JPH11250303A - Surface shape detection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive non-contact detector of a simple structure capable of detecting projections or recessions on the surface of an object to be measured in a single relative motion by constituting a line sensor. SOLUTION: Tips of many bar-shaped cores arranged in a line at a specified interval are mounted on the same plane and, at the same time, these tips are placed relatively movable opposite to a direction orthogonal to the above arranging detection on a measured object surface with projections and recessions in a magnetic field. A detection coil 5 for detecting changes in a magnetic flux generated by projections and recessions of the measured object is provided in each of the bar-shaped cores, an output of the detection coil 5 is A/D converted in a specified timing and stored in a memory 25, and the projections and recessions within a specified range is detected from data stored in the memory 25.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface shape detecting device for detecting irregularities on the surface of an object to be measured in a non-contact manner based on a change in magnetic flux. More specifically, the present invention relates to a surface shape detection device capable of detecting the uneven shape of the surface of a measured object within a predetermined range only by relatively moving the measured object once.

[0002]

2. Description of the Related Art Conventionally, there is a dial gauge that can accurately measure the uneven shape of the surface of an object to be measured, has a simple structure and is inexpensive. However, since the dial gauge measures the object by fixing the object to be measured and bringing the probe into contact with the uneven surface, the measurement takes a long time. For this reason, it is difficult to detect irregularities on the surface of the object to be measured in a short period of time, and to detect the irregularities on the surface of the moving object one after another, for example, coin identification incorporated in a vending machine. It could not be applied to devices and the like.

[0003] Therefore, for example, a coin discriminating apparatus incorporated in a vending machine is provided with a plurality of sensors to collect various types of data for coins to be inserted and to discriminate the type and authenticity of coins. ing. As one of sensors installed in the coin identification device, there is an eddy current sensor. The eddy current sensor is installed to face the coin passage, and electrically detects a change in magnetic flux when the coin passes. That is, since the resistivity differs depending on the material and thickness of the coin, the eddy current loss differs for each coin. The eddy current sensor electrically detects the change of the magnetic flux due to the eddy current loss and outputs it. Therefore, the coin discriminating device judges the material, thickness, diameter, etc. of the inserted coin based on the change in the detection output of the eddy current sensor, and also judges data based on the detection output of other sensors. By comparing these results with data stored in advance, the type and authenticity of the inserted coin are determined. However, such a coin discriminating apparatus has a complicated configuration and is expensive.

[0004]

On the other hand, as for coin identification devices incorporated in vending machines and the like, in the present situation where forgery and forgery of coins are becoming more and more sophisticated, complicated and fine details attached to the surface of the coins are present. There is a demand to determine the type and authenticity of coins based on the uneven shape. Therefore, in recent years, the uneven shape of the surface of the object to be measured can be detected without contact,
In addition, there is a demand for the development of an inexpensive surface shape detection device having a simple structure.

Here, as a method for detecting the unevenness of the surface in a non-contact manner, a method of processing an image taken by a CCD camera or a method of irradiating a semiconductor laser onto the uneven surface and capturing the reflected light by a photodiode or the like. There are methods. However, in the method of capturing an image with a CCD camera, the uneven shape is processed as two-dimensional image data. For example, a fake coin on which a photograph of a real coin is stuck cannot be distinguished. When irradiating light at a shallow angle from the periphery to make it easy to obtain unevenness information, if the center is depressed, it is difficult to obtain reflected light and it will be shaded, and this depression may be mistaken for a hole. In the method of capturing the reflected light of the semiconductor laser with a photodiode or the like, it is necessary to scan a laser beam in a plane. In addition, in both of these methods, rust and dirt on the uneven surface are indiscriminately hampered identification, and expensive devices dedicated to the uneven shape are separately installed to detect the uneven shape on the coin surface. This leads to an increase in manufacturing cost and an increase in the size of the apparatus, which is not appropriate. Therefore, in the coin identification device, etc., it is possible to detect the uneven shape of the coin surface by developing an existing sensor for detecting the material, etc. which has been conventionally provided, and to detect the uneven shape of the coin surface together with the data of the coin material, etc. It would be convenient if we could get data on

[0006] The development of such a surface shape detecting device is required not only for coin identification but also for other applications.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a surface shape detecting device capable of detecting the uneven shape of the surface of an object to be measured in a non-contact manner and capable of being manufactured at a low cost with a simple structure. .

[0008]

In order to achieve the above object, a surface shape detecting device according to a first aspect of the present invention includes a plurality of rod-shaped cores which are arranged in a line at predetermined intervals and arranged on the same plane. The tips of a large number of rod-shaped cores are movably opposed to the surface of an object to be measured having an unevenness in a magnetic field in a direction perpendicular to the arrangement direction, and are generated in each of the rod-shaped cores due to the uneven shape of the object to be measured. Detecting means for detecting a change in magnetic flux is provided, the output of the detecting means is A / D-converted at a predetermined timing, stored in a memory, and a predetermined range of unevenness is detected from the data stored in the memory. It was made.

