JPH11219613A - Ultraviolet ray cold filter - Google Patents
Ultraviolet ray cold filterInfo
- Publication number
- JPH11219613A JPH11219613A JP3231598A JP3231598A JPH11219613A JP H11219613 A JPH11219613 A JP H11219613A JP 3231598 A JP3231598 A JP 3231598A JP 3231598 A JP3231598 A JP 3231598A JP H11219613 A JPH11219613 A JP H11219613A
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- low
- low refractive
- high refractive
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Filters (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は紫外線光源の前方に
配置する紫外線コールドフィルターの改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in an ultraviolet cold filter disposed in front of an ultraviolet light source.
【０００２】[0002]
【従来の技術】従来、プラスチックやガラス等の表面に
紫外線により硬化する塗料やインキを被着し、同塗料や
インキに紫外線を照射することにより硬化することが実
施されている。また食品の容器や医療品の容器に紫外線
を照射し、容器に付着した黴菌を殺菌することが実施さ
れている。さらにプラスチックや塗膜等の劣化を短時間
に試験するために使用する耐候性試験装置の内部に紫外
線光源を装着し、同紫外線光源からの紫外線によるプラ
スチックや塗膜等の劣化試験が行われている。また紫外
線光源からの高熱による被照射物への悪影響を防止する
ために、紫外線光源は例えば水冷ジャケットの内部に装
着し、熱を除去することが実施されている。2. Description of the Related Art Heretofore, it has been practiced to apply a paint or ink which is cured by ultraviolet rays to the surface of plastic or glass, and to cure the paint or ink by irradiating the paint or ink with ultraviolet rays. Further, it is practiced to irradiate ultraviolet rays to food containers and medical product containers to sterilize molds attached to the containers. Furthermore, an ultraviolet light source is installed inside the weathering tester used to test the deterioration of plastics and coatings in a short time, and the deterioration test of plastics and coatings by the ultraviolet light from the ultraviolet light source is performed. I have. Further, in order to prevent the object to be irradiated from being adversely affected by high heat from the ultraviolet light source, the ultraviolet light source is mounted, for example, inside a water cooling jacket to remove heat.
【０００３】[0003]
【発明が解決しようとする課題】ところで、紫外線光源
を水冷ジャケットの内部に装着する構造とすると、装置
が複雑となる欠点がある。そこで従来、紫外線光源の前
方に熱線カットフィルターを配置し、被照射物が高熱に
より劣化するのを防止することが実施されている。従
来、実施されている熱線カットフィルターは２ｍｍ乃至
３ｍｍ程度の厚さの石英ガラスの表面にＳｉＯ2からな
る低屈折率膜と、ＺｒＯ2からなる高屈折率膜を順次２
５層程度積層し構成してある。しかし、同低屈折率膜と
高屈折率膜を積層する構造によると、図５に示すよう
に、分光特性が２５０ｎｍ乃至４００ｎｍの光の透過率
が低く、また８００ｎｍ乃至１２００ｎｍの光の反射率
が低く、紫外線を効果的に利用することができず、さら
に赤外線により高熱が熱線カットフィルターを通過して
被照射物に悪影響を与える欠点がある。さらに紫外線光
源を水冷ジャケット内に装着して熱をカットし、被照射
物が高熱により悪影響を受けないようにしなければなら
ず、装置が複雑となる欠点がある。However, if the ultraviolet light source is mounted inside the water-cooled jacket, there is a disadvantage that the apparatus becomes complicated. Therefore, conventionally, a heat ray cut filter is arranged in front of the ultraviolet light source to prevent the irradiation target from being deteriorated by high heat. Conventionally, a hot-ray cut filter has a low-refractive-index film made of SiO 2 and a high-refractive-index film made of ZrO 2 on a surface of quartz glass having a thickness of about 2 mm to 3 mm.
About five layers are laminated. However, according to the structure in which the low-refractive-index film and the high-refractive-index film are stacked, as shown in FIG. 5, the transmittance of light having a spectral characteristic of 250 nm to 400 nm is low, and the reflectance of light having a wavelength of 800 nm to 1200 nm is low. It is low and cannot utilize ultraviolet rays effectively, and furthermore, there is a drawback that infrared rays cause high heat to pass through the heat ray cut filter and adversely affect the irradiated object. Further, an ultraviolet light source must be mounted in a water-cooled jacket to cut off heat so that the object to be irradiated is not adversely affected by the high heat, and there is a disadvantage that the apparatus becomes complicated.
