JPH11215160A - Substrate treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate treating device which can prevent confidential information on substrate treatment from leaking out to an information communication network from the device. SOLUTION: The second communication processing section 3b of the host controller 3 of a substrate treating device Mi is connected to a local area network(LAN) 16 in a clean room. On the other hand, the first communication processing section 30 of the controller 3 is connected to an in-device LAN 6. Since the LANs 6 and 16 are maintained in a disconnected state, the confidential information circulated through the LAN 6 can be prevented from flowing out to the LAN 16. In addition, since the controller 3 circulates specific information between the LANs 6 and 16, the functions of the LANs 6 and 16 are not impaired.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises a plurality of processing units for performing predetermined processing on substrates such as a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, and a substrate for an optical disk. In particular, the present invention relates to a technique for connecting each processing unit by an in-apparatus information communication network, a so-called in-apparatus LAN (local area network).

[0002]

2. Description of the Related Art Conventionally, as a substrate processing apparatus of this type, for example, a resist coating process used in a photolithography process for forming a circuit pattern on a semiconductor wafer (hereinafter simply referred to as a "substrate") is used. There is a substrate processing apparatus including various processing units such as a unit, an exposure processing unit, and a development processing unit. In addition to the above, a substrate processing apparatus used in the diffusion process, which includes a thermal diffusion processing unit or a transport processing unit for generating an oxide film on the substrate or doping impurities, or a C for generating a nitride film on the substrate.
There is a substrate processing apparatus including a VD processing unit and the like. These substrate processing apparatuses are provided with a main controller for controlling each processing unit for each substrate processing apparatus, and in accordance with instructions from the main controller, control each processing unit to perform a series of processing on the substrate.

[0003] In a semiconductor manufacturer, for example, which is a user of these substrate processing apparatuses, substrates are manufactured in a clean room in which various substrate processing apparatuses are provided. Is managing. In this production management, etc., information such as the processing status and the number of processed sheets in each processing unit of the substrate processing apparatus, which is collected by, for example, a personal computer connected to a main controller of each substrate processing apparatus by a serial communication cable, is mainly used. It's being used.

As shown in FIG. 4, a plurality of substrate processing apparatuses 60 are arranged in the clean room 15, and a personal computer 61 is connected to each of the substrate processing apparatuses 60. The main controller 60a of the substrate processing apparatus as described above, controls the operation of the processing units 60b ₁ ~60b _n, transmits the information of the processing amount and operating conditions in each processing unit in the computer 61. The operator operates the personal computer 61 to extract necessary information. The operator similarly extracts necessary information from each substrate processing apparatus, and grasps the operation status of each substrate processing apparatus.

However, in the above-described method, it is difficult to grasp the operation status of the entire clean room 15 in real time, and the amount of information to be collected becomes enormous with the increase in the complexity of the substrate processing technology. Collection by communication is also becoming difficult.

Therefore, in recent years, with the improvement of computer network technology, in order to effectively utilize and collectively manage the information collected from each of the above-described substrate processing apparatuses in real time, each of the substrate processing apparatuses in a clean room must be managed by local information. L of communication network, so-called Ethernet (registered trademark)
Attempts have been made to connect via an AN (local area network). In response to the trends of these semiconductor manufacturers,
Each processing unit 60b _{1 to} 60b in the substrate processing apparatus 60
_{n and the} like are being connected by a LAN in order to be able to grasp the operation status and the like from outside the substrate processing apparatus 60.

More specifically, a substrate processing apparatus constituted by a LAN is constituted as shown in FIG.
5 is deployed. The substrate processing apparatus 71 includes, as the processing unit 71c ₁ ~71c _n, the main controller 71b for controlling the further host controller 71a and the apparatus LA, which generally manages the substrate processing apparatus 71
N74. Since the in-apparatus LAN 74 is constructed by a LAN such as Ethernet which can communicate a large amount of information at a relatively high speed, it is possible to cope with an increase in the amount of information accompanying the complexity of substrate processing. A network interface card 73, which is a network module, is attached to the host controller 71a, and connected to the LAN 16 in the clean room via the network face card 73.

[0008] The LAN 16 in the clean room is provided with a host computer 70 for comprehensively managing the LAN 16 in the clean room. This host computer 70 is able to grasp in detail the operating conditions and production volume of the processing unit 71c ₁ ~71c _n of all of the substrate processing apparatus 71 in the clean room 15, supervising all substrate processing apparatus 71 As a result, each substrate processing apparatus 71 can be operated efficiently. Further, the inside of the LAN 16 in the clean room is also connected to the network 17 outside the clean room 15 via the host computer 70. By accessing 70, it is possible to grasp in detail the operation status and the like in the clean room 15.

[0009]

However, the prior art having such a structure has the following problems. Information transmitted from a node provided on the LAN (device connected to the LAN) circulates on a LAN communication line (hereinafter, simply referred to as “on LAN”). Since the transmitted information includes the address corresponding to the target node to be transmitted, each node receives only the information corresponding to its own address, and responds according to this information. At this time, when information is transmitted from a plurality of nodes, a plurality of information is distributed on the LAN. Also, when two groups of LANs are connected to each other, all nodes connected to each LAN can be regarded as being on the same line, and information transmitted from each node is Will be distributed.

The above description is applied to a conventional example. A plurality of substrate processing apparatuses 7 in a clean room 15 will be described.
1 is LAN1 in the clean room by Ethernet
6 is built, further, the processing unit 71c ₁ ~71c in the same manner the substrate processing apparatus 71 _n is device L
AN74 is being constructed. Therefore, the host computer 70 that supervises and manages the LAN 16 in the clean room.
, Each processing unit 71c ₁ to 7-of the substrate processing apparatuses 71
The information transmitted from 1c _n information such as operation status being performed in each processing unit only removed from the LAN can be grasped in detail. In addition, each processing unit 7
If calling instruction information including an address corresponding to 1c ₁ ~71c _n, it is also possible to control each processing unit 71c ₁ ~71c _n.

Accordingly, in recent years, when performing the complexity and sophistication of the substrate processing due to miniaturization of circuit patterns, a number of control performed in each processing unit 71c in _{1 ~71c n,} for example, the resist coating and developing of the substrate A lot of so-called confidential information such as a method of rotating a substrate and a processing procedure is introduced into the substrate processing apparatus 71. The confidential information is grasped by the host computer 70 of the semiconductor maker as a user through the LAN,
There is a problem that it becomes known to an outsider or the like who enters through the system, and the confidentiality cannot be maintained.

Although the Ethernet LAN allows a relatively large amount of information to be distributed, each substrate processing apparatus 71
Between each of the processing units 71c ₁ ~71c _n of complex number information because they are interchanged, on the clean room LAN16 is transmitted from each processing unit 71c ₁ ~71c _n of each substrate treatment apparatus 71 A lot of information will be flooded. Therefore, on the LAN 74 in the apparatus and the LAN 16 in the clean room, the communication speed decreases due to an increase in traffic, and the host computer 7
There is also a problem that it is not possible to quickly transmit and receive information between the host controller 71a and the substrate processing apparatus 71 or to transmit and receive information between the host controller 71a and a specific processing unit.

In order to solve these problems, a switching hub or router capable of transmitting only specific information from the substrate processing apparatus 71 to the LAN 16 in the clean room and incorporating only specific information into the LAN 74 in the apparatus. Although it is possible to install network management devices such as those described above, these network management devices are expensive, so that there is a problem that the production cost of the substrate processing apparatus 71 is excessively increased.

[0014] The present invention has been made in view of such circumstances, and in order to prevent leakage of confidential information, the information communication network inside the apparatus and the information communication network outside the apparatus are physically separated from each other. It is an object of the present invention to provide a substrate processing apparatus which can distribute only specific information as if it exists on the same information communication network, and can be manufactured at low cost.

[0015]

The present invention has the following configuration in order to achieve the above object. In other words, the invention according to claim 1 is a substrate processing apparatus provided with a plurality of processing units, wherein each of the processing units is connected to each other so that information can be distributed, and is physically separated from an external communication network. Local information communication network, first information communication means connected to the internal information communication network, second information communication means connected to the external information communication network, and the first information communication means Information communication control means for virtually connecting the in-device information communication network and the out-of-device information communication network by allowing only specific information to be circulated with the second information communication means; It is characterized by the following.

According to a second aspect of the present invention, in the substrate processing apparatus according to the first aspect, different network addresses are assigned to the first information communication means and the second information communication means. .

According to a third aspect of the present invention, in the substrate processing apparatus according to the first aspect, the first information communication means and the second information communication means are each constituted by a network interface card. is there.

[0018]

The operation of the first aspect of the invention is as follows. Information transmitted from each processing unit of the substrate processing apparatus is distributed only in the in-device information communication network physically separated from the out-of-device information communication network. The information communication control unit acquires only specific information circulating in the intra-device information communication network by the first information communication unit connected to the intra-device information communication network. Further, the information communication control means transmits only the specific information from the second information communication means to the information communication network outside the device, so that confidential information other than the specific information relating to the substrate processing is transmitted to the information communication network outside the device. Not sent. In the external device communication network, only specific information is circulated, so the amount of information circulating through the external device communication network is relatively small, and traffic is reduced.

According to the second aspect of the present invention, different network addresses are assigned to the first information communication means and the second information communication means, respectively. Information is transmitted and received without confusing the first information communication means and the second information communication means.

According to the third aspect of the present invention, the information communication control means exchanges information with the in-device information communication network through a network interface card connected to the in-device information communication network, and transmits / receives information to / from the device. By exchanging information with the information communication network outside the device through a network interface card connected to the information communication network, the information communication network is virtually connected to the information communication network outside the device and the information communication network inside the device to distribute the information. .

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing the inside of a clean room in which a plurality of substrate processing apparatuses according to an embodiment of the present invention are arranged. FIG. 2 is a block diagram illustrating a substrate processing apparatus according to an embodiment of the present invention. In this embodiment, each substrate processing apparatus and each processing unit in each substrate processing apparatus are connected to a local area network (LAN) using an Ethernet, which is an information communication network.
eanetwork), and at the time of communication, for example, TCP / IP (Transmission Co
Standard protocols such as ntrol Protocol / Internet Protocol) are used. In this embodiment, a LAN using Ethernet will be described. However, the present invention is not limited to this. For example, each substrate processing apparatus and each processing unit may be connected to each other by a LAN such as a token-passing type talk ring. it can.

As shown in FIG. 1, the clean room 15, and a plurality of substrate processing apparatus M ₁ ~M _n, and the host computer 2 has been deployed, the substrate processing apparatus M ₁ ~M _n
And the host computer 2 are connected to the LAN 1 in the clean room.
6 is connected. LA in this clean room
N16 is connected to a network 17 such as the Internet or a company LAN outside the clean room 15. LAN 16 and network 1 in clean room
7 is connected by a network management device such as a bridge. Therefore, the network management device cancels unnecessary access by a hacker or the like from the network 17 and transmits information distributed on the LAN 16 in the clean room to the network 1.
7 to prevent leakage. Note that the dashed arrows in FIG. 1 indicate the flow of information.

The host computer 2 is a so-called server machine that manages and controls the substrate processing apparatuses M _{1 to} M _n connected to the LAN 16 in the clean room. The host computer 2, or in response to the access from the network 17, the substrate processing apparatus M ₁ ~M _n
To collect specific information, for example, information on the operation status of the apparatus and the processing status of the substrate, and instruct the substrate processing apparatuses M _{1 to} M _n to start, end, and wait the substrate processing. .

An IP address (Internet Protocol address), which is a network address, is assigned to the host computer 2 for centrally managing the LAN 16 in the clean room. As the IP address assigned to the host computer 2, an address corresponding to the size of the network is assigned. For example, in the case of the C class, a 24-bit network identifier and an 8-bit host identifier which can have addresses for 250 units are used. Be composed. The IP address conforms to the TCP / IP standard and will not be described in detail. In this example, the IP address assigned to the host computer 2 is “A”.
₀ ”. Further, since the substrate processing apparatuses M _{1 to} M _n are connected to the LAN 16 in the clean room, the IP addresses assigned to the respective substrate processing apparatuses M _{1 to} M _n are “A ₁ ” to “A _n ”.

Next, the above-described LAN 1 in the clean room
6 and the substrate processing apparatus M _1-
The transmission and reception of information to and from _Mn will be described.

Specific substrate processing apparatus M_iPerform the specified processing
In the case where the host computer 2 gives a request, the host computer 2 performs a predetermined process.
Information for the specific substrate processing apparatus M_iIP address
A_iInstruction information JA with_iLAN in a clean room
Call 16 This instruction information JA_iIs a clean roux
It is distributed on the LAN 16 within the system. Substrate processing device M₁~ M _n
Always sends the information distributed to the LAN 16 in the clean room.
Understand, it is the information of the IP address assigned to you
Specific substrate processing.
Science device M_iIs the command information on LAN 16 in the clean room.
Report JA_iAnd performs a process according to the instruction.

When transmitting information from the substrate processing apparatuses M _{1 to} M _n to the host computer 2, the substrate processing apparatuses M _{1 to} M _n transmit IP information of the host computer 2 to information such as the progress of processing. The status information SA ₀ with the address A ₀ is transmitted to the LAN 16 in the clean room. The progress status information SA ₀ also circulates on the LAN 16 in the clean room, similarly to the instruction information JA _i . Like the substrate processing apparatuses M _{1 to} M _n , the host computer 2 always grasps and receives the information with its own IP address.
A ₀ can be obtained. As described above, transmission and reception of information to the substrate processing apparatus M ₁ ~M _n and the host computer 2, the information given the IP address corresponding to the device of interest to be transmitted, by transmitting relative clean room LAN16 Done.

Next, the substrate processing apparatus M ₁ ~M _n connected to the clean room LAN16, since the same configuration, respectively, will be described a substrate processing apparatus M _i representing them. As shown in FIG. 2, the substrate processing apparatus M _i includes a plurality of processing units Y ₁ to Y _n, a main controller for centrally controlling these processing units Y ₁ to Y _n, a clean room LAN16 and substrate processing host controller 3 for controlling communication with devices M _i
Are connected by an in-apparatus LAN 6.

The processing units Y _{1 to} Y _n are processing devices such as a resist coating device, a developing device, a heating device, a cooling device, an exposure device, and a substrate transfer device. These processing units Y _{1 to} Y _n are controlled by the main controller 4 and transmit operation information corresponding to the operation to the in-device LAN 6 every time a predetermined operation is performed.

The host controller 3 is connected to the internal LAN 6
And a second communication processing unit 3b connected to the LAN 16 in the clean room. The host controller 3 transmits only predetermined specific information distributed to the in-device LAN 6 to the clean-room LAN 16 through the second communication processing unit 3b. First communication processing unit 3a and second communication processing unit 3b
Are configured by Ethernet cards, which are network interface cards, and are respectively mounted in expansion slots provided in the host controller 3. Therefore, the in-apparatus LAN 6 and the clean room LAN 16 exist in a physically separated state. The processing performed by the host controller 3 corresponds to the function of the information communication control means of the present invention.

Substrate processing apparatus M_iAs mentioned above,
By the host computer 2, for example, an IP address A
_iWas assigned, but specifically this IP address
A_iIs connected to the Ethernet card of the second communication processing unit 3b.
Assigned. Substrate processing device M_iWithin the IP address
Dress A_iThe independent IP address is as follows
Assigned. First, the processing unit Y₁~ Y_nIn
IP address B₁~ B _nTo the main controller 4
Is the IP address B_{n + 1}To the first communication processing unit 3a.
IP address B on the Ethernet card₀Is assigned
It is. That is, the substrate processing apparatus M_iHas two types of IP addresses
Dress A_iAnd B_OWill be allocated. What
The host computer 2 communicates with the internal LAN 6 and the
Is physically separated from the LAN 16 in the room.
And the IP address B_OCan not recognize. Toes
The host computer 2 includes a substrate processing apparatus M_iInside
Unit Y₁~ Y_nDirect access to
I can not do such a thing.

The transmission and reception of information between the host controller 3 and the processing units Y _{1 to} Y _n and the main controller 4 in the above-described internal LAN 6 will be described with reference to FIG. The broken arrows in the figure indicate the flow of information.

[0033] The host controller 3 of the substrate processing apparatus M _i
Transmits the information JA _i with the IP address A _1, which is information addressed to the user and distributed to the LAN 16 in the clean room, to the second
Through the Ethernet card of the communication processing unit 3b. Further, the host controller 3 transmits the information JA _i
Is determined as valid information, and the main controller 4
The information jB _{n + 1} to which the IP address B _{n + 1} is assigned from the Ethernet card of the first communication processing unit 3a to the device LAN 6
Send to The transmitted information jB _{n + 1} is stored in the device LAN.
6 on the market. The determination as to whether or not the information JA _i is valid information is made, for example, by storing a plurality of valid information in the host controller 3 in advance so that the received information J
By comparing the information stored the A _1, it can determine whether legitimate or not. If the received information JA _i
Is invalid, the information JA _i is discarded.

The processing unit connected to the in-device LAN 6
Y₁~ Y_nAnd the main controller 4 are always installed
Grasp the information distributed on the local LAN 6 and
Configured to receive only information with addresses
The main controller 4 is connected to the in-device LAN 6
Information jB distributed to_{n + 1}To receive. Main controller
La 4 uses this information jB_{n + 1}Based on the processing unit Y
₁~ Y_nProcessing unit Y to control₁~ Y_nof
IP address B₁~ B_nControl information jB appended with ₁~ JB
_nIs transmitted to the in-device LAN 6. For example, processing unit Y
_iIs your IP address B_iControl information jB corresponding to
_iAnd the control information jB_iA series of according to
Perform the operation. Processing unit Y_iIs the control information jB
_iThat a series of actions according to
To inform the controller 4 and the host controller 3
Each time the specified operation is performed, the IP address of the destination
Attached operation information kB_{n + 1}, KB₀To LAN6 in the device
I believe.

The main controller 4 has a LAN 6 in the device.
It receives the operation information kB n _{+ 1} that circulates in the above, the processing unit Y _i to verify that it is operating properly. The host controller 3 receives the operation information kB ₀ destined for itself distributed on the in-device LAN ₆ one by one, and processes the processing units Y _{1 to} Y _1.
Understand information such as the operating status of _n and the number of processed sheets. Then, only, you are given the IP address A ₀ of the host computer 2 transmits to the clean room LAN16 specific information not involved in confidential information of the substrate processing apparatus M _i. As described above, since the host computer 2 receives the information with its own IP address, each of the substrate processing apparatuses M ₁
.. _Mn .

As described above, the substrate processing apparatus M₁~ M_n
Is the LAN 6 in the device and the LAN 16 in the clean room.
Since it is physically separated, it is distributed within the LAN 6 in the device.
Does not leak to the LAN 16 in the clean room.
Therefore, confidential information in the substrate processing equipment is
Do not leak. In addition, LAN 6 in the device and clean room
The LAN 16 is specified by the host controller 3.
Virtually connected so that only information flows
The LAN 6 in the device and the LAN 16 in the clean room
It can be seen that they are connected to substantially the same LAN.
Wear. In other words, the host computer 2 cleans
Substrate processing apparatus M arranged in room 15 ₁~ M_nTo
Since it can be managed collectively, efficient processing of each substrate
The device can be operated.

[0037]

As is apparent from the above description, according to the first aspect of the present invention, the in-device information communication network to which each processing unit of the substrate processing apparatus is connected is connected to the substrate processing apparatus. Since it is physically separated from the information communication network outside the device, unnecessary access to each processing unit from outside the substrate processing device can be prevented, and confidential information inside the substrate processing device leaks outside the substrate processing device. Can be prevented. Further, since the specific information is distributed between the inside information communication network inside the apparatus and the outside information communication network virtually, the function as the information communication network is not impaired. In addition, the information communication network outside the device includes:
Since only specific information is circulated, the amount of information is relatively small and the traffic is reduced as compared with the state where information from each processing unit of each substrate processing apparatus overflows as in the past, and as a result, communication Speed can be improved.

According to the second aspect of the present invention, different network addresses are assigned to the first information communication means and the second information communication means, respectively. The specific information can be transmitted and received without confusing the information communication means of the first and second information communication means. Further, when the substrate processing apparatus is viewed from the external information communication network, the network address recognizable from the external information communication network is a single address assigned to the second information communication means connected to the external information communication network. Since it is only the network address and cannot recognize the network address assigned to the first information communication means, it is possible to more reliably prevent access to the in-device information communication network.

According to the third aspect of the present invention, since the first information communication means and the second information communication means are constituted by a network interface card, the manufacturing cost of the substrate processing apparatus is relatively low. Can be Also, since the network interface card is used in general equipment such as personal computers and has general versatility, it will be expanded in accordance with the development of an information communication network (LAN) constructed with a plurality of substrate processing apparatuses in the future. Even in that case, simply replacing the network interface card is economical.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a state in which a substrate processing apparatus according to an embodiment is connected via a LAN.

FIG. 2 is a block diagram illustrating a schematic configuration of a substrate processing apparatus according to an embodiment.

FIG. 3 is a diagram illustrating a state of transmission and reception of information between a substrate processing apparatus and a host computer.

FIG. 4 is a block diagram showing a state in which a conventional substrate processing apparatus is arranged in a clean room.

FIG. 5 is a diagram illustrating a state in which a conventional substrate processing apparatus is connected via a LAN.

[Explanation of symbols]

2 ... host computer 3 ... host controller 3a ... first communication processing unit 3b ... second communication processing unit 4 ... main controller 6 ... apparatus LAN 15 ... clean room 16 ... clean room LAN 17 ... Network M ₁ ~M _n ... the substrate processing apparatus a ₀ to a _n ... address such processing units of the address B ₀ ~B _n ... substrate processing apparatus of a substrate treatment apparatus such as a

Claims (3)

[Claims] 1. A substrate processing apparatus provided with a plurality of processing units, wherein each of the processing units is connected to each other so that information can be distributed, and an in-device information communication network physically separated from an external device information communication network; A first information communication unit connected to the in-device information communication network; a second information communication unit connected to the out-of-device information communication network; a first information communication unit and a second information communication unit And a data communication control means for virtually connecting the in-device information communication network and the out-of-device information communication network by allowing only specific information to be distributed between apparatus. 2. The substrate processing apparatus according to claim 1, wherein different network addresses are assigned to the first information communication unit and the second information communication unit, respectively. 3. The substrate processing apparatus according to claim 1, wherein the first information communication unit and the second information communication unit are each configured by a network interface card.