JPH1126239A - Thin-type power supply magnetic device - Google Patents
Thin-type power supply magnetic deviceInfo
- Publication number
- JPH1126239A JPH1126239A JP17715997A JP17715997A JPH1126239A JP H1126239 A JPH1126239 A JP H1126239A JP 17715997 A JP17715997 A JP 17715997A JP 17715997 A JP17715997 A JP 17715997A JP H1126239 A JPH1126239 A JP H1126239A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic layer
- magnetic
- mol
- power supply
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/34—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
- H01F1/342—Oxides
- H01F1/344—Ferrites, e.g. having a cubic spinel structure (X2+O)(Y23+O3), e.g. magnetite Fe3O4
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/16—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates the magnetic material being applied in the form of particles, e.g. by serigraphy, to form thick magnetic films or precursors therefor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、薄型電源に搭載さ
れるインダクター又はトランスを形成する薄型電源用磁
気素子に関し、その磁性ペーストに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin power supply magnetic element forming an inductor or a transformer mounted on a thin power supply, and more particularly to a magnetic paste for the magnetic element.
【０００２】[0002]
【従来の技術】電池で駆動される小型携帯機器は、従来
から小型軽量の要求が強かったが、最近は、特に、マル
チメディア化に対応するため、通信機能や表示機能の充
実、あるいは画像を含む大量情報の高速処理等が求めら
れている。それに伴い、電池からの単一電圧を様々な搭
載デバイス例えばＣＰＵ、ＬＣＤ、モジュール、通信用
パワーアンプ等に必要な複数の電圧レベルまで変換する
電源の需要が増大してきた。携帯機器の小型軽量化と高
機能化を両立させるためには、この小型・高効率化が重
要な課題となっている。2. Description of the Related Art There has been a strong demand for small and lightweight portable devices driven by batteries. However, recently, in order to cope with multimedia, communication and display functions have been enhanced, or images have been reduced. There is a demand for high-speed processing of large amounts of information including such information. Accordingly, there has been an increasing demand for a power supply that converts a single voltage from a battery to a plurality of voltage levels required for various mounted devices such as a CPU, an LCD, a module, a communication power amplifier, and the like. In order to achieve both small size and light weight and high functionality of a portable device, miniaturization and high efficiency are important issues.
【０００３】このような状況の下で、入力直流電圧を半
導体スイッチによって断続的に制御し、安定した所望の
電圧を出力するＤＣ／ＤＣコンバータが数多く使用され
ている。このような磁性層は、従来、６〜７μｍの金属
膜をスパッタ法でＳｉ基板上に成膜していた。このた
め、真空装置を備えたスパッタ装置等を必要とし、大き
さに制約があり、また材料費が高く、時間がかかる等コ
ストが高く、また、膜厚が厚いためＳｉ基板が反るとい
う問題が発生して、実用化を妨げていた。[0003] Under such circumstances, many DC / DC converters that intermittently control an input DC voltage by a semiconductor switch and output a stable desired voltage have been used. Conventionally, such a magnetic layer has been formed by forming a metal film of 6 to 7 μm on a Si substrate by a sputtering method. For this reason, a sputter device or the like equipped with a vacuum device is required, the size is limited, and the cost is high, such as high material cost and time, and the Si substrate is warped due to the large film thickness. Occurred, which hindered practical application.
