JPH11233280A - High frequency energy supply means and high frequency electrodeless discharge lamp device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a uniform high frequency energy with no deflection in a electric field by providing a side cavity resonator group which supplies the high frequency energy using a resonance high frequency electromagnetic field generated in a central part, and a plurality of high frequency bonding means, and by providing them with different phases and frequencies. SOLUTION: When a high frequency energy is bonded to a vane type resonator 12 by a single high frequency bonding means, phases of adjoining side cavity resonators are so designed as to match the frequencies of the high frequency energy which are bonded in such a state as being operated in a mode deviated by 2π/8, namely, π/4 for each. Two electric field bonding type antennas 13 as high frequency bonding means are connected to each other in the resonator 12 in such a state that the angle of a smaller one out of angles formed with the central part of the resonator 12 is set to π/2. The high frequency energy bonded by the first electric field bonding antenna 13a generates a lateral resonance high frequency electric field Ex in the central part of the resonator 2. The second antenna 13b generates an electric field Ey.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a high-frequency energy supply means and a high-frequency electrodeless discharge lamp apparatus using the same.

[0002]

2. Description of the Related Art A high frequency electrodeless discharge lamp is easier to couple electromagnetic energy to a filler than an electrode arc discharge lamp, and can eliminate mercury from the filler for discharge luminescence. There is an excellent advantage that high luminous efficiency can be expected because there is no loss. Further, since no electrodes are provided inside the discharge space, blackening of the bulb inner wall due to electrode evaporation does not occur. This makes it possible to greatly extend the lamp life. From these characteristics, high-frequency electrodeless discharge lamps are the next generation of high-intensity discharge lamps.
Research has been actively conducted in recent years.

[0003] Generally, in a discharge lamp device, the smaller the light source, the closer to a point light source, and the light distribution design can be more idealized. For example, in consideration of application to a standard liquid crystal video projector or the like, a plasma arc size of about 3 mm or less is required from the viewpoint of optical design for improving the utilization efficiency of radiation light. On the other hand, in the electrodeless discharge lamp, the size of the plasma arc is determined by the inner diameter of the bulb. However, the miniaturization of a conventionally used high-frequency electrodeless discharge device using a cavity resonator is limited by the wavelength. Therefore, it is not suitable for an application field requiring a high-brightness point light source. Therefore, a high-frequency energy supply unit capable of supplying a high-frequency resonance electromagnetic field in a space smaller than the cavity resonator has been developed in recent years.

A conventional technique will be described below with reference to FIG. 10 based on "a high-frequency energy supply means and a high-frequency electrodeless discharge lamp device" disclosed in Japanese Patent Application Laid-Open No. 10-189270.

The high-frequency energy supply means disclosed in Japanese Patent Application Laid-Open No. Hei 10-189270 has a plurality of side cavity resonators having both an electromagnetic inductive function section made of a ring-shaped conductive material and an electric capacity function section made of a gap. A group of side cavity resonators in which a plurality of the side cavity resonators are arranged in an annular shape such that the capacitive function units face each other inside, and a high frequency necessary for discharge is generated by a resonant high frequency electromagnetic field at the center of the annular shape. It has a configuration to supply energy. Accordingly, it is an object of the present invention to provide a high-frequency energy supply means capable of intensively supplying a high-frequency resonance electromagnetic field to a space smaller than a cavity resonator, and a high-frequency electrodeless discharge lamp device using the same.

In FIG. 10, as an example of the side cavity resonator group,
The figure shows an eight-vein resonator 102 in which eight plate-like vanes 105 made of a conductive material are protruded toward the center from the inner periphery of a cylinder 104 made of a conductive material. The inner wall surfaces of the two vanes 105 adjacent to the cylinder 104 and the space formed by them serve as the electromagnetic inductive function part, and the two adjacent vane protrusions and the gap therebetween serve as the capacitive function part. The electrodeless discharge lamp 101 is arranged at the center of the 8-vane type resonator 102. The high-frequency energy transmitted from the high-frequency oscillation means is coupled to the eight-vein resonator 102 by an electric-field-coupling-type high-frequency coupling means 103 electrically connected to one of the vanes 105 by caulking or welding. The 8-vane type resonator 102
Are pre-designed to resonate at the frequency of the coupled high frequency energy. Thus, the energy required for the high-frequency discharge is supplied to the electrodeless discharge lamp 101 by the resonance high-frequency electric field E generated at the center of the 8-vane type resonator 102.

In particular, when the number of side cavity resonators is N, the phase of adjacent resonance side cavity resonators is 2π / N.
So that the side cavity resonator group is driven in the mode shifted by
When designing the frequency of the high frequency, the shape of the side cavity resonator, and the like, the charges have opposite polarities at the opposing protrusions.
The resonance high-frequency electric field E generated by this electric charge is directed in the diameter direction of the central part of the side cavity resonator group, and has a distribution crossing the electrodeless discharge lamp 101. When operating the resonator in this 2π / N mode, the strongest electric field can be obtained at the central part where the electrodeless discharge lamp 101 is arranged.

The high frequency coupling means may be of a magnetic field coupling type as shown in FIG. In FIG. 11, the terminating end of the loop antenna 113 is electrically connected to the cylindrical portion of the 8-vane resonator 112.
The high-frequency magnetic field oscillated from the loop antenna 113 generates a high-frequency resonant electric field E in the center of the 8-vane resonator 112. By this resonance high-frequency electric field E, high-frequency discharge energy is supplied to the electrodeless discharge lamp 111.

According to the high-frequency discharge energy supply means disclosed in Japanese Patent Laid-Open No. Hei 10-189270, the frequency is 2.45 GHz.
Even if a high frequency of z is used, it is possible to keep a plasma arc having a relatively small size of 10 mm or less turned on.

[0010]

However, in the above configuration, in order to obtain the strongest electric field, the position of the plasma is shifted by thermal convection because the direction of the electric field is constant when operated in the 2π / N mode. When this occurs, the mode is disturbed and the phenomenon that the discharge plasma becomes unstable tends to occur. In addition, since the electric field is deflected in a certain direction, there is also a problem that the heat load on the discharge tube wall of the electrodeless discharge lamp increases in the direction of the electric field.

[0011]

Means for Solving the Problems The first invention (claim 1)
) Is a group of side cavity resonators that are electrically coupled in a substantially annular manner to supply high-frequency energy using a resonant high-frequency electromagnetic field generated in the center, and a plurality of high-frequency waves propagated from a plurality of high-frequency propagation paths. A plurality of high-frequency coupling means for coupling energy to the side cavity resonator group,
The plurality of high-frequency waves coupled to the side cavity resonator group by the plurality of high-frequency coupling means have a phase and / or a frequency different from each other.

The second invention (corresponding to claim 2) is:
The high-frequency energy supply means according to the first aspect of the present invention is characterized in that there are two high-frequency coupling means, and the spatial angle formed by the coupling means does not form 180 degrees.

A third aspect of the present invention (corresponding to claim 3) is:
A group of side cavity resonators that are electrically coupled substantially in a ring to supply high-frequency energy using a resonant high-frequency electromagnetic field generated in the center, high-frequency oscillation means, and high-frequency propagation means,
High-frequency distribution means for distributing the high-frequency energy generated by the high-frequency oscillation means and propagated through the high-frequency propagation means to a plurality of propagation paths; and a high-frequency phase shifter for making a plurality of high-frequency phases of the plurality of propagation paths different from each other. Means, and a plurality of high-frequency coupling means for coupling the plurality of high-frequency waves having different phases to the side cavity resonator group, and when the number of the high-frequency coupling means is represented by M, the adjacent high-frequency coupling means The smaller of the angles formed by the side resonator group with respect to the center of the ring is π / M, and the phases of the high frequencies coupled by the adjacent high frequency coupling means are mutually shifted by the high frequency phase shifting means. This is a high-frequency energy supply means that is different from each other by π / M.

A fourth aspect of the present invention (corresponding to claim 4) is:
A group of side cavity resonators that are electrically coupled substantially in a ring to supply high-frequency energy using a resonant high-frequency electromagnetic field generated in the center, high-frequency oscillation means, and high-frequency propagation means,
High-frequency distribution means for distributing the high-frequency energy generated by the high-frequency oscillation means and propagated through the high-frequency propagation means to a plurality of propagation paths; and a high-frequency phase shifter for making a plurality of high-frequency phases of the plurality of propagation paths different from each other. Means, and a plurality of high-frequency coupling means for coupling the plurality of high-frequency energies having different phases to the side cavity resonator group. When the number of the high-frequency coupling means is represented by M, M is at least three. The smaller of the angles formed by the adjacent high-frequency coupling means with respect to the center of the ring of the side cavity resonator group is 2π / M, and the frequency of the high-frequency wave coupled by the adjacent high-frequency coupling means is small. A high-frequency energy supply means characterized in that the phases are different from each other by 2π / M by the high-frequency phase shift means.

The fifth invention (corresponding to claim 5) is:
A plurality of side cavity resonators electrically coupled in a substantially annular manner for supplying high-frequency energy using a resonant high-frequency electromagnetic field generated in a central portion, a plurality of high-frequency oscillation means, a plurality of high-frequency propagation means, and the high-frequency oscillation; A plurality of high-frequency coupling means for coupling a plurality of high-frequency energy generated from the means and propagated by the high-frequency propagation means to the side cavity resonator group, the plurality of high-frequency oscillation means and the plurality of high-frequency propagation means And the plurality of high-frequency coupling means are the same number,
The plurality of high-frequency coupling units are respectively coupled to different side cavity resonators forming the side cavity group, and the frequencies of the high-frequency oscillations of the plurality of high-frequency oscillation units are different from each other. This is a high-frequency energy supply means.

A sixth aspect of the present invention (corresponding to claim 6) is:
When the number of the high-frequency coupling means is represented by M, a smaller one of angles formed by the adjacent high-frequency coupling means with respect to the center of the ring of the side cavity resonator group is π / M. Fifth high-frequency energy supply means of the present invention.

A seventh aspect of the present invention (corresponding to claim 7) is:
An angle formed by the side cavity resonators with respect to the center of the ring of the side cavity resonator group is 2π / N, where N is the number of the side cavity resonator groups, and each is 2π / N. The high-frequency energy supply means according to any one of the sixth to sixth aspects of the present invention.

An eighth aspect of the present invention (corresponding to claim 8)
Wherein the number of side cavity resonators forming the side cavity group is represented by N, and the phase difference between adjacent side cavity resonators is 2π / N. Of the present invention.

A ninth invention (corresponding to claim 9) is:
The high-frequency energy supply means according to any one of the first to eighth aspects of the present invention, wherein the side cavity resonator group is a vane type resonator.

The tenth invention (corresponding to claim 10)
The high-frequency coupling means is any of the first to ninth high-frequency energy supply means, wherein the high-frequency coupling means is of an electric field coupling type or a magnetic field coupling type.

The eleventh invention (corresponding to claim 11)
Has a high-frequency energy supply means of any one of the first to tenth aspects of the present invention, and an electrodeless discharge lamp, wherein the electrodeless discharge lamp is disposed at a ring center of the high-frequency energy supply means, and A high-frequency electrodeless discharge lamp device characterized in that discharge plasma is formed inside a discharge tube of the electrodeless discharge lamp by high-frequency energy supplied from a high-frequency discharge energy supply unit.

According to the above arrangement, the electric field does not deflect in one direction, the discharge plasma is easily lit and maintained easily, and the heat load on the discharge tube wall of the electrodeless discharge lamp is averaged. You.

The term "high frequency" in this specification refers to an electromagnetic wave having a frequency of 1 MHz to 100 GHz.
In particular, in the "microwave" frequency range of 300 MHz to 30 GHz, the present invention can obtain suitable effects.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) Hereinafter, a first embodiment of a high-frequency energy supply means of the present invention will be described with reference to FIGS.

The 8-vane type resonator 12 shown in FIG. 1 is designed in such a manner that the frequency and the shape of the resonator are designed so that a high-frequency electric field crosses the electrodeless discharge lamp 11 disposed in the center of the electrodeless discharge lamp 11 so that a strong electric field is obtained. It is. That is, when high-frequency energy is coupled to the resonator 12 by a single high-frequency coupling unit,
The phase of the adjacent side cavity resonator is (2π / 8), that is, (π
/ 4) It is designed in advance in accordance with the frequency of the high-frequency energy to be coupled so as to operate in the shifted mode. An electric field coupling antenna 13 as a high frequency coupling means is provided in the 8-vane resonator 12 with the 8-vane resonator 1.
The smaller of the angles made to the center of 2 is 90 °
The two are joined to form an angle of (π / 2). Due to the high frequency energy coupled by the first electric field coupling type antenna 13a, the central part of the 8-vane type resonator 12 has:
Drawings transverse resonant radio frequency electric field E _x is generated. Similarly, by the high-frequency energy coupled by the second electric field coupling antenna 13b, a resonant high-frequency electric field E _y drawings vertical occurs.

Next, the configuration including the high-frequency oscillation means and the high-frequency distribution phase shift means will be described with reference to FIG. High-frequency energy oscillated from the high-frequency power supply is propagated to the distributor and the phase shifter by high-frequency propagation means such as a coaxial line and a waveguide. The high-frequency energy propagated by the distributor, which is high-frequency distribution means, is distributed into two. Further, the two distributed high-frequency propagation means are coupled to the 8-vane type resonator 22, and the coupling portion 23a of the first electric field coupling type antenna 13a and the second electric field coupling type antenna 13
b at the coupling portion 23b, the phase of the high frequency wave is 90 ° (π
/ 2) Differently set by the above-mentioned phase shifter, which is high frequency phase shifting means.

At this time, the electric field at the central portion of the 8-vane resonator is expressed by (Equation 1).

[0028]

(Equation 1)

Ω is the angular frequency of the applied high frequency, t is time, and E ₀ is the maximum value of the resonance electric field coupled from each high frequency coupling means. (Equation 1) indicates that the electric field at the center of the 8-vane type resonator has an angular frequency ω of the applied high frequency.
Indicates rotation. FIG. 3 shows a temporal change of the resonant high-frequency electric field at the center of the 8-vane resonators 12 and 22 provided with the electrodeless discharge lamps 11 and 21 of FIGS. 1 and 2.

The high frequency oscillation means are oscillated in 2.45GHz sine wave, the time variation of the resonance frequency electric field E _x in the x direction are coupled by the first electric field coupling antenna 13a on the left column, the Time changes of the resonance high-frequency electric field E _{y in} the y direction coupled by the two electric field coupling antennas 13b are shown below the left column. When such resonance radio frequency electric field E _y of the resonant radio frequency electric field E _x and y direction of the x-direction is applied shifted 90 °, the electric field superimposed in the central portion, as shown in the right column, synchronized with the frequency of the high frequency And rotate.

The high frequency coupling means is not limited to the electric field coupling type antenna as shown in FIG. 1, but may be a magnetic field coupling type as shown in FIG. In FIG. 4, the end portions of the two loop antennas 43a and 43b are electrically connected to the cylindrical inner wall of the 8-vane resonator 42, respectively. Due to the two phase-shifted high-frequency magnetic fields oscillated from the loop antenna 43, a resonant high-frequency rotating electric field is generated at the center of the 8-vane resonator 42, and high-frequency energy is supplied to the electrodeless discharge lamp 41.

The configuration in which the above effects can be obtained is not limited to the 8-vane type resonator and the two high-frequency coupling means. For example, as shown in FIG. 5, it is possible to use a 6-vein resonator and three high-frequency coupling means.

When the high-frequency energy is coupled by a single high-frequency coupling means, the 6-vein resonator 52 shown in FIG. 5 operates in a 2π / 3 mode in which the resonant high-frequency electric field crosses the electrodeless discharge lamp 51 arranged at the center. It is pre-designed to operate to the frequency of the high frequency energy to be coupled. Here, the coupling part of the high-frequency coupling means forms an angle of 60 ° (π / 3) with the center of the six-vein resonator 52 in the six-vein resonator 52 composed of six vanes. Three are connected. High-frequency energy oscillated from the high-frequency power supply is propagated to the distributor and the phase shifter by high-frequency propagation means such as a coaxial line and a waveguide. The high-frequency energy propagated by the distributor as the high-frequency distribution means is distributed into three parts. Further, in the three coupling portions where the three distributed high frequency propagation means are coupled to the 6-vein resonator 52, the phase of the high frequency is 60 ° (π
/ 3) are set by the above-mentioned phase shifter, which is high-frequency phase shifting means. With such a configuration, the resonance high-frequency electric field at the center of the 6-vane resonator 52 is reduced to the frequency of the high frequency to be coupled, as in the configuration using the 8-vane resonator and the two high-frequency coupling means. It can be rotated synchronously, and the same effect can be obtained.

In the configuration of the present embodiment described above, when the number of high frequency coupling means is M and the maximum values of the resonance electric fields coupled from the respective high frequency coupling means are equal to E ₀ , the side cavity resonator is provided. The electric field at the center of the group is represented by (Equation 2).

[0035]

(Equation 2)

As in (Equation 1), ω represents the angular frequency of the applied high frequency, and t represents time. Here, when the number of side cavity resonators forming the side cavity resonator group is N, M is an integer of 2 or more and N / 2 or less. (Equation 2)
Indicates that the electric field at the center of the side cavity resonator group rotates at the same angular frequency ω as the applied high frequency.

With the above configuration, the direction of the electric field rotates without bias in one direction, so that the discharge plasma of the electrodeless discharge lamp and the heat distribution of the tube wall are made uniform.
This makes it difficult for mode disturbance due to thermal convection of plasma to occur, and improves the heat resistance of the electrodeless discharge lamp.

(Embodiment 2) Hereinafter, a second embodiment of the high-frequency energy supply means of the present invention will be described with reference to FIGS.

When the high-frequency energy is coupled by a single high-frequency coupling means, the 6-vein resonator 62 of FIG. 6 operates in a 2π / 3 mode in which the resonant high-frequency electric field crosses the electrodeless discharge lamp 61 disposed at the center. It is pre-designed to operate to the frequency of the high frequency energy to be coupled. Three electric field coupling antennas 63 as high frequency coupling means are coupled to the 6-vein resonator 62 so as to form an angle of 120 ° (2π / 3) with the center of the 6-vein resonator 12. Have been.

Next, the configuration including the high-frequency oscillation means and the high-frequency distribution phase shift means will be described with reference to FIG. High-frequency energy oscillated from the high-frequency power supply is propagated to the distributor and the phase shifter by high-frequency propagation means such as a coaxial line and a waveguide. The high-frequency energy propagated by the distributor as the high-frequency distribution means is distributed into three parts. Further, the three divided high frequency propagation means are coupled to the 6-vein resonator 72, the coupling portion 73a of the first electric field coupling antenna 63a, and the second electric field coupling antenna 63.
b at the coupling portion 73b and at the coupling portion 73c of the third electric field coupling antenna 63c,
° (2π / 3) is set by the above-mentioned phase shifter, which is high-frequency phase shifting means.

At this time, the electric field at the center of the 6-vein resonator is expressed by the following (Equation 3).

[0042]

(Equation 3)

Ω represents the angular frequency of the applied high frequency, t represents time, and E ₀ represents the maximum value of the resonance electric field coupled from each high frequency coupling means. (Equation 3) indicates that the electric field at the center of the 6-vein resonator 72 rotates at the same angular frequency ω as the applied high frequency.

The configuration for obtaining the above effects is not limited to the 6-vane type resonator and the three high frequency coupling means.

In the configuration of the present embodiment as described above, the number of high frequency coupling means is M, and the maximum value of the resonance electric field coupled from each high frequency coupling means is equal to E.
_When it is ₀ , the electric field at the center of the group of side cavity resonators is expressed by (Equation 4).

[0046]

(Equation 4)

As in (Equation 3), ω represents the angular frequency of the applied high frequency, and t represents time. Here, when the number of side cavity resonators forming the side cavity resonator group is N, M is an integer of 3 or more and N or less. (Equation 4) is
This indicates that the electric field at the center of the side resonator group rotates at the same angular frequency ω as the applied high frequency.

With the above-described structure, the direction of the electric field rotates without bias in one direction, as in the first embodiment, so that the discharge plasma of the electrodeless discharge lamp and the heat distribution of the tube wall are reduced. Be uniformed. This makes it difficult for mode disturbance due to thermal convection of plasma to occur, and improves the heat resistance of the electrodeless discharge lamp. Further, as compared with the first embodiment, since the electric field is also superimposed on the side opposite to the side cavity group, the side cavity group can be easily operated in the 2π / N mode. have.

(Embodiment 3) Hereinafter, a third embodiment of the high-frequency energy supply means of the present invention will be described with reference to FIGS.

The structure of a high-frequency electrodeless discharge lamp device using an 8-vane type resonator, which has two high-frequency oscillation means, two high-frequency propagation means, and two high-frequency coupling means, will be described with reference to FIG. The eight-vein resonator 82 and the two antennas 83a and 83b, which are high-frequency coupling means, used here are the same as those shown in FIG. 1 or 4 in the first embodiment.

High-frequency energy oscillated from the high-frequency power supply 1 is propagated by first high-frequency propagation means such as a coaxial line or a waveguide, and is transmitted to the 83a portion of the eight-vein resonator 82 by the first high-frequency coupling means. Be combined. Further, high-frequency energy oscillated from the high-frequency power supply 2 is propagated by a second high-frequency propagating means composed of a coaxial line, a waveguide, or the like.
83b. First high frequency coupling means 8
The RF energy coupled by 3a, 8 in the central portion of the vane type resonator 82, the drawings transverse resonant radio frequency electric field E _x is generated. Similarly, the second high frequency coupling means 83
The RF energy coupled by b, the resonance frequency electric field E _y drawings vertical occurs.

At this time, assuming that the angular frequency of the high frequency oscillated from the high frequency power supply 1 is ω ₁ and the angular frequency of the high frequency oscillated from the high frequency power supply 2 is ω ₂ , the electric field generated at the center of the eight-vein resonator 82 Are expressed as (Equation 5).

[0053]

(Equation 5)

Note that t represents the elapsed time, and E ₀ represents the maximum value of the resonance electric field coupled from each high-frequency coupling means. For example, if the angular frequency omega ₂ of the high frequency oscillated from the high frequency power source 2 is 10% higher than the angular frequency omega ₁ of the high frequency oscillated from the high frequency power source 1 large, (5) is (6)
It is represented by

[0055]

(Equation 6)

At this time, when the time t until the high frequency oscillated from the high frequency power supply 1 makes five cycles is changed (0 ≦ ω ₂
FIG. 9 shows the result of describing the trajectories of the x and y components of the electric field generated at the center of the eight-vein resonator 82 (t ≦ 10π).

[0057] when t is 0, synthetic component of E _x and E _y, which was facing in the direction of the left and obliquely downward from the upper right is soon going to shift little by little in accordance with the deviation of the frequency, left from the lower right It is changing diagonally upward.

As described above, by making the frequency of the high frequency oscillated by the high frequency power supply 1 different from the frequency of the high frequency oscillated by the high frequency power supply 2, the frequency of the high frequency electric field coupled to the 8-vane type resonator 82 is reduced. Each composite component repeats orbiting while rotating with a frequency difference.

With the above structure, the direction of the electric field changes without bias in one direction as in the first and second embodiments. Is made uniform. Thus, mode disturbance due to thermal convection of plasma is less likely to occur, and the heat resistance of the electrodeless discharge lamp 81 is improved.
Further, as compared with the first and second embodiments, there is a feature that it is not necessary to perform a delicate operation for adjusting the phase difference.

Here, an example using a frequency difference of 10% has been described, but the frequency difference is not limited to this. More preferably, ISM (Industrial Scientific Medica), which is a high frequency band that is industrially acceptable.
l) Since each frequency band has a bandwidth, it is desirable to have a frequency difference within the bandwidth. For example, the allowable bandwidth in the ISM frequency band having a center frequency of 2.45 GHz is ± 0.05 GHz. Therefore, at this time, the frequency difference can be changed within 0.1 GHz. Incidentally, in reality, a high-frequency oscillator such as a magnetron always has an error in the oscillation frequency within the above-mentioned allowable bandwidth, so even if it is not necessary to change the frequency, if a plurality of high-frequency oscillators are prepared, the frequency can be increased. The difference can be obtained naturally.

However, when the frequency difference is too large, it is not desirable because the resonance frequency may deviate from the resonance frequency of the side cavity resonator group or other resonance modes may occur. Therefore, it is desirable that the frequency difference be kept within a frequency width in which the same resonance mode can occur.

The configuration for obtaining the above-mentioned effects is not limited to an 8-vane type resonator having two high-frequency oscillation means, two high-frequency propagation means, and two high-frequency coupling means. For example, as shown in FIG. 5, it is also possible to use a 6-vein resonator and three high-frequency coupling means, and to have a configuration having three high-frequency oscillation means, three high-frequency propagation means, and three high-frequency coupling means, respectively. is there.

In the first to third embodiments described above, an example is shown in which a vane type resonator is used as the side cavity resonator group. However, other side cavities such as a hole / slot type resonator are used. It is possible to use a group of resonators.

Further, in the above-described first to third embodiments, the high-frequency energy supply means using the side cavity resonator group of the present invention is shown only in a form applied to a high-frequency electrodeless discharge lamp device. However, the application field of the high-frequency energy supply means of the present invention is not limited to this. For example, plasma CVD, plasma torch,
Alternatively, in a device using a high-frequency discharge such as a gas discharge laser, when it is necessary to supply energy by a concentrated and undeflected resonant high-frequency electric field in order to form a stable discharge plasma having a relatively small diameter. The high frequency energy supply means is useful.

Also, by the above high frequency energy,
In order to heat, emit, melt, or evaporate a relatively small-diameter object disposed at the center of the high-frequency energy supply means, it is necessary to supply discharge energy by a concentrated and non-deflected uniform resonant high-frequency electric field. In this case, the present invention is useful.

Further, in the present invention, a plurality of high frequencies and a phase difference to be coupled by the high frequency coupling means may be different from each other.

[0067]

As described above, according to the present invention, the electric field does not deflect in one direction as compared with the microwave energy supply means using the conventional side cavity resonator group.
By rotating or periodically changing the direction of the electric field, it is possible to supply uniform high-frequency energy.

This makes it difficult for the mode to be disturbed due to the thermal convection of the plasma, so that the discharge plasma can be stably lit and maintained, and the heat load on the discharge tube wall of the electrodeless discharge lamp is averaged. In addition, the heat resistance of the electrodeless discharge lamp is improved.

Furthermore, the supply of energy for heating, light emission, melting, or evaporation can be made uniform.

[Brief description of the drawings]

FIG. 1 is a diagram of an 8-vane resonator having two electric field coupling antennas according to a first embodiment.

FIG. 2 is a schematic diagram of a high-frequency electrodeless discharge lamp device using an 8-vane resonator having two electric field coupling antennas according to the first embodiment.

FIG. 3 is a diagram showing a time change of an electric field according to the first embodiment;

FIG. 4 is a diagram of an 8-vane type resonator having two magnetic field coupling type antennas according to the first embodiment.

FIG. 5 is a schematic diagram of a high-frequency electrodeless discharge lamp device using a 6-vein resonator having three electric field coupling antennas according to the first embodiment.

FIG. 6 is a diagram of a 6-vane resonator having three electric field coupling antennas according to the second embodiment.

FIG. 7 is a schematic diagram of a high-frequency electrodeless discharge lamp device using a 6-vein resonator having three electric field coupling antennas according to the second embodiment.

FIG. 8 is a schematic diagram of a high-frequency electrodeless discharge lamp device circuit using two high-frequency power supplies according to a third embodiment.

FIG. 9 is a diagram of a time-change trajectory of an electric field according to the third embodiment.

FIG. 10 is a diagram of an 8-vane resonator having an electric field coupling antenna according to the related art.

FIG. 11 is a diagram of an 8-vane resonator having a magnetic field coupling antenna according to the related art.

[Explanation of symbols]

 11, 21, 41, 61 Electrodeless discharge lamp 12, 22, 42, 62 Bain type resonator 13, 63 Electric field coupling type antenna 43 Magnetic field coupling type antenna

Claims (11)

[Claims] 1. A group of side cavity resonators, which are electrically annularly coupled to supply high-frequency energy using a resonant high-frequency electromagnetic field generated in a central portion, and a plurality of high-frequency energy propagated from a plurality of high-frequency propagation paths. And a plurality of high-frequency coupling means for coupling the plurality of high-frequency coupling means to the side cavity resonator group, and the plurality of high-frequency waves coupled to the side cavity resonator group by the plurality of high-frequency coupling means are respectively in phase and / or frequency. Are different from each other. 2. The high-frequency energy supply means according to claim 1, wherein there are two said high-frequency coupling means, and a spatial angle formed by said coupling means does not form 180 degrees. 3. A group of side cavity resonators that supply high-frequency energy by using a resonant high-frequency electromagnetic field generated in a central portion and are electrically coupled in a substantially annular shape; a high-frequency oscillation unit; a high-frequency propagation unit; High-frequency distribution means for distributing the high-frequency energy generated by the oscillation means and propagated through the high-frequency propagation means to a plurality of propagation paths; and high-frequency phase shift means for making the phases of the plurality of high-frequency waves in the plurality of propagation paths different. A plurality of high-frequency coupling means for coupling the plurality of high-frequency waves having different phases to the side resonator group, and when the number of the high-frequency coupling means is represented by M, the adjacent high-frequency coupling means The smaller of the angles formed by the center of the ring of the cavity resonator group with respect to the center of the ring is π / M, and the phase of the high-frequency wave coupled by the adjacent high-frequency wave coupling means is π / M. Frequency energy supply means, characterized in that different portions [pi / M from each other by frequency phase shifting means. 4. A group of side cavity resonators that supply high-frequency energy using a resonant high-frequency electromagnetic field generated in a central portion and are electrically coupled in a substantially annular shape, high-frequency oscillation means, high-frequency propagation means, High-frequency distribution means for distributing the high-frequency energy generated by the oscillation means and propagated through the high-frequency propagation means to a plurality of propagation paths; and high-frequency phase shift means for making the phases of the plurality of high-frequency waves in the plurality of propagation paths different. And a plurality of high-frequency coupling means for coupling the plurality of high-frequency energies having different phases to the side cavity group. When the number of the high-frequency coupling means is represented by M, M is at least three, and The smaller of the angles formed by the adjacent high-frequency coupling means with respect to the center of the ring of the side cavity resonator group is 2π / M, and the adjacent high-frequency coupling means Frequency energy supply means, characterized in that different portions 2 [pi / M from each other by high frequency phase the high-frequency phase shifting means coupled from unit. 5. A group of side cavity resonators electrically coupled in a substantially annular manner for supplying high-frequency energy using a resonant high-frequency electromagnetic field generated in a central portion, a plurality of high-frequency oscillation means,
A plurality of high-frequency propagation means, and a plurality of high-frequency coupling means for coupling a plurality of high-frequency energy generated from the high-frequency oscillation means and propagated by the high-frequency propagation means to the side cavity resonator group; The number of high-frequency oscillation means, the plurality of high-frequency propagation means, and the plurality of high-frequency coupling means are the same, and the plurality of high-frequency coupling means are respectively coupled to different side cavity resonators forming the side cavity group. The high-frequency energy supply means, wherein the high-frequency oscillation frequencies of the plurality of high-frequency oscillation means are different from each other. 6. When the number of said high frequency coupling means is represented by M,
The high-frequency energy supply means according to claim 5, wherein the smaller one of angles formed by the adjacent high-frequency coupling means with respect to the center of the ring of the side cavity resonator group is π / M. 7. The angle formed by the side cavity resonators with respect to the center of the ring of the side cavity resonator group is determined by setting the number of the side cavity resonator groups to N.
The high-frequency energy supply means according to any one of claims 1 to 6, wherein the values are 2π / N. 8. When the number of side cavity resonators forming the side cavity resonator group is represented by N, a phase difference between adjacent side cavity resonators is 2π / N. 7. The high-frequency energy supply means according to any one of 1 to 6. 9. The high-frequency energy supply means according to claim 1, wherein said side cavity resonator group is a vane type resonator. 10. The high frequency energy supply means according to claim 1, wherein said high frequency coupling means is of an electric field coupling type or a magnetic field coupling type. 11. A high-frequency energy supply means according to claim 1, and an electrodeless discharge lamp, wherein said electrodeless discharge lamp is arranged at a center of a ring of said high-frequency energy supply means, And a discharge plasma formed inside the discharge tube of the electrodeless discharge lamp by high frequency energy supplied from the high frequency discharge energy supply means.