JPH11237346A - Method and apparatus for inspection and measurement of uv resin - Google Patents

Method and apparatus for inspection and measurement of uv resin

Info

Publication number
JPH11237346A
JPH11237346A JP3829898A JP3829898A JPH11237346A JP H11237346 A JPH11237346 A JP H11237346A JP 3829898 A JP3829898 A JP 3829898A JP 3829898 A JP3829898 A JP 3829898A JP H11237346 A JPH11237346 A JP H11237346A
Authority
JP
Japan
Prior art keywords
color
resin
image
ultraviolet light
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3829898A
Other languages
Japanese (ja)
Inventor
Tatsuro Mihashi
龍郎 三橋
Hiroaki Ota
博昭 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP3829898A priority Critical patent/JPH11237346A/en
Publication of JPH11237346A publication Critical patent/JPH11237346A/en
Pending legal-status Critical Current

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Coating Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a method and an apparatus by which a resin can be inspected and measured automatically and with high accuracy, by irradiating an object to be inspected with near ultraviolet light, making the resin emit light, and fetching the image of the object to be inspected. SOLUTION: When a UV resin is irradiated with near ultraviolet light (at a wavelength of 315 to about 380 nm), blue light is emitted due to the characteristic of the UV resin. An object 16 to be inspected, which is coated with a liquid UV resin, is irradiated with near ultraviolet light by a near ultraviolet light source 14 and with color light by a light source 15 comprising a color filter, and its image is fetched by a color imaging device 10 so as to be sent to a color extraction device 11. A color due to light emitted by the UV resin is extracted. The extracted color is binarized to a white color (in a luminance of 1), and other regions are binarized to a black color (in a luminance of 0) so as to be transferred to an image processor 12. When the color is extracted, light in a color (such as a yellow color, a red color or the like) is irradiated simultaneously by the light source 15 comprising the color filter, and the color can be extracted stably. The binarized image is transferred to the image processor 12, and the area, the shape or the like of the white color (in the luminance of 1) according to a defect item is measured so as to be judged.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、工業製品の組立
工程において、紫外線による化学反応により硬化する樹
脂(以下UV樹脂と称す)を用いて接着、封止、あるい
はマーキングする工程に付随するUV樹脂検査計測方法
および検査計測装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a UV resin attached to a step of bonding, sealing, or marking using a resin (hereinafter referred to as UV resin) which is cured by a chemical reaction due to ultraviolet rays in an assembly process of an industrial product. The present invention relates to an inspection measurement method and an inspection measurement device.

【0002】[0002]

【従来の技術】UV樹脂を用いて接着、封止、あるいは
マーキングする工程においては、UV樹脂の塗布量や塗
布領域を適正に制御することが重要なポイントである。
UV樹脂の塗布に関する主な不良項目は、樹脂塗布量過
多、樹脂塗布量不足、はみだし、気泡、異物混入等があ
る。完成品への不良混入を防止する目的で樹脂検査工程
を設けているが、従来技術においては前記樹脂不良を選
別する手段として目視による検査が行なわれている。
2. Description of the Related Art In the process of bonding, sealing, or marking using a UV resin, it is important to appropriately control the amount and area of application of the UV resin.
The main defective items related to the application of the UV resin include an excessive amount of the resin applied, an insufficient amount of the resin applied, a protrusion, bubbles, foreign matters, and the like. Although a resin inspection process is provided for the purpose of preventing defective components from being mixed into finished products, in the prior art, visual inspection is performed as means for selecting the resin defects.

【0003】しかし、目視による検査では、検査コスト
(人件費)が高く、数値による客観的判断が難しくて熟
練を要する等の課題があった。そこで、図6に示すよう
に、CCDカメラ等のモノクロ撮像装置40と、光学鏡
筒41と、画像処理装置42と、照明43を用いて、検
査対象物44を自動検査する試みがなされている。
However, the visual inspection has problems such as high inspection cost (personnel cost), difficulty in objective judgment by numerical values, and skill. Therefore, as shown in FIG. 6, an attempt has been made to automatically inspect the inspection object 44 using a monochrome imaging device 40 such as a CCD camera, an optical lens barrel 41, an image processing device 42, and illumination 43. .

【0004】[0004]

【発明が解決しようとする課題】しかし、図6に示した
自動検査では、一般にUV樹脂は透明であり、背景との
区別がつき難く、安定した検出を行うのは難しい。この
ような課題が存在するために、検査計測工程の安定化、
自動化、コストダウンが妨げられている。この発明は前
記課題を解決するものであり、自動で精度の高い検査計
測を可能とし、検査計測工程の安定化を実現するUV樹
脂検査計測方法および検査計測装置を提供することを目
的とする。
However, in the automatic inspection shown in FIG. 6, the UV resin is generally transparent, it is difficult to distinguish it from the background, and it is difficult to perform stable detection. Because of these issues, stabilization of the inspection and measurement process,
Automation and cost reduction are hindered. An object of the present invention is to solve the above-mentioned problem, and an object of the present invention is to provide a UV resin inspection and measurement method and an inspection and measurement apparatus that enable automatic and highly accurate inspection and measurement and realize a stable inspection and measurement process.

【0005】[0005]

【課題を解決するための手段】請求項1記載のUV樹脂
検査計測方法は、紫外線による化学反応により硬化させ
た樹脂の塗布状態を光学画像認識により検査計測する方
法であって、検査対象物に近紫外光を照射し、樹脂を発
光させて検査対象物の画像を取り込むことを特徴とする
ものである。
According to a first aspect of the present invention, there is provided a UV resin inspection and measurement method for inspecting and measuring an applied state of a resin cured by a chemical reaction using ultraviolet light by optical image recognition. The method is characterized by irradiating near-ultraviolet light and causing resin to emit light to capture an image of an inspection object.

【0006】請求項2記載のUV樹脂検査計測方法は、
請求項1において、画像取り込み時に近紫外光による発
光色と異なる色の光を近紫外光と同時に検査対象物に照
射することを特徴とするものである。請求項3記載のU
V樹脂検査計測装置は、検査対象物に近紫外光を照射す
る近紫外光源と、検査対象物の画像を取り込むカラー撮
像装置と、カラー撮像装置により取り込んだ画像を受け
取り色抽出を行う色抽出装置と、色抽出装置により色抽
出処理された画像の計測および判定を行う画像処理装置
とを備えたものである。
According to a second aspect of the present invention, there is provided a UV resin inspection and measurement method.
According to the first aspect, at the time of capturing an image, light having a color different from a color emitted by near-ultraviolet light is irradiated on the inspection object simultaneously with the near-ultraviolet light. U according to claim 3
The V-resin inspection and measurement device includes a near-ultraviolet light source that irradiates near-ultraviolet light to the inspection object, a color imaging device that captures an image of the inspection object, and a color extraction device that receives the image captured by the color imaging device and performs color extraction. And an image processing device for measuring and determining the image subjected to the color extraction processing by the color extraction device.

【0007】請求項4記載のUV樹脂検査計測装置は、
検査対象物に近紫外光を照射する近紫外光源と、近紫外
光による発光色と異なる色の光を検査対象物に照射する
色フィルタ付き光源と、検査対象物の画像を取り込むカ
ラー撮像装置と、カラー撮像装置により取り込んだ画像
を受け取り色抽出を行う色抽出装置と、色抽出装置によ
り色抽出処理された画像の計測および判定を行う画像処
理装置とを備えたものである。
According to a fourth aspect of the present invention, there is provided a UV resin inspection and measurement apparatus.
A near-ultraviolet light source that irradiates the inspection object with near-ultraviolet light, a light source with a color filter that irradiates the inspection object with light of a color different from the emission color of the near-ultraviolet light, and a color imaging device that captures an image of the inspection object. A color extraction device that receives an image captured by a color imaging device and performs color extraction, and an image processing device that measures and determines an image that has been subjected to color extraction processing by the color extraction device.

【0008】この発明のUV樹脂検査計測方法および検
査計測装置によると、UV樹脂による接着部分、封止部
分、あるいはマーキングの検査工程において、近紫外光
の照射により検査対象物に塗布したUV樹脂が発光色と
なり、背景との区別がつき易く、しかも近紫外光による
発光色と異なる色の光を検査対象物に同時に照射するこ
とで、より安定した色抽出を行うことができ、光学画像
認識による高精度で安定した自動検査が可能となる。
According to the method and the apparatus for inspecting and measuring a UV resin of the present invention, the UV resin applied to the object to be inspected by irradiating near-ultraviolet light in the inspection process of the bonding portion, the sealing portion, and the marking by the UV resin. It becomes a luminescent color and can be easily distinguished from the background.Moreover, by simultaneously irradiating the inspection object with light of a color different from the luminescent color of near-ultraviolet light, more stable color extraction can be performed, and optical image recognition can be performed. Highly accurate and stable automatic inspection becomes possible.

【0009】[0009]

【発明の実施の形態】図1に検査計測装置の構成図を示
す。図1において、10はカラーCCDカメラ等のカラ
ー撮像装置、11は色抽出装置、12は画像処理装置、
13は光学鏡筒、14は近紫外光源、15は色フィルタ
付き光源、16は検査対象物である。近紫外光(波長3
15〜380nm)をUV樹脂に照射すると、UV樹脂
の特性により青く発光する。液体状のUV樹脂の塗布さ
れた検査対象物16に、近紫外光源14により近紫外光
と、色フィルタ付き光源15より色光を照射し、カラー
撮像装置10にて画像を取り込み、色抽出装置11に送
る。色抽出装置11にてUV樹脂発光色を抽出し、抽出
色を白(輝度1)、その他の領域を黒(輝度0)に2値
化し、画像処理装置12に転送する。色抽出の際に、色
フィルタ付き光源15にて青と区別がつき易い色(例え
ば、黄,赤等)を同時に照射すると、安定した色抽出を
行うことができる。2値化画像を画像処理装置12に転
送し、不良項目に応じた白(輝度1)の面積,形状等を
計測し、判定を行う。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a configuration diagram of an inspection and measurement device. In FIG. 1, 10 is a color imaging device such as a color CCD camera, 11 is a color extraction device, 12 is an image processing device,
Reference numeral 13 denotes an optical column, 14 denotes a near ultraviolet light source, 15 denotes a light source with a color filter, and 16 denotes an inspection object. Near ultraviolet light (wavelength 3
(15 to 380 nm) irradiates the UV resin with blue light due to the characteristics of the UV resin. The inspection object 16 to which the liquid UV resin is applied is irradiated with near-ultraviolet light by the near-ultraviolet light source 14 and color light from the light source 15 with a color filter. Send to The UV resin emission color is extracted by the color extraction device 11, the extracted color is binarized into white (luminance 1), and the other areas are binarized into black (luminance 0), and transferred to the image processing device 12. At the time of color extraction, if a color (for example, yellow, red, or the like) that is easily distinguished from blue is simultaneously emitted from the light source 15 with a color filter, stable color extraction can be performed. The binarized image is transferred to the image processing device 12, and the area, shape, and the like of white (luminance 1) corresponding to the defective item are measured and determined.

【0010】次に、図1の検査計測装置を、半導体レー
ザ装置におけるUV樹脂の検査計測に応用した例につい
て説明する。図2は半導体レーザ装置の概略図である。
半導体レーザ装置は、モールド済みリードフレーム20
上に半導体レーザの発光素子,受光素子(図示なし)が
配置されており、その上方にレーザ光回折用のホログラ
ム素子21がUV樹脂22にて接着されている。ホログ
ラム素子21とモールド済みリードフレーム20の組立
手順は、モールド済みリードフレーム20のホログラム
素子21接着部分にUV樹脂22を塗布し、ホログラム
素子21を位置決めした後、紫外光を照射して固定す
る。さらに、パッケージの気密性を高めるために外側か
ら同じUV樹脂22を再塗布し、紫外光を照射して固定
する。
Next, an example in which the inspection and measurement apparatus of FIG. 1 is applied to inspection and measurement of UV resin in a semiconductor laser device will be described. FIG. 2 is a schematic diagram of a semiconductor laser device.
The semiconductor laser device has a molded lead frame 20.
A light emitting element and a light receiving element (not shown) of the semiconductor laser are arranged on the upper side, and a hologram element 21 for laser beam diffraction is bonded above the above with a UV resin 22. The procedure for assembling the hologram element 21 and the molded lead frame 20 is as follows. A UV resin 22 is applied to a portion where the hologram element 21 is bonded to the molded lead frame 20, and the hologram element 21 is positioned. Further, the same UV resin 22 is re-applied from the outside to improve the airtightness of the package, and is fixed by irradiating ultraviolet light.

【0011】この組立工程の後に、図1の検査計測装置
を用いて不良検査を行う。図3に画像処理の流れを示
す。近紫外光(近紫外光源14より照射)25と、黄色
光(色フィルタ付き光源15より照射)26を半導体レ
ーザ装置に照射し(図3(a))、カラー撮像装置10
にてカラー画像を取り込み、色抽出装置11にて樹脂発
光色(青)30を抽出する(図3(b))。抽出した樹
脂発光色を白(輝度1)、その他の色を黒(輝度0)に
2値化し(図3(c))、画像処理装置12に取り込
む。そして、画像処理装置12にて2値化画像を計測解
析することにより以下に示す不良の判定を行う。 (1)塗布量不足(図4中、35が樹脂不足) (2)塗布量過多(図5中、36が樹脂過多) (3)モールド面への樹脂付着(図5) 各々の判定方法は、 (1)塗布量不足 2値化画像(図3(c))の白(樹脂塗布領域)31の
面積を計測し、あらかじめサンプリング等により設定さ
れている良品の樹脂塗布領域の面積と比較し、あらかじ
め判定用に設定されている値を超えて小さければ塗布量
不足とする。 (2)塗布量過多 2値化画像(図3(c))の白(樹脂塗布領域)31の
面積を計測し、あらかじめサンプリング等により設定さ
れている良品の樹脂塗布領域の面積と比較し、あらかじ
め判定用に設定されている値を超えて大きければ塗布量
過多とする。 (3)モールド面への樹脂付着 モールド面上で樹脂の付着が不良となる領域をあらかじ
め登録しておき、その領域内で2値化画像(図3
(c))の白(樹脂塗布領域)31の面積を計測し、あ
らかじめ判定用に設定されている値より大きければモー
ルド面への樹脂付着とする。
After this assembling process, a defect inspection is performed by using the inspection and measuring device shown in FIG. FIG. 3 shows the flow of image processing. The semiconductor laser device is irradiated with near-ultraviolet light (irradiated from the near-ultraviolet light source 14) 25 and yellow light (irradiated from the light source 15 with a color filter) 26 (FIG. 3A), and
A color image is taken in by means of, and a resin emission color (blue) 30 is extracted by the color extraction device 11 (FIG. 3B). The extracted resin emission color is binarized into white (brightness 1) and other colors into black (brightness 0) (FIG. 3C), and is taken into the image processing device 12. Then, the image processing device 12 measures and analyzes the binarized image to determine the following defects. (1) Insufficient amount of coating (35 in FIG. 4, insufficient resin) (2) Excessive amount of coating (36, excessive resin in FIG. 5) (3) Adhesion of resin to mold surface (FIG. 5) (1) Insufficient amount of coating The area of the white (resin coating area) 31 of the binarized image (FIG. 3C) is measured and compared with the area of a good resin coating area set in advance by sampling or the like. On the other hand, if the value is smaller than the value set in advance for determination, it is determined that the application amount is insufficient. (2) Excessive coating amount The area of the white (resin coating region) 31 of the binarized image (FIG. 3C) is measured and compared with the area of the non-defective resin coating region set in advance by sampling or the like. If the value exceeds the value set in advance for determination, it is determined that the application amount is excessive. (3) Adhesion of resin to mold surface A region where resin adhesion is defective on the mold surface is registered in advance, and a binarized image (FIG.
(C)) The area of the white (resin application region) 31 is measured, and if it is larger than a value set in advance for determination, it is determined that the resin adheres to the mold surface.

【0012】このように構成されたUV樹脂検査計測方
法および検査計測装置によると、UV樹脂による接着部
分、封止部分、あるいはマーキングの検査工程におい
て、近紫外光25の照射により検査対象物に塗布したU
V樹脂22が発光色となり、背景との区別がつき易く、
しかも近紫外光25による発光色と異なる色の光26を
検査対象物に同時に照射することで、より安定した色抽
出を行うことができ、熟練を要することなく光学画像認
識による高精度で安定した自動検査が可能となる。よっ
て、対象製品のコストダウンと、出荷品質の向上を実現
することができる。
According to the UV resin inspection / measuring method and the inspection / measuring apparatus configured as described above, in the inspection process of the bonding portion, the sealing portion, or the marking with the UV resin, the UV resin 25 is applied to the inspection object by irradiating near ultraviolet light 25. U
The V-resin 22 becomes a luminescent color, and is easily distinguishable from the background.
In addition, by simultaneously irradiating the inspection object with light 26 having a color different from the emission color of the near-ultraviolet light 25, more stable color extraction can be performed, and high accuracy and stable by optical image recognition can be performed without skill. Automatic inspection becomes possible. Therefore, it is possible to reduce the cost of the target product and improve the shipping quality.

【0013】なお、前記実施の形態では、UV樹脂の発
光色を抽出する方法をとったが、逆にUV樹脂以外(モ
ールド面、ホログラム素子)の色を抽出し、樹脂発光色
を黒(輝度0)に2値化して画像処理装置に入力し、判
定してもよい。
In the above embodiment, the method of extracting the emission color of the UV resin is used. On the contrary, the color of the resin other than the UV resin (mold surface, hologram element) is extracted, and the emission color of the resin is set to black (luminance). It may be binarized to 0), input to the image processing apparatus, and determined.

【0014】[0014]

【発明の効果】この発明のUV樹脂検査計測方法および
検査計測装置によると、UV樹脂による接着部分、封止
部分、あるいはマーキングの検査工程において、近紫外
光の照射により検査対象物に塗布したUV樹脂が発光色
となり、背景との区別がつき易く、しかも近紫外光によ
る発光色と異なる色の光を検査対象物に同時に照射する
ことで、より安定した色抽出を行うことができ、光学画
像認識による高精度で安定した自動検査が可能となる。
よって、対象製品のコストダウンと、出荷品質の向上を
実現することができる。
According to the method and apparatus for inspecting and measuring a UV resin according to the present invention, in the inspection process of a bonding portion, a sealing portion, or a marking made of a UV resin, a UV applied to an inspection object by irradiation of near ultraviolet light. The resin emits light, which makes it easy to distinguish it from the background.Moreover, by simultaneously irradiating the test object with light of a color different from the color emitted by near-ultraviolet light, more stable color extraction can be performed, and optical images can be obtained. A highly accurate and stable automatic inspection by recognition becomes possible.
Therefore, it is possible to reduce the cost of the target product and improve the shipping quality.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施の形態におけるUV樹脂検査計
測装置の構成図である。
FIG. 1 is a configuration diagram of a UV resin inspection and measurement device according to an embodiment of the present invention.

【図2】この発明の実施の形態におけるUV樹脂検査計
測の対象となる半導体レーザ装置の概略斜視図である。
FIG. 2 is a schematic perspective view of a semiconductor laser device to be inspected and measured by a UV resin according to the embodiment of the present invention.

【図3】この発明の実施の形態における画像処理の流れ
を示す図である。
FIG. 3 is a diagram showing a flow of image processing according to the embodiment of the present invention.

【図4】この発明の実施の形態におけるUV樹脂の塗布
不足不良例を示す平面図である。
FIG. 4 is a plan view illustrating an example of insufficient application of a UV resin according to the embodiment of the present invention.

【図5】この発明の実施の形態におけるUV樹脂の塗布
過多不良およびモールド面付着例を示す平面図である。
FIG. 5 is a plan view showing an example of excessive application of a UV resin and adhesion to a mold surface according to the embodiment of the present invention.

【図6】従来例のUV樹脂検査計測装置の構成図であ
る。
FIG. 6 is a configuration diagram of a conventional UV resin inspection and measurement device.

【符号の説明】[Explanation of symbols]

10 カラー撮像装置 11 色抽出装置 12 画像処理装置 14 近紫外光源 15 色フィルタ付き光源 16 検査対象物 Reference Signs List 10 color imaging device 11 color extraction device 12 image processing device 14 near-ultraviolet light source 15 light source with color filter 16 inspection object

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 紫外線による化学反応により硬化させた
樹脂の塗布状態を光学画像認識により検査計測する方法
であって、検査対象物に近紫外光を照射し、前記樹脂を
発光させて前記検査対象物の画像を取り込むことを特徴
とするUV樹脂検査計測方法。
1. A method for inspecting and measuring an application state of a resin cured by a chemical reaction by ultraviolet rays by optical image recognition, wherein the object to be inspected is irradiated with near-ultraviolet light to cause the resin to emit light, thereby causing the resin to emit light. A method for measuring and measuring a UV resin, wherein an image of an object is captured.
【請求項2】 画像取り込み時に近紫外光による発光色
と異なる色の光を前記近紫外光と同時に検査対象物に照
射することを特徴とする請求項1記載のUV樹脂検査計
測方法。
2. The UV resin inspection and measurement method according to claim 1, wherein a light having a color different from a color emitted by near-ultraviolet light is irradiated onto the inspection object simultaneously with the near-ultraviolet light when an image is captured.
【請求項3】 検査対象物に近紫外光を照射する近紫外
光源と、前記検査対象物の画像を取り込むカラー撮像装
置と、前記カラー撮像装置により取り込んだ画像を受け
取り色抽出を行う色抽出装置と、前記色抽出装置により
色抽出処理された画像の計測および判定を行う画像処理
装置とを備えたUV樹脂検査計測装置。
3. A near-ultraviolet light source that irradiates near-ultraviolet light to an inspection object, a color imaging device that captures an image of the inspection object, and a color extraction device that receives an image captured by the color imaging device and performs color extraction. A UV resin inspection and measurement device comprising: an image processing device for measuring and determining an image subjected to the color extraction processing by the color extraction device.
【請求項4】 検査対象物に近紫外光を照射する近紫外
光源と、近紫外光による発光色と異なる色の光を前記検
査対象物に照射する色フィルタ付き光源と、前記検査対
象物の画像を取り込むカラー撮像装置と、前記カラー撮
像装置により取り込んだ画像を受け取り色抽出を行う色
抽出装置と、前記色抽出装置により色抽出処理された画
像の計測および判定を行う画像処理装置とを備えたUV
樹脂検査計測装置。
4. A near-ultraviolet light source for irradiating near-ultraviolet light to the inspection object, a light source with a color filter for irradiating the inspection object with light having a color different from a color emitted by the near-ultraviolet light, A color image capturing device that captures an image, a color extracting device that receives an image captured by the color image capturing device and performs color extraction, and an image processing device that measures and determines an image subjected to color extraction processing by the color extracting device. UV
Resin inspection and measurement equipment.
JP3829898A 1998-02-20 1998-02-20 Method and apparatus for inspection and measurement of uv resin Pending JPH11237346A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3829898A JPH11237346A (en) 1998-02-20 1998-02-20 Method and apparatus for inspection and measurement of uv resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3829898A JPH11237346A (en) 1998-02-20 1998-02-20 Method and apparatus for inspection and measurement of uv resin

Publications (1)

Publication Number Publication Date
JPH11237346A true JPH11237346A (en) 1999-08-31

Family

ID=12521410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3829898A Pending JPH11237346A (en) 1998-02-20 1998-02-20 Method and apparatus for inspection and measurement of uv resin

Country Status (1)

Country Link
JP (1) JPH11237346A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009128260A (en) * 2007-11-27 2009-06-11 Seiko Instruments Inc Inspection apparatus, inspection method, manufacturing apparatus of rolling bearing, and manufacturing method of the rolling bearing
JP2013160753A (en) * 2012-02-06 2013-08-19 Sentekku:Kk Apparatus for measuring ultraviolet curing by image processing
JP2015137953A (en) * 2014-01-23 2015-07-30 三菱重工食品包装機械株式会社 Hot melt inspection device and method
JP2015137954A (en) * 2014-01-23 2015-07-30 三菱重工食品包装機械株式会社 Hot melt inspection device and method
JP2016219231A (en) * 2015-05-20 2016-12-22 矢崎総業株式会社 Manufacturing method for terminal with wire, terminal with wire, and wiring harness
WO2020137893A1 (en) * 2018-12-28 2020-07-02 株式会社エンビジョンAescジャパン Inspection device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009128260A (en) * 2007-11-27 2009-06-11 Seiko Instruments Inc Inspection apparatus, inspection method, manufacturing apparatus of rolling bearing, and manufacturing method of the rolling bearing
JP2013160753A (en) * 2012-02-06 2013-08-19 Sentekku:Kk Apparatus for measuring ultraviolet curing by image processing
JP2015137953A (en) * 2014-01-23 2015-07-30 三菱重工食品包装機械株式会社 Hot melt inspection device and method
JP2015137954A (en) * 2014-01-23 2015-07-30 三菱重工食品包装機械株式会社 Hot melt inspection device and method
JP2016219231A (en) * 2015-05-20 2016-12-22 矢崎総業株式会社 Manufacturing method for terminal with wire, terminal with wire, and wiring harness
WO2020137893A1 (en) * 2018-12-28 2020-07-02 株式会社エンビジョンAescジャパン Inspection device
JP2020106472A (en) * 2018-12-28 2020-07-09 株式会社エンビジョンAescジャパン Inspection device

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