JPH11232644A - Working apparatus for magnetic disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a working apparatus in which a fine adjustment can be performed in a short time and which can satisfy a fine working condition. SOLUTION: A working apparatus is provided with a spindle which chucks and turns a magnetic disk 2, with tapes 9A, 9B, for working, which are installed so as to correspond to the magnetic disk 2 and which are air-permeable, with tapes 6A, 6B, for air barriering, which are installed so as to correspond to the tapes 9A, 9B for working and with air nozzles 4A, 4B which blow the air 5 onto the tapes 6A, 6B for air barriering. Then, the air 5 is blown onto the tapes 6A, 6B for air barriering from the air nozzles 4A, 4B, and the tapes 9A, 9B for working are brought into pressure contact with the magnetic disk 2 via the tapes 6A, 6B for air barriering.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic disk processing apparatus such as a magnetic disk polishing apparatus and a cleaning apparatus.

[0002]

2. Description of the Related Art A magnetic disk manufacturing process includes a process of polishing a magnetic disk and a process of cleaning since particles such as polishing powder are re-attached by polishing. Conventionally, processing equipment for such a processing step uses a tape woven with synthetic fibers such as cotton, polyester, nylon, or the like, or a processing tape having air permeability such as a nonwoven fabric, and the processing tape is used as a magnetic disk with a roller. And press it against it.

[0003]

In the above-mentioned prior art, since the processing tape having air permeability is brought into contact with the magnetic disk by the roller, the roller is brought into contact with the magnetic disk in parallel with the magnetic disk so that the pressure becomes uniform. It is very difficult to make adjustments, which requires a great deal of adjustment time, and cannot satisfy delicate machining conditions. Further, since the mass of the roller is large, the ability of the roller to follow the runout of the magnetic disk is a problem.

An object of the present invention is to provide a magnetic disk processing apparatus capable of performing fine adjustment in a short time and satisfying fine processing conditions.

[0005]

According to the present invention, there is provided a spindle for rotating a chuck by chucking a magnetic disk, and a permeable processing tape provided corresponding to the magnetic disk. A tape for air barrier provided corresponding to the tape for processing, and an air nozzle for blowing air to the tape for air barrier, and blowing air from the air nozzle to the tape for air barrier, the air barrier The processing tape is pressed against the magnetic disk via the processing tape.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. A magnetic disk 2 is chucked by a spindle 1 that is driven to rotate. Air nozzles 4A and 4B are fixed to the moving body 3 moved by a driving unit (not shown) so as to face both surfaces of the magnetic disk 2, and the air nozzles 4A and 4B are connected to an air supply source (not shown). . Above and below the air nozzles 4A and 4B, supply reels 7A and 7B around which air barrier tapes 6A and 6B made of PET or the like which do not allow air 5 blown from the air nozzles 4A and 4B are wound, and air barrier tapes 6A and 6B are wound. Winding reels 8A and 8B for winding are provided. A processing tape 9 such as a cloth tape is provided above and below the supply reels 7A and 7B and the take-up reels 8A and 8B.
Supply reels 10A and 10B around which A and 9B are wound, and take-up reels 11A which wind up processing tapes 9A and 9B,
11B is provided. Here, the air barrier tapes 6A and 6B are disposed on the air nozzles 4A and 4B side,
The processing tapes 9A and 9B are arranged on the magnetic disk 2 side.

[0007] Supply reels 7A and 7B and take-up reel 8
A and 8B are reel shafts 15A and 1 fixed to the moving body 3.
5B and 16A, 16B are rotatably supported.
Supply reels 10A and 10B and take-up reels 11A and 1
Similarly, 1B is a reel shaft 17A fixed to the moving body 3,
It is rotatably supported by 17B and 18A, 18B. Guide rollers 19A, 19B and 20A, 20A above and below the air nozzles 4A, 4B guide the air barrier tapes 6A, 6B to the air nozzles 4A, 4B.
B and the processing tapes 9A and 9B with the air nozzles 4A and 4A.
Guide rollers 21A, 21B and 2 for guiding to the portion B
2A and 22B are provided.

The supply reels 7A, 7B and 10A, 1
0B to guide rollers 19A, 19B and 21A, 21
A plurality of guide rollers for guiding the air barrier tapes 6A and 6B and the processing tapes 9A and 9B to B are provided. Similarly, guide rollers 20A, 20B and 22
A, 22B to take-up reels 8A, 8B and 11A, 1
A plurality of guide rollers for guiding the air barrier tapes 6A and 6B and the processing tapes 9A and 9B are provided on 1B. These guide rollers 19A to 22A and the like, 19B
22B and the like are rotatably supported by a roller shaft 25 fixed to the moving body 3.

Next, the operation will be described. The magnetic disk 2 is chucked to the spindle 1 and rotated. And
Air 5 is supplied to the air nozzles 4A and 4B from an air source (not shown), and the take-up reels 8A, 8B and 1
1A and 11B are rotated by driving means (not shown), and the moving body 3 is moved in the direction of arrow A (see FIG. 2).

When air is supplied to the air nozzles 4A and 4B, the air 5 blown out from the air nozzles 4A and 4B
Presses the processing tapes 9A and 9B against the magnetic disk 2 via the air barrier tapes 6A and 6B. Thus, the magnetic disk 2 is processed according to the rotation. In addition, by the rotation of the take-up reels 11A and 11B, the portions of the processing tapes 9A and 9B that are newer than the supply reels 10A and 10B are supplied to the air outlets of the air nozzles 4A and 4B and are taken up by the take-up reels 11A and 11B. . When the moving body 3 moves, the air nozzles 4A and 4B and the air barrier tapes 6A and 6B are moved together with the moving body 3.
And the processing tapes 9A and 9B also move, and the magnetic disk 2
Is processed by the processing tapes 9A and 9B.

As described above, the air 5 is blown onto the air barrier tapes 6A and 6B which do not allow the air 5 to pass therethrough by the air nozzles 4A and 4B.
6B and the processing tapes 9A and 9B
, The fine adjustment can be easily performed by controlling the flow rate of the air 5. Further, since an air supply source permanently installed in the factory can be used, the equipment cost does not increase and the number of steps does not increase.

[0012]

According to the present invention, a spindle which chucks and rotates a magnetic disk, a processing tape having air permeability provided corresponding to the magnetic disk, and a processing tape provided corresponding to the processing tape are provided. The tape for air barrier provided with an air nozzle for blowing air to the tape for air barrier, air is blown from the air nozzle to the tape for air barrier, the processing tape through the tape for air barrier magnetic disk Since it is configured to be brought into pressure contact with, fine adjustment can be performed in a short time and delicate processing conditions can be satisfied.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a magnetic disk processing apparatus according to the present invention.

FIG. 2 is a right side view shown in FIG.

FIG. 3 is an enlarged front view of a main part of FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Spindle 2 Magnetic disk 4A, 4B Air nozzle 5 Air 6A, 6B Air barrier tape 9A, 9B Processing tape

Claims (1)

[Claims] 1. A spindle which chucks and rotates a magnetic disk, a processing tape having air permeability provided corresponding to the magnetic disk, and an air barrier tape provided corresponding to the processing tape And an air nozzle for blowing air to the air barrier tape, wherein air is blown from the air nozzle to the air barrier tape, and the processing tape is pressed against the magnetic disk via the air barrier tape. Magnetic disk processing device.