid metal can be prevented from leaking from the storage portion.

In the rotary anode X-ray tube according to the present invention, the gap between the supported member and the support member in the axial direction outside of the housing is 0.2 mm or less. Leakage of metal can be prevented.

In the rotary anode X-ray tube according to the present invention, the supporting member or the pumping groove formed in the supporting member may receive the liquid metal in the gap between the supported member and the supporting member. , It is possible to prevent the liquid metal from leaking from the storage section.

In the rotary anode X-ray tube according to the ninth aspect of the present invention, since the labyrinth groove is formed adjacent to the outside of the pumping groove, Ga or Ga alloy leaks out of the housing portion. Further, even if the liquid metal leaks out of the pumping groove, the leaked liquid metal can be captured by the labyrinth groove.

In the rotary anode X-ray tube according to the tenth aspect of the present invention, the angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the supported member. The pumping force that pushes the liquid metal back to the storage portion during the operation can be secured by the pumping groove, and the leakage of the liquid metal from the pumping groove when the supported member is stationary can be suppressed.

In the liquid metal sealing device according to the eleventh aspect of the present invention, since the groove angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the circular supported member, The pumping force can be secured by the pumping groove when the shaft-shaped supported member of the metal sealing device is rotating, while the leakage of liquid metal from the pumping groove when the shaft-shaped supported member is stationary. Can be suppressed.

[Brief description of the drawings]

FIG. 1 is a sectional view of a rotating anode X-ray tube according to an embodiment of the present invention.

FIG. 2 is a view showing a relationship between a gap at an end of a housing part of the rotating anode X-ray tube of FIG. 1 and a leakage amount.

FIG. 3 is a sectional view of a rotating anode X-ray tube according to another embodiment of the present invention.

FIG. 4 is a cross-sectional view of a conventional rotating anode X-ray tube.

FIG. 5 is a front view of a pumping groove of the rotary anode X-ray tube of FIG. 1;

6 is a diagram showing a relationship between a groove angle and a groove length of a pumping groove of the rotary anode X-ray tube of FIG. 1 and a relationship between a groove angle and a pumping force.

[Explanation of symbols]

1 ... rotating anode X-ray tube 3 ... target 6,76 ...
Shaft, 8,78 Bearing housing, 10 Housing, 11 Tapered surface, 12 Screw plug, 13 Injection hole, 14 Pumping groove, 15 Labyrinth groove, 7
0 ... TiN.

Claims (11)

[Claims] 1. A supported member connected to a target, a supporting member supporting the supported member via a rolling bearing,
A rotating anode X comprising: a housing portion formed between the supported member and the support member; and a liquid metal housed in the housing portion and which does not substantially evaporate even in a vacuum.
Wire tube. 2. The rotating anode X-ray tube according to claim 1, wherein the liquid metal is Ga or a Ga alloy, and the accommodating portion in contact with the Ga or the Ga alloy is provided with respect to the Ga or the Ga alloy. A rotating anode X-ray tube made of a corrosion-resistant metal or a corrosion-resistant ceramic having corrosion resistance. 3. The rotary anode X-ray tube according to claim 1, wherein the liquid metal is Ga or a Ga alloy, and a stainless steel or a tool steel in which a receiving portion in contact with the Ga or the Ga alloy is coated with TiN. A rotating anode X-ray tube characterized by being manufactured by: 4. The rotating anode X-ray tube according to claim 1, further comprising an injection hole for injecting the liquid metal into the housing. X-ray tube. 5. The rotary anode X-ray tube according to claim 4, wherein said injection hole is threaded, and said injection hole is closed with a screw stopper. . 6. The rotating anode X-ray tube according to claim 1, wherein the housing is provided at a substantially central portion in the axial direction between the plurality of rolling bearings, and the housing is provided in the axial direction. A rotating anode X-ray tube, characterized in that the rotating anode X-ray tube has the largest diameter at the center and a tapered surface whose diameter decreases toward the end in the axial direction. 7. The rotating anode X-ray tube according to claim 1, wherein a gap between the supported member and the support member in the axial direction outside the housing portion is 0.2 m.
m or less, and a rotating anode X-ray tube. 8. The rotary anode X-ray tube according to claim 7, wherein the pumping groove for pushing back the liquid metal in the gap between the supported member and the supporting member back to the housing portion is provided on the supported member or the supporting member. A rotating anode X-ray tube formed on a member. 9. The rotary anode X-ray tube according to claim 8, wherein a labyrinth groove for storing liquid metal is formed adjacent to the outside of the pumping groove. . 10. The rotating anode X according to claim 8, wherein
A rotary anode X-ray tube, wherein the groove angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to the axial direction of the supported member. 11. A cylindrical support member and an axially supported member that rotate relative to each other, a liquid metal filled between the support member and the supported member, the support member or the supported member. A liquid metal seal device comprising: a pumping groove formed in a liquid metal seal, wherein a groove angle of the pumping groove is 10 to 20 degrees with respect to a plane perpendicular to an axial direction of a supported member. apparatus.