JPH11262174A - Power control method and apparatus thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the capacity and size of electric power supply equipment, by ON/OFF controlling a plurality of electric power service systems with time sharing. SOLUTION: Before temperature control, AC 100 V is continuously applied to respective tape heaters 14A, 14B, 14C separately wound around a processing gas supply pipe 6. The respective required times for heating a substance by respective heaters from normal temperature to a target temperature 100 deg.C are predetermined. When the required time of the tape heater 14A is taken as T, for example, which conducts the most rapid temperature rise, and the required times of the tape heaters 14B, 14C are taken as 2T, 3T, it is assumed that it takes two times and three times as many as that of the 14A. The data of the respective required times are incorporated into an ON/OFF control part 32 as a program so as to ON/OFF control electric power service systems based on the data. It is thus possible to supply electric power to two or more electric power service systems with time sharing so as not to become an ON condition, thus it is possible to reduce the capacity and size of electric power supply equipment.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power control method and a power control apparatus, and more particularly, to a power control method and a power control apparatus for reducing equipment capacity by time division control.

[0002]

2. Description of the Related Art In general, in a semiconductor manufacturing apparatus for performing a heat treatment such as film formation on the surface of a semiconductor wafer, the wafer itself is heated, the processing vessel itself is heated, or a processing gas which is easily liquefied or solidified. In order to heat the gas supply pipe in order to maintain the vaporized state, or to heat the gas exhaust pipe etc. in order to maintain the vaporized state of the reaction by-products which are easily solidified contained in the exhaust gas, Are provided. For example, taking a processing gas supply pipe for introducing a processing gas into a processing container of a semiconductor manufacturing apparatus as an example, when a processing gas that is easily liquefied is supplied, the processing gas supply pipe is generally connected to an apparatus. Depending on the scale, there is a length of several meters to several tens of meters from the gas source to the processing container, and a plurality of divided tape heaters are wound as heating heaters, and each tape heater is independent The temperature is controlled to maintain a desired target temperature. The target temperature may be the same or different depending on the part, and the power capacities of the tape heaters may be the same or different.

[0003] In general, power from one power source is guided to each tape heater which uses the same power system through a transformer, a breaker, a fuse, and the like, and the power is supplied to each of the tape heaters. It is distributed to the tape heater and supplied by on / off control.

[0004]

By the way, when the temperature of each part of the processing gas supply pipe around which each tape heater is wound has almost reached the target value, control is performed to maintain the target temperature value. For this reason, the power consumption of each tape heater is considerably small due to the short on-time.However, for example, when the apparatus itself is started up or when it is restarted from a long-time sleep state, the processing gas supply Since the temperature of the entire apparatus including the tubes is at room temperature (room temperature), power is supplied to each tape heater at full power at the time of startup, and this state is continued until the temperature approaches the target temperature. Will be.

Further, even when the temperature is stable near the target temperature, depending on the timing, the tape heaters may be temporarily turned on to supply power in a full power state. For this reason, the above-mentioned transformer or breaker must use a large-capacity device capable of withstanding the large amount of electric power at the time of full power, and accordingly, the device itself becomes large and the occupied area increases. There was a problem that the equipment cost also rose. In particular, in a clean room where the cost per unit area is expensive, how to reduce the occupied area is a major issue. What is desired is the current situation.

[0006] The present invention focuses on the above problems,
It was created to solve this effectively. An object of the present invention is to provide a power control method and a power control method capable of suppressing power consumption at full power by controlling power supply in a time-division manner and achieving a corresponding reduction in equipment capacity. Is to do.

[0007]

According to a first aspect of the present invention, there is provided a method for supplying electric power supplied from one power supply to a plurality of power use systems for heating. In the power control method, the plurality of power use systems are controlled to be turned on / off in a time sharing manner.

Thus, even when the electric power is used at full power, the time until the target temperature is reached is slightly increased because the time division control is performed, but all the power using systems are simultaneously turned on. And the capacity of the power supply equipment can be reduced accordingly. In this case, the on / off control is performed based on a required time required to raise the temperature from a normal temperature to a target temperature value when power is continuously supplied to the plurality of power use systems. Including a step of controlling the length.

