JPH11264939A - Focus adjusting device for microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a focus adjusting device for a microscope by which a limit position can easily and securely be set with good reproducibility for preventing an objective from colliding against a sample at the time of focus adjustment. SOLUTION: A limit position setting mechanism 18 is provided with a detection unit 28 which detects the limit position where the objective 12 can be prevented from colliding against the sample 2 at the time of focus adjustment and a detecting circuit 30 which outputs a specific limit position signal to a control circuit 24 of a focusing mechanism 20 according to the detection signal outputted by the detection unit 28. The detection unit 28 is equipped with a 1st sensor element 32 which is fixed on a stage base 6 and a 2nd sensor element 36 which can be positioned and fixed to a microscope main body 10 through a limit position setting assembly 34.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope focusing apparatus for focusing an objective lens on a specimen.

[0002]

2. Description of the Related Art Conventionally, for example, Japanese Utility Model Application Laid-Open No. 58-98604 discloses a method of focusing by using a pair of screw members for regulating a moving range of an objective lens and a limit sensor for setting a moving limit of the objective lens. A focus adjusting device for a microscope that prevents collision between an objective lens and a specimen during adjustment is disclosed.

[0003]

However, in the conventional microscope focus adjusting device, the moving range of the objective lens is limited to the range restricted by the screw member.
For example, when the height dimension of the sample greatly changes beyond the moving range of the objective lens, it is expected that the objective lens and the sample will collide during focus adjustment.

In addition, when the height of the specimen greatly changes as described above, it is necessary to adjust the position of the screw member each time and reset the movement limit of the objective lens, which is troublesome. At the same time, the position setting of the movement limit of the objective lens may vary for each setter.

Further, in a conventional focus adjusting device for a microscope,
Since the moving range of the objective lens is set only by the pair of screw members, the moving range easily changes due to backlash of the screw members due to aging, for example.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to set a limit position for preventing a collision between an objective lens and a sample at the time of focus adjustment simply and reliably with good reproducibility. It is an object of the present invention to provide a focus adjusting device for a microscope.

[0007]

In order to achieve the above object, a microscope focus adjusting apparatus according to the present invention is provided for setting a limit position for preventing collision between a sample and an objective lens during focus adjustment. It has a limit position setting mechanism that can be attached to and detached from the microscope main body, and a focusing mechanism that can adjust the distance between the specimen and the objective lens.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A focus adjusting device for a microscope according to a first embodiment of the present invention will be described below with reference to FIGS. As shown in FIG. 1, as an example of the present embodiment, a stage up-down moving optical microscope is applied, and a stage 4 on which a specimen 2 can be set and a stage 4 A stage support 6 for supporting and moving the stage 4 up and down, and a revolver 8
Objective lens 12 supported by microscope body 10 through
And a focus adjustment device for adjusting the distance between the sample 2 and the objective lens 12 (for example, focus adjustment).

According to such an optical microscope, in a state where the objective lens 12 is focused on the sample 2 by the focus adjusting device, the image light from the sample 2 is enlarged by the objective lens 12 and then the lens barrel 14 Eyepiece 1 through
The light is guided to 6.

The focus adjusting device according to the present embodiment has a limit position setting mechanism 18 that can be attached to and detached from the microscope main body 10 for setting a limit position for preventing a collision between the specimen 2 and the objective lens 12 during focus adjustment. And a focusing mechanism 20 capable of adjusting the distance between the sample 2 set on the stage 4 and the objective lens 12 by moving the stage support 6 up and down in the direction of the arrow. .

The focusing mechanism 20 includes a drive shaft 2 that supports the stage support 6 and moves the stage support 6 up and down.
2, a motor M for driving the drive shaft 22, and a control circuit 24 for controlling the motor M are provided. The motor M is controlled based on a control signal from the control circuit 24 to control the drive shaft 22. By driving, the stage support 6 can be moved up and down in the direction of the arrow. On the other hand, the stage support 6 can be moved up and down in the direction of the arrow even when the drive shaft is directly driven by manually operating the focusing knob 1 protruding from the microscope main body 10.

The microscope focus adjusting device of the present invention comprises:
The present invention can be applied to either the electric or manual focusing mechanism 20. The control circuit 24 includes a limit position setting mechanism 1
8 and the switch 26
The vertical movement signal output from the controller is input.

In this case, when an up / down motion signal is input from the switch 26, the control circuit 24 controls the drive of the drive shaft 22 via the motor M to move the stage support 6 up and down by a predetermined amount in the direction of the arrow. Move.

On the other hand, when a limit position signal is input from the limit position setting mechanism 18, the control circuit 24 controls the drive shaft 22 to stop by the motor M, as will be described later, and moves the stage support 6 up and down. Stop motion.

As shown in FIGS. 1 and 2, the limit position setting mechanism 18 has a detection unit 28 for detecting a limit position capable of preventing a collision between the sample 2 and the objective lens 12 during focus adjustment, and a detection unit 28 for detecting the limit position. A detection circuit 30 that outputs a predetermined limit position signal to the control circuit 24 of the focusing mechanism 20 based on the detection signal output from the unit 28 is provided.

The detection unit 28 includes a first sensor element 32 fixed on the stage support 6 and a second sensor element 36 that can be positioned and fixed to the microscope main body 10 via a limit position setting assembly 34. And In addition, as a fixing method of the first sensor element 32,
The first sensor element 32 may be fixed on the stage support 6 by a screw 38 such as a knob that can be fixed or loosened by hand (see FIG. 2A), or
Alternatively, for example, the first sensor element 32 may be removably adhered to the stage support 6.

According to the detection unit 28, when the sample 2 on the stage 4 is moved closer to the objective lens 12 by moving the stage support 6, the sample 2 and the objective lens 1
When the distance between the first and second sensor elements reaches the collision limit position, the first and second sensor elements 32 and 36 overlap each other by a predetermined amount, and a detection signal is output from the second sensor element 36 in that state. It is supposed to be. Note that, for the detection unit 28, for example, various sensor elements capable of detecting an optical change, an electrical change, and a magnetic change can be applied.

Therefore, in the present embodiment, as an example, the first sensor element 32 has a substantially convex shape so that the first and second sensor elements 32 and 36 overlap each other by a predetermined amount. And the second sensor element 36
It has a substantially concave shape.

The limit position setting assembly 34 includes a sensor support 40 for supporting the second sensor element 36 so as to be position-adjustable, and a sensor fixing body for fixing the sensor support 40 to the microscope main body 10 so as to be position-adjustable. 42.

The sensor support 40 has a sensor support slot 44 having a predetermined length and a sensor support slot 44.
And a sensor supporting screw 46 such as a knob that can be fastened to the sensor fixing body 42 through the through hole and that can be fixed or loosened by hand.
After the sensor support 40 is moved by a predetermined amount in a predetermined direction along the sensor support hole 44 in a state in which the sensor support is loosened, the sensor support screw 46 is tightened, so that the sensor support is The body 40 can be positioned and fixed. As a result, the second sensor element 36 is supported by the sensor support 40 in a state where the position is adjusted with respect to the first sensor element 32.

In this case, while the sensor support 40 is being moved, the direction of movement of the sensor support 40 is regulated in a fixed direction. In order to prevent the body 40 from rattling and fluctuating in rotation, a sensor supporting guide portion 48 is formed on the sensor fixing body 42, and the sensor supporting member 40 is fixed by the sensor supporting guide portion 48. It is designed to accurately move in the direction and be surely positioned and fixed without fluctuation in rotation.

On the other hand, the sensor fixing body 42 has a sensor fixing slot 50 having a predetermined length, and can be fastened or loosened by hand to the microscope main body 10 through the sensor fixing slot 50. And a sensor fixing screw 52 such as a knob which can be moved. The sensor fixing body 42 is moved in a predetermined direction along the sensor fixing long hole 50 in a predetermined direction with the sensor fixing screw 52 loosened. Then, the sensor fixing body 42 can be positioned and fixed to the microscope main body 10 by tightening the sensor fixing screw 52. As a result, the sensor support 40 supporting the second sensor element 36 is fixed to the microscope main body 10 via the sensor fixing body 42 with its position adjusted. The microscope body 10 has a screw hole 10a corresponding to the sensor fixing screw 52.

In this case, while moving the sensor fixed body 42, the direction of movement of the sensor fixed body 42 is regulated in a fixed direction, and after the sensor fixed body 42 is positioned and fixed to the microscope main body 10, the sensor fixed body 42 is moved. In order to prevent the rotation of the sensor fixed body 42 due to backlash, a sensor fixing guide 54 is formed on the sensor fixed body 42, and the sensor fixed body 42 is moved in a certain direction by the sensor fixed guide 54. , And are accurately positioned and fixed without fluctuation in rotation.

Further, the limit position setting mechanism 18 is provided with a warning device 56 for warning a limit position at which a collision between the sample 2 and the objective lens 12 at the time of focus adjustment can be prevented.
The warning device 56 is configured to detect the sample 2 and the objective lens 1 by sound or light, for example, based on the limit position signal from the detection circuit 30.
It is configured to be able to warn that the distance between the two has reached the collision limit position.

Here, a process of setting a limit position for preventing a collision between the sample 2 and the objective lens 12 during focus adjustment will be described with reference to FIGS. First, only the sensor support 40 is moved upward so as to separate the second sensor element 36 from the first sensor element 32, and then the sensor fixing body 42 is moved to the lowermost end and fastened. In this state, the sensor fixing screw 52 is positioned at the uppermost end of the sensor fixing long hole 50 (FIG. 3).
(A)).

In this state, the objective lens 12 is focused on the sample 2 by manually operating the focusing knob 1 or controlling the drive of the drive shaft 22. In the focused state, the warning device 56 is set so that the first and second sensor elements 32 and 36 overlap each other by a predetermined amount, and the detection signal is output from the second sensor element 36 in that state. The sensor support 40 is moved up and down in the direction of the arrow while confirming the sound and light from the camera to adjust the position of the second sensor element 36 with respect to the first sensor element 32 (see FIG. 3A). In the following description,
When the position adjustment is completed, the adjustment position of the second sensor element 36 with respect to the first sensor element 32 will be referred to as a limit reference position.

After the position adjustment is completed, the sensor fixing member 42
To the top end and fasten. In this state, the sensor fixing screw 52 is positioned at the lowermost end of the sensor fixing long hole 50 (see FIG. 3B).

In this state, the distance (hereinafter, referred to as a limit length) L from the movement limit reference position of the second sensor element 36 moved to the uppermost end together with the sensor fixing body 42 is determined by the specimen 2 and the objective lens during focus adjustment. The reference length defines a limit position at which collision with the objective lens 12 can be prevented. If the reference length is within the limit length L, even if the sample 2 on the stage 4 approaches the objective lens 12, the sample 2 and the objective The collision with the lens 12 can be prevented.

That is, when the focusing knob 1 is manually operated or the drive shaft 22 is driven and controlled to bring the specimen 2 on the stage 4 closer to the objective lens 12 from the focused state. First and second sensor elements 3
When the two and 36 overlap each other by a predetermined amount, a detection signal is output from the second sensor element 36.

At this time, the detection circuit 30 outputs a predetermined limit position signal to the warning device 56 and the control circuit 24. The warning device 56 outputs the sample 2 and the objective lens by sound or light based on the limit position signal. It warns that the distance to 12 has reached the limit of collision.

Therefore, if the manual operation of the focusing knob 1 is stopped when this warning is issued, the collision between the sample 2 and the objective lens 12 can be prevented. On the other hand, when the control circuit 24 controls the drive of the drive shaft 22 via the motor M, the control circuit 24 controls the drive shaft 2 via the motor M based on the limit position signal from the detection circuit 30.
2 is controlled to stop. As a result, the specimen 2 and the objective lens 12
Can be prevented beforehand.

The limit length L is set in accordance with the distance from the lower end of the objective lens 12 to the surface of the specimen 2 in the focused state (hereinafter referred to as the working distance (WD) of the objective lens 12). (See Tables 1 and 2 below).

[0033]

[Table 1]

[0034]

[Table 2]

Therefore, the working distance of the objective lens 12 (W
By selectively using the sensor fixing slot 50 having the limit length L corresponding to D) and performing the limit position setting process as described above, the collision between the objective lens 12 and the sample 2 during focusing is performed. It is possible to easily and surely set the limit position for preventing the occurrence of reproducibility.

Further, in the present embodiment, in order to prevent the stage support 6 from rising beyond the collision limit position between the objective lens 12 and the sample 2 during focus adjustment,
It is preferable to add a stopper mechanism as shown in FIG.

More specifically, as shown in FIG. 4A, the stopper mechanism includes a stopper 58 that can be fastened to the sensor fixed body 42. The stopper 58 is formed on the sensor fixed body 42. The positioning and fixing can be performed between the pair of stopper guide portions 60.

The fixing position of the stopper 58 is shown in FIG.
In a state where the first and second sensor elements 32 and 36 are located at the collision limit positions as shown in FIG.
The fixing position of the stopper 58 is adjusted so that the lower end surface 58a of the stopper 58 is positioned within the range of the distance H between the front end surface 32a of the first sensor element 32 and the inner end surface 36a of the second sensor element 36. Adjustment is preferred.

As means for adjusting the fixing position of the stopper 58, for example, as shown in FIG. 4 (a), the stopper 58 includes a stopper fixing slot 62 having a predetermined length, and a stopper fixing slot 62. A stopper fixing screw 64 such as a knob which can be fastened to the sensor fixing body 42 via the pin 62 and can be fixed or loosened by hand is incorporated, and the stopper fixing screw 64 is loosened. After the stopper 58 is moved by a predetermined amount in a predetermined direction along the stopper fixing long hole 62, the stopper fixing screw 64 is tightened.
8 can be positioned and fixed.

In this case, the movement direction of the stopper 58 is regulated by the stopper guide portion 60, and after the stopper 58 is positioned and fixed to the sensor fixing body 42, the stopper 58 rotates with play. It is prevented from fluctuating.

According to such a stopper mechanism, for example, even if the lifting of the stage support 6 is not stopped at the collision limit position, the stopper 58 prevents the stage support 6 from moving.
Of the detection unit 28 due to the collision between the first and second sensor elements 32 and 36, and the specimen 2 and the objective lens 12 due to the collision between the specimen 2 and the objective lens 12. Can be prevented.

In the above-described embodiment, the sensor fixing slot 50 having the limit length L is selectively used, but instead of this method, for example, as shown in FIG.
As shown in (b), a plurality of panels 66a and 66b are prepared in which limit lengths L1 and L2 corresponding to various objective lenses 12 having different working distances (WD) are prepared, and these panels 66a and 66b are selectively used. May be attached to the sensor fixing body 42.

Specifically, sensor fixing slots 50a and 50b corresponding to the limit lengths L1 and L2 are formed in the panels 66a and 66b, respectively. Further, a groove (not shown) corresponding to the longest limit length is formed in the sensor fixing body 42 in advance. The sensor fixing slots 50a, 50 corresponding to the various limit lengths L1, L2.
b, the panels 66a and 66b having the “b” are selectively mounted on the grooves of the sensor fixing body 42 so that the collision limit position (limit length) corresponding to the working distance (WD) of the objective lens 12 can be set easily and in a short time. can do.

The panels 66a and 66b can be mounted directly by screwing the panels 66a and 66b directly onto the sensor fixing body 42 with the screws 67 (FIG. 5).
(See (a) and (b)) and a groove (not shown) having the same shape as the panels 66a and 66b is engraved on the surface of the sensor fixing body 42 in advance, and the panels 66a and 66 are formed in the grooves.
Any method can be applied, such as a method in which b is fitted and fastened flush.

Further, according to the above-described embodiment, even when the thickness or the height position of the sample 2 changes, the limit length corresponding to the change (the limit position at which the collision between the sample 2 and the objective lens 12 can be prevented). ) Can be set easily and reliably with good reproducibility.

For example, when a wafer having a substantially constant thickness is used as the specimen 2, as shown in FIGS. 5C and 5D, the wafer is set on the stage 4 according to the diameter of the specimen (wafer) 2. Height position T1, T2, T3, T of specimen (wafer) 2
4 may change. Specifically, the specimen (wafer)
2 are set on the wafer holders 68, 68 'for each diameter, and the height positions T1, T2, T3, T4 of the sample (wafer) 2 on the stage 4 may be different.

In this case, the working distance of the objective lens 12 (W
Since D) changes significantly, it is necessary to reset the limit length. However, if the length of the sensor support slot 44 shown in FIGS. 1 to 4 is sufficiently ensured, the limit length can be set even if the working distance (WD) of the objective lens 12 greatly changes. In some cases, the position adjustment of the first and second sensor elements 36 can be performed simply and reliably with good reproducibility.

In the above-described embodiment, the limit position setting mechanism 18 such as the detection unit 28 and the limit position setting assembly 34 can be easily mounted on the microscope body 10 having no limit position detecting device as shown in FIG. Can be incorporated or removed from For this reason, it can be easily incorporated into a revolver up / down moving optical microscope different from the type of microscope applied to the present embodiment. In this case, the first sensor element 32 may be attached to the revolver moving member, and the limit position setting assembly 34 that supports the second sensor element 36 may be attached to the microscope main body.

Next, a microscope focus adjusting device according to a second embodiment of the present invention will be described with reference to FIG. In this embodiment, an optical microscope of a stage vertical movement type having an electric revolver 8 ′ is applied, and the type of the objective lens 12 attached to the electric revolver 8 ′, that is, the focus is adjusted. Limit positions at which the limit lengths L1, L2, L3 can be automatically set in accordance with the distance from the lower end of the objective lens 12 to the surface of the specimen 2 (the working distance (WD) of the objective lens 12) A setting assembly 34 'is provided.

The limit position setting assembly 34 'applied to the present embodiment includes a drive shaft 70 for supporting the sensor fixed body 42 and moving the sensor fixed body 42 up and down in the direction of the arrow.
A motor M1 for driving the drive shaft 70; a controller 72 for controlling the motor M1; and various limit lengths L1 and L corresponding to the working distance (WD) of the objective lens 12.
2, a memory 74 storing L3 and a determination unit 76 for determining the type of the objective lens 12 are provided.

The memory 74 stores in advance the limit lengths L1, L
2, L3 can be stored, or limit lengths L1, L2, L3 can be variously selected or collectively stored by key input.

The discrimination unit 76 is capable of optically, electrically and magnetically discriminating the type of the objective lens 12 attached to the electric revolver 8 ', and controls a discrimination signal corresponding to the discrimination result. Output to the unit 72.

The control unit 72 controls the limit length L stored in the memory 74 based on the discrimination signal from the discrimination unit 76.
1, L2, L3 and the motor M1 so as to move the sensor fixed body 42 by the specified limit length.
The drive of the drive shaft 70 is controlled via the.

The limit position setting assembly 34 ′ applied to the present embodiment includes a support frame 7 for supporting the drive shaft 70.
8, it can be easily attached to and detached from the microscope main body 10.
For example, all kinds of methods such as detachable screwing and detachable adhesive fixing can be applied.

The other configuration is the same as that of the first embodiment (see FIG. 1), and the description is omitted.
Next, a process of setting a limit position for preventing a collision between the sample 2 and the objective lens 12 during focus adjustment will be described.
This will be described with reference to FIGS.

First, when the type of the objective lens 12 is determined by the determination unit 76 in a state where the objective lens 12 attached to the electric revolver 8 'is positioned on the observation optical axis, the control section 72 determines Unit 76
The limit lengths L1, L2, L3 stored in the memory 74 are specified based on the discrimination signal from.

Simultaneously with or after this, only the sensor support 40 is moved upward and fastened so as to separate the second sensor element 36 from the first sensor element 32. Subsequently, the control unit 72 controls the drive of the drive shaft 70 via the motor M1 to move the sensor fixed body 42 to the lowermost end.

In this state, the objective lens 12 is focused on the sample 2 by manually operating the focusing knob 1 or by driving and controlling the drive shaft 22 of the focusing mechanism 20.

In the focused state, the first and second sensor elements 32 and 36 are overlapped by a predetermined amount, and the detection signal is output from the second sensor element 36 in that state. The sensor support 40 is moved up and down in the direction of the arrow while confirming the sound and light from the alarm 56, and the second sensor element 3 with respect to the first sensor element 32 is moved.
6 is adjusted.

In the following description, when the position adjustment is completed, the adjusted position of the second sensor element 36 with respect to the first sensor element 32 will be referred to as a limit reference position. In FIG. 6, the second reference position
Is temporarily indicated by reference numeral 36a.

After the position adjustment is completed, the control section 72 controls the drive of the drive shaft 70 via the motor M1 to move the sensor fixed body 42 upward by a distance corresponding to the already specified limit length.

Here, as an example, it is assumed that the limit length L2 stored in the memory 74 has been specified based on the discrimination signal from the discrimination unit 76, and the sensor is moved by a distance corresponding to the specified limit length L2. Fixed body 42
Is moved upward.

In this state, the distance (limit length) L2 from the movement limit reference position of the second sensor element 36 that has moved upward together with the sensor fixed body 42 depends on the collision between the sample 2 and the objective lens 12 during focus adjustment. Is a reference length that defines a limit position at which the objective lens 1 can be positioned within the limit length L2.
Even when approaching in two directions, it is possible to prevent collision between the sample 2 and the objective lens 12.

That is, when the focusing knob 1 is manually operated or the drive shaft 22 is driven and controlled to bring the specimen 2 on the stage 4 closer to the objective lens 12 from the focused state. First and second sensor elements 3
When the two and 36 overlap each other by a predetermined amount, a detection signal is output from the second sensor element 36.

At this time, the detection circuit 30 outputs a predetermined limit position signal to the warning device 56 and the control circuit 24, and the warning device 56 outputs the sample 2 and the objective lens by sound or light based on the limit position signal. It warns that the distance to 12 has reached the limit of collision.

Therefore, if the manual operation of the focusing knob 1 is stopped when this warning is issued, the collision between the sample 2 and the objective lens 12 can be prevented. On the other hand, when the control circuit 24 controls the drive of the drive shaft 22 via the motor M, the control circuit 24 controls the drive shaft 2 via the motor M based on the limit position signal from the detection circuit 30.
2 is controlled to stop. As a result, the specimen 2 and the objective lens 12
Can be prevented beforehand.

As described above, according to the present embodiment, in addition to the same functions and effects as those of the first embodiment, the objective lens 12
Since the limit lengths L1, L2, and L3 can be automatically set for each of the working distances (WD), it is possible to realize more efficient work for setting the limit position.

In this embodiment, as in the first embodiment, if a stopper mechanism (see FIG. 4) is arranged, the collision limit position between the objective lens 12 and the specimen 2 during focus adjustment can be reduced. It is possible to prevent the stage support 6 from moving upward.

Further, the present invention includes the following inventions. (1) A limit position setting mechanism detachable from the microscope body for setting a limit position for preventing collision between the sample and the objective lens during focus adjustment, and adjusting a distance between the sample and the objective lens. And a focusing mechanism capable of performing the focusing. (2) The focusing mechanism is electrically driven, and the limit position setting mechanism includes a detection unit that detects a limit position capable of preventing a collision between the sample and the objective lens during focus adjustment;
Based on the detection signal output from this detection unit,
And a detection circuit for outputting a predetermined limit position signal to the focusing mechanism. (3) a first sensor element that can be attached to either the specimen side or the objective lens side;
The focus adjusting device for a microscope according to (2), further including a second sensor element that can be attached to either the specimen side or the objective lens side. (4) The limit position setting mechanism includes: a movement limit detection unit configured to detect a movement limit position of the focusing unit in a direction in which a distance between the sample and the objective lens is reduced; and a movement detected by the movement limit detection unit. A limit position setting means for setting the limit position to be adjustable; a limit detection display means for displaying a detection result of the movement limit detection means; and a movement limit position set by the limit position setting means, the distance between the sample and the objective lens. And a limit position relocating means for relocating by a predetermined distance in a direction in which the distance becomes shorter. (5) The limit position transfer means is a member for fixedly holding the movement limit detection means or the limit position setting means, and the movement limit detection means or the limit position setting means at two positions different by the transfer distance of the movement limit position. (4) The focus adjusting device for a microscope according to the above (4), wherein

[0070]

According to the present invention, there is provided a microscope focus adjusting apparatus which can easily and surely set a limit position for preventing collision between an objective lens and a specimen during focus adjustment with good reproducibility. Can be.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an optical microscope in which a microscope focus adjusting device according to a first embodiment of the present invention is incorporated.

FIG. 2A is a top view showing a main configuration of a limit position setting mechanism, and FIG. 2B is a side view of FIG.

FIGS. 3A and 3B are diagrams for explaining a process of setting a limit position for preventing collision between a sample and an objective lens during focus adjustment.

FIG. 4A is a diagram illustrating a configuration of a stopper mechanism for preventing the stage support from rising beyond a collision limit position, and FIG. 4B is a diagram illustrating a stopper for first and second sensor elements; The figure which shows the arrangement state of a mechanism.

FIGS. 5A and 5B are plan views showing the configuration of a panel in which limit lengths corresponding to various objective lenses having different working distances (WD) are defined, respectively, and FIGS. 5C and 5D. FIG. 4 is a diagram showing an example in which the sample height position has changed.

FIG. 6 is a diagram showing a configuration of an optical microscope incorporating a microscope focus adjustment device according to a second embodiment of the present invention.

[Explanation of symbols]

 2 Specimen 6 Stage Support 10 Microscope Main Body 12 Objective Lens 18 Limit Position Setting Mechanism 20 Focusing Mechanism 24 Control Circuit 28 Detection Unit 30 Detection Circuit 32 First Sensor Element 34 Limit Position Setting Assembly 36 Second Sensor Element

Claims (3)

[Claims] 1. A limit position setting mechanism detachable from a microscope main body for setting a limit position for preventing a collision between a sample and an objective lens during focus adjustment, and a distance between the sample and the objective lens. A focusing device for a microscope, comprising: a focusing mechanism that can be adjusted. 2. The focusing mechanism is electrically driven, and the limit position setting mechanism includes a detection unit for detecting a limit position at which a collision between a sample and an objective lens at the time of focus adjustment can be prevented; The focus adjustment device for a microscope according to claim 1, further comprising a detection circuit that outputs a predetermined limit position signal to the focusing mechanism based on the detection signal output from the focusing device. 3. The detection unit includes a first sensor element that can be attached to one of a specimen side and an objective lens side, and a second sensor element that can be attached to either the specimen side or the objective lens side. The focus adjusting device for a microscope according to claim 2, comprising: