TWI225760B - Apparatus and method for X-ray analysis of a sample, and radiation detection apparatus - Google Patents

Abstract

Apparatus for X-ray analysis of a sample includes an X-ray source, which irradiates the sample, and an X-ray detector device, which receives X-rays from the sample responsive to the irradiation. The device includes an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon. Processing circuitry of the device includes a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.

Description

1225760

Field of the Invention The present invention relates generally to analytical instruments, and more particularly to instruments and methods for analyzing thin films using x-rays. Background of the invention X-ray reflectometry (XRR) is a well-known technique for measuring the thickness, density, and surface quality of thin film layers deposited on a substrate. Several companies have sold X-ray reflections for each of Bai Zhizhi, including Techn0s (0saka,,

SiemensUunich, Germany) and BedeScientific Instrumen (Udurham, UK). These reflectometers are generally operated using the 乂 _beam ′ at grazing incidence, that is, a small angle relative to the surface of the sample, close to the total external reflection angle of the sample material, and irradiating the same sample. The measurement of the X-ray intensity reflected from the sample is a function of the angle 'to produce a pattern of interference fringes, which is analyzed to determine the characteristics of the thin film layer that caused the pattern. X-ray intensity measurements are often made using position-sensitive detectors, such as proportional counting array detectors, which are generally made of photodiode arrays or charge-coupled devices (CCD). 2. In Komiya et al., The disclosure of US Patent No. 5,740, 2 26 incorporated into the case by reference, illustrates a grant to Koppel for analysis to determine the film thickness, and the disclosure is incorporated by reference into the case. US Patent No. 5, 6 1 9, 548, describes a χ-number meter based on reflectometry. Use a curved, reflecting X-ray monochromator to focus the X-1 to the thick surface. A position-sensitive detector, such as the Lightning-12 column, senses X-ray reflections from the surface and produces a% > up, j °. The array 1 generates the intensity signal as the angle

1225760 V. Description of the Invention (2) Function. Analyze the angle-dependent signals to determine the properties of a structure, including thickness, density, and surface roughness. The knots of the thin film layer were awarded to Barton et al., And its disclosure was referenced in No. 5, 923, 720, and also explained—species Mu Zhi Wu Guo patented the first move. The color meter has a tapered logarithmic meter. First, it has been described as having a focal spot shape compared to the prior art monochromator. Reflect or sample from the sample surface to achieve a finer reception. Shooting X—First, the position-sensitive detector is used in the technique of reflection detection. m can exhibit > ^ a. This type of position-sensitive X-ray inspection ^ car trains generally include multiple detector elements that are renewed by c c D or other scanning mechanisms. Each element # g borrow / μ ^ ”is called to be invented. Φ .., m LL,, 711 accumulate the photoelectricity in a period of time before it is out, and therefore cannot resolve the incident XRR of the photon array Only one dagger or a few daggers of ancient incidental specimens are recorded, and the incident incidents are recorded in the total volume of the mother and one piece. Only a different monochromator is used between the sample and the inspector π, where to go ^ soap column, ^ here j different, but this configuration causes the signal throughput to be too low for practical applications. = The counter is a type of gas-based position-sensitive [photodetector: it provides some energy resolution '-typically about 20% (for a 6 kilovolt line for 1 200 electron volts). However, these counters can only process one photon at a time, resulting in a very slow analysis rate. For many applications, its energy resolution is not sufficient. For example, in the Journal of Applied Crystallography 22 (1989), page 46 0 'The name of Chihab et al. Is nNew Apparatus for Grazing X-ray Ref 1ectometry in the Angle-Resolved Page 6 C: \ 2D-CODE \ 90- 06 \ 90106732.ptd 1225760

D1SperS ^ e M〇 ^ ei |, which is incorporated into this case by reference, illustrates another common method of p-reflection measurement. One is directed towards the surface of the sample, and the other is opposite to the [optical source = ;; = X-ray emitted. Place a blade near the sample table: Cut off 'so that only the reflected X-rays reach the detector. A disc X = ΓΛ between non-source Λ samples, such as in US Patent No. 5,619, 548 t Early color meter 'k selects the wavelength of the reflected x_beam that will reach the detector. X-ray reflectometry has been combined with X-ray fluorescence (XRF) measurements to provide additional information about the composition of the thin film layer. For example, in h X-ray Analysis 3 5 (1989), page 127, the name is " x_ray Reflection »a New Tool for Investlgat, ng Layered Structure and Interfaces ", which is incorporated by reference into this case.

Lengeler's thesis describes a system for measuring grazing incidence χ-light reflections, among which X-ray fluorescence is also measured. A sample is irradiated by the _χ—light source at grazing incidence. An X-ray detector intercepts the radon-light reflected from the surface of the sample (also at grazing incidence), while another detector above the sample intercepts the X-ray fluorescence emitted by the sample by being excited by the X-light source. As explained in this paper, the fluorescent light emitted when the knife analysis sample is excited at an angle lower than the critical angle for the total external reflection of incident X-rays is called total reflection in this technique. TXRF) analysis. In X-ray Spectrometry 26 (1979), page U5, entitled "Applications of Glancing Incidence X-ray Analysis", a paper by Leenaers et al., Incorporated by reference, illustrates a related technique. Author states a sweeping incidence χ-light analysis

1225760

= ΙΑΑ), combined with X-ray reflectance and angle-dependent χ_photofluorescence measurement to obtain the structure and chemical analysis method of the sample. In Applied Surface SCience 1 2 5 (1998), page 129, named " Characterization 〇f Titanium Nitride Uyas by Grazing-Emission X-ray Fluorescence

"Spectrometry", a paper by Wiener et al. Incorporated by reference, illustrates an alternative method for determining the thickness and composition of thin film layers. This article describes a technique whereby a sample can be applied by a light source at normal or near normal incidence Light, and the X-ray photons emitted by the sample are collected at a grazing angle near the surface. As is known in the art, the spectrum of the collected photons is analyzed by a wavelength dispersion technique and is also determined The distribution of photons by the emission angle. The obtained information provides information about the thickness and composition of the thin film layer in the sample. The dispersion technique can also be used to analyze the spectral distribution of reflected photons, such as in the 47th Annual Denver X by Windover et al. -ray Conference (August 1998), named "Din hin Film Density Determination by Multiple Radiation Energy Dispersive X-ray Reflectivity", described in the paper incorporated by reference. People have successfully developed Used in imaging system, according to synchrotron radiation, with special processing circuit for each detector X-ray detector arrays. These arrays were developed by Arfelli et al., Nuclear Instruments and Methods in Physics Research A 377 (1996), page 508, under the name ‘’ New Developments in the Field of

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Silicon Detectors for Digital Radiography ", and at Nuclear Instruments and Methods in Physics

Research A 38 5 (1989), page 311 under the name "Design and

Evaluation of AC-Coupled FOXFET-Biased ^, Edge-on ^

Silicon Strip Detectors for X-ray Imaging ", as described in the paper incorporated by reference. The detector in the array is counted by one for multiple channels, including a preamplifier, shaper, buffer, discriminator, and counter, for each channel VLSI (Very Large Integrated Product) CMOS (Complementary Metal Body). To read the detector array wafer by the metal line f. It should be connected to the VLSI input, but the author states a future priority | The design makes it possible to directly mount the front-end circuit / Man Ming's overview Yi Muchao state-of-the-art film. One of the items of the present invention is to provide a method and a device for positioning. AA Λ First Detection Modification One of the other purposes of some aspects is to provide light analysis by referring to the energy analysis X- for X-ray reflection measurement analysis. The improved method and device of the Li Hexian Analysis In the preferred embodiment of the present invention, the X-ray detection, the sensitive detector, and the X-rays combined to the respective signal processing arrays include photodiodes. It is also better to detect a linear or matrix (planar) configuration. Process i: Twenty-two will be configured to form a separate detector together or 3 integrated circuits, and "to their respective detectors, as the board; each channel is formed at -Single- Integrated Circuit Chip: To = This C: \ 2D-CODE \ 90-06 \ 90106732.ptd Page 9

a ^ 576〇

Parallel processing of individual recitations of Jiejikou > Tu M: The array of TZ ^ k ^ allows τ ^ " $ t ο ΛΥ / 5 ,, with extremely high angle resolution and dynamic range.仃 Position sensitive, able to depend on each other X Ϊ ^: known in the art of radiometry, in which $ qualitative: 5 arrays of detector channels for processing, 2 methods i: only total or average the amount. ^ In the present invention, there is such a preferred discriminator, which eliminates the reason;! :: a wide example, the processing channel contains * channel discriminators compared to households; the use of photons outside the predetermined range can be individual or individual The all-position can be composed of several separate components, installed in a hybrid other printed circuit at an X-ray photon amplitude indicating the incident light ^ usually in energy divided energy. According to the energy distribution of X-ray light, for each channel, the gain of & is selected to control the sensitivity separately, and at the same time, the high pulse throughput is preferred. The light reflectance is better, which is irradiated. The discriminator gives the energy of one of the shooting detectors. The pulsed X-ray optical signal processor generates an automatic or manual control based on the time constant on each channel of the respective detector. When set to receive only, the art of generating an electrical pulse is known by the respective channels, the exact incident rate, and the input and output. Channel spirit adjustment, and a pulse. In each channel, the sensitivity of the channel with a relatively low incidence rate photometric adjustment is used to detect the actual monochromatic energy φ # reflected from the photon wafer carrier punch. There is a process to determine the sensitivity of the photons emitted by the photon. The filter sensitivity is 4 degrees, the allowable rate, and the energy photon weight detector are all such a standard. All are counted only. X-level pulses of the sample,

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1225760 V. Description of the invention (7) = "Energy-shifted photons processed by glory. Use arrays while eliminating the need for = accurate measurement of reflectance to make an accurate reflectance measurement according to one of the invention '. Η beam chirping or monochromation. Sample The device includes a "" column, and therefore provides an X-light source for [light analysis of an irradiated sample; and an X-ray detector device, which responds to the irradiation, the device includes: -An array of radiation-sensitive detectors that generate electrical signals in response to the photons; and radiant light on the top / bottom: including a number of signal processing channels, each of which is light-to-synthetic: each of the following: a letter, a tiger, and a photon The incident rate of each detector and an output are generated according to the energy distribution of the incident photons. "The array of detectors includes an array; the radiation is preferably a silicon diode detector. From Lv =, many signal processing channels each include-a common substrate with separate detectors. It is best that the mound conductor chip 'includes many signal processing channels: integrated,-abundant in-a kind of preferred implementation w, the letter? Tiger processing channel processes signals according to adjustable processing, and its optional response is detected separately Cry " (to be adjusted individually. ≪ The different incidence rates of the nine sons are preferably, where, the channel includes the artifact, the signal of the photon outside its constant energy range, where the processing circuit adjusts the predetermined energy of the discriminator Range. ^ Hey &

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Page 11 1ZZ3 / ου 5. Description of the invention (8) Preferably, the signal clerk + slave λ 4 丄 丄 title includes counting and counting the number of photons incident on the respective detectors, which is the number of photons counted by many channels. There are some busbars ', such as C examples, X-ray detection, Hare, Y JL, or other. For example, the X-light source includes-single ^ ^ ^ ^ early color meter' because of i :: this amount is irradiated. The best is: Star μ Γ round to eliminate the signal corresponding to a predetermined energy at one. A preferred embodiment of a method for analyzing a sample includes: irradiating the sample with X-rays; responding to the light-emitting detectors in an array of X-rays from the samples, and the detectors generate electrical signals when the detectors respond; and Each processing channel process comes from the detection output, indicates the incident photon at each position, and sets the photon arrival rate. A preferred embodiment according to the present invention includes: an array of radiation-sensitive detectors that generate electrical signals; and a processing circuit including: a counter that responds to the energy of a photon 'and a processing circuit including a complex self-channel receiver And outputting the respective device to receive the fluorescent X-ray emitted from the sample reflected by the sample. In contrast, the sample is treated with actual monochromatic X-rays. The signal processing channel includes identifying photons outside an energy range. The package also provides a way for X-rays to be separated at predetermined locations and receive X-rays that should be incident on them. The signal from the photon photon array generates a 'light detection device' in response to the energy distribution of the incident photons in response to the incident radiation.

1225760 V. Description of the invention (9) 5 ζ ^ = processing channel, each channel is combined to the ^ i ^ arm from a respective detector, and includes a counter that counts the number of photons incident on the respective detector; As well as the bus common to the Xixi Tongtong, it receives and outputs individual photon counts from the channel. From the following detailed description of its car example, together with the accompanying drawings, the present invention will be more fully understood. In the drawings: blanket description of the embodiment Figure 1 is a preferred embodiment according to the present invention, Schematic diagram of a system 20 for X-ray reflectometry of the same type. A χ_light source 24, generally an X-ray light, irradiates a small area 2 of the sample 22 via a focusing monochromator 26 8 Yuan Xuan is a monochromator 2 6 containing r 〇y 〇31 ^ 1. 111 (:. Supplied) ^ 1 "} ^ & 1: 1 ^ 〇1 ^ -3362 type device, or one by

X-ray (X-ray optical System) Inc. coat, Albany, New York, X-ray Doubly-bent Focusing Crystal Optic. These monochromators were filed on the same date, assigned to the assignee of this patent application ', and their disclosures are incorporated by reference into this patent application, entitled "x-ray Microanalysis of Thin Film", There are more details. Otherwise 'any other suitable monochromator may be used, such as those described in the aforementioned U.S. Patent Nos. 5, 6 1 9, 548 and 5, 923, 72 0, as described above by Chi hab et al. The blade configuration described in the paper. A typical light energy for reflection measurement in System 20 is about 5.4 kiloelectron volts. X-rays reflected by sample 2 2 are collected by detector 3 2 of an array 30

C: \ 2D-C0DE \ 90-06 \ 90106732.ptd Page 13 1225760 V. Description of the invention (10), _ combined to the processing circuit 34, what is t? The processing channel 36 ^ D receives a signal from a corresponding detector 32. In Figure 1, 檑 + Μ bed ..., Feng example is not a concise detector, two copies of the detector 32 in the next two tomorrow morning, and a relatively small number of detectors 30, usually = 2 best embodiment, as in As explained below, the array is set to a linear or matrix (planar) array number with pieces', which is: 1ί :: ΐ 36. The output letter form 'from the channel 36' is transmitted to a processing block 38, which shows that when the general-purpose computer 1 of the planning program is consumed, the output of the optical Si analysis pass is preferably determined as liΓ reflected from the sample 22. In order to set the angle of the predetermined energy or in the-energy range, w # 口, and the other "Er Ming" below, because of the energy provided in the signal processing, the 36 energy dispersive processing is selected to eliminate the sample 22 and the detector ^ _ An additional monochromator is needed in between. When the sample 22 has a layer or a surface layer such as a thin film in the area 28, the distribution 42 generally exhibits a periodic structure due to the interference effect from the interfaces between the layers in the reflected x-ray wave. The characteristics of the periodic structure are preferably analyzed by block 38, using, for example, those described in the aforementioned U.S. Patent Nos. 5, 6 1 9, 548 and 5, 74, 226, or otherwise as described in the art Known analytical methods determine the thickness, density, and surface quality of one or more surface layers. Although the preferred embodiment shown in FIG. 1 includes a system 20 including an array 30 and an attached circuit 34, which has been described with reference to X-ray reflectometry, please be aware that the system can be modified as necessary. Used in other areas of X-ray analysis. Possible application fields include X-ray fluorescence (XRF) analysis, especially such as, C: \ 2D-CODE \ 90-06 \ 90106732.ptd page 14

/ ου 5. Description of the invention (Η): Description of the background of the invention, including XRF, and other technologies. Furthermore, the system is known to emit radiation, such as for detecting gamma rays and its implementation in other sensing detection systems. Figure 2 is a block diagram showing the position sensitivity of the array 30 according to the present invention. The array circuit 30 and the detector 30 for processing the lightning detection method are described in detail. The detector 32 preferably includes -The depletion thickness is at least 20 microns. It can be integrated with the circuit 34-the best of both worlds, why it is 2 low's used in this: any other suitable type of detector known to the art, 'Make ... contain the corresponding processing channel 36. Array 3. And circuit 3 pieces 4 =: i Two P is preferably borrowed a thermoelectric cooler ’to improve its letter. Details of the channel 36 are described below with reference to FIG. 3. The M-b-b array detector 32 'is arranged along the linear axis of the array, with an axial dimension of approximately 30 microns and a lateral dimension. These dimensions make the array have an effective area of about 15 "millimeters are 6" 2, not 3: 1 2 Γ 则: the narrow axial distance of the device is enhanced in 30 measurements using the array: 7 up to the angle resolution '@ The time width and horizontal size can be used to maximize the sensitivity of the detection, so the system's 20iXRR measurement throughput is increased. However, please understand that these sizes and numbers of detectors are given here and cited as examples, And any suitable type of ruler detector can be used. Instead of the linear array shown in Figure 2, the detector 32 can be alternatively arranged in a planar matrix array. If desired, this array has a flat C: \ 2D-CODE \ 90-06 \ 90106732.ptd Page 15 V. Description of the invention (12) The advantages of face angle resolution. If it is required to appear in each column of the array of columns; ::::, the degree can be used to turn the signal wheel The prime size has at least two possibilities] it / ;: free;:; the saturation of the relatively small image, and (2) the reduction of the electrical immunity of the detector, and the reduction of the angle / present-χ-flux measurement noise. Can be detected in the overall X-detector = at :: sex array 3 °: to limit exposure and on axis Direction, hope that the subtle corners of the mouth are like ^ in the horizontal direction, so that the light L: the horizontal size of the area where the light is observed. Yes, to intercept the X-rays without placing them in: heavy :; ^ constituted by ' The aperture of the mother corresponds to the-of the detector 32, which can be moved to enhance the detection resolution in the axial direction. The im shot in the array 30 is a function of the angle in the axial direction = with r "Engraved" horizontal size,… higher two: has a smaller active area exposed to X-rays than those bought at low-pass sites. This configuration reduces the possibility of saturation at high-throughput sites and effectively increases the dynamic range of the array. Impulse ,,,, mouth · Plant / j 千 刖 卬 OJA generates a pulse with an amplitude indicating the energy of the incident photon. Preferably, FIG. 3 is a block diagram, which schematically shows one of the processing channels 36 according to the preferred embodiment of the present invention. The signal corresponding to the detection source 32 is first borrowed by a charge-sensitive preamplifier 70, which is generally a low-noise fet amplifier to amplify, and a pulse is shaped; consider the wave state 7 2 to smooth and shape the signal output from the preamplifier 7 q Increase

C: \ 2D-roDE \ 90-06 \ 90106732.ptd Page 16 1225760 V. Description of the invention (13) The shaping control circuit 73 (for the sake of brevity and simplicity, not shown in Figure 2) provides t, appropriate control input to Pre-amplifier 70 and filter 72. It is determined that the degree of smoothing applied by the filter 72 is adjusted in accordance with the pulse rate of I experienced by the detector, that is, in response to the flux of X-ray photons incident on the array 30. The adjustment is used to increase the sensitivity of the channel with a relatively low photon incidence rate, while reducing the sensitivity of a channel with a high incidence rate, and allow ^ = pulse count throughput. Generally, as determined by the pulse shaping time of the channel, the sensitivity of the channel is set so that the channel 36 can adapt to at least 1,5 × work frequency f. The sensitivity of each channel or group of channels can be individually selected. Tweak ^. Based on the use of similar components and the design of conventional energy dispersion processing systems, those skilled in the art will understand that the components and design parameters for the channel 36 are appropriately selected. / Preferably, the one-level discriminator 7 4 is applied to the pulse shaper 7 2. The energy of the selection-range is transmitted to the 1-bit counting circuit ^. For comparison, each counter circuit 76 can integrate up to 108 photon counts depending on the width of the bus 60 through which it reads and the integration time between successive entries. The range of the discriminator 74 is selected by an energy threshold control ^ 52 |, so only the photons in the selected energy range are selected. Preferably, a total of 3,000 and Λ quantities Λ are selected for all channels 36 ′ and there is an energy passband not exceeding about ν · d dry electron volt width. In addition to excluding photons outside the selected passband, the upper limit set at the discriminator 74 is also eliminated due to pulse stacking, that is, when two photons arrive at almost the same time, a high amplitude two is generated. The energy discrimination provided by the array 30 and the circuit 34 is particularly useful for the angular distribution of X-rays reflected from the sample 22 by Γ. It allows emission from its wavelength due to fluorescence

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1225760 V. Description of the invention (14) Photons that are shifted during the emission process to distinguish reflected [photophotons (which and =, the incident photons from the source 24 are the same as each other ^ = there is no need for a separate order between the detector array 30) Colorimeter.) This energy can be used to measure the sample. This force can also be used to distinguish specific [fluorescent light or scattering transitions. Don't have to 'choose different energies for different channels 3 6 bis ": Generational or otherwise' at a number of different energies considered == monthly product limit. Also, although channel 36 is shown in Figure 3 as including only a single ; F includes multiple, parallel counting; the alternative implementation of the channel can wait for you to implement parallel counting :: ^^^^^ Don't ^ Here T crack ° σ 5 ten numbers on the right stem different energy levels at the same time A h at Corresponds to the number of x-photon photons detected 3 2. Please return to Figure 2 and observe that some complete processing channels 36 are collectively performed. A high voltage bias voltage =-a bias voltage common to all detectors Voltage. The self-limiting control circuit sets the energy level to identify the range for all channels (although as above, different ranges can also be set for different channels). The bit count output of the counter 76 is output to the common bus 60, Provided under the control of a 54 to be sequentially transmitted to the processing and analysis block 38. Bus control = double root, a chip reset and control circuit 56 provides the signal, and uses two counter addresses to address the bus circuit 58 Selection, 36 branches count U row addressing from each channel can be sequential or Random access read channel 36. Those skilled in the art will understand the design of these circuits. Circuit 58 can optionally be programmed and controlled to provide a channel with a relatively long overall flux and relatively low. ^ I / 、 Zhongxian C: \ 2D-C0DE \ 90-06 \ 90106732.ptd Page 18 1225760 V. Description of the invention (15) Each detector 32 is integrated into all the substrates in an array 30 'One circuit 52 may, however, contain a combination of electrical circuits or a hybrid multilayer sandwich circuit 34 structure, so that the present invention is limited in this way, 54, 56 may also be one on the road, one, several. This Equivalent layer configuration to form the entire array of arrays 3 0 for examples, and t corresponds to the channel 36 to form a channel unit 48, a single substrate. Optimally, all units 48,! = = In the circuit 34 For processing channels, a single conventional integrated circuit chip 62 is preferably generated and 58 is also preferably included on the chip 62. There are other integration modes. For example, a separate integrated circuit for each channel board, or an alternative ceramic or There are several integrated elements on the wafer carrier substrate 4 It can be included in a single conventional integrated channel unit 48 and then combined in a mixed or alternative arrangement on a printed circuit board to line 30. Those skilled in the art will be able to design multiple of it and circuit 34 Channels, these are all within the same range. The above-mentioned preferred embodiments are given and the full scope of the present invention is only subject to the application, which is better. That is, the control unit 48 contains a hybrid circuit. Circuit Either combined or with other electric devices is considered to be in the range of the number of components. 20 System 22 Sample 24 X-light source 26 Focusing monochromator 28 Small area 30 Array

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1225760 V. Description of the invention (16) 32 Detector 34 Processing circuit 36 Processing channel 38 Processing and analysis block 40 Display 42 Reflected photon flux distribution 48 Unit 50 Voltage bias circuit 52 Control circuit 54 Control circuit 56 Control circuit 58 Confluence Bus circuit 60 Busbar 62 Integrated circuit chip 70 Sensitive preamplifier 72 Amplifier 73 Gain and shaping control circuit 74 Level detector 76 Counter circuit

C: \ 2D-CODE \ 90-06 \ 90106732.ptd Page 20 1225760 Brief description of the drawings Figure 1 is a schematic diagram of a system for X-ray reflection measurement according to a preferred embodiment of the present invention; Figure 2 FIG. 3 is a schematic block diagram illustrating an X-ray detection device used in the system of FIG. 1 according to a preferred embodiment of the present invention; and FIG. 3 is a schematic block diagram illustrating the apparatus according to a preferred embodiment of the present invention. Signal processing channel. a 〇

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Claims (1)

1225760 6. Scope of patent application __ The processing channel contains a discriminator, which removes the photon signal. How to indicate that it is outside the predetermined energy range. 9) For the device in the scope of patent application No. 8, a threshold control circuit, which is adjusted, the processing circuit includes a signal processing channel including a counter, and the clothes of a member, where, The number of photons of each detector, and i 1: ~ The predecessor of this ® counts the number of incident & ^ ,, which are common to the channel, and the processing circuit includes one for many numbers. The busbar 'receives and outputs the respective photon meters from the channel. For example, any one of the scope of the patent application] to 5 photodetectors strike the X-rays received from the sample. , Eight, 5 ^, 1 q i ±. ° Disintegrate the fluorescent X-ray emitted from the received sample. 13. If the scope of the patent application is any one of the 1st to 5th monochromator, so the sample is the actual monochromatic;-the light in the predetermined energy channel 1 package 4 · including as claimed Λ patent Λ Wai 13 The device, in which the signal processing pass, is rounded to remove signals corresponding to photons of a predetermined energy that are outside the predetermined energy range. 15. —A method for the analysis of light in a sample, including: irradiating the sample with X-rays; detectors in an array, X-rays from the sample at predetermined positions, the detectors responding to incident light Electrical signals are generated thereon, and the heart Λ nine photons page 23 C: \ 2D-CODE \ 90-06 \ 90106732.ptd 1225760 6. Application for patent processing to process the signals from the detector array in the respective processing channels, Produces an output that indicates the arrival rate of photons incident at various locations and is determined by the energy distribution of the incident photons. 16. The method according to item 15 of the scope of patent application, wherein the processing signal includes providing a plurality of channels, each of which includes an integrated circuit configured on a soil substrate common to the respective detectors, for processing the signals generated by the detectors. signal. 1 7. The method according to item 15 of the scope of patent application, wherein processing signals includes processing signals according to processing parameters, which are independently adjustable for different channels. 18. The method according to item 17 of the scope of patent application, wherein the processing signal is included in the channel to adjust the processing parameter in response to the incident rate of photons at the detector. 19. The method according to any one of claims 15 to 18 in the scope of patent application, wherein processing the signal includes discriminating the signal level and eliminating signals corresponding to photons outside a predetermined energy range. 20. The method according to item 19 of the patent application range, wherein the processing signal includes counting the number of photons incident on each position within a predetermined energy range. 2 1. The method according to item 20 of the scope of patent application, wherein the irradiated sample comprises irradiating the sample at a selected energy with an actual monochromatic X-ray, and wherein the discriminating signal level includes its rejection corresponding to a predetermined energy Outside the range, the signal of the photon of the selected energy of the monochromatic X-ray is included. 22. The method of any one of claims 15 to 18 in the scope of patent application, wherein receiving X-rays includes receiving X-rays reflected from a sample. 2 3. The method according to any one of claims 15 to 18 in the scope of patent application, wherein receiving X-rays includes receiving fluorescent X-rays emitted by a sample. C: \ 2D-CODE \ 90-06 \ 90106732.ptd Page 24 1225760 Sixth, the scope of patent application 24. A radiation detection device comprising: an array of radiation-sensitive detectors that generates electrical signals in response to radiation photons incident thereon; and a processing circuit including: a plurality of signal processing channels, each The signal from the detector includes a number of photons counted as well as the channel_combined processing from a respective number of counters, whose counts are incident to the respective detections, which are received from the channels and output a common flow that is common to many channels. Line up individual photon counts. 25. The device as claimed in item 24 of the scope of patent application, wherein the signal processing pass ^ 3 = don't be 'its rejection corresponds to photons outside the predetermined energy range, so the counter only counts photons within the predetermined energy range . Person 2-6. The device as claimed in claim 25, wherein the processing circuit includes a threshold control circuit which adjusts the predetermined energy range of the discriminator. 27. The device of any one of claims 24 to 26, wherein the array of the detector includes an array of radiation-sensitive diodes. 8 28. If the device under the scope of patent application No. 27, which is a silicon diode detector. ㊁a 29. The device according to any one of claims 24 to 26 in the scope of patent application, wherein each of the plurality of signal processing channels includes an integrated circuit, which is provided with a substrate common to a common detector. One person each 30. For the device in the scope of patent application No. 29, among them, there is a semiconductor chip in the United States, including a clay package that belongs to many signal processing channels. Carcass C: \ 2D-CODE \ 90-06 \ 90106732.ptd