JPH11203646A - Magnetic head and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decrease a degree of damage on a recording medium by edges, etc., caused on a slider by machining even in the case of ramp load system or being shocked externally. SOLUTION: A 1st step part 7 is formed in the direction of the side of a slider from an outside edge part 4a of a facing surface of the slider 1, and further, a 2nd step part 8 is formed from the out side edge part 7a of the 1st step part 7 to the side face of the slider 1. Although edge, etc., are caused on the outside edge part 8a of the 2nd step part 8 by machining, the arrangement of the 2nd step part makes the outside edge part 8a of the 2nd step part 8, where the edge, etc., are caused by machining, resistant to coming into contact with a recording medium even if a magnetic head is largely tilted, therefore, that reduces a degree of damage on the recording medium caused by the edge, etc., by machining compared with a conventional one.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head having a slider mounted on, for example, a hard disk drive and, more particularly, to reducing the degree of damage to a recording medium due to a mechanical edge or the like formed on the slider. And a method for manufacturing the same.

[0002]

2. Description of the Related Art FIG. 7 is a perspective view showing a conventional magnetic head mounted on a hard disk or the like with a surface facing a recording medium facing upward. In this magnetic head, the upstream side A in the moving direction of the recording medium is called a leading side, and the downstream side B is called a trailing side. FIG.
Reference numeral 20 indicates a slider formed of a ceramic material or the like.
At the end, a thin film element 6 for magnetic recording and / or reproduction is provided.

As shown in FIG. 7, an air groove 2 is formed at the recording medium facing portion of the slider 20, and a facing surface 21 (floating surface; A) is formed so as to surround the air groove 2.
BS surface) is formed. Further, a step 22 is formed from the outer edge of the opposing surface 21 to the side surface of the slider 20, and the depth of the step 22 and the depth of the air groove 2 are substantially the same. On the leading side A of the facing surface 22, an inclined surface 5 is formed.

Next, a method of manufacturing the slider 20 shown in FIG. 7 will be described. As shown in FIG. 8, first, a plurality of resist layers 23 for defining a surface 21 facing a recording medium are formed on a substrate surface of a ceramic material serving as a base material of the slider 20, and as shown in FIG. The resist layer 23
The surface of the substrate that is not covered with is cut by ion milling. Then, the resist layer 23 is removed.

At this time, the opposing surface 2 is provided on the substrate surface.
1 is formed in a plural number. Next, as shown in FIG. 10, when the substrate is cut from between the adjacent opposing surfaces 21, a plurality of sliders 20 having the shape shown in FIG. 7 can be obtained at the same time. Slider 2 of magnetic head shown in FIG.
Numeral 0 is supported by a flexure (not shown) fixed to the tip of a load beam (not shown), and is urged to the recording medium by the elastic force of the load beam formed by a leaf spring.

This magnetic head is used for a so-called CSS (contact start / stop) system or a ramp load system hard disk device. In the flying posture of the magnetic head, the leading side A has an inclined flying posture that is lifted higher on the recording medium than the trailing side B. In this floating posture, the thin film element 6 shown in FIG.
Thus, a recording signal is written on the recording medium, or a magnetic signal from the recording medium is detected.

[0007]

As described above, FIG.
In the manufacture of the slider 20 of the magnetic head shown in FIG. 1, a surface 21 facing a recording medium is provided on a substrate serving as a base material of the slider 20.
Is formed by photolithography, and then the rectangular substrate is cut to form the slider 20 shown in FIG. 7 (see FIGS. 8 to 10). However, since the cutting is performed by machining, it is cut by machining. Edges, burrs, and the like due to machining are likely to be generated on the formed edge, that is, the outer edge 22a of the step 22 shown in FIG.

If an edge or the like is generated at the outer edge 22a of the step portion 22, for example, when a strong external impact is applied and the slider 20 is greatly inclined and comes into contact with the recording medium, the edge or the like causes the edge or the like to touch the surface of the recording medium. Will cause damage.

In the case of the ramp-load system, when the magnetic head falls from the arm incorporated in the apparatus onto the surface of the recording medium and the slider 20 of the magnetic head is greatly inclined and comes into contact with the recording medium, There is also a problem that the surface of the recording medium is damaged by the edge formed by machining or the like formed on the recording medium 20.

Further, the stepped portion 2 where an edge or the like is generated
2. When the outer edge 22a contacts the recording medium, an edge or the like is generated by machining.
Cracks tend to occur, and the magnetic head itself is easily damaged.

The present invention has been made to solve the above-mentioned conventional problems, and by improving the slider shape,
Provided are a magnetic head and a method of manufacturing the same, which can reduce the degree of damage to a recording medium due to mechanical edges or the like formed on a slider even in the case of a ramp load method or when a strong external impact is applied. It is intended to be.

[0012]

SUMMARY OF THE INVENTION The present invention provides a slider,
In a magnetic head comprising a thin film element for magnetic recording and / or reproduction provided at an end of the slider on the trailing side, a lateral direction of the slider from an outer edge of a surface of the slider facing a recording medium. A first step portion, and a second step portion is provided on a side surface of the slider from an outer edge of the first step portion.

In the present invention, the second step portion is formed by machining.

Further, in the present invention, the angle θ between the line connecting the outer edge of the first step and the outer edge of the second step and the facing surface of the recording medium is 45 ° ≦ θ <. It is preferable that the angle is in the range of 90 °.

The second step may be provided at a leading end of the slider.

Further, in the present invention, it is preferable that an outer edge of the first step portion has an R shape.

It is preferable that a corner between the leading end surface and the side surface of the slider and / or a corner between the trailing end surface and the side surface of the slider be cut off, more preferably the corner portion. Is an R shape.

According to the present invention, there is provided a method of manufacturing a magnetic head comprising a slider and a magnetic recording and / or reproducing thin-film element provided at an end of the slider on a trailing side. A step of providing grooves in advance by machining, a step of providing a resist layer for defining a surface facing the recording medium on the surface of the substrate between the grooves, and a step of providing a substrate surface not covered with the resist layer. Forming a first stepped portion from the facing surface to the groove by etching by ion milling;
Cutting the substrate at the position of the groove so that the second step is formed from the outer edge of the step.

In the conventional magnetic head shown in FIG. 7, the edge 22a of the step 22 has an edge or the like formed by machining, so that when the slider 20 is greatly inclined, the recording medium is moved by the edge or the like. There was a problem that the surface was damaged.

In the present invention, the step 22 shown in FIG.
Further, a deep step portion (second step portion) is provided by machining. FIG. 1 shows a specific embodiment of the magnetic head according to the present invention.

As shown in FIG. 1, a first step 7 (corresponding to the step 22 shown in FIG. 7) and a second step 8 are provided on the side surface of the slider 1. An edge or the like by machining is generated only on the outer edge 8a of the second step 8, and no edge or the like is formed on the outer edge 7a of the first step 7.

The inclination angle θ of the second step 8 (FIG. 3)
Is preferably as large as possible. In the present invention, a preferable range of the inclination angle θ is 45 ° ≦ θ <90 °.

A feature of the slider manufacturing method of the present invention is that a deep groove 10 is provided in advance by machining in a rectangular substrate 9 serving as a base material of the slider 1 (FIG. 4).
reference).

Thereafter, as shown in FIG. 5, the first stepped portion 7 is formed by photolithography, so that there is almost no edge or burr on the outer edge 7a of the first stepped portion 7.

Further, in the present invention, since the groove 10 is cut from the one-dot chain point shown in FIG. 5, the edge or the like by machining is formed on the outer edge 8a of the cut second step 8 (see FIG. 1). Only be formed.

As described above, according to the present invention, the first step portion is formed on the side portion of the slider by photolithography,
Further, a second step is formed from the outer edge of the first step by machining, and an edge or the like is generated only at the outer edge of the second step.

Therefore, according to the present invention, it is possible to increase the inclination of the magnetic head when the outer edge of the second stepped portion where an edge or the like due to machining is generated and the recording medium are in contact with each other as compared with the related art. it can.

That is, according to the present invention, even when the magnetic head is largely tilted due to a strong external impact or the like, and the magnetic head comes into contact with the recording medium, the edge of the second stepped portion or the like where the machining is performed is generated. The contact between the outer edge and the recording medium can be avoided as much as possible.
The degree of damage received by edges or the like due to machining can be reduced.

[0029]

FIG. 1 is a perspective view showing a magnetic head according to a first embodiment of the present invention mounted on a hard disk or the like with a surface facing a recording medium facing upward, and FIG. FIG. 3 is a perspective view showing the magnetic head of the second embodiment with the surface facing the recording medium facing upward, and FIG. 3 is a partial front view showing only the right side of the front of the magnetic head shown in FIGS. It is. The slider 1 of the magnetic head shown in FIGS. 1 and 2 is made of alumina / titanium carbide or Si.
(Silicone) or the like, and an air groove 2 is formed in a portion facing the recording medium,
Further, the rail portion 3 is arranged so as to surround the air groove 2.
Are formed.

The surface of the rail 3 is a surface 4 (floating surface; ABS) facing the recording medium, and the leading side A of the rail 3 is, as shown in FIG.
The inclined surface 5 is formed, or a step portion 30 may be provided instead of the inclined surface 5 as shown in FIG. In the present invention, the shape of the rail portion 3 is shown in FIGS.
However, the present invention is not limited to the shape shown in FIG.

In FIGS. 1 and 2, the rail 3 divided into two on the trailing side B is connected to one on the leading side A. For example, from the trailing side B to the leading side A, The rail 3 may be separated. Further, the facing surface 4 may have a crown shape. As shown in FIG. 1, a thin film element 6 is provided on an end surface (end) of the slider 1 on the trailing side B. Although not shown, the thin film element 6 is covered with a protective film made of a ceramic material such as alumina (Al ₂ O ₃ ).

The thin film element 6 is formed by laminating a magnetic material such as permalloy (Ni-Fe alloy) or an insulating material such as alumina, and has a magnetic detector for reproducing a magnetic recording signal recorded on a disk, or It includes a magnetic recording section for recording a magnetic signal on a disk, or both a magnetic detection section and a magnetic recording section. The magnetic recording unit is, for example, an MR head including a magnetoresistive element (MR element). Further, the magnetic detection unit is configured by an inductive head in which a coil and a core are patterned.

Next, the side surface shape of the slider 1 will be described below. As shown in FIGS. 1 and 2, a first step portion 7 is formed from the outer edge 4 a of the facing surface 4 to the side surface of the slider 1. In the present invention, as will be described later, since the first stepped portion 7 is formed by using photolithography, the outer edge 7a of the first stepped portion 7 is provided with an edge or a burr by machining. Almost no occurrence.

The outer edge 4a of the facing surface 4 is covered with a resist, and the step 7 is formed by etching by ion milling, so that a vertical edge is formed and the floating characteristics are stabilized. In the present invention, the outer edge 7 of the first step 7 is
a is preferably in an R shape. Opposite surface 4
Is preferably vertical.

In the embodiment of the magnetic head shown in FIG. 1, the first stepped portion 7 is formed not only on the side of the facing surface 4 but also from the end of the inclined surface 5 to the end on the leading side A. However, the inclined surface 5 is formed up to the end A on the leading side, and the first stepped portion 7 is
May be formed only on the side portions of.

Further, in the present invention, as shown in FIGS. 1 to 3, a second step 8 is formed from the outer edge 7a of the first step 7 to the side surface of the slider 1. In this case, the inner surface 8b of the second step portion 8 is
May be perpendicular to the vertical plane, or may be inclined with respect to the vertical plane.

The outer edge 8a of the second step 8 has
Similar to the outer edge portion 22a of the step portion 22 in the conventional magnetic head (see FIG. 7), edges, burrs, and the like due to machining are generated. In the present invention, the depth a of the second step 8 shown in FIG. 3 is made as long as possible, and the width b of the second step 8 is made short so that the inclination angle θ of the second step 8 Is preferable, and a specific range of the preferable inclination angle θ is 45 ° ≦ θ <90 °. In the present invention, since the second step portion 8 is formed by machining, the depth a and the width b of the second step portion 8 can be formed with a predetermined length relatively easily. .

In the present invention, the second step 8 is formed on the side of the slider 1 by machining, and in particular, the depth a of the second step 8 is increased, and the second step 8 is formed. The width b of the second step 8 is increased and the inclination angle θ of the second step 8 is increased, so that the outer edge 8a of the second step 8 and the recording medium can be moved even when the magnetic head is greatly inclined. Contact can be avoided as much as possible, and the degree of damage to the recording medium by edges or the like caused by machining can be reduced as compared with the related art. In the present invention, as shown in FIGS.
Is formed only on the side of the slider 1, but it can also be formed on the end surface on the leading side A of the slider 1.

