JPH11230739A - Flatness measurement device - Google Patents

Flatness measurement device

Info

Publication number
JPH11230739A
JPH11230739A JP4425498A JP4425498A JPH11230739A JP H11230739 A JPH11230739 A JP H11230739A JP 4425498 A JP4425498 A JP 4425498A JP 4425498 A JP4425498 A JP 4425498A JP H11230739 A JPH11230739 A JP H11230739A
Authority
JP
Japan
Prior art keywords
flatness
measured
gyro
main body
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4425498A
Other languages
Japanese (ja)
Inventor
Junichi Yamada
淳一 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP4425498A priority Critical patent/JPH11230739A/en
Publication of JPH11230739A publication Critical patent/JPH11230739A/en
Withdrawn legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Gyroscopes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a flatness measurement device capable of easily measuring flatness without the need of huge man-hour, and obtaining high measurement accuracy even in a long-length component. SOLUTION: This flatness measurement device is provided with a wheel 5 moved along a scanning line, a main body 2 supported by two supporting legs 9 in contact with two points on the scanning line, a gyro 1 attached to the main body 2 for detecting the inclination angle of a straight line segment between the supporting legs 9 at respective parts in a scanning direction, and a computer 4 for calculating the flatness of a surface 100 to be measured based on the detection data of the inclination angle at the respective parts in the scanning direction inputted from the gyro 1. The flatness is measured from the detection data of the inclination angle at the respective parts on the scanning line.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は大型ディーゼル機関
用製缶部品等、特に大形部品の平面度を自動的に測定す
る平面度測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness measuring device for automatically measuring the flatness of a large-sized diesel engine, such as a canned part for a large diesel engine.

【0002】[0002]

【発明が解決しようとする課題】大型ディーゼル機関の
外殻をなすクランクケース、台板等の主要部品は、その
多くが製缶部品によっている。然るに、かかる大形の製
缶部品からなるクランクケースや台板は、大形かつ大重
量である上、大型ディーゼル機関にあっては、爆発圧力
や過給空気圧によって大きな荷重が掛かるとともに、潤
滑油、過給空気、冷却水等に対して高い気密状を要する
ことから、その平面度を高精度に保持することが要求さ
れている。
Most of the main components, such as a crankcase and a base plate, forming the outer shell of a large diesel engine are made of cans. However, such large-sized crankcases and base plates made of canned parts are large and heavy, and in large diesel engines, a large load is applied due to the explosion pressure or supercharging air pressure. Since high airtightness is required for supercharged air, cooling water, and the like, it is required to maintain the flatness with high accuracy.

【0003】従来かかる大型ディーゼル機関用の大形の
製缶部品の平面度を測定する際には、図5に示すよう
に、ストレッチ31とすきみゲージ32を用い、前記製
缶部品の被測定面100上に前記ストレッチ31を置
き、該ストレッチ31と被測定面100との隙間にすき
みゲージ32を挿入して、両者の隙間を検知していた。
[0003] Conventionally, when measuring the flatness of a large-sized can-manufactured component for a large-sized diesel engine, as shown in FIG. The stretch 31 is placed on the surface 100, and a clearance gauge 32 is inserted into a gap between the stretch 31 and the surface to be measured 100, thereby detecting the gap between the two.

【0004】しかしながら、かかる従来技術にあって
は、前記大型ディーゼル機関用製缶部品のように平面の
長さが2mを超えるような大形部品の平面度を測定する
際には、これに見合った長尺で大重量のストレッチ31
を必要とする上に、該ストレッチ31自体に撓みを生ず
るため、測定作業が困難かつ多大な工数を要し、かつ高
精度の測定が不可能であった。
However, according to the prior art, when measuring the flatness of a large-sized part having a plane length of more than 2 m, such as the large-sized diesel engine can-made part, the flatness is measured. Long and heavy stretch 31
In addition, since the stretch 31 itself bends, the measurement operation is difficult, requires a large number of steps, and high-precision measurement is impossible.

【0005】本発明はかかる従来技術の課題に鑑み、多
大な工数を要することなく、容易に平面度の測定が可能
で、かつ長尺部品においても高い測定精度が得られる平
面度測定装置を提供することを目的とする。
In view of the problems of the prior art, the present invention provides a flatness measuring apparatus capable of easily measuring flatness without requiring a large number of man-hours and obtaining high measurement accuracy even for long parts. The purpose is to do.

