JPH1124057A - Position detector for glass base plate for liquid crystal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry a base plate to an adequate position and to safely house the base plate to a cassette by processing an image obtained from a CCD camera provided corresponding to the right and left parts or one corner part of the base plate. SOLUTION: The CCD cameras 10a and 10b are provided bilaterally symmetrically with respect to the central axis of the cassette 2 in a width direction, so that the main axis of the line of sight is inclined at the angle of α with respect to the surface of the base plate 3 at the same dimensional interval as the width of the base plate 3. The cameras 10a and 10b can be moved along a camera moving shaft 25 in an X axis direction by a driving source M1, and lifted along a camera moving shaft 26 in a Z axis direction by a driving source M2. Displacement amount from the reference position of the right and the left corner parts of the base plate 3 is fetched by using the cameras 10a and 10b, a rotation angle from the reference position and the deviation value from a central position are calculated, and the base plate 3 is taken out from the cassette 2 in a state where a gap in a right-and-left direction becomes maximum based on the data.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a liquid crystal manufacturing process, which detects a shift between the center position of the substrate and the direction of rotation when the glass substrate is transported into a liquid crystal manufacturing process apparatus. The present invention relates to an improvement in a liquid crystal glass substrate position detecting device for realizing the transfer of a substrate to a position and the safe storage in a cassette to prevent the occurrence of process defects and the destruction of the substrate.

[0002]

2. Description of the Related Art A glass substrate for a liquid crystal is formed by depositing a thin film on a surface of a glass plate by various processing devices or etching to form a necessary transistor, and the liquid crystal is controlled by the transistor formed on the surface of the substrate. The structure is such that characters and figures are displayed by controlling the transmittance of light from the back surface of the substrate. These thin film deposition and etching processes are called processes, and each process is implemented as an apparatus. These liquid crystal glass substrates are generally rectangular, and the size thereof is increasing year by year.
It is manufactured up to about 50 mm x 0.7 t.

On the other hand, these substrates are housed in a substrate housing case generally called a cassette in units of a dozen or more, and are transported between various processing apparatuses in units of the cassette. The transferred substrate is taken out of the cassette by a transfer device such as a robot of various processing devices, transferred to the inside of the device, and subjected to necessary processing. After the processing is completed, the sheet is returned to the cassette again by the transfer device and transferred to the next device.

[Conventional Example 1] FIG. 9 is a conceptual view of a general manufacturing process apparatus for a liquid crystal glass substrate, wherein 1 is a robot, 2 is a cassette, 3 is a liquid crystal glass substrate, and 4 is this substrate 3. 1 shows a processing chamber. The substrate 3 stored in the cassette 2 is transported to the processing chamber 4 by the robot 1 and is collected by the robot 1 again into the cassette 2 or another cassette (not shown) after the processing is completed. Here, the transferred substrate needs to be accurately set at a predetermined position in the processing chamber. However, in the configuration of FIG.
Only moves between the positions taught in advance, the individual substrates 3 are conveyed while containing the positional deviation of the substrates 3 generated inside the cassette 2 and are carried into the processing chamber 4 or the cassette 2.

[0005] These process apparatuses have a positioning mechanism for the cassette 2 itself, so that the position of the cassette 2 is accurate. It is made slightly larger than the width, and the substrate 3 in the cassette 2 may be shifted from the cassette 2 at each of the center position and the rotation direction.
It can be said that the positioning mechanism of the cassette 2 alone is not sufficient.

When the cassette 2 is transferred to the processing apparatus, the substrate 3 inside the cassette 2 is not located at the center of the cassette 2 and stops at one edge of the cassette 2 in most cases. Normally, the center of the substrate 3 is not aligned. When the substrate 1 is taken out of the cassette 2 as it is by the robot 1 and transported to the processing chamber 4 of the processing apparatus, the substrate 3 is misaligned to the processing chamber 4 inside the processing apparatus. The substrate 3 may not be set, and in an extreme case, the substrate 3 may be damaged by contact with the processing apparatus.

Therefore, a position correcting mechanism shown in FIG. 10 is provided as a means for correcting the positional deviation.
In FIG. 10, 2 is a cassette, 3 is a substrate, and 5 is a mechanism for sandwiching the left and right ends of the substrate 3 with pushers to adjust the position of the substrate 3 in the left and right direction. It is connected to a drive source such as a cylinder. The right and left ends of the cassette 2 are provided with windows necessary for the pusher 5 to sandwich the substrate 3. If the cylinder now operates, the right and left pushers 5 move uniformly to the substrate 3 side and push the substrate 3. If the interval when the pusher 5 stops is slightly larger than the width of the substrate 3 in the left-right direction, the positions of all the substrates 3 in the cassette 2 in the left-right direction have been corrected.

[Conventional Example 2] FIG. 11 is an external view of another prior art example, in which a sensor detects a shift between the center position of a substrate and a rotation direction generated inside a cassette, and detects a shift from a detected value of the sensor. The amount is calculated, and the table on which the substrate is placed is driven according to the calculation result to correct the displacement.

In FIG. 11, reference numeral 1 denotes a robot, reference numeral 2 denotes a cassette, and reference numeral 3 denotes a substrate. The robot 1 transports the substrate 3 to a positioning device 6, where it is positioned and then transported to a processing chamber 4. The positioning device 6 includes a turntable that sucks and turns the substrate 3 and a drive source that moves the turntable in the left-right and front-back directions, and has a sensor that detects each edge of the substrate 3 in the left-right and front-back directions. These sensors calculate the three components ΔX and ΔY of displacement from the reference position of the substrate 3 and the rotation angle Δθ, first correct the rotation angle Δθ at the turntable, and then calculate ΔX and ΔY at the turntable drive source. to correct. (See, for example,
-33232)

[0010]

When the cassette is transported to the manufacturing process apparatus for position correction in the front-rear direction when the process apparatus shown in FIGS. 9 and 10 is used, only the position correction in the left-right direction is performed. In order to align the cassettes, the operator must once tilt the cassettes manually to align the end faces of the substrates, and then install the cassettes on the cassette table of the process apparatus. In addition, in this method, since a mechanical force is applied to both ends of the substrate, chipping (chipping) occurs at the edge of the substrate, which causes cracking of the substrate, not only lowering the yield but also causing chipping every time the process is repeated. To grow. For this reason, if cracks occur in the final step, all the steps up to that point become useless and the loss becomes enormous. In addition, dust is generated due to the contact type, and this dust forms a fatally defective product. Furthermore, since the cassette weighs more than ten kilograms, and even if it is very difficult to carry the cassette, even the operation of aligning the cassette is forced by hand, there is a danger of erroneous operation and forgotten operation.

In the system of FIG. 11, although the problems of the systems of FIGS. 9 and 10 can be solved, since the substrate is transported to a positioning device provided separately to correct the positional deviation, the positioning is performed. For this reason, there is a problem that a considerably long time is required and the transport efficiency is reduced.

[0012]

SUMMARY OF THE INVENTION The present invention is an apparatus for detecting the position of a specific glass substrate in a cassette containing a plurality of liquid crystal glass substrates, provided for each of the left and right portions of the substrate. An image obtained from a pair of CCD cameras or a CCD camera provided corresponding to one corner is processed to calculate a shift amount of a center position of the substrate from a reference position,
This is a liquid crystal glass substrate position detecting device that stores the calculation result in combination with the slot number of the cassette in which the substrate is stored, and reads out and outputs it as required.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing an embodiment of the apparatus for detecting the position of a glass substrate for a liquid crystal according to the present invention. Figure (A)
Is a plan view, (B) is a side view, and (C) is a front view. In the figure, 2 is a cassette, 3 is a substrate, 10
a and 10b are CCD cameras, 25 is a CCD camera 10
a and 10b are camera movement axes for moving in the X-axis direction, M1 is a driving source thereof, 26 is a CCD camera 10a, 10
A camera movement axis for raising and lowering b in the Z-axis direction, and M2 is a driving source thereof. The CCD cameras 10a and 10b are provided symmetrically with respect to the center axis in the width direction of the cassette 2 at the same dimensional interval as the width of the substrate 3 and with the principal axis of the line of sight inclined by α with respect to the surface of the substrate 3. ing. The CCD cameras 10a and 10b can be moved along a camera movement axis 25 in the X-axis direction by a drive source M1, and can be moved up and down along a camera movement axis 26 in a Z-axis direction by a drive source M2. .

FIG. 2 shows a CCD camera 10 obtained when the substrate 3 is set at a correct position with respect to the cassette 2.
10A and 10B show images of FIG. 10A, and FIG.
An image from the camera 10b is shown, and FIG. 2B shows an image from the CCD camera 10a.

In FIG. 1, CCD cameras 10a and 10b
When an image of the substrate 3 in which the centers of the cassette 2 and the substrate 3 coincide with each other and the respective sides of the cassette 2 and the substrate 3 in the width direction and the length direction are parallel is taken, As shown in FIGS. 2A and 2B, the left and right corners of the substrate 3 are installed at the center.

FIG. 3 shows a CCD camera 10 obtained when the substrate 3 is set at an arbitrary position with respect to the cassette 2.
FIGS. 3A and 3B are diagrams illustrating examples of images of FIGS.
An image from the CD camera 10b is shown, and FIG. 2B shows an image from the CCD camera 10a. In the figure, dx1, dx
Reference numeral 2 denotes a shift amount in the width direction of each of the left and right corners from the reference position of the substrate 3, and dy1 and dy2 denote shift amounts in the length direction.

FIG. 4 is an explanatory diagram showing a state in which the amount of deviation of the center position of the substrate 3 from the reference position is obtained. As shown in the figure, the reference position of the center of the substrate 3 is set to C1 (0, 0).
XY coordinates are provided, and the center position of the substrate 3 to be measured is C
2 (dx, dy), the reference positions of the left and right corners of the substrate 3 and the position of the substrate 3 to be measured are A1, B1, and A, respectively.
2, B2. The width (X-axis direction) dimension of the substrate 3 is 2
a, when the length (Y-axis direction) is 2b, the reference point A
1 are (a, -b), and the coordinates of the reference point B1 are (-a, -b).
-B). The coordinates of the points A2 and B2 are because the principal axes of the lines of sight of the CCD cameras 10a and 10b are inclined by α with respect to the surface of the substrate 3.

(Equation 5) Becomes From the above, the rotation angle θ of the substrate 3 with respect to the reference position is

(Equation 6) Can be calculated from Next, the center position C2 of the substrate 3
The deviation amount of (dx, dy) from the reference position C1 (0, 0) is

(Equation 7) Can be calculated from

Next, the aforementioned CCD cameras 10a, 10a
The allowable range of the inclination angle α of the principal axis of the line of sight with respect to the surface of the substrate is determined. FIG. 5 is an explanatory diagram showing a state in which an allowable range of the inclination angle α of the main axes of the CCD cameras 10a and 10b with respect to the surface of the substrate 3 is obtained. In the figure, the CCD camera 10 of the substrate 3a when the substrate is stored at the innermost position
a, the distance between the end on the side of 10b and the end of the cassette shown in the figure is q, and the pitch interval between the substrate 3a and the substrate 3b immediately above it is p, the allowable range of the inclination angle α is: CCD
As long as the field of view of the cameras 10a and 10b is not obstructed by the substrate 3b on the target substrate 3a,

(Equation 8) The larger the value in the range, the less the camera is out of focus and less blurred.

The value of the inclination angle α is, for example, the pitch interval p = 22 [m] in the cassette 2 for storing the substrate 3 whose dimensions are 650 [mm] in length and 550 [mm] in width.
m] and the maximum value q of the deviation amount in the depth direction is q = 10 [mm], so that 0 <α ≦ 65.6 [degrees].
α = 60 [degrees] is used.

