JPH11191581A - Handling robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent falling of dust on the conveying stage of a robot-linking mechanism. SOLUTION: Conveying stages 8a and 8b for mounting a material to be conveyed are provided at the tip part and perform extending and shrinking actions. First and second robot links B1 and B2 comprising arms and links, which operate the respective conveying stages 8a and 8b in emerging and hiding operations are rotatably provided on the coaxial state. In this case, the respective robot linking mechanism B1 and B2 are operated to appear and disappear in the position-deviated direction in the turn direction. At the same time as the turn supporting points, which link the respective arms and links of the respective robot linking mechanisms B1 and B2, the rotation supporting point, which is linked to the link passing over the other material to be conveyed at the appearing and disappearing operation, is located at the side lower than the material to be conveyed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, and the like, in which a plurality of process chambers are provided around a single transfer chamber, and processing is performed in each process chamber. Multi-chamber type manufacturing in which a thin plate-like work such as a wafer to be transferred is transferred from one process chamber to another process chamber by a handling robot provided in the transfer chamber via a transfer chamber. The present invention relates to the handling robot in the apparatus.

[0002]

2. Description of the Related Art A multi-chamber type semiconductor manufacturing apparatus is shown in FIG. 1 and a process chamber station 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers is provided around a transfer chamber 1.
And a work transfer station 3 for transferring works to the outside, and a vacuum state is always maintained in the transfer chamber 1 by a vacuum device.

The transfer chamber 1 is shown in FIG.
In they become as shown, Yes includes possible handling robot A ₁ in the center of this pivoting, in the peripheral wall, and each process chamber stations 2a, 2b, 2c, 2
On the partition wall 5 facing the d, 2e and the work transfer station 3, there is provided a gate 6 serving as an entrance of the work to each process chamber station. The gate 6 is opened and closed by a gate valve (not shown) provided inside the transfer chamber 2 so as to face each gate 6.

As a conventional handling robot used in this kind of semiconductor manufacturing apparatus, a so-called frog-leg type dual-arm handling robot A ₁ shown in FIGS. 2 to 6 (first conventional robot) is used. And a handling robot A ₂ of the same direction operation as shown in FIGS. 7 to 9 (second conventional technique, USP 564).
No. 7724) Further, as shown in FIGS. 10 to 12, an independently-operating type handling robot A ₃ (third one) in which two transfer tables are independently movable into and out of the process chamber and are rotatable. (Prior art) is known.

[0005] The frog-leg type double-arm handling robot A1 of the _first prior art is shown in FIGS.
It is shown as follows.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, two transfer tables 8a and 8b having the same shape are located on both sides with respect to the center of rotation, and one end of two links 9a and 9b of the same length is provided at the base of each transfer table 8a and 8b. Are connected. One end of each of the two links 9a, 9b is connected to the carriage 8a,
The link 9a and 9b are connected to the transfer table 8a and 8b in a completely symmetrical direction with respect to each of the transfer tables 8a and 8b. One of the two links connected to the transport tables 8a and 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The distal ends of two links 9a and 9b connected to the carriages 8a and 8b are as shown in FIG. 4 (a). The gears 9c, 9c mesh with each other and are connected by a gear structure.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link between the links 9a and 9b may be replaced by a belt 9d crossed as shown in FIG. 4B instead of a gear.

FIG. 5 shows a mechanism for independently rotating the arms 7a and 7b. The bases of the arms 7a and 7b are ring-shaped, and the ring-shaped bosses 10a and 10b are rotatably supported on the transfer chamber 1 so as to be coaxial with the center of rotation.

On the other hand, disc-shaped bosses 11a and 11b are arranged inside the two ring-shaped bosses 10a and 10b so as to face each other and are concentric with each other. Is the magnetic coupling 12a,
At 12b, they are magnetically coupled via an airtight partition 17.

The rotating shafts 13a, 13b of the disc-shaped bosses 11a, 11b are arranged concentrically.
The respective rotating shafts 13a, 13b are connected to output portions of motor units 14a, 14b which are concentrically supported by the frame 1a of the transfer chamber 1 and are displaced in the axial direction.

The motor units 14a and 14b are integrally connected to a motor 15 using, for example, an AC servomotor and a reducer 16 having a large reduction ratio using a harmonic drive (trade name). Each reduction gear 1
The output units 6 and 16 are connected to the base ends of the rotating shafts 13a and 13b. The inside of the transfer chamber 1 in which the arms 7a and 7b are located is maintained in a vacuum state by the partition wall 17.

[0012] (a) in FIG. 6, (b) is intended to show the effect of a conventional handling robot _{A 1} described above, FIG. 6
As shown in (a), when both arms 7a, 7b are diametrically symmetrical with respect to the center of rotation, both transport tables 8
The links 9a and 9b are rotated so that the links 9a and 9b are most widened relative to the links a and 8b, and accordingly, both the carriages 8a and 8b are moved toward the center of rotation.

In this state, by rotating both arms 7a and 7b in the same direction, both carriers 8a and 8b are rotated with respect to the center of rotation while maintaining the position in the radial direction. Further, from the state shown in FIG. 6A, both arms 7a and 7b are
By rotating them in directions approaching each other (opposite directions), as shown in FIG.
The transfer table 8a, which is located on the side where the angle formed by b becomes smaller, is pushed by the links 9a and 9b and protrudes outward in the radial direction, so that the process chamber is provided adjacent to the transfer chamber 1 outward in the radial direction. Station 2a,
2b, 2c, 2d, 2e and 3 enter the process chamber of one station.

At this time, the other carrier is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a, 7b and the links 9a, 9b.

On the other hand, the handling robot A2 of the _second prior art is shown in FIGS. 7 to 9, and each of the transfer tables 8a, 8b of the first and second transfer table devices 20a, 20b. 8b is operated in the same direction, and turns as a whole. And both carrier units 2
Reference numerals 0a and 20b are as shown in FIGS. 7 and 8, and a pair of links 21 is provided for each of the transport tables 8a and 8b.
a, 21b, 22a, and 22b are connected to each other through a flock leg type carriage position regulating mechanism, and arms 23a, 23b, and 2 are connected to respective ends of the links 22a to 23d.
4a and 24b are connected.

One arm 23a of the first carrier 20a and the other arm 24b of the second carrier 20b are integrally connected by screws 25a, and both arms 23a, 24b Are integrally coupled to the first rotation shaft 26a of the first and second rotation shafts 26a and 26b arranged concentrically by a screw 25b.

Further, the other arm 23b of the first transfer table device 20a and one arm 2b of the second transfer table device 20b
4a is integrally connected to the second rotating shaft 26b by a screw 25d, and is integrally connected to the second rotating shaft 26b by a screw 25d.

In this configuration, both rotating shafts 26a, 26
By rotating b in opposite directions, both carrier units 20a and 20b perform an operation of protruding and retracting the respective carrier 8a and 8b.

That is, the first rotating shaft 26a is rotated to the left as viewed from above in FIG. 7, and the second rotating shaft 26b is rotated to the right as viewed from above in FIG. As described above, the first transfer table device 20a has the transfer table 8a most immersed therein, and the second transfer table device 20b has the transfer table 8b most protruded therefrom.

From the above state, the first and second rotating shafts 2
By rotating the carriages 6a and 26b in the opposite directions to the rotation limit thereof, the two carrier units 20a and 20b go through the steps shown in FIGS.
The transfer table 8a of the transfer table apparatus 20a is protruded and the transfer table 8b of the second transfer table apparatus 20b is retracted. At this time, the second transfer table 8b is moved above the first transfer table 8a.

In the second prior art, as shown in FIG. 8, each link 21a to 22d and each arm 23a
To 24d are connected via bearings, respectively. In particular, the connection between the links 22a and 22b and the arms 24a and 24b of the second transfer table device 20b by bearings is located higher than the second transfer table 8b. The position is naturally higher than the first transfer table 8a which is lower than the second transfer table 8b.

A _third prior art handling robot A3 includes a first robot A3 as shown in FIGS.
The second transfer table devices 28a and 28b are capable of performing the retracting operation and the turning operation of the transfer tables 8a and 8b completely independently.

That is, four rotating bosses 29a, 29b, 29c, and 29d, each of which is independently rotatable, are provided coaxially, and the first and second rotating bosses 29a, 2 are provided.
9b, the first and second arms 3 of the first transfer table device 28a
0a, 30b are the third and fourth rotating bosses 29c,
29d, the first and fourth transfer table devices 28c and 28d
-The second arms 30c and 30d are respectively connected.

The first and second rotary bosses 29a, 2
9b, the first and second arms 30a, 30b of the first transfer table device 28a rotate toward and away from each other, and the first and second arms connected to these rotate. The first carrier 8a is moved in and out via the links 31a and 31b, and the third and fourth rotating bosses 29c and 29d are rotated in opposite directions.
The first and second arms 30c of the second transfer table device 28b,
30d rotate in the direction of approaching or moving away from each other, and the second carrier 8b is moved in and out via first and second links 31c and 31d connected to these.

The first and second rotary bosses 29a, 29
b rotates in the same direction, the first carrier table device 28a rotates, and the third and fourth rotating bosses 29c, 29d rotate in the same direction, thereby causing the second carrier table device 28a to rotate.
b are independently turned.

In the handling robot A3 of the _third prior art, the transfer table 8b of the second transfer table device 28b located above and the rotation fulcrum for connecting the arm and the link are provided with the following. The transfer table 8a of the first transfer table device 28a
Higher, and during the operation described above,
b and each joint frequently pass above the first transfer table device 8a.

[0027]

In the first handling robot A ₁ of the conventional [0005] By conveying table there are two, alternatively the two transport stand to each station, or Although it can be used continuously and expected to have the effect of a dual-arm robot, there are actually the following problems.

That is, when the order of the processes is determined and the wafers processed in each process chamber station are sent to each station in turn, there are wafers being processed or processed in each station. At this time, when a processed wafer in a certain station is replaced with an unprocessed wafer, the handling robot A1 of the _first prior art described above uses FIGS.
As shown in 7, firstly, the station 2e to the supporting the wafer W ₁ unprocessed one carrier table 8a tries to replace the transfer table 8b your free turning the handling robot A ₁ It faces (FIG. 13).

[0029] Then, you receive the wafer W ₂ processed the transfer table 8b of the person who has the vacant top of this by rush into the station 2e (Fig. 14), conveyed to the transfer chamber 1. Then, handling robot A
The turning 180 degrees (FIG. 15), rush moving the carrier table 8a supporting the wafer W ₁ unprocessed from to face the said station 2e to which the station 2e in (Fig. 1
6) to carry the wafer W ₁ unprocessed to this station 2e within carrier table 8a the emptied is moved backwardly to the transfer chamber 1 (Fig. 17).

As described above, the conventional handling robot has to rotate 180 degrees every time a wafer is exchanged with respect to one station, which causes a problem that the cycle time of the wafer exchange becