JPH11221784A - Aligning method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To align a transfer arm with a work to be loaded, by detecting a mark provided to the work loaded on a loading device, by a sensor of a carriage vehicle composed to stop opposing to the loading device, so s to correct the position of the transfer arm of the carriage vehicle. SOLUTION: A positioning mark 18a is provided to a cassette 3 loaded on a loading device 1, and a sensor 19 to detect the positioning mark 18a is provided to a transfer arm 9 provided on the correcting table 8 on an automated guided vehicle 7 which is composed to stop opposing to the loading device 1, so as to detect the positioning mark 18a. Consequently, the transfer arm 9 is aligned with the cassette 3 by calculating a slippage amount, and correcting the position of the transfer arm 9 by moving the correcting table 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning method and a positioning apparatus for placing an object such as a cassette between a placing apparatus and an automatic guided vehicle, and more particularly to a glass method in a liquid crystal factory and a semiconductor factory. The present invention relates to a method of aligning a cassette containing substrates or wafers between an automatic guided vehicle and an apparatus.

[0002]

2. Description of the Related Art FIG. 7 shows a conventional automatic guided vehicle (hereinafter referred to as AGV).
FIG. 8 is a perspective view showing a cassette positioning device between the loading device and the loading device, and FIG. 8 is a plan view thereof. In the drawing, 1 is a mounting device, 2 is a cassette mounting portion of the mounting device 1,
Reference numeral 3 denotes a liquid crystal cassette mounted on the cassette mounting portion 2 of the mounting device 1, 4 is a glass substrate stored in the cassette 3, 5 is a positioning plate mounted on the mounting device 1, and 5a is a positioning plate. Position marks 5b attached so as to be aligned with the center of the cassette placing section 2 of the placing device 1 are reflection marks attached to both sides of the position mark 5a.

[0003] 7 is an AGV which is an automatic guided vehicle, and 8 is an AGV.
The correction table 7 is movable so that position correction at the time of positioning can be performed. Reference numeral 9 denotes a transfer arm mounted on the correction table 8 and configured to be able to expand and contract. Reference numeral 10 denotes a sensor provided in the correction table 8,
Two distance sensors 10 on both sides of the center position sensor 10a
b is arranged. Reference numeral 11 denotes a guide antenna for running the AGV 7, and reference numeral 12 denotes a stopping antenna provided below the AGV 7. Reference numeral 14 denotes a guide tape, and the AGV 7 runs while the guide antenna 11 detects the guide tape 14. Reference numeral 15 denotes a stop mark for stopping the traveling of the AGV 7, which is provided in front of the mounting device 1, and detects the stop mark 15 by detecting the stop mark 15 with the stop antenna 12 of the AGV 7.
V7 stops. Reference numeral 16 denotes wheels for driving the AGV 7.

In such a conventional positioning device, the AGV 7 stops at the position of the stop mark 15, is detected by the positioning plate 5 and the sensor 10, and the correction table 8 moves to perform positioning and transfer. The arm 9 is extended to transfer the cassette 3 between the AGV 7 and the mounting device 1.

[0005]

Since the conventional positioning device is configured as described above, it is necessary to attach the positioning plate 5 to all of the cassette mounting portions 2 of all the mounting devices 1. In addition, since the AGV 7 estimates the position of the cassette 3 and corrects the position of the correction table 8 based on the position marks 5a and 5b affixed to the positioning plate 5, the position of the positioning plate 5 is set to each cassette of the mounting device 1. In the mounting part 2, it was necessary to attach it accurately and precisely in the x direction and the y direction. The number of the mounting devices 1 is about 50 to 100 in a normal system, and the number of the cassette mounting sections 2 is about 200 to 400. Therefore, there is a problem that it takes time to mount and adjust the positioning plate 5. The positioning plate 5 is also provided on the mounting device 1 side.
In order to mount the positioning plate 5, the accuracy of the mounting surface is also required, which leads to an increase in the cost of the apparatus, and also increases the manufacturing cost of the positioning plate 5.