【０００４】本発明は、上記の点に鑑み発明したもので
あって、効率よく熱線をカットし、さらに効率よく紫外
線を透過することができ、また簡単な装置により容易に
製造することができる熱線カットフィルターを提供する
ことを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has been made in consideration of the above circumstances, and is capable of efficiently cutting off heat rays, transmitting ultraviolet rays more efficiently, and being easily manufactured by a simple apparatus. It is intended to provide a cut filter.
【０００５】[0005]
【課題を解決するための手段】本発明は上記課題を解決
するために次の構成とする。つまり請求項１に記載の発
明は、石英ガラス板の表面に、高屈折率膜と低屈折率膜
とを交互に被着して構成してある。また分光特性が２５
０ｎｍ乃至４００ｎｍの光を透過し、８００ｎｍ乃至１
２００ｎｍの光を反射するように構成してある。Means for Solving the Problems The present invention has the following structure to solve the above-mentioned problems. That is, the first aspect of the present invention is configured such that high refractive index films and low refractive index films are alternately applied to the surface of a quartz glass plate. In addition, the spectral characteristic is 25
It transmits light of 0 nm to 400 nm, and transmits light of 800 nm to 1 nm.
It is configured to reflect 200 nm light.
【０００６】請求項２に記載の発明は、石英ガラス板の
両面若しくは片面に、高屈折率膜と低屈折率膜とを交互
に被着し、また同高屈折率膜と低屈折率膜との間に、高
屈折率膜と低屈折率膜と同じ物質で且つ同高屈折率膜と
低屈折率膜より薄い膜で構成してなる低屈折率膜と高屈
折率膜を被着して構成してある。According to a second aspect of the present invention, a high-refractive-index film and a low-refractive-index film are alternately coated on both surfaces or one surface of a quartz glass plate. Between the high refractive index film and the low refractive index film, the same material, and a low refractive index film and a high refractive index film composed of a film thinner than the high refractive index film and the low refractive index film are applied. It is composed.
【０００７】[0007]
【発明の実施の形態】以下本発明を図１図乃至図４につ
いて説明する。図１において、１は２ｍｍ乃至３ｍｍ程
度の厚さに構成した紫外線コールドフィルターであっ
て、石英ガラス板で構成してある。また同紫外線コール
ドフィルターの両面若しくは片面に、高屈折率膜１１と
低屈折率膜１２とを交互に多数層被着し、分光特性が２
５０ｎｍ乃至４００ｎｍを透過し、８００ｎｍ乃至１２
００ｎｍを反射するように構成する。２は反射体３に装
着してなる紫外線光源であって、例えば１５キロワット
の高圧放電ランプを用いて構成してある。４は紫外線コ
ールドフィルター１の前方に配置し、紫外線を照射する
ワークであって、例えば食品や医療品の容器である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to FIGS. In FIG. 1, reference numeral 1 denotes an ultraviolet cold filter having a thickness of about 2 mm to 3 mm, which is formed of a quartz glass plate. A large number of high-refractive-index films 11 and low-refractive-index films 12 are alternately deposited on both surfaces or one surface of the ultraviolet cold filter, and the spectral characteristics are 2.
Transmits 50 nm to 400 nm, 800 nm to 12
It is configured to reflect 00 nm. Reference numeral 2 denotes an ultraviolet light source mounted on the reflector 3, which is constituted by using, for example, a 15 kilowatt high-pressure discharge lamp. Reference numeral 4 denotes a work placed in front of the ultraviolet cold filter 1 and irradiating ultraviolet light, and is, for example, a container for food or medical goods.
【０００８】また石英ガラス板の両面若しくは片面に、
高屈折率膜と低屈折率膜とを交互に被着し、また同高屈
折率膜と低屈折率膜との間に、高屈折率膜と低屈折率膜
と同じ物質で且つ同高屈折率膜と低屈折率膜より薄い膜
で構成してなる低屈折率膜１３と高屈折率膜１４を被着
して構成してある。Further, on both sides or one side of a quartz glass plate,
A high-refractive-index film and a low-refractive-index film are alternately applied, and between the high-refractive-index film and the low-refractive-index film, the same material as the high-refractive-index film and the low-refractive-index film and the same high refractive index A low-refractive-index film 13 and a high-refractive-index film 14, which are made of a thinner film than the low-refractive-index film and the low-refractive-index film, are adhered.
【０００９】次に紫外線コールドフィルター１の片面に
ＺｒＯ2あるいはＨｆＯ2からなる高屈折率膜とＳｉＯ2
からなる低屈折率膜とを交互に多数層被着し、さらに同
高屈折率膜と低屈折率膜の間に、同高屈折率膜と低屈折
率膜より薄い厚さのＳｉＯ2からなる低屈折率膜と、Ｚ
ｒＯ2あるいはＨｆＯ2からなる高屈折率膜とを被着す
る。この場合の各膜の厚さは例えば次のように６１層構
成する。Next, a high refractive index film made of ZrO 2 or HfO 2 and SiO 2
And a low refractive index film composed of SiO 2 having a thickness smaller than that of the high refractive index film and the low refractive index film between the high refractive index film and the low refractive index film. Low refractive index film and Z
A high refractive index film made of rO 2 or HfO 2 is applied . In this case, the thickness of each film is, for example, 61 layers as follows.
【００１０】[0010]
【表１】 層 物質 膜厚（ｎｍ） １ 低屈折率 ５７．９２ ２ 高屈折率 １１．８２ ３ 低屈折率 １７．５４ ４ 高屈折率 ８９．６３ ５ 低屈折率 １５．７９ ６ 高屈折率 １３．６３ ７ 低屈折率 １１５．８８ ８ 高屈折率 １２．８９ ９ 低屈折率 １３．７ １０ 高屈折率 ８９．０８ １１ 低屈折率 １３．３２ １２ 高屈折率 １３．５５ １３ 低屈折率 １１４．５９ １４ 高屈折率 １３．３３ １５ 低屈折率 １２．３９ １６ 高屈折率 ８８．５４ １７ 低屈折率 １１．９６ １８ 高屈折率 １３．３５ １９ 低屈折率 １１３．８２ ２０ 高屈折率 １３．７３ ２１ 低屈折率 １１．７１ ２２ 高屈折率 ８８．２７ ２３ 低屈折率 １１．４４ ２４ 高屈折率 １３．６９ ２５ 低屈折率 １１３．４６ ２６ 高屈折率 １３．７２ ２７ 低屈折率 １１．５９ ２８ 高屈折率 ８８．１７ ２９ 低屈折率 １１．６２ ３０ 高屈折率 １４．００ ３１ 低屈折率 １１３．３５ ３２ 高屈折率 １３．２４ ３３ 低屈折率 １１．４２ ３４ 高屈折率 ８８．１１ ３５ 低屈折率 １２．５３ ３６ 高屈折率 １３．９ ３７ 低屈折率 １１２．９７ ３８ 高屈折率 １３．２４ ３９ 低屈折率 １２．３３ ４０ 高屈折率 ８８．０８ ４１ 低屈折率 １２．２２ ４２ 高屈折率 １３．２９ ４３ 低屈折率 １１３．０４ ４４ 高屈折率 １３．７１ ４５ 低屈折率 １２．８８ ４６ 高屈折率 ８８．１７ ４７ 低屈折率 １１．４６ ４８ 高屈折率 １３．０３ ４９ 低屈折率 １１３．５９ ５０ 高屈折率 １４．１ ５１ 低屈折率 １２．９６ ５２ 高屈折率 ８８．３１ ５３ 低屈折率 １０．７６ ５４ 高屈折率 １３．３ ５５ 低屈折率 １１４．２１ ５６ 高屈折率 １４．３９ ５７ 低屈折率 １１．８２ ５８ 高屈折率 ８８．４９ ５９ 低屈折率 ６．０１ ６０ 高屈折率 １５．４６ ６１ 低屈折率 ５５．７８Table 1 Layer Material Thickness (nm) 1 Low refractive index 57.92 2 High refractive index 11.82 3 Low refractive index 17.54 4 High refractive index 89.63 5 Low refractive index 15.79 6 High refractive index 13.63 7 Low refractive index 115.88 8 High refractive index 12.89 9 Low refractive index 13.7 10 High refractive index 89.08 11 Low refractive index 13.32 12 High refractive index 13.55 13 Low refractive index 114 .59 14 High refractive index 13.33 15 Low refractive index 12.39 16 High refractive index 88.54 17 Low refractive index 11.96 18 High refractive index 13.35 19 Low refractive index 113.82 20 High refractive index 13. 73 21 Low refractive index 11.71 22 High refractive index 88.27 23 Low refractive index 11.44 24 High refractive index 13.69 25 Low refractive index 113.46 26 High refractive index 13.72 27 Low refractive index 11.59 2 8 High refractive index 88.17 29 Low refractive index 11.62 30 High refractive index 14.00 31 Low refractive index 113.35 32 High refractive index 13.24 33 Low refractive index 11.42 34 High refractive index 88.11 35 Low refractive index 12.53 36 High refractive index 13.9 37 Low refractive index 112.97 38 High refractive index 13.24 39 Low refractive index 12.33 40 High refractive index 88.08 41 Low refractive index 12.22 42 High Refractive index 13.29 43 Low refractive index 113.04 44 High refractive index 13.71 45 Low refractive index 12.88 46 High refractive index 88.17 47 Low refractive index 11.46 48 High refractive index 13.03 49 Low refractive index Index 113.59 50 High refractive index 14.1 51 Low refractive index 12.96 52 High refractive index 88.31 53 Low refractive index 10.76 54 High refractive index 13.3 55 Low refractive index 11 .21 56 high refractive index 14.39 57 low refractive index 11.82 58 high refractive index 88.49 59 low refractive index 6.01 60 high refractive index 15.46 61 low refractive index 55.78
【００１１】表１に示す紫外線コールドフィルターによ
ると、図２に示す分光透過特性を得ることができる。同
分光透過特性によると、２５０ｎｍから４００ｎｍの紫
外線は９０％程度と効率よく透過し、また８００ｎｍか
ら１０００ｎｍの範囲の赤外線の反射率は、９７％程度
と効率よくカットすることができる。これは、高屈折率
膜と低屈折率膜の間に、薄い厚さの高屈折率膜と低屈折
率膜とを被着することにより、図２に示すように、紫外
線と赤外線を効率よく制御できるためである。なお、According to the ultraviolet cold filter shown in Table 1, the spectral transmission characteristics shown in FIG. 2 can be obtained. According to the spectral transmission characteristics, ultraviolet rays of 250 nm to 400 nm can be efficiently transmitted as about 90%, and the reflectance of infrared rays in the range of 800 nm to 1000 nm can be efficiently cut as about 97%. This is because a high-refractive-index film and a low-refractive-index film having a small thickness are deposited between the high-refractive-index film and the low-refractive-index film, so that ultraviolet light and infrared light can be efficiently emitted as shown in FIG. This is because it can be controlled. In addition,
【００１２】に示す従来の構成によると、分光透過特性
は図５に示すとおりであり、赤外線の反射率は悪く、ま
た紫外線の透過率も悪く、被照射面における温度は高く
なり、紫外線による紫外線塗料やインキの硬化に時間を
要する。According to the conventional configuration shown in FIG. 5, the spectral transmission characteristics are as shown in FIG. 5, the reflectance of infrared rays is poor, the transmittance of ultraviolet rays is also poor, the temperature on the surface to be irradiated is high, It takes time to cure paints and inks.
【００１３】次に両面にＺｒＯ2あるいはＨｆＯ2からな
る高屈折率膜とＳｉＯ2からなる低屈折率膜とを交互に
多数層被着し、さらに同高屈折率膜と低屈折率膜の間
に、ＳｉＯ2からなる薄い厚さの低屈折率膜と、ＺｒＯ2
あるいはＨｆＯ2からなる薄い厚さの高屈折率膜とを被
着してる実施例について説明する。この場合の各膜の厚
さは例えば次のように構成する。表面の膜の厚さは表２
に示すように６１層構成する。Next, a large number of high-refractive-index films made of ZrO 2 or HfO 2 and low-refractive-index films made of SiO 2 are alternately coated on both surfaces, and a high-refractive-index film and a low-refractive-index film are formed. A thin low-refractive-index film made of SiO 2 and ZrO 2
Alternatively, an embodiment in which a thin high-refractive-index film made of HfO 2 is applied will be described. In this case, the thickness of each film is configured, for example, as follows. Table 2 shows the thickness of the film on the surface.
As shown in FIG.