The angles at which the CCD cameras 10a and 10b can take the end of the substrate 3 are determined when the end of the substrate 3 is stored at a position near the end of the cassette and when the substrate 3 is stored at the innermost position. It's a little different than when However, the maximum value q of the displacement amount in the depth direction of the substrate 3 is considerably shorter than the shortest distance g between the lenses of the CCD cameras 10a and 10b and the reference position shown in FIG. It does not affect the accuracy such as quantity.

Next, the required size of the field of view of the CCD cameras 10a and 10b is determined. In FIG. 2 described above, CC
The vertical length of the visual field of the D cameras 10a and 10b is d, and the horizontal length is c. Assuming that the difference between the width 2a of the substrate 3 and the width of the cassette 2 is Δx, it is necessary to satisfy c> Δx in order for the corner of the substrate 3 to be within the field of view. Further, the maximum value of the amount of displacement of the substrate 3 in the depth direction is q, and the CCD camera 10
Since the inclination angles of a and 10b are α, the vertical length d of the visual field needs to be equal to or more than q · sin α.

In the above-described apparatus for detecting the position of a glass substrate for liquid crystal, a pair of CCD cameras are provided on the left and right sides to determine the amount of displacement of the center position of the substrate. Is shown below. FIG. 6 is an explanatory diagram showing a state in which the deviation amount of the center position of the substrate 3 from the reference position is obtained by using one CCD camera. In the figure, the same reference numerals as those in FIG. In FIG. 6, the displacements in the X-axis direction and the Y-axis direction between the reference position B1 of the corner of the substrate 3 and the corner B2 of the substrate 3 to be measured are dx1 and dy1, respectively. Is assumed to be θ as shown. If the relationship between the side A2B2 of the substrate 3 to be measured and the frame of the CCD camera 10b is represented by distances xc and yc as shown in the figure, the distance yc is the distance on the screen of the CCD camera 10b, so that The distance is yc / sin α, where α is the inclination angle of the CCD camera 10b.

Using these parameters, since the coordinates of the reference position B1 of the corner of the substrate 3 are (-a, -b), the coordinates of the corner B2 of the substrate 3 to be measured are

(Equation 9) And the rotation angle θ is

(Equation 10) Becomes The coordinates (Mx, My) of the midpoint M of the edge A2B2 of the substrate 3 to be measured are

[Equation 11] Becomes Therefore, the deviation amount (dx, dy) of the center position C2 of the substrate 3 to be measured from the reference position C1 is

(Equation 12) Can be determined by:

FIG. 7 is a view showing an example of a manufacturing process apparatus provided with the liquid crystal glass substrate position detecting device of the present invention.
Referring to FIG. 1, reference numeral 1 denotes a robot, for example, four degrees of freedom, that is, an R axis for moving the hand forward or backward from the center of the robot 1 to the radiation, and rotating the hand and the arm on which the hand is mounted about the center of the robot 1. The θ axis to move, the Z axis to move the arm up and down in the vertical direction, and the robot 1
And the X-axis for moving the X-axis parallel to the cassette 27. Reference numeral 30 denotes a control device which controls the robot 1
Control of image processing of D cameras 10a and 10b and CCD
The drive source M1 or M2 for moving the cameras 10a and 10b along the camera movement axis 25 in the X-axis direction or the camera movement axis 26 in the Z-axis direction is controlled. A stage 28 deposits a thin film on the surface of the substrate or performs etching.

FIG. 8 is a block diagram showing an example of a control device for implementing the liquid crystal glass substrate position detecting device of the present invention. In FIG. 1, the control device 30 includes a host control unit 11, a robot control unit 12, and a camera control unit 18. The robot control unit 12 includes an input circuit 17 for inputting a signal of a slot number of a cassette for storing or removing a substrate from the host control unit 11, a memory 14 for storing information such as a slot number, a camera control unit 18, An input / output circuit 15 for exchanging data with a central processing unit 13 (hereinafter referred to as a CPU 1) that outputs a signal for moving the robot 1 to a servo control circuit 16 in accordance with a command from the host control unit 11.
3) and a servo control circuit 16 for controlling the robot 1 by a signal from the CPU 13.

The camera controller 18 includes an input circuit 24 for inputting a cassette number signal for detecting the position of the substrate from the upper controller 11, an input / output circuit 20 for exchanging signals with the robot controller 12, and a cassette number. And the like according to a command from the higher-level control unit 11,
Central processing unit 19 (hereinafter, referred to as CPU 19) that outputs a command signal for imaging or movement of CCD cameras 10a and 10b to camera control circuit 22 or servo control circuit 23.
And a signal from the CPU 19 to input the CCD camera 10
Camera control circuit 22 for capturing image data of a and 10b
And a signal from the CPU 19 to input the CCD camera 10
drive sources M1 and Z for moving a, 10b in the X-axis direction
And a servo control circuit 23 for controlling a drive source M2 that moves in the axial direction.

7 and 8, the operation when the robot 1 takes out a substrate from the cassette 27 and transfers it to the stage 28 will be described. First, the host control unit 11 outputs a command signal to the camera control unit 18 for detecting the position of the board stored in the cassette 27. When the camera controller 18 inputs this signal through the input circuit 24, the CPU 19 reads out the position information of the cassette 27 stored in the memory 21 and outputs a command signal to the servo control circuit 23. The driving sources M1 and M2 are driven in accordance with the signals to drive the CCD camera 10
a and 10b are moved along a camera movement axis 25 in the X-axis direction and a camera movement axis 26 in the Z-axis direction,
7 is moved to the camera setting position of the lowermost first slot.

Next, in accordance with a command signal from the CPU 19, the camera control circuit 22 passes through the CCD cameras 10a and 10b and the displacement amounts (dx1, dy1), (dx2, dy2) of the left and right corners A2, B2 of the substrate 3 from the reference position. ) Is calculated, the rotational angles θ from the reference position and the deviation amounts dx and dy of the center position C2 are calculated, and this data is stored in the memory 21 together with the slot number of the cassette 27. Next, the servo control circuit 23 drives the drive source M2 to drive the CCD camera 1
0a and 10b are moved to the second slot one stage higher, and the camera control circuit 22 passes through the CCD cameras 10a and 10b, the displacement amounts (dx1, dy1) of the left and right corners A2, B2 from the reference position, (Dx2, dy2) is fetched, the rotational angle θ from the reference position and the deviation dx, dy of the center position C2 are calculated, and this data is stored in the memory 21 together with the cassette 27 number. The same applies to CC
The D cameras 10a and 10b are moved to the uppermost slot of the cassette 27, and the rotation angle θ from the reference position and the shift amounts dx and dy of the center position C2 are stored in the memory 21 together with the slot numbers of the cassette 27.

Next, the host control unit 11
, A command to transfer the substrate stored in the first slot of the cassette 27 to the stage 28 is given. When the input circuit 17 of the robot control unit 12 receives a command signal from the host control unit 11, the CPU 13 outputs a command signal to the servo control circuit 16, and the servo control circuit 16 stores the command signal in the memory 14 based on the command signal. The robot reads the positional information of the cassette 27 and drives the X-axis, Z-axis and θ-axis of the robot 1 to move the robot 1 to a position before the first slot of the cassette 27. At this time, the arm of the robot 1 has not been extended yet.