Thus, the on-time for supplying power is set according to the length of time required for each power use system, and the temperature of each power use system is reduced to the target temperature when approximately the same time has elapsed since the power was turned on. Is set to reach the value,
The useless idling time of the apparatus can be reduced while suppressing the capacity of the power supply equipment to the maximum. Further, a plurality of power use systems may be divided into a plurality of groups, and the above-described on / off control may be independently performed for each group. In this case, when performing the grouping,
Of all the plurality of power use systems, the power use systems of a predetermined number from a relatively large order and the power use systems of a predetermined number from a relatively small order are in the same group. Perform grouping.

Another method of grouping based on the time required to raise the temperature to the target temperature value is as follows.
In order to maintain the target temperature value, each power use system is grouped into a predetermined time-sharing output ratio group according to the time ratio at which power is supplied to the power use system per unit time, and provisional grouping is performed. A method may be adopted in which groups are formed, and for each tentative group, groups having power capacities close to each other in accordance with the power capacities of the heaters are grouped into the same group. In this case, the total of the time-sharing output ratios in the same group is set to 100%. According to this, since the power use systems are grouped based on the power capacity of each heater as a main criterion, it is possible to achieve a small capacity and a small power supply facility in this case as well. Further, the plurality of power use systems can be applied to a heater group provided in a processing gas supply pipe or a gas exhaust pipe of a semiconductor manufacturing apparatus.

Further, in order to carry out the above method, in a power control device for supplying power supplied from one power source to a plurality of power use systems for heating, the power control device is connected to the power use system. A multipoint output adjustment unit having a large number of output terminals, a temperature sensor unit provided in each of the plurality of power use systems, and time division of the output of the multipoint output adjustment unit based on the output of each of the temperature sensor units. And an on / off control unit for performing on / off control with the control unit.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a power control method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a block diagram showing a first embodiment of the power control device of the present invention, and FIG. 2 shows a state when a time until a target temperature value is reached when power is continuously applied to each power use system is measured. FIG. 3 is a graph showing the amount of power applied to each power use system. In FIG. 1, reference numeral 2 denotes a batch-type or single-wafer-type semiconductor manufacturing apparatus for performing a heat treatment such as film formation and oxidative diffusion on a semiconductor wafer such as a silicon wafer. A processing gas supply pipe 6 made of, for example, stainless steel introduced into the inside and a gas exhaust pipe 8 for discharging the gas in the processing vessel 4 together with the reaction by-products by, for example, vacuuming are connected.

When a raw material gas which liquefies and solidifies at normal temperature is used as the processing gas, a heater 10 as an electric power use system is provided in the processing gas supply pipe 6 in order to prevent the liquefaction and solidification. In response to this, power supply control is performed by the power control device 12 of the present invention. More specifically, in the illustrated example, the heater 10 is composed of, for example, three divided tape heaters 14A, 14B, and 14C, and each of the tape heaters 14A, 14B, and 14C is a processing gas supply pipe 6.
Are wound around necessary portions and are heated. In the illustrated example, the tape heaters 14A, 14B, and 14C are provided apart from each other for easy understanding of the description, but are actually provided close to each other, and the number of tape heaters is considerably large. .

Each of the tape heaters 14A, 14B, 1
The power capacity of 4C is not necessarily the same, and it is assumed here that the power capacity is large due to the relationship of heater 14A <heater 14B <heater 14C, as described later. As a power supply, a voltage of 200 VAC is dropped to 100 VAC by a transformer 16 and the voltage of 100 VAC is changed.
V is input to the power control device 12 via the breaker 18 and the fuse 20. The power control device 12 has a multipoint output adjustment unit 24 having a large number of output terminals 22, and the multipoint output adjustment unit 24 corresponds to each of the output terminals 22 and performs an SSR (Solid State Relay).
y) and the temperature control units 28A, 2
8B and 28C. Each output terminal 22 is electrically connected to each of the corresponding tape heaters 14A, 14B, 14C via switches 26A, 26B, 26C.