【0006】[0006]

【課題を解決するための手段】本発明はかかる課題を解
決するため、その第1発明として、被測定面上を走査し
て該被測定面の平面度を測定する平面度測定装置であっ
て、前記走査線上に沿って移動せしめる車輪と、該走査
線上の2点に接触する2本の支持脚に支持された本体
と、該本体に取付けられ、前記走査方向の各部位におけ
る前記支持脚間の直線線分の傾き角を検出するジャイロ
と、該ジャイロから前記傾き角の検出データが入力さ
れ、前記走査方向各部位における前記傾き角の検出デー
タに基づき、前記被測定面の平面度を算出するコンピュ
ータとを備えたことを特徴とする平面度測定装置を提案
する。
In order to solve the above-mentioned problems, the present invention provides, as a first invention, a flatness measuring apparatus which scans a surface to be measured and measures the flatness of the surface to be measured. A wheel to be moved along the scanning line, a main body supported by two supporting legs in contact with two points on the scanning line, and A gyro for detecting the inclination angle of the straight line segment, and the inclination angle detection data from the gyro are input, and the flatness of the surface to be measured is calculated based on the inclination angle detection data in each part in the scanning direction. A flatness measuring device characterized by comprising a computer that performs the measurement is proposed.

【0007】また第2発明は、前記第1発明において、
前記被測定面の走査方向における前記本体の移動量を検
出する移動量検出器を備えるとともに、前記コンピュー
タが、前記ジャイロからの傾き角の検出データに加え
て、前記移動量検出器からの本体の移動量の検出データ
に基づき、被測定面の平面度を測定するように構成され
てなる。
[0007] In a second aspect of the present invention, in the first aspect,
A computer is provided with a movement amount detector that detects a movement amount of the main body in the scanning direction of the surface to be measured, and in addition to the detection data of the inclination angle from the gyro, the computer detects the movement amount of the main body from the movement amount detector. The flatness of the surface to be measured is measured based on the detection data of the movement amount.

【0008】かかる発明によれば、ジャイロを搭載若し
くは組み込んだ本体を、車輪によって被測定面上の走査
方向に移動させ、該本体を支持する2本の支持脚間の走
査方向の直線線分の走査方向各部位における傾き角を、
ジャイロ、好ましくは2方向ジャイロにより検出する。
この傾き角の検出データはコンピュータに入力され、該
コンピュータにおいては、前記傾き角の検出データに基
づき、前記走査方向各部位における被測定面の凹凸量、
即ち平面度を算出する。この平面度の算出データは表示
装置に表示され、あるいはプリントアウトされる。
According to this invention, the main body on which the gyro is mounted or incorporated is moved by the wheels in the scanning direction on the surface to be measured, and a straight line segment in the scanning direction between the two support legs supporting the main body is provided. The tilt angle at each part in the scanning direction is
It is detected by a gyro, preferably a two-way gyro.
The detection data of the tilt angle is input to a computer, and the computer uses the detection data of the tilt angle to determine the amount of unevenness of the surface to be measured in each portion in the scanning direction,
That is, the flatness is calculated. The calculated flatness data is displayed on a display device or printed out.

【0009】従って、かかる発明によれば、被測定面の
傾き角をジャイロによって検出するので、本体の走査速
度のむらによる誤差の発生が回避されて、高速走査に対
しても高い測定精度が得られ、大型ディーゼル機関用製
缶部品等の大形部品であっても、その平面度を自動的に
かつ高精度で測定することができる。
Therefore, according to the invention, since the inclination angle of the surface to be measured is detected by the gyro, an error due to uneven scanning speed of the main body can be avoided, and high measurement accuracy can be obtained even in high-speed scanning. Even for large parts such as can parts for large diesel engines, the flatness can be measured automatically and with high accuracy.

【0010】[0010]

【発明の実施の形態】以下、図面を参照して本発明の好
適な実施形態を例示的に詳しく説明する。但しこの実施
形態に記載されている構成部品の寸法、材質、形状、そ
の相対的配置等は特に特定的な記載がないかぎりは、こ
の発明の範囲をそれに限定する趣旨ではなく、単なる説
明例にすぎない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention unless otherwise specified, and are merely illustrative examples. Only.

【0011】図1は本発明の実施形態に係る大型ディー
ゼル機関用部品の平面度測定装置の全体構成図、図2は
前記平面度測定装置の他の実施形態に係る要部縦断面
図、図3は図1若しくは図2のZ矢視図、図4は平面度
測定原理の説明図である。
FIG. 1 is an overall configuration diagram of a flatness measuring device for parts for a large diesel engine according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a main part according to another embodiment of the flatness measuring device. 3 is a view taken in the direction of the arrow Z in FIG. 1 or FIG. 2, and FIG. 4 is an explanatory view of the principle of flatness measurement.

【0012】図1及び図3において、2は本体、1は該
本体2内に組み込まれた二軸自由度ジャイロである。該
二軸自由度ジャイロ1は、二軸(ロール/ピッチ)の自
由度を持つ公知のジャイロで、24000rpm程度の
高速で回転させる駆動部を備えたロータ30と、該ロー
タ30の回転軸31を回転自在に軸支する方形のロール
角検出用のロール角検出枠11、該ロール角検出枠11
を回動自在に軸支するピッチ角検出用のピッチ角検出枠
12、及び該ピッチ角検出枠12は本体2に回転自在に
軸支されている。また10Aはロール角度検出器で、上
記ロール角検出枠11を軸支するピッチ角検出枠12の
検出軸の軸受部に、又、10Bはピッチ角度検出器で、
前記ピッチ角検出枠12の本体2との検出軸の軸受部に
取付けられている。
In FIGS. 1 and 3, reference numeral 2 denotes a main body, and 1 denotes a two-axis freedom gyro incorporated in the main body 2. The two-axis gyro 1 is a known gyro having two-axis (roll / pitch) degrees of freedom. The gyro 1 includes a rotor 30 having a driving unit that rotates at a high speed of about 24000 rpm, and a rotating shaft 31 of the rotor 30. A roll angle detection frame 11 for detecting a roll angle which is rotatably supported on a square, and the roll angle detection frame 11
A pitch angle detection frame 12 for detecting a pitch angle, which rotatably supports, and the pitch angle detection frame 12 is rotatably supported by the main body 2. Reference numeral 10A denotes a roll angle detector, which is provided on a bearing portion of a detection shaft of a pitch angle detection frame 12 that supports the roll angle detection frame 11, and 10B denotes a pitch angle detector.
The pitch angle detection frame 12 is attached to a bearing portion of a detection shaft with respect to the main body 2.

【0013】かかる二軸自由度ジャイロ1によれば、ロ
ータ30の回転軸31を基準として前記本体2の姿勢変
化をピッチ角及びロール角として検出することが出来
る。そして該二軸自由度ジャイロ1は、この実施形態に
おいては、詳細を後述するように、被測定部材150の
被測定表面100に沿って走査する本体2の姿勢変化を
検出することにより、各測定点における本体2の走査方
向に対する傾きを得る機能を有する。
According to the gyro 1 having two degrees of freedom, the attitude change of the main body 2 can be detected as a pitch angle and a roll angle with reference to the rotation axis 31 of the rotor 30. In this embodiment, the biaxial degrees of freedom gyro 1 detects each change in the posture of the main body 2 that scans along the surface to be measured 100 of the member to be measured 150, as will be described in detail later. It has a function of obtaining the inclination of the main body 2 at a point with respect to the scanning direction.

【0014】5は車輪、14は該車輪5に固定された車
軸、9,9は前記本体2の下面に固定された支持脚であ
る。前記支持脚9,9は、図3に示すように、測定装置
の走査方向に沿って距離(間隔)Lにて2本設けられて
いる。また、前記車輪5は、前記被測定面100上を転
動可能に、かつ移動方向が前記2本の支持脚9,9の中
心を結ぶ直線即ち走査線200と該車輪5の進行方向が
平行になるように、前記本体2にベアリング15を介し
て軸支された車軸14に取付けられている。
5 is a wheel, 14 is an axle fixed to the wheel 5, and 9 and 9 are support legs fixed to the lower surface of the main body 2. As shown in FIG. 3, two support legs 9, 9 are provided at a distance (interval) L along the scanning direction of the measuring device. The wheel 5 is rotatable on the surface to be measured 100, and the direction of movement is parallel to the straight line connecting the centers of the two support legs 9, 9, ie, the scanning line 200, and the traveling direction of the wheel 5. Is mounted on an axle 14 which is supported by the main body 2 via a bearing 15.

【0015】従って、前記本体2は車輪5の被測定面1
00上の接触点及び2本の支持脚9,9の接触点の二等
辺三角形上の3点で前記被測定面100上に支持される
こととなる。尚、前記支持脚9,9は該支持脚9,9と
車輪5との間に本体2の重心がくるように配置して、作
動時に装置が横転しないようにしている。
Accordingly, the main body 2 is provided on the measured surface 1 of the wheel 5.
The support point is supported on the surface to be measured 100 at three points on the isosceles triangle of the contact point on the reference numeral 00 and the contact points of the two support legs 9, 9. The support legs 9, 9 are arranged so that the center of gravity of the main body 2 is located between the support legs 9, 9 and the wheel 5, so that the device does not roll over during operation.

【0016】3は移動量検出器で、移動量を検出するロ
ーラ13を前記車輪5側面に当接させて本体2内に固定
されている。該移動量検出器3は、これに取付けられた
移動量検出ローラ13が前記車輪5の外周寄りの側面に
転接され、車輪5の回転から装置の走査方向への移動量
を検出する。
Reference numeral 3 denotes a movement amount detector, which is fixed in the main body 2 by bringing a roller 13 for detecting the movement amount into contact with the side surface of the wheel 5. The movement amount detector 3 has a movement amount detection roller 13 attached thereto and is in contact with the outer peripheral side surface of the wheel 5 to detect the movement amount of the apparatus in the scanning direction from the rotation of the wheel 5.

【0017】4はコンピュータで、前記移動量検出器3
からの走査方向移動量、二軸自由度ジャイロ1の角度検
出器10からのロール角及びピッチ角の検出信号が入力
され、これらに基づいて被測定面100の走査方向の傾
き角θが演算され、更に後記数式に示すように、被測定
面100の平面度Z等の演算を行なう。
Reference numeral 4 denotes a computer, and the moving amount detector 3
And the roll angle and the pitch angle detection signals from the angle detector 10 of the two-axis gyro 1 are input, and the inclination angle θ of the surface to be measured 100 in the scanning direction is calculated based on these signals. Further, as shown in the following mathematical formula, the calculation of the flatness Z of the measured surface 100 and the like are performed.

【0018】図2及び図3は本体2上に二軸自由度ジャ
イロ1を搭載した他の実施形態で、二軸自由度ジャイロ
1は基台としての本体2上にボルト16により固定され
ている。また、前記車輪5は、前記被測定面100上を
転動可能に、かつ移動方向が前記2本の支持脚9,9の
中心を結ぶ直線即ち走査線200と該車輪5の進行方向
が平行になるように、前記本体2にベアリング15a,
15bを介して軸支された本体2を水平に貫通する車軸
14に取付けられている。3は移動量検出器で、移動量
を検出するローラ13が車輪5側面に当接するごとく前
記本体2の上面の車輪5寄りの部位にボルト17によっ
て固定されている。他の構成は図1とほぼ同様である。
FIGS. 2 and 3 show another embodiment in which the gyro 1 is mounted on the main body 2 and the gyro 1 is fixed on the main body 2 as a base by bolts 16. . The wheel 5 is rotatable on the surface to be measured 100, and the direction of movement is parallel to the straight line connecting the centers of the two support legs 9, 9, ie, the scanning line 200, and the traveling direction of the wheel 5. So that the bearings 15a,
It is attached to an axle 14 that passes horizontally through the main body 2 that is pivotally supported via 15b. Reference numeral 3 denotes a movement amount detector, which is fixed to a portion of the upper surface of the main body 2 near the wheel 5 by a bolt 17 so that the roller 13 for detecting the movement amount contacts the side surface of the wheel 5. Other configurations are almost the same as those in FIG.

【0019】かかる構成からなる平面度測定装置により
ディーゼル機関用大形部品の平面度を測定する際の測定
方法につき説明する。先ず、測定原理を図6(A)に基
づいて説明するに、前記被測定面100上に原点を定
め、走査(測定)方向をX軸とし、原点からの距離を
x、該距離xの位置における面の傾き角をθとすると、
該被測定面100の凹凸の高さ、即ち該被測定面100
の平面度Zは、下記「数1」で表わされる。
A measuring method for measuring the flatness of a large part for a diesel engine using the flatness measuring apparatus having the above-described configuration will be described. First, the principle of measurement will be described with reference to FIG. 6A. First, an origin is defined on the surface to be measured 100, the scanning (measurement) direction is set as the X axis, the distance from the origin is x, and the position of the distance x is set. If the angle of inclination of the surface at is θ,
The height of the unevenness of the measured surface 100, that is, the measured surface 100
Is expressed by the following “Equation 1”.

【0020】[0020]

【数1】 (Equation 1)

【0021】「数1」は、|θ|<<1(rad)であ
ることから近似して「数2」のように展開される。
Equation 1 is approximated and expanded as Equation 2 since | θ | << 1 (rad).

【0022】[0022]

【数2】 (Equation 2)

【0023】更に積分計算を差分法とすれば、下記「数
3」のようになり、コンピュータで可能な計算になる。
ただしΔxは夫々充分小さいとする。
If the integral calculation is performed by the difference method, the following equation (3) is obtained, and the calculation can be performed by a computer.
However, Δx is assumed to be sufficiently small.

【0024】[0024]

【数3】 (Equation 3)

【0025】またθを測定する支持脚の間隔Lは、図6
(B)に示すように、サンプリング定理より凹凸の半周
期より小さい(短い)、即ち変曲点を2つ以上またがな
いように短いものとする。尚、一般的にはΔxの間隔は
支持脚の間隔Lより小さい好ましくは大幅に小さい「Δ
x<<L」に設定し、Δxの間隔内における変曲点を1
以下にする。
The distance L between the supporting legs for measuring θ is shown in FIG.
As shown in (B), the sampling theorem is shorter (shorter) than the half period of the unevenness, that is, shorter than two or more inflection points. In general, the interval Δx is smaller than the interval L between the support legs, and is preferably much smaller.
x << L, and set the inflection point within the interval of Δx to 1
Do the following.

【0026】かかる測定原理により前記被測定面100
の凹凸高さ、即ち平面度を測定するに際しては、前記平
面度測定装置を前記大形部品の被測定面100上に載置
し、2本の支持脚9,9を該被測定面100に接触さ
せ、車輪5を回転させて走査方向に直進させる。前記車
輪5の回転は移動量検出用ローラ13に伝達され、前記
移動量検出器3は、該移動量検出ローラ13の回転によ
り装置の走査方向への移動量を検出する。一方、前記装
置を図4の(A)〜(C)に示される曲面状の被測定面
100上を前記車輪5の回転により走査線200方向に
直進させると、Δxの間隔は支持脚の間隔Lより大幅に
小さい「Δx<<L」になるようにL1−L2、L2−L3
…と設定すると、2本の支持脚9,9間を結ぶ距離L
は、図4(A)に示すように、線分L1−L1’、L2
2’……、Ln−Ln’となる。
According to the principle of measurement, the surface to be measured 100
When measuring the height of unevenness, that is, the flatness, the flatness measuring device is mounted on the surface 100 to be measured of the large-sized component, and the two support legs 9 are attached to the surface 100 to be measured. The contact is made, and the wheel 5 is rotated to move straight in the scanning direction. The rotation of the wheel 5 is transmitted to a movement detection roller 13, and the movement detector 3 detects the movement of the apparatus in the scanning direction by the rotation of the movement detection roller 13. On the other hand, when the device is moved straight on the curved surface to be measured 100 shown in FIGS. 4A to 4C in the direction of the scanning line 200 by the rotation of the wheels 5, the interval of Δx becomes the interval between the support legs. L 1 −L 2 , L 2 −L 3 so that “Δx << L” is significantly smaller than L.
..., the distance L connecting the two support legs 9, 9
Are, as shown in FIG. 4A, the line segments L 1 -L 1 ′, L 2
L 2 '......, Ln-Ln ' becomes.

【0027】尚、前記車輪5の回転により走査線200
方向に直進させた場合、図4(B)に示すように2本の
支持脚9,9間を結ぶ距離線分L2−L2’では変曲点が
3つとなってしまうが、Δxの間隔(測定ピッチ)は支
持脚の間隔Lより大幅に小さい「Δx<<L」になるよ
うにL1−L2、L2−L3…と設定すると変曲点は1つ以
下となる。また前記車輪5の回転により走査線200方
向に直進させた場合、図4(C)に示すように線分L2
−L2’を平行移動した場合、一点鎖線で示すように実
測データと傾きθとの変化傾向が一致しない場合も正し
く測定できない。従ってこの場合も、Δxの間隔は支持
脚の間隔Lより大幅に小さい「Δx<<L」になるよう
にL1−L2、L2−L3…と設定すると変曲点は1つ以下
のなめらかな曲線となる。
The rotation of the wheel 5 causes the scanning line 200 to move.
4B, the distance line L 2 -L 2 ′ connecting the two support legs 9, 9 has three inflection points as shown in FIG. If the distances (measurement pitches) are set to L 1 −L 2 , L 2 −L 3 . Also when is straight in the 200-direction scanning line by the rotation of the wheel 5, a line segment as shown in FIG. 4 (C) L 2
When −L 2 ′ is translated, correct measurement cannot be performed even when the change tendency between the measured data and the inclination θ does not match as indicated by the one-dot chain line. Therefore, also in this case, if the interval of Δx is set to L 1 −L 2 , L 2 −L 3 ... So that “Δx << L” is significantly smaller than the interval L of the support legs, the inflection point is one or less. Becomes a smooth curve.

【0028】そして、全ての前記線分L1−L1’、…
…、Ln−Ln’の端点は被測定面100の走査線上の点
であることから、前記Δxの間隔(測定ピッチ)L1
2、L 2−L3…を全ての線分において後記2つの条件
が満足されるように結んでいけば、それは前記被測定面
100の走査線上の形状に限りなく近似される。再度説
明するが、前記線分Δxの間隔(測定ピッチ)L1
2、L2−L3…は、被測定面100の変曲点を2つ以
上跨がないように小さく採る。即ち、測定ピッチを十分
小さく取れば、その区間で線分L1−L2、L2−L3…を
結ぶ折線曲線が変曲点が1つ以下で且つ被測定面の形状
を十分近似できるようにする事が出来る。
Then, all the line segments L1-L1’,…
.., Ln-Ln ′ are points on the scanning line of the surface 100 to be measured.
Therefore, the interval Δx (measurement pitch) L1
LTwo, L 2-LThree… For all line segments
If tied to satisfy
It is infinitely approximated to a shape on 100 scanning lines. Theory again
As will be described, the interval (measurement pitch) L of the line segment Δx is1
LTwo, LTwo-LThree... means that two or more inflection points on the surface 100 to be measured
Take small so that there is no upper straddle. That is, sufficient measurement pitch
If it is small, the line segment L1-LTwo, LTwo-LThree...
The shape of the surface to be measured, where the connecting line curve has no more than one inflection point
Can be sufficiently approximated.

【0029】この場合、前記線分L1−L2、L2−L3
における各測定点(測定ピッチ)は、移動量検出用ロー
ラ13によってその移動量単位毎に設定され、その測定
ピッチ毎の二軸自由度ジャイロ1の角度検出器10A、
10Bからのロール角及びピッチ角の検出信号に基づい
て被測定面100の走査方向の傾き角θが得られる。従
って本実施形態によれば、測定ピッチL1−L2、L2
3…毎の傾き角θが逐次得られるのみで、個々の測定
ピッチの位置は得られないが、次の2つの条件を満たせ
ば個々の測定ピッチ毎の位置は他の線分との関係から決
定できる。 1)任意のn点を結ぶ近似曲線はその区間で変曲点を1
つ以下(2つ以上またがない)もつ。(図4の(B)の
ようにならない事) 2)得られた近似曲線の任意の区間で対応する実測デー
タと傾きθとの変化の傾向が一致する。(図4の(C)
のようにならない事)
In this case, the line segments L 1 -L 2 , L 2 -L 3 ...
The measurement points (measurement pitches) are set for each unit of the movement amount by the movement amount detection roller 13, and the angle detectors 10A of the gyro 1 with two degrees of freedom for each measurement pitch are provided.
The inclination angle θ of the surface to be measured 100 in the scanning direction is obtained based on the detection signals of the roll angle and the pitch angle from 10B. Therefore, according to the present embodiment, the measurement pitches L 1 -L 2 , L 2-
L 3 ... Only the inclination angle θ can be sequentially obtained, and the position of each measurement pitch cannot be obtained. However, if the following two conditions are satisfied, the position of each measurement pitch is related to another line segment. Can be determined from 1) An approximation curve connecting arbitrary n points has one inflection point in that section.
Less than (no more than two). (Not as shown in FIG. 4 (B)) 2) In any section of the obtained approximated curve, the corresponding measured data and the inclination θ change in the same tendency. ((C) in FIG. 4)
Not to be like)

【0030】然して、前記のようにして装置を走査線2
00方向に移動させ、前記二軸自由度ジャイロ1の角度
検出器10A、10Bからのロール角及びピッチ角の検
出信号がコンピュータ4に入力され、これらに基づいて
被測定面100の走査方向の傾き角θを演算し且つ前記
数式に示すように、被測定面100の平面度Z等の演算
を行なう。
Therefore, as described above, the apparatus is connected to the scanning line 2.
00, and the roll angle and pitch angle detection signals from the angle detectors 10A and 10B of the two-axis gyro 1 are input to the computer 4, and based on these signals, the inclination of the surface to be measured 100 in the scanning direction. The angle θ is calculated and the flatness Z of the surface to be measured 100 and the like are calculated as shown in the above equation.

【0031】該コンピュータ4においては、前記ロール
角及びピッチ角の検出信号に基づく各測定点の走査方向
の傾き角θの演算値と前記移動量検出器3から入力され
る装置(本体2)の移動量の検出値とにより、前記「数
3」の式によって、走査線200方向各測定点における
凹凸量即ち平面度Zを算出する。算出された被測定面1
00の走査方向各測定点毎の平面度は、表示装置19に
表示され、必要に応じてプリントアウトされる。
In the computer 4, the calculated value of the inclination angle θ in the scanning direction of each measuring point based on the detection signals of the roll angle and the pitch angle and the device (main unit 2) input from the movement amount detector 3 Based on the detected value of the movement amount, the amount of unevenness, that is, the flatness Z, at each measurement point in the scanning line 200 direction is calculated by the above equation (Equation 3). Calculated surface 1 to be measured
The flatness of each measurement point in the scanning direction of 00 is displayed on the display device 19 and printed out as necessary.

【0032】以上のように、本発明の実施形態によれ
ば、被測定面の傾き角を二軸自由度ジャイロ1によって
測定するので、装置の走査速度のむらによる誤差の発生
が回避される。これによって、高速走査に対しても高い
測定精度が得られる。
As described above, according to the embodiment of the present invention, since the tilt angle of the surface to be measured is measured by the gyro 1 having two degrees of freedom, the occurrence of an error due to the uneven scanning speed of the apparatus can be avoided. Thereby, high measurement accuracy can be obtained even for high-speed scanning.

【0033】[0033]

【発明の効果】以上記載のごとく、本発明によれば、被
測定面の傾き角をジャイロよりのピッチ角とローラ角に
よって測定出来、本体の走査速度のむらによる誤差の発
生が回避されて、高速走査に対しても高い測定精度がで
き、大型ディーゼル機関用製缶部品等の大形部品の平面
度を自動的にかつ高精度で測定することが出来る。
As described above, according to the present invention, the inclination angle of the surface to be measured can be measured by the pitch angle and the roller angle from the gyro, and the occurrence of errors due to uneven scanning speed of the main body can be avoided. High measurement accuracy can be obtained for scanning, and the flatness of large parts such as can parts for large diesel engines can be measured automatically and with high accuracy.

【0034】従って、本発明によれば、ジャイロを用い
た被測定面各部位の傾き角を検出して、その検出データ
に基づき被測定面の平面度を算出するので、大形部品で
あっても、その平面度を多くの工数や熟練を要すること
なく、容易にかつ高精度で測定することができる。
Therefore, according to the present invention, the inclination angle of each part of the surface to be measured using the gyro is detected, and the flatness of the surface to be measured is calculated based on the detected data. However, the flatness can be measured easily and with high accuracy without requiring a lot of man-hours and skill.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施形態に係る平面度測定装置の構成
図である。
FIG. 1 is a configuration diagram of a flatness measuring device according to an embodiment of the present invention.

【図2】前記実施形態の要部縦断面図である。FIG. 2 is a longitudinal sectional view of a main part of the embodiment.

【図3】図2のZ矢視図である。FIG. 3 is a view as viewed in the direction of the arrow Z in FIG. 2;

【図4】前記実施形態の作用説明図である。FIG. 4 is an operation explanatory view of the embodiment.

【図5】従来技術に係る平面度測定方法を示す斜視図で
ある。
FIG. 5 is a perspective view showing a flatness measuring method according to the related art.

【図6】図6は測定原理を示すグラフ図で(A)は走査
(測定)方向をX軸とした場合の被測定面の平面度Zを
求める原理、(B)は変曲点を2つ以上またがない測定
ピッチを示す。
FIGS. 6A and 6B are graphs showing the principle of measurement. FIG. 6A shows the principle of obtaining the flatness Z of the surface to be measured when the scanning (measurement) direction is set to the X axis, and FIG. Indicate the measurement pitch not more than one.

【符号の説明】[Explanation of symbols]

1 二軸自由度ジャイロ 2 本体 3 移動量検出器 4 コンピュータ 5 車輪 9 支持脚 10 角度検出器 11 ロール角検出枠 12 ピッチ角検出枠 13 移動量検出用ローラ 14 車軸 19 表示装置 100 被測定面 200 走査線 Reference Signs List 1 gyro 2 degrees of freedom gyro 2 main body 3 movement amount detector 4 computer 5 wheels 9 support leg 10 angle detector 11 roll angle detection frame 12 pitch angle detection frame 13 movement amount detection roller 14 axle 19 display device 100 measured surface 200 Scan line

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被測定面上を走査して該被測定面の平面
度を測定する平面度測定装置において、 前記走査線上に沿って移動せしめる車輪と、該走査線上
の2点に接触する2本の支持脚に支持された本体と、 該本体に取付けられ、前記走査方向の各部位における前
記支持脚間の直線線分の傾き角を検出するジャイロと、 該ジャイロから前記傾き角の検出データが入力され、前
記走査方向各部位における前記傾き角の検出データに基
づき、前記被測定面の平面度を算出するコンピュータと
を備えたことを特徴とする平面度測定装置。
1. A flatness measuring device which scans a surface to be measured and measures the flatness of the surface to be measured, comprising: a wheel moving along the scanning line; and a wheel contacting two points on the scanning line. A gyro attached to the main body, the gyro being attached to the main body, and detecting a tilt angle of a straight line segment between the support legs at each portion in the scanning direction; and detection data of the tilt angle from the gyro And a computer that calculates the flatness of the surface to be measured based on the detection data of the tilt angle at each part in the scanning direction.
【請求項2】 前記被測定面の走査方向における前記本
体の移動量を検出する移動量検出器を備えるとともに、 前記コンピュータが、前記ジャイロからの傾き角の検出
データに加えて、前記移動量検出器からの本体の移動量
の検出データに基づき被測定面の平面度を測定するよう
に構成されてなる請求項1記載の平面度測定装置。
2. A moving amount detector for detecting a moving amount of the main body in a scanning direction of the surface to be measured, and wherein the computer detects the moving amount in addition to tilt angle detection data from the gyro. 2. The flatness measuring device according to claim 1, wherein the flatness measuring device is configured to measure the flatness of the surface to be measured based on detection data of the amount of movement of the main body from the container.
JP4425498A 1998-02-12 1998-02-12 Flatness measurement device Withdrawn JPH11230739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4425498A JPH11230739A (en) 1998-02-12 1998-02-12 Flatness measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4425498A JPH11230739A (en) 1998-02-12 1998-02-12 Flatness measurement device

Publications (1)

Publication Number Publication Date
JPH11230739A true JPH11230739A (en) 1999-08-27

Family

ID=12686403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4425498A Withdrawn JPH11230739A (en) 1998-02-12 1998-02-12 Flatness measurement device

Country Status (1)

Country Link
JP (1) JPH11230739A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533459A (en) * 2005-03-09 2008-08-21 コミッサリア タ レネルジー アトミーク Method and apparatus for obtaining geometric shapes
CN103644886A (en) * 2013-11-19 2014-03-19 佘峰 Correction device for plane detector
CN105444724A (en) * 2015-11-11 2016-03-30 中国科学院长春光学精密机械与物理研究所 High-precision flatness on-line measurement device and measurement method
CN105588538A (en) * 2016-03-22 2016-05-18 嘉兴市兴嘉汽车零部件制造有限公司 Sucking disc location line flatness detection device and detection method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533459A (en) * 2005-03-09 2008-08-21 コミッサリア タ レネルジー アトミーク Method and apparatus for obtaining geometric shapes
CN103644886A (en) * 2013-11-19 2014-03-19 佘峰 Correction device for plane detector
CN105444724A (en) * 2015-11-11 2016-03-30 中国科学院长春光学精密机械与物理研究所 High-precision flatness on-line measurement device and measurement method
CN105588538A (en) * 2016-03-22 2016-05-18 嘉兴市兴嘉汽车零部件制造有限公司 Sucking disc location line flatness detection device and detection method
CN105588538B (en) * 2016-03-22 2018-04-03 嘉兴市兴嘉汽车零部件制造有限公司 Sucker position line flatness checking device and detection method

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