In the present invention, it is preferable that a corner between the side surface of the slider 1 and the end surface on the leading side A and / or a corner between the side surface of the slider 1 and the end surface on the trailing side B are cut off. More preferably, it is an R shape. For example, if the corner between the right side surface of the slider 1 shown in FIG. 1 and the end surface on the leading side A is cut along the solid line C, and the remaining three corners are similarly cut, the damage to the recording medium can be further prevented. .

Next, a method of manufacturing the slider 1 according to the present invention will be described below with reference to FIGS. First, FIG.
As shown in FIG. 1, a groove 1 is formed in advance on a rectangular substrate 9 made of, for example, titanium carbide as a base material of the slider 1 by machining.
0 is formed in advance. Note that the groove 10 is formed in the slider 1
2 (see FIGS. 1 to 3).

As shown in FIG. 4, the rail 3 (see FIGS. 1 to 3) is placed on the rectangular substrate 9 between the grooves 10.
Is formed to define a resist layer 11. Next, as shown in FIG. 5, the rectangular substrate 9 not covered with the resist layer 11 is shaved by ion milling,
Is formed. Since the ion milling step is performed while rotating the rectangular material substrate 9, as shown in FIG. 3, the outer edge 7a of the first stepped portion 7 tends to be rounded by ion milling. Further, the outer edge 4a of the facing surface 4 is covered with the resist layer 11, and thus has a vertical edge.

Next, as shown by a dashed line in FIG. 5, the rectangular substrate 9 is cut from the groove 10 by a machine to form individual sliders 1. By cutting from the groove 10, a second step 8 is formed from the outer edge 7 a of the first step 7 to the side surface of the slider 1, and the second step 8 is formed on the outer edge 8 a of the second step 8. Is more likely to cause edges and burrs due to machining. However, in the present invention, only the outer edge 8a of the second step 8 is located at the position where the edge or the like due to the machining is generated, and the outer edge 7a of the first step which easily contacts the recording medium. Does not have any edges or the like due to machining.

As described in detail above, according to the present invention, the first step 7 is formed from the outer edge 4a of the opposing surface 4 of the slider 1 to the side of the slider 1, and the first step 7 is further formed. From the outer edge 7a to the side surface of the slider 1
Is formed. The outer edge 8a of the second step 8 is susceptible to an edge or a burr due to machining, but in the present invention, by providing the second step 8, for example, a strong external impact is provided. In addition, even when the magnetic head contacts the recording medium in a state where the magnetic head is greatly inclined, contact between the outer edge 8a of the second step portion and the recording medium can be avoided as much as possible. hand,
The degree of damage to the recording medium can be reduced.

[0044]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a slider 1 having a first stepped portion 7 and a second stepped portion 8 provided on a side surface as shown in FIG. A slider 20 having only the step portion 22 was prepared, and the length of cracks (cracks) generated in the slider when each slider was dropped on a recording medium was determined. The inclination angle θ (see FIG. 2) of the second step portion 8 of the slider 1 shown in FIG. 1 used in the experiment was about 76 °.

In the experiment, four sliders 1 each shown in FIG. 1 and four sliders 6 shown in FIG.
And the length of the crack was measured at the time when the fifth drop was completed. The cracks are measured at the outer edge 7a of the first step 7 in the case of the slider 1 shown in FIG. 1 and at the step 22 where an edge or the like due to machining is generated in the case of the slider 20 of FIG. The edge 22a.

The experimental results are shown in FIG.
No. on the horizontal axis shown in FIG. No. 1 to No. No. 4 are experimental results when the slider 1 shown in FIG. 5 to No. 5 8 show the experimental results when the slider 20 shown in FIG. 7 was used (comparative example). FIG.
As shown in FIG. No. 1 to No. The magnetic heads up to No. 4 are no. 5-No. It can be seen that the crack length is shorter than that of the magnetic heads up to 8. This is No. 1
From No. By providing the second step 8 on the side surface of the slider 1 like the magnetic head shown in FIG. 1, that is, the magnetic head shown in FIG. The portion is the outer edge portion 7a of the first stepped portion 7, and since the outer edge portion 7a has no edges or the like due to machining, it is possible to minimize the occurrence of cracks.

[0047]

As described above in detail, according to the present invention, the first side surface of the slider is moved from the outer edge of the facing surface formed on the slider surface to the side surface of the slider by photolithography.
And a second step portion formed by machining from the first outer edge to the side surface of the slider.
In addition, an edge or the like due to machining is generated only at the outer edge of the second step.

Therefore, even if the magnetic head is greatly inclined due to an external impact or the like and comes into contact with the recording medium, the contact between the outer edge of the second stepped portion where the edge or the like generated by machining is generated and the recording medium is minimized. It is possible to reduce the degree of damage to the recording medium due to the edge or the like caused by the machining as compared with the related art.

In the present invention, it is preferable to make the inclination angle of the second step portion as large as possible from the viewpoint of further preventing damage to the recording medium.

In order to form the second step on the side surface of the slider, a groove is formed in advance by machining on a rectangular substrate serving as a base material of the slider, and the first step is formed by photolithography. After the formation, by cutting the rectangular substrate from the groove, a first step and a second step can be formed on the side surface of the completed slider.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of the present invention mounted on a hard disk or the like.
Perspective view showing the magnetic head of the embodiment of the present invention with the surface facing the recording medium facing upward,

FIG. 2 shows a second embodiment of the present invention mounted on a hard disk or the like.
Perspective view showing the magnetic head of the embodiment of the present invention with the surface facing the recording medium facing upward,

FIG. 3 is a front view of the magnetic head shown in FIGS. 1 and 2;
Partial front view showing only the right part,

FIG. 4 is a view showing one step of a manufacturing process of the magnetic head according to the present invention;

FIG. 5 is a view showing one step of a manufacturing process of the magnetic head according to the present invention;

FIG. 6 is a view showing a measurement result of a length of a crack (crack) generated in the slider by dropping a plurality of sliders on a recording medium;

FIG. 7 is a perspective view showing a conventional magnetic head mounted on a hard disk or the like with a surface facing a recording medium facing upward;

FIG. 8 is a diagram showing one process of a conventional magnetic head manufacturing process.

FIG. 9 is a view showing one step of a conventional magnetic head manufacturing process.

FIG. 10 is a view showing one step of a conventional magnetic head manufacturing process.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 slider 2 air groove 3 rail 4 facing surface 5 inclined surface 6 thin film element 7 first step 7a outer edge (of first step) 8 second step 8a (of second step) Outer edge 9 Rectangular material substrate 10 Groove 11 Resist layer A Leading side B Trailing side θ Angle of inclination (of second step)

Claims (8)

[Claims] 1. A magnetic head comprising a slider and a thin film element for magnetic recording and / or reproduction provided at an end of the slider on a trailing side, the outer surface of a surface of the slider facing a recording medium provided on the slider. A first step is provided from an edge in a side direction of the slider, and a second step is provided on a side surface of the slider from an outer edge of the first step. A magnetic head comprising: 2. The magnetic head according to claim 1, wherein the second step portion is formed by machining. 3. An angle θ between a line connecting an outer edge of the first step and an outer edge of the second step and an opposing surface of the recording medium is 45 ° ≦ θ <90 °. Claim 1 which is within the range
Alternatively, the magnetic head according to claim 2. 4. The magnetic head according to claim 1, wherein the second step is provided at a leading end of the slider. 5. The magnetic head according to claim 1, wherein an outer edge of the first step portion has an R shape. 6. The slider according to claim 1, wherein a corner between a leading end surface and a side surface of the slider and / or a corner between a trailing end surface and a side surface of the slider are cut off. The magnetic head as described. 7. The magnetic head according to claim 6, wherein the corner has an R shape. 8. A method for manufacturing a magnetic head comprising a slider and a thin-film element for magnetic recording and / or reproduction provided at an end of the slider on a trailing side. Providing a groove by processing; providing a resist layer for defining a surface facing a recording medium on the surface of the substrate between the grooves; and ion milling the substrate surface not covered with the resist layer. Forming a first step from the opposing surface to the groove; and positioning the substrate at the position of the groove so that a second step is formed from the outer edge of the first step. A method for manufacturing a magnetic head, comprising the steps of: