JPH11257503A - Vacuum gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the wrench of each link of a link mechanism by improving the structure of a valve plate carrier and the structure of the arrangement of the link mechanism and a guide member for the valve plate carrier, and also improve the operational stability, durability and reliability of a vacuum gate valve by stabilizing pushing/pressing supporting force to a valve plate even though the valve plate, the valve plate carrier, a parallel link mechanism and the like are deformed by external force and thermal distortion and the distortion of a seal member between the valve plate and a valve casing is changed. SOLUTION: Rollers 18 are journalled to upper and lower end parts which are both the side positions in a vertical direction of a valve plate carrier 16 on the rear surface of the valve plate carrier 16, and these upper and lower rollers 18 are arranged in a position on an approximately straight line passed through each parallel link mechanism 25 viewed from front and rear directions and extended in a vertical direction. The valve plate carrier 16 comprises an elastically deformable member such as aluminum, stainless steel and the like which can be elastically deformed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technical field of a vacuum gate valve for opening and closing a communication portion between adjacent vacuum vessels to switch between the two vacuum vessels to a communication state or a communication cutoff state.

[0002]

2. Description of the Related Art Conventionally, as a vacuum gate valve of this kind, for example, Japanese Utility Model Laid-Open No.
No. 770 is known. In this device, a valve plate support is arranged in a valve box communicating with a pair of adjacent vacuum vessels so as to be able to move up and down while being guided by a guide roller (guide member) supported on the rear surface thereof. On the front side of the body on one vacuum vessel side, a valve plate that opens and closes a communication part between the valve box and one vacuum vessel is supported via a parallel link mechanism so as to be able to contact and separate, and at the lower part in the valve box, A piston that is provided with a stopper that comes into contact with the valve plate when the valve plate support is lowered to move the valve plate relative to the support in the closing direction, and that penetrates the upper wall of the valve box upper wall outer surface in an airtight manner in the vertical direction. A cylinder having a rod is attached, the lower end of the piston rod is connected to the valve plate support in the valve box, and the valve plate is moved up and down in the valve box by the expansion and contraction operation of the cylinder to open and close the valve plate. When the valve plate support is raised by the contraction operation of the cylinder, When the valve plate is raised together with the plate support to open the communicating portion of the valve box with the vacuum container, and the two vacuum containers are communicated with each other, while the valve plate support is lowered by the extension operation of the cylinder, The valve plate descending with the valve plate support is brought into contact with the stopper, separated from the valve plate support by the parallel link mechanism, and by this separation, the valve plate is pressed around the communicating portion between the valve box and the vacuum vessel, and both vacuums are released. The communication between the containers is interrupted.

[0003]

By the way, in the above-mentioned prior art, the respective links of the parallel link mechanism are rotated in the rising direction by the downward movement of the valve plate support, and the lowering is stopped by the projecting operation of the respective links. In this closed state, the reaction force from the valve plate is transmitted to the valve plate support by the parallel link mechanism, and the valve plate is further closed. The reaction force of the support is transmitted to the inner surface of the valve box behind the valve plate support by the guide rollers.

However, in such a structure, deformation of a valve plate, a valve plate support, a parallel link mechanism, or the like due to external force or thermal strain, or a gap between a valve plate outer peripheral edge and a communication port peripheral edge of a valve box. If there is a change in the distortion of the sealing member, the valve-closing support force of the valve plate changes, and stable vacuum sealing becomes difficult. In addition, when the reaction force in the opening and closing direction of the valve plate disappears, the seal member cannot be properly pressed and deformed, and this also leads to a vacuum leak.

In addition, the valve plate support is bent from a vertical surface (vertical surface passing through the link support shaft) perpendicular to the vertical surface as the operating surface of each link in the parallel link mechanism under the reaction force from the valve plate. It may be deformed, which causes so-called twisting when each link swings, and also causes a problem that durability and reliability of the gate valve are reduced. In order to prevent the link from twisting, the rigidity of the valve plate support must be increased, which promotes the instability of the valve plate supporting force of the valve plate.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object thereof is to provide a valve plate support structure, that is, a structure of a valve plate support, and an arrangement of a link mechanism and a guide member with respect to the valve plate support. By improving the structure, twisting of each link of the link mechanism is prevented, and deformation of the valve plate, valve plate support, parallel link mechanism, etc. due to external force and thermal strain,
An object of the present invention is to stabilize the pressure supporting force against the valve plate even when there is a change in distortion of the seal member between the valve plate and the valve box, and to improve the operation stability, durability, and reliability of the vacuum gate valve.

[0007]

In order to achieve the above object, according to the present invention, a guide member is provided on both sides of a parallel link mechanism in a valve plate support, and both guide members are substantially linear in a moving direction of the valve plate support. Arranged so as to be located at the upper position or at the approximate center position between a plurality of parallel link mechanisms arranged side by side,
In addition, by configuring the valve plate support with an elastically deformable member, when the gate valve is closed, the valve plate support is positively curved so that the intermediate portion in the moving direction is farther from the communication port of the valve box than both ends. It is deformed to obtain a leaf spring effect.

Specifically, according to the first aspect of the present invention, a valve box is provided between the adjacent first and second vacuum vessels through a communication port with each vacuum vessel. A valve plate support movable in a direction substantially orthogonal to the center line of the first vacuum vessel side communication port, and a valve plate support capable of moving toward and away from a side surface of the valve plate support on the first vacuum vessel side via a parallel link mechanism. Supported, the first of the valve box
A valve plate capable of opening and closing the communication port on the vacuum vessel side, and a guide member for movably guiding the valve plate support to the valve box on the second vacuum vessel side are provided, and the valve plate is moved by the movement of the valve plate support. Is assumed to be a vacuum gate valve in which the first vacuum container side of the valve box is opened and closed by opening and closing the first vacuum container side of the valve box by the valve plate to open or close the two vacuum containers.

When the guide member is viewed from the front and rear sides of the parallel link mechanism in the valve plate support moving direction and from the direction along the center line of the first vacuum vessel side communication port, the parallel link mechanism is used. It is disposed at a position on a substantially straight line extending in the moving direction of the valve plate support. Further, the valve plate support,
When the reaction force from the valve plate is transmitted via the parallel link mechanism when the valve is closed, the intermediate portion in the valve plate support member moving direction is elastically deformed so as to be displaced toward the second vacuum vessel rather than both ends. It is composed of an elastic deformation member.

[0010] In the second aspect of the present invention, similarly, a valve box communicating with each vacuum vessel via a communication port is disposed between the adjacent first and second vacuum vessels, and the valve box has: A valve plate support movable in a direction substantially perpendicular to the center line of the first vacuum vessel side communication port; and a side surface of the valve plate support on the first vacuum vessel side perpendicular to the valve plate support moving direction. A valve plate supported via a plurality of parallel link mechanisms arranged in a direction so as to be able to contact and separate from each other and capable of opening and closing the first vacuum vessel side communication port of the valve box; A guide member for movably guiding the valve box is provided, and the valve plate is moved toward and away from the valve plate support by moving the valve plate support, and the valve plate opens and closes the first vacuum vessel side communication port of the valve box. It is assumed that the vacuum gate valve is configured to connect or disconnect the two vacuum vessels.

The guide member is located at both front and rear positions in the moving direction of the valve plate support relative to the parallel link mechanism, and viewed from a direction along the center line of the first vacuum vessel side communication port. It is arranged at a substantially central position between the link mechanisms and at both end positions in the arrangement direction of the parallel link mechanisms in the valve plate support. The valve plate support has a reaction force from the valve plate when the valve is closed. An elastically deformable member that is elastically deformed such that the intermediate portion in the moving direction of the valve plate support member is displaced toward the second vacuum vessel side from both ends when transmitted through the second vacuum vessel.

According to the first or second aspect of the present invention, the reaction force from the valve plate is transmitted to the valve plate support via the parallel link mechanism, and the reaction force of the valve plate support is guided. When transmitted to the second vacuum vessel side of the valve box by the member,
While the middle part of the valve plate support in the moving direction is pushed from the valve plate to the second vacuum vessel side, both ends are pushed from the valve box to the first vacuum vessel side, and the valve plate support is located at the center of the whole. Instead of the two-dimensional membrane deformation in which the portion is displaced relative to the peripheral portion, the intermediate portion in the valve plate support moving direction is displaced in a curved manner toward the second vacuum vessel only in comparison with both ends in the same direction. 1
Performs a three-dimensional beam deformation (the cross-sectional shape at an arbitrary position along the valve plate support moving direction has substantially the same curved shape). Since the valve plate support is made of an elastically deformable member, when the above-described one-dimensional beam deformation occurs, the valve plate support functions as a kind of leaf spring to provide a large elasticity. The deformation amount and the deformation stress are stored, and the valve plate is pressed in the valve closing direction via the parallel link mechanism. For this reason, deformation of the valve plate, the valve plate support, the parallel link mechanism, and the like due to external force and thermal distortion, or a change in distortion of the seal member between the outer peripheral portion of the valve plate and the communication port peripheral portion of the valve box occurs. Even if they are, they can be absorbed by the leaf spring action of the valve plate support, and a stable valve closing support force of the valve plate can be obtained. Moreover, even when the reaction force in the opening / closing direction disappears on the valve plate, the sealing member can be appropriately pressed and deformed, and the vacuum sealing by the gate valve can be stabilized.

When the gate valve is closed, the valve plate support is
The intermediate portion in the moving direction is one-dimensionally deformed so as to be displaced relative to both ends, and is not deformed so as to bend from a plane orthogonal to the operating surface of each link in the parallel link mechanism. Prying during motion is less likely to occur. For this reason, the durability and reliability of the vacuum gate valve can be improved.

According to the third aspect of the present invention, when the valve plate is separated from the valve plate support and the communication port on the first vacuum vessel side of the valve box is closed, each link of the parallel link mechanism is substantially in relation to the valve plate. It is configured to stand in the orthogonal direction.

When the valve is closed, the link of the parallel link mechanism rises with respect to the valve plate, so that the opening / closing movement of the valve plate coming into and out of the communication port and the movement of the valve plate support are not linked by the link. Thus, the valve-closing support effect by the leaf spring function of the valve plate support is reliably obtained.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIGS. 1 to 3 show Embodiment 1 of the present invention, wherein 1 is a first vacuum vessel located on the front side, and 2 is adjacent to the rear side of the first vacuum vessel 1. In this second vacuum vessel, each of the vacuum vessels 1 and 2 has a substantially rectangular opening 3 or 4 which is disposed to face each other. A vacuum gate valve 6 is provided between the two vacuum vessels 1 and 2 to open or close the internal spaces of the two vacuum vessels 1 and 2. The vacuum gate valve 6 includes a thin rectangular valve box 7 sandwiched between the vacuum vessels 1 and 2 in an airtight manner, and a lower portion of a front wall (left side wall in FIGS. 2 and 3) of the valve box 7. A front communication port 8 corresponding to the opening 3 of the first vacuum vessel 1 is provided, and a rear side corresponding to the opening 4 of the second vacuum vessel 2 is provided at a lower portion of a rear wall (right side wall in FIGS. 2 and 3). The communication ports 9 are respectively opened, and the inside of the valve box 7 communicates with the vacuum vessels 1 and 2 via the communication ports 8 and 9.

In the upper part of the valve box 7, a position spaced a predetermined distance in the left-right direction is set in the front-rear direction (the left-right direction in FIGS. 2 and 3).
A pair of left and right support shafts 11, 11 extending parallel to each other are rotatably supported through shaft holes 7a, 7a formed in the front and rear walls of the valve box 7, respectively.
a bearing 10 in which a sealing member (not shown) is inserted
Is hermetically sealed. The left and right support shafts 1
The base ends of the bifurcated arms 12 and 12 are rotatably mounted and fixed to the intermediate portions of the arms 1 and 11 located in the valve box 7, respectively. One end portions of the plate-like left and right inner links 13 having substantially the same length are swingably supported by shafts 14 in the front-rear direction, respectively. The other end of each of the inner links 13 has a valve plate slightly larger than the communication ports 8 and 9 at the lower portion of the valve box 7 and offset to the rear side (the second vacuum vessel 2 side) in the valve box 7. The mounting portions 16a, 16a, which are located at the upper end of the support 16 at positions separated in the left-right direction, respectively
7, 17 are swingably connected. In other words, the valve plate support 16 is suspended from the distal ends of the left and right arms 12 and 12 via the inner links 13 and 13 respectively, and the left and right support shafts 11 and 11 are synchronized in opposite directions. To rotate up and down in the valve box 7 in a vertical direction (direction substantially orthogonal to the center line of the front communication port 8 in the valve box 7),
As will be described later, the support shaft 11 on the left side (the left side in FIG. 1) is raised in a clockwise direction in FIG. 1, and the right support shaft 11 is raised in a counterclockwise direction in FIG. .

Of the front and rear side surfaces of the valve plate support 16, the upper and lower ends of the rear side surface on the side of the second vacuum vessel 2 (the right side in FIGS. 2 and 3) correspond to the inner surface of the rear wall of the valve box 7. Roller guides 18, 18,... Are rotatably supported by a horizontal left-right rotation shaft 18a, and four pairs of rollers 18, 18,. , These four sets of rollers 18, 18, ...
Are arranged side by side at predetermined intervals in the left-right direction in line symmetry with respect to the left-right center of the valve plate support 16.

