JPH11200045A5 - - Google Patents

Info

Publication number
JPH11200045A5
JPH11200045A5 JP1998017906A JP1790698A JPH11200045A5 JP H11200045 A5 JPH11200045 A5 JP H11200045A5 JP 1998017906 A JP1998017906 A JP 1998017906A JP 1790698 A JP1790698 A JP 1790698A JP H11200045 A5 JPH11200045 A5 JP H11200045A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998017906A
Other languages
Japanese (ja)
Other versions
JPH11200045A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP1790698A priority Critical patent/JPH11200045A/ja
Priority claimed from JP1790698A external-priority patent/JPH11200045A/ja
Publication of JPH11200045A publication Critical patent/JPH11200045A/ja
Publication of JPH11200045A5 publication Critical patent/JPH11200045A5/ja
Pending legal-status Critical Current

Links

JP1790698A 1998-01-13 1998-01-13 蒸着装置のクリーニング方法 Pending JPH11200045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790698A JPH11200045A (ja) 1998-01-13 1998-01-13 蒸着装置のクリーニング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790698A JPH11200045A (ja) 1998-01-13 1998-01-13 蒸着装置のクリーニング方法

Publications (2)

Publication Number Publication Date
JPH11200045A JPH11200045A (ja) 1999-07-27
JPH11200045A5 true JPH11200045A5 (enExample) 2005-08-18

Family

ID=11956797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790698A Pending JPH11200045A (ja) 1998-01-13 1998-01-13 蒸着装置のクリーニング方法

Country Status (1)

Country Link
JP (1) JPH11200045A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5061119B2 (ja) * 2006-11-28 2012-10-31 株式会社アルバック 巻取式真空成膜装置の運転方法および巻取式真空成膜装置
JP5157935B2 (ja) * 2009-01-22 2013-03-06 住友金属鉱山株式会社 ロール・ツー・ロール真空成膜装置による成膜方法及びそのロール清掃方法

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