JPH11231192A - Optical element supporting device, lens barrel and projection aligner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical element supporting device and a lens barrel capable of reducing deflection amount in an optical element and easily securing the optical performance of the optical element, and an aligner capable of accurate projection exposure. SOLUTION: A vertical format lens supporting device 61 is composed of respective movable supporting parts 63a and 63b engaged with the outer peripheral parts of a lens 62 on a lower side and an upper side in a gravity direction and a fixed supporting part 64. The respective supporting parts 63a, 63b and 64 are arranged at equal angle intervals in the circumferential direction of the lens 62. The load of the lens 62 is supported by both supporting parts 63a and 63b, and the tilt of the lens 62 with the supporting parts 63a and 63b as the center of tilt is regulated by the supporting part 64. The rotation of the lens 62 around a Z-axis is regulated by the cooperation of the supporting parts 63a, 63b and 64.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element supporting device for supporting an optical element such as a lens and a reflecting mirror, a lens barrel having the optical element, and an exposure apparatus for manufacturing a semiconductor element and the like. It is about.

[0002]

2. Description of the Related Art In many cases, optical elements such as lenses and reflecting mirrors constituting optical systems of various optical instruments are used while being supported in a lens barrel via a supporting device.

[0003] As this type of optical element support device, for example, a device using the following frame has been conventionally known. That is, as shown in FIG. 19 and FIG.
Reference numeral 51 includes an annular receiving frame 152 and an annular retaining ring 153 that can be screwed to the receiving frame 152. The opening 154 of the receiving frame 152 is provided with a large diameter portion 154a and a small diameter portion 154b. Those large diameter parts 15
A lens 155 is provided at a boundary between the small diameter portion 154b and the small diameter portion 154b.
A step portion 157 corresponding to the shape of the flange portion 156 formed on the peripheral edge of is formed. The inner peripheral surface of the large diameter portion 154a is formed as a screw hole 158, and can be screwed with a screw portion 159 formed on the outer peripheral surface of the retaining ring 153.
Then, in a state where one side surface of the flange portion 156 of the lens 155 is in contact with the step portion 157 of the receiving frame 152, the retaining ring 153 is provided.
Is tightened until it comes into contact with the other side surface of the collar portion 156 so that the lens 155 is held in the frame 151. Thereby, the flange portion 15 of the lens 155
6 and the bottom surface 157a of the step 157 of the receiving frame 152
The other side surface of the collar portion 156 and the distal end surface 153a of the retaining ring 153 are in surface contact over substantially the entire circumference of the collar portion 156, respectively. The lens 155 supported by the frame 151 is mounted in the lens barrel of various optical devices via a mounting bracket (not shown).

[0004]

However, in the above-described conventional configuration, both side surfaces of the flange portion 156 of the lens 155, the bottom surface 157a of the step portion 157 in the receiving frame 152, and the distal end surface 153a of the retaining ring 153 are respectively undulated. It is almost impossible to machine a completely uniform flat surface without any precision, no matter how precise. For this reason, in a state where the lens 155 is sandwiched by the frame 151, the lens 15
5, a considerable part of the processing tolerance based on the surface waviness of the receiving frame 152 and the retaining ring 153 may concentrate on the lens 155. Such a concentration of the tolerance in the lens 155 causes unpredictable deflection that differs for each lot of the lens 155, and there is a problem that the optical performance of the lens 155 may be reduced.

[0005] In particular, in a vertical lens arranged such that the optical axis intersects the direction of gravity, not only the deflection due to the above-mentioned tolerance concentration but also the asymmetric deflection due to the weight of the lens is added, so that the optical performance is further reduced. There was a problem that there was a possibility.

In the above-mentioned optical apparatus, for example, in an exposure apparatus such as a stepper for manufacturing a semiconductor element, a liquid crystal display element, an image pickup element (CCD or the like), a thin film magnetic head, or the like by photolithography, the optical element is As the surface accuracy, a micron-order accuracy or higher accuracy is required. Therefore, if the above-described unpredictable deflection occurs in the optical element, focus control at the time of exposure becomes very difficult, and troublesome fine adjustment is required for each device, which is a problem that it is troublesome. .

The present invention has been made in view of the problems existing in the conventional technology, and has as its object to reduce the amount of deflection in an optical element and to improve the optical performance of the optical element. An object of the present invention is to provide an optical element supporting device that can be easily secured. Another object of the present invention is to provide a lens barrel capable of holding an optical element without deteriorating its optical performance. In addition, another object of the present invention is to provide an exposure apparatus capable of suppressing a decrease in optical performance of an optical element and capable of performing high-precision projection exposure.

[0008]

In order to achieve the above object, according to the first aspect of the present invention, there is provided an optical element supporting device for supporting an optical element (62) extending in a direction in which an optical axis (AX2) intersects the direction of gravity. (61, 91, 106, 111), the support mechanism (63a, 63b, 6) engaging with the outer peripheral portion (62a) of the optical element (62) at at least three places.
4,92a, 92b, 93,107a, 107b, 11
2a, 112b) and the support mechanism (63a, 63b).
b, 64, 92a, 92b, 93, 107a, 107
b, 112a, 112b) are a load supporting function for supporting the load of the optical element (62), and a tilt for restricting the tilt of the optical element (62) with the support position of the load of the optical element (62) as a tilt fulcrum. The gist is to have a regulating function and a rotation regulating function of regulating the rotation of the optical element (62) about an axis (Z axis) orthogonal to the optical axis (AX2).

Therefore, according to the first aspect of the present invention, the outer peripheral portion of the optical element is supported by at least three supporting mechanisms, and the optical element is supported between the side surface of the optical element and the supporting portion of the supporting device. No surface contact occurs over the entire circumference of the side surface. For this reason, the possibility that the processing tolerance of the optical element itself and the support portion of the supporting device is concentrated on the optical element via the support portion is reduced.

According to a second aspect of the present invention, in the optical element supporting device (61, 91, 106, 111) according to the first aspect, the supporting mechanism (63a, 63b, 64, 92a, 9) is provided.
2b, 93, 107a, 107b, 112a, 112
b) a lower supporting portion (63a, 63b, 92) which engages with a lower portion in the direction of gravity of the outer peripheral portion (62a) of the optical element (62).
a, 92b, 107a, 107b) and an upper support portion (64, 9) which engages with the upper portion in the direction of gravity of the outer peripheral portion of the optical element.
3, 112a, 112b) and the upper support (6
4, 93, 112a, 112b) and the lower support (63
a, 63b, 92a, 92b, 107a, 107b) are provided with tilt control means (80, 84, 95) having the tilt control function, and upper support portions (64, 93, 112a, 112b). And lower support portions (63a, 63b, 92a, 92b, 107a, 107)
b) and at least the other of the load supporting means (63a, 63b, 92a, 92b, 10) having the load supporting function.
7a, 107b).

Therefore, according to the second aspect of the present invention, in addition to the function of the first aspect of the present invention, the tilting with the load supporting means of the optical element as a tilting fulcrum while reliably supporting the weight of the optical element is performed. It is surely suppressed.

According to a third aspect of the present invention, in the optical element supporting device (61, 91, 106, 111) according to the second aspect, the upper supporting portions (64, 93, 112a, 112).
b) or the lower support (63a, 63b, 92a, 92)
b, 107a, 107b) is at least one of an outer periphery of the optical element (62) with respect to the first support portion (63a, 92a, 107a, 112a) and the first support portion (63a, 92a, 107a, 112a). Support portions (63b, 92b, 107b, 1) arranged at predetermined intervals in the direction
12b), and the first support portions (63a, 92a,
107a, 112a) and the second support portions (63b, 92b,
107b, 112b) is arranged so as to be symmetrical with respect to an axis (Z axis) extending along the direction of gravity.

Therefore, according to the invention of claim 3, in addition to the effect of the invention of claim 2, the optical element is supported in a well-balanced manner with respect to the axis along the direction of gravity. According to a fourth aspect of the present invention, in the optical element supporting device according to the second or third aspect, the supporting portions (63a, 63) are provided.
b, 64, 92a, 92b, 93) are optical elements (6
2) The center (LP) and each support (63a, 63b, 6)
4, 92a, 92b, 93) (L1 to L)
The gist is that, when 3) is imagined, the central angles (θ) formed by two adjacent line segments are arranged at substantially equal intervals.

Therefore, according to the invention of claim 4, in addition to the effect of the invention of claim 2 or 3, the optical element is supported in a more balanced manner. According to a fifth aspect of the present invention, in the optical element supporting device (106, 111) according to the third or fourth aspect, when the lower supporting portion (107a, 107b) is provided with a load supporting means (107a, 107b), The first and second support portions (107a, 107b) include an axis (X-axis) orthogonal to the optical axis (AX2) in a horizontal plane that divides the optical element (62) into upper and lower portions in the direction of gravity, and an optical element ( 62) and the first and second support portions (107).
a, 107b) reaction force (Fa, F) in the center (LP) direction of the optical element (62) against the load of the optical element (62).
b) When the angle between each line segment connecting the action point (SPa, SPb) with the action point (SPa, SPb) is Θ, the ratio of the reaction force (Fa, Fb) at each action point is sinΘ. The main point is.

Therefore, according to the fifth aspect of the present invention, in addition to the function of the third or fourth aspect, the distribution of the support load in the first and second support portions is distributed in a more balanced and almost optimum state. Therefore, the optical element is supported in a more stable state.

According to a sixth aspect of the present invention, in the optical element supporting device (61, 91, 106, 111) according to the fifth aspect, the central angle (θs) is in a range of 5 ° to 60 °. It is a gist.

Here, when the central angle is less than 5 °, the effect of the engagement between the two support portions is small to restrict the rotation of the optical element about an axis orthogonal to the optical axis and extending in the direction of gravity. At the same time, there is a possibility that adjacent support portions may interfere with each other. On the other hand, when the central angle exceeds 60 °, when a receiving member that contacts the outer peripheral portion of the optical element at a plurality of supporting points (corresponding to the action points) is used for each supporting portion, the supporting member is not supported. Points will be present across the horizontal plane. For this reason, the effect of supporting the weight of the optical element at the support point is reduced, and the load is easily concentrated on some of the support points.

On the other hand, according to the sixth aspect of the present invention, in addition to the function of the fifth aspect of the present invention, the rotation of the optical element is ensured, and the load is shared between the support points of the receiving member. The effect is exhibited efficiently.

According to a seventh aspect of the present invention, there is provided the optical element supporting device according to any one of the third to sixth aspects.
6, 111), the first and second support portions (63
a, 63b, 92a, 92b, 107a, 107b) that the bearing structure (73, 74, 75, 109) is interposed between the outer peripheral portion (62a) of the optical element (62). I have.

According to the seventh aspect of the present invention, in addition to the function of any one of the third to sixth aspects, the relative arrangement between the optical element and each supporting portion can be freely set by the interposition of the bearing structure. It is possible to absorb the processing tolerance of each member such as the optical element itself and the support part.

According to an eighth aspect of the present invention, there is provided the optical element supporting device according to any one of the third to seventh aspects.
In the above, the first and second support portions (107a, 107
(b, 112a, 112b), at least one supporting portion (107a) is provided with adjusting means (109) capable of adjusting the movement of the optical element (62) in the circumferential direction.

Therefore, according to the eighth aspect of the invention, in addition to the operation of any one of the third to seventh aspects, the movement of a part of the support portion in the circumferential direction of the optical element is adjusted. Thereby, the processing tolerance of each member such as the optical element itself and the support portion in the same direction can be absorbed. Further, according to the present invention, when the optical element is irradiated with the exposure light, heat may be accumulated in the optical element, but the thermal expansion of the optical element due to such accumulated heat can be absorbed.

According to a ninth aspect of the present invention, there is provided the optical element supporting device according to any one of the second to eighth aspects.
6, 111), the gist is that the tilt restriction function is achieved by the elastic force of the elastic members (84, 95) having a degree of freedom in the vertical direction of gravity.

Therefore, according to the ninth aspect of the invention, in addition to the effects of any one of the second to eighth aspects, the tilting of the optical element is reliably suppressed, and the processing tolerance of each member and the environmental temperature are controlled. The dimensional deviation between the optical element and the supporting device caused by the change can be absorbed.

According to a tenth aspect of the present invention, in the optical element supporting device (91) according to the ninth aspect, the tilt control function is orthogonal to the optical axis (AX2) of the optical element (62) and orthogonal to gravity. Elastic member (9
The gist is achieved by the elastic force of 5).

Therefore, according to the tenth aspect, in addition to the effect of the ninth aspect, the processing tolerance and the dimensional deviation can be more reliably absorbed. According to an eleventh aspect of the present invention, in the optical element supporting device (111) according to any one of the second to tenth aspects, the upper supporting portion (6) is provided.
4, 112a, 112b) is provided with a pulling means (116) for pulling the optical element (62).

Therefore, according to the eleventh aspect of the present invention, in addition to the function of any of the second to tenth aspects, the upper supporting portion can also support a part or all of the weight of the optical element. it can. In particular, in a configuration in which the load supporting means is also provided on the lower support portion, the optical element is received below and pulled from above, so that the shared load on each support portion is further reduced, and the deflection of the optical element is reduced. The volume is further reduced.

According to a twelfth aspect of the present invention, in the optical element supporting device (111) according to the eleventh aspect, the upper supporting portions (112a, 112b) are the first of the lower supporting portions.
The second support portions (107a, 107b) and the optical element (6
The third support portion (112a) and the fourth support portion (112) arranged at positions substantially symmetric with respect to the center (LP) of 2).
The gist is to have b).

Therefore, according to the twelfth aspect of the invention, in addition to the function of the eleventh aspect, the weight of the optical element can be supported in a more balanced manner. According to the thirteenth aspect, the optical element (62) extending in the direction in which the optical axis (AX2) intersects with the direction of gravity is attached to the optical element supporting device (61, 9).
In the lens barrel (51) held on the inner peripheral surface via (1, 106, 111), the optical element supporting device (61, 9) is used.
1, 106, 111) has the gist of being constituted by the optical element supporting device according to any one of claims 1 to 12.

Therefore, according to the thirteenth aspect of the present invention, the optical element supporting device having the function of any one of the first to twelfth aspects allows the optical element to be mounted in the body of the lens barrel without deteriorating the optical performance. Can be held.

According to a fourteenth aspect of the present invention, in an exposure apparatus having an optical element (62) extending in a direction in which an optical axis (AX2) intersects the direction of gravity in a lens barrel (51), the optical element (62) comprises: The gist is that the optical element supporting device is supported in the lens barrel via the optical element supporting device according to any one of claims 1 to 12.

Therefore, according to the fourteenth aspect of the present invention, the optical element supporting device having the function of any one of the first to twelfth aspects suppresses a decrease in the optical performance of the optical element, thereby achieving high-precision projection. Exposure becomes possible.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS.

In the first embodiment, a so-called step
In an AND-scan type scanning exposure apparatus, the optical element supporting device of the present invention is embodied as a vertical lens supporting device, and the lens barrel of the present invention is embodied as a part of a projection optical system.

First, a scanning type exposure apparatus (hereinafter simply referred to as "exposure apparatus") will be described with reference to FIGS. As shown in FIG. 1, the exposure apparatus 31 includes a reticle,
Exposure light source 32 for illuminating a mask such as a photomask
An illumination optical system 33 for adjusting exposure light; a mask stage 34 for mounting the mask; and a projection optical system for projecting a circuit pattern on the mask illuminated by the exposure light onto a substrate such as a wafer or a glass plate. 35, and a substrate stage 36 on which the substrate is placed. Of these components, the portion excluding the exposure light source 32 is housed in a chamber 37 whose temperature, humidity, and the like are controlled with high precision. Hereinafter, in this embodiment, an example in which a reticle R is used as the mask, a wafer W is used as the substrate, and a circuit pattern on the reticle R is reduced and projected onto the wafer W at a predetermined reduction magnification and transferred. explain.

As the exposure light source 32, for example,
An ArF excimer laser that emits 93 nm laser light is used. The laser light from the exposure light source 32 passes through the light guide optical system 33a to the illumination optical system 33 in the chamber 37.
It is led to.

The illumination optical system 33 includes various lens systems such as a relay lens, a fly-eye lens, and a condenser lens. The illumination optical system 33 has an aperture stop and a reticle R mounted on the mask stage 34.
And a blind arranged at a position conjugate with the pattern surface of the above.

The mask stage 34 is arranged below the illumination optical system 33 so that the mask mounting surface 41 is orthogonal to the optical axis of the projection optical system 35.
The mask stage 34 includes a mask holder 42 for mounting and holding the reticle R. The mask holder 42 can be moved in the Y-axis direction (the horizontal direction in FIG. 1) in a horizontal plane by a driving mechanism (not shown). Further, the mask holder 42 has a small movement in the X-axis direction (a direction orthogonal to the paper surface in FIG. 1) and a small rotation about the Z-axis (an axis extending in the direction of gravity parallel to the optical axis of the exposure light EL). It is configured as possible.

The projection optical system 35 includes, for example, the reflection optical element 4
It is composed of a catadioptric optical system having three reflections each having three lens units 3 and three lens groups 44. Then, when the exposure light passes through the projection optical system 35, the sectional shape is reduced to a predetermined reduction magnification 1 / n (n is a positive integer) by these lens groups. The configuration of the projection optical system 35 will be described later in detail.

The substrate stage 36 has a surface plate 45 and an X stage 46 movably arranged in the X-axis direction.
A Y stage 47 movably arranged in the Y axis direction. The Y stage 47 is provided with a substrate holder 48 on which the wafer W is placed and which is held by vacuum suction. The Y stage 47 is moved in the opposite direction with respect to the mask holder 42 of the mask stage 34 at a speed ratio determined according to the reduction magnification of the projection optical system 35 during scanning exposure.

Next, the projection optical system 35 will be described in detail. As shown in FIG. 2, the projection optical system 35 includes a lens barrel 51 as a barrel having a shape of π, and first to third lens groups 44a to 44 that constitute a reduction optical system as a whole.
c and a plurality of reflective optical elements (concave mirror or plane mirror) 43a
To 44c.

A first opening 53 is formed in a reticle facing surface 52 of the lens barrel 51 facing the reticle R on the mask stage 34. Further, a second opening 55 is formed in a wafer facing surface portion 54 of the lens barrel 51 facing the wafer W on the substrate stage 36.

The first lens group 44a is housed in the first leg 51a of the lens barrel 51, and has a plurality of concave lenses, convex lenses, etc. having a common optical axis AX1 extending along the Z-axis direction below the reticle R. It is constituted by. The second lens group 44b is housed in the transverse section 51c of the lens barrel 51, and includes a plurality of lenses having a common optical axis AX2 extending along a direction orthogonal to the Z axis. The third lens group 44c includes a second leg 51b of the lens barrel 51.
And a plurality of concave lenses and convex lenses having a common optical axis AX3 that extends above the wafer W along the Z-axis direction.

Below the first lens group 44a,
The concave mirror 43a serving as a reflective optical element is arranged such that its optical axis coincides with the optical axis AX1 of the first lens group 44a. Above the first lens group 44a, at the position of the pupil plane of the projection optical system 35, a first plane mirror 43b also forming a reflection optical element is obliquely provided. Above the third lens group 44c, a relatively large second plane mirror 43c, which also forms a reflection optical element, is inclined. This second
The plane mirror 43c is a general reflection mirror that reflects the exposure light by almost 100%. The second lens group 44b is disposed between the first plane mirror 43b and the second plane mirror 43c.

The transverse section 51c of the reticle facing surface section 52
A first light shielding plate 56 is provided on the side portion, extending to a position near the optical axis AX1 of the first lens group 44a. The first light blocking plate 56 restricts the incidence of light from above on the right half of the first lens group 44a in FIG. The optical axis A of the second lens group 44b is provided on the bottom side of the joint between the first leg 51a and the traversing part 51c of the lens barrel 51.
A second light shielding plate 57 extending to the vicinity of X2 is provided. The second light shielding plate 57 is provided between the first lens group 44a and the second lens group 44a.
It is arranged so as to correspond to the boundary with the lens group 44b. The second light-blocking plate 57 suppresses unnecessary reflected light and irregularly reflected light from the first lens 44a from entering the second lens group 44b.

The projection optical system 35 is provided on the optical axis AXL of the exposure light EL between the first plane mirror 43b and the second lens group 44b arranged on the pupil plane. The conjugate point K exists. The catadioptric projection optical system 35 configured as described above has a higher numerical aperture (N.I.
A. ), The number of optical elements is reduced, and the degree of narrowing of the laser band is reduced.

Next, a vertical lens supporting device for constituting the optical element supporting device for supporting the second lens group 44b in the transverse portion 51c of the lens barrel 51 will be described in detail.

As shown in FIGS. 3 and 4, the vertical lens support device 61 has a plurality of (two in this case) as lower support portions which engage with the outer peripheral portion of the lens 62 on the lower side in the direction of gravity.
A first movable support portion 63a and a second movable support portion 63b,
The fixed support portion 64 as an upper support portion is engaged with the outer peripheral portion of the lens 62 on the upper side in the direction of gravity. These support parts 63a, 63b, 64 are arranged at equal angular intervals in the circumferential direction of the lens 62. That is,
Each support part 63a, 63b, 64 and the center LP of the lens 63
Are imagined as the line segments L1 to L3, the plurality of central angles θ formed by the adjacent line segments L1 to L3 are all equal. Further, the first movable support portion 63a and the second movable support portion 63b have a Z axis as an axis orthogonal to the optical axis AX2 of the lens 62 and extending along the direction of gravity.
They are arranged at an interval of θ / 2 with respect to the axis. That is, the first movable support 63a and the second movable support 63b
Each constitutes a first support and a second support arranged symmetrically with respect to the Z axis.

As shown in FIG. 3, FIG. 4, FIG. 5 (c), FIG. 5 (d), and FIG.
Is a receiving member 67 engaged with the outer peripheral portion of the lens 62.
And a base 68 joined and held to the lens barrel 51 as the apparatus main body, and a bearing structure interposed therebetween. These movable support portions 63a, 63b
Constitutes load supporting means having a function of supporting a load mainly based on the weight of the lens 62.

A groove 7 extending along the circumferential direction of the lens 62 is provided at the center of the facing surface of the receiving member 67 on the lens 62 side.
0 is formed, and the groove 7 is formed at both ends in the groove 70.
An arc-shaped projection 71 extending so as to intersect zero is formed. A flange 62a formed on the outer periphery of the lens 62 is engaged with the groove 70, and the arc-shaped projection 71 is
It comes into contact with the outer peripheral surface of the second brim portion 62a. That is, the ridge lines of the two arc-shaped protrusions 71 form a plurality of support points SP existing at a predetermined interval.

A packing 72 made of an elastic material such as rubber is interposed between the inner surface of the groove 70 and the side surface of the flange 62a of the lens 62. The receiving member 6
At the center of the surface of the lens 7 on the side opposite to the facing surface on the lens 62 side, a conical concave portion 73 forming a part of the bearing structure is formed.

On the other hand, in the center of the surface of the base portion 68 on the lens 62 side, a conical concave portion 74 forming a part of the bearing structure is opposed to the conical concave portion 73 of the receiving member 67.
Are formed. Then, the two conical concave portions 73, 7
4, a ball 75 constituting a part of the bearing structure is interposed. Further, the base 68 is provided with the lens 62.
On a surface opposite to the surface on the side, a bolt 77 is joined and fixed to a support seat 76 formed on the inner peripheral surface of the lens barrel 51.

Here, the ball 75 is arranged at a position substantially corresponding to the middle between the two arc-shaped projections 71 of the receiving member 67. And since this and the both movable support parts 63a and 63b are arranged symmetrically with respect to the Z-axis as described above, each support point SP of each movable support part 63a and 63b is also the Z-axis. Are arranged symmetrically with respect to.

As shown in FIGS. 3, 4, 5 (a) and 5 (b), the fixed support portion 64 includes an engaging portion 80 which engages with the outer peripheral portion of the lens 62, and an elastic member. And a plate-like elastic body 84 as the main body. In this embodiment, the engagement portion 80 and the plate-like elastic body 84 constitute a tilt control unit having a tilt control function.

A groove 81 and an arc-shaped projection 82 are formed on the surface of the engagement portion 80 facing the lens 62, similar to the surface of the first support portion 63 facing the receiving member 67. Also,
A flange 62a formed on the outer periphery of the lens 62 is engaged with the groove 81. A packing 83 made of an elastic material such as rubber or a spring is provided between one side surface of the flange 62 a of the lens 62 and the inner wall surface of the groove 81.
Is interposed. Further, the other side surface of the collar portion 62a directly contacts the inner wall surface of the groove 81. Therefore, the other side surface is configured as a reference surface.

The plate-like elastic body 84 has a flat plate shape, and its longitudinal direction is in the same direction as the optical axis AX 2 of the lens 62, and a support seat formed on the inner peripheral surface of the engaging portion 80 and the lens barrel 51. 85. This plate-like elastic body 84
At the center thereof, it is fixed to the side surface opposite to the one side surface of the engaging portion 80 by bolts 86, and at both ends thereof is fixed to the seating surface of the support seat 85 by a pair of bolts 87. The plate-like elastic body 8 is provided on the seat surface of the support seat 85 between the positions where the two bolts 87 are screwed.
A relief portion 88 for allowing the elastic deformation of No. 4 is recessed. As described above, the plate-like elastic body 84 has a degree of freedom only in the Z-axis direction, that is, is elastically deformable, and is restricted from moving in the optical axis AX2 direction. Thereby, the two movable support portions 6 of the lens 62 are
The tilting with the tilting support points 3a and 63b is restricted.

Further, as described above, in the vertical lens supporting device 61, the first movable supporting portions 63 at the three locations are used.
a, the second movable support portion 63b and the fixed support portion 64 are arranged at equal angular intervals. Both movable support parts 63
The weight of the lens 62 is supported upward at a and 63b, and the tilting of the lens 62 is restricted at the fixed support portion 64. Then, these support portions 63a, 63
b and 64 are joined and fixed to support seats 76 and 85 of the lens barrel 51. Therefore, the rotation of the lens 62 about the Z axis is also restricted. That is, each of the support portions 63a, 63b, and 64 also constitutes a rotation restricting unit having a function of restricting the rotation of the lens 62.

Next, the exposure apparatus 3 configured as described above
1 will be described. As shown in FIG. 1, when the exposure light source 32 irradiates the exposure light EL with the wafer W and the reticle R aligned, the exposure light E
When L passes through the illumination optical system 33, its cross-sectional shape is limited to, for example, a slit shape by blinds in the illumination optical system 33. The slit-shaped exposure light E
L illuminates the slit-shaped illumination area on the reticle R on which the circuit pattern is drawn with a uniform illuminance via a fly-eye lens, a condenser lens, or the like.

Next, as shown in FIG.
Exposure light EL transmitted through is incident on the projection optical system 35,
The light passes mainly through the left half of the first lens group 44a and reaches the concave mirror 43a. Here, the exposure light EL is reflected by the concave mirror 43.
The light is reflected in a direction symmetrical to the incident direction with respect to the optical axis AX1 of a, passes through the right half of the first lens group 44a, and reaches the first plane mirror 43b.

Next, the exposure light EL is applied to the first plane mirror 43.
b, is changed in the direction parallel to the optical axis AX2 of the second lens group 44b, passes through mainly the upper half of the second lens group 44b, and reaches the second plane mirror 43c. Then, the exposure light EL is reflected by the second plane mirror 43c, and is changed in direction parallel to the optical axis AX3 of the third lens group 44c.

The exposure light EL passes mainly through the left half of the third lens group 44c, and reaches the wafer W on the substrate stage 36 via the second opening 55. As described above, the projected aerial images of the circuit pattern on the reticle R are the first to the first.
When transmitted through the third lens groups 44a to 44c, the circuit pattern is reduced by a factor of 1 / n, and the reduced circuit pattern on the reticle R is projected and exposed on the wafer W.

At the time of this exposure, the mask holder 42 for mounting and supporting the reticle R and the substrate holder 48 for mounting and supporting the wafer W are opposite to each other along the Y-axis direction at a predetermined speed ratio. Scan synchronously. Thereby, the reticle R
Is transferred to one shot area on the wafer W. Such scanning exposure is performed by using the X
The movement is performed while the wafer W is sequentially moved stepwise by the movement of the stage 46 and the Y stage 47. Then, the pattern of reticle R is transferred to all shot areas on wafer W.

According to the first embodiment configured as described above, the following operation and effect can be obtained. (A) In the vertical lens support device 61, the three first movable support portions 63a, the second movable support portions 63b, and the fixed support portions 64 are arranged at equal angular intervals.
The weight of the lens 62 is supported upward by the movable support portions 63a and 63b, and the fixed support portion 64
, The tilting of the lens 62 with the two movable supporting portions 63a and 63b as tilting fulcrums is restricted. Further, by the cooperation of these support portions 63a, 63b, 64, the lens 62
The rotation about the Z-axis along the direction of gravity of is also restricted. That is, the lens 62 is securely held only by the three support portions. Therefore, as in the conventional configuration, the lens 62
There is no surface contact over substantially the entire circumference of the lens 62 between the and the supporting device supporting the same.

For this reason, the processing tolerance of the lens 62 itself and the supporting portion of the supporting device, such as planar waviness, is limited by the lens 62.
In the supporting state, the possibility of concentration on the lens 62 can be reduced. Therefore, the possibility that unpredictable bending occurs in the lens 62 can be suppressed, the surface accuracy of the lens 62 can be ensured well, and a decrease in the optical performance of the lens 62 can be suppressed.

(B) In the vertical lens support device 61, the lens 62 is connected to the two lower movable support portions 63.
The weight is supported at a and 63b, and the tilting of the upper fixed support 64 is restricted. In this case, in the vicinity of the lower movable support portions 63a and 63b, there is a possibility that vertical asymmetric bending due to the weight of the lens 62 may occur.

However, in the catadioptric projection optical system 35 as described above, the second lens group 4 which is placed vertically
4b, the exposure light EL is applied to both the movable support portions 63a,
Without passing through the lower end portion including the vicinity of 63b, the light passes mainly through the upper half portion, for example, within the range shown by the two-dot chain line in FIGS. For this reason, even if the above-described bending occurs in the lower part of the lens 62, the influence is small. Therefore, the vertical lens support device 61 is particularly suitable as a lens support device for the catadioptric projection optical system 35.

(C) In the vertical lens supporting device 61, both movable supporting portions 6 supporting the weight of the lens 62
The reference numerals 3a and 63b are arranged so as to be symmetrical with respect to the Z axis passing through the center LP of the lens 62 and extending in the direction of gravity.
Also, each support point SP of the two movable support portions 63a, 63b.
Are also arranged symmetrically with respect to the Z axis. Therefore, the weight of the lens 62 is supported in a well-balanced manner, and the amount of deflection of the lens 62 that is asymmetric in the horizontal direction can be reduced.

(D) In the vertical lens supporting device 61, each of the movable supporting portions 63a and 63b has two supporting points SP.
Receiving member 6 having (arc-shaped projection 71 in this embodiment)
7 is used. Therefore, the weight of the lens 62 is
Each of the movable support portions 63a and 63b is also divided into two support points SP. Therefore, each movable support 63a,
In 63b, the load of the lens 62 is suppressed from being concentrated at one point, and the lens 6 near each support point SP is prevented.
2 can be reduced.

(E) A bearing structure (in this embodiment, a pair of conical concave portions 73 and 74 and a ball 75) is interposed in each movable support portion 63a and 63b of the vertical lens support device 61. ing. Therefore, swing of the receiving member 67 about the center BP of the ball 75 as the swing center is allowed. That is, when the lens 62 is mounted, the lens 6
The degree of freedom of the relative arrangement is generated between the base 2 and the base 68. Thereby, the relative position between the receiving member 67 and the lens 62 is automatically finely adjusted so as to be along the outer peripheral surface of the flange 62a of the lens 62. Therefore, by this fine adjustment, the lens 62 itself and the two movable support portions 63a, 63
The processing tolerance of each member b can be absorbed.

The lens 62 is connected to each movable support 63a,
When the lens 62 is bent by its own weight when mounted on the frame 63b, even if the outer peripheral surface of the collar portion 62a is slightly deformed, the receiving member 67 is swung according to the deformation. Therefore, even if the lens 62 is deformed,
Engagement of the outer peripheral surface of the lens 62 with the support point SP of the receiving member 67 can be ensured.

(F) In the vertical lens support device 61, the fixed support portion 64 is fixedly joined to the lens barrel 51 via the plate-like elastic body 84. Here, since the plate-like elastic body 84 is difficult to elastically deform in the direction of the optical axis AX2 of the lens 62 (that is, the direction orthogonal to the direction of gravity), the two movable support portions 63a and 63b are The tilt of the lens 62 serving as the tilt fulcrum can be reliably suppressed.

Since the weight of the lens 62 is supported below the movable support portions 63a and 63b, the processing tolerance of the lens 62 and other members in the direction along the gravity is higher than the lens 62. You will concentrate. Based on the concentration of the processing tolerance, the lens 6
2 and the fixed support 64 may be displaced. In addition, since the members of the lens 62 and the members of the fixed support portion 64 have different linear expansion coefficients, a similar positional shift may occur with a change in environmental temperature.

Here, since the plate-like elastic body 84 can be elastically deformed in the vertical direction which is the direction of gravity, it is possible to easily absorb the displacement of the lens 62 in the radial direction. it can. Therefore, the amount of deflection of the lens 62 in the direction of gravity can be reduced.

(G) In the lens barrel 51,
The lens 62 is held via the vertical lens support device 61 having the above-described configuration. Accordingly, the amount of deflection of the lens 62 is reduced, and the lens 62 can be held in the lens barrel 51 without causing a decrease in optical performance. (H) In the exposure apparatus 31, the plurality of lenses 62 constituting the second lens group 44b are held in the transverse section 51c of the lens barrel 51 via the vertically placed lens support device 61 having the above-described configuration. . For this reason, a decrease in the optical performance of each lens 62 is suppressed, and high-precision projection exposure becomes possible.

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIGS. 7 to 10, focusing on parts different from the first embodiment. In the vertical lens support device 91 of the second embodiment, the configurations of the movable support portions 92a and 92b and the second support portion 93 are different from those of the first embodiment.

As shown in FIGS. 7 to 10, the first movable support portion 92a and the second movable support portion 92b of the second embodiment.
In the figure, a member corresponding to the receiving member 67 of the first embodiment is omitted. A conical concave portion 94 is formed on the outer peripheral surface of the flange portion 62 a of the lens 62 so as to correspond to the conical concave portion 74 of the base portion 68 of both movable support portions 92. A ball 75 is interposed between the conical concave portions 74 and 94, and the ball 75
Two support points SP are configured. That is, the vertical lens support device 91 of the present embodiment has one support point SP for each movable support portion 92.

The engagement portion 80 of the fixed support portion 93 is supported by the support seat 8 of the lens barrel 51 so as to extend along the optical axis AX2 of the lens 62 via a plate-like elastic body 95 having an L-shaped cross section.
5 is attached to the inner surface of the mounting groove 96 formed therein.
A slit 97 is formed at the center of the bent portion of the plate-like elastic body 95. Due to the presence of the slit 97, the degree of freedom in the vertical direction (Z-axis direction), which is the direction of gravity of the plate-like elastic body 95, and the direction along the horizontal axis (X-axis direction) intersecting the optical axis AX2 of the lens 62, that is, Elastic deformation function is ensured. The plate-like elastic body 95 is joined and fixed to the engaging portion 80 by a bolt 86 at the center of the horizontal surface portion 98. Further, the plate-like elastic body 95 is attached to the mounting groove 9 by a bolt 100 at the center of the vertical surface portion 99.
6 is fixedly joined to a support projection 101 formed on the inner side surface. Both sides of the support protrusion 101 are provided with a plate-like elastic body 95.
Relief portion 102 which allows elastic deformation in the X-axis direction of
It has become.

According to the second embodiment configured as described above, in addition to the substantially same effects as (a) to (c) and (f) of the first embodiment, the following operation and effects are further achieved. To play.

In the vertical lens support device 91, the ball 75 is directly engaged with the conical concave portion 94 formed on the outer peripheral surface of the lens 62 in the two movable support portions 92a and 93b. For this reason, the number of parts can be reduced and the configuration can be simplified.

(V) The plate-like elastic body 95 interposed in the fixed support portion 93 of the vertical lens support device 91 is
It can be elastically deformed in the axial direction and the X-axis direction. For this reason, the displacement between the lens 62 and the fixed support 93 in the X-axis direction of the lens 62 as well as in the radial direction of the lens 62 can be easily absorbed. Therefore, the amount of deflection of the lens 62 can be further reduced.

(Third Embodiment) Next, a third embodiment of the present invention will be described with reference to FIGS. 11 to 15, focusing on parts different from the first embodiment. In the vertical lens support device 106 of the third embodiment, the configuration of both movable support portions 107a and 107b is different from that of the first embodiment.

As shown in FIGS. 11 and 12, this third
In the first movable support portion 107a and the second movable support portion 107b of the embodiment, the receiving member 108 that engages with the outer peripheral portion of the lens 62 is extended along the circumferential direction of the lens 62. Also, one first movable support portion 107a
A V-groove 109 extending along the circumferential direction of the lens 62 instead of the conical recess 74 of the first embodiment is formed on the surface of the base portion 68 facing the lens 62. And
In the first movable support portion 107a, a ball 75 is interposed between the conical concave portion 73 on the back surface of the receiving member 108 and the V groove 109 on the base portion 68. The V-groove 109 allows the first movable support portion 107a to adjust the movement of the lens 62 in the circumferential direction. The V-groove 109 constitutes a part of the bearing structure and constitutes an adjusting means.

The two movable support parts 107a, 107
b has a load supporting function, and each supporting point SP
a, SPb is the lens 6 with respect to the load of the lens 62.
2 is the point of action of the reaction force in the direction of the center LP. Here, the supporting force at each supporting point SP, that is, the reaction force toward the center LP of the lens 62 is zero on a horizontal plane that vertically divides the lens 62 into two parts, and gradually decreases as the supporting point SP moves downward. Each of the support points SPa and SPb is arranged so that the distance between the support points SPa and SPb becomes maximum at the lowermost part of the lens 62. That is, when the angles formed by the axes perpendicular to the optical axis AX2 of the lens 62 in the horizontal plane, that is, the X axis, and the line segments connecting the center LP of the lens 62 and the support points SPa and SPb are θa and θb. In addition, the ratio of the reaction force at each support point SP is sin θa, sin θ
The support points SPa and SPb are arranged so as to form b. In addition, as shown in FIG.
In FIGS. a and 107b, the support point SPa is a support point on the Z-axis side, and the support point SPb is a support point on the X-axis side.

Next, the distribution of the support load at each of the support points SPa and SPb when the support points SPa and SPb are arranged at equal angles (θs) and thus arranged will be described.

The aforementioned θa and θb are represented by θs as follows.

[0086]

(Equation 1)

[0087]

(Equation 2) Here, each reaction force Fa at each support point SPa, SPb,
Since the ratio of Fb makes sinΘ,

[0088]

(Equation 3) Becomes

Next, the joining position of the base 68 to the lens barrel 51 of each of the movable supports 107a and 107b will be considered. Here, both support points S on the receiving member 108
The distribution ratio of Pa and SPb, that is, the center B of the ball 75
What is necessary is just to consider the ratio of the angles α and β between the line connecting P and the center LP of the lens 62 and the line connecting the support points SPa and SPb and the center LP of the lens 62. The ratio of the reaction forces Fa and Fb is the same at each of the support points SPa and SPb in each of the movable support portions 107a and 107b.

[0090]

(Equation 4) Becomes

Since the weight M of the entire lens 62 is supported at two support points SPa and SPb, the following equation is established.

[0092]

(Equation 5) Therefore, solving for Fa and Fb from equations (3) and (5) gives:

[0093]

(Equation 6)

[0094]

(Equation 7) Becomes Next, a description will be given of the result of measuring the amount of deflection using a parallel-plate lens in order to determine the optimal position of each support point in the vertical lens support device 106 of the third embodiment.

FIG. 13 shows the amount of deflection of the lens in the direction of gravity (upper line Sz1 in the figure), and FIG. 14 shows the amount of deflection of the lens in the optical axis direction (upper line Sy1 in the figure). . Here, the amount of deflection of the lens in the direction of the optical axis was as small as about 1/20 of the amount of deflection in the direction of gravity, and was almost negligible.

Here, in the range where the central angle θs is less than 5 °, the two movable supports 107a and 107b are very close to each other, and the direction of gravity of the lens based on the support of the two movable supports 107a and 107b. , The effect of restricting rotation about the Z axis along the axis decreases. In the range of the central angle θs,
There is a possibility that the desired center angle θs cannot be secured due to the interference between the two movable support portions 107a and 107b.

On the other hand, in the range where the central angle θs exceeds 60 °, two support points SPa and SPb of the movable support portions 107a and 107b exist with the X axis interposed therebetween.
Therefore, the effect of supporting the lens load by one of the support points SPb cannot be expected.

On the other hand, the central angle θs shown in FIG.
In the range of ６０60 °, the deflection amount of the lens was in a sufficiently satisfactory range over almost the entire range. Further, when the central angle θs was in the range of 15 ° to 35 °, the change in the amount of deflection of the lens was very small. 13 and FIG. 1 when the central angle θs is in the range of 20 ° to 30 °.
As is clear from FIG. 4, almost no change in the amount of deflection of the lens was observed.

Based on the result, if an example of the optimal arrangement of the support points SPa and SPb in the vertical lens support device 106 is shown, as shown in FIG.
Pa and SPb are arranged at equal intervals with the central angle θs = about 25 °. In this case, each movable support 107a,
According to the equations (1) to (7), the support point SPb on the X-axis side with respect to the ball 75 is located at a position at a center angle of 13.8 ° with respect to the ball 75b.
The support point SPa on the Z-axis side is obtained as a position at a center angle of 11.2 °.

According to the third embodiment configured as described above, in addition to the substantially same effects as (A) to (F) of the first embodiment, the following effects are further obtained. (V) In the vertical lens support device 106, the first movable support portion 107a can be adjusted to move along the circumferential direction of the lens 62. For this reason, even if the lens 62 and the two movable support portions 107a and 107b are displaced based on the processing tolerance and the change in the environmental temperature, the first movable support portion 107a is easily moved in the circumferential direction. Is absorbed by Further, the lens 62 may undergo thermal expansion due to accumulated heat when the exposure light passes. At this time,
The circumferential expansion of the lens 62 is absorbed by the circumferential movement of the receiving member 108, and the expansion of the lens 62 in the optical axis direction is absorbed by the deformation of the packing 83. Accordingly, the occurrence of the bending due to the displacement is suppressed, and the deterioration of the optical performance of the lens 62 can be suppressed.

The means for adjusting the first movable support portion 107 a in the circumferential direction of the lens 62 includes the ball 75 and the V groove 109. For this reason, when a circumferential force is applied to the lens 62, the ball 75
Rolled along 9. Therefore, the first movable support 107
The movement of the lens 62a in the circumferential direction can be easily and reliably adjusted.

(ヲ) This vertical lens support device 106
Then, each support point SP of both movable support parts 107a, 107b
a, the reaction force F corresponding to the load of the lens 62 at SPb
Each support point SP such that the ratio of a, Fb becomes sinΘ
a and SPb are arranged. For this reason, each support point SP
The distribution of the supporting load at a and SPb can be made almost optimal. Accordingly, the lens 62 can be supported in a more stable state, and the amount of deflection of the lens 62 can be further reduced.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIGS. In the vertical lens support device 111 of the fourth embodiment, the third
In the embodiment, as the upper support, in addition to the fixed support 64, a first traction support 112a as a third support provided with traction means and a second traction support 112b as a fourth support are provided. It has become something.

As shown in FIGS. 16 to 18, the first traction support portion 112a and the second traction support portion 112b are disposed at the uppermost position above a horizontal plane which bisects the lens 62 vertically in the gravity direction. It is provided so as to form a pair with the fixed support portion 64 interposed therebetween. That is, the first traction support portion 112a and the second traction support portion 112b are arranged so as to be symmetric with respect to the Z axis, and also constitute the first support portion and the second support portion, respectively. The first traction support 112a and the second traction support 112b are arranged symmetrically with respect to the center LP of the lens 62, and the second traction support 112b and the second movable support 107b, respectively. .

Each of the pulling support portions 112a and 112b serves as a bonding portion 114 which is bonded to the outer peripheral surface of the lens 62 via an adhesive layer 113, and as a pulling means accommodated in a mounting hole 115 formed in the lens barrel 51. , And a connecting member 117 for connecting the joint 114 and the traction spring 116.

The joining portion 114 has a longitudinal direction extending along the circumferential direction of the lens 62. A joining claw 120 forming a pair of support points SPa and SPb is provided on a side surface of the joining portion 114 on the lens 62 side in the longitudinal direction. It is erected. This joining claw 120
In this case, the bonding portion 114 and the lens 62
It is fixedly connected through. The traction spring 116 includes:
One end thereof is in contact with the bottom 115a of the mounting hole 115.

The connecting member 117 is composed of a bridge piece 121 having a π-shaped cross section and a connecting rod 122 which stands vertically from the bridge surface 121a. The bridge piece 121
The leg portion 121b is arranged so as to straddle the upper surface of the joint portion 114 in FIG. 16, and is fixed to the joint portion 114 by a pin 123 at the leg portion 121b. The connection rod 122 is inserted into the inside of the traction spring 116 and a communication hole 115 b formed in the bottom 115 a of the attachment hole 115. The connecting rod 1
A head part 122a is provided at the tip of the head 22, and the head part 122a is engaged with the other end of the traction spring 116 compressed and compressed so as to have a predetermined urging force.
By this engagement, the urging force of the traction spring 116 acts on the lens 62 via the connecting rod 122, the bridge piece 121, the pin 123, the joint 114, and the adhesive layer 113. And
The lens 62 is pulled upward, and a part of the weight of the lens 62 is supported by the two pulling support portions 112a and 112b. As described above, the two traction support portions 112a and 112b also constitute load support means.

Next, in the vertical lens supporting device 111 of the fourth embodiment, the amount of deflection is measured by using a parallel plate-like lens similarly to the vertical lens supporting device 106 of the third embodiment. The results will be described.

FIG. 13 shows the amount of deflection of the lens in the direction of gravity (lower line Sz2 in the figure), and FIG. 14 shows the amount of deflection of the lens in the optical axis direction (lower line Sy2 in the figure). ing. In the vertical lens support device 111 of the fourth embodiment, as compared with the device 106 of the third embodiment, as is clear from FIGS. 13 and 14, the overall amount of deflection is 1/3 in the direction of gravity. About 1/2 in the optical axis direction.

Here, focusing on the deflection in the gravitational direction in which the deflection amount is relatively large, the central angle θs is 10 °.
The change in the amount of deflection was small in the range of ４０40 °. Further, when the center angle θs was in the range of 15 ° to 25 °, the amount of deflection was hardly changed.

Based on the result, if an example of the optimal arrangement of the support points SPa and SPb in the vertical lens support device 111 is shown, as shown in FIG.
Pa and SPb are arranged at equal intervals with the central angle θs = about 25 °. In this case, each movable support 107a,
The distribution of the respective support points SPa and SPb in the 107b and the traction support portions 112a and 112b is calculated by the equation (1).
According to (7), the support point SPa on the X-axis side with respect to the center BP of the ball 75 or the connecting rod 122 is 1 at the central angle.
3.8 ° position, Z-axis side support point SPb is 1 at center angle
The position is 1.2 °.

According to the fourth embodiment configured as described above, in addition to the effects substantially similar to (A) to (F), (L), and (ヲ) of the above embodiments, the following is further obtained. Has the effect of

(W) This vertical lens supporting device 111
In, the traction springs 116 are provided on both the traction support portions 112a and 112b to traction support a part of the weight of the lens 62. Therefore, not only is the weight of the lens 62 received by the lower movable support portions 107a and 107b,
It is also towed and supported by both upper tow supporting portions 112a and 112b. For this reason, the shared load at each of the support points SPa and SPb is further reduced, and the amount of deflection of the lens 62 can be further reduced.

(F) This vertical lens support device 111
In the above, each of the traction support portions 112a and 112b that share and support a part of the weight of the lens 62 is divided into the movable support portions 107a and 10b that also share and support a part of the weight of the lens 62.
7b and symmetrically with respect to the center LP of the lens 62. Therefore, the weight of the lens 62 can be supported in a more balanced manner.

The above embodiments according to the present invention can be embodied with the following modifications. In the above embodiments, the movable support portions 63, 92,
Three or more 107s may be provided. In the fourth embodiment, three or more traction support portions 112 may be provided. In such a configuration, the weight of the lens 62 is further dispersed in the support portions 63, 92, 107, and 112, and the shared load on the support portions 63, 92, 107, and 112 is further reduced. Then, the amount of deflection of the lens 62 is further reduced.

The receiving members 67, 10 of the above embodiments
8, three or more arc-shaped projections 71 are provided to
May be engaged with each other. Further, in the fourth embodiment, the joint 1 of the respective traction support portions 112a and 112b is formed.
The number of the fourteen bonding claws 120 may be three or more. In such a configuration, the weight of the lens 62 is reduced by the arc-shaped protrusion 71 or the joint 114 of each of the receiving members 67 and 108.
, And acts in a more dispersed state on the joining claws 120, so that the shared load at each support point SP is further reduced. Then, the amount of deflection of the lens 62 near each support point is further reduced.

In the fourth embodiment, the joining claw 120 of the joining portion 114 of each of the traction support portions 112a and 112b is used.
May be one. With this configuration, the configuration of each of the traction support portions 112a and 112b can be simplified.

In the first embodiment, the receiving members 67 of the movable support portions 63a and 63b may extend to both sides along the circumferential direction of the lens 62 around the ball 75.

In the first embodiment, the movable support portion 63 is provided only at one position in the lowermost portion of the lens 62, and the movable support portion 63 is opposite to the position corresponding to the X axis of the lens 62 or the X axis. A tilt regulating means having substantially the same configuration as the plurality of fixed support portions 64 may be provided at the side position.

In the fourth embodiment, the lens 6
The weight of the lens 62 is supported only by the two traction support portions 112a and 112b while omitting the movable support portions 107a and 107b located below the second support portion 6 and, for example, the fixed support portion 6
4 is provided below the lens 62 to restrict the tilting of the lens 62. The fixed support portion 64 and the two traction support portions 112a, 112a,
The rotation of the lens 62 around the Z axis may be restricted in cooperation with the lens 12b.

The fixed support portions 64 and 9 of the above embodiments.
In 3, the engaging portion 80 may be directly fixed to the support seat 85 of the lens barrel 51 without interposing the plate-like elastic bodies 84 and 95. With such a configuration, the tilt restricting means is only the engagement portion 80, so that the configuration of the fixed support portions 64 and 93 can be simplified.

In the fourth embodiment, the fixed support portion 64 is omitted, and the movable support portions 107a and 107b and the traction support portions 112a and 112b are connected to the center LP of the lens 62 and the center BP of the ball 75. Even if all the adjacent line segments and axes of the connecting line segment and the axis of the connecting rod 122 (the extension line passes through the center of the lens 62) are arranged at equal angular intervals, that is, 90 ° intervals. Good.
With this configuration, the load based on the weight of the lens 62 is supported in a well-balanced manner with respect to the X axis and the Z axis, and the generation of asymmetrical deflection in each area defined by the X axis and the Z axis of the lens 62 occurs. Can be suppressed.

Incidentally, in this specification, the optical element is not limited to a lens, nor is it limited to a convex lens as shown in the figure. That is, this optical element includes a concave lens, a plane lens, a convex mirror, a concave mirror, a plane mirror, a filter, and the like. In addition, this optical element can be applied not only to a device whose optical axis is perpendicular to the direction of gravity but also to a device whose direction intersects.

Further, in this specification, the exposure apparatus
The present invention is not limited to an exposure apparatus for manufacturing semiconductor devices, nor is it limited to a step-and-scan type scanning exposure apparatus or a reduced projection type exposure apparatus. That is, this exposure apparatus is a step-and-repeat type exposure apparatus, an equal-magnification projection type exposure apparatus,
It also includes an exposure apparatus for manufacturing a liquid crystal display element, an imaging element, a thin film magnetic head, and the like.

Furthermore, in this specification, the exposure light source is not limited to the ArF excimer laser,
For example, an electron beam source, an X-ray source, a KrF excimer laser light source,
F ₂ excimer laser light source, harmonics such as YAG laser and a metal vapor laser, ultraviolet lamp i rays, h-rays, but also includes a visible light lamp for g-line or the like.

In order to achieve the above-described functions, the optical element supporting device of the present embodiment is assembled by mechanically connecting the components constituting the device. Similarly, in order to achieve the above-described functions, the exposure apparatus including the optical element support device is assembled by mechanically, electrically, and optically combining the components of the exposure device.

Further, the technical ideas described below can be extracted from the above embodiments. (1) The optical element supporting device according to claim 6, wherein the central angle is in a range of 15 ° to 35 °.

With this configuration, the change in the amount of deflection of the optical element in the direction of gravity can be made very small in the same range. (2) The optical element supporting device according to (1), wherein the central angle is in a range of 20 ° to 30 °.

With this configuration, it is possible to make a state in which there is almost no change in the amount of deflection of the optical element in the gravitational direction in the same range. (3) The bearing structure according to (7), (8) or (1), wherein the bearing structure includes a pair of conical recesses provided so as to face each other and a spherical bearing member interposed between the conical recesses. The optical element supporting device according to any one of (1) and (2).

According to this structure, the optical element can swing along the spherical bearing member, and can absorb the processing tolerance of each member such as the optical element itself and the support portion, and can reduce the bending of the optical element based on the tolerance. The amount of generation can be reduced.

(4) The adjusting means is provided with a conical recess on one opposing surface of the bearing structure, and a V-groove extending along the outer peripheral direction of the optical element on the other opposing surface. The optical element supporting device according to claim 8 or (3), wherein a spherical bearing member is interposed between the V-groove and the V-groove.

According to this structure, the spherical bearing member rolls along the V-shaped groove, and the adjustment of the movement of the optical element in the circumferential direction of the support portion can be performed easily and reliably. (5) The bearing structure includes one concave portion formed on the outer peripheral portion of the optical element, the other concave portion formed on the base for holding the optical element with respect to the apparatus main body, and both concave portions. And a bearing member interposed between the two.
3. The optical element supporting device according to claim 1.

With this configuration, the number of parts can be reduced, and the support portion constituting the load supporting means can be simplified.

[0134]

According to the first aspect of the present invention, the concentration of processing tolerances on the optical element is suppressed, so that the amount of deflection in the optical element can be reduced, and high optical performance of the optical element can be easily secured. .

According to the second aspect of the present invention, in addition to the effect of the first aspect of the present invention, it is possible to reliably suppress the tilting of the optical element using the load supporting means as a tilting fulcrum. Further, since the load supporting means side of the optical element is mainly bent, the influence of the bending of the optical element can be reduced by transmitting the exposure light mainly on the side with less bending.

According to the invention of claim 3, in addition to the effect of the invention of claim 2, the optical element is supported in a well-balanced manner with respect to the axis along the direction of gravity, so that the optical element is asymmetric on both sides of the axis. The occurrence of deflection can be further suppressed.

According to the invention of claim 4, in addition to the effect of the invention of claim 2 or 3, the optical element is supported in a more balanced manner, and the occurrence of asymmetrical bending in the optical element can be further suppressed.

According to the fifth aspect of the present invention, in addition to the effects of the third or fourth aspect, the arrangement of the supporting load in each supporting portion can be made almost optimal, and the occurrence of the bending of the optical element can be achieved. Can be further suppressed.

According to the sixth aspect of the present invention, in addition to the effects of the fifth or sixth aspect of the present invention, the rotation of the optical element can be restricted, and the effect of sharing the load at each support point of the receiving member can be efficiently exhibited. Is done.

According to the seventh aspect of the invention, in addition to the effects of any one of the third to sixth aspects, a degree of freedom of relative arrangement is created between the optical element and each supporting portion, and the optical element itself and The processing tolerance of each member such as the support portion can be absorbed.

According to the eighth aspect of the invention, in addition to the effects of any one of the third to seventh aspects, the processing tolerance and thermal expansion of the optical element itself and each member of the support in the circumferential direction of the optical element. Can be absorbed.

According to the ninth and tenth aspects of the present invention, in addition to the effects of any of the second to eighth aspects, the tilting of the optical element is reliably suppressed, and the processing tolerance of each member and the environmental temperature are controlled. The dimensional deviation between the optical element and the support device due to the change can be absorbed.

According to the eleventh aspect, the second to the first aspects are described.
In addition to the effects of any of the inventions described above, the upper supporting portion can also support a part or all of the weight of the optical element. In particular, in a configuration in which the load supporting means is also provided in the lower support portion, the shared load at each support point is further reduced, and the amount of deflection of the optical element can be further reduced.

According to the twelfth aspect, in addition to the effect of the eleventh aspect, the weight of the optical element can be supported in a more balanced manner. According to the thirteenth aspect, the optical element can be held in the main body of the lens barrel without deteriorating the optical performance.

According to the fourteenth aspect, a decrease in the optical performance of the optical element is suppressed, and high precision projection exposure can be performed.

[Brief description of the drawings]

FIG. 1 is an explanatory view schematically showing a scanning exposure apparatus.

FIG. 2 is an explanatory diagram showing the projection optical system of FIG. 1 and its vicinity in detail.

FIG. 3 is a front view showing the vertical lens supporting device according to the first embodiment.

FIG. 4 is a sectional view taken along line 4-4 of FIG. 3;

5A is a partially enlarged cross-sectional view showing a fixed support portion of FIG. 4, FIG. 5B is a partially enlarged cross-sectional view taken along line 5b-5b of FIG. 3, and FIG. Partial enlarged sectional view,
(D) is a partial enlarged sectional view along line 5d-5d in FIG.

FIG. 6 is a partially enlarged front sectional view showing the movable support section of FIG. 3;

FIG. 7 is a front view showing a vertical lens supporting device according to a second embodiment.

8 is a sectional view taken along line 8-8 in FIG. 7;

FIGS. 9A and 9B are partially enlarged cross-sectional views illustrating a fixed support portion and a movable support portion, respectively.

FIG. 10 is a partially enlarged front sectional view showing the movable support section of FIG. 7;

FIG. 11 is a front view showing a vertical lens supporting device according to a third embodiment.

FIG. 11B shows a first movable support portion,
(A) is a partial expanded sectional view which shows a 2nd movable support part, respectively.

FIG. 13 is a graph showing the amount of deflection in the direction of gravity in a parallel plate lens.

FIG. 14 is a graph showing the amount of deflection in the optical axis direction in a parallel plate lens.

FIG. 15 is a front view showing an example of an optimum state of the vertical lens supporting device of FIG. 11;

FIG. 16 is a front view showing a vertical lens supporting device according to a fourth embodiment.

FIG. 17 is a sectional view taken along line 17-17 of FIG. 16;

FIG. 18 is a partially enlarged cross-sectional view showing the traction support portion of FIG.

FIG. 19 is a front view showing a conventional vertical lens supporting device.

20 is a sectional view taken along line 20-20 of FIG. 19;

[Explanation of symbols]

Reference numeral 31 denotes a scanning type exposure apparatus, 51 denotes a lens barrel as a lens barrel, 61, 91, 106, 111 ... a vertical lens supporting device as an optical element supporting device, 62 ... a lens as an optical element, 62a ... as an outer peripheral portion Flange, 63a, 92
a, 107a: a lower support, a first support, and a part of the load support means, a first movable support having a rotation restricting function; 63b, 92b, 107b: a lower support, a second support, and a load Second movable support portions that constitute a part of the support means and have a rotation restricting function, 64, 93 ... fixed support portions that constitute a part of the upper support portion and the rotation restricting means, 73, 74 ... a part of the bearing structure 75, a ball forming a part of the bearing structure; 80, an engaging part forming a part of the tilt regulating means; 84, 95, a part of the tilt regulating means; and an elastic member. .. A plate-like elastic body, 109... V-grooves constituting a part of the bearing structure and adjusting means,
A first traction support part, which constitutes a part of the upper support part, a third support part and a part of the load support means, and has a rotation restricting function;
2b: a part of the upper support part, a fourth support part, and a part of the load support means, a second traction support part having a rotation regulating function; 116, a traction spring as traction means; AX2: light from the optical element Optical axes of the second lens group as axes, Fa, Fb,...
Reaction force, LP: Center of the optical element, L1 to L3: Line segment connecting the center of the optical element and each supporting portion, SPa, SPb: Supporting points forming an action point, X: orthogonal to the optical axis in a horizontal plane Axis, Z: an axis orthogonal to the optical axis and extending along the direction of gravity, θ, θs: central angle.

Claims (14)

[Claims] 1. An optical element support device for supporting an optical element whose optical axis extends in a direction intersecting with the direction of gravity, comprising: a support mechanism that engages with an outer peripheral portion of the optical element at at least three places; Is a load support function for supporting the load of the optical element, a tilt restriction function for restricting the tilt of the optical element with the support position of the load of the optical element as a tilt fulcrum, and about an axis orthogonal to the optical axis. An optical element support device having a rotation restricting function of restricting rotation of an optical element. 2. The support mechanism is divided into a lower support portion that engages a lower portion of the outer peripheral portion of the optical element in the direction of gravity, and an upper support portion that engages an upper portion of the outer peripheral portion of the optical element in the direction of gravity.
At least one of the upper support portion and the lower support portion is provided with a tilt control device having the tilt control function, and at least the other of the upper support portion and the lower support portion is provided with a load support device having the load support function. The optical element supporting device according to claim 1. 3. At least one of the upper support portion and the lower support portion is a first support portion and a second support member is disposed at a predetermined distance from the first support portion in an outer peripheral direction of the optical element.
The optical element support device according to claim 2, further comprising a support portion, wherein the first support portion and the second support portion are arranged symmetrically with respect to an axis extending along the direction of gravity. 4. Each of the support portions is such that when a line segment connecting the center of the optical element and each of the support portions is imagined, the angles of the center angles formed by two adjacent line segments are substantially equal to each other. 4. The optical element supporting device according to claim 2, wherein 5. When the load supporting means is provided on the lower supporting portion, the first and second supporting portions are arranged so that the first and second supporting portions are perpendicular to the optical axis in a horizontal plane which divides the optical element into upper and lower parts in the direction of gravity. The angle between the center of the optical element and a line segment connecting the reaction force of the first and second supporting portions toward the center of the optical element with respect to the load of the optical element is represented by Θ. The optical element supporting device according to claim 3, wherein the ratio of the reaction force at a point is arranged to be sinΘ. 6. The optical element supporting device according to claim 5, wherein the central angle is in a range of 5 ° to 60 °. 7. A bearing structure is interposed between the first and second support portions and an outer peripheral portion of an optical element.
The optical element support device according to any one of the above. 8. An apparatus according to claim 3, wherein at least one of the first and second support portions is provided with an adjusting means capable of adjusting the movement of the optical element in the outer peripheral direction. 3. The optical element supporting device according to claim 1. 9. The tilt control function is achieved by the elastic force of an elastic member having a degree of freedom in the vertical direction of gravity.
The optical element supporting device according to any one of claims 8 to 8. 10. The optical element supporting device according to claim 9, wherein the tilt restriction function is achieved by an elastic force of an elastic member having a degree of freedom in a direction orthogonal to the optical axis of the optical element and orthogonal to gravity. . 11. The optical element supporting device according to claim 2, wherein a pulling means for pulling the optical element is provided in the upper support. 12. The third support portion and the fourth support portion arranged at positions substantially symmetrical with respect to the center of the optical element with the first support portion and the second support portion of the lower support portion. The optical element support device according to claim 11, further comprising a support portion. 13. A lens barrel for holding an optical element extending in a direction in which an optical axis intersects with the direction of gravity on an inner peripheral surface via an optical element support device, wherein the optical element support device is provided with the optical element support device. A lens barrel comprising the optical element supporting device according to any one of the above. 14. An exposure apparatus having an optical element in a lens barrel whose optical axis extends in a direction intersecting with the direction of gravity, wherein the optical element supports the optical element according to any one of claims 1 to 12. An exposure apparatus supported inside the lens barrel via the apparatus.