On the other hand, the front side (the left side in FIGS. 2 and 3) of the valve plate support 16 has substantially the same size as the valve plate support 16 (slightly larger than the communication ports 8 and 9 in the lower portion of the valve box 7). ) Valve plate 21
Four parallel link mechanisms 25, 25,...
Is supported so as to be able to come and go through That is, four pairs (up to the same number as the number of rollers 18) of openings 19, 19,... Corresponding to the upper and lower portions are formed in the upper and lower intermediate portion of the valve plate support 16 so as to be arranged in the left-right direction, respectively. In the opening 19, one end of the link 24 is a horizontal and horizontal link support shaft 2.
It is swingably supported along a vertical plane (operation surface) around 4a. A concave portion 22 is formed on the rear side of the valve plate 21 substantially corresponding to each opening 19 of the valve plate support 16, and the other end of each link 24 is provided in each concave portion 22 in the horizontal direction. Is supported so as to be swingable along a vertical plane around the link support shaft 24b. The upper and lower pairs of links 24 constitute a parallel link mechanism 25, and these four parallel link mechanisms 25, 25,
The valve plate 21 is supported on the front side surface (side surface on the side of the first vacuum vessel 1) of the valve plate support 16 so as to be able to contact and separate therefrom.

The valve plate 21 includes a valve box 7 and the first vacuum vessel 1.
To open or close the front communication port 8 of the valve box 7 to open or close the first and second vacuum vessels 1 and 2. Sealing member 23 that abuts and seals around the communication port 8 on the inner surface of the wall
Is attached and fixed.

Further, a plurality of stoppers 29, 29,... Are attached to the lower part of the valve box 7 near the front side in a state of being arranged in the left-right direction. Each of the stoppers 29 rotatably supports a roller 31 on a bracket 30 on a bottom surface in the valve box 7 so as to be rotatable with an axis in the left-right direction. The roller 31 abuts on the lower surface of the valve plate 21 and stops its downward movement. With the subsequent downward movement of the valve plate support 16, the valve plate 21 is moved by the parallel link mechanisms 25, 25,. Is guided so as to be relatively moved in a forward direction, that is, in a closing direction, which is separated from the camera.

The front end of each of the support shafts 11 extends forward (outside the valve box 7) from the outer surface of the front wall of the valve box 7, and the front end thereof
A plate-like lever 34 extending at right angles to the arm 12 is mounted and fixed at the base end to the left and right central sides of the valve box 7 when viewed from the front side (axial direction of the support shaft 11).
One end of an outer link 35 made of a pair of parallel plate members having substantially the same length as the lever 34 is swingably supported at the tip of the lever 34 by a shaft 36 in the front-rear direction. Further, a cylinder 39 as a linear actuator having a vertical axis is disposed and fixed at the left and right central portion on the front side of the valve box 7. The cylinder 39 has a piston rod 40 as an output part that protrudes upward from the cylinder body and performs a linear motion. A plate-shaped connecting part 41 extending in the left-right direction is provided at the upper end of the piston rod 40 at the center. The other ends of the outer links 35 are connected to both ends of the connecting portion 41 so as to be swingable by a shaft 37 in the front-rear direction. That is,
The piston rod 40 of the cylinder 39 is connected to the distal end of each lever 34 via an outer link 35. The piston rod 40 is moved up and down by the expansion and contraction operation of the cylinder 39 to synchronize the two support shafts 11, 11 in the opposite direction. When the cylinder 39 is contracted by raising and lowering the valve plate support 16 and the valve plate 21 by rotating the left support shaft 11
Is rotated clockwise in FIG. 1 and the right support shaft 11 is rotated counterclockwise in FIG. 1 to raise the valve plate support 16 and the valve plate 21 to open the gate valve 6. When the cylinder 39 is extended, the left support shaft 11 is rotated counterclockwise in FIG.
Are rotated clockwise in FIG. 1 to lower the valve plate support 16 and the valve plate 21 so that the gate valve 6 is closed.

The arm 12 and the lever 34 extend in a direction perpendicular to the axial direction of each support shaft 11, so that the arm 12 is substantially horizontal when the valve plate support 16 is near the rising end position. The lever 34 is arranged to be substantially horizontal when the valve plate support 16 is in the vicinity of the lower end position while the valve plate support 16 is in the upper end position and the lower position. The moving speed when the valve plate 21 is near each of the end positions (when the stroke of the valve plate 21 is near each of the open position and the closed position) is set to be lower than when the valve plate 21 is at the middle position between the upper and lower positions.

