JPH11201917A - Fluorescent x-ray analyzer - Google Patents
Fluorescent x-ray analyzerInfo
- Publication number
- JPH11201917A JPH11201917A JP368798A JP368798A JPH11201917A JP H11201917 A JPH11201917 A JP H11201917A JP 368798 A JP368798 A JP 368798A JP 368798 A JP368798 A JP 368798A JP H11201917 A JPH11201917 A JP H11201917A
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- Prior art keywords
- sample
- ray
- detector
- ray source
- rays
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば河川水，血
液，体液，半導体の洗浄液その他の液体試料または微細
な固形物を蛍光Ｘ線分析する蛍光Ｘ線分析装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluorescence analyzer for X-ray fluorescence analysis of, for example, river water, blood, body fluids, semiconductor cleaning fluids, and other liquid samples or fine solids.
【０００２】[0002]
【従来の技術】従来から、この種の試料を蛍光Ｘ線分析
するときに、散乱Ｘ線を極力少なくして正確な分析を行
うため、バックグラウンドの小さい高分子薄膜で試料を
支持することが知られている。図５に示す従来装置にお
いて、Ｘ線源２４からの励起用（１次）Ｘ線Ｂ１を、ホ
ルダＨに設けられた高分子薄膜２上の試料Ｓに照射し、
試料Ｓから発生する蛍光Ｘ線Ｂ２を検出器２５で検出す
ることにより、散乱Ｘ線Ｂ４の発生が抑制されたバック
グランドの小さい状態で、試料Ｓの分析を行う。2. Description of the Related Art Conventionally, when performing X-ray fluorescence analysis of this kind of sample, in order to perform accurate analysis by minimizing scattered X-rays, it is necessary to support the sample with a polymer thin film having a small background. Are known. In the conventional apparatus shown in FIG. 5, the sample (S) on the polymer thin film 2 provided on the holder H is irradiated with the excitation (primary) X-rays B1 from the X-ray source 24,
By detecting the fluorescent X-rays B2 generated from the sample S by the detector 25, the sample S is analyzed in a state where the generation of the scattered X-rays B4 is suppressed and the background is small.
【０００３】また、バックグランドを小さくして試料の
蛍光Ｘ線分析を行う全反射型の蛍光Ｘ線分析装置も知ら
れている。この装置は、Ｘ線源からの１次Ｘ線を試料表
面に微小な角度で入射させて全反射させ、試料からの反
射光線や散乱Ｘ線を検出器に入射しにくくすることによ
り、バックグランドを小さくする。There is also known a total reflection X-ray fluorescence spectrometer for performing X-ray fluorescence analysis of a sample with a small background. This device makes the primary X-rays from the X-ray source incident on the sample surface at a small angle and totally reflects them, making it difficult for reflected light and scattered X-rays from the sample to enter the detector. Smaller.
【０００４】[0004]
【発明が解決しようとする課題】しかし、図５の従来装
置では、バックグランドを小さくできるが、試料Ｓに対
してＸ線源２４と検出器２５が同じ側に配置されている
ので、試料Ｓに両機器２４，２５をともに接近させよう
としても、両機器２４，２５同士が互いに干渉しないよ
うに、それぞれのスペースを取る必要があることから、
ともに接近させる距離には限界があった。したがって、
従来装置は、試料Ｓに対するＸ線源２４および検出器２
５の距離が大きくなるので、試料Ｓに照射される１次Ｘ
線Ｂ１および検出器２５に入射する蛍光Ｘ線Ｂ２のＸ線
強度を大きくできず、そのために検出器２５の高感度化
が図れないという問題があった。However, in the conventional apparatus shown in FIG. 5, the background can be reduced, but since the X-ray source 24 and the detector 25 are arranged on the same side of the sample S, the sample S Even if the two devices 24 and 25 are approached to each other, it is necessary to take a space for each so that the two devices 24 and 25 do not interfere with each other.
There was a limit to the distance they could approach. Therefore,
The conventional apparatus includes an X-ray source 24 and a detector 2 for a sample S.
5 becomes large, so that the primary X
The X-ray intensity of the fluorescent X-rays B2 incident on the line B1 and the detector 25 cannot be increased, so that there is a problem that the sensitivity of the detector 25 cannot be increased.