Next, in response to a command signal from the upper control unit 11, the rotation angle from the reference position of the substrate stored in the first slot of the cassette 27 stored in the memory 21 of the camera control unit 18 when the previous position was detected. The deviation of θ and the center position C2 is read out, and output to the input / output circuit 15 of the robot controller 12 through the input / output circuit 20, and these information are temporarily stored in the memory 14. The CPU 13 outputs a command signal to the servo control circuit 16 based on the position information of the board, drives the R axis of the robot 1 to move the hand below the board, and further moves the X axis and the θ axis. It is driven to make the center position of the hand coincide with the center position C2 of the substrate, and the deviation of the rotation angle θ is set to zero. Next, the Z axis of the robot 1 is driven to raise the hand and lift the substrate.
Then, the X-axis, R-axis and θ-axis of the robot 1 are simultaneously driven to move the substrate to the reference position. At this time, only the Z axis is located slightly above the reference position, and the front and rear and left and right gaps between the substrate and the cassette are shown in FIG.
As shown in FIG.

Next, the R-axis of the robot 1 is retracted, the substrate is taken out of the cassette 27, and the X-axis, θ-axis and Z-axis of the robot 1 are driven to move the substrate to the front of the stage 28. Then, the R axis of the robot 1 is extended, and the substrate is moved right above the stage 28. At this time, the center position of the substrate coincides with the center position of the stage 28. Next, the substrate is placed on the stage 28 by lowering the Z axis.

As another method for removing a substrate from the cassette, the center position of the hand is made coincident with the reference position of the substrate, and after lifting the substrate, the X-axis, R-axis and θ-axis are driven to drive the substrate. The front and rear and left and right gaps between the robot and the cassette are made equal, and then the robot 1
The substrate may be taken out of the cassette by retracting the R axis.

For the substrates stored in the slots of all the cassettes, the amount of displacement of the right and left corners of each substrate from the reference position is previously taken into the camera control unit 18, and the rotation angle and the center from the reference position are taken. Calculate the position shift amount and set the cassette number and slot number to 1 for each slot.
After storing the data as a set of data, the data such as the shift amount of the center position of the board to be transferred is read out from the memory 21 of the camera control section 18 in accordance with the board transfer command from the host control section 11, and the data is stored in the data. The robot 1 may be driven based on this.

In the above-described method for calculating the shift amount of the substrate from the reference position, the shift amount of the center position of the substrate is calculated. However, the shift amount of the corner may be calculated instead of the center position. good.

[0042]

According to the present invention, when a specific substrate in a cassette accommodating a plurality of glass substrates for liquid crystal is transferred to a processing chamber in a liquid crystal manufacturing process apparatus, a reference is made to the left and right corners of the substrate using a CCD camera. The amount of displacement from the position is taken in, the rotation angle from the reference position and the amount of deviation of the center position are calculated, and the substrate is taken out of the cassette with the left-right gap maximized based on this data. Without taking
In addition, since there is no need to rub the cassette, it is possible to minimize the occurrence of chipping and dust, which have conventionally caused the cracking of the substrate, and to eliminate the need for manual alignment. Further, when the robot is transferring a substrate from the cassette to the processing chamber, the amount of displacement of another substrate can be calculated, so that the time of the substrate production process can be reduced. Furthermore, before the robot transports the substrates, the amount of deviation of the center position of each substrate from the reference position for all cassettes is calculated, so that the substrate is stored in which slot of which cassette and at what position. Since it is possible to confirm whether or not the substrate is transported, the substrate can be efficiently taken out from the slot, and the productivity of the substrate can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a liquid crystal glass substrate position detecting device of the present invention.

FIG. 2 is a view showing images of CCD cameras 10a and 10b obtained when a substrate 3 is set at a correct position with respect to a cassette 2 in the present invention.

FIG. 3 shows a CCD camera 1 obtained when a substrate 3 is set at an arbitrary position with respect to a cassette 2 in the present invention.
The figure which shows the example of the image of 0a, 10b.

FIG. 4 is an explanatory diagram showing a state in which a shift amount of a center position of a substrate 3 from a reference position is obtained in the present invention.

FIG. 5 shows the CCD cameras 10a and 10b according to the present invention.
FIG. 4 is an explanatory diagram showing a state in which an allowable range of an inclination angle α of a main shaft with respect to the surface of a substrate 3 is obtained.

FIG. 6 is an explanatory diagram showing a state in which a shift amount of a center position of a substrate 3 from a reference position is obtained by using one CCD camera in the present invention.

