JPH11213337A - Method for machining magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To machine a magnetic head with a high precision by reducing the variation in height of elements with respect to a target value, in a magnetic head machining method where a rover in a state where plural magnetic heads are arranged in a line and measuring and calculating heights of elements of magnetic heads to machine the elements with respect to height. SOLUTION: A relation formula of coefficients in a fourth-order polynomial expressing load and deformation which are caused to act on the attaching part of a rover 15 are preliminarily obtained, and this relation formula is used for a fourth-order polynomial, which is calculated based on plural element heights measured during the processing, to obtain a correction load of the rover 15 so that element heights may be within a prescribed range, thus performing the processing. At this time, the bend shape of the rover 15 is approximated to a quadratic polynomial at least in the center and up to element processing starts in both ends of the rover, and the correction load is obtained from its coefficients.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for precisely processing the height of an electromagnetic transducer of a magnetic head in which the electromagnetic transducer is formed of a thin film, and a magnetic head manufactured by the method.

[0002]

2. Description of the Related Art In a magnetic head in which an electromagnetic transducer is formed of a thin film, for example, an inductive type thin film head or an MR head, the former has a throat height, and the latter has a height dimension of an electromagnetic transducer called an MR element height. It is characteristically important to keep within a certain tolerance limit. Usually, these dimensions are determined by lapping the air bearing surface (hereinafter referred to as ABS surface) of the magnetic head slider, but high processing accuracy is required. In the magnetic head, an electromagnetic transducer is formed by laminating a thin film of a magnetic material or an insulating material on a ceramic substrate serving as a slider, and a large number of magnetic heads are manufactured from one disk-shaped substrate. Can be. In the processing for obtaining the height of the electromagnetic transducer described above,
In order to increase the productivity, lapping is generally performed on an elongated substrate called a row bar, which is cut out of the substrate in a state where the electromagnetic transducers are arranged in a row. However, due to the processing distortion that occurs when cutting the row bar from the disk-shaped substrate and the unevenness in the pressure applied when the row bar is bonded to the jig, the row bar bends. This causes a problem of variation.

[0003] As a conventional technique for solving this problem, there is a polishing control apparatus disclosed in Japanese Patent Publication No. 7-112672 (hereinafter referred to as a known example). When manufacturing an MR head, an EL element (electromagnetic transducer) is formed on a substrate, and at the same time, an ELG (Electr
A resistor called an ical lapping guide) is formed at a fixed position with respect to the MR element, and the resistance of the ELG or the resistance of the MR element itself is measured while wrapping the ABS of the row bar, and based on the result. The jig holding the row bar is deformed by controlling the applied load, and processing is performed to a predetermined MR element height while correcting the bending of the row bar. Hereinafter, the principle of the known example will be described with reference to FIGS. The terms used herein are not the same as those used in known examples, but are replaced with the terms used in the description of the present invention. FIG. 7 is a schematic diagram of the entire configuration of the wrapping device. The rover 15 is adhered to the jig 51, and the ABS is
Surface 18 is wrapped. In this known example, the resistance of the ELGs 52 and 53 formed at both ends of the row bar 15 and the resistance of the MR element 54 are used to control the processing amount. When the ABS 18 is wrapped, the ELGs 52 and 53 and the MR element 54 are formed.
, The resistance values thereof gradually increase. That is, the resistance values of the ELGs 52 and 53 and the MR element 54 indicate the height of the MR element. Therefore, the control device 55 uses the digital ohmmeter 56 to control the ELG 52, 5
The resistance values of the MR element 3 and the plurality of MR elements 54 are measured, the bent state of the row bar is obtained from the obtained resistance values, and the loads applied to the jig 51 by the actuators 57, 58, 59 are controlled based on this.

FIG. 8 shows the shape of a jig 51 in a known example. The holding tool 51 is provided with an H-shaped slot 61,
As a result, beam members 62 supported at both ends are formed. The row bar 15 is adhered to the lower surface 63 of the beam 62. Further, the shape dimensions F, G, H, and I of the H-shaped slot 61 are such that the deflection curve of the beam 62 becomes a quadratic polynomial when the actuator 58 presses the center of the beam 62 via the push rod 64. Designed for Actuators 57, 58,
The load applied by 59 to beam 62 is ELG 52, 53 and MR
The control is performed based on the degree of balance and the degree of curvature of the row bar 15 obtained from the resistance value of the element 54. Actuator 57,
Assuming that the loads of 58 and 59 are PL, PC and PR, respectively, PL <PR when the processing amount on the right side is insufficient in the drawing of the row bar 15 with respect to the equilibrium degree, and PL when the processing amount on the left side is insufficient. > PR. Further, with respect to the degree of curvature, control is performed such that PC> PL, PR when the processing amount at the center of the row bar 15 is insufficient, and PC <PL, PR when the processing amount at both ends is insufficient.

[0005]

In the above-mentioned known example, an H-shaped slot shape is designed so that the deflection curve of the beam member 62 can be approximated by a second-order polynomial, and based on the equilibrium degree and the curvature degree of the row bar 15. The load applied to the jig 51 is controlled. However, the bent shape of the row bar after the row bar 15 is bonded to the jig 51 or while the row bar 15 is being lapped is not always optimally represented by a second-order polynomial as shown in FIG. FIGS. 9A and 9B show the results of measuring the bending of the row bar after bonding the row bar to the jig and measuring the position of each element with a microscope based on the electromagnetic transducers (hereinafter abbreviated as elements) at both ends. Plotted and expressed as 2
It shows the result of a quadratic approximation curve and the result of a quadratic approximation curve. Clearly, the quadratic approximation curve has a larger deviation, and the beam 6 deformed by load control based on this curve
It can be seen that the difference between the shape of No. 2 and the actual shape of the row bar 15 causes variation in the element height after processing. In order to improve the machining pass rate with respect to the tolerable tolerance of the element height which will be stricter in the future, it is necessary to control the deformation as closely as possible to the actual shape of the row bar. The present invention uses a wrap device having a function of directly or indirectly measuring the element height, approximating the deformation of the rover with a polynomial of an order close to the actual shape, and applying a load so as to correct the deformation. It is an object of the present invention to provide a magnetic head processing method for processing by magnetic head and a magnetic head manufactured by the method with less variation in element height.

[0006]

According to the present invention, a row bar in which a plurality of electromagnetic transducers (hereinafter abbreviated as "elements") of a plurality of magnetic heads are attached to a beam of a jig to make each element a desired height. In the magnetic head processing method for processing a row bar as described above, the deformation applied to the load applied to the beam material is expressed by a fourth-order polynomial, and the relationship between the load and the coefficient in the fourth-order polynomial is obtained by a determinant. The inverse matrix of the sub-matrix for the coefficient indicating the bent shape of the material is obtained in advance, and the deformation of the rover is represented by a polynomial of a predetermined order based on a plurality of element heights measured and calculated during processing, indicating the bent shape A method of processing a magnetic head, comprising calculating a load for correcting bending by multiplying a coefficient by the inverse matrix, and processing the row bar by applying the load to a beam. The jig is 2
If the structure has a beam material that is supported in the middle at points and has a load application point at both ends and the center, the deformation of the beam material can be expressed by a maximum fourth-order polynomial. It can be expressed by the following equation. Also,
Here, the polynomial of a predetermined order refers to a polynomial of the fourth order, or a polynomial that is initially switched to a fourth-order polynomial in the middle of a second-order polynomial. In the case of using the second-order polynomial, the bending correction load is determined assuming that coefficients other than the second-order coefficient among the coefficients indicating the bending shape applied to the inverse matrix are 0.

In the processing in which the second-order polynomial and the fourth-order polynomial are combined, among the elements provided on the row bar, at least the elements at both ends and the central portion are processed until it is determined that the processing is started. The bending shape is expressed by a second-order polynomial to obtain a bending correction load, and the load is applied to the beam material to process the row bar. After it is determined that the element has been processed, the row bar bending shape is changed to the fourth order. It is preferable to calculate the bending correction load by using a polynomial and apply the load to the beam material to process the row bar. Note that the timing for expressing the deformation of the row bar by the final fourth-order polynomial may be the time when it is determined that all the elements formed on the row bar have been processed.

According to the present invention, a row bar in which a plurality of electromagnetic transducers (hereinafter abbreviated as elements) of a plurality of magnetic heads are attached to a beam of a jig, and the row bar is processed so that each element has a desired height. In the method of processing a magnetic head, the deformation of the load applied to the beam is expressed by a fourth-order polynomial, and the relationship between the load and the coefficient in the fourth-order polynomial is obtained by a determinant. The inverse matrix of the sub-matrix for the coefficient shown is obtained in advance, and the deformation of the rover is represented by a polynomial of a predetermined order based on a plurality of element heights measured and calculated during processing, and the coefficient indicating the bent shape is calculated by the inverse. By calculating the load to correct the bending by multiplying by the matrix, calculate the load to correct the tilt based on the coefficient indicating the tilt, and apply the load to the jig to process the magnetic head. is there.

The above-mentioned polynomial of a predetermined order is a quadratic polynomial, and among the elements provided on the row bar, at least the bent shape of the row bar is determined until it is determined that the processing at the both ends and the center is started. Is expressed by a second-order polynomial to obtain a bending correction load and a tilt correction load, and the loads are applied to a jig to process the row bar. After it is determined that the element has been processed, the bent shape of the row bar is changed to 4. It is preferable to calculate the bending correction load and the inclination correction load by the following polynomial, and apply the loads to the jig to process the row bar. Note that the timing for expressing the deformation of the row bar by the final fourth-order polynomial may be the time when it is determined that all the elements formed on the row bar have been processed.

Further, in the magnetic head of the present invention, a row bar in which a plurality of electromagnetic transducers (hereinafter abbreviated as elements) of a plurality of magnetic heads are attached to a beam of a jig so that each element has a desired height. A magnetic head formed by processing a row bar and then dividing the row bar, wherein the deformation of the row bar attached to the beam material is represented by switching from a fourth-order polynomial or a second-order polynomial to a fourth-order polynomial, and is represented by these equations. The rover is lap-processed by applying a lap load to correct the deformation. The processing method at this time uses any of the methods described above.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A jig 10 as shown in FIG.
An example in which is used will be described. The jig 10 has a structure in which a beam member 12 is intermediately supported at two points with a base material 11, cutouts 13 on both left and right sides, and a rectangular slot 14 at the center. The row bar 15 is adhered to the beam member 12, and the floating surface 18 of the row bar 15 is lapped by the surface plate 17. Here, the beam 12 has a thickness A and a notch 13.
Based on the dimensions B, C, D, and E of the rectangular slot 14, the load L
It is designed so that the deformed shape when B, CB, and RB are applied can be approximated by a fourth-order polynomial. A load can be applied to the jig 10 at five places. LB, CB, and RB are loads applied to the beam member 12, and correct the bent shape of the row bar 15. LT and RT act on the base material 11,
A load for lapping is applied to the entire row bar 15, and the inclination of the row bar 15 can be corrected by changing the left and right load row lances.
An ELG 16 similar to that described above is formed on the row bar 15 adjacent to each element at the time of element formation. ELG16
Is formed at a fixed position with respect to the element, the element height can be obtained by measuring the resistance value.
When the magnetic head is an MR head, ELG16
May be provided, and the resistance of the MR element itself may be measured, and the element height may be determined from this.

FIG. 2 is a configuration diagram relating to load control of a lap apparatus using the present invention. While lapping Rover 15 in surface plate 17, the controller 22 by the digital ohmmeter 21 multichannel measuring the resistance value R _i of ELG16. Where i is the ELG arranged in a line
Is a subscript meaning the one related to the i-th ELG. Next, the control device sequentially calculates the element heights h _i of the elements corresponding to each R _i , and approximates a line connecting the element heights with a fourth-order polynomial h = ax ⁴ + bx ³ + cx ² + dx + e. Here, the x-axis is a longitudinal coordinate of a portion where the row bar 15 is bonded to the beam member 12. In order to make the element heights in the row bar 15 uniform, it is important to deform the beam 12 by applying loads LB, CB, and RB in a direction in which the bent shape of the fourth-order polynomial is straightened.

The calculated fourth-order polynomial h = ax ⁴ + bx ³
+ Cx ² + dx + e as an example, based on FIGS. 3 and 4, loads LB, CB, and R for correcting a curved shape to a linear shape.
A method for obtaining B will be described. FIG. 3 is a diagram showing a method of calculating a load for bending the beam 12 in a fourth-order polynomial shape. First, the deformation amount y of the beam member 12 when the loads F1, F2, and F3 are applied to the beam member 12 is obtained in advance by the deformation simulation of the structural analysis, and the deformation is determined by the fourth-order polynomial y = ax ⁴ +
Loads F1, F2, and F are approximated by bx ³ + cx ² + dx + e.
A matrix K representing the relationship between 3 and the coefficients a, b, c, and d of each order is obtained. Here, since the bent shape of the beam member 12 is represented by the fourth-order, third-order, and second-order coefficients, the coefficients a, b,
The inverse matrix K ′ of the submatrix that determines c is calculated in advance. Here, instead of using the deformation simulation, a known load F1, F2, F3 is applied to the actual jig 10 as a means for obtaining the deformation amount of the beam member 12, and the deformation amount at that time is measured by an electric micro or the like. Methods can also be used. Thereby, the coefficients a, b, and c representing the curved shape in the fourth-order approximation h = ax ⁴ + bx ³ + cx ² + dx + e of the element height calculated during the lap processing are multiplied by the aforementioned K ′. ,
Loads F1, F for deforming the beam 12 in the shape
2, F3 can be obtained.

FIG. 4 is a block diagram of a load control example when the load calculation method shown in FIG. 3 is applied to actual lap load control. Regarding the correction of the bent shape of the row bar 15 during the lapping process, the load direction in which all the element heights are equal, that is, the fourth-order, third-order, and second-order coefficients a, b, and c of the fourth-order approximate expression of the element heights In the load direction where all are zero,
The correction loads LB, CB, and RB based on b and c are integrated and controlled. Coefficients a, b, load is determined by multiplying the inverse matrix K 'to c F1, F2, straightening load LB obtained by multiplying the appropriate constant G _B to F3, CB, gradually adjusting the RB, 4
When the third, second, and second order coefficients a, b, and c all become 0, the loads LB, CB, and RB at that time are held.

As described above, it is appropriate that the rover shape at the processing start stage is expressed by a fourth-order approximation rather than a second-order approximation. However, the fourth-order approximation h obtained based on the element height is used. in ^{= ax 4 + bx 3 + cx} 2 + dx + e, it may not represent an accurate bend shape of the rover 15,
An appropriate bending correction load may not be calculated. This is because all of the ELGs 16 formed on the row bar 15 are not simultaneously processed due to the bent shape of the row bar 15 before processing. Hereinafter, this problem and its solution will be described with reference to FIGS.

FIG. 5 shows that the row bar 15 before processing is a platen 17.
FIG. As shown in FIG. 5A, since it starts to hit the surface plate 17 near the center of the row bar 15, the processing starts from the ELG 16 near the center of the row bar 15 in the initial stage of processing. A plot of the element height at this time and a fourth-order polynomial h = ax
FIG. 5 shows a curve approximated by ⁴ + bx ³ + cx ² + dx + e.
(B). At both ends of the row bar 15 that have not yet come into contact with the surface plate 17, the element height remains at the initial height H0, whereas near the center of the row bar 15, the initial height H is increased.
It is smaller than 0. Here, the x-axis represents the longitudinal position of the row bar 15, and the center of the row bar 15 is the origin 0. The element height in such a state is represented by a fourth-order polynomial h = ax ⁴
When approximating by + bx ³ + cx ² + dx + e, the sign of the coefficient is a fourth-order coefficient a <0 and a second-order coefficient c> 0.
The quadratic coefficient c> 0 indicates that it is convex with respect to the surface plate 17 as in the actual curved shape of the row bar 15, but 4
The order coefficient a <0 indicates that the row bar 15 is concave with respect to the surface plate 17 in contrast to the actual bent shape of the row bar 15. Therefore, the load component calculated from the fourth order coefficient a acts in a direction opposite to the direction in which the actual bending of the row bar 15 is corrected. As a result, as described above, the coefficients a, b, c
The straightening load required based on is not optimal for performing the straightening of the bend of the row bar 15, and sometimes it takes time to correct the bend. A situation arises in which it is not possible.

In order to solve this problem, in the initial stage of processing, as shown in FIG. 5 (c), the element height is changed to a quadratic polynomial h = cx, which is a mathematical expression having a coefficient that correctly indicates the bending direction of the row bar 15. ² + dx + e for approximation. That is, the curved shape of the row bar 15 is represented by a second-order polynomial h = cx ²
+ Dx + e, the sign of the secondary coefficient is c> 0, and the surface plate 17 is the same as the actual curved shape of the row bar 15.
Represents that it is convex. The bending straightening load is obtained by calculating the coefficients a and b in the equations in FIGS.
b = 0, and the coefficient c is obtained using the second order coefficient in the second order polynomial. Thus, it becomes possible to correct the bending of the row bar 15 in an appropriate direction from the stage where the processing near the center of the row bar 15 is started. Thus, at the initial stage of machining, the row bar 15 is converted to a second-order polynomial h = c.
Approximately by x ² + dx + e, and quickly EL at both ends of row
A straightening load is applied so that the G16 can be processed.
Approximate by the following polynomial h = ax ⁴ + bx ³ + cx ² + dx + e to perform precise bending correction control.

FIG. 6 shows that the row bar 15 before processing is a platen 17.
This shows a case where it is concave. As shown in FIG. 6 (a), since it starts to hit the surface plate 17 from both ends of the row bar 15, in the initial stage of processing, processing starts from the ELGs 16 at both ends of the row. The element height at this time is plotted and approximated by a fourth-order polynomial h = ax ⁴ + bx ³ + cx ² + dx + e, as shown in FIG. 6B. In the vicinity of the center of the row bar 15 that has not yet contacted the surface plate 17, the element height remains at the initial height H0, whereas at both ends of the row bar 15, the element height is smaller than the initial height H0. The element height in this state is represented by a fourth-order polynomial h = ax ⁴ + bx ³ + cx ² + dx
+ E, the sign of the coefficient is the fourth-order coefficient a <0
And the secondary coefficient c> 0. The fourth-order coefficient a <0 indicates that it is concave with respect to the platen 17 similarly to the actual curved shape of the row bar 15, but the quadratic coefficient c> 0 is opposite to the actual shape of the row bar 15. It indicates that it is convex with respect to the surface plate 17. Therefore, as described above, this 2
The load component calculated from the next coefficient c is the actual rover 15
Act in a direction opposite to the direction in which the bending is corrected, and the same problem as described above occurs.

Therefore, in order to remedy this inconvenience as described above, in the case where the element is in the above-described state at the initial stage of processing, the row bar 15 is bent as shown in FIG. The shape is represented by a quadratic polynomial h = cx ² + dx
The load is controlled in the same manner as described above by approximating with + e. The curved shape of the rover 15 is represented by a second-order polynomial h = cx ²
When approximation is made by + dx + e, the sign of the secondary coefficient becomes c <0, indicating that it is concave with respect to the surface plate 17 similarly to the actual curved shape of the row bar 15. Thus, it becomes possible to correct the bending of the row bar 15 in an appropriate direction from the stage where the processing near the center of the row bar 15 is started. Thereafter, from the time when the processing of the predetermined ELG 16 near the center of the row starts, the fourth-order polynomial h = ax ⁴ + bx ³ + cx ² + dx +
What is necessary is just to switch to the approximation in e. Thus, in the initial stage of machining, the row bar 15 is converted into a second-order polynomial h = cx ² +
Approximately by dx + e, ELG16 in the center of the row immediately
A straightening load is applied so that the curve can be processed, and after that, the processing of the predetermined ELG 16 at the center of the row is approximated by a fourth-order polynomial h = ax ⁴ + bx ³ + cx ² + dx + e, and precise bending correction control is performed.

In the present invention, the processing of the ELG or MR elements at the center and both ends is determined until it is determined in the initial stage of processing that the elements at the center and both ends of the row bar 15 have been started. Until it starts,
The bend shape of the rover 15 is represented by a quadratic approximation h = cx whose sign of the coefficient coincides with the large bend direction of the rover 15.
Bending straightening load LB, CB, RB expressed as ² + dx + e
And processing of the ELG or MR element is started immediately. After it is determined that the processing of the elements at the center and both ends of the row bar 15 is started, the row bar 1 is processed.
The shape of 5 is converted to a fourth-order approximation h = ax ⁴ + bx ³ + cx ² + dx
The bending correction loads LB, CB, and RB are obtained by using the coefficients representing all the bending shapes of the fourth-order polynomial represented by + e, and are processed with high accuracy. The switching to the fourth-order approximation formula is performed when it is determined that all the elements on the row bar have been processed, instead of when it is determined that the elements at the center and both ends of the row bar 15 have been processed. You may do so. In this case, it is possible to more reliably adapt to a rover having a complicated bent shape.

Although the method of correcting the bent shape of the row bar 15 has been described above, the load for the lapping process is corrected more efficiently and accurately by correcting the load in consideration of the inclination of the row bar 15. Can be made equal in element height. That is, while applying the loads LB, CB, and RB in the direction in which the bent shape of the rover is straightened, the beam 12 is deformed, and the loads LT, RT for lapping are set so that the inclination of the rover becomes zero. Control. Load LT, RT, as shown in FIG. 4, obtained by correcting the inclination correcting load F _T rover 15 to wrap the load F _L. Here, F _L is used a predetermined load suitable for processing of the row bar 15 but, F _T is the element height of quartic approximate expression h =
It is obtained by proportional control using the third and first order coefficients b and d of ax ⁴ + bx ³ + cx ² + dx + e. That is, the third-order term h
= Linear approximation bx ³ the curve indicated by the least squares method, first-order 'seek, the b' coefficient b calculated F _T over an appropriate proportionality constant G _T to the sum of the coefficients d of the first-order I do. In the case of using the second-order approximation formula in the above-mentioned initial stage of processing,
The above F _T is calculated using only the first-order coefficient d. However, at this time, similarly to the case where the fourth-order approximation formula is used, the fourth-order approximation formula can be calculated and calculated using the coefficients b and d.

As mentioned above, the deformation of the row bar at the time of the final processing has been described using the fourth-order approximation. However, it is needless to say that the third-order approximation can be used. The maximum order that can be represented is determined from the structure of the jig, that is, the supporting state of the beam and the position of the load point for deforming the beam, and the beam of the jig is supported at, for example, three points. However, if the number of load points is four, it can be represented by a sixth-order polynomial. The approximate order of deformation of the row bar is set according to the required processing accuracy or the properties of the target row bar, such as length and thickness, and the jig shape and the load point are determined in accordance with this, and based on the idea of the present invention, It is advisable to find a reasonable bending correction load. In general, the higher the degree, the more detailed deformation can be expressed.
It is effective for those requiring higher processing accuracy and long bar.

The method of processing a magnetic head according to the present invention has been described above.
FIG. 10 shows the result of examining variations in element height of a magnetic head manufactured by processing according to the present invention. In both cases, the jig is 2
A beam having the same structure, which was supported at points in the middle and provided with beams having load application points at both ends and a center, was used, and a row bar was attached to this beam. While the load control is performed by expressing the bending of the row bar only by a second-order polynomial as a conventional processing method, the processing method according to the present invention includes at least the elements at both ends and the center portion among the elements provided on the row bar. Until it is determined that processing has been started, the bent shape of the row bar is represented by a second-order polynomial, and after it is determined that the element has been processed, the bent shape of the row bar is represented by a fourth-order polynomial and the bending correction load is expressed. I asked. It can be seen that the device height variation according to the conventional method is 0.16 μm in standard deviation (σ), whereas that according to the present invention is as small as 0.07 μm.

[0024]

As described above, the present invention has the following effects. 1) A series of element heights is represented by a fourth-order polynomial that is close to the actual curved shape of the row bar, and processing is performed by applying a load that corrects this, so that variations in element height can be reduced. 2) In the initial processing stage, the raw bar is processed by applying a corrective load so as to quickly eliminate the unprocessed portion, and after the succession of element heights shows the actual bent shape of the row bar, a fourth-order polynomial is formed. Thereby, the element can be processed efficiently and accurately. 3) In the fourth-order polynomial approximating the shape of the actual rover,
By obtaining the correction load based on the third and first order coefficients indicating the tilt and applying the correction to the bending correction load, the variation in element height can be reduced. 4) A magnetic head having a variation in element height of 0.1 μm or less in standard deviation can be obtained.

[Brief description of the drawings]

FIG. 1 is a view showing a state in which a row bar is adhered to a jig for explaining the present invention.

FIG. 2 is a configuration diagram relating to load control of a lap device for explaining the present invention.

FIG. 3 is a diagram showing a method of obtaining a correction load from a fourth-order polynomial for explaining the present invention.

FIG. 4 is a block diagram showing load control for explaining the present invention;

FIG. 5 is a diagram showing an element height when a bend of a row bar before processing is convex with respect to a surface plate.

FIG. 6 is a diagram showing the element height when the bending of the row bar before processing is concave with respect to the surface plate.

FIG. 7 is a conceptual diagram of a conventional lapping device having a function of correcting a bending of a rover.

FIG. 8 is a shape diagram of a jig for a row bar used in the above conventional example.

FIG. 9 is a diagram in which the bending of the row bar before processing is represented by a quadratic curve and a quadratic curve and compared.

FIG. 10 is a diagram showing variations in element heights of magnetic heads manufactured by the conventional technology and the technology of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Jig 11 Base material 12 Beam material 13 Notch 14 Slot 15 Rover 16 ELG 17 Surface plate 18 ABS surface 51 Conventional jig

[Procedure amendment]

[Submission date] March 3, 1999

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Name of invention

[Correction method] Change

[Correction contents]

Patent application title: Method for processing a magnetic head

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

[0010] Therefore, it is possible to obtain using the processing method described above.
In a magnetic head, a row bar in which a plurality of electromagnetic transducers (hereinafter, abbreviated as elements) of a plurality of magnetic heads are arranged is attached to a beam of a jig, the row bar is processed so that each element has a desired height, and then divided. A deformation of a row bar attached to the beam material is represented by switching from a fourth-order polynomial or a second-order polynomial to a fourth-order polynomial, and the deformation represented by these equations is corrected. A row bar is wrapped by applying a large wrap load and then divided.

Claims (6)

[Claims] A magnetic head for processing a row bar so that a plurality of electromagnetic conversion elements (hereinafter abbreviated as elements) of a plurality of magnetic heads are arranged on a beam of a jig and each element is set to a desired height. In the processing method, the deformation of the load applied to the beam is expressed by a fourth-order polynomial, and the relationship between the load and the coefficient in the fourth-order polynomial is obtained by a determinant. From this, the coefficient indicating the bending shape of the beam is obtained. The inverse matrix of the sub-matrix is obtained in advance, and the deformation of the rover is represented by a polynomial of a predetermined order based on a plurality of element heights measured and calculated during processing, and a coefficient indicating a bent shape is multiplied by the inverse matrix. A method for processing a magnetic head, comprising: calculating a load for correcting a bend, and applying the load to a beam to process a row bar. 2. The predetermined degree polynomial is a second-order polynomial, and among the elements provided in the row bar, the bending of the row bar is determined until it is determined that the processing at least at both ends and the center is started. The shape is expressed by the second-order polynomial to determine the bending correction load, the load is applied to the beam material to process the row bar, and after it is determined that the element has been processed, the bent shape of the row bar is changed to a fourth-order polynomial. 2. The method for processing a magnetic head according to claim 1, wherein a bending correction load is obtained by the following formula, and the load is applied to the beam material to process the row bar. 3. A magnetic head for mounting a row bar on which a plurality of electromagnetic transducers (hereinafter abbreviated as elements) of a plurality of magnetic heads are arranged on a beam of a jig, and processing the row bar so that each element has a desired height. In the processing method, the deformation of the load applied to the beam is expressed by a fourth-order polynomial, and the relationship between the load and the coefficient in the fourth-order polynomial is obtained by a determinant. From this, the coefficient indicating the bending shape of the beam is obtained. The inverse matrix of the sub-matrix is obtained in advance, and the deformation of the rover is represented by a polynomial of a predetermined order based on a plurality of element heights measured and calculated during processing, and a coefficient indicating a bent shape is multiplied by the inverse matrix. A magnetic head processing characterized by calculating a load for correcting a bend by calculating a load for correcting a tilt based on a coefficient indicating the tilt, and applying the load to a jig for processing. Method. 4. The polynomial of the predetermined order is a second-order polynomial, and among the elements provided on the row bar, the bending of the row bar is determined until it is determined that the processing at least at both ends and the center is started. The shape is represented by a quadratic polynomial to determine the bending correction load and the inclination correction load, the load is applied to a jig to process the row bar, and after it is determined that the element has been processed, the bending shape of the row bar is determined. 4. The magnetic head processing method according to claim 3, wherein a bending correction load and a tilt correction load are obtained by a fourth-order polynomial, and the loads are applied to a jig to process the row bar. 5. The rover is attached to a beam member which is supported at two points in the middle and has load application points at both ends and a center part.
2. The method according to claim 1, wherein the deformation can be represented by a maximum fourth-order polynomial.
5. The method for processing a magnetic head according to any one of claims 1 to 4. 6. A row bar in which a plurality of electromagnetic transducers (hereinafter abbreviated as elements) of a plurality of magnetic heads are attached to a beam of a jig, and the row bar is processed so that each element has a desired height, and then divided. A magnetic head formed by performing a fourth-order polynomial on the deformation of the row bar attached to the beam material;
Alternatively, a magnetic head is formed by switching from a second-order polynomial to a fourth-order polynomial, and lapping a row bar by applying a lap load for correcting the deformation represented by these equations.