Therefore, the detecting means constitutes line sensors arranged in a line in a direction orthogonal to the direction of relative movement with the object to be measured. Since the output of each detecting means changes according to the uneven shape of the surface of the DUT to which the tip of the rod-shaped core faces, the output of each detection means is moved at a predetermined timing while moving the DUT relative to the line sensor. , The unevenness of the measured object can be detected over the entire surface by a single relative movement. The output of each detection means is an analog signal, which is converted into a digital signal suitable for signal processing by A / D conversion and stored.

According to a second aspect of the present invention, there is provided a surface shape detecting device in which the width of the tips of a plurality of rod-shaped cores in the direction of relative movement is smaller than the width of the uneven shape to be detected, and the detecting means is wound around the rod-shaped core. And a magnetoresistive element attached to the detection coil or the rod-shaped core. Since the detecting means detects a change in magnetic flux affecting the rod-shaped core, the resolution of the sensor is determined by the fineness of the tip of the rod-shaped core. That is, by making the width of the tip of the rod-shaped core in the relative movement direction smaller than the width of the uneven shape to be detected,
The uneven shape of the object to be measured is detected with a finer resolution than the uneven shape. Further, by using a detection coil or a magnetoresistive element as each detecting means, a change in magnetic flux caused by the unevenness of the surface of the object to be measured is electrically detected.

According to a third aspect of the present invention, in the surface shape detecting apparatus, a plurality of sets of rod-shaped cores arranged in a row are arranged in a relative movement direction, and a rear row of rod-shaped cores is arranged between the front row of rod-shaped cores in the relative movement direction. It is arranged so that the rod-shaped core is located. Therefore, even if the number of sets of rod-shaped cores arranged in a row is increased, the trajectories of the rod-shaped cores when the object to be measured is relatively moved do not overlap, and the surface shape of the object to be measured in a dense state in which the interval between the trajectories is narrowed Can be detected. Further, even if the interval between the rod-shaped cores in the same set is set to be large in order to prevent magnetic interference between the adjacent detection means, the number of sets of the rod-shaped cores is increased to increase the number of the set of the rod-shaped cores so that the object to be measured is dense. Can be detected.

According to a fourth aspect of the present invention, in the surface shape detecting device, the same number of auxiliary cores for forming a magnetic flux path having the same width as the rod-shaped core are integrated on both sides of the rod-shaped core with respect to the relative movement direction. It is formed in. Therefore, an auxiliary core is formed separately from the rod-shaped core provided with the detecting means, and the exciting coil is detected by winding an exciting coil for generating a magnetic field through which the object to be measured passes around the auxiliary core. It can be arranged independently of the means.

In this case, the rod-shaped core and the auxiliary core are integrally formed by one magnetic material block, and the object to be measured is made of metal or magnetic material. good.

According to a sixth aspect of the present invention, in the surface shape detecting device, an exciting coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the exciting coil. Therefore, the magnetic flux penetrating the DUT changes in a short period corresponding to the high-frequency signal, and it is possible to detect fine irregularities.

Further, in the surface shape detecting device according to the present invention, the object to be measured is a coin, and the width of the tip of the rod-shaped core in the relative movement direction is 2 mm or less. Since the detecting means detects a change in magnetic flux affecting the rod-shaped core, the resolution of the sensor is determined by the thickness of the tip of the rod-shaped core. The surface of the coin has fine irregularities, but the width of the tip of the rod-shaped core in the relative movement direction is 2 mm.
By doing so, it is possible to detect the uneven shape of the coin surface with the resolution required for discriminating coins.

In the surface shape detecting device according to the present invention, the tips of a large number of rod-shaped cores arranged in a line at predetermined intervals are arranged on the same plane, and the tips of the large number of rod-shaped cores are uneven in a magnetic field. A detection means for detecting a change in magnetic flux generated due to the uneven shape of the measured object is provided on each of the rod-shaped cores, facing the measured object surface having,
The unevenness in a predetermined range of the measured object is detected from the output of the detecting means. Therefore, the detecting means constitutes a line sensor used to face the object to be measured. Since the output of each detecting means changes according to the uneven shape of the surface of the object to which the tip of the rod-shaped core faces, it is possible to detect the uneven shape at the position where each detecting means of the surface of the object faces. .

According to a ninth aspect of the present invention, there is provided a surface shape detecting device in which the width of the tip of a large number of rod-shaped cores is made smaller than the width of the concave or convex portion of the concavo-convex shape, and the detecting means is wound around the rod-shaped core. And a magnetoresistive element attached to the detection coil or the rod-shaped core. Since the detecting means detects a change in magnetic flux affecting the rod-shaped core, the resolution of the sensor is determined by the fineness of the tip of the rod-shaped core. That is, by making the width of the tip of the rod-shaped core smaller than the width of the concave or convex portion of the concave / convex shape to be detected, the concave / convex shape of the DUT is detected with a finer resolution than the concave / convex shape. Further, by using a detection coil or a magnetoresistive element as each detecting means, a change in magnetic flux caused by the unevenness of the surface of the object to be measured is electrically detected.

[0018] In the surface shape detecting device according to the tenth aspect, a plurality of sets of a large number of rod-shaped cores arranged in a row and separated from each other are arranged.
The detecting means detects a concavo-convex shape in a predetermined range in a row direction and a direction in which a plurality of sets are arranged. Therefore, the detecting means is arranged two-dimensionally in the vertical and horizontal directions, and it is possible to detect the uneven shape in a predetermined range of the object at once without moving the tip of the rod-shaped core relative to the object. it can.

Further, in the surface shape detecting device according to the present invention, the predetermined range formed by arranging a plurality of sets of a plurality of rod-shaped cores spaced apart in a line is set to a range larger than the size of the measured object. ing. Therefore, the uneven shape of the entire surface of the object to be measured can be detected at a time without moving the tip of the rod-shaped core relative to the object to be measured.

According to a twelfth aspect of the present invention, the same number of auxiliary cores for forming a magnetic flux path having the same width as the rod-shaped core are integrally formed on both sides of the rod-shaped core. It is. Therefore, an auxiliary core is formed separately from the rod-shaped core provided with the detection means,
By winding an excitation coil for generating a magnetic field through which the device under test passes around the auxiliary core, the excitation coil can be arranged independently of the detection means.

Further, in the surface shape detecting device according to the thirteenth aspect, an exciting coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the exciting coil. Therefore, the magnetic field penetrating the DUT changes in a short period corresponding to the high-frequency signal, and it is possible to detect fine irregularities.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of the present invention will be described below in detail based on the best mode shown in the drawings.

FIGS. 1 to 3 show an embodiment of a surface shape detecting apparatus to which the present invention is applied. This surface shape detecting device arranges the tips of a large number of rod-shaped cores 3 arranged in a line at a predetermined interval on the same plane, and attaches the tips of a large number of rod-shaped cores 3 to an object 10 having irregularities in a magnetic field.
In order to detect the change in magnetic flux generated due to the uneven shape of the DUT 10 on each of the rod-shaped cores 3 so as to be relatively movably opposed to the surface of the rod-shaped core 3 in a direction orthogonal to the arrangement direction of the tips of the rod-shaped cores 3. The output of the detecting means 5 is A / D-converted at a predetermined timing and stored in the memory 25. The data stored in the memory 25 is
Is to detect the uneven shape in a predetermined range of the above.

Here, the operation when the DUT 10 having irregularities and made of metal or magnetic material relatively moves in the direction orthogonal to the arrangement direction of the tips of the rod-shaped cores 3 is described as one rod-shaped core 3. It will be described using FIG.

Now, as shown in FIG. 4, assuming that the relative movement direction of the DUT 10 is the direction of the arrow in FIG. 4, the width w of the distal end surface 3a of each rod-shaped core 3 in the movement direction, ie, the rod-shaped core 3 The length w of two sides along the relative movement direction among the four sides of the distal end surface 3a of the third 3 is set smaller than the width of the uneven shape to be detected. For example, when the DUT 10 is a coin, a value smaller than the width of the concave or convex portion of the uneven shape to be detected on the surface of the coin 10, for example, 2 m
The length w of the distal end surface 3a of the rod-shaped core 3 along the relative movement direction is set to a value of m or less. Note that a value smaller than the width of the concave or convex portion of the concave / convex shape to be detected does not necessarily mean that the width is smaller than the minimum width of the concave or convex portion, and is necessary based on the width to be detected. The resolution may be determined so as to obtain the desired resolution. When the object to be measured 10 is a coin, if the width w is larger than 2 mm, the resolution of detection is generally coarse with respect to the uneven shape on the surface of the coin 10, making it difficult to detect fine uneven shape. The data used for authenticity determination is inferior to the case where the resolution is 2 mm or less. However, it is not always necessary to set the width w to 2 mm or less, and it is important to set the width w according to the width of the uneven shape of the DUT 10 to be detected and the required resolution.

When it is sufficient to roughly detect the unevenness, it is not necessary to set the width w to be smaller than the width of the unevenness. There is no problem if the resolution is satisfied.