【００１４】[0014]
【表２】 層 物質 膜厚（ｎｍ） １ 低屈折率 ５７．６２ ２ 高屈折率 ９．４２ ３ 低屈折率 ２１．７３ ４ 高屈折率 ８８．５ ５ 低屈折率 １９．３６ ６ 高屈折率 １２．４２ ７ 低屈折率 １１６．６５ ８ 高屈折率 ９．１６ ９ 低屈折率 １６．４２ １０ 高屈折率 ８５．７２ １１ 低屈折率 １７．１３ １２ 高屈折率 １２．４４ １３ 低屈折率 １１３．８４ １４ 高屈折率 １０．１４ １５ 低屈折率 １５．２３ １６ 高屈折率 ８５．８９ １７ 低屈折率 １４．３２ １８ 高屈折率 １３．１１ １９ 低屈折率 １１３．３７ ２０ 高屈折率 １２．９１ ２１ 低屈折率 １１．６４ ２２ 高屈折率 ８６．６９ ２３ 低屈折率 １０．３８ ２４ 高屈折率 １５．０８ ２５ 低屈折率 １１３．３６ ２６ 高屈折率 １４．７３ ２７ 低屈折率 ７．７５ ２８ 高屈折率 ８７．１７ ２９ 低屈折率 ８．６１ ３０ 高屈折率 １７．４８ ３１ 低屈折率 １１２．９２ ３２ 高屈折率 １４．８３ ３３ 低屈折率 ６．６５ ３４ 高屈折率 ８７．７２ ３５ 低屈折率 ８．５２ ３６ 高屈折率 １７．２７ ３７ 低屈折率 １１２．５８ ３８ 高屈折率 １５．００ ３９ 低屈折率 ９．２７ ４０ 高屈折率 ８７．９１ ４１ 低屈折率 ９．８４ ４２ 高屈折率 １３．３９ ４３ 低屈折率 １１２．６９ ４４ 高屈折率 １５．８８ ４５ 低屈折率 １３．２７ ４６ 高屈折率 ８７．１ ４７ 低屈折率 ９．９１ ４８ 高屈折率 ８．８７ ４９ 低屈折率 １１３．３５ ５０ 高屈折率 １７．６８ ５１ 低屈折率 １５．３５ ５２ 高屈折率 ８５．０８ ５３ 低屈折率 ７．４７ ５４ 高屈折率 ７．５８ ５５ 低屈折率 １１４．２ ５６ 高屈折率 １９．５７ ５７ 低屈折率 １４．１２ ５８ 高屈折率 ８１．０８ ５９ 低屈折率 ０ ６０ 高屈折率 １１．５７ ６１ 低屈折率 ５４．３３Table 2 Layer Material Thickness (nm) 1 Low refractive index 57.62 2 High refractive index 9.42 3 Low refractive index 21.73 4 High refractive index 88.5 5 Low refractive index 19.36 6 High refractive index 12.42 7 Low refractive index 116.65 8 High refractive index 9.16 9 Low refractive index 16.42 10 High refractive index 85.72 11 Low refractive index 17.13 12 High refractive index 12.44 13 Low refractive index 113 .84 14 High refractive index 10.14 15 Low refractive index 15.23 16 High refractive index 85.89 17 Low refractive index 14.32 18 High refractive index 13.11 19 Low refractive index 113.37 20 High refractive index 12. 91 21 Low refractive index 11.64 22 High refractive index 86.69 23 Low refractive index 10.38 24 High refractive index 15.08 25 Low refractive index 113.36 26 High refractive index 14.73 27 Low refractive index 7.75 28 high Folding index 87.17 29 Low refractive index 8.61 30 High refractive index 17.48 31 Low refractive index 112.92 32 High refractive index 14.83 33 Low refractive index 6.65 34 High refractive index 87.72 35 Low refractive index Index 8.52 36 High refractive index 17.27 37 Low refractive index 112.58 38 High refractive index 15.00 39 Low refractive index 9.27 40 High refractive index 87.91 41 Low refractive index 9.84 42 High refractive index 13.39 43 Low refractive index 112.69 44 High refractive index 15.88 45 Low refractive index 13.27 46 High refractive index 87.1 47 Low refractive index 9.91 48 High refractive index 8.87 49 Low refractive index 113 .35 50 High refractive index 17.68 51 Low refractive index 15.35 52 High refractive index 85.08 53 Low refractive index 7.47 54 High refractive index 7.58 55 Low refractive index 114.2 56 High refractive index 9.57 57 low refractive index 14.12 58 high refractive index 81.08 59 low index 0 60 high refractive index 11.57 61 low refractive index 54.33
【００１５】また裏面の膜の厚さは、表３に示すように
６１層構成する。The thickness of the film on the back surface is 61 layers as shown in Table 3.
【００１６】[0016]
【表３】 層 物質 膜厚（ｎｍ） １ 低屈折率 ７０．４４ ２ 高屈折率 １１．６９ ３ 低屈折率 １９．０５ ４ 高屈折率 １０５．２１ ５ 低屈折率 １５．４２ ６ 高屈折率 １７．１８ ７ 低屈折率 １３８．４ ８ 高屈折率 １６．４２ ９ 低屈折率 １６．７９ １０ 高屈折率 １０８．３６ １１ 低屈折率 １６．９１ １２ 高屈折率 １６．０１ １３ 低屈折率 １３９．８８ １４ 高屈折率 １５．７６ １５ 低屈折率 １６．３９ １６ 高屈折率 １０８．５３ １７ 低屈折率 １６．８７ １８ 高屈折率 １５．７４ １９ 低屈折率 １３９．５４ ２０ 高屈折率 １５．８７ ２１ 低屈折率 １６．０４ ２２ 高屈折率 １０９．２５ ２３ 低屈折率 １６．７ ２４ 高屈折率 １５．２３ ２５ 低屈折率 １４０．２２ ２６ 高屈折率 １５．３２ ２７ 低屈折率 １６．７３ ２８ 高屈折率 １０８．４５ ２９ 低屈折率 １５．８９ ３０ 高屈折率 １６．１３ ３１ 低屈折率 １３８．０２ ３２ 高屈折率 １５．９９ ３３ 低屈折率 １６．５４ ３４ 高屈折率 １０７．５７ ３５ 低屈折率 １６．８３ ３６ 高屈折率 １５．９２ ３７ 低屈折率 １３８．２４ ３８ 高屈折率 １６．３７ ３９ 低屈折率 １５．４９ ４０ 高屈折率 １０９．１ ４１ 低屈折率 １７．６９ ４２ 高屈折率 １４．５７ ４３ 低屈折率 １４３．１５ ４４ 高屈折率 １４．９９ ４５ 低屈折率 １７．００ ４６ 高屈折率 １０９．９６ ４７ 低屈折率 １５．２３ ４８ 高屈折率 １６．５ ４９ 低屈折率 １３８．８２ ５０ 高屈折率 １５．６４ ５１ 低屈折率 １７．５４ ５２ 高屈折率 １０５．３ ５３ 低屈折率 １６．４４ ５４ 高屈折率 １６．７９ ５５ 低屈折率 １２７．６７ ５６ 高屈折率 １４．９４ ５７ 低屈折率 １０．００ ５８ 高屈折率 １０４．３４ ５９ 低屈折率 ３．６３ ６０ 高屈折率 １７．２８ ６１ 低屈折率 ５４．８９Table 3 Layer Material Thickness (nm) 1 Low refractive index 70.44 2 High refractive index 11.69 3 Low refractive index 19.05 4 High refractive index 105.21 5 Low refractive index 15.42 6 High refractive index 17.18 7 Low refractive index 138.4 8 High refractive index 16.42 9 Low refractive index 16.79 10 High refractive index 108.36 11 Low refractive index 16.91 12 High refractive index 16.01 13 Low refractive index 139 .88 14 High refractive index 15.76 15 Low refractive index 16.39 16 High refractive index 108.53 17 Low refractive index 16.87 18 High refractive index 15.74 19 Low refractive index 139.554 20 High refractive index 15. 87 21 Low refractive index 16.04 22 High refractive index 109.25 23 Low refractive index 16.7 24 High refractive index 15.23 25 Low refractive index 140.22 26 High refractive index 15.32 27 Low refractive index 16. 3 28 High refractive index 108.45 29 Low refractive index 15.89 30 High refractive index 16.13 31 Low refractive index 138.02 32 High refractive index 15.99 33 Low refractive index 16.54 34 High refractive index 107.57 35 Low refractive index 16.83 36 High refractive index 15.92 37 Low refractive index 138.24 38 High refractive index 16.37 39 Low refractive index 15.49 40 High refractive index 109.1 41 Low refractive index 17.69 42 High refractive index 14.57 43 Low refractive index 143.15 44 High refractive index 14.99 45 Low refractive index 17.00 46 High refractive index 109.96 47 Low refractive index 15.23 48 High refractive index 16.5 49 Low Refractive index 138.82 50 High refractive index 15.64 51 Low refractive index 17.54 52 High refractive index 105.3 53 Low refractive index 16.44 54 High refractive index 16.795 Low refractive index 127.67 56 high refractive index 14.94 57 low refractive index 10.00 58 high index 104.34 59 low refractive index 3.63 60 high refractive index 17.28 61 low refractive index 54.89
【００１７】表２と表３に示す紫外線コールドフィルタ
ーによると、図３に示す分光透過特性を得ることができ
る。同分光透過特性によると、表１示すものと同様に、
２５０ｎｍから４００ｎｍの紫外線は９０％程度と効率
よく透過し、また８００ｎｍから１２００ｎｍの範囲の
赤外線の反射率は、９９％程度と効率よくカットするこ
とができる。これは、高屈折率膜と低屈折率膜の間に、
薄い厚さの高屈折率膜と低屈折率膜とを被着したことに
より、図３に示すように、紫外線と赤外線を効率よく制
御できるためである。さらに両面に膜を構成したので、
透過特性及び耐久性が向上する。According to the ultraviolet cold filters shown in Tables 2 and 3, the spectral transmission characteristics shown in FIG. 3 can be obtained. According to the same spectral transmission characteristics, as shown in Table 1,
Ultraviolet rays of 250 nm to 400 nm can be efficiently transmitted at about 90%, and reflectance of infrared rays in the range of 800 nm to 1200 nm can be efficiently cut at about 99%. This is between the high and low refractive index films
This is because, as shown in FIG. 3, the ultraviolet and infrared rays can be efficiently controlled by attaching the high-refractive-index film and the low-refractive-index film having a small thickness. In addition, since membranes were configured on both sides,
The transmission characteristics and durability are improved.
【００１８】また膜の被着は、高屈折率膜と低屈折率膜
の二種について、基板温度や真空圧や蒸着速度を変える
ことにより、容易に形成することができる。また上記し
た熱線カットフィルターを内部に紫外線光源を装着して
なる紫外線照射装置の前面に配置し実施すると、照射装
置の前面が高熱になることがなく、被照射物に対する熱
的悪影響が生じることがなく、さらに紫外線を効果的に
透過するので、確実に紫外線塗料やインキを硬化するこ
とができる。また従来の水冷式の装置に比べ構造が簡単
となる。The film can be easily formed by changing the substrate temperature, the vacuum pressure, and the deposition rate for the two types of films, the high refractive index film and the low refractive index film. Further, when the above-mentioned heat ray cut filter is disposed on the front surface of an ultraviolet irradiation device having an ultraviolet light source mounted therein, the front surface of the irradiation device does not become hot, and a thermal adverse effect on an irradiation target may occur. In addition, since ultraviolet light is transmitted more effectively, ultraviolet paints and inks can be surely cured. Further, the structure is simpler than that of a conventional water-cooled device.
【００１９】[0019]
【発明の効果】上記した請求項１と請求項２に記載２発
明によると、効率よく熱線をカットし、効率よく紫外線
を透過することができ、さらに容易に熱線カットフィル
ターを製造することができる特別な効果がある。According to the first and second aspects of the present invention, the heat rays can be cut efficiently, the ultraviolet rays can be transmitted efficiently, and the heat ray cut filter can be manufactured more easily. Has a special effect.
【図１】本発明に係る熱線カットフィルターの実施例
図。FIG. 1 is a diagram showing an embodiment of a heat ray cut filter according to the present invention.
【図２】本発明に係る熱線カットフィルターの分光透過
特性を示す図。FIG. 2 is a view showing a spectral transmission characteristic of a heat ray cut filter according to the present invention.
【図３】本発明に係る他の熱線カットフィルターの分光
透過特性を示す図。FIG. 3 is a diagram showing a spectral transmission characteristic of another heat ray cut filter according to the present invention.
【図４】図１における熱線カットフィルターの一部拡大
図。FIG. 4 is a partially enlarged view of the heat ray cut filter in FIG. 1;
【図５】従来の熱線カットフィルターの分光透過特性を
示す図。FIG. 5 is a diagram showing a spectral transmission characteristic of a conventional heat ray cut filter.
１ 石英ガラス板 ２ 紫外線光源 ３ 反射体 ４ ワーク １１ 高屈折率膜 １２ 低屈折率膜 １３ 低屈折率膜 １４ 高屈折率膜 DESCRIPTION OF SYMBOLS 1 Quartz glass plate 2 Ultraviolet light source 3 Reflector 4 Work 11 High refractive index film 12 Low refractive index film 13 Low refractive index film 14 High refractive index film
Claims (2)
折率膜とを交互に被着し、分光特性が２５０ｎｍ乃至４
００ｎｍの光を透過し、８００ｎｍ乃至１２００ｎｍの
光を反射するように構成したことを特徴とする紫外線コ
ールドフィルター。1. A high-refractive-index film and a low-refractive-index film are alternately applied on the surface of a quartz glass plate, and have a spectral characteristic of 250 nm to 4 nm.
An ultraviolet cold filter configured to transmit light of 00 nm and reflect light of 800 nm to 1200 nm.
折率膜と低屈折率膜とを交互に被着し、また同高屈折率
膜と低屈折率膜との間に、高屈折率膜と低屈折率膜と同
じ物質で且つ同高屈折率膜と低屈折率膜より薄い膜で構
成してなる低屈折率膜と高屈折率膜を被着したことを特
徴とする請求項１記載の紫外線コールドフィルター。2. A high-refractive-index film and a low-refractive-index film are alternately deposited on both surfaces or one surface of a quartz glass plate, and a high-refractive-index film is interposed between the high-refractive-index film and the low-refractive-index film. 2. A low-refractive-index film and a high-refractive-index film formed of the same material as the film and the low-refractive-index film and made of a film thinner than the high-refractive-index film and the low-refractive-index film. The ultraviolet cold filter as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03231598A JP4061441B2 (en) | 1998-01-30 | 1998-01-30 | UV cold filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03231598A JP4061441B2 (en) | 1998-01-30 | 1998-01-30 | UV cold filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11219613A true JPH11219613A (en) | 1999-08-10 |
| JP4061441B2 JP4061441B2 (en) | 2008-03-19 |
Family
ID=12355516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03231598A Expired - Fee Related JP4061441B2 (en) | 1998-01-30 | 1998-01-30 | UV cold filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4061441B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003045211A (en) * | 2001-07-31 | 2003-02-14 | Iwasaki Electric Co Ltd | Black light |
| JP2005345492A (en) * | 2004-05-31 | 2005-12-15 | Canon Inc | Optical element, mirror, and antireflection film |
| WO2018100991A1 (en) * | 2016-11-30 | 2018-06-07 | 旭硝子株式会社 | Ultraviolet ray transmission filter |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843949B (en) * | 2017-11-20 | 2020-08-14 | 北京空间机电研究所 | High-precision positioning ultra-precise optical filter with error compensation function |
-
1998
- 1998-01-30 JP JP03231598A patent/JP4061441B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003045211A (en) * | 2001-07-31 | 2003-02-14 | Iwasaki Electric Co Ltd | Black light |
| JP4577602B2 (en) * | 2001-07-31 | 2010-11-10 | 岩崎電気株式会社 | UV irradiation equipment |
| JP2005345492A (en) * | 2004-05-31 | 2005-12-15 | Canon Inc | Optical element, mirror, and antireflection film |
| JP4630574B2 (en) * | 2004-05-31 | 2011-02-09 | キヤノン株式会社 | Optical element, mirror and antireflection film |
| WO2018100991A1 (en) * | 2016-11-30 | 2018-06-07 | 旭硝子株式会社 | Ultraviolet ray transmission filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4061441B2 (en) | 2008-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1046664C (en) | Multilayered optical film | |
| US7349151B2 (en) | IR absorbing reflector | |
| JP4275692B2 (en) | Wire grid polarizer and liquid crystal display using the same | |
| US7880966B2 (en) | Optical article including a layer siox as main component and manufacturing method of the same | |
| KR20080005427A (en) | Multilayer reflector comprising optically thick layers with a non-uniform layer thickness profile | |
| US20020187371A1 (en) | Process for producing laminated film and reflection reducing film | |
| EP1123905A2 (en) | Process for forming an optical composite film and for producing optical articles from the same | |
| JP2022173328A (en) | Liquid crystal display device and polarizer | |
| JPH11219613A (en) | Ultraviolet ray cold filter | |
| TWI831909B (en) | Light unit and display device comprising the same | |
| JP2006071982A (en) | Ultraviolet ray absorbing antireflection film and image display apparatus | |
| JP3153334B2 (en) | Multilayer filter for ultraviolet irradiation equipment | |
| JP2003107242A (en) | Uv-cutting filter | |
| JPH05341121A (en) | Multi-layer film reflecting mirror for ultraviolet ray irradiating device and ultraviolet ray irradiating device | |
| JP3166115B2 (en) | Filter device | |
| JPH05241017A (en) | Optical interference multilayered film having yellow filter function | |
| JPH05341120A (en) | Multi-layer film filter for ultraviolet ray irradiating device | |
| JPH0646304B2 (en) | UV curing irradiation device | |
| JP2008064976A (en) | Mirror for optical communication | |
| JP2004285412A (en) | Method and apparatus for manufacturing optically functional film | |
| JPH09197123A (en) | Dielectric optical element and exposure system using the same | |
| JP2003344654A (en) | Optic element and polarization conversion element | |
| JPWO2017159471A1 (en) | Optical retardation member, composite optical member including optical retardation member, and method of manufacturing optical retardation member | |
| WO2022138683A1 (en) | Optical element | |
| JP2000235107A (en) | Semi-transmissive reflection plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050127 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070903 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071031 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20071128 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20071211 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110111 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110111 Year of fee payment: 3 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110111 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120111 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120111 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130111 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130111 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140111 Year of fee payment: 6 |
|
| LAPS | Cancellation because of no payment of annual fees |