JPH11215790A - Vacuum motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the degrees of freedom in installing this motor on an apparatus serving as an actuator in a semiconductor device, a space station or the like by forming a partition between a stator and a rotor, separating the rotor from the stator with the rotor placed in a vacuum and the stator placed in the atmosphere using the partition. SOLUTION: The end of a first cylindrical shaft 16 is protruded outwards from the first case 1, the first output rotator 20 is formed via a bearing 19, and the second output rotator 21 is formed directly. A magnetic rotator 23 facing the first stationary side detecting part 11a and a magnetic substance 9b facing the second stationary side brake 9a are formed at the outer periphery of the first cylindrical shaft 16, and a magnetic rotator 24 and a magnetic substance 10b are formed at the outer periphery of a second cylindrical shaft 17. Therefore, respective stationary side detecting parts 11a, 12a respective stators 7, 8 and respective stationary side brakes 9a, 10a on the atmosphere side, and respective magnetic rotators 23, 24, respective rotors 16, 17a, and respective magnetic substances 9a, 10b on the vacuum side are separated into the vacuum side and the on the atmosphere side by a partition. It is thus possible to keep the rotors 16a, 17a, and only connecting a shaft 22 side in a vacuum condition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum motor, and more particularly to a novel improvement for placing a rotor of the motor in a vacuum and placing a stator in the atmosphere.

[0002]

2. Description of the Related Art Conventionally, as this kind of vacuum motor used, the entire motor is driven in a vacuum.

[0003]

The conventional vacuum motor is
Because of the above configuration, the following problems exist. That is, for example, when an actuator is operated in a vacuum in a semiconductor manufacturing apparatus or the like, the motor itself must be placed in a vacuum, and the design is restricted. For example, it is difficult to reduce the size of the apparatus and increase the efficiency. There was something. Also, in a space station or the like, if the entire motor is placed in a vacuum, the temperature changes greatly in the vacuum, and the temperature change on the stator side directly affects the performance of the motor.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and in particular, has an object to provide a vacuum motor in which a rotor of a motor is placed in a vacuum and a stator is placed in the atmosphere. And

[0005]

According to the present invention, there is provided a vacuum motor in which a rotor is rotatable relative to a stator having a stator winding, wherein a partition is provided between the stator and the rotor, and the partition is provided by the partition. A configuration in which the rotor is placed in a vacuum and the stator is separated so as to be placed in the atmosphere, and a magnetic encoder is provided coaxially with the stator or the rotor,
In addition, the rotor is rotatably provided inside the stator, and the rotor is rotatably provided outside the stator. Are different in diameter along the line.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a vacuum motor according to the present invention will be described below with reference to the drawings. FIG. 1 shows an inner rotor type configuration. In FIG. 1, reference numerals 1 and 2 denote first and second cases.
Each of the cases 1 and 2 is connected in series in a tight state by bolts 3 and seals 4. Each of the cases 1 and 2
Are provided with first and second stators 7 and 8 having stator windings 5 and 6, respectively, and the first and second electromagnetic brakes 9 and 10 forming non-contact type brakes. 2
Fixed brakes 9a and 10a are provided. First and second fixed-side detectors 11a and 12a of the first and second magnetic encoders 11 and 12 are provided at end positions of the cases 1 and 2, respectively.

A cylindrical partition wall 15 made of a stainless steel plate and formed integrally and continuously from the end portions 1a and 2a of the cases 1 and 2 to the other ends 1b and 2b is provided.
The first and second fixed-side detectors 11a and 12a, the stators 7 and 8, and the first and second fixed-side brakes 9a and 10a are provided for each of the cases 1 and 2 so as to be continuously held on the atmosphere side. The first and second cylindrical shafts 16, 1 having first and second rotors 16 a, 17 a are provided at axial positions of the cases 1, 2.
7 is provided rotatably via a bearing 18. The partition wall 15 is configured to have a different diameter along the axial direction, and the root and the tip of the partition wall 15 are thick.

An end of the first cylindrical shaft 16 protrudes outward from the first case 1, a first output rotating body 20 is provided via a bearing 19, and a second output rotating body 21 is provided. Is provided directly. A connecting shaft 22 connected to the first output rotating body 20 penetrates the first cylindrical shaft 16 coaxially and is connected to an end 17 a of a second cylindrical shaft 17.

On the outer periphery of the first cylindrical shaft 16, there are provided a magnetic rotating body 23 facing the first fixed side detecting portion 11a and a magnetic body 9b facing the second fixed side brake 9a. A magnetic rotating body 24 and a magnetic body 10b are provided on the outer periphery of the two cylindrical shafts 17. Therefore, the above-described fixed side detection units 11a and 12a on the atmosphere side, the stators 7 and 8,
Each fixed side brake 9a, 10a, each magnetic rotor 23, 24 on the vacuum side, each rotor 16a, 17a, each magnetic body 9
b and 10b are divided into a vacuum side and an atmosphere side by the partition wall 15, and the rotors 16a and 17a and the connecting shaft 22 are separated from each other.
Only the side is maintained in a vacuum. The magnetic encoders 11 and 12 and the electromagnetic brakes 9 and 10 are arranged coaxially with the stators 7 and 8 or the rotors 16a and 17a.

Next, the operation will be described. When a drive signal is supplied to each of the stator windings 5 and 6 from a drive circuit (not shown), each of the rotors 16 a and 17 a rotates together with each of the cylindrical shafts 16 and 17 so that the first output rotator 20 is connected to the connecting shaft 22.
The second output rotator 21 rotates together with the first cylinder shaft 16.

FIG. 2 shows an outer rotor type configuration as another embodiment. The same parts as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. Therefore, in the outer rotor type shown in FIG. 2 as well, the stators 7 and 8 are air-tightly separated such that the rotors 16a and 17a and the cylinder shafts 16 and 17 are positioned on the vacuum side by the partition wall 15. In addition,
The aforementioned magnetic encoders 11, 12 and magnetic brake 9,
10 is configured similarly to FIG.

FIG. 3 shows an outer rotor type configuration as another embodiment of FIG. 2. In FIG. 3, the same parts as those of FIG. 2 are denoted by the same reference numerals, and the description thereof will be omitted. Only the parts different from FIG. I do. That is, each partition 15 in FIG.
The holding shafts 31 and 31a of the holding body 30 are fixed to the fixing plates 32 and 33 on the sides of the cases 1 and 2, respectively.
Electromagnets 34 and 35 are provided around the fixed plates 1 and 31a via the fixed plates 32 and 33, respectively. A ring-shaped magnetic body 51 rotatably provided with end portions 16b and 17b, which will be described later, is rotatably provided on bearings 50 provided on the periphery of each of the holding plates 32 and 33 and each holding body 30. Ends 16b, 17 of the respective cylindrical shafts 16, 17 corresponding to
b is also made of a magnetic material. Therefore, in the state described above,
When each of the electromagnets 34 and 35 is excited, each of the ring-shaped magnetic bodies 51 and each of the end portions 16b and 17b are moved by the magnetic action.
Since the cylinder shafts 16 and 17 are magnetically coupled to each other, the rotation of each of the cylinder shafts 16 and 17 can be magnetically braked. The holding shaft 31a is formed in a hollow shape. Further, in the above-described embodiment, the case where two motors are connected in series has been described. However, only one motor or two or more motors may be used. The above-described magnetic encoders 11 and 12 are configured in the same manner as in FIG. 1. Make up.

[0013]

The vacuum motor according to the present invention is configured as described above, so that the following effects can be obtained. That is, in both the inner rotor type and the outer rotor type, the rotor side can be set to the vacuum side by the partition wall, and the stator side can be set to the atmosphere side. Can be increased, and downsizing and space saving can be achieved. Also,
By being able to put the stator winding on the atmosphere side,
Electrical characteristics as a motor can be stabilized. Further, since the diameter of the partition wall varies along the axial direction, even when the structure of the motor is variously varied, the partition wall can maintain the atmosphere side and the vacuum side.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an inner rotor type vacuum motor according to the present invention.

FIG. 2 is a sectional view showing an outer rotor type vacuum motor according to the present invention.

FIG. 3 is a sectional view showing another embodiment of FIG. 2;

[Explanation of symbols]

 5,6 Stator winding 7,8 Stator 11,12 Magnetic encoder 15 Partition wall 16a, 17a Rotor

Claims (5)

[Claims] A stator (7,7) having a stator winding (5,6).
In the motor in which the rotor (16a, 17a) is rotatable with respect to the rotor (8), a partition (15) is provided between the stator (7, 8) and the rotor (16a, 17a), and the partition (15) The rotor (1
A vacuum motor characterized in that 6a, 17a) is placed in a vacuum and the stators (7, 8) are separated so as to be placed in the atmosphere. 2. The stator (7, 8) or the rotor (16a, 17a).
2. The vacuum motor according to claim 1, further comprising a magnetic encoder provided in a coaxial arrangement with the magnetic encoder. 3. The rotor inside the stator (7, 8).
3. The vacuum motor according to claim 1, wherein (16a, 17a) is rotatably provided. 4. The rotor outside the stator (7, 8).
3. The vacuum motor according to claim 1, wherein (16a, 17a) is rotatably provided. 5. The vacuum motor according to claim 1, wherein the partition walls have different diameters along the axial direction.