The irregularities to be detected in the object 10 are often mixed with irregularities of various widths. Generally, the width of the rod-shaped core 3 is determined based on the minimum width of the irregularities. It is good to set w. For example, FIG.
In the case of detecting the irregular shape of a one-yen coin (material: aluminum) shown in (b), as shown in (B), the minimum width of the irregular shape to be detected excluding fine characters is the convex portion of the outer edge. The width w is set on the basis of the convex portion of the outer edge. If the width w is set to a smaller value based on the minimum width, it is possible to detect all the concavo-convex shapes. This makes it possible to detect the uneven shape satisfactorily even if the relative movement locus of the rod-shaped core 3 is, for example, the P line or the Q line in FIG. However, it is not necessary to set the width w to a value smaller than this with respect to the convex portion of the outer edge, for example, when it is sufficient to detect the uneven shape of the pattern portion without detecting the shape of the convex portion of the outer edge In this case, the width w of the rod-shaped core 3 may be smaller than the smallest width among the widths of the concavo-convex shape of the pattern portion to be detected.
For example, in the case of FIG. 13B, the width of the concavo-convex shape to be detected, for example, the width of the bar-shaped core 3
May be set to a small value. In other words, it is only necessary to determine the width of the concave / convex shape to be detected to be detected and to make the width smaller than the width. In this case, it is possible to clearly detect irregularities having a width of a size desired to be detected, but it is also possible to roughly understand shapes of irregularities having a small width which need not be detected.

The detection means 5 is, for example, a detection coil wound around the rod-shaped core 3. Further, auxiliary cores 7 for forming a magnetic flux passage having the same width as the rod-shaped core 3 are integrally formed on both sides of the rod-shaped core 3 with respect to the above-mentioned relative movement direction. The excitation coil 6 is wound around the auxiliary core 7. In addition, the auxiliary core 7 does not necessarily need to be formed on both sides of the rod-shaped coil 3, and the auxiliary core 7 may be formed on only one of them. The formation of the auxiliary cores 7 on both sides may be omitted. In this case, the exciting coil 6 may be wound around the rod-shaped core 3.

As shown in FIG. 5, a high-frequency signal 14 is applied to each excitation coil 6 as an excitation signal.
Generates a magnetic field in the space in which. When the DUT 10 having a metal part or the like passes through this magnetic field, the magnetic flux changes. The degree of the change in the magnetic flux varies depending on the distance between the tip end surface 3a of the rod-shaped core 3 and the DUT 10 and the material of the metal of the DUT 10. The output of the detection coil 5 changes accordingly. After the output of each detection coil 5 is amplified by the amplifier circuit 11 of the detection signal circuit 27, it is half-wave rectified by the detection circuit 12 and the peak hold circuit 13 and subjected to envelope detection, and is proportional to the uneven shape of the DUT 10. It becomes a waveform analog signal. The order of amplification and detection may be reversed.
Then, as shown in FIG. 1, the analog signals of all the detection coils 5 are supplied to an analog multiplexer 26. The analog multiplexer 26 sequentially supplies the analog signal of each detection coil 5 to the A / D converter 29 at a predetermined timing based on a pulse from the synchronous clock 28. A
The digital signals converted by the / D converter 29 are sequentially stored in the memory 25. When the device under test 10 is, for example, a metal, the eddy current generated in the device under test 10 reduces the magnetic flux affecting the rod-shaped core 3, so that the output signal of the detection coil 5 changes. When the device under test 10 is, for example, a magnetic material, the leakage signal of the magnetic flux from the device under test 10 is reduced, so that the output signal of the detection coil 5 is changed. Thus, the unevenness of the surface can be detected not only in the case where the object to be measured 10 is a metal or the like but also in the case of a magnetic body or the like.

In this surface shape detecting device, each core 3, 7
The coils 5 and 6 are arranged in a line in a direction perpendicular to the relative movement direction, and constitute a line sensor 1. The line sensor 1 is arranged such that the device under test 10 relatively moves in a magnetic field generated by each excitation coil 6. For example, when used as a coin identification sensor incorporated in a coin identification device or the like of a vending machine, the line sensor 1 is arranged near the coin passage so that the coin passes through the magnetic field generated by each excitation coil 6. To

Now, regarding the detection coil 5 provided on the rod-shaped core 3 located at the center in the longitudinal direction of the line sensor 1,
That is, when the detection coil 5 provided on the rod-shaped core 3 opposed to the center position when the coin 10 as the measured object relatively moves is examined, the detection signal circuit 27 corresponding to the detection coil 5 indicates that the coin 10 With the relative movement of
For example, an output signal shown in FIG. 6 is obtained. This output signal becomes low corresponding to the convex portion of the coin 10 and becomes high corresponding to the concave portion. Until the coin 10 is opposed to the rod-shaped core 3, the output is higher than in the case where the coin 10 corresponds to the concave portion,
A similar output can be obtained if there is a hole in the middle. That is, the waveform of the output signal corresponds to the uneven shape of the surface of the coin 10, but at the same time, information 21 relating to the difference in height between the edge and the center of the coin 10, information 22 relating to the width of the edge, Information 23 on the diameter, information 24 on the material and thickness, and the like can be obtained. Therefore, when used as a coin identification sensor, it is possible to simultaneously detect such information 21 to 24 in addition to the information on the surface irregularities.

As described above, each of the detection signal circuits 27 connected to the detection coil 5 constituting the line sensor 1 outputs coins 10 along the relative movement locus of the corresponding rod-shaped core 3.
The analog signal having a waveform proportional to the uneven shape of the surface is output. The output signal of each detection signal circuit 27 is sequentially A / D-converted at a predetermined timing by an analog multiplexer 26 and an A / D converter 29, and is stored in a memory 25.
Is stored. That is, as shown by a circle in FIG.
0 and the line sensor 1 are relatively moved once, the coin 1
Data on the uneven shape of the surface of 0 is sampled in a mesh form, and the entire surface of the coin 10 can be detected. That is, the uneven shape in the range in which the line sensor 1 relatively moves is detected. The use of the line sensor 1 as a coin identification sensor is merely an example, and is not limited to coin identification.

As described above, if the output of the line sensor 1 is used, as shown by a circle in FIG. The data is sampled in a mesh,
The entire surface of the coin 10 can be detected, but if necessary, at one point when the center of the coin 10 passes through the line sensor 1, or at this time, the movement of the coin 10 is temporarily stopped. Thus, even if the detection signal from each of the detection coils 5 constituting the line sensor 1 is detected at this time, a detection result on the vertical unevenness in the central portion of the coin 10 can be obtained. In FIG. 13A, the detection result of the uneven shape at this time can detect the vertical uneven shape passing through the center of the coin.

Further, a large number of line sensors 1 are provided in the horizontal direction so as to include the entire area to be detected, or
Lined up adjacently so that a larger area is formed,
When the predetermined position or the whole of the coin 10 enters the area, the movement of the coin is stopped, and each line sensor 1
If the detection signal from each of the detection coils 5 is detected, the entire surface of the coin 10 can be detected even in a stopped state. At this time, by arranging the line sensors arranged in the horizontal direction one by one as shown in FIG. 10, the entire uneven shape can be more uniformly detected.

That is, by disposing the rod-shaped core 3 two-dimensionally in the vertical and horizontal directions, the surface shape of the DUT 10 can be changed once without moving the rod-shaped core 3 relatively to the DUT 10. Can be detected.

In the surface shape detecting device of this embodiment, the line sensor 1 is formed by integrally forming a large number of rod-shaped cores 3 and auxiliary cores 7 from a rectangular parallelepiped ferrite block 18. That is, as shown in FIG. 8, the ferrite block 18 shown in FIG.
a and the step 18b are machined to the state shown in FIG. Next, a predetermined number of grooves 18c are machined in the ferrite block 18 at appropriate intervals to manufacture the core body 2 in which the rod-shaped cores 3 and the auxiliary cores 7 are integrally formed as shown in FIG. Thus, a large number of rod-shaped cores 3 and auxiliary cores 7
Can be integrally formed by machining, since the base side can be configured in a state of being connected as one block, a large number of rod-shaped cores 3 and auxiliary cores 7 can be accurately arranged at predetermined intervals.

However, it is not always necessary to integrally form each rod-shaped core 3 and auxiliary core 7 from one ferrite block 18, and a predetermined number of rod-shaped cores 3 are added to a ferrite block 18 shorter than the ferrite block shown in FIG. Alternatively, the line sensor 1 having a predetermined length may be formed by joining a plurality of members each having the auxiliary core 7 formed thereon. Alternatively, as shown in FIG. 9, the line sensor 1 is configured by arranging a large number of core bodies 2 each having one rod-shaped core 3 and two auxiliary cores 7 formed thereon and joining the core bodies 2 to, for example, a ceramic plate 30. You may.

The above embodiments are examples of preferred embodiments of the present invention, but are not limited thereto, and various modifications can be made without departing from the gist of the present invention. For example, in the above description, a coin is described as the object to be measured. However, the present invention can detect the uneven shape of the surface of various objects made of metal, magnetic material, or the like.

Although the line sensor 1 is configured by arranging the rod-shaped cores 3 and the like in a line, the line sensor 1 may be configured by arranging the rod-shaped cores 3 in a plurality of lines. That is, a plurality of rod-shaped cores 3 arranged in a row and spaced apart are arranged in the relative movement direction of the DUT 10, and the rod-shaped cores 3 in the rear row are located between the rod-shaped cores 3 in the front row in this relative movement direction. It may be arranged as follows. In FIG. 10, for example, two rod-shaped cores 3 arranged in a row are arranged in a relative movement direction of two sets of DUTs 10, for example.
A state is shown in which the rod-shaped cores 3 in the second row are located between the rod-shaped cores 3 in the first row. Rod-shaped cores 3 and 2 in the first row
Since the rod-shaped cores 3 in the rows are alternately arranged, the relative movement trajectories of the rod-shaped cores 3 in each row do not overlap, and the number of the rod-shaped cores 3 is increased to increase the surface shape of the DUT 10 in a dense state. Can be detected. For example, the interval between the rod-shaped cores 3 in a row cannot be reduced too much due to structural or processing restrictions, or the interval between the rod-shaped cores 3 must be increased in order to prevent magnetic interference between adjacent detection coils 5. Even in a case where the object 10 is not present, the object to be measured 10 can be detected by increasing the number of rows of the rod-shaped cores 3 so that the relative movement locus of the rod-shaped cores 3 is made dense.

In the above description, the detection means is the detection coil 5 wound around the rod-shaped core 3.
Instead, a magnetoresistive element for detecting a change in magnetic flux caused by the uneven shape may be attached to the rod-shaped core 3.

In the above description, two coils, ie, the detection coil 5 and the excitation coil 6, are provided. However, it is not always necessary to provide the two coils 5 and 6, and these are configured as one coil. Is also good. In this case, the circuit is configured so that excitation can be performed by one coil and at the same time, a change in inductance in the coil can be detected.
What is necessary is just to detect the change of magnetic flux based on this detection result.

Further, the signal applied to the excitation coil 6 is not necessarily limited to a high-frequency signal, but may be a signal corresponding to the DUT 10 or its detection resolution. However, when used as a coin identification sensor, it is preferable to use an AC signal having a frequency of 1 kHz to 10 MHz. If the frequency is less than 1 kHz, the resolution of data for discriminating the type and authenticity of the coin is inferior. If the frequency exceeds 10 MHz, the impedance rises, driving the sensor becomes difficult, and the magnetic circuit becomes harder. This is because the jump noise between signal wirings that does not pass through increases.

[0043]

Next, in order to examine the relationship between the width w of the tip end surface 3a of the rod-shaped core 3 and the resolution of the unevenness detection, the surface shape of a 500-yen coin (material: white copper) was changed by changing the value of the width w. An experiment to detect was performed. When the width of the unevenness to be detected is about 1 mm, the waveform of the output signal of the detection coil 5 when the width w is 0.5 mm is shown in FIG. 11, and the detection coil 5 when the width w is 3 mm is shown in FIG. 3 shows the waveform of the output signal of FIG. When the width w is set to 3 mm (FIG. 12), the waveform of the output signal becomes flat as a whole, and information 21 (FIG. 6) regarding the difference between the height and the edge of the 500 yen coin is obtained. ), Information about the diameter 23, information about the thickness of the material 24, etc., can be confirmed, but it was difficult to detect the unevenness of the surface. On the other hand, when the width w is 0.5 mm (FIG. 1)
In 1), the change in the shape of the output signal satisfactorily follows the change in the surface shape of the 500 yen coin. Thus, it was confirmed that by reducing the width w, it was possible to detect fine features of fine irregularities better. In addition, it was found that by setting the width w to 0.5 mm, it was possible to obtain a resolution sufficient for use as a sensor for discriminating the type and authenticity of coins.

[0044]

As described above, in the surface shape detecting device according to the first aspect, the tips of a large number of rod-shaped cores which are arranged in a line at predetermined intervals are arranged on the same plane, and the number of rod-shaped cores is reduced. In the magnetic field, the tip is opposed to the uneven surface of the object to be measured so as to be relatively movable in a direction orthogonal to the arrangement direction, and detects a change in magnetic flux generated in each of the rod-shaped cores due to the uneven shape of the object to be measured. The output of the detection means is A / D converted at a predetermined timing and stored in a memory, and a predetermined range of unevenness is detected from the data stored in the memory. A sensor can be configured to detect non-contact irregularities on the entire surface of the object to be measured by one scan. In addition, since the magnetic change is detected by providing the detecting means on the rod-shaped cores arranged in a line, the structure of the line sensor is simplified, and the manufacturing cost can be reduced.

Further, in the surface shape detecting device according to the second aspect, the width of the tips of the plurality of rod-shaped cores in the relative movement direction is made smaller than the width of the uneven shape to be detected. The uneven shape of the object to be measured can be detected with a fine resolution. Further, since the detection means is a detection coil wound on a rod-shaped core or a magnetoresistive effect element attached to the rod-shaped core, it is possible to electrically detect a change in magnetic flux caused by the unevenness of the surface of the object to be measured. it can.

Further, in the surface shape detecting device according to the third aspect, a plurality of sets of a plurality of rod-shaped cores which are spaced apart in a line are arranged in the relative movement direction, and the rear side is located between the rod-shaped cores in the front row in the relative movement direction. Since the rod-shaped cores in the row are arranged so as to be positioned, it is possible to increase the number of the rod-shaped cores and detect the surface shape of the object to be measured in a dense state, and maintain such a dense state. The magnetic effect of adjacent detecting means can be prevented by widening the interval between the rod-shaped cores.

In the surface shape detecting device according to the fourth aspect, the same number of auxiliary cores for forming a magnetic flux passage having the same width as the rod-shaped core are integrated on both sides of the rod-shaped core with respect to the relative movement direction. Therefore, the exciting coil can be wound around the auxiliary core, the exciting coil can be arranged independently of the detecting means, and the detection sensitivity of the line sensor can be improved.

In this case, the rod-shaped core and the auxiliary core are formed integrally from one magnetic material block, and the object to be measured is made of metal or magnetic material. May be.

In the surface shape detecting device according to the present invention, the exciting coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the exciting coil. Changes in a short period corresponding to the high-frequency signal, and it is possible to detect fine irregularities.

Further, in the surface shape detecting device according to the seventh aspect, the object to be measured is a coin, and the width of the tip in the moving direction of the rod-shaped core is 2 mm or less, so that the coin has the resolution required for discriminating the coin. The uneven shape of the surface can be detected. In addition, the coin material, diameter and the like can be detected simultaneously with the uneven shape of the coin surface.

In the surface shape detecting device according to the present invention, the tips of a large number of rod-shaped cores arranged in a line at predetermined intervals are arranged on the same plane, and the tips of the many rod-shaped cores are uneven in a magnetic field. A detection means for detecting a change in magnetic flux generated due to the uneven shape of the measured object is provided on each of the rod-shaped cores, facing the measured object surface having,
Since the unevenness in a predetermined range of the object to be measured is detected from the output of the detecting means, the detecting means constitutes a line sensor, and the unevenness on the surface of the object to be measured can be detected in a non-contact manner. In addition, since the magnetic change is detected by providing the detecting means on the rod-shaped cores arranged in a line, the structure is simplified and the manufacturing cost can be reduced.

In the surface shape detecting device according to the ninth aspect, the width of the tip of each of the plurality of rod-shaped cores is made smaller than the width of the concave or convex portion of the concave / convex shape to be detected. The uneven shape of the object to be measured can be detected with a fine resolution. Further, since the detection means is a detection coil wound on a rod-shaped core or a magnetoresistive effect element attached to the rod-shaped core, it is possible to electrically detect a change in magnetic flux caused by the unevenness of the surface of the object to be measured. it can.

Further, in the surface shape detecting device according to the tenth aspect, a plurality of sets of a large number of rod-shaped cores spaced apart in a line are arranged, and the detecting means detects a concave and convex shape in a predetermined range in the direction in which the plurality of sets are arranged in a line. With this configuration, the detecting means is arranged two-dimensionally in the vertical and horizontal directions, and it is possible to detect the unevenness in a predetermined range on the surface of the measured object in a non-contact manner. Also, 2
Since the magnetic change is detected by providing the detecting means on the rod-shaped cores arranged in a three-dimensional manner, the structure is simplified and the manufacturing cost can be reduced.

In the surface shape detecting device according to the eleventh aspect, the predetermined range formed by arranging a plurality of sets of a plurality of rod-shaped cores spaced apart in a line is set to a range larger than the size of the object to be measured. Therefore, the uneven shape of the whole object to be measured can be detected at a time without moving the tips of the bar-shaped cores arranged vertically and horizontally relative to the object to be measured.

Further, in the surface shape detecting device according to the twelfth aspect, the same number of auxiliary cores for forming magnetic flux passages having the same width as the rod-shaped core are formed on both sides of the rod-shaped core therebetween. In addition, the exciting coil can be wound around the auxiliary core, and the exciting coil can be arranged independently of the detecting means, so that the detection sensitivity can be improved.

Further, in the surface shape detecting device according to the thirteenth aspect, an exciting coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the exciting coil, so that a magnetic field penetrating the object to be measured is provided. Changes in a short period corresponding to the high-frequency signal, and it is possible to detect fine irregularities.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a schematic configuration of a surface shape detection device to which the present invention is applied.

FIG. 2 is an exploded perspective view of a line sensor of the surface shape detecting device of FIG.

FIG. 3 is a plan view of a line sensor of the surface shape detecting device of FIG. 1;

FIG. 4 is a perspective view showing a part of a line sensor for explaining a width w of a tip end of a rod-shaped core.

FIG. 5 is a circuit diagram showing a detection signal circuit of the surface shape detection device of FIG. 1;

6 is a diagram illustrating an example of an output signal of the detection signal circuit of FIG.

FIG. 7 is a conceptual diagram of detection by a line sensor of the surface shape detection device of FIG. 1;

8A and 8B schematically show a manufacturing process of a core body of the surface shape detecting device of FIG. 1, wherein FIG. 8A is a perspective view of a ferrite block,
(B) is a perspective view of a ferrite block in which grooves and steps are processed, and (c) is a perspective view of a ferrite block in which a rod-shaped core and an auxiliary core are processed.

FIG. 9 is a perspective view showing another embodiment of the core body of the surface shape detecting device of FIG. 1;

10 shows two rows of rod-shaped cores of the surface shape detecting device of FIG.
It is a top view which shows a mode that the group was arranged.

FIG. 11 is a diagram showing a sensor output when the unevenness of a 500-yen coin is measured with the width w of the tip end surface of the rod-shaped core being 0.5 mm.

FIG. 12 shows a case where the width w of the tip end surface of the rod-shaped core is 3 mm and 50
It is a figure which shows the sensor output at the time of measuring the uneven | corrugated shape of a 0 yen coin.

FIG. 13 is a view for explaining the relationship between the width w of the tip end surface of the rod-shaped core and the width of the uneven shape of the measured object;
FIG. 2A is a plan view of a one-yen coin (object to be measured), and FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Line sensor 2 Core body 3 Rod core 3a Tip surface 5 Detecting coil (detecting means) 6 Exciting coil 7 Auxiliary core 10 DUT 14 High frequency signal 25 Memory 29 A / D converter w Moving of DUT at tip of rod core Directional width

Claims (13)

[Claims] 1. The method according to claim 1, further comprising: arranging the tips of a plurality of rod-shaped cores arranged in a line at a predetermined interval on the same plane, and arranging the tips of the plurality of rod-shaped cores on the surface of the object having irregularities in a magnetic field in the arrangement direction. And a detection means for detecting a change in magnetic flux generated due to the uneven shape of the object to be measured is provided on each of the rod-shaped cores, and an output of the detection means is provided. A / D converted at a predetermined timing and stored in a memory, and a predetermined range of unevenness is detected from the data stored in the memory. 2. The method according to claim 1, wherein the width of the tip of each of the plurality of rod-shaped cores in the relative movement direction is smaller than the width of the concavo-convex shape to be detected, and the detecting means is a detection coil wound around the rod-shaped core or the rod-shaped core. The surface shape detecting device according to claim 1, wherein the device is a magnetoresistive effect element attached to a core. 3. A plurality of sets of a plurality of rod-shaped cores spaced apart from each other in a line are arranged in the relative movement direction, and a plurality of rod-shaped cores are arranged such that a rear row of rod-shaped cores is located between the front row of rod-shaped cores in the relative movement direction. The surface shape detecting device according to claim 1 or 2, wherein: 4. An auxiliary core for forming a magnetic flux passage having the same width as the rod-shaped core is integrally formed on both sides of the rod-shaped core with respect to the relative movement direction. The surface shape detecting device according to any one of claims 1 to 3, wherein: 5. The surface according to claim 4, wherein the rod-shaped core and the auxiliary core are integrally formed by one magnetic material block, and the object to be measured is made of metal or magnetic material. Shape detection device. 6. The surface according to claim 1, wherein an excitation coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the excitation coil. Shape detection device. 7. The surface shape detecting device according to claim 6, wherein the object to be measured is a coin, and a width of the tip of the rod-shaped core in the relative movement direction is 2 mm or less. 8. A plurality of rod-shaped cores, which are arranged in a line at predetermined intervals and are spaced apart from each other, are arranged on the same plane, and the ends of the plurality of rod-shaped cores are opposed to an uneven surface of an object to be measured in a magnetic field. Each of the rod-shaped cores is provided with a detecting means for detecting a change in magnetic flux generated due to the uneven shape of the object to be measured, and detects an uneven shape in a predetermined range of the object to be measured from an output of the detecting means. A surface shape detecting device characterized in that the surface shape detecting device is configured to perform the following. 9. The method according to claim 8, wherein the width of the tip of each of the plurality of rod-shaped cores is smaller than the width of the concave or convex portion of the concavo-convex shape, and the detecting means is a detection coil or the rod-shaped core wound around the rod-shaped core. 9. The surface shape detecting device according to claim 8, wherein the device is a magnetoresistive effect element attached to the device. 10. A plurality of rod-shaped cores arranged in a row and spaced apart from each other, and a plurality of sets of bar-shaped cores are arranged, and the detecting means detects a concave and convex shape in a predetermined range in the row direction and the direction in which the sets are arranged. The surface shape detection device according to claim 8 or 9, wherein 11. The predetermined range formed by arranging a plurality of sets of a plurality of rod-shaped cores spaced apart from each other in a line is set to a range larger than the size of the object to be measured. Item 11. The surface shape detecting device according to item 10. 12. An auxiliary core for forming a magnetic flux path having the same width as the rod-shaped core is integrally formed on both sides of the rod-shaped core in the same number as the rod-shaped core. 12. The surface shape detection device according to any one of 8 to 11. 13. The surface shape detecting device according to claim 12, wherein an excitation coil is wound around the rod-shaped core or the auxiliary core, and a high-frequency signal is applied to the excitation coil.