Further, each of the tape heaters 14A, 14B, 1
The 4C is provided with a temperature sensor unit 30 composed of, for example, a thermocouple. The detected temperature value is input to an on / off control unit 32 composed of, for example, a microcomputer via the multipoint output adjusting unit 24. ing. The on / off control unit 32 includes the temperature sensor units 30A,
0B and 30C based on the detected temperature values.
A, 26B, and 26C are controlled to be turned on and off, and the respective tape heaters 14A, 14B, and 14C are controlled to be heated to their respective target temperature values and maintained there. In this case, each of the three switches 26A, 26B,
The 26C is not controlled independently on and off, but is controlled in a time sharing manner so that a plurality of switches are not turned on at the same time. Here, mechanical open / close switches are described as the switches 26A, 26B, and 26C. However, these switches are actually configured as electronic switches by the SCR or the like as described above.

Next, the method of the present invention, which is carried out by using the apparatus configured as described above, will be described. When disilane, dichlorosilane, trichlorosilane, TEOS (TEOS), or the like is used as the processing gas, since these gases have a low liquefaction temperature, the processing gas supply pipe 6 must be heated to a predetermined temperature corresponding to the gas type. If, for example, Teos is used as the processing gas, it is necessary to heat the processing gas supply pipe 6 to about 100 ° C. In the present embodiment, the case where the Teos is used as a processing gas and the target temperature value of the processing gas supply pipe 6 is set to 100 ° C. will be described as an example.

First, prior to temperature control, each of the tape heaters 14A, 14B, 1
Each of the necessary times required to reach the target temperature value of 100 ° C. from normal temperature by heating each of the objects to be heated by the respective heaters by continuously applying an alternating current of 100 V to 4C individually is obtained in advance. FIG. 2 shows the state at this time, and the heating rate depends on the heat capacity of the heating target. Here, for example, a tape heater having a small power capacity reaches the target temperature value of 100 ° C. first, It is assumed that the tape heater 14C having the largest power capacity finally reaches the target temperature value. Here, in order to make the description easy to understand, assuming that the required time of the tape heater 14A that raises the temperature fastest is T, the required times of the other tape heaters 14B and 14C are 2T and 3T, respectively, and are twice and three times, respectively. Suppose it took time.

The data of each required time is incorporated into the on / off control section 32 by input means (not shown) or as a program in advance, and on / off control is performed based on the data. In other words, the shorter the required time, the shorter the on-state during one cycle, and the longer the required time, the longer the on-state during one cycle. FIG.
Indicates the on / off state of each switch 26A, 26B, 26C at this time. Here, one cycle is set to approximately two seconds.

First, when the temperature of the entire semiconductor manufacturing apparatus including the processing gas supply pipe 6 is low, for example, at about room temperature, the control is started, and in the case of the conventional apparatus, each switch 26 is turned on.
A, 26B and 26C are all turned on. In the case of the present invention, the ON time for one cycle is determined according to the data of the required time, and as a result, the tape heater 14A having the shortest required time is determined. Is turned on for the shortest time t, turned on for the next tape heater 14B for a time 2t, and turned on for the tape heater 14C having the longest required time for a time 3t. Will be. This cycle is repeated until the temperature becomes close to the target temperature value.

As described above, since the power supply is controlled in a time-sharing manner, the phenomenon that two or more switches are turned on at the same time does not appear. However, in this embodiment, the maximum capacity of the transformer 16 and the breaker 18 can be made smaller than that of the conventional apparatus, and accordingly the equipment cost and the occupied area can be reduced. Can be achieved. Also, the switches 26A, 26B, 26
C, the ratio of each ON time to each of the tape heaters 14A, 14A.
B and 14C (corresponding to each part of the wound processing gas supply pipe) are set in proportion to the required time until the target temperature value is reached.
The time required for 4A, 14B, and 14C to reach the target temperature value becomes substantially the same, and the idle time of the apparatus can be reduced by that much, and the non-operation time can be suppressed.

The temperature control at the time of stabilization after the temperature of the processing gas supply pipe 6 substantially reaches the target temperature value is performed by the switch-on time of about 30% to 50% of the switch-on time at the time of the temperature rise as described above. Since the time is sufficient, it goes without saying that the power consumption as a whole required by this one power supply is smaller than the power consumption at the time of the temperature rise described above. Here, the required times of the three tape heaters 14A, 14B and 14C are made different, but if the required time of any two tape heaters is the same, the ratio of the switch-on time to those tape heaters in FIG. May be set the same.

Further, even when the target temperature value differs for each tape heater, the time required to raise the temperature to the different target temperature value may be used as the required time. In the first embodiment, the case where three tape heaters are used as heating heaters has been described as an example. However, in the second embodiment, eight tape heaters are used and are grouped into two groups. The case where the temperature is controlled separately will be described as an example. FIG. 4 is a configuration diagram showing a second embodiment of the power control device of the present invention,
FIG. 5 is a graph showing the state when the time until the target temperature value is reached when power is continuously applied to each power using system, and FIG. 6 is a graph showing the amount of power applied to each power using system. is there.

The same parts as those in the configuration shown in FIG. 1 are denoted by the same reference numerals, and description thereof is omitted. In the second embodiment, the number of tape heaters as the heater 10 is larger than that in the first embodiment, and eight tape heaters 14A to 14H are provided.
Up to eight switches 26 correspondingly.
A to 26H, eight temperature controllers 28A to 28H, and eight temperature sensors 30A to 30H are provided, respectively.

In such a configuration, prior to the temperature control, an alternating current of 100 V is continuously applied to each of the tape heaters 14A to 14H wound around the processing gas supply pipe 6 continuously. In the same manner as in the case (1), respective required times required from the room temperature to reach the target temperature value of 100 ° C. are obtained in advance. FIG. 5 shows the state at this time. Here, for the sake of simplicity of explanation, it is assumed that the required time increases in order of T to 8T in order of T to 8T in order of the tape heaters 14A to 14H. The data of each required time is incorporated into the on / off control unit 32 as an input means or a program (not shown). Based on this data, the data is divided into two groups, and each group is independently processed in the case of the first embodiment. On / off control is performed in the same manner as described above.

In the grouping, the tape heaters are grouped such that the required number of tape heaters are in the same group from the relatively large required time and the predetermined number of the tape heaters from the relatively small required time. Here, since the tape heaters are divided into two groups, the two tape heaters 14A and 14B having the shortest required time and the two tape heaters 14G and 14H having the longest required time form the same group, that is, the first group. One tape heater 14
C, 14D, 14E, and 14F are divided into a second group.

FIG. 6 is a graph showing the on / off states of the tape heaters of the first and second groups. As shown in the drawing, on / off control is independently performed for each group, and within the group, on / off control is performed in the same manner as in the first embodiment described above. That is, in the first group shown in FIG.
In the cycle, the tape heater 14A is at time t, the tape heater 14B is at time 2t, and the tape heater 14G is at time 7t.
t and the tape heater 14H are turned on for a time 8t, respectively, and have a ratio corresponding to the length of the required time described above. Further, in the second group shown in FIG. 6B, the tape heater 1 in one cycle is used here.
4C is time 3t, tape heater 14D is time 4t, tape heater 14E is time 5t, and tape heater 14H is ON for time 6t. In this case, too, the ratio corresponds to the length of the required time described above. .

As is clear from FIGS. 6A and 6B, in this case, two switches are turned on at the same time, and accordingly, in the case of the second embodiment, The power capacity of the transformer 16 and the breaker 18 is
The size may be set to be twice as large as that of the first embodiment. In this regard, in the conventional control device, since eight switches may be turned on at the same time,
Only one-fourth the capacity of the conventional transformer and breaker is required, and the cost of equipment and the occupied area can be further reduced.

Also, in this case, the grouping is performed so that the group having the shortest required time and the group having the large required time are included in the same group, so that each of the eight tape heaters 14A to 14H has the target. It is possible to make the time to reach the temperature value substantially the same, and it is possible to further suppress unnecessary idling time while maximizing the reduction in equipment cost. Also, here, the case where eight tape heaters are divided into two groups has been described as an example, but the number of tape heaters and the number of groups are not limited to this, and the tape heaters may be divided into three or more groups. For example, when dividing into four groups,
Referring to the required time shown in FIG.
14H, a group of tape heaters 14B and 14G, a group of tape heaters 14C and 14F, and a group of tape heaters 14D and 14E.

By the way, in each of the above-described embodiments, when the respective power using systems are grouped, the grouping is performed on the basis of the time required for each power using system to reach the target temperature value. Thus, the grouping may be performed in consideration of the heat capacity of the heater used for each power use system. For example, even if the heaters have different power capacities, the time for raising the temperature to the target temperature is the same,
Even when the electric power capacity of the heater is the same, the time for raising the temperature to the target temperature value may be different. This occurs because the objects to be heated have different heat capacities. Therefore, when the grouping for the time-sharing control is simply performed on the basis of the time for raising the temperature to the target temperature value as in the above-described embodiment, a group only having a large heater power capacity, or In some cases, a group having only a small power capacity may be formed, and this may not sufficiently achieve a reduction in the capacity of the power supply equipment.

Therefore, instead of grouping the power use systems based on the time required for raising the temperature to the target temperature value, the power use system per unit time is supplied with power to maintain the target temperature value. In accordance with the supplied time ratio (referred to as a load ratio), each power use system is provisionally grouped into a predetermined time-division output ratio classification. May be grouped such that large ones or small ones are in the same group based on the magnitude of. According to this, the capacity of the power supply equipment can be further reduced.

Here, the load factor will be described. In a power control system, when an object to be heated reaches a target predetermined temperature value, in general control, power is not always supplied, but the amount of heat radiation is increased. The supply and stop of the power are performed alternately according to the above. That is, the power supply is performed intermittently. Then, the ratio of the power supply time per unit time, for example, per minute, is defined here as the load factor. This embodiment will be described in detail below. Here, 16 channels (channels) corresponding to 16 power usage systems
These are grouped, for example, every 2CH or every 4CH. CHs in the same group are not turned on at the same time as in the above-described embodiment. This 16
Here, the grouping of the CHs is performed in two stages of the setting of the time-division output ratio and the setting of the heater capacity (power capacity). First,
Table 1 shows the time-division output ratio and the heater power capacity of each power use system of CH1 to CH16.

[0032]

[Table 1]

The power capacity of each heater is uniquely determined by the heater to be used.
The heating heater is determined by the heat capacity, the heat radiation amount, and the like of the object to be heated and heated. This can be obtained by actually heating the object to be heated to the target temperature value and measuring the load factor when maintaining this temperature. For example, the time-sharing output ratio is classified in advance into three major categories of 25%, 50%, and 100%, and the power-using system having a load factor of 1 to 25% sets the time-sharing output ratio to 25%, For a power use system of 26 to 50%, the time division output ratio is set to 50%, and the load ratio is set to 51%.
The power use system of 100% sets the time division output ratio to 100%. In an actual device, according to the classification method described above, as shown in Table 1, the time-division output ratio is 25% or 50%.
Most of the power use systems correspond to Here, the time-division output ratio is divided into three classes, but it is needless to say that the ratio may be further divided into more classes or smaller classes.

When the time-division output ratio of each CH is thus determined, the CHs are first grouped so that the same time-division output ratios belong to the same group to form a temporary group. Tables 2 and 3 show the provisional groups and Table 2
Is a tentative group having a time-sharing output ratio of 25%. Here, CH1 to CH4 correspond to each other. Group b shown in Table 3 is a tentative group having a time-sharing output ratio of 50%. To CH16 correspond.

[0035]

[Table 2]

[0036]

[Table 3]

Next, based on the power capacity of the heating heater of the power use system in each tentative group, those having similar power capacities are grouped into a plurality of CHs in ascending or descending order, and this group (final) is formed. Form. Tables 4 and 5 show the grouping at this time.

[0038]

[Table 4]

[0039]

[Table 5]

In this grouping, the channels are grouped by the number of CHs whose sum of the time-division output ratio becomes 100%. For example, in the group a, the time-division output ratio is 25%, and the total of the time-division output ratios of the four power-using systems is 100%. Therefore, one main group is formed by these four CHs. In addition, since the time-sharing output ratio is 50% in the b group, one main group is formed by two CHs whose time-sharing output ratio is 100%. Accordingly, since a total of 12 CHs belong to the b group, six main groups are formed.

It should be noted that if the number of a groups is 8, two main groups can be formed. In addition, if there is a power using system whose time division output ratio corresponds to 100%, such a power using system alone forms one main group. Further, if a classification of, for example, 10% is set as the time division output ratio, CHs belonging to such a classification are
The groups are grouped so that one main group is formed by ten CHs. The group formed as described above is shown in Table 6.
become that way.

[0042]

[Table 6]

As is apparent from Table 6, 1 to 7 book groups are formed, and the sum of the larger heater power capacities in each book group is 1620 W (watt). Therefore, in the case where power control is performed without any grouping of all power use systems of CH1 to CH16, in preparation for a situation in which the heaters of all power use systems are turned on, the power supply equipment includes: Although it is necessary to prepare something more than 3625W, according to this embodiment, 1620W
Only a small amount of power supply equipment is required, and it is possible to reduce the size and cost of this equipment. It should be noted that the heater power capacity described here is merely an example.

Further, in the present embodiment, the case of using Teos as the processing gas and heating to about 100 ° C. to prevent this liquefaction has been described as an example, but the type of the processing gas and the heating temperature are not limited thereto. For example, when disilane is used as the processing gas, the heating is performed at about 20 ° C., and when ClF ₃ gas or the like is used, the heating is performed at about 40 ° C.

Although the case where each tape heater is wound around the processing gas supply pipe 6 has been described as an example, the present invention is not limited to this, and the tape heater may be provided in a gas exhaust pipe, or both may be mixed. May be available. Further, the heating heater is not limited to the tape heater, and in the case of a structure in the processing container 4, for example, in the case of a single-wafer type semiconductor manufacturing apparatus, a heating heater provided on a susceptor on which a wafer is placed, and a processing gas are used. A heater provided on the shower head to be supplied, a heater provided on the side wall of the processing container, or the like may be incorporated. Further, the heater is not limited to the heater provided in the semiconductor manufacturing apparatus, but may be applied to a heater provided in any other apparatus.

[0046]

As described above, according to the power control method and apparatus of the present invention, the following excellent operational effects can be obtained. When power is supplied from a single power source to a plurality of power consumption amounts for heating, power is supplied in a time-division manner so that two or more power consumption systems are not simultaneously turned on. That much
The capacity and size of power supply equipment such as a transformer and a breaker can be reduced, and equipment cost and occupied area can be reduced.

In controlling the on / off, the ratio of the length of the on-time is set according to the length of time required to raise the temperature from the normal temperature to the target temperature, so that when the apparatus is started up, each power consumption is used. The system can be heated and heated to a predetermined target temperature value almost simultaneously, and unnecessary idling time can be minimized. Further, when a plurality of power use systems are divided into a plurality of groups and independently controlled for each group, grouping is performed so that those having a relatively large required time and those having a small required time are in the same group. As a result, the power use system as a whole, including each group, can be heated and heated to a predetermined target temperature substantially simultaneously, and wasteful idling time can be further suppressed.

When grouping the power use systems, provisional grouping is performed according to the load factor of each power use system, and further grouping is performed for each provisional group according to the power capacity of the heater. If this group is formed and power control is performed for each group,
By further reducing the maximum power consumption, it is possible to further reduce the capacity and cost of the power supply equipment.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a power control device of the present invention.

FIG. 2 is a graph showing a state when a time until a target temperature value is reached when power is continuously applied to each power using system is measured.

