JPH11245153A - Method and device for heating slurry for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To safely heat slurry by preventing its deformation. SOLUTION: A slurry liquid feeding line 60 for liquid-feeding a slurry 42 in a slurry tank 44 to a heat exchanger 56 is shut off by closing a heat exchanging solenoid valve 64 and, in this state, a slurry heat exchanging pump 58 for liquid-feeding the slurry 42 to the heat exchanger 56 is driven. Thus, since the slurry heat exchanging pump is idly rotated to generate heat, the slurry 42 stored in the slurry tank 44 is heated by using this heat.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for heating a wire saw slurry, and more particularly to a method and apparatus for heating a wire saw slurry for cutting brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art A wire saw presses a workpiece while supplying a slurry to a high-speed running wire row, and cuts the workpiece into a large number of wafers by a lapping action of abrasive grains contained in the slurry. It is a device to do. By the way, in order to cut a wafer accurately with this wire saw, it is necessary to advance cutting while maintaining the slurry at a constant temperature (25 ° C. to 28 ° C.) throughout. For this reason, the slurry is kept at a constant temperature by passing the slurry through a heat exchanger during cutting. Also, when the apparatus is operating, the slurry is heated by a heater installed in the slurry tank, and cutting is started when the temperature of the slurry reaches an appropriate temperature.

[0003]

However, when the slurry in the tank is heated by using the heater during operation of the apparatus, the high-temperature heater comes into direct contact, and depending on the type of the slurry, the quality of the base oil is altered. There was also a risk of fire. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a slurry heating method and apparatus for a wire saw that can prevent the deterioration of the slurry and can safely heat the slurry.

[0004]

The invention according to claim 1 is
In order to achieve the above object, a wire saw that cuts the workpiece while circulating the slurry supplied to the wire row to the heat exchanger during cutting of the workpiece and controlling the slurry to a predetermined temperature, In a wire saw slurry heating method for heating a slurry previously stored in a slurry tank to a predetermined temperature before starting to cut a workpiece, a liquid sending method for sending the slurry stored in the slurry tank to the heat exchanger. After the line is cut off, the pump that feeds the slurry stored in the slurry tank to the heat exchanger is driven to run idle, and the slurry generated by using the pump to run idle is used for the slurry. The slurry stored in the tank is heated to a predetermined temperature.

According to the present invention, the liquid supply line for supplying the slurry in the slurry tank to the heat exchanger is shut off, and in this state, the pump for supplying the slurry to the heat exchanger is driven. As a result, the pump runs idle and generates heat. This heat is used to heat the slurry stored in the slurry tank. According to a third aspect of the present invention, in order to achieve the above object, the slurry supplied to the wire array during cutting of the workpiece is circulated and supplied to the heat exchanger to control the slurry at a predetermined temperature. A wire saw for cutting an object, wherein before the cutting of the workpiece is started, a slurry heating method for heating a slurry previously stored in a slurry tank to a predetermined temperature, wherein supply of cold water to the heat exchanger is performed. After shutting off, the pump that feeds the slurry stored in the slurry tank to the heat exchanger is driven to run idle, and the heat generated by idling the pump is used to operate the slurry tank. Is characterized by heating the slurry stored in the tank to a predetermined temperature.

According to the present invention, the supply of the cold water to the heat exchanger is shut off, and in this state, the pump for feeding the slurry in the slurry tank to the heat exchanger is driven. As a result, the pump runs idle and generates heat. This heat is used to heat the slurry stored in the slurry tank. In order to achieve the above object, the invention according to claim 5 circulates and supplies a slurry supplied to a row of wires via a nozzle to a heat exchanger during cutting of a workpiece to control the slurry at a predetermined temperature. A wire saw for cutting the workpiece while heating the slurry previously stored in the slurry tank to a predetermined temperature before starting the cutting of the workpiece, wherein the slurry is stored in the slurry tank. After shutting off a supply line for supplying the slurry to the nozzle, the pump is supplied with the slurry stored in the slurry tank to the nozzle, and the pump is operated idling, and the pump is operated idly. The slurry stored in the slurry tank is heated to a predetermined temperature using heat.

According to the present invention, the supply line for supplying the slurry in the slurry tank to the nozzle is shut off, and in this state, the pump for supplying the slurry to the nozzle is driven. As a result, the pump runs idle and generates heat. This heat is used to heat the slurry stored in the slurry tank. Further, in order to achieve the above object, the invention according to claim 7 circulates and supplies a slurry supplied to a wire row via a nozzle to a heat exchanger during cutting of a workpiece and controls the slurry to a predetermined temperature. A wire saw for cutting the workpiece while heating the slurry previously stored in the slurry tank to a predetermined temperature before starting the cutting of the workpiece, wherein the slurry is stored in the slurry tank. After shutting off a supply line for supplying the slurry to the heat exchanger, and a supply line for supplying the slurry stored in the slurry tank to the nozzle, the slurry stored in the slurry tank is removed. The first pump for feeding the liquid to the heat exchanger and the second pump for supplying the slurry stored in the slurry tank to the nozzles are driven to run idle, respectively. Characterized by heating the slurry by utilizing the heat generated is stored in the slurry tank by air operated flop and a second pump to a predetermined temperature.

According to the present invention, the liquid supply line for supplying the slurry in the slurry tank to the heat exchanger and the supply line for supplying the slurry in the slurry tank to the nozzle are shut off. And a second pump for supplying slurry to the nozzles. This causes each pump to run idle and generate heat, and this heat is used to heat the slurry stored in the slurry tank.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method and an apparatus for slurry heating of a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. First, a configuration of a wire saw to which a slurry heating method and apparatus according to the present invention is applied will be described.

FIG. 1 is an overall structural view of a wire saw 10. As shown in FIG. As shown in the figure, a wire 14 wound on a wire reel 12 passes through a wire running path formed by guide rollers 16, 16,... And has three grooved rollers 18A, 18A.
B, 18C. A large number of grooves are formed at a constant pitch on the outer periphery of the three grooved rollers 18A to 18C, and the wire 14 is sequentially wound around the grooves to form a horizontal wire row 20 on the upper surface. Is formed.

The wire 14 wound around the groove rollers 18A to 18C is connected to the groove rollers 18A to 18C.
The wire is wound on a wire reel on the other side (not shown) through a wire running path on the other side formed symmetrically with respect to C. Here, a motor (not shown) is connected to each of the pair of wire reels 12 and the groove roller 18C, and by driving these motors, the wire 14 travels between the pair of wire reels 12 at high speed. I do.

A wire guiding device 22, a dancer roller 24, and a wire cleaning device 26 are provided on the wire running paths formed on both sides of the wire row 20, respectively (only one side is shown). The wire guide device 22 is installed near both wire reels, and guides the wire 14 to be fed out from the wire reel 12 at a constant pitch on the payout side, and guides the wire 14 on the take-up side.
2 to guide the film to be wound at a constant pitch. The dancer roller 24 applies a certain tension to the traveling wire 14, and the wire cleaning device 26 removes the slurry (slurry) adhered during processing from the wire 14.

Above the wire row 20 is a wire row 2
A work feed table 28 that moves vertically with respect to 0 is installed. This work feed table 2
8 is provided with a tilting device 30, and an ingot 32 which is a workpiece is held at a lower portion of the tilting device 30. Then, the crystal orientation is adjusted by the tilting device so as to be cut at a predetermined crystal orientation.

In the wire saw 10 configured as described above, the cutting of the ingot 32 is performed as follows.
First, the ingot 32 is mounted on the tilting device 30,
The crystal orientation is adjusted. Next, a motor (not shown) is driven to rotate the wire reel 12 and the groove roller 18C at a high speed, thereby causing the wire 14 to run at a high speed. And
When the running of the wire 14 is stabilized, the work feed table 28 is lowered to move the wire train 20 at a high speed.
Is pressed against the ingot 32. At this time, the wire row 20
Is supplied from a nozzle (not shown), and the ingot 32 is cut into wafers by a lapping action of abrasive grains contained in the slurry.

Next, the configuration of the slurry heating device 40 according to the present invention applied to the above-described wire saw 10 will be described. As shown in FIG. 2, the slurry 42 supplied to the wire row 20 is stored in a slurry tank 44. The slurry 42 in the slurry tank 44 has an upper lid 44 a
Pumped by the slurry supply pump 46 installed above,
A slurry injection nozzle 50 via a slurry supply line 48,
50. And the slurry injection nozzle 5
A jet is injected from 0 and 50 toward the wire row 20.

As shown in FIG. 1, a slurry supply solenoid valve 52 is provided in the slurry supply line 48. When the slurry supply solenoid valve 52 is closed,
The slurry supply line 48 can be shut off. An oil pan 54 is provided below the wire row 20, and the slurry 42 supplied to the wire row 20 falls by its own weight and is collected by the oil pan 54. And
The slurry 42 collected in the oil pan 54 is returned to the slurry tank 44 via a slurry collection line 55.

Here, since the temperature of the slurry 42 recovered by the oil pan 54 is increased by absorbing the heat generated at the time of cutting, if the slurry 42 is returned to the slurry tank 44 as it is, the temperature of the slurry 42 in the tank is reduced. Rise. Therefore, the slurry in the slurry tank 44 is circulated and supplied to the heat exchanger 56 to exchange heat. This slurry tank 44
Is sent to the heat exchanger 56 by the slurry heat exchange pump 58 provided on the upper lid 44 a of the slurry tank 44, and the slurry 42 pumped by the slurry heat exchange pump 58 is sent to the slurry liquid sending line 60. Through the heat exchanger 5
Transfer to 6. Then, after heat exchange in the heat exchanger 58, the heat is returned to the slurry tank 44 via the slurry return liquid line 62.

A heat exchange electromagnetic valve 64 is provided in the slurry liquid supply line 60, and the heat exchange electromagnetic valve 6
By closing 4, the slurry liquid sending line 60 can be shut off. Similarly, a chilled water supply solenoid valve 68 is also connected to a chilled water supply line 66 for supplying chilled water to the heat exchanger 58.
The chilled water supply line 66 can be shut off by closing the chilled water supply electromagnetic valve 68.

If the slurry 42 is stored in a static state, the abrasive grains will settle. Therefore, in order to prevent this, a stirring blade 70 for stirring the slurry 42 is provided in the slurry tank 44. is set up. The stirring blade 70 is provided with a stirring motor 7 installed on the upper lid 44 a of the slurry tank 44.
2 and is rotated by driving the stirring motor 72, and the slurry 4 in the tank 44 is rotated.
Stir 2

Further, a temperature sensor 74 is provided in the slurry tank 44, and the temperature sensor 74 detects the temperature of the slurry 42 stored in the slurry tank 44. The detected temperature information is displayed on a monitor (not shown). Next, the operation of the embodiment of the slurry heating device 40 according to the present invention configured as described above will be described.

As described above, the slurry 42 supplied to the wire array 20 has a temperature suitable for its operation (25 ° C. to 28 ° C.).
° C, hereinafter referred to as "specified temperature". ), And it is desirable to perform cutting while always maintaining the temperature during cutting. By the way, when the wire saw 10 is operated or when the slurry 42 in the slurry tank 44 is replaced with a new one, the slurry 42 in the slurry tank 44 often cools down to the above-mentioned specified temperature. . In this case, it is necessary to heat the slurry 42 in the slurry tank 44 to increase the temperature to a specified temperature.

Therefore, the slurry heating device 4 of the present embodiment
At 0, the slurry 4 in the slurry tank 44 is
2 is heated to a specified temperature. First, a first method for heating the slurry 42 stored in the slurry tank 44 will be described. First, the operator checks the temperature of the slurry 42 in the slurry tank 44 from a display on a monitor (not shown). Then, after confirming that the temperature of the slurry 42 in the tank 44 has not reached the specified temperature, the heat exchange solenoid valve 64 is closed. Thereby, the slurry liquid sending line 60 is shut off.

Next, the stirring motor 72 is driven to rotate the stirring blade 70 to stir the slurry 42 in the slurry tank 44. Next, the slurry heat exchange pump 58 is driven,
The slurry 42 is sent from the slurry tank 44 to the heat exchanger 56. However, since the slurry liquid sending line 60 is shut off by the heat exchange electromagnetic valve 64 as described above, the slurry 42 is sent from the slurry tank 44 to the heat exchanger 56 even when the slurry heat exchange pump 58 is driven. It is not possible.
Therefore, the slurry heat exchange pump 58 is operated idle. As a result, the slurry heat exchange pump 58 generates heat.

Here, the slurry heat exchange pump 58
The heat generated by the slurry heat exchange pump 58 is transferred to the slurry tank 44 because it is provided on the upper lid 44 a of the slurry tank 44. And this slurry tank 44
Is absorbed by the slurry 42 in the tank 44, and the temperature of the slurry 42 rises. When the temperature of the slurry 42 in the tank 44 rises to the specified temperature, the operator stops driving the slurry heat exchange pump 58, and then opens the heat exchange solenoid valve 64. Then, the cutting of the ingot 32 is started.

Next, a second method for heating the slurry 42 stored in the slurry tank 44 will be described. As described above, the operator first checks the temperature of the slurry 42 in the slurry tank 44 from the display on the monitor. Then, after confirming that the temperature of the slurry 42 in the tank 44 has not reached the specified temperature, the electromagnetic valve 68 for supplying cold water is closed.
Thereby, the chilled water supply line 66 that supplies the chilled water to the heat exchanger 56 is shut off.

Next, the stirring motor 72 is driven to rotate the stirring blade 70 to stir the slurry 42 in the slurry tank 44. Next, the slurry heat exchange pump 58 is driven,
The slurry 42 is sent from the slurry tank 44 to the heat exchanger 56. Here, since the chilled water supply line 66 is shut off by the chilled water supply electromagnetic valve 68 as described above, heat is not exchanged even if the slurry 42 in the tank 44 is sent to the heat exchanger 56. Therefore, the slurry heat exchange pump 58 is operated idle. As a result, the slurry heat exchange pump 58 generates heat.

Therefore, similarly to the first method, the heat generated by the slurry heat exchange pump 58 is absorbed by the slurry 42 in the tank 44 via the slurry tank 44, and as a result, the slurry 42 in the tank 44 Temperature rises.
When the temperature of the slurry 42 in the tank 44 has risen to the specified temperature, the operator stops driving the slurry heat exchange pump 58, and then opens the cold water supply electromagnetic valve 68. Then, the cutting of the ingot 32 is started.

Next, a third method for heating the slurry 42 stored in the slurry tank 44 will be described. As described above, the operator first checks the temperature of the slurry 42 in the slurry tank 44 from the display on the monitor. Then, after confirming that the temperature of the slurry 42 in the tank 44 has not reached the specified temperature, the slurry supply electromagnetic valve 52 is closed. Thereby, the slurry supply line 48 for supplying the slurry 42 to the slurry injection nozzles 50, 50 is shut off.

Next, the stirring motor 72 is driven to rotate the stirring blade 70 to stir the slurry 42 in the slurry tank 44. Next, the slurry supply pump 46 is driven to supply the slurry from the slurry tank 44 to the slurry injection nozzles 50, 50. Here, since the slurry supply line 48 is shut off by the slurry supply electromagnetic valve 52 as described above, the slurry 42 is not supplied to the slurry injection nozzles 50, 50. Therefore, the slurry supply pump 46 is operated idle. As a result, the slurry supply pump 46 generates heat.

Therefore, similarly to the first and second methods, the heat generated by the slurry supply pump 46 is absorbed by the slurry 42 in the tank 44 via the slurry tank 44, and as a result, The temperature of the slurry 42 increases. When the temperature of the slurry 42 in the tank 44 rises to a specified temperature, the operator
6 is stopped, and then the electromagnetic valve 52 for slurry supply is opened. Then, the cutting of the ingot 32 is started.

Next, a fourth method for heating the slurry 42 stored in the slurry tank 44 will be described. First, the operator checks the temperature of the slurry 42 in the slurry tank 44 from a display on a monitor (not shown). Then, after confirming that the temperature of the slurry 42 in the tank 44 has not reached the specified temperature, the electromagnetic valve 64 for heat exchange and the electromagnetic valve 52 for slurry supply are closed. Thereby, the slurry liquid sending line 60 and the slurry supply line 48
Is shut off.

Next, the stirring motor 72 is driven to rotate the stirring blade 70 to stir the slurry 42 in the slurry tank 44. Next, the slurry heat exchange pump 58 is driven,
The slurry 42 is supplied from the slurry tank 44 to the heat exchanger 56, and the slurry supply pump 46 is driven to supply the slurry from the slurry tank 44 to the slurry injection nozzles 50.

Here, as described above, the slurry feed line 6
Since 0 is shut off by the heat exchange solenoid valve 64,
Even if the slurry heat exchange pump 58 is driven, the slurry tank 4
4, the slurry 42 cannot be sent to the heat exchanger 56. Therefore, the slurry heat exchange pump 58 is operated idle. As a result, the slurry heat exchange pump 58 generates heat.

Also, as described above, the slurry supply line 48
Is shut off by the slurry supply solenoid valve 52, so that the slurry 42 is not supplied to the slurry injection nozzles 50, 50. Therefore, the slurry supply pump 46 is operated idle. As a result, the slurry supply pump 46 generates heat. Therefore, the heat generated by the slurry supply pump 46 and the slurry heat exchange pump 58 is transferred to the slurry 42 in the tank 44 via the slurry tank 44.
As a result, the temperature of the slurry 42 in the tank 44 increases.

The operator operates the slurry 42 in the tank 44.
When the temperature has risen to the specified temperature, the driving of the slurry heat exchange pump 58 and the slurry supply pump 46 is stopped,
Next, the heat exchange solenoid valve 64 and the slurry supply solenoid valve 5
Open 2. Then, the cutting of the ingot 32 is started. As described above, according to the slurry heating method of the present embodiment, the heat generated by the slurry heat exchange pump 58 or the slurry supply pump 46 by operating the slurry heat exchange pump 58 or the slurry supply pump 46 idle. Is used to heat the slurry 42 in the slurry tank 44.

Therefore, unlike the conventional method in which the slurry is directly heated by the heater, the base oil of the slurry 42 does not deteriorate. Further, there is no possibility that the slurry 42 will be ignited. Further, since there is no need to separately install a heater, it is possible to contribute to downsizing of the apparatus.

Note that the wire saw normally performs a warm-up operation at the time of operation.
Since the operation can be performed during the warm-up operation, the operation of the wire saw can be performed extremely efficiently. Also,
In the present embodiment, the opening / closing operation of each electromagnetic valve and the driving of each pump and motor are determined by the operator, but this may be automatically controlled by the CPU.

[0038]

As described above, according to the present invention,
Since the slurry is heated by using the heat generated by the idle operation of the pump, the quality of the slurry can be prevented as in the conventional method in which the slurry is directly heated by the heater. In addition, the wire saw can be operated safely without danger of firing the slurry.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a wire saw.

FIG. 2 is a configuration diagram of an embodiment of a slurry heating apparatus for a wire saw according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Wire saw 14 ... Wire 18 ... Groove roller 20 ... Wire row 32 ... Ingot 40 ... Slurry heating device 42 ... Slurry 44 ... Slurry tank 46 ... Slurry supply pump 48 ... Slurry supply line 50 ... Slurry injection nozzle 52 ... Slurry supply electromagnetic Valve 54 ... Oil pan 56 ... Heat exchanger 58 ... Slurry heat exchange pump 60 ... Slurry liquid sending line 66 ... Cold water supply line 68 ... Cold water supply electromagnetic valve 70 ... Stirring blade 72 ... Stirring motor 74 ... Temperature sensor

Claims (8)

[Claims] 1. A wire saw for circulating and supplying a slurry supplied to a wire row to a heat exchanger during cutting of a workpiece and cutting the workpiece while controlling the temperature to a predetermined temperature, wherein the workpiece is cut. In the method for heating a wire saw in which a slurry previously stored in a slurry tank is heated to a predetermined temperature before the start of cutting, a liquid sending line for sending the slurry stored in the slurry tank to the heat exchanger is shut off. After that, the slurry stored in the slurry tank is driven idle by driving a pump that feeds the slurry to the heat exchanger, and the heat generated by idling the pump is used to enter the slurry tank. A method for heating a wire saw slurry, comprising heating a stored slurry to a predetermined temperature. 2. A wire saw for circulating slurry supplied to a wire array during cutting of a workpiece to a heat exchanger and cutting the workpiece while controlling the temperature to a predetermined temperature, wherein the workpiece is cut. In a slurry heating apparatus for a wire saw that heats a slurry stored in a slurry tank in advance to a predetermined temperature before the start of cutting, a liquid sending line that sends the slurry stored in the slurry tank to the heat exchanger, A valve that opens and closes the liquid sending line, and a pump that is provided in contact with the slurry tank and sends the slurry stored in the slurry tank to the heat exchanger through the liquid sending line. After closing the valve and shutting off the liquid supply line, the pump is driven to run idle and stored in the slurry tank using heat generated by running the pump idle. Slurry heater wire saw, characterized in that the heated slurry to a predetermined temperature. 3. A wire saw for circulating and supplying a slurry supplied to a wire row to a heat exchanger during cutting of a workpiece and cutting the workpiece while controlling the temperature to a predetermined temperature. In the method for heating a wire saw, in which a slurry previously stored in a slurry tank is heated to a predetermined temperature before cutting of the slurry is started, the supply of cold water to the heat exchanger is shut off, and then the slurry stored in the slurry tank. Driving the pump that feeds the heat to the heat exchanger to perform idle operation, and heating the slurry stored in the slurry tank to a predetermined temperature by using heat generated by idling the pump. A method for heating a wire saw slurry. 4. A wire saw for circulating and supplying a slurry supplied to a wire row to a heat exchanger during cutting of a workpiece and cutting the workpiece while controlling the temperature to a predetermined temperature, wherein the workpiece is cut. In a slurry heating device for a wire saw for heating a slurry stored in a slurry tank in advance to a predetermined temperature before starting cutting of the cooling water, a cooling water supply line for supplying cooling water to the heat exchanger, and opening and closing the cooling water line A valve, a liquid sending line for sending the slurry stored in the slurry tank to the heat exchanger, and a liquid sending line provided in contact with the slurry tank and passing the slurry stored in the slurry tank through the liquid sending line. And a pump for sending the liquid to the heat exchanger via the heat exchanger. After closing the valve and shutting off the cooling water supply line, the pump is driven to run idle, and the pump is run idle. Slurry heater wire saw, characterized by heating the slurry by utilizing the heat generated is stored in the slurry tank by a predetermined temperature. 5. A wire saw for circulating and supplying a slurry supplied to a wire array via a nozzle to a heat exchanger during cutting of a workpiece, and cutting the workpiece while controlling the temperature to a predetermined temperature, In the method for heating a wire saw in which a slurry previously stored in a slurry tank is heated to a predetermined temperature before starting the cutting of the workpiece, a supply line for supplying the slurry stored in the slurry tank to the nozzle is shut off. After that, the slurry stored in the slurry tank was driven idle by driving a pump that supplies the slurry to the nozzle, and the slurry was stored in the slurry tank by utilizing heat generated by idling the pump. A slurry heating method for a wire saw, comprising heating the slurry to a predetermined temperature. 6. A wire saw for circulating and supplying a slurry supplied to a wire array via a nozzle to a heat exchanger during cutting of a workpiece and cutting the workpiece while controlling the temperature to a predetermined temperature, In a slurry heating apparatus for a wire saw for heating a slurry stored in a slurry tank in advance to a predetermined temperature before starting the cutting of the workpiece, a supply line for supplying the slurry stored in the slurry tank to the nozzle, A valve that opens and closes the supply line, and a pump that is provided in contact with the slurry tank and supplies the slurry stored in the slurry tank to the nozzle through the supply line. After shutting off the supply line, the pump is driven to run idle, and the slurry Slurry heater wire saw, which comprises heating the slurry reserved in the click to a predetermined temperature. 7. A wire saw for circulating a slurry supplied to a wire array via a nozzle during cutting of a workpiece to a heat exchanger and cutting the workpiece while controlling the temperature to a predetermined temperature, In the method for heating a wire saw, in which a slurry previously stored in a slurry tank is heated to a predetermined temperature before starting the cutting of the workpiece, a method of feeding the slurry stored in the slurry tank to the heat exchanger. A liquid line, and, after shutting off a supply line for supplying the slurry stored in the slurry tank to the nozzle, a first pump for sending the slurry stored in the slurry tank to the heat exchanger, and By driving a second pump for supplying the slurry stored in the slurry tank to the nozzle, the pumps are operated idle, and the first pump and the second pump are operated idle. Slurry method of heating wire saw, which comprises heating a by utilizing the heat raw stored in the slurry tank slurry to a predetermined temperature. 8. A wire saw for circulating slurry supplied to a wire array via a nozzle to a heat exchanger during cutting of a workpiece and cutting the workpiece while controlling the temperature to a predetermined temperature, In a wire saw slurry heating device for heating a slurry previously stored in a slurry tank to a predetermined temperature before starting the cutting of the workpiece, sending a slurry stored in the slurry tank to the heat exchanger. A liquid line, a first valve that opens and closes the liquid supply line, and a liquid supply line that is provided in contact with the slurry tank and supplies the slurry stored in the slurry tank to the heat exchanger via the liquid supply line. A first pump, a supply line for supplying the slurry stored in the slurry tank to the nozzle, a second valve for opening and closing the supply line, and a contact valve provided in contact with the slurry tank. A second pump for supplying the slurry stored in the slurry tank to the nozzle via the supply line, wherein the first valve and the second valve are closed and the liquid sending line and the supply line are closed. After shutting off, the first pump and the second pump are driven to run idle, respectively, and stored in the slurry tank using heat generated by idling the first pump and the second pump. A slurry heating device for a wire saw, wherein the slurry is heated to a predetermined temperature.