With the above construction, the upper and lower rollers 18, 18 supported on the rear side of the valve plate support 16 are provided.
Are disposed at the upper and lower sides of each of the parallel link mechanisms 25 in the moving direction of the valve plate support 16 (in other words, the parallel link mechanisms 25 are provided by the upper and lower rollers 1).
8, 18).

As shown in FIG. 1, the pair of upper and lower rollers 18 and 18 are arranged in the front-rear direction (the center of the front communication port 8 on the side of the first vacuum vessel 1 on the front wall of the valve box 7). Parallel link mechanism 25 as viewed from the direction along the line)
It is disposed at a position on a substantially straight line L extending vertically upward (moving direction of the valve plate support 16), that is, the upper and lower rollers 18, 18 and each parallel link mechanism 25 correspond to the vertical direction. Are arranged substantially linearly.

The valve plate support 16 is made of an elastically deformable plate, such as an aluminum plate or a thin stainless steel plate, and faces backward from the valve plate 21 when the vacuum gate valve 6 is closed. The reaction force of each parallel link mechanism 25
When transmitted to the upper and lower intermediate portions of the valve plate support 16 via the valve, the valve plate support 16 has an intermediate portion in the vertical direction (moving direction) behind the upper and lower ends (the second vacuum vessel 2). Side).

Further, in the closed state of the gate valve 6 in which the valve plate 21 is separated from the valve plate support 16 and the front communication port 8 (the communication port on the first vacuum vessel 1 side) of the valve box 7 is closed. As shown in FIG. 3, the upper and lower links 24, 2 of each parallel link mechanism 25
Each of the members 4 stands in a direction substantially orthogonal to the valve plate 21 to be in a horizontal state.

Next, the operation of the above embodiment will be described. When the gate valve 6 in the closed state as shown in the solid line and FIG. 3 in FIG. 1 is opened, the piston rod 40 is moved downward by the contraction operation of the cylinder 39. As a result, the outer link 35,
The two support shafts 11, 11 connected via the lever 35 and the levers 34, 34 rotate synchronously in opposite directions, and the left support shaft 11 rotates clockwise in FIG.
1 rotate in the counterclockwise direction. Due to the rotational drive of the support shafts 11, 11, the arms 12, 12, which are integral with the support shafts 11, 11, also rotate.
The valve plate support 16 connected via the members 3 and 13 rises in the valve box 7 while being guided on the inner surface of the rear wall of the valve box 7 by upper and lower rollers 18, 18,. This valve plate support 16
25, the communication part between the valve box 7 and the first vacuum vessel 1, that is, the valve plate 21, which has closed the front communication port 8 of the valve box 7 in an airtight manner, is pulled up by the parallel link mechanisms 25, 25,. Then, the front communication port 8 is opened, and the valve plate 21 is moved to the lower end of the valve box 7 by the valve plate support 16 near the contraction stroke end of the cylinder 39 as shown by the imaginary line in FIG. It moves so that it may substantially correspond to the upper end position of the communication ports 8 and 9, and the internal spaces of the two vacuum vessels 1 and 2 are in communication with each other via the inside of the valve box 7.

On the other hand, when the gate valve 6 is closed from the above-mentioned open state, the piston rod 40 is raised by the extension operation of the cylinder 39. As a result, the two support shafts 11 and 11 rotate synchronously in opposite directions, and the left support shaft 11 rotates counterclockwise in FIG.
1 rotate clockwise, respectively. This support shaft 1
Due to the rotational drive of the support shafts 11, 11, the arms 12, 12, which are integral with the support shafts 11, 11, also rotate, and the inner link 1
The valve plate support 16 connected via the members 3 and 13 descends together with the valve plate 21 in the valve box 7 while being guided on the inner surface of the rear wall of the valve box 7 by upper and lower rollers 18, 18,. When the valve plate 21 contacts the stoppers 29, 29,... Near the lower end position of the valve plate support 16, further downward movement of the valve plate 21 is stopped, and further downward movement of the valve plate support 16 is stopped. This causes the valve plate 21 to turn into the parallel link mechanism 25, 2
By the rising operation of each link 24 of 5,... 25, the link 24 is guided to move forward so as to be separated from the valve plate support 16. As shown by the solid line in FIG. 1 and FIG. 3, when the valve plate support 16 reaches the lower end position near the end of the extension stroke of the cylinder 39, the rear surface of the valve plate 21 is moved by the upper and lower rollers 18, 18,. Are pushed forward through the links 24, 24,... By the valve plate support member 16 whose movement is restricted, and the communication portion between the valve box 7 and the first vacuum vessel 1, that is, the front communication port 8 of the valve box 7 is formed. It is pressed around in a hermetically sealed state, and the communication between the internal spaces of the vacuum vessels 1 and 2 is blocked by the valve plate 21.

Therefore, in this embodiment, the upper and lower rollers 18, 18 for guiding the valve plate support 16 up and down with respect to the inner surface of the rear wall of the valve box 7 are located at the upper and lower intermediate portions of the valve plate support 16. The gate valve 6 is located at a vertical position of each parallel link mechanism 25 and at a position on a substantially vertical line L passing through each parallel link mechanism 25 when viewed from the front side.
In the closed state, the reaction force from the valve plate 21 is transmitted to the valve plate support 16 via each parallel link mechanism 25, and the reaction force of the valve plate support 16 is transmitted to the valve box by the upper and lower rollers 18, 18. 7 is transmitted to the inner surface of the rear wall around the rear communication port 9, the upper and lower intermediate portions of the valve plate support 16 are pushed rearward from the valve plate 21 (to the second vacuum vessel 2), Are pushed from the valve box 7 toward the front side (the first vacuum vessel 1 side). Thus, the valve plate support 16 does not perform two-dimensional film deformation in which the entire central portion including the vertical direction and the horizontal direction is relatively displaced with respect to the peripheral portion, but the upper and lower intermediate portions are provided at the upper and lower ends. Only in comparison, the cross-sectional shape along the vertical direction, which is the direction of movement of the valve plate support 16, is always substantially the same so as to be displaced in a curved shape only to the rear side (to the second vacuum vessel 2 side). The beam is one-dimensionally deformed so as to have the same curved shape.

The valve plate support 16 is made of aluminum, thin stainless steel, or the like and is elastically deformable. 3 lengths for 800 mm communication port 8
When the valve plate 21 having a width of 820 mm and a width of 820 mm was pressed to close the valve, the upper and lower intermediate portions of the valve plate support 16 made of aluminum having a thickness of 20 mm could be displaced by a maximum of 0.5 mm). Acts as a kind of leaf spring with a substantial beam deformation, and a large amount of elastic deformation and deformation stress are stored. As a result, the valve plate support 16 is
Presses the valve plate 21 in the closing direction (forward direction) via the parallel link mechanisms 25, 25,... Even if the valve plate 21, the valve plate support 16 and the parallel link mechanisms 25, 2 due to external force or thermal strain.
Even if the deformation of the seal member 23 between the outer peripheral edge of the valve plate 21 and the peripheral edge of the front communication port 8 of the valve box 7 occurs, the deformation of the valve plate 21 becomes a leaf spring. The stable valve-closing support force of the valve plate 21 is obtained by being absorbed by the plate support 16. Further, even when the valve plate 21 has lost the reaction force in the opening and closing direction, the sealing member 23 can be appropriately pressed and deformed, and the vacuum seal between the two vacuum containers 1 and 2 by the vacuum gate valve 6 is stabilized. can get.

Further, as described above, the valve plate support 16 is one-dimensionally deformed in a beam such that the upper and lower middle portions are relatively displaced rearward as compared with the both end portions.
In the parallel link mechanisms 25, 25,..., A vertical plane (link supporting shaft 2)
(A vertical plane passing through 4a, 24b) so that each link 24 is less likely to be twisted when rocked, and thus the durability and reliability of the vacuum gate valve 6 can be improved.

Further, when the valve plate 21 is separated from the valve plate support 16 and the front communication port 8 of the valve box 7 is closed when the gate valve 6 is closed, each link of the parallel link mechanisms 25, 25,. In this state, the valve plate 21 is opened and closed in the front-rear direction in which the valve plate 21 comes into contact with and separates from the front communication port 8, and the valve plate support 16 This is a dead point state in which is not linked by the link 24 to the ascending and descending movement of the valve plate along the up-down direction, and the valve-closing support effect by the leaf spring function of the valve plate support 16 is reliably obtained.

(Embodiment 2) FIG. 4 shows Embodiment 2 of the present invention.
(Note that the same parts as those in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof is omitted).
The right and left positions of the rollers 18, 18,.

That is, in this embodiment, four pairs of upper and lower rollers 18, 1 supported on the rear surface of the valve plate support 16 are provided.
Are arranged at both upper and lower positions of each parallel link mechanism 25 in the same manner as in the first embodiment.

The difference from the first embodiment is that the roller 1
8, 18, ... in the left-right direction. That is, in this embodiment, the upper and lower rollers 18, 1 as in the first embodiment are used.
8 are arranged in a substantially straight line corresponding to the vertical direction with each parallel link mechanism 25, and five pairs of rollers 18, 18,... Mechanism 25, 25,... One more)
The five pairs of rollers 18, 18,... Are positioned substantially at the center (straight lines L,
L at a substantially central position between L) and the valve plate support 1
6 are divided into two sets at the left and right end positions (side end positions in the arrangement direction of the parallel link mechanisms 25, 25,...), And the upper and lower rollers 18, 18 of each set are arranged corresponding to the upper and lower sides, respectively. ing. Other configurations are the same as those of the first embodiment. Therefore, also in the second embodiment, the same operation and effect as in the first embodiment can be obtained.

In each of the above embodiments, the cylinder 39 is arranged so that the piston rod 40 projects upward from the cylinder body. However, the cylinder 39 is arranged so that the piston rod 40 projects downward from the cylinder body. It may be arranged. The present invention can also be applied to a drive structure in which a piston rod of a cylinder is slidably penetrated through a wall of a valve box 7 and a distal end of the cylinder is directly connected to a valve plate support 16.

In each of the above embodiments, the actuator is the cylinder 39, but other actuators may be used. For example, the support shaft 11 is rotated by a rotary actuator.
May be directly driven to rotate, in which case the lever 34 and the outer link 35 are not required. Furthermore, in each of the above embodiments, the number of drive communication systems from the cylinder 39 to the valve plate support 16 is two, but the number can be increased or decreased to three or more or one.

In each of the above embodiments, the valve plate support 1
6, the valve plate 21 is moved back and forth to open and close by moving the valve plate 21 up and down. However, in the present invention, the valve plate 21 is moved in a direction other than the up and down direction, for example, by moving the valve plate support 16 in the horizontal and horizontal directions. A vacuum gate valve that opens and closes the plate 21 is also applicable.

In each of the above embodiments, the number of the parallel link mechanisms 25 is four, and the upper and lower rollers 18, 18,... In the first embodiment are the same as the four sets of the parallel link mechanisms 25, 25,. In the second embodiment, the parallel link mechanisms 25, 2
Each of the five sets is set to be one more than the number of 5, 5,.
It goes without saying that the number may be increased or decreased while maintaining the relationship with the number 5.

In the middle of the left and right ends of the valve plate support 16, only when the gate valve 6 is open, the valve plate support 16 is connected to the rear side of the rear communication port 9 in the valve box 7. It is also possible to provide a guide roller that guides the inner surface of the wall and does not transmit the reaction force of the valve plate support 16 to the valve box 7 when the valve is closed.

[0042]

As described above, according to the first aspect of the present invention, the guide member guides the inner surface of the valve box into the valve box disposed between the pair of adjacent vacuum vessels and communicating with each vacuum vessel. Gate valve provided with a movable valve plate support and a valve plate which is supported by the valve plate support via a parallel link mechanism so as to be able to contact and separate from the valve plate and opens and closes a communication port on the vacuum container side of the valve box. On the other hand, the guide member is disposed at both front and rear positions in the moving direction of the valve plate support relative to the parallel link mechanism, and passes through the valve plate through the parallel link mechanism when viewed from the direction along the center line of the communication port with the vacuum vessel. Placed at a position on a substantially straight line extending in the support moving direction,
The valve plate support was made of an elastically deformable member that can be elastically deformed.
According to the second aspect of the present invention, in the same vacuum gate valve, the guide member is disposed at both front and rear positions in the moving direction of the valve plate support relative to the parallel link mechanism, and along the center line of the communication port with the vacuum vessel. The valve plate support is disposed at a substantially central position between adjacent parallel link mechanisms viewed from the direction and at both end positions in the arrangement direction of the parallel link mechanism of the valve plate support, and the valve plate support is formed of an elastically deformable member that is elastically deformed.

Therefore, according to these inventions, when the reaction force from the valve body is transmitted to the valve plate support via the parallel link mechanism at the time of closing the valve, the valve plate support is moved at both ends in the movement direction intermediate portion. The plate is elastically deformed one-dimensionally so as to be displaced relative to the portion, and functions as a leaf spring. The valve plate can be pressed by the elastically deformed valve plate support in the valve closing direction via a parallel link mechanism, and external force and heat Even if the deformation of the valve plate, the valve plate support, the parallel link mechanism, etc. due to the distortion, or the change in the distortion of the sealing member between the outer peripheral edge of the valve plate and the communication port peripheral edge of the valve box occurs, a stable valve can be obtained. In addition to providing the valve-closing support force of the plate, even if the valve plate has no reaction force in the
The seal member can be appropriately pressed and deformed, so that the vacuum sealing by the gate valve can be stabilized. In addition, the valve plate support is prevented from deforming so as to bend from a plane perpendicular to the operating surface of each link in the parallel link mechanism, thereby preventing the prying of the link and improving the durability and reliability of the vacuum gate valve. Can be achieved.

According to the third aspect of the present invention, when the valve plate is separated from the valve plate support and closes the communication port of the valve box, each link of the parallel link mechanism is erected in a direction substantially orthogonal to the valve plate. By doing so, when the valve is closed, the opening and closing movement of the valve plate and the movement of the valve plate support can be in a dead point state where they are not linked by a link, and the valve closing support effect is ensured by the leaf spring function of the valve plate support. Can be planned.

[Brief description of the drawings]

FIG. 1 is a front view showing a main part of a vacuum gate valve according to Embodiment 1 of the present invention.

FIG. 2 is a sectional view showing a gate valve according to the first embodiment in an open state;

FIG. 3 is a sectional view showing a closed state of the gate valve according to the first embodiment.

FIG. 4 is a view corresponding to FIG. 1 showing a second embodiment.

[Explanation of symbols]

 1, 2 vacuum vessel 3, 4 opening 6 vacuum gate valve 7 valve box 8, 9 communication port 16 valve plate support 18 roller (guide member) 21 valve plate 23 seal member 24 link 24a, 24b link support shaft 25 parallel link mechanism 29 Stopper 39 Cylinder

Claims (3)

[Claims] 1. A valve box communicating between adjacent first and second vacuum vessels through a communication port with each vacuum vessel is provided, and a center of the first vacuum vessel side communication port is provided in the valve box. A valve plate support movable in a direction substantially perpendicular to the line;
A valve plate supported on the side surface on the side of the vacuum vessel via a parallel link mechanism so as to be able to open and close the first vacuum vessel side communication port of the valve box, and the valve plate support on the second vacuum vessel side A guide member for movably guiding the valve box is provided, and the valve plate is moved toward and away from the valve plate support by moving the valve plate support, and the valve plate opens and closes the first vacuum vessel side communication port of the valve box. A vacuum gate valve configured to communicate or interrupt communication between the two vacuum vessels, wherein the guide member is located at both front and rear positions in the valve plate support moving direction with respect to the parallel link mechanism and communicates with the first vacuum vessel. When viewed from a direction along the center line of the mouth, the valve plate is disposed at a position on a substantially straight line extending through the parallel link mechanism in the moving direction of the valve plate support, and the valve plate support is provided when the valve is closed. When the reaction force is transmitted via the parallel link mechanism, the valve plate support Vacuum gate valve, wherein an intermediate portion of the moving direction is constituted by the elastically deformable member is elastically deformed so as to be displaced to the second vacuum container side than the end portions. 2. A valve box communicating between each of the first and second vacuum vessels via a communication port with each vacuum vessel is provided, and a center of the first vacuum vessel-side communication port is provided in the valve box. A valve plate support movable in a direction substantially perpendicular to the line;
A valve which is supported on a side surface on the vacuum vessel side via a plurality of parallel link mechanisms arranged in a direction orthogonal to the valve plate support moving direction so as to be able to open and close the first vacuum vessel side communication port of the valve box. A plate and a guide member for movably guiding the valve plate support to the valve box on the second vacuum vessel side are provided, and the valve plate is moved away from the valve plate support by moving the valve plate support, In the vacuum gate valve, a first vacuum vessel side communication port of a valve box is opened and closed by the valve plate to open or close the two vacuum vessels, wherein the guide member is a valve plate support for a parallel link mechanism. A substantially central position between the adjacent parallel link mechanisms as viewed from a direction along the center line of the first vacuum vessel side communication port at both front and rear positions in the movement direction, and an arrangement of the parallel link mechanisms in the valve plate support. And the valve plate support When the reaction force from the valve plate is transmitted via the parallel link mechanism when the valve is closed, the intermediate portion in the valve plate support member moving direction is elastically deformed so as to be displaced toward the second vacuum vessel rather than both ends. A vacuum gate valve, comprising: 3. The vacuum gate valve according to claim 1, wherein when the valve plate is separated from the valve plate support and the first vacuum vessel side communication port of the valve box is closed, each link of the parallel link mechanism is formed. A vacuum gate valve standing upright in a direction substantially perpendicular to a valve plate.