FIG. 3 is a graph showing the amount of power applied to each power use system.

FIG. 4 is a configuration diagram showing a second embodiment of the power control device of the present invention.

FIG. 5 is a graph showing a state when a time until a target temperature value is reached when power is continuously applied to each power use system is measured.

FIG. 6 is a graph showing the amount of power applied to each power use system.

[Description of Signs] 2 Semiconductor manufacturing apparatus 6 Processing gas supply pipe 8 Gas supply pipe 10 Heater (power use system) 12 Power control apparatus 14A to 14H Tape heater (power use system) 16 Transformer 18 Breaker 22 Output terminal 24 Multipoint Output adjustment unit 26A-26H Switch 28A-28H Temperature control unit 30A-30H Temperature sensor 32 ON / OFF control unit

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Akihiro Ishiwata 5-16-6 Kugahara, Ota-ku, Tokyo Rika Kogyo Co., Ltd.

Claims (13)

[Claims] 1. A power control method for supplying power supplied from one power supply to a plurality of power use systems for heating, wherein the plurality of power use systems are on / off controlled in a time-division manner. A power control method, comprising: 2. The on-off control according to claim 1, wherein when the power is continuously supplied to each of the plurality of power use systems, the on-time and the off-time are controlled in accordance with a time required for raising the temperature from a normal temperature to a target temperature value. The power control method according to claim 1, further comprising a step of controlling a length of time. 3. The power control method according to claim 1, wherein the plurality of power use systems are divided into a plurality of groups, and the on / off control is independently performed for each group. 4. When performing the grouping, of the plurality of power use systems, the required time is a predetermined number of power use systems in a relatively large order and a predetermined number of power use systems in a relatively small order. 4. The power control method according to claim 3, wherein the power use systems are grouped so that the power use systems are in the same group. 5. The power control method according to claim 1, wherein the plurality of power use systems are divided into a plurality of groups, and the on / off control is independently performed for each group. 6. When the grouping is performed, each power use system is set in advance according to a time ratio of supplying power to the power use system per unit time to maintain a target temperature value. Provisional groups are formed by grouping the divided output ratios into groups, and further, for each provisional group, groups having power capacities close to each other in accordance with the power capacity of the heater become the same group. 6. The power control method according to claim 1, wherein: 7. The power control method according to claim 6, wherein the sum of the time-division output ratios in the same group is 100%. 8. The semiconductor device according to claim 1, wherein the plurality of power use systems are a group of heaters provided in a processing gas supply pipe or a gas exhaust pipe of a semiconductor manufacturing apparatus. Power control method. 9. A power control device for supplying power supplied from one power supply to a plurality of power use systems for heating, comprising: a plurality of output terminals connected to the power use system. A point output adjustment unit, a temperature sensor unit provided in each of the plurality of power use systems, and an on-off control unit that performs on-off control in a time-sharing manner on the basis of the output of each of the temperature sensor units, based on the output of the multi-point output adjustment unit. A power control device comprising: 10. The on-off control unit is configured to control the on-time and the off-time in accordance with a time required to raise a temperature from a normal temperature to a target temperature value when power is continuously supplied to the plurality of power use systems. The power control apparatus according to claim 9, further comprising a step of controlling a length of time. 11. The on / off control unit, when performing the grouping, relative to a predetermined number of power use systems among the plurality of all power use systems in descending order of the required time. 11. The power control apparatus according to claim 10, further comprising the step of performing grouping such that a predetermined number of power use systems are arranged in the same group in ascending order. 12. Grouping each power use system into a predetermined time-division output rate classification according to a time ratio at which power is supplied to the power use system per unit time in order to maintain a target temperature value. Forming a temporary group by performing the above-mentioned steps, and a step of grouping, for each temporary group, those having power capacities close to each other into the same group according to the power capacity of the heater. Item 10. The power control device according to Item 9. 13. The semiconductor device according to claim 9, wherein the plurality of power use systems are a group of heaters provided in a processing gas supply pipe or a gas exhaust pipe of a semiconductor manufacturing apparatus. Power control device.