【０００５】また、全反射型の蛍光Ｘ線分析装置におい
ては、バックグランドを小さくするのにＸ線源から試料
へ微小な角度で入射させる必要性から構造が複雑化し、
かつ微小な入射角度が得られるようにＸ線源または試料
の位置を設定するのが面倒であるという問題があった。[0005] Further, the structure of the total reflection type fluorescent X-ray analyzer becomes complicated due to the necessity of making the X-ray source enter the sample at a small angle in order to reduce the background.
In addition, there is a problem that it is troublesome to set the position of the X-ray source or the sample so as to obtain a small incident angle.
【０００６】本発明は上記問題点を解決して、取扱いが
容易で、かつ高感度化を図ることができる蛍光Ｘ線分析
装置を提供することを目的としている。An object of the present invention is to provide an X-ray fluorescence analyzer which can solve the above-mentioned problems and is easy to handle and can achieve high sensitivity.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明の一構成による蛍光Ｘ線分析装置は、液体ま
たは微細な固形物からなる試料を保持するＸ線透過性の
保持材と、前記試料の一方側に配置されて試料に励起用
Ｘ線を照射するＸ線源と、前記試料の他方側に配置され
て前記試料から発生する蛍光Ｘ線の強度を検出する検出
器とを備えている。ここで、Ｘ線透過性の保持材とはＸ
線を９０％以上透過する保持材を意味する。In order to achieve the above object, an X-ray fluorescence spectrometer according to one aspect of the present invention comprises an X-ray transmissive holding material for holding a liquid or fine solid sample. An X-ray source arranged on one side of the sample and irradiating the sample with X-rays for excitation, and a detector arranged on the other side of the sample and detecting the intensity of fluorescent X-rays generated from the sample. Have. Here, the X-ray transmitting holding material is X
A holding material that transmits 90% or more of a line is meant.
【０００８】上記構成によれば、試料をＸ線透過性の保
持材で保持し、Ｘ線源と検出器はこの試料を挟んで反対
側に配置するので、Ｘ線源からの励起用Ｘ線を保持材を
介して試料に照射することができるとともに、Ｘ線源と
検出器とは同じ側に配置されていないから、両機器同士
の干渉を考慮する必要がなく、両機器をともに試料Ｓに
接近させることができる。したがって、Ｘ線源から試料
への励起用Ｘ線および試料から検出器への蛍光Ｘ線のＸ
線強度を大きくして、検出器の高感度化を容易に図るこ
とができる。According to the above configuration, the sample is held by the X-ray transmitting holding material, and the X-ray source and the detector are arranged on opposite sides of the sample, so that the X-rays for excitation from the X-ray source are provided. Can be irradiated onto the sample through the holding material, and since the X-ray source and the detector are not arranged on the same side, there is no need to consider the interference between the two devices, and both the devices can be used as the sample S. Can be approached. Therefore, the X-rays for the excitation X-rays from the X-ray source to the sample and the fluorescent X-rays from the sample to the detector
It is possible to easily increase the sensitivity of the detector by increasing the line intensity.
【０００９】好ましくは、前記試料の一方側のＸ線源と
保持材間、および他方側の検出器と保持材間のうち、少
なくとも一方の間に、前記Ｘ線源からの励起用Ｘ線が前
記検出器に入射するのを阻止するスリットが配置されて
いる。したがって、スリットにより、Ｘ線源からの励起
用Ｘ線が検出器に直接入射するのを阻止することができ
る。Preferably, the excitation X-rays from the X-ray source are provided between at least one of the X-ray source and the holding material on one side of the sample and between the detector and the holding material on the other side. A slit is disposed to block the light from entering the detector. Therefore, the slit can prevent the excitation X-rays from the X-ray source from directly entering the detector.
【００１０】[0010]
【発明の実施の形態】以下、本発明の実施形態を図面に
基づいて説明する。図１は、本発明の第１実施形態に係
る蛍光Ｘ線分析装置の側面図を示す。本装置は、河川
水，血液，体液，半導体の洗浄液その他の液体または微
細な固形物からなる試料Ｓを蛍光Ｘ線分析する装置であ
り、上記試料Ｓを保持するＸ線透過性の保持材２と、試
料Ｓに励起用（１次）Ｘ線Ｂ１を照射するＸ線源４と、
試料Ｓから発生する蛍光Ｘ線Ｂ２の強度を検出する半導
体検出器のようなエネルギー分散型の検出器５と、その
出力信号を受けて試料Ｓの分析を行う分析器６とを備え
ている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a side view of an X-ray fluorescence analyzer according to the first embodiment of the present invention. The present apparatus is an apparatus for performing X-ray fluorescence analysis of a sample S made of river water, blood, body fluid, a washing liquid for semiconductors or other liquids or fine solids, and an X-ray transparent holding material 2 for holding the sample S An X-ray source 4 for irradiating the sample S with an excitation (primary) X-ray B1;
An energy dispersive detector 5 such as a semiconductor detector for detecting the intensity of the fluorescent X-ray B2 generated from the sample S is provided, and an analyzer 6 for receiving the output signal and analyzing the sample S.
【００１１】本装置は、上記試料Ｓの下方側の斜め下方
にＸ線源４が配置され、試料Ｓの上方側に対向して検出
器５が配置されている。なお、図１の配置を上下逆にし
て、試料Ｓの上方側に検出器５を配置し、下方側にＸ線
源４を配置してもよい。In the present apparatus, an X-ray source 4 is disposed obliquely below the sample S, and a detector 5 is disposed above the sample S so as to face the sample S. In addition, the arrangement in FIG. 1 may be inverted, and the detector 5 may be arranged above the sample S, and the X-ray source 4 may be arranged below the sample S.
【００１２】本装置は、上記Ｘ線源４からの１次Ｘ線Ｂ
１が保持材２上の試料Ｓに向けて上方へ照射されるもの
であり、Ｘ線源４と試料Ｓの間に保持材２が介在してい
るが、この保持材２は、例えば高分子薄膜や紙等の部材
からなり、大部分のＸ線を透過するので、保持材２上の
試料Ｓに１次Ｘ線Ｂ１を照射することができる。上記保
持材２は例えばリング状のフレーム３に支持され、この
フレーム３はその側方で図示しない支持部材を介して装
置本体に固定される。また、空気の散乱によるＸ線の減
衰を少なくするため、Ｘ線の経路は真空引きされる。The present apparatus uses a primary X-ray B from the X-ray source 4.
1 is radiated upward toward the sample S on the holding material 2, and the holding material 2 is interposed between the X-ray source 4 and the sample S. Since it is made of a member such as a thin film or paper and transmits most of the X-rays, it is possible to irradiate the sample S on the holding member 2 with the primary X-rays B1. The holding member 2 is supported by, for example, a ring-shaped frame 3, and the frame 3 is fixed to the main body of the apparatus via a support member (not shown) on the side. Further, in order to reduce attenuation of X-rays due to scattering of air, the X-ray path is evacuated.
【００１３】さらに、本装置は、試料Ｓの下方側のＸ線
源４と保持材２間にスリット７が、上方側の検出器６と
保持材２間にスリット８がそれぞれ配置されており、Ｘ
線源４からの１次Ｘ線Ｂ１が検出器６に入射するのを阻
止している。従って、スリット７，８により、Ｘ線源４
からの１次Ｘ線Ｂ１が検出器５に直接入射するのを阻止
することができる。Further, in this apparatus, a slit 7 is arranged between the X-ray source 4 and the holding member 2 below the sample S, and a slit 8 is arranged between the detector 6 and the holding member 2 above. X
The primary X-ray B <b> 1 from the source 4 is prevented from being incident on the detector 6. Therefore, the slits 7 and 8 allow the X-ray source 4
Of the primary X-rays B1 can be prevented from directly entering the detector 5.
【００１４】本装置は，上記両方の間にスリット７，８
を設けているが、１次Ｘ線Ｂ１が検出器６に入射するの
を阻止できれば、いずれか一方の間のみに設けるように
してもよい。また、スリット８を、検出器６に入射する
蛍光Ｘ線Ｂ２の発生領域を制限するためグランス角を設
定するスリットと兼用することもできる。The apparatus has slits 7 and 8 between the two.
However, as long as the primary X-ray B1 can be prevented from being incident on the detector 6, the primary X-ray B1 may be provided only between any one of them. Further, the slit 8 can also be used as a slit for setting a glance angle in order to limit a generation region of the fluorescent X-rays B2 incident on the detector 6.
【００１５】上記構成の蛍光Ｘ線分析装置を用いて試料
Ｓの分析を行う場合、この試料Ｓとしては、特に液体が
好適に使用される。例えば河川水を分析するとき、その
液体（例えば１０〜５００μリットル）を保持材２に滴
下する。この液体は蒸発乾燥して濃縮される。このよう
な液体の滴下と乾燥を繰り返すことにより、保持材２上
に試料Ｓは微細な固形物として集積される。When the sample S is analyzed using the X-ray fluorescence analyzer having the above-mentioned configuration, a liquid is particularly preferably used as the sample S. For example, when analyzing river water, the liquid (for example, 10 to 500 μl) is dropped on the holding material 2. This liquid is evaporated to dryness and concentrated. By repeatedly dropping and drying such a liquid, the sample S is accumulated on the holding material 2 as a fine solid.
【００１６】なお、Ｘ線経路は真空引きされるので、液
体の試料Ｓをそのまま蛍光Ｘ線分析する場合には、液体
の試料Ｓを例えばＸ線透過性で透明な気密のチューブか
らなる保持材に入れて分析を行う。Since the X-ray path is evacuated, when the liquid sample S is subjected to fluorescent X-ray analysis as it is, the liquid sample S is, for example, a holding material made of an X-ray transparent and airtight tube. Perform analysis.
【００１７】上記試料Ｓの下方に配置したＸ線源４から
出射した励起用（１次）Ｘ線Ｂ１は、保持材２上の試料
Ｓに照射される。試料Ｓから発生する蛍光Ｘ線Ｂ２は、
試料Ｓの上方に対向して配置した検出器５で検出され、
その出力信号を受けた分析器６により、試料Ｓの蛍光Ｘ
線分析を行う。The excitation (primary) X-rays B1 emitted from the X-ray source 4 disposed below the sample S are applied to the sample S on the holding member 2. The fluorescent X-ray B2 generated from the sample S is
Detected by a detector 5 disposed above and facing the sample S,
The analyzer 6 having received the output signal outputs the fluorescent light X of the sample S.
Perform line analysis.
【００１８】本装置は、Ｘ線源４が試料Ｓの下方側、検
出器５が試料Ｓに対して上方側というように、試料に対
して両機器４，５が反対側に配置されているので、両機
器４，５同士の干渉を考慮することがなく、試料Ｓと両
機器４，５間をともにできる限り接近させることがで
き、試料ＳとＸ線源４間の距離Ｌ１、および試料Ｓと検
出器５間の距離Ｌ２をともに小さくできる。Ｘ線強度
は、距離の２乗の逆数、つまり１／（Ｌ１）2 ，１／
（Ｌ２）2 に比例して減衰するので、距離が小さいほど
Ｘ線強度を大きく維持でき、しかも１／（Ｌ１）2 と１
／（Ｌ２）2 が掛け合わされるので、各間の距離Ｌ１，
Ｌ２がともに小さいと、検出器５に入射する蛍光Ｘ線Ｂ
２のＸ線強度は大きなものとなる。これにより、図５の
従来装置に比較して、検出器５の検出感度を例えば１０
倍にすることができ、検出器５の高感度化を図ることが
できる。In this apparatus, both devices 4 and 5 are arranged on the opposite side of the sample such that the X-ray source 4 is below the sample S and the detector 5 is above the sample S. Therefore, it is possible to bring the sample S and the two devices 4 and 5 as close as possible without considering the interference between the two devices 4 and 5, the distance L1 between the sample S and the X-ray source 4 and the sample. Both the distance L2 between S and the detector 5 can be reduced. The X-ray intensity is the reciprocal of the square of the distance, that is, 1 / (L1) 2 , 1 /
Since the attenuation is proportional to (L2) 2 , the X-ray intensity can be maintained large as the distance is small, and 1 / (L1) 2 and 1
/ (L2) 2 is multiplied by the distance L1,
When both L2 are small, the fluorescent X-rays B incident on the detector 5
The X-ray intensity of No. 2 is large. As a result, the detection sensitivity of the detector 5 is set to, for example, 10
And the sensitivity of the detector 5 can be increased.
【００１９】このように、本装置は、Ｘ線透過性の保持
材２で保持された試料Ｓを挟んでＸ線源４と検出器５を
反対側に配置するだけで、全反射型の蛍光Ｘ線分析装置
に比較して、面倒な調整作業を必要とせずに、高感度化
を図ることができる。また、試料Ｓに対してＸ線源４お
よび検出器５を必ず同じ側に配置するという設計上の制
約もないので、設計の自由度が向上する。As described above, in this apparatus, the X-ray source 4 and the detector 5 are disposed on the opposite sides of the sample S held by the X-ray transmitting holding member 2, and the total reflection type fluorescent light is used. Compared with the X-ray analyzer, high sensitivity can be achieved without any troublesome adjustment work. Further, since there is no design restriction that the X-ray source 4 and the detector 5 are always arranged on the same side with respect to the sample S, the degree of freedom in design is improved.
【００２０】図２は第２実施形態の蛍光Ｘ線分析装置を
示す。本装置は、試料Ｓの下方側に対向してＸ線源４を
配置し、試料Ｓの上方側の斜め上方に検出器５を配置す
る。その他の構成は図１と同様である。なお、図２の配
置を上下逆にして、試料Ｓの上方側に検出器５を配置
し、下方側にＸ線源４を配置するようにしてもよい。FIG. 2 shows an X-ray fluorescence analyzer of the second embodiment. In the present apparatus, an X-ray source 4 is arranged to face the lower side of the sample S, and a detector 5 is arranged obliquely above the sample S. Other configurations are the same as those in FIG. Note that the arrangement shown in FIG. 2 may be turned upside down so that the detector 5 is arranged above the sample S and the X-ray source 4 is arranged below the sample S.
【００２１】本装置は、第１実施形態と同様に、Ｘ線源
４，検出器５をともに試料Ｓに接近させることができ、
試料Ｓに対するＸ線源４および検出器５の距離を小さく
できるので、検出器５の高感度化を図ることができる。In this apparatus, as in the first embodiment, both the X-ray source 4 and the detector 5 can be brought close to the sample S,
Since the distance between the X-ray source 4 and the detector 5 with respect to the sample S can be reduced, the sensitivity of the detector 5 can be increased.
【００２２】図３は第３実施形態の蛍光Ｘ線分析装置を
示す。本装置は、試料Ｓの下方側に対向して検出器５を
配置し、試料Ｓの上方側の斜め上方に、２台のＸ線源４
Ａ，４Ｂを配置し、試料Ｓに対して各１次Ｘ線Ｂ１を照
射するように配置する。その他の構成は図１と同様であ
る。なお、図３の配置を上下逆にして、試料Ｓの上方側
に検出器５を配置し、下方側にＸ線源４Ａ，４Ｂを配置
するようにしてもよい。FIG. 3 shows an X-ray fluorescence analyzer of the third embodiment. In this apparatus, a detector 5 is arranged to face the lower side of the sample S, and two X-ray sources 4
A and 4B are arranged so that the sample S is irradiated with each primary X-ray B1. Other configurations are the same as those in FIG. Note that the arrangement shown in FIG. 3 may be reversed so that the detector 5 is arranged above the sample S and the X-ray sources 4A and 4B are arranged below the sample S.
【００２３】本装置は、Ｘ線源４Ａ，４Ｂおよび検出器
５をともに試料Ｓに接近させることができ、試料Ｓに対
するＸ線源４Ａ，４Ｂおよび検出器５の距離を小さくで
きる。それとともに、第１実施形態と比較して、２台の
Ｘ線源４Ａ，４Ｂで試料Ｓを照射するので１次Ｘ線Ｂ１
のＸ線強度が２倍になるから、検出器５の高感度化をよ
り一層図ることができる。In the present apparatus, both the X-ray sources 4A and 4B and the detector 5 can be brought close to the sample S, and the distance between the X-ray sources 4A and 4B and the detector 5 with respect to the sample S can be reduced. At the same time, compared to the first embodiment, the sample X is irradiated by the two X-ray sources 4A and 4B, so that the primary X-rays B1
X-ray intensity is doubled, so that the sensitivity of the detector 5 can be further improved.
【００２４】図４は第４実施形態の蛍光Ｘ線分析装置を
示す。本装置は、波長分散型の検出器１５を使用してい
る。FIG. 4 shows an X-ray fluorescence analyzer of the fourth embodiment. This apparatus uses a chromatic dispersion type detector 15.
【００２５】本装置は、試料Ｓを保持するＸ線透過性の
保持材２と、試料Ｓに励起用（１次）Ｘ線Ｂ１を照射す
るＸ線源４と、試料Ｓから発生する蛍光Ｘ線Ｂ２を分光
する分光器１０と、分光器１０からの蛍光Ｘ線Ｂ３の強
度を検出する検出器１５とを備えている。分光器１０と
検出器１５とはゴニオメータ１２に取り付けられてお
り、分光器１０の回動に応じて、検出器１５を分光器１
０からの蛍光Ｘ線Ｂ３を検出可能に回動させる。The present apparatus comprises an X-ray transmitting holding material 2 for holding a sample S, an X-ray source 4 for irradiating the sample S with (primary) X-rays B1 for excitation, and a fluorescent X-ray generated from the sample S. The spectroscope 10 includes a spectroscope 10 for splitting the line B2 and a detector 15 for detecting the intensity of the fluorescent X-ray B3 from the spectroscope 10. The spectroscope 10 and the detector 15 are attached to the goniometer 12, and the detector 15 is moved in accordance with the rotation of the spectroscope 10.
The fluorescent X-ray B3 from 0 is rotated so as to be detectable.
【００２６】本装置は、試料Ｓの下方側にＸ線源４が配
置され、試料Ｓの上方側に分光器１０および検出器１５
が配置されている。なお、図４の配置を上下逆にして、
試料Ｓの上方側にＸ線源４を配置し、下方側に分光器１
０および検出器１５を配置するようにしてもよい。ま
た、ゴニオメータを試料Ｓの周りに複数設けた多重同時
分析型としてもよい。In this apparatus, an X-ray source 4 is arranged below a sample S, and a spectroscope 10 and a detector 15 are arranged above the sample S.
Is arranged. In addition, the arrangement of FIG.
The X-ray source 4 is arranged above the sample S, and the spectroscope 1 is arranged below the sample S.
0 and the detector 15 may be arranged. Further, a multiple simultaneous analysis type in which a plurality of goniometers are provided around the sample S may be used.
【００２７】このように、本装置は、上記Ｘ線源４と、
分光器１０および検出器１５とが、試料Ｓに対して反対
側に配置されており、同じ側に配置されていないので、
Ｘ線源４と分光器１０および検出器１５との干渉を考慮
することがなく、分光器１０を試料Ｓにできるだけ接近
させることができる。したがって、試料ＳにＸ線源４お
よび分光器１０を接近させることができ、第１実施形態
と同様に、検出器１５に入射するＸ線強度を大きくし
て、高感度化を図ることができる。また、試料Ｓに対し
てＸ線源４と分光器１０および検出器１５とを必ず同じ
側に配置するという設計上の制約もないので、設計の自
由度が向上する。As described above, the present apparatus comprises the above-mentioned X-ray source 4,
Since the spectroscope 10 and the detector 15 are arranged on the opposite side to the sample S and are not arranged on the same side,
The spectroscope 10 can be brought as close as possible to the sample S without considering the interference between the X-ray source 4 and the spectroscope 10 and the detector 15. Therefore, the X-ray source 4 and the spectroscope 10 can be brought closer to the sample S, and the X-ray intensity incident on the detector 15 can be increased to achieve high sensitivity, as in the first embodiment. . Further, there is no design restriction that the X-ray source 4 and the spectroscope 10 and the detector 15 are always arranged on the same side with respect to the sample S, so that the degree of freedom in design is improved.
【００２８】なお、上記実施形態ではＸ線を励起線とし
ているが、電子線を励起線としてもよい。In the above embodiment, X-rays are used as excitation rays, but electron beams may be used as excitation rays.
【００２９】[0029]
【発明の効果】以上のように、本発明によれば、試料を
Ｘ線透過性の保持材で保持し、Ｘ線源と検出器はこの試
料を挟んで反対側に配置するので、Ｘ線源からの励起用
Ｘ線を保持材を介して試料に照射することができるとと
もに、Ｘ線源と検出器とは同じ側に配置されていないの
で、両機器同士の干渉を考慮する必要がなく、両機器を
ともに試料Ｓに接近させることができる。したがって、
Ｘ線源から試料への励起用Ｘ線および試料から検出器へ
の蛍光Ｘ線のＸ線強度を大きくして、検出器の高感度化
を図ることができる。As described above, according to the present invention, the sample is held by the X-ray transmissive holding material, and the X-ray source and the detector are arranged on the opposite sides of the sample. It is possible to irradiate the sample with excitation X-rays from the source via the holding material, and since the X-ray source and the detector are not arranged on the same side, there is no need to consider interference between the two instruments. , Both devices can be brought closer to the sample S. Therefore,
By increasing the X-ray intensity of the X-ray for excitation from the X-ray source to the sample and the X-ray intensity of the fluorescent X-ray from the sample to the detector, the sensitivity of the detector can be increased.
【図１】本発明の第１実施形態に係る蛍光Ｘ線分析装置
を示す側面図である。FIG. 1 is a side view showing an X-ray fluorescence spectrometer according to a first embodiment of the present invention.
【図２】第２実施形態に係る蛍光Ｘ線分析装置を示す側
面図である。FIG. 2 is a side view showing an X-ray fluorescence analyzer according to a second embodiment.
【図３】第３実施形態に係る蛍光Ｘ線分析装置を示す側
面図である。FIG. 3 is a side view showing an X-ray fluorescence analyzer according to a third embodiment.
【図４】第４実施形態に係る蛍光Ｘ線分析装置を示す側
面図である。FIG. 4 is a side view showing an X-ray fluorescence analyzer according to a fourth embodiment.
【図５】従来の蛍光Ｘ線分析装置を示す側面図である。FIG. 5 is a side view showing a conventional X-ray fluorescence analyzer.
２…保持材、４…Ｘ線源、５…検出器、７，８…スリッ
ト、Ｓ…試料、Ｂ１…励起用（１次）Ｘ線、Ｂ２…蛍光
Ｘ線。2 ... holding material, 4 ... X-ray source, 5 ... detector, 7, 8 ... slit, S ... sample, B1 ... (primary) X-ray for excitation, B2 ... fluorescent X-ray.
Claims (2)
保持するＸ線透過性の保持材と、 前記試料の一方側に配置されて試料に励起用Ｘ線を照射
するＸ線源と、 前記試料の他方側に配置されて前記試料から発生する蛍
光Ｘ線の強度を検出する検出器とを備えた蛍光Ｘ線分析
装置。1. An X-ray permeable holding material for holding a sample made of a liquid or a fine solid, an X-ray source arranged on one side of the sample and irradiating the sample with X-rays for excitation, An X-ray fluorescence analyzer comprising: a detector arranged on the other side of the sample to detect the intensity of X-ray fluorescence generated from the sample.
検出器と保持材間のうち、少なくとも一方の間に、前記
Ｘ線源からの励起用Ｘ線が前記検出器に入射するのを阻
止するスリットが配置されている蛍光Ｘ線分析装置。2. The excitation from the X-ray source according to claim 1, wherein at least one of between the X-ray source and the holding material on one side of the sample and between the detector and the holding material on the other side. An X-ray fluorescence analyzer in which a slit for blocking X-rays for use from entering the detector is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00368798A JP3823146B2 (en) | 1998-01-12 | 1998-01-12 | X-ray fluorescence analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00368798A JP3823146B2 (en) | 1998-01-12 | 1998-01-12 | X-ray fluorescence analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11201917A true JPH11201917A (en) | 1999-07-30 |
| JP3823146B2 JP3823146B2 (en) | 2006-09-20 |
Family
ID=11564323
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00368798A Expired - Fee Related JP3823146B2 (en) | 1998-01-12 | 1998-01-12 | X-ray fluorescence analyzer |
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| Country | Link |
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| JP (1) | JP3823146B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006049051A1 (en) * | 2004-11-08 | 2006-05-11 | Sii Nanotechnology Inc. | Fluorescent x-ray analy sis device |
-
1998
- 1998-01-12 JP JP00368798A patent/JP3823146B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006049051A1 (en) * | 2004-11-08 | 2006-05-11 | Sii Nanotechnology Inc. | Fluorescent x-ray analy sis device |
| JPWO2006049051A1 (en) * | 2004-11-08 | 2008-05-29 | エスアイアイ・ナノテクノロジー株式会社 | X-ray fluorescence analyzer |
| US7436926B2 (en) | 2004-11-08 | 2008-10-14 | Sii Nano Technology Inc. | Fluorescent X-ray analysis apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3823146B2 (en) | 2006-09-20 |
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