【０００４】現在使用されているコンバータでは数百ｋ
Ｈｚ程度のものが普通に見られるようになっている。し
かし、さらに小型、薄型化を図るには周波数をさらに高
くすることに加えて、電源用電気部品の構造を、薄型化
する必要がある。この薄型化は本来困難性が大であった
が、この要請に対して、磁性薄膜と平面コイルを組み合
わせた平面積層構造による薄型電源用磁気素子が開発さ
れている。例えば、日本応用磁気学会誌ｖｏｌ．２０，
Ｎｏ．５、１９９６；ｐ９２２〜ｐ９２４にも記載され
ている。この技術の製造工程は基本的には半導体リソグ
ラフィー技術を転用したものであり、Ｓｉ基板上に一度
に数百個形成できる。[0004] Currently used converters are several hundred k
A frequency of about Hz is commonly seen. However, in order to further reduce the size and thickness, it is necessary to reduce the thickness of the structure of the power supply electric component in addition to increasing the frequency. This thinning was originally difficult, but in response to this demand, a thin magnetic element for a power supply having a flat laminated structure combining a magnetic thin film and a flat coil has been developed. For example, the Journal of the Japan Society of Applied Magnetics, vol. 20,
No. 5, 1996; p922 to p924. The manufacturing process of this technique is basically a diversion of the semiconductor lithography technique, and several hundred pieces can be formed on a Si substrate at a time.
【０００５】[0005]
【発明が解決しようとする課題】従来、磁性層として６
〜７μｍの金属膜をスパッタ法でＳｉ基板上に成膜する
技術では、コストがかかり、Ｓｉ基板が反るといった問
題がある。また半導体リソグラフィー技術では、精密な
成膜やパターン形成が可能であるが工程が複雑であり、
またフォトレジストによって、必ずしも適切な品質の磁
性層を得ることができるとは限らない。Conventionally, as a magnetic layer, 6
The technique of forming a metal film having a thickness of about 7 μm on a Si substrate by sputtering has a problem that the cost is high and the Si substrate is warped. In addition, in semiconductor lithography technology, precise film formation and pattern formation are possible, but the process is complicated,
In addition, it is not always possible to obtain a magnetic layer of appropriate quality by using a photoresist.
【０００６】本発明はこのような従来の欠点を改善し、
適切な磁性ペーストを用いる技術によって安価で高品質
の薄型電源用磁気素子を提供することを目的とする。[0006] The present invention ameliorates these conventional disadvantages,
It is an object of the present invention to provide a low-cost and high-quality thin magnetic element for a power supply by a technique using an appropriate magnetic paste.
【０００７】[0007]
【課題を解決するための手段】本発明は、上記課題を解
決するためになされたもので、その技術手段は、Ｓｉ基
板上に磁性層とコイル層を形成したインダクタ又はトラ
ンスにおいて、磁性層の熱膨張率が６．０〜１０．０ｐ
ｐｍ／Ｋでかつ比抵抗が１０4 Ωｃｍ以上であることを
特徴とする薄型電源用磁気素子を提供するものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and its technical means is to provide an inductor or a transformer having a magnetic layer and a coil layer formed on a Si substrate. Thermal expansion coefficient is 6.0 to 10.0p
An object of the present invention is to provide a thin magnetic element for a power supply, which has a pm / K and a specific resistance of 10 4 Ωcm or more.
【０００８】磁性層の熱膨張率を６．０〜１０．０ｐｐ
ｍ／Ｋに限定した理由は次のとおりである。この範囲を
越えると基板との熱膨張率の差が大きくなることで、反
り量が増えるため、磁性層の熱膨張率は６．０〜１０．
０ｐｐｍ／Ｋに限定した。また、磁性層の比抵抗が１０
4 Ωｃｍ未満では磁性層と導体コイル層との間に電気的
絶縁層を必要とし、素子の構造が複雑になるので、１０
4 Ωｃｍ以上とした。The coefficient of thermal expansion of the magnetic layer is 6.0 to 10.0 pp
The reason for limiting to m / K is as follows. Beyond this range, the difference in the coefficient of thermal expansion between the substrate and the substrate increases, and the amount of warpage increases. Therefore, the coefficient of thermal expansion of the magnetic layer ranges from 6.0 to 10.
It was limited to 0 ppm / K. The specific resistance of the magnetic layer is 10
If it is less than 4 Ωcm, an electric insulating layer is required between the magnetic layer and the conductor coil layer, and the structure of the element becomes complicated.
4 Ωcm or more.
【０００９】この薄型電源用磁気素子は前記磁性層が印
刷法もしくはグリーンシート法で積層した後、焼結して
形成することができ、このようにして成形された薄型電
源用磁気素子は基板の反りもなく、金属膜の場合に比べ
て特性的、コスト的にも好適である。また、磁性層の組
成がＣｕＯ：５〜２０ｍｏｌ％、ＺｎＯ：５〜４０ｍｏ
ｌ％、Ｆｅ2 Ｏ3 ：４０〜５０ｍｏｌ％、残りＮｉＯか
らなり、１０ＭＨｚまでの透磁率の低下が３０％以下で
あるスピネル型フェライトから構成されていると好まし
い。The thin magnetic element for power supply can be formed by sintering the magnetic layers after laminating them by a printing method or a green sheet method. There is no warpage, and it is preferable in terms of characteristics and cost as compared with the case of a metal film. The composition of the magnetic layer is CuO: 5 to 20 mol%, ZnO: 5 to 40 mol.
l%, Fe 2 O 3: 40~50mol%, made from the rest NiO, the decrease in permeability of up to 10MHz is composed of spinel ferrite is 30% or less preferred.
【００１０】磁性層の組成を上記のように限定した理由
及びさらに好ましい値について説明すると次のとおりで
ある。 ＣｕＯ：５〜２０ｍｏｌ％ ＣｕＯは焼成温度を下げるために加える。このときＣｕ
Ｏが５ｍｏｌ％未満だとその効果が小さく、２０ｍｏｌ
％を越えると焼成温度は下がるものの磁気特性が急速に
劣化するため、ＣｕＯの組成範囲は５〜２０ｍｏｌ％と
した。The reasons for limiting the composition of the magnetic layer as described above and more preferable values will be described below. CuO: 5 to 20 mol% CuO is added to lower the firing temperature. At this time, Cu
If O is less than 5 mol%, the effect is small, and 20 mol
%, The baking temperature is lowered, but the magnetic properties are rapidly deteriorated. Therefore, the composition range of CuO is set to 5 to 20 mol%.
【００１１】ＺｎＯ：５〜４０ｍｏｌ％ ＺｎＯは透磁率とキュリー温度に大きな影響を与える。
５ｍｏｌ％未満ではキュリー温度は高いものの透磁率が
低下する。一方、４０ｍｏｌ％を越えると透磁率は高い
ものの、キュリー温度が低下する。従って、ＺｎＯは５
〜４０ｍｏｌ％に限定した。ZnO: 5 to 40 mol% ZnO has a great effect on magnetic permeability and Curie temperature.
If it is less than 5 mol%, the Curie temperature is high, but the magnetic permeability decreases. On the other hand, when it exceeds 40 mol%, the Curie temperature is lowered although the magnetic permeability is high. Therefore, ZnO is 5
It was limited to ｍｏｌ40 mol%.
【００１２】Ｆｅ2 Ｏ3 ：４０〜５０ｍｏｌ％ ＦｅＯ3 が５０ｍｏｌ％を越えると比抵抗が低下する。
４０ｍｏｌ％未満になると磁気特性の劣化が大きいた
め、４０〜５０ｍｏｌ％とした。さらに、１５ＭＨｚま
での透磁率の低下が３０％以下であるスピネル型フェラ
イトから構成されていると好ましい。透磁率の低下が３
０％を越えると出力変動が大きくなり不可である。Fe 2 O 3 : 40 to 50 mol% When FeO 3 exceeds 50 mol%, the specific resistance decreases.
If the content is less than 40 mol%, the magnetic properties are greatly deteriorated. Further, it is preferable that the ferrite is made of a spinel type ferrite having a decrease in magnetic permeability up to 15 MHz of 30% or less. 3 decrease in permeability
If it exceeds 0%, the output fluctuation becomes too large to be possible.
【００１３】[0013]
【発明の実施の形態】本発明では磁性層としてフェライ
トペーストの印刷法もしくはグリーンシート法を用いた
ため、安価にかつ、Ｓｉ基板の反りのない良好な素子と
なる。さらに磁性体が絶縁性材料であるため、従来技術
のような絶縁膜が不要となり構造が簡単になる。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, since a ferrite paste printing method or a green sheet method is used for a magnetic layer, a good device can be obtained at low cost and without warpage of a Si substrate. Further, since the magnetic material is an insulating material, an insulating film as in the prior art is not required, and the structure is simplified.
【００１４】上記特性を有する磁性層は次のようにして
製造することができる。所定の組成に調整されたフェラ
イト粉とバインダーを混ぜてペーストにした後、基板上
に印刷する。これを９００℃で焼成した後、磁性層表面
にコイルパターンをスパッタ法等で形成し、その上にフ
ェライトペーストを印刷して上部コアを形成し、焼成し
て素子とする。The magnetic layer having the above characteristics can be manufactured as follows. After a ferrite powder and a binder adjusted to a predetermined composition are mixed to form a paste, the paste is printed on a substrate. After firing at 900 ° C., a coil pattern is formed on the surface of the magnetic layer by a sputtering method or the like, and a ferrite paste is printed thereon to form an upper core, which is fired to obtain an element.
【００１５】次に、本発明を実施例によりさらに詳細に
説明する。 （実施例−１）各種熱膨張率の磁性層を形成したときの
Ｓｉ基板の反りを表１に示す。Ｓｉ基板の厚みは０．６
ｍｍである。このとき、反り量は熱膨張量率１１．５ｐ
ｐｍ／Ｋの金属膜を７μｍ形成したときの値を１とした
ときの相対値で示してある。フェライトの場合は、磁束
量を補正するため３０μｍとしてある。フェライト層の
製造方法は以下の通りである。ＮｉＯ：１６ｍｏｌ％、
ＣｕＯ：１２ｍｏｌ％、ＺｎＯ：２３ｍｏｌ％残りＦｅ
2 Ｏ3 の組成になるように調整されたフェライト粉を湿
式法（共沈法）で作製した後、バインダーとしてエチル
セルロース、溶剤としてブチルカルビトールやテルビオ
ネールおよびフェライト粉から構成されるペーストとし
た後、焼成後の膜厚が３０μｍとなるように調整された
膜厚にスクリーン印刷法によって成膜された。その後、
大気中９００℃で焼成して反り量の測定の試料とした。Next, the present invention will be described in more detail with reference to examples. (Example-1) Table 1 shows the warpage of the Si substrate when magnetic layers having various coefficients of thermal expansion were formed. The thickness of the Si substrate is 0.6
mm. At this time, the amount of warpage is 11.5 p.
The values are shown as relative values when the value when a 7 μm-thick pm / K metal film is formed is 1. In the case of ferrite, the thickness is 30 μm to correct the amount of magnetic flux. The method for producing the ferrite layer is as follows. NiO: 16 mol%,
CuO: 12 mol%, ZnO: 23 mol% remaining Fe
After preparing a ferrite powder adjusted to have a composition of 2 O 3 by a wet method (coprecipitation method), a paste composed of ethyl cellulose as a binder, butyl carbitol, terbionel, and ferrite powder as a solvent was formed. The film was formed by a screen printing method so as to have a thickness adjusted to be 30 μm after firing. afterwards,
The sample was calcined at 900 ° C. in the atmosphere to measure the amount of warpage.
【００１６】[0016]
【表１】 [Table 1]
【００１７】本発明の範囲内では従来法（比較例３）に
比べて反り量を大幅に抑えられるが、本発明の範囲から
外れるとその効果が小さいか、又は、より反りの大きな
状態になる。 （実施例−２）表１に示す組成のフェライト粉ペースト
を実施例１と同じ方法で作製した後、ドクターブレード
法で焼成後の厚みが３０μｍになるようにグリーンシー
ト化してＳｉ基板上に熱間圧着した後、大気中で焼成し
た。１５ＭＨｚでの相対透磁率はμ’（１５ＭＨｚ）／
μ’（０．１ＭＨｚ）で表わした。焼成温度は焼結密度
が９０％となったときの温度である。Although the amount of warpage can be greatly reduced within the range of the present invention as compared with the conventional method (Comparative Example 3), the effect is small or the state of warpage is larger when the amount is out of the range of the present invention. . (Example-2) A ferrite powder paste having the composition shown in Table 1 was prepared in the same manner as in Example 1, and then formed into a green sheet so as to have a thickness of 30 µm after firing by a doctor blade method. After the compression bonding, it was fired in the air. The relative magnetic permeability at 15 MHz is μ ′ (15 MHz) /
It was represented by μ '(0.1 MHz). The firing temperature is a temperature at which the sintered density reaches 90%.
【００１８】[0018]
【表２】 [Table 2]
【００１９】表２に示したように、本発明からなる組成
のフェライトを用いれば、１５ＭＨｚでの透磁率の低下
が少なくかつ導体と同時に焼成できる温度で磁性層を焼
成できる。As shown in Table 2, when the ferrite having the composition according to the present invention is used, the magnetic layer can be fired at a temperature at which the decrease in magnetic permeability at 15 MHz is small and can be fired simultaneously with the conductor.
【００２０】[0020]
【発明の効果】本発明によれば、スパッタ法や半導体リ
ソグラフィー技術による従来品よりも安価な原料を用
い、簡易な方法により、かつ素子の構造が簡単なためコ
ストダウンが可能で、かつＳｉ基板が反らない良好な薄
型電源用磁気素子が得られる。According to the present invention, it is possible to reduce the cost by using a cheaper raw material than conventional products by a sputtering method or a semiconductor lithography technique, and to simplify the element structure, thereby reducing the cost. And a good thin magnetic element for power supply without warping can be obtained.
Claims (3)
たインダクタ又はトランスにおいて、前記磁性層の熱膨
張率が６．０〜１０．０ｐｐｍ／Ｋでかつ比抵抗が１０
4 Ωｃｍ以上であることを特徴とする薄型電源用磁気素
子。1. An inductor or a transformer having a magnetic layer and a coil layer formed on a Si substrate, wherein the magnetic layer has a coefficient of thermal expansion of 6.0 to 10.0 ppm / K and a specific resistance of 10 ppm.
A thin magnetic element for power supply characterized by having a resistance of 4 Ωcm or more.
ート法で積層した後、焼結形成された磁性層であること
を特徴とする請求項１記載の薄型電源用磁気素子。2. The thin magnetic element for a power supply according to claim 1, wherein the magnetic layer is a magnetic layer formed by sintering after being laminated by a printing method or a green sheet method.
ｏｌ％、ＺｎＯ：５〜４０ｍｏｌ％、Ｆｅ2 Ｏ3 ：４０
〜５０ｍｏｌ％、残りＮｉＯからなり１５ＭＨｚまでの
透磁率の低下が３０％以下であるスピネル型フェライト
からなることを特徴とする請求項１又は２記載の薄型電
源用磁気素子。3. The composition of the magnetic layer is CuO: 5 to 20 m.
ol%, ZnO: 5 to 40 mol%, Fe 2 O 3 : 40
The thin-film magnetic element for a power supply according to claim 1 or 2, wherein the magnetic element is made of spinel-type ferrite having a magnetic permeability of up to 50 mol% and the remaining NiO and a decrease in magnetic permeability up to 15 MHz of 30% or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17715997A JP3602298B2 (en) | 1997-07-02 | 1997-07-02 | Magnetic element for thin power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17715997A JP3602298B2 (en) | 1997-07-02 | 1997-07-02 | Magnetic element for thin power supply |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1126239A true JPH1126239A (en) | 1999-01-29 |
| JP3602298B2 JP3602298B2 (en) | 2004-12-15 |
Family
ID=16026220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17715997A Expired - Lifetime JP3602298B2 (en) | 1997-07-02 | 1997-07-02 | Magnetic element for thin power supply |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3602298B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1050889A2 (en) * | 1999-04-19 | 2000-11-08 | Kawatetsu Mining Co., LTD. | Magnetic ferrite film and preparation method |
| JP2001284123A (en) * | 2000-01-24 | 2001-10-12 | Fuji Electric Co Ltd | Magnetic thin film, magnetic component provided with the same, their manufacturing method, and electric power converter |
| FR2809233A1 (en) * | 2000-05-12 | 2001-11-23 | Murata Manufacturing Co | LAMINATE ELECTRONIC COMPONENT |
| JP2002217033A (en) * | 2001-01-19 | 2002-08-02 | Kawasaki Steel Corp | Plane magnetic element |
| JP2002299121A (en) * | 2001-04-02 | 2002-10-11 | Kawasaki Steel Corp | Planar magnetic element |
| JP2002353030A (en) * | 2001-05-25 | 2002-12-06 | Kawasaki Steel Corp | Surface-mounting type planar magnetic element, and integrated-circuit component |
| US6831543B2 (en) | 2000-02-28 | 2004-12-14 | Kawatetsu Mining Co., Ltd. | Surface mounting type planar magnetic device and production method thereof |
| JP2008041833A (en) * | 2006-08-03 | 2008-02-21 | Sony Corp | Planar-inductor manufacturing method, and planar-inductor inspection method |
-
1997
- 1997-07-02 JP JP17715997A patent/JP3602298B2/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1050889A2 (en) * | 1999-04-19 | 2000-11-08 | Kawatetsu Mining Co., LTD. | Magnetic ferrite film and preparation method |
| EP1050889A3 (en) * | 1999-04-19 | 2001-03-21 | Kawatetsu Mining Co., LTD. | Magnetic ferrite film and preparation method |
| US6383626B1 (en) | 1999-04-19 | 2002-05-07 | Kawatetsu Mining Co., Ltd. | Magnetic ferrite film for magnetic devices |
| KR100589826B1 (en) * | 1999-04-19 | 2006-06-14 | 제이에프이 미네랄 가부시키가이샤 | Magnetic ferrite film for magnetic devices, and magnetic device and electric appliance comprising the same |
| JP2001284123A (en) * | 2000-01-24 | 2001-10-12 | Fuji Electric Co Ltd | Magnetic thin film, magnetic component provided with the same, their manufacturing method, and electric power converter |
| US6831543B2 (en) | 2000-02-28 | 2004-12-14 | Kawatetsu Mining Co., Ltd. | Surface mounting type planar magnetic device and production method thereof |
| US6903645B2 (en) | 2000-02-28 | 2005-06-07 | Kawatetsu Mining Co., Ltd. | Surface mounting type planar magnetic device and production method thereof |
| FR2809233A1 (en) * | 2000-05-12 | 2001-11-23 | Murata Manufacturing Co | LAMINATE ELECTRONIC COMPONENT |
| JP2002217033A (en) * | 2001-01-19 | 2002-08-02 | Kawasaki Steel Corp | Plane magnetic element |
| JP2002299121A (en) * | 2001-04-02 | 2002-10-11 | Kawasaki Steel Corp | Planar magnetic element |
| JP2002353030A (en) * | 2001-05-25 | 2002-12-06 | Kawasaki Steel Corp | Surface-mounting type planar magnetic element, and integrated-circuit component |
| JP2008041833A (en) * | 2006-08-03 | 2008-02-21 | Sony Corp | Planar-inductor manufacturing method, and planar-inductor inspection method |
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| Publication number | Publication date |
|---|---|
| JP3602298B2 (en) | 2004-12-15 |
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