JPH11264978A - Manufacture of liquid crystal display element - Google Patents

Manufacture of liquid crystal display element

Info

Publication number
JPH11264978A
JPH11264978A JP6694898A JP6694898A JPH11264978A JP H11264978 A JPH11264978 A JP H11264978A JP 6694898 A JP6694898 A JP 6694898A JP 6694898 A JP6694898 A JP 6694898A JP H11264978 A JPH11264978 A JP H11264978A
Authority
JP
Japan
Prior art keywords
liquid crystal
alignment film
alignment
rubbing
orientation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6694898A
Other languages
Japanese (ja)
Inventor
Osamu Hoshino
修 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP6694898A priority Critical patent/JPH11264978A/en
Publication of JPH11264978A publication Critical patent/JPH11264978A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To improve display quality and productivity of a large-screen and a fine-definition liquid crystal display element by preventing the array and orientation of liquid crystal molecules of a liquid crystal composition part of the liquid crystal display element from becoming uneven due to the rubbing unevenness of an orientation film. SOLUTION: After an array substrate 12 or an opposite substrate 13 is coated with an orientation films 17, 23, 1st and 2nd heating means 28a and 28b heat them providing with a temperature gradient and a drying device 31 which forms an air flow on the surface of the orientation films 17, 23 in the same direction with the temperature gradient by an air blower 32 gradually dries the orientation films 17, 23 in the temperature gradient direction. Consequently, the molecule chains of the orientation films 17, 23 are arrayed in the temperature gradient direction by convection generated in the orientation films 17, 23 and the air flow on the surface of the orientation films 17, 23 to provide orientation restricting force for orientation the liquid crystal molecules of a liquid crystal composition 16 to the orientation films 17, 23 themselves and thus, an orientation defect is compensated in spite of variation of rubbing conditions to prevent a display defect caused by the orientation result of a TFT-LCD 10.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示素子に係
り、特に配向膜を良好に配向処理する液晶表示素子の製
造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and, more particularly, to a method for manufacturing a liquid crystal display device capable of satisfactorily aligning an alignment film.

【0002】[0002]

【従来の技術】液晶表示素子(以下LCDと略称す
る。)は通常、液晶分子を均一に配向させ任意の方向に
液晶分子を均一に整列させる事により表示面内の画質の
均一ひいては画質向上を図り、良好な表示品位を保持し
ている。
2. Description of the Related Art Generally, a liquid crystal display device (hereinafter abbreviated as LCD) uniformly aligns liquid crystal molecules and uniformly aligns the liquid crystal molecules in an arbitrary direction to improve the uniformity of the image quality on the display surface and the improvement of the image quality. As a result, good display quality is maintained.

【0003】従来、液晶分子を任意の方向に整列させる
方法のうち、量産に適した方法として、工業的には、電
極を有するLCD基板表面にポリイミド等の配向膜を形
成し、この配向膜表面を繊維からなるラビング材にて機
械的に擦る事により成されるラビング方法が一般に実施
されている。
Conventionally, among methods of aligning liquid crystal molecules in an arbitrary direction, as a method suitable for mass production, industrially, an alignment film such as polyimide is formed on the surface of an LCD substrate having electrodes. Is generally practiced by mechanically rubbing with a rubbing material made of fiber.

【0004】このラビング方法にあっては、LCDの量
産を損なう事無く液晶分子の配向状態をより均一に制御
する様、例えば、円筒上のローラー等に巻き付けたラビ
ング材の回転数、ラビング材とLCD基板との相対速度
或いは、ラビング材のLCD基板に対する押圧であるラ
ビング圧の最適な条件等のラビング配向処理条件を管理
コントロールしていた。
In this rubbing method, for example, the number of rotations of a rubbing material wound around a roller on a cylinder, the rubbing material, and the like are controlled so as to more uniformly control the alignment state of liquid crystal molecules without impairing mass production of LCDs. The rubbing alignment processing conditions such as the relative speed with respect to the LCD substrate or the optimal condition of the rubbing pressure, which is the pressing of the rubbing material on the LCD substrate, have been managed and controlled.

【0005】他方近年LCDにあっては、大画面、高精
細化に伴い表示のより一層の均一化が図られ、この表示
の均一化を実現するために配向膜の配向状態の均一化が
要求されていた。
On the other hand, in recent years, in LCDs, the display has been made more uniform with the increase in the screen size and the definition, and in order to realize this uniform display, the alignment state of the alignment film has been required to be uniform. It had been.

【0006】[0006]

【発明が解決しようとする課題】しかしながら前記ラビ
ング方法にあっては、例えばラビング圧はラビング材と
LCD基板との間隔で決定されるが、このラビング材と
LCD基板との間隔は、ラビング布の厚み、ラビング布
をラビング用ローラー等に張り付ける際に用いる接着剤
の厚み、ラビング材を巻き付けたローラーをラビング配
向処理装置に取り付ける際に生ずる取り付け誤差等に左
右され、これらを管理コントロールすることはラビング
布、接着剤の製造工程等にまで立ち入らなければ成らず
現状では困難な作業であるという問題を生じていた。
However, in the rubbing method, for example, the rubbing pressure is determined by the distance between the rubbing material and the LCD substrate, and the distance between the rubbing material and the LCD substrate is determined by the rubbing cloth. It depends on the thickness, the thickness of the adhesive used when attaching the rubbing cloth to the rubbing roller, etc., the mounting error that occurs when attaching the roller around which the rubbing material is wound to the rubbing orientation processing device, etc. There has been a problem that it is a difficult task at present because it is necessary to enter the manufacturing process of the rubbing cloth and the adhesive.

【0007】又、ラビング用ローラーをラビング配向処
理装置に取り付ける際に生ずる取り付け誤差は取り付け
方法等の改善により低減されるものの限界が有り、ラビ
ング用ローラーをラビング配向処理装置に高精度に取り
付けることができてもラビング用ローラーを回転させる
際に生ずる回転ムラ、振動等によりラビング材とLCD
基板との間隔を厳密にコントロールすることには機械精
度上限界を有するという問題を有していた。
[0007] In addition, the mounting error that occurs when the rubbing roller is mounted on the rubbing alignment processing device can be reduced by improving the mounting method and the like, but there is a limit, and it is necessary to mount the rubbing roller on the rubbing alignment processing device with high accuracy. Even if possible, rubbing material and LCD due to rotation unevenness and vibration generated when rotating the rubbing roller
Strictly controlling the distance from the substrate has a problem in that there is a limit in terms of mechanical accuracy.

【0008】しかもLCD基板の厚みの変動によっても
ラビング材とLCD基板との間隔は変動され、ラビング
方法における配向処理条件に適した間隔を維持管理する
ことが困難であり、これによってもラビング圧力が不均
一になりやすく、ラビング配向処理時にラビング布の毛
先の向きを乱雑にしてしまい、結果としてラビング方向
の不均一及び、ラビング不足やラビング過多によるラビ
ング量の不均一を生じ、このラビング量の不均一によ
る、LCDの閾値電圧のムラにより、液晶分子の配列が
不均一となり、LCDの画質低下を招くという問題を生
じていた。そして量産時には、LCD基板の厚みの変動
が直接量産品の品質の変動となり、ラビング量の不均一
による表示不良品の発生により歩留まりの低下を来すと
いう問題を生じていた、特に近年LCDの主流となって
いる大型TFT−LCDにあってはコントラストの一層
の向上により、上記ラビング量の不均一がより顕著に表
示欠陥として現れ、しかも液晶分子はラビング配向処理
によってプレチルト構造を形成しているため、ラビング
不均一によリプレチルト構造の欠陥をも引き起こし、同
様に表示欠陥として現れ、画質の低下を来すこととなり
更に歩留低下を引き起こしていた。
In addition, the distance between the rubbing material and the LCD substrate fluctuates due to fluctuations in the thickness of the LCD substrate, and it is difficult to maintain and maintain a distance suitable for the alignment processing conditions in the rubbing method. The rubbing orientation tends to be non-uniform, and the direction of the bristles of the rubbing cloth is disordered during the rubbing orientation treatment. The unevenness of the threshold voltage of the LCD due to the non-uniformity causes the problem that the alignment of the liquid crystal molecules becomes non-uniform and the image quality of the LCD deteriorates. At the time of mass production, fluctuations in the thickness of the LCD substrate directly cause fluctuations in the quality of mass-produced products, causing a problem of lowering the yield due to the occurrence of defective display due to uneven rubbing amount. In the large-sized TFT-LCD described above, the unevenness of the rubbing amount appears more remarkably as a display defect due to the further improvement of the contrast, and the liquid crystal molecules form a pretilt structure by the rubbing alignment treatment. In addition, uneven rubbing also causes defects in the reptilt structure, which also appears as display defects, which lowers the image quality and further lowers the yield.

【0009】しかもLCD基板製造時に生じたラビング
量の不均一は、配向処理直後のLCD基板のままでの評
価が不能であり、配向処理後セルを形成し、液晶組成物
を封入したLCDの完成品となってから発見されるた
め、製造時間及び製造コストにおいて著しい無駄を生
じ、コストの上昇を招くという問題を有していた。
Further, the unevenness of the rubbing amount generated during the production of the LCD substrate cannot be evaluated as is with the LCD substrate immediately after the alignment process, and after the alignment process, a cell is formed and a liquid crystal composition encapsulated is completed. Since it is discovered after the product is manufactured, there is a problem in that a considerable waste is caused in the manufacturing time and the manufacturing cost, and the cost is increased.

【0010】そこで本発明は上記課題を除去するもの
で、ラビングによる配向処理方法において、ラビング材
及びラビング配向処理装置の精度が不均一或いはLCD
基板の厚さが不均一であっても、安定した配向処理を助
長する事によりラビング方向及びラビング量の均一化を
図れ、ラビング不良を原因とする表示不良を生じる事が
無く、均一で良好な表示品位を得られ、製造歩留まりの
高い液晶表示素子の製造方法を提供する事を目的とす
る。
In view of the above, the present invention has been made to solve the above-mentioned problem.
Even if the thickness of the substrate is not uniform, the rubbing direction and the rubbing amount can be made uniform by promoting a stable alignment process, and a display defect caused by a rubbing defect does not occur. It is an object of the present invention to provide a method for manufacturing a liquid crystal display element which can obtain display quality and has a high production yield.

【0011】[0011]

【課題を解決するための手段】本発明は上記課題を解決
する為の手段として、絶縁性基板上に電極及び配向膜を
有して成る一対の電極基板を所定の間隙を隔てて対向
し、前記間隙に液晶組成物を封入して成る液晶表示素子
の製造方法において、前記絶縁性基板に前記電極を形成
後、前記配向膜を塗布する工程と、前記塗布された配向
膜を所定方向に温度勾配を設けて加熱する工程とを実施
するものである。
According to the present invention, as a means for solving the above problems, a pair of electrode substrates each having an electrode and an alignment film on an insulating substrate are opposed to each other with a predetermined gap therebetween. In the method for manufacturing a liquid crystal display element comprising a liquid crystal composition sealed in the gap, a step of applying the alignment film after forming the electrode on the insulating substrate, and heating the applied alignment film in a predetermined direction. And heating with a gradient.

【0012】上記構成により本発明は、配向膜を配向方
向と同方向の温度勾配を設けて乾燥する事により、乾燥
時に配向膜内にて配向膜を構成する分子鎖を配向方向に
向けさせて液晶分子に対する配向規制力を持たせる事に
より、その後のラビング処理条件が多少変動しても液晶
分子を均一且つ良好に配向し、配向不良が原因の表示不
良を生じる事無く、表示品位の良い且つ製造歩留まりの
高い液晶表示素子を得る物である。
According to the present invention, the alignment film is dried by providing a temperature gradient in the same direction as the alignment direction so that the molecular chains constituting the alignment film are oriented in the alignment direction in the alignment film during drying. By giving the alignment regulating force to the liquid crystal molecules, the liquid crystal molecules are uniformly and well aligned even if the subsequent rubbing treatment conditions are slightly changed, and the display quality is good without causing the display failure due to the alignment failure. The object is to obtain a liquid crystal display element having a high production yield.

【0013】又本発明は上記課題を解決する為の手段と
して、絶縁性基板上に電極及び配向膜を有して成る一対
の電極基板を所定の間隙を隔てて対向し、前記間隙に液
晶組成物を封入して成る液晶表示素子の製造方法におい
て、前記絶縁性基板に前記電極を形成後、前記配向膜を
塗布する工程と、前記塗布された配向膜を所定方向に温
度勾配を設けて加熱すると共に前記配向膜表面にて前記
所定方向に気流を発生する工程とを実施するものであ
る。
According to the present invention, as a means for solving the above problems, a pair of electrode substrates each having an electrode and an alignment film on an insulating substrate are opposed to each other with a predetermined gap therebetween, and a liquid crystal composition is provided in the gap. A method of manufacturing the liquid crystal display element by enclosing the object, after forming the electrodes on the insulating substrate, applying the alignment film, and heating the applied alignment film by providing a temperature gradient in a predetermined direction. And generating a gas flow in the predetermined direction on the surface of the alignment film.

【0014】上記構成により本発明は、配向膜を配向方
向と同方向の温度勾配を設け更に配向方向と同方向の気
流にて乾燥する事により、乾燥時に配向膜内にて配向膜
を構成する分子鎖に配向方向に向くような影響を与えら
れ、その後のラビング処理条件が多少変動しても液晶分
子を均一且つ良好に配向し、配向不良が原因の表示不良
を生じる事無く、表示品位の良い且つ製造歩留まりの高
い液晶表示素子を得る物である。
According to the present invention, the alignment film is provided with a temperature gradient in the same direction as the alignment direction and dried by an airflow in the same direction as the alignment direction. Even if the rubbing conditions are slightly changed, the liquid crystal molecules are uniformly and satisfactorily aligned even if the subsequent rubbing treatment conditions are slightly changed. It is intended to obtain a good liquid crystal display element with a high production yield.

【0015】[0015]

【発明の実施の形態】先ず本発明の原理について述べ
る。一般に大型TFT−LCDに使用する配向膜材料は
有機系直線高分子が用いられている。そしてこの有機系
直線高分子にてプレチルトを発生させる機構として、分
子を形成する主鎖からプレチルト発生用の側鎖が枝状に
形成され、該側鎖はプレチルトを発生させる為に主鎖に
対して電子吸引、供与等の電子の受け渡しが可能な極性
感応基を有している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, the principle of the present invention will be described. Generally, an organic linear polymer is used as an alignment film material used for a large-sized TFT-LCD. Then, as a mechanism for generating pretilt in this organic linear polymer, a side chain for generating pretilt is formed in a branch from the main chain forming the molecule, and the side chain is formed with respect to the main chain to generate pretilt. And has a polarity-sensitive group capable of transferring electrons such as electron withdrawing and donating.

【0016】一般に該極性感応基は疎水性又は親水性を
有し、配向膜形成後の乾燥前にLCD基板に対してラビ
ング方向と同方向に温度勾配を加えると、配向膜は温度
の高い部分から低い部分に向けて対流し始め、親水性で
あるならば親水基を、疎水性であるならば疎水基を対流
方向に整列させる。この対流時に更にラビング方向と同
方向に気流を与えると、配向膜中の極性感応基は空気と
触れ極性感応基が親水性であるならば親水基を配向材料
すなわち配向膜方向に、疎水性であるならば疎水基を配
向膜の表面方向に向けて整列させる。すなわち、配向膜
を形成している有機系高分子はラビング方向に対してプ
レチルトを有する形態をとることになる。従って、ラビ
ング配向処理以前に配向膜には液晶分子をラビング方向
に整列させる能力を有することになる。尚このような配
向膜内の分子の構造は、従来行っていた配向膜の焼成を
行っても崩れない事が確認されている。
Generally, the polarity-sensitive group has hydrophobicity or hydrophilicity. When a temperature gradient is applied to the LCD substrate in the same direction as the rubbing direction with respect to the LCD substrate before the drying after forming the alignment film, the alignment film has a high temperature portion. Convection from the bottom to the lower part, aligning hydrophilic groups if hydrophilic and hydrophobic groups if hydrophobic. When an airflow is further applied in the same direction as the rubbing direction during this convection, the polarity-sensitive group in the alignment film comes into contact with the air and, if the polarity-sensitive group is hydrophilic, the hydrophilic group becomes hydrophobic in the alignment material, that is, in the direction of the alignment film. If so, the hydrophobic groups are aligned toward the surface of the alignment film. That is, the organic polymer forming the alignment film takes a form having a pretilt in the rubbing direction. Therefore, before the rubbing alignment treatment, the alignment film has the ability to align the liquid crystal molecules in the rubbing direction. In addition, it has been confirmed that the structure of the molecules in such an alignment film does not collapse even if the conventional alignment film is fired.

【0017】この乾燥時における処理は、ラビング処理
のような機械的な処理ではなく配向膜材料である有機系
高分子材料の分子構造に方向性を持たせる処理である
為、ラビング等の機械的な配向処理に比べ安定してい
る。従って、乾燥時分子構造に方向性を持たせる様処理
されたLCD基板上の配向膜は、安定した液晶分子の配
向を行うことが出来、このような配向能力を有する様乾
燥された配向膜を更にラビング処理することにより、ラ
ビング条件の変動に拘わらず、均一で安定した配向状態
を得ることが出来る。そして従来発生していたラビング
処理装置や、LCD基板の精度から来るラビング条件の
不均一によるラビングの不均−を配向膜が保持する配向
状態により補償する事が出来、配向状態の不均一及びプ
レチルトの不均一を防止可能とするものである。
The treatment at the time of drying is not a mechanical treatment such as a rubbing treatment but a treatment for giving a direction to the molecular structure of an organic polymer material as an alignment film material. It is more stable than a simple alignment treatment. Therefore, the alignment film on the LCD substrate that has been treated to give directionality to the molecular structure at the time of drying can perform stable alignment of liquid crystal molecules. Further, by performing the rubbing treatment, a uniform and stable alignment state can be obtained regardless of the fluctuation of the rubbing condition. The unevenness of the rubbing due to the unevenness of the rubbing conditions caused by the conventional rubbing processing apparatus and the LCD substrate can be compensated by the alignment state held by the alignment film, and the uneven alignment state and the pretilt can be compensated. Can be prevented.

【0018】次に上記原理に基づき本発明を、図1及び
図2に示す第1の実施の形態を参照して説明する。図1
は、TFT−LCD10を示す概略断面図であり、駆動
素子としてTFT11を用いるアレイ基板12及び、対
向基板13をスペーサ14を介し対向配置し、シール剤
15にて周囲を接着して成る間隙に液晶組成物16を封
入してなっている。
Next, the present invention will be described based on the above principle with reference to the first embodiment shown in FIGS. FIG.
FIG. 1 is a schematic cross-sectional view showing a TFT-LCD 10, in which an array substrate 12 using a TFT 11 as a driving element and an opposing substrate 13 are opposed to each other with a spacer 14 interposed therebetween, and a liquid crystal is inserted into a gap formed by bonding the periphery with a sealant 15. The composition 16 is enclosed.

【0019】ここでアレイ基板12は、ガラス基板17
上に、TFT11に駆動され、インジウム錫酸化物(以
下ITOと略称する。)からなり、マトリクス状にパタ
ーン形成される画素電極18を有し、その上に配向膜2
0を形成されている。一方対向基板13は、ガラス基板
21上にカラーフィルタ24、ITOからなる対向電極
22を有し、その上に配向膜23を形成されている。
Here, the array substrate 12 is a glass substrate 17
A pixel electrode 18 which is driven by the TFT 11 and is made of indium tin oxide (hereinafter abbreviated as ITO), is patterned in a matrix, and has an alignment film 2 thereon.
0 is formed. On the other hand, the counter substrate 13 has a color filter 24 and a counter electrode 22 made of ITO on a glass substrate 21, and an alignment film 23 is formed thereon.

【0020】TFT−LCD10にあっては、アレイ基
板12及び対向基板13形成後、夫々の対向面に溶媒に
可溶性を示すポリイミド系の高分子からなる配向膜2
0、23を成膜後、乾燥し、更に配向膜20、23をラ
ビング処理したのち、両基板12、13をスペーサを介
して対向配置し、シール剤15を固着して液晶セルを形
成する事となる。尚、配向膜20、23を構成するポリ
イミド系の高分子はプレチルトを発生させる為にCH3
等のアルキル基が分子鎖に組み込まれている。CH3等
のアルキル基は、それ自体が疎水性を示す為にラビング
方向と同方向の気流下ではポリイミド分子中に存在する
親水基をマクロ的には配向膜層の膜中に向くような方向
を取る。従って、プレチルトを発生させるCH3等のア
ルキル基は、ラビング方向と同方向の気流に沿って配向
膜表面層に並ぶ構造を有する事となる。
In the TFT-LCD 10, after the array substrate 12 and the counter substrate 13 are formed, an alignment film 2 made of a polyimide polymer which is soluble in a solvent is formed on each of the opposing surfaces.
After the films 0 and 23 are formed, they are dried, and the alignment films 20 and 23 are further rubbed. After that, the substrates 12 and 13 are opposed to each other via a spacer, and the sealant 15 is fixed to form a liquid crystal cell. Becomes The polyimide-based polymer constituting the alignment films 20 and 23 is CH3 for generating pretilt.
And the like are incorporated into the molecular chain. Since the alkyl group such as CH3 itself shows hydrophobicity, the hydrophilic group present in the polyimide molecule under the airflow in the same direction as the rubbing direction is directed macroscopically into the alignment film layer. take. Therefore, an alkyl group such as CH3 that generates pretilt has a structure in which the alkyl group such as CH3 is arranged on the alignment film surface layer along the airflow in the same direction as the rubbing direction.

【0021】次に配向膜20、23の乾燥について詳述
する。図2は、アレイ基板12及び対向基板13に塗布
される配向膜20、23を予備的に配向させつつ乾燥さ
せる乾燥装置26の概略説明図であり、ガラス基板1
7、21を載置するステージ27のガラス基板17、2
1の2辺に相当する位置には、85℃に温度設定される
第1の加熱手段28a及び第2の加熱手段28bが設け
られている。
Next, drying of the alignment films 20 and 23 will be described in detail. FIG. 2 is a schematic explanatory view of a drying device 26 for drying the alignment films 20 and 23 applied to the array substrate 12 and the counter substrate 13 while preliminarily aligning them.
Glass substrate 17, 2 of stage 27 on which 7, 21 are placed
A first heating unit 28a and a second heating unit 28b that are set to a temperature of 85 ° C. are provided at positions corresponding to the two sides of 1.

【0022】そしてアレイ基板12にあっては、ガラス
基板17上のTFT11及び画素電極18の上に、又対
向基板13にあっては、ガラス基板21上のカラーフィ
ルタ24及び対向電極22を積層した上に、配向膜2
0、23を夫々印刷等の方法で1000μm厚に塗布し
た後、乾燥装置26のステージ27に載置し、ガラス基
板17、21の2辺方向から加熱することにより、配向
膜20、23に矢印s方向の温度勾配を保持させつつ加
熱乾燥する。
In the case of the array substrate 12, the color filter 24 and the counter electrode 22 on the glass substrate 21 are laminated on the TFT 11 and the pixel electrode 18 on the glass substrate 17, and on the counter substrate 13, On top, alignment film 2
After applying 0 and 23 by printing or the like, respectively, to a thickness of 1000 μm, the substrates are placed on a stage 27 of a drying device 26 and heated from two sides of the glass substrates 17 and 21 so that the alignment films 20 and 23 have arrows. Heat drying is performed while maintaining the temperature gradient in the s direction.

【0023】配向膜20、23は塗布直後では溶媒等が
残存している為に湿った状態になっており、この状態か
ら溶媒を蒸発させ乾燥させる際に第1及び第2の加熱手
段28a、28bにより矢印r方向の温度勾配を設けて
加熱することにより、配向膜20、23内部でマクロ的
な対流を発生し、この対流が配向膜20、23を構成す
るポリイミド等の分子鎖に影響を与え、分子鎖を対流方
向に並ばせながら、配向膜20、23を温度勾配方向に
徐々に乾燥させ、分子鎖が対流方向である矢印r方向に
沿って配向膜表面層に並ぶ構造を形成する。
Immediately after coating, the alignment films 20 and 23 are in a wet state because the solvent and the like remain, and when the solvent is evaporated and dried from this state, the first and second heating means 28a and 28a are used. By heating by providing a temperature gradient in the direction of arrow r by 28b, macroscopic convection is generated inside the alignment films 20 and 23, and this convection affects the molecular chains of polyimide and the like constituting the alignment films 20 and 23. Then, while aligning the molecular chains in the convection direction, the alignment films 20 and 23 are gradually dried in the temperature gradient direction to form a structure in which the molecular chains are aligned in the direction of the arrow r which is the convection direction on the alignment film surface layer. .

【0024】乾燥後、ラビング布を巻き付けたラビング
用ローラー(図示せず)により配向膜20、23を温度
勾配方向と同方向である矢印r方向にラビング処理す
る。このラビング時、ラビング布の毛先の乱れ、あるい
はラビング用ローラの機械精度の変動や、アレイ基板1
2や対向基板13の厚みの変動等のラビング条件の変動
等に拘わらず、ラビング前に配向膜20、23の分子鎖
が、方向性を有し、ラビング方向の不均一、ラビング量
の不均一を補い、配向膜20、23は十分且つ均一に配
向される。この後アレイ基板12の周辺にシール剤15
を印刷塗布し、対向基板13にスペーサ14を散布した
後、アレイ基板12及び対向基板13を対向配置して、
シール剤15を加熱硬化してセルを形成し、間隙に液晶
組成物16を封入してTFT−LCD10を完成する。
After drying, the alignment films 20 and 23 are rubbed by a rubbing roller (not shown) around which a rubbing cloth is wound in the direction of the arrow r which is the same direction as the temperature gradient direction. During this rubbing, the tip of the rubbing cloth is disturbed or the mechanical accuracy of the rubbing roller fluctuates.
Regardless of the rubbing conditions such as the thickness of the counter substrate 13 or the thickness of the opposing substrate 13, the molecular chains of the alignment films 20 and 23 have directivity before rubbing, and the rubbing direction is uneven and the rubbing amount is uneven. And the alignment films 20 and 23 are sufficiently and uniformly aligned. Thereafter, a sealant 15 is provided around the array substrate 12.
After printing and applying spacers 14 on the opposing substrate 13, the array substrate 12 and the opposing substrate 13 are arranged to face each other,
The sealing agent 15 is cured by heating to form a cell, and the liquid crystal composition 16 is sealed in the gap to complete the TFT-LCD 10.

【0025】この様にして成るTFT−LCD10は、
配向膜20、23が十分且つ均一にラビングされている
ことから、液晶組成物16の液晶分子の配列、配向に欠
陥を発生せず、閾値ムラが無く、大画面かつ高精細であ
りながら、良好な表示品位を得られ、ひいては配向不良
が原因の表示不良による歩留まりの低下を防止し、生産
性の高い液晶表示素子を得る事ができる。
The TFT-LCD 10 thus configured is:
Since the alignment films 20 and 23 are sufficiently and uniformly rubbed, there is no defect in the alignment and alignment of the liquid crystal molecules of the liquid crystal composition 16, there is no threshold unevenness, and a large screen and high definition are obtained. A high display quality can be obtained, and a decrease in yield due to poor display due to poor alignment can be prevented, and a liquid crystal display device with high productivity can be obtained.

【0026】次に本発明を図3及び図4に示す第2の実
施の形態を参照して説明する。本実施の形態は第1の実
施の形態における配向膜の乾燥方法が異なるものの、他
は第1の実施の形態と同一である事から、同一部分につ
いては同一符号を付しその説明を省略する。本実施の形
態にあっては、配向膜20、23の乾燥時、アレイ基板
12及び対向基板13を温度勾配を設けて加熱乾燥する
と共に、配向膜20、23表面で温度勾配と同方向に気
流を形成して乾燥するものである。
Next, the present invention will be described with reference to a second embodiment shown in FIGS. This embodiment is different from the first embodiment in the method of drying the alignment film in the first embodiment, but is otherwise the same as the first embodiment. Therefore, the same parts are denoted by the same reference numerals and the description thereof is omitted. . In the present embodiment, when the alignment films 20 and 23 are dried, the array substrate 12 and the counter substrate 13 are dried by heating while providing a temperature gradient, and airflow is generated on the surfaces of the alignment films 20 and 23 in the same direction as the temperature gradient. Is formed and dried.

【0027】即ち本実施の形態の乾燥装置31は、ステ
ージ27上の第1及び第2の加熱手段28a、28bと
共に、窒素(N)を用い毎分約20〜30リットルの流
量の気流を形成し、ステージ27上方5〜7mmの高さ
から約45゜の角度で気流を吹き付けながらステージ2
7の対角方向に走査移動する送風機32を有し、アレイ
基板12及び対向基板13に塗布される配向膜20、2
3を加熱温度勾配及び気流により配向させつつ乾燥する
ように成っている。
That is, the drying device 31 of the present embodiment forms an air flow at a flow rate of about 20 to 30 liters per minute using nitrogen (N) together with the first and second heating means 28a and 28b on the stage 27. Then, while blowing air at an angle of about 45 ° from a height of 5 to 7 mm above the stage 27, the stage 2
7 and a blower 32 that scans and moves in the diagonal direction of the alignment substrate 20.
3 is dried while being oriented by a heating temperature gradient and an air flow.

【0028】従ってアレイ基盤12及び対向基板13表
面に塗布された配向膜20、23は、溶媒を蒸発させ乾
燥させる際に矢印s方向の温度勾配とこれと同方向に形
成される気流とにより、配向膜20、23内部でマクロ
的な対流を発生している状態で更に配向膜20、23表
面を気流と接触させ、配向膜20、23を構成するポリ
イミド等の分子鎖に影響を与え、分子鎖を配向膜20、
23内部の対流及び配向膜20、23表面の気流により
同一方向に並ばせながら、配向膜20、23を温度勾配
方向に徐々に乾燥させ、分子鎖が対流方向である矢印s
方向に沿って配向膜表面層に並ぶ構造を形成する。
Therefore, when the solvent is evaporated and dried, the orientation films 20 and 23 applied to the surface of the array substrate 12 and the counter substrate 13 are heated by the temperature gradient in the direction of arrow s and the airflow formed in the same direction. When macroscopic convection is generated inside the alignment films 20 and 23, the surfaces of the alignment films 20 and 23 are further brought into contact with an airflow, thereby affecting the molecular chains of polyimide and the like constituting the alignment films 20 and 23, Chain to the alignment film 20,
The alignment films 20, 23 are gradually dried in the direction of the temperature gradient while being aligned in the same direction by the convection inside 23 and the airflow on the surfaces of the alignment films 20, 23, and the arrow s indicates that the molecular chains are in the convection direction.
A structure is formed that is aligned with the alignment film surface layer along the direction.

【0029】この乾燥後、配向膜20、23を温度勾配
方向及び気流方向と同方向である矢印s方向にラビング
処理するが、ラビング条件の変動に拘わらず、ラビング
前に配向膜20、23の分子鎖が方向性を有し、ラビン
グ方向の不均一、ラビング量の不均一を補うので、配向
膜20、23は第1の実施の形態と同様、十分且つ均一
に配向される。この後第1の実施の形態と同様、十分且
つ均一に配向される配向膜20、23を有するアレイ基
板12及び対向基板13を用いTFT−LCD10を完
成する。
After the drying, the alignment films 20, 23 are rubbed in the direction of the arrow s, which is the same direction as the temperature gradient direction and the air flow direction. Since the molecular chains have directionality and compensate for unevenness in the rubbing direction and uneven rubbing amount, the alignment films 20 and 23 are sufficiently and uniformly aligned as in the first embodiment. Thereafter, similarly to the first embodiment, the TFT-LCD 10 is completed by using the array substrate 12 and the counter substrate 13 having the alignment films 20 and 23 that are sufficiently and uniformly aligned.

【0030】この様にして成るTFT−LCD10は、
第1の実施の形態と同様、配向膜20、23が十分且つ
均一にラビングされていることから、良好な液晶分子の
配列を得られ、大画面かつ高精細でありながら、配向不
良が原因の表示不良を生じる事が無く良好な表示品位を
得られ、歩留まりの低下も防止出来、生産性向上も図れ
る。
The TFT-LCD 10 thus constructed is
As in the first embodiment, since the alignment films 20 and 23 are sufficiently and uniformly rubbed, a good alignment of liquid crystal molecules can be obtained, and a large screen and high definition can be obtained. Good display quality can be obtained without causing display defects, a decrease in yield can be prevented, and productivity can be improved.

【0031】次に本発明を図5及び図6に示す第3の実
施の形態を参照して説明する。本実施の形態は第1の実
施の形態における配向膜の乾燥方法が異なるものの、他
は第1の実施の形態と同一である事から、同一部分につ
いては同一符号を付しその説明を省略する。本実施の形
態にあっては、配向膜20、23の乾燥時、アレイ基板
12及び対向基板13を均一に加熱乾燥すると共に、配
向膜20、23表面に所定方向の気流を形成して乾燥す
るものである。
Next, the present invention will be described with reference to a third embodiment shown in FIGS. This embodiment is different from the first embodiment in the method of drying the alignment film in the first embodiment, but is otherwise the same as the first embodiment. Therefore, the same parts are denoted by the same reference numerals and the description thereof is omitted. . In the present embodiment, when the alignment films 20 and 23 are dried, the array substrate 12 and the counter substrate 13 are uniformly heated and dried, and an airflow in a predetermined direction is formed on the surfaces of the alignment films 20 and 23 to be dried. Things.

【0032】即ち本実施の形態の乾燥装置33は、ステ
ージ34上にアレイ基板12及び対向基板13を均一に
加熱する平板状の第3の加熱手段36を有すると共に、
窒素(N)を用い毎分約20〜30リットルの流量の気
流を形成し、ステージ34上方5〜7mmの高さから約
45゜の角度で気流を吹き付けながらステージ34の対
角方向に走査移動する送風機37を有し、アレイ基板1
2及び対向基板13に塗布される配向膜20、23を均
一に加熱しながら気流方向に配向させつつ乾燥する第5
の工程を実施するように成っている。
That is, the drying device 33 of the present embodiment has the third flat heating means 36 for uniformly heating the array substrate 12 and the counter substrate 13 on the stage 34,
An airflow at a flow rate of about 20 to 30 liters per minute is formed using nitrogen (N), and scanning movement is performed in the diagonal direction of the stage 34 while blowing the airflow at an angle of about 45 ° from a height of 5 to 7 mm above the stage 34. Array substrate 1
And drying the alignment films 20 and 23 applied to the counter substrate 13 while uniformly heating them and orienting them in the airflow direction.
Is carried out.

【0033】これにより配向膜20、23を塗布直後、
ガラス基板17、21をステージ34に載置すると、ガ
ラス基板17、21は底面から均一に加熱され徐々に乾
燥されるが、この間配向膜20、23表面は気流と接触
しており、配向膜20、23を構成するポリイミド等の
分子鎖はこの影響を受け、分子鎖を気流方向に並ばせな
がら徐々に乾燥され、分子鎖が気流方向である矢印t方
向に沿って配向膜表面層に並ぶ構造を形成する。
Thus, immediately after coating the alignment films 20 and 23,
When the glass substrates 17 and 21 are placed on the stage 34, the glass substrates 17 and 21 are uniformly heated from the bottom surface and gradually dried. During this time, the surfaces of the alignment films 20 and 23 are in contact with the airflow, , 23 are affected by this, the molecular chains are gradually dried while aligning the molecular chains in the airflow direction, and the molecular chains are arranged in the alignment film surface layer along the arrow t direction which is the airflow direction. To form

【0034】この乾燥後、配向膜20、23を気流方向
と同方向である矢印t方向にラビング処理するが、ラビ
ング条件が変動されても、ラビング前に配向膜20、2
3の分子鎖が方向性を有し、ラビング方向の不均一、ラ
ビング量の不均一を補い、配向膜20、23は第1の実
施の形態と同様、十分且つ均一に配向される。この後第
1の実施の形態と同様、十分且つ均一に配向される配向
膜20、23を有するアレイ基板12及び対向基板13
を用いTFT−LCD10を完成する。
After this drying, the alignment films 20, 23 are rubbed in the direction of the arrow t, which is the same direction as the airflow direction.
The molecular chains of No. 3 have directionality and compensate for non-uniform rubbing directions and non-uniform rubbing amounts, and the alignment films 20 and 23 are sufficiently and uniformly aligned as in the first embodiment. Thereafter, similarly to the first embodiment, the array substrate 12 and the counter substrate 13 having the alignment films 20 and 23 which are sufficiently and uniformly aligned.
To complete the TFT-LCD 10.

【0035】この様にして成るTFT−LCD10は、
第1の実施の形態と同様、配向膜20、23が十分且つ
均一にラビングされていることから、良好な液晶分子の
配列を得られ、大画面かつ高精細でありながら、配向不
良が原因の表示不良を生じる事が無く良好な表示品位を
得られ、歩留まりの低下も防止出来、生産性向上も図れ
る。
The TFT-LCD 10 thus configured is:
As in the first embodiment, since the alignment films 20 and 23 are sufficiently and uniformly rubbed, a good alignment of liquid crystal molecules can be obtained, and a large screen and high definition can be obtained. Good display quality can be obtained without causing display defects, a decrease in yield can be prevented, and productivity can be improved.

【0036】次に本発明を図7乃至図12に示す第4の
実施の形態を参照して説明する。本実施の形態は第3の
実施の形態において、アレイ基盤12及び対向基板の1
画素に相当する領域を分割して、分割した領域毎に配向
膜20、23中の分子鎖の方向を規制しつつ配向膜2
0、23を乾燥させるものである。図7は、TFT−L
CD38を示す概略断面図であり、アレイ基板40は、
ガラス基板41上に、TFT42に駆動されマトリクス
状にパターン形成されるITOからな画素電極43を有
し、その上にポリイミド系の高分子からなる配向膜44
が形成されている。一方対向基板46は、ガラス基板4
7上にカラーフィルタ48、ITOからなる対向電極5
0を積層した上にポリイミド系の高分子からなる配向膜
51が形成されている。スペーサ52を介し対向配置さ
れシール剤53に固着されるアレイ基板40及び対向基
板46の間隙には、液晶組成物54が封入されている。
Next, the present invention will be described with reference to a fourth embodiment shown in FIGS. This embodiment is different from the third embodiment in that one of the array substrate 12 and the opposing substrate is used.
A region corresponding to a pixel is divided, and the alignment film 2 is controlled while controlling the direction of the molecular chain in the alignment films 20 and 23 for each of the divided regions.
0 and 23 are dried. FIG. 7 shows a TFT-L
FIG. 2 is a schematic cross-sectional view showing a CD 38, wherein an array substrate 40
A pixel electrode 43 made of ITO, which is driven by a TFT 42 and is patterned in a matrix, is provided on a glass substrate 41, and an alignment film 44 made of a polyimide-based polymer is formed thereon.
Are formed. On the other hand, the opposite substrate 46 is a glass substrate 4
7, a color filter 48, a counter electrode 5 made of ITO
Further, an alignment film 51 made of a polyimide-based polymer is formed on top of the stacked layers. A liquid crystal composition 54 is sealed in a gap between the array substrate 40 and the counter substrate 46 which are disposed opposite to each other via the spacer 52 and fixed to the sealant 53.

【0037】一方、アレイ基板40及び対向基板46上
の配向膜44、51を乾燥する乾燥装置56は、ステー
ジ57上にアレイ基板12及び対向基板13を均一に加
熱する遠赤外線からなる第4の加熱手段58を有すると
共に、窒素(N)を用い毎分約20〜30リットルの流
量の気流を形成し、ステージ57上方5〜7mmの高さ
から約45゜の角度で気流を吹き付けながらステージ5
7の対角2方向に走査移動する送風機60を有し、アレ
イ基板40及び対向基板46に塗布される配向膜44、
51を均一に加熱しながら気流方向に配向させつつ乾燥
するように成っている。
On the other hand, a drying device 56 for drying the alignment films 44 and 51 on the array substrate 40 and the opposing substrate 46 is provided with a fourth infrared ray for uniformly heating the array substrate 12 and the opposing substrate 13 on the stage 57. In addition to the heating means 58, the stage 5 forms an airflow at a flow rate of about 20 to 30 liters per minute using nitrogen (N), and blows the airflow at an angle of about 45 ° from a height of 5 to 7 mm above the stage 57.
7, an air blower 60 that scans and moves in two diagonal directions, and an alignment film 44 applied to the array substrate 40 and the counter substrate 46.
The drying is performed while uniformly orienting 51 in the airflow direction while heating it uniformly.

【0038】そして配向膜44、51を乾燥させる際に
は、第4の加熱手段58とガラス基板41、47の間に
分割した領域サイズに相当する金属薄膜61にて第4の
加熱手段58からの熱を伝達する様に形成されたマスク
62を介在させ、各分割領域毎に、配向膜44、51内
の分子鎖を気流方向に並ばせる。
When the alignment films 44 and 51 are dried, the fourth heating means 58 uses the metal thin film 61 corresponding to the area size divided between the fourth heating means 58 and the glass substrates 41 and 47. The molecular chains in the alignment films 44 and 51 are arranged in the airflow direction for each of the divided regions with a mask 62 formed so as to transmit the heat.

【0039】すなわち、配向膜44、51を塗布直後、
ガラス基板41、47をマスク62を介してステージ5
7に載置すると、金属薄膜61にてマスキングを施した
図10に示す[A]領域にのみ配向膜44、51乾燥用
の熱が均一に伝達され徐々に乾燥しながら、送風機60
を矢印u方向に走査する事により、配向膜44、51を
構成するポリイミド等の分子鎖が気流方向である矢印u
方向に沿って配向膜表面層に揃えられる。次いでステー
ジ57上のマスク62を矢印v方向にスライドし、図1
1に示す配向膜44、51の残りの[B]領域を均一に
加熱乾燥しながら、送風機60を矢印w方向に走査する
事により、配向膜44、51を構成するポリイミド等の
分子鎖が気流方向である矢印w方向に沿って配向膜表面
層に揃えられる。
That is, immediately after coating the alignment films 44 and 51,
The glass substrates 41 and 47 are placed on the stage 5 via the mask 62.
7, the heat for drying the alignment films 44 and 51 is uniformly transmitted only to the region [A] shown in FIG.
Is scanned in the direction of arrow u so that the molecular chains of polyimide or the like constituting the alignment films 44 and 51 are in the direction of air flow u.
It is aligned with the alignment film surface layer along the direction. Next, the mask 62 on the stage 57 is slid in the direction of the arrow v, and FIG.
By blowing the blower 60 in the direction of arrow w while uniformly heating and drying the remaining [B] regions of the alignment films 44 and 51 shown in FIG. Are aligned with the alignment film surface layer along the direction of the arrow w.

【0040】従って、この後、配向膜44、51の
[A]領域及び[B]領域を交互にマスキングし、ラビ
ング布を巻き付けたラビング用ローラー(図示せず)に
より夫々の領域を矢印v方向及び矢印w方向にラビング
操作し、図12に示すような配向を得る。このラビング
時、ラビング条件がの変動されても、[A]領域及び
[B]領域はラビング前に夫々分子鎖が方向性を有して
おり、ラビング方向の不均一、ラビング量の不均一を補
い、配向膜44、51は各ラビング方向に十分且つ均一
に配向される。このご、配向膜44、51を有するアレ
イ基板40及び対向基板46を用いTFT−LCD38
を形成する。
Accordingly, after that, the [A] and [B] regions of the alignment films 44 and 51 are alternately masked, and the respective regions are moved in the direction of arrow v by a rubbing roller (not shown) around which a rubbing cloth is wound. And a rubbing operation in the direction of arrow w to obtain the orientation as shown in FIG. At the time of this rubbing, even if the rubbing conditions are changed, the [A] region and the [B] region each have a directional molecular chain before the rubbing, so that the rubbing direction and the rubbing amount are not uniform. In addition, the alignment films 44 and 51 are sufficiently and uniformly aligned in each rubbing direction. The TFT-LCD 38 using the array substrate 40 having the alignment films 44 and 51 and the counter substrate 46.
To form

【0041】この様にして成るTFT−LCD38は、
配向膜44、51が十分且つ均一にラビングされている
ことから、液晶組成物54の液晶分子の配列、配向に欠
陥を発生せず、閾値ムラが無く、大画面かつ高精細であ
りながら、良好な表示品位を得られ、ひいては配向不良
が原因の表示不良による歩留まりの低下を防止し、生産
性の高い液晶表示素子を得る事ができる。しかも1画素
が[A]領域及び[B]領域に分割されて、夫々矢印u
方向及び矢印w方向の2方向に配向される事から、大画
面、フルカラーのTFT−LCD38において視角依存
性の改善を図れ、高精細且つコントラストの良好な表示
画像を得られ表示品位の向上を図れる。
The TFT-LCD 38 thus constructed is:
Since the alignment films 44 and 51 are sufficiently and uniformly rubbed, there is no defect in the alignment and alignment of the liquid crystal molecules of the liquid crystal composition 54, there is no threshold unevenness, and a large screen and high definition can be obtained. A high display quality can be obtained, and a decrease in yield due to poor display due to poor alignment can be prevented, and a liquid crystal display device with high productivity can be obtained. Moreover, one pixel is divided into the [A] region and the [B] region, and each is divided by an arrow u
Since the liquid crystal molecules are oriented in two directions, that is, the direction of the arrow w and the direction of the arrow w, the viewing angle dependency can be improved in a large-screen, full-color TFT-LCD 38, and a display image with high definition and good contrast can be obtained, thereby improving the display quality. .

【0042】尚本発明は上記実施の形態に限られるもの
でなく、その趣旨を変えない範囲での変更は可能であっ
て、例えば配向膜乾燥時の加熱温度や、気流を発生させ
るためのガスの流量等も、配向膜の材料或いは膜厚等に
応じて任意であり、配向膜の材料として、熱硬化型のポ
リイミドを使用しても同様の効果を得ることが可能であ
る。又、乾燥時、配向膜に温度勾配を生じさせる装置の
構造も任意であり、例えば、図13に示す第1の変形例
の様に、全面に渡り均一に発熱する第5の加熱装置64
に高さの異なる第1の支柱66及び第2の支柱67を設
け、この第1及び第2の支柱66、67を介し電極層6
8及び配向膜70を有するガラス基板71を加熱するこ
とにより、配向膜70を温度勾配を持たせて加熱する等
しても良い。
The present invention is not limited to the above-described embodiment, but can be changed without departing from the spirit of the present invention. For example, the heating temperature at the time of drying the alignment film and the gas for generating an air flow may be used. The flow rate and the like are arbitrary depending on the material or thickness of the alignment film, and the same effect can be obtained by using a thermosetting polyimide as the material of the alignment film. Further, the structure of the device for generating a temperature gradient in the alignment film during drying is also arbitrary. For example, as in a first modification shown in FIG. 13, a fifth heating device 64 which generates heat uniformly over the entire surface.
Are provided with a first support 66 and a second support 67 having different heights, and the electrode layer 6 is interposed via the first and second support 66, 67.
By heating the glass substrate 71 having the alignment film 8 and the alignment film 70, the alignment film 70 may be heated with a temperature gradient.

【0043】更に第4の実施の形態において熱源として
遠赤外線を使用し、遠赤外線を吸収する金属薄膜で形成
されたマスクにてマスキングし配向膜を分割して乾燥す
る際に、分割された画素領域に夫々異なる方向の気流を
接触させ、その分子鎖を夫々の気流方向に並べるながら
乾燥するのみで配向膜はラビング処理する事無く配向処
理され、LCDに封入される液晶組成物の液晶分子を所
定方向に配向させることも可能である。このようにすれ
ば、LCDの視野角を拡大するために、画素を分割して
1画素を複数方向に配向させる際に、従来の様にフォト
リソグラフにより、分割された画素領域を選択的にマス
キングしながら複数回ラビング処理を実施する必要がな
くなり、その配向処理操作を著しく簡素化出来、コスト
の縮小が可能になると共に配向処理工程における製造精
度の向上を図れひいては歩留まりを向上出来る。
Further, in the fourth embodiment, when far infrared rays are used as a heat source, masking is performed with a mask formed of a metal thin film that absorbs far infrared rays, and the alignment film is divided and dried. The regions are brought into contact with airflows of different directions, and the molecular chains of the liquid crystal molecules of the liquid crystal composition sealed in the LCD are subjected to alignment treatment without rubbing only by drying while aligning the molecular chains in the respective airflow directions. Orientation in a predetermined direction is also possible. In this way, when dividing a pixel and orienting one pixel in a plurality of directions in order to enlarge the viewing angle of the LCD, the divided pixel region is selectively masked by photolithography as in the conventional case. However, it is not necessary to perform the rubbing process a plurality of times, and the operation of the alignment process can be significantly simplified, the cost can be reduced, and the manufacturing accuracy in the alignment process can be improved, and the yield can be improved.

【0044】[0044]

【発明の効果】以上説明したように本発明によれば配向
膜を成膜後、乾燥する間に配向膜中の分子鎖を配向方向
に並ぶ様制御する事により、配向膜はラビング配向処理
以前に液晶組成物中の液晶分子をラビング方向に整列さ
せる能力を保持される事となる。従ってラビング装置に
よるラビング条件が変動される場合であっても、ラビン
グの不均一を補償し、配向膜は安定した液晶分子の配向
を行う事が可能となり、このような配向能力を有する配
向膜を更にラビング処理する事により、均一で安定した
配向状態を得ることができ、LCDの液晶分子の配列、
配向に欠陥を発生する事無く高品位で表示欠陥の無い大
画面かつ高精細、高視野角を有するLCDを容易に製造
可能と成る。又、配向不良が原因の表示不良を防止する
ことにより、歩留まりの低下を防止し、生産性向上を図
れる。
As described above, according to the present invention, the alignment film is controlled before the rubbing alignment treatment by controlling the molecular chains in the alignment film in the alignment direction during the drying after the formation of the alignment film. Thus, the ability to align the liquid crystal molecules in the liquid crystal composition in the rubbing direction is maintained. Therefore, even when the rubbing conditions of the rubbing device are changed, it is possible to compensate for the non-uniformity of the rubbing and to perform stable alignment of the liquid crystal molecules on the alignment film. Further, by performing the rubbing treatment, a uniform and stable alignment state can be obtained, and the alignment of the liquid crystal molecules of the LCD,
It is possible to easily manufacture an LCD having a large screen, a high definition, a high definition, and a wide viewing angle without generating defects in alignment and having no display defects. Further, by preventing display defects caused by defective orientation, it is possible to prevent a decrease in yield and improve productivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態におけるTFT−L
CDを示す概略断面図である。
FIG. 1 shows a TFT-L according to a first embodiment of the present invention.
FIG. 3 is a schematic sectional view showing a CD.

【図2】本発明の第1の実施の形態における乾燥装置を
示す概略説明図である。
FIG. 2 is a schematic explanatory view showing a drying device according to the first embodiment of the present invention.

【図3】本発明の第2の実施の形態における乾燥装置を
示す概略説明図である。
FIG. 3 is a schematic explanatory view showing a drying device according to a second embodiment of the present invention.

【図4】本発明の第2の実施の形態における乾燥装置を
側面から見た概略説明図である。
FIG. 4 is a schematic explanatory view of a drying apparatus according to a second embodiment of the present invention as viewed from a side.

【図5】本発明の第3の実施の形態における乾燥装置を
示す概略説明図である。
FIG. 5 is a schematic explanatory view showing a drying device according to a third embodiment of the present invention.

【図6】本発明の第3の実施の形態における乾燥装置を
側面から見た概略説明図である。
FIG. 6 is a schematic explanatory view of a drying device according to a third embodiment of the present invention as viewed from a side.

【図7】本発明の第4の実施の形態におけるTFT−L
CDを示す概略断面図である。
FIG. 7 shows a TFT-L according to a fourth embodiment of the present invention.
FIG. 3 is a schematic sectional view showing a CD.

【図8】本発明の第4の実施の形態における乾燥装置を
示す概略説明図である。
FIG. 8 is a schematic explanatory view showing a drying device according to a fourth embodiment of the present invention.

【図9】本発明の第4の実施の形態における乾燥装置を
示す概略分散説明図である。
FIG. 9 is a schematic explanatory diagram illustrating a drying apparatus according to a fourth embodiment of the present invention.

【図10】本発明の第4の実施の形態における[A]領
域の乾燥を示す概略説明図である。
FIG. 10 is a schematic explanatory view showing drying of an area [A] according to a fourth embodiment of the present invention.

【図11】本発明の第4の実施の形態における[B]領
域の乾燥を示す概略説明図である。
FIG. 11 is a schematic explanatory view showing drying of a region [B] according to a fourth embodiment of the present invention.

【図12】本発明の第4の実施の形態における配向膜の
配向状態を示す概略説明図である。
FIG. 12 is a schematic explanatory view showing an alignment state of an alignment film according to a fourth embodiment of the present invention.

【図13】本発明の第1の変形例における乾燥装置を示
す概略説明図である。
FIG. 13 is a schematic explanatory view showing a drying device according to a first modification of the present invention.

【符号の説明】[Explanation of symbols]

10…TFT−LCD 11…TFT 12…アレイ基板 13…対向基板 16…液晶組成物 17…ガラス基板 18…画素電極 20…配向膜 21…ガラス基板 22…対向電極 23…配向膜 26…乾燥装置 27…ステージ 28a…第1の加熱手段 28b…第2の加熱手段 31…乾燥装置 32…送風機 Reference Signs List 10 TFT-LCD 11 TFT 12 Array substrate 13 Counter substrate 16 Liquid crystal composition 17 Glass substrate 18 Pixel electrode 20 Alignment film 21 Glass substrate 22 Counter electrode 23 Alignment film 26 Drying device 27 ... Stage 28a ... First heating means 28b ... Second heating means 31 ... Drying device 32 ... Blower

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 絶縁性基板上に電極及び配向膜を有して
成る一対の電極基板を所定の間隙を隔てて対向し、前記
間隙に液晶組成物を封入して成る液晶表示素子の製造方
法において、前記絶縁性基板に前記電極を形成後、前記
配向膜を塗布する工程と、前記塗布された配向膜を所定
方向に温度勾配を設けて加熱する工程とを具備する事を
特徴とする液晶表示素子の製造方法。
1. A method for manufacturing a liquid crystal display device, comprising: a pair of electrode substrates each having an electrode and an alignment film on an insulating substrate facing each other with a predetermined gap therebetween, and enclosing a liquid crystal composition in the gap. A liquid crystal comprising: a step of applying the alignment film after forming the electrode on the insulating substrate; and a step of heating the applied alignment film by providing a temperature gradient in a predetermined direction. A method for manufacturing a display element.
【請求項2】 絶縁性基板上に電極及び配向膜を有して
成る一対の電極基板を所定の間隙を隔てて対向し、前記
間隙に液晶組成物を封入して成る液晶表示素子の製造方
法において、前記絶縁性基板に前記電極を形成後、前記
配向膜を塗布する工程と、前記塗布された配向膜を加熱
するとともに前記配向膜表面にて所定方向に気流を発生
する工程とを具備する事を特徴とする液晶表示素子の製
造方法。
2. A method for manufacturing a liquid crystal display device, comprising: a pair of electrode substrates each having an electrode and an alignment film on an insulating substrate facing each other with a predetermined gap therebetween, and enclosing a liquid crystal composition in the gap. And after forming the electrode on the insulating substrate, applying the alignment film, and heating the applied alignment film and generating an airflow in a predetermined direction on the alignment film surface. A method for manufacturing a liquid crystal display element, comprising:
【請求項3】 絶縁性基板上に電極及び配向膜を有して
成る一対の電極基板を所定の間隙を隔てて対向し、前記
間隙に液晶組成物を封入して成る液晶表示素子の製造方
法において、前記絶縁性基板に前記電極を形成後、前記
配向膜を塗布する工程と、前記塗布された配向膜を所定
方向に温度勾配を設けて加熱すると共に前記配向膜表面
にて前記所定方向に気流を発生する工程とを具備する事
を特徴とする液晶表示素子の製造方法。
3. A method for manufacturing a liquid crystal display device, comprising: a pair of electrode substrates each having an electrode and an alignment film on an insulating substrate facing each other with a predetermined gap therebetween, and sealing a liquid crystal composition in the gap. In the above, after forming the electrode on the insulating substrate, applying the alignment film, providing a temperature gradient in a predetermined direction and heating the applied alignment film in the predetermined direction on the alignment film surface A method for producing an air flow.
【請求項4】 絶縁性基板上に電極及び配向膜を有して
成る一対の電極基板を所定の間隙を隔てて対向し、前記
間隙に液晶組成物を封入し、マトリクス状の複数の画素
を有して成る液晶表示素子の製造方法において、前記絶
縁性基板に前記電極を形成後、前記配向膜を塗布する工
程と、前記画素電極の1画素を複数領域に分割し、分割
された分割領域毎に前記配向膜を加熱するとともに加熱
される前記分割された前記配向膜表面にて所定方向に気
流を発生する工程とを具備する事を特徴とする液晶表示
素子の製造方法。
4. A pair of electrode substrates each having an electrode and an alignment film on an insulating substrate are opposed to each other with a predetermined gap therebetween, a liquid crystal composition is sealed in the gap, and a plurality of pixels in a matrix are formed. In the method for manufacturing a liquid crystal display element having the above, after forming the electrodes on the insulating substrate, applying the alignment film, and dividing one pixel of the pixel electrode into a plurality of regions, Heating the alignment film each time, and generating an airflow in a predetermined direction on the divided surfaces of the alignment film that are heated.
【請求項5】 絶縁性基板上に電極及び配向膜を有して
成る一対の電極基板を所定の間隙を隔てて対向し、前記
間隙に液晶組成物を封入し、マトリクス状の複数の画素
を有して成る液晶表示素子の製造方法において、前記絶
縁性基板に前記電極を形成後、前記配向膜を塗布する工
程と、前記画素電極の1画素を複数領域に分割し、分割
された分割領域毎に前記配向膜を加熱するとともに加熱
される前記分割された前記配向膜表面にて所定方向に気
流を発生する工程と、加熱後前記配向膜を前記分割され
た前記配向膜毎に前記所定方向に配向処理する工程とを
具備する事を特徴とする液晶表示素子の製造方法。
5. A pair of electrode substrates each having an electrode and an alignment film on an insulating substrate are opposed to each other with a predetermined gap therebetween, a liquid crystal composition is sealed in the gap, and a plurality of pixels in a matrix are formed. In the method for manufacturing a liquid crystal display element having the above, after forming the electrode on the insulating substrate, applying the alignment film, and dividing one pixel of the pixel electrode into a plurality of regions, Generating an airflow in a predetermined direction on the surface of the divided alignment film heated while heating the alignment film every time; and heating the alignment film in the predetermined direction for each of the divided alignment films after heating. And a step of subjecting the liquid crystal display device to an alignment treatment.
JP6694898A 1998-03-17 1998-03-17 Manufacture of liquid crystal display element Pending JPH11264978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6694898A JPH11264978A (en) 1998-03-17 1998-03-17 Manufacture of liquid crystal display element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6694898A JPH11264978A (en) 1998-03-17 1998-03-17 Manufacture of liquid crystal display element

Publications (1)

Publication Number Publication Date
JPH11264978A true JPH11264978A (en) 1999-09-28

Family

ID=13330757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6694898A Pending JPH11264978A (en) 1998-03-17 1998-03-17 Manufacture of liquid crystal display element

Country Status (1)

Country Link
JP (1) JPH11264978A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020096997A (en) * 2001-06-20 2002-12-31 닛뽄덴끼 가부시끼가이샤 Method of fabricating liquid crystal display device
JP2003107480A (en) * 2001-09-28 2003-04-09 Toshiba Corp Method for manufacturing liquid crystal display device
US7754525B2 (en) 2005-11-14 2010-07-13 Konica Minolta Holdings Inc. Film formation method and manufacturing equipment for forming semiconductor layer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020096997A (en) * 2001-06-20 2002-12-31 닛뽄덴끼 가부시끼가이샤 Method of fabricating liquid crystal display device
US6947113B2 (en) 2001-06-20 2005-09-20 Nec Lcd Technologies, Ltd. Method of fabricating liquid crystal display device
JP2003107480A (en) * 2001-09-28 2003-04-09 Toshiba Corp Method for manufacturing liquid crystal display device
JP4625601B2 (en) * 2001-09-28 2011-02-02 東芝モバイルディスプレイ株式会社 Manufacturing method of liquid crystal display device
US7754525B2 (en) 2005-11-14 2010-07-13 Konica Minolta Holdings Inc. Film formation method and manufacturing equipment for forming semiconductor layer

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