When the AGV 7 and the cassette 3 are actually unloaded several times, the position of the positioning plate 5 is finely adjusted, teaching is performed on the AGV 7 main body, and when a plurality of AGVs 7 are used, , The same adjustment was required for all AGV7s, and it took much time. Further, since the positioning plate 5 is attached to the mounting device 1, if the positions of the cassette mounting portion 2 and the cassette 3 are uneven, the cassette 3 may not be fully loaded when transferring to the AGV 7, and the operation may stop due to an error. There is also a risk of dropping the cassette 3 or dropping it. Further, in order to position the cassette 3 on the mounting device 1 side, it is necessary to provide a cassette positioning mechanism, which leads to an increase in cost of the mounting device.

In addition, when the stop accuracy of the AGV 7 is poor or uneven before the mounting device 1 or when the correction range of the correction table 8 is exceeded, the movement direction of the AVG 7 is parallel to the running direction of the AVG 7 after the operation of the correction table 8. An error such as an overrun in the x direction, the y direction in which the transfer arm extends, and the overrun in the θ direction, which is a torsion direction from the x direction y direction, stops the correction operation of the correction table 8 and corrects the error. After retrying the transfer again, etc., there was a loss of time. The positioning plate 5 attached to the mounting device 1
However, in the case where the cassette 3 is bent or shifted due to contact during operation of the operator or the like, the cassette 3 cannot be transferred, and the positioning plate 5 needs to be corrected and adjusted again each time.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and has as its first object to obtain a positioning device which does not require a positioning plate to be mounted on a mounting portion. It is a second object of the present invention to obtain a positioning device which can perform transfer in a short time with high reliability. It is a third object of the present invention to obtain a positioning device that outputs error information before moving the correction table. It is a fourth object of the present invention to obtain a positioning device that does not require a correction table. It is a fifth object of the present invention to obtain a positioning method that does not require the mounting of a positioning plate on the mounting portion. It is a sixth object of the present invention to obtain an alignment method that can perform transfer in a short time with high reliability. Further, it is a seventh object of the present invention to obtain a positioning method that can be performed only by the carrier body.

[0009]

In a positioning method according to the present invention, a mark provided on an object to be mounted on a mounting device is stopped so as to face the mounting device. The position of the transfer arm and the object to be loaded are adjusted by detecting the sensor of the transfer vehicle and correcting the position of the transfer arm of the transfer vehicle. The correction of the position of the transfer arm is performed by moving the carrier body.

The position of the transfer arm is corrected by moving a correction table provided with the transfer arm. Further, when the correction amount of the position of the transfer arm exceeds the moving range of the correction table, error information is output before the correction table is moved.

Further, in the positioning apparatus according to the present invention, the mark is provided by a sensor provided on a transport vehicle configured to stop in opposition to a mounting apparatus for mounting the object on which the mark is provided. And a controller for correcting the position of the transfer arm and aligning the transfer arm with the object to be mounted. The moving arm is provided on a correction table configured to correct the transfer arm.

Further, the transfer arm is extendable and contractible. The sensor is formed using an image sensor. The sensor is provided on the transfer arm. Further, the sensor is provided in the correction table.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is a perspective view showing a positioning device according to Embodiment 1 of the present invention, and FIG. 2 is a plan view thereof. In the drawing, 1 is a mounting device, 2 is a cassette mounting portion of the mounting device 1, and 3 is a mounting device 1.
A cassette for liquid crystal, which is an object to be mounted, mounted on the cassette mounting portion 2; 4, a glass substrate housed in the cassette 3; 7, an AGV, which is an automatic guided vehicle; and 8, a correction table on the AGV 7. , So that position correction at the time of positioning can be performed. Reference numeral 9 denotes a transfer arm mounted on the correction table 8 and configured to be able to expand and contract. 11 is AG
V7 is a guide antenna for traveling, and 12 is a stop antenna provided below the AGV7. Reference numeral 14 denotes a guide tape, and the AGV 7 runs while the guide antenna 11 detects the guide tape 14. Reference numeral 15 denotes a stop mark for stopping the running of the AGV 7, which is provided in front of the mounting device 1,
When the stop mark 15 is detected by the stop antenna 12 of the GV 7, the AGV 7 stops. Reference numeral 16 denotes wheels for driving the AGV 7.

Numeral 18 denotes a positioning plate attached to the cassette 3. A positioning mark 18a is provided at the center of the cassette 3 in the width direction.
Reflection marks 18b are provided at both ends of 8a. 1
Reference numeral 9 denotes a sensor provided on the transfer arm 9 of the AGV 7, a central sensor 19a is a positioning sensor, and 19b on both sides are distance sensors. FIG. 3 is a diagram for explaining a positioning method according to the first embodiment of the present invention. In the figure, 1, 3, 7-9, 12, 14, 15, and 19 are the same as those in FIG. In addition, a dashed line in the drawing indicates a normal stop position. (The same applies to FIGS. 4 and 5.)

In the cassette positioning apparatus thus constructed, as shown in FIG. 3, the transfer arm 9 when the AGV 7 is deviated from the specified stop position and stops.
First, the distance sensor 19b checks the positioning marks 18b on both sides of the cassette 3,
The distances ya and yb from the cassette 3 are measured, and the displacement xa from the cassette 3 is measured by the positioning sensor 19a. When the transfer stroke of the AGV 7 is constant, the specified distance yc shown in FIG. 2 between the cassette 3 on the mounting device 1 and the specified position of the AGV 7 is a specified value. The correction in the y direction and the θ direction is performed so that the mounting arm 9 and the cassette surface are parallel, and the correction in the x direction is performed so that the center of the cassette 3 and the center of the transfer arm 9 are aligned. 9 extends to transfer the cassette 3 on the mounting device 1 to the AGV 7.

In the first embodiment, a positioning mark 18a and two reflection marks 18b are attached to both ends of the positioning mark 18a on the positioning plate 18 of the cassette 3. However, if the positioning plate 18 is of a reflection type, the reflection mark 18b Is not necessary and only the positioning mark 18a is sufficient. Further, the reflection mark 18b and the positioning mark 18a may be directly attached to the cassette without using the positioning plate 18. In the first embodiment, positioning pins or mounting holes are provided in advance at the center of the cassette 3 so that the positioning plate 18 or the positioning mark 18a can be mounted with good reproducibility. Also, the positioning mark 18a and the reflection mark 18b may be attached to the cassette member from the beginning, and a member provided with a concave square groove is formed at the time of member processing, and the mark is attached to the concave square groove later. May be.

Further, in the first embodiment, the sensor 19 is provided on the transfer arm 9;
May be provided with a sensor. Further, in the first embodiment, the distance between the cassette 3 and the transfer arm 9 is corrected to the specified yc position.
(Ya = yb) may be corrected (ya = yb), and the stroke of the cassette 3 in the transfer direction may be operated by correcting the value of the prescribed distance yc by the stroke of the transfer arm 9 (variable stroke).

Embodiment 2 FIG. Embodiment 2 will be described with reference to FIG. 1 and FIG. In the second embodiment, the distance y between the cassette 3 and the transfer arm 9 is detected, and the inclination and the distance are corrected. When the correction value exceeds the specified allowable operation range of the correction table 8 of the AGV 7, or when the transfer arm If the stroke exceeds the allowable stroke 9, after detecting the distance by the distance sensor 19b, the control unit (not shown) outputs an error such as overrun and stops the operation before operating the correction table 8. The position correction in the center direction of the cassette and the center direction of the transfer arm 9 is also performed in the same manner. If the correction value xa from the normal position exceeds the allowable operation range of the correction table 8, the position is detected by the positioning sensor 19a. Before operating the correction table 8, an error such as an overrun is issued and stopped in advance.

Embodiment 3 The third embodiment shows a correction method that does not use the correction table 8. FIG.
FIG. 9 is a diagram for explaining a positioning method according to Embodiment 3 of the present invention, and shows the positions of the AGV 7 and the guide antenna 11 in FIG. The third embodiment will be described with reference to FIG. The position of the cassette 3 and the position ya and yb of the transfer arm 9 in the y direction cause the inclination of the AGV main body from the normal stop position of the AGV 7, that is, the shift amounts ya 'and y from the guide tape 14 to the guide antenna 11.
a ″, yb ′, yb ″ can be calculated. As shown in FIG. 4, the end face position of the cassette 3 and the end face of the transfer arm 9, that is, the end face position of the AGV 7 main body are parallel to each other, and the regular distance yc shown in FIG. Indicates the position. When the cassette 3 is placed at an angle with respect to the guide tape 14, the AGV 7 main body is moved and corrected in the y and θ directions up to this value, and then the transfer arm 9 is operated to move the cassette 3. Put on.

FIG. 5 is a diagram for explaining another alignment method according to the third embodiment of the present invention.
2 shows the relationship between the stop position and the position of the stop antenna 12. From the position of the cassette 3 and the amount xa 'of displacement of the transfer arm 9 in the x direction, A
The deviation amount xa 'of the GV7 main body can be calculated.
The movement of the V7 body is corrected in the x direction, and then the transfer arm 9 is operated to transfer the cassette 3. AGV7
If the stopping accuracy of the main body is not good, the positioning plate 18 of the cassette 3 is again detected by the sensor 19 of the transfer arm 9.
Check the position of the AGV7
The position of the main body may be corrected. According to the third embodiment, when the stop position of the AGV 7 main body is shifted from the cassette 3, the cassette 3 can be reliably transferred regardless of the correction table 8. Therefore, the cost of the AGV main body can be reduced, that is, the cost of the transport equipment can be reduced.

Embodiment 4 FIG. The alignment method according to the third embodiment can be naturally applied to the AGV 7 having the correction table 8 as in the first and second embodiments. In this case, after detecting the correction amounts xa, ya, yb between the cassette 3 and the transfer arm 9, the position of the main body of the AGV 7 is corrected, and then the fine adjustment is performed by the correction table 8 to transfer the cassette 3. According to the fourth embodiment, even when the stop position of the AGV 7 main body varies, the correction table 8 can reliably and easily transfer the cassette 3 without overrun.

Embodiment 5 In the first to fourth embodiments, the positioning mark 1 is used to confirm the position of the cassette 3 in the x direction.
8a and the positioning sensor 19a, but using a CCD or a camera for image recognition as the sensor 19,
A scale mark having vertical stripes written at equal intervals on 8a may be used. This makes it possible to easily acquire and process data for calculating the correction amount.

Embodiment 6 FIG. In the first embodiment,
Although an example of the slide fork type in which the transfer arm 9 extends is shown, a SCARA arm robot or the like may be used. FIG. 6 is a perspective view showing a SCARA arm of an alignment device according to Embodiment 6 of the present invention. In the figure,
20 is a pedestal, 21 is a drive motor attached to the pedestal 20, 22 is a lower arm of a SCARA arm driven by the drive motor 21, 23 is an upper arm connected to the lower arm 22, and 24 is attached to the upper arm 23. The cassette is placed on the transfer table 24 in the transfer table. Between the drive motor 21 and the lower arm 22, the lower arm 22 and the upper arm 2
3 and between the upper arm 23 and the transfer table 24 are connected by a rotation mechanism 25, and the adjacent rotation mechanisms 25 are connected by a chain or a belt 26. Driven by the drive motor 21, the rotation mechanism 25 changes the angle of the transfer table 24,
The cassette is aligned and transferred.

Embodiment 7 FIG. In the first embodiment,
Although the guide tape 14 guides the AGV 7, the same effect can be obtained by using a tracked traverser or a tracked AGV. Embodiment 1
In the above, the description has been made with respect to the cassette for liquid crystal as the object to be mounted. However, the same effect can be obtained by applying the present invention to a wafer cassette for semiconductor wafers.

[0025]

Since the present invention is configured as described above, it has the following effects. The position of the transfer arm of the carrier is detected by detecting the mark provided on the object to be placed on the carrier by a sensor of the carrier configured to stop facing the carrier. By doing so, the position of the transfer arm and the object to be mounted are adjusted, so that it is not necessary to attach a mark to the mounting portion, and the cost for that can be reduced. Further, since the position of the transfer arm is corrected by moving the carrier, the position can be adjusted without the correction table, and the cost of the carrier can be reduced.

Further, since the position of the transfer arm is corrected by moving the correction table provided with the transfer arm, the correction table can be used for fine adjustment.
The position can be surely corrected. Further, when the correction amount of the position of the transfer arm exceeds the moving range of the correction table, error information is output before the correction table is moved, so that an error countermeasure can be taken before the correction.

Further, since the transfer arm is provided on the correction table movably supported on the carrier, the position of the transfer arm can be finely adjusted by controlling the position of the correction table. Can be. Further, since the transfer arm is extendable and contractible, the object to be mounted can be easily mounted if the position is adjusted. In addition, since the sensor is formed using the image sensor, processing data for calculating the correction amount of the transfer arm can be converted into data. Further, since the sensor is provided on the transfer arm, it is easy to detect the mark. Further, since the sensor is provided in the correction table, it is easy to detect the mark.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an alignment device according to Embodiment 1 of the present invention.

FIG. 2 is a plan view of the positioning device shown in FIG.

FIG. 3 is a diagram for explaining a positioning method according to the first embodiment of the present invention.

FIG. 4 is a diagram for explaining a positioning method according to a third embodiment of the present invention.

FIG. 5 is a diagram for explaining another alignment method according to the third embodiment of the present invention.

FIG. 6 is a perspective view showing a SCARA arm in a positioning device according to Embodiment 6 of the present invention.

FIG. 7 is a perspective view showing a conventional positioning device.

8 is a plan view of the alignment device shown in FIG.

[Explanation of symbols]

3 cassette, 7 automatic guided vehicle, 8 correction table, 9 transfer arm, 11 guide antenna, 12
Stop antenna, 14 guide tape, 15 stop mark, 18 positioning plate, 18a positioning mark, 19 sensor.

Claims (10)

[Claims] An object mounted on a mounting device, and a transfer device provided on a transport vehicle configured to stop facing the mounting device and perform the transfer of the object. In the positioning method between the transfer arm and the arm, the mark provided on the object is detected by a sensor of the carrier provided so as to face the mark, and the position of the transfer arm is corrected. A positioning method for positioning the transfer arm and the object to be mounted. 2. The method according to claim 1, wherein the position of the transfer arm is corrected by moving the carrier body.
The alignment method described. 3. The transfer arm according to claim 1, wherein the position of the transfer arm is corrected by moving a correction table provided with the transfer arm and movably provided on the carrier. 2. The alignment method according to 2. 4. The apparatus according to claim 3, wherein when the correction amount of the position of the transfer arm exceeds the moving range of the correction table, error information is output before the correction table is moved. Alignment method. 5. A transport vehicle having a sensor for detecting the mark, the transport vehicle being configured to stop facing a mounting device for mounting an object on which a mark is provided, provided on the transport vehicle, A transfer arm that transfers the object placed on the placing device, the mark is detected by the sensor,
A positioning device, comprising: a control unit that corrects the position of the transfer arm and positions the transfer arm and the object to be mounted. 6. The positioning apparatus according to claim 5, wherein the transfer arm is provided on a correction table movably supported on the carrier. 7. The positioning device according to claim 5, wherein the transfer arm is extendable and retractable. 8. The alignment device according to claim 5, wherein the sensor is formed using an image sensor. 9. The alignment device according to claim 5, wherein the sensor is provided on the transfer arm. 10. The positioning apparatus according to claim 5, wherein the sensor is provided on a correction table.