FIG. 7 is a diagram showing an example of a manufacturing process apparatus provided with the liquid crystal glass substrate position detecting device of the present invention.

FIG. 8 is a block diagram showing an example of a control device for implementing the liquid crystal glass substrate position detecting device of the present invention.

FIG. 9 is a view showing the concept of a general manufacturing process apparatus for a glass substrate for liquid crystal.

FIG. 10 is a diagram showing an example of a conventional position correction mechanism.

FIG. 11 is a diagram showing an example of another conventional position correction mechanism.

[Explanation of symbols]

 Reference Signs List 1 robot 2, 27 cassette 3 (glass for liquid crystal) substrate 10a, 10b CCD camera 11 host control unit 12 robot control unit 18 camera control unit 25 camera movement axis in X axis direction 26 camera movement axis in Z axis direction 28 stage 30 control apparatus

Claims (4)

[Claims] 1. A device for detecting the position of a specific glass substrate in a cassette containing a plurality of glass substrates for liquid crystal, comprising: (a) a device having the same dimensional interval as the width of the substrate and a position relative to the surface of the substrate; A pair of CCDs which are provided symmetrically with respect to the center axis in the width direction of the cassette by inclining the line of sight main axis by α.
A camera; (b) CCD camera positioning means for moving the pair of CCD cameras up and down in the longitudinal axis direction of the cassette; and (c) processing an image obtained by the pair of CCD cameras. Image processing means for obtaining the displacement amounts (dx1, dy1) and (dx2, dy2) of the left and right corners of the substrate from the reference position; (d) the displacement amount and the width dimension (X-axis direction dimension) 2a of the substrate , Length dimension (dimension in the Y-axis direction) 2
b and the rotation angle of the substrate from the reference position And the shift amount of the center position And (e) storing the position data of the board obtained by the calculating means in combination with the slot number of the cassette in which the board is stored, and reading out and outputting it as required. An apparatus for detecting a position of a glass substrate for a liquid crystal, comprising: a storage unit. 2. A device for detecting a position of a specific glass substrate in a cassette containing a plurality of glass substrates for liquid crystal, wherein: (a) a device for detecting a position of a glass substrate corresponding to one corner of the substrate; (B) a CCD camera positioning means for raising and lowering the CCD camera in the longitudinal axis direction of the cassette;
(C) processing the corner image of the substrate obtained by the CCD camera to calculate the amount of displacement (dx1, dy1) of the corner of the substrate from a reference position and the rotation angle of the front side of the substrate from the reference direction; (D) the amount of variation (dx1, dy1), rotation angle (θ), width dimension (X-axis dimension) 2a, length dimension (Y-axis dimension) of (d) ) 2
and the amount of deviation of the center position of the substrate from the reference position from b. And (e) storing the position data of the board obtained by the calculating means in combination with the slot number of the cassette in which the board is stored, and reading and outputting the data upon request. An apparatus for detecting a position of a glass substrate for a liquid crystal, comprising: a storage unit. 3. The calculation of each data of the rotation angle and the shift amount of the center position is executed in advance for all the substrates stored in the cassettes, and the calculation result is stored in the storage unit in which the substrates are stored. 3. The glass for a liquid crystal according to claim 1, wherein the glass is stored in combination with a cassette number and a slot number of the cassette, and the stored data is read out and output to the substrate transport device in response to the substrate transport instruction. Substrate position detector. 4. The inclination angle α of the CCD camera is the distance between the CCD camera-side end of the substrate and the CCD camera-side end of the cassette when the substrate is stored in the innermost part of the cassette. From (q) and the interval P between the slots of the cassette, And the difference Δx between the width of the substrate and the width of the cassette, the visual field of the CCD camera is set to a horizontal width Δx and a vertical width q · sinα or more centering on a corner position at a reference position of the substrate. The position detecting device for a glass substrate for liquid crystal according to any one of claims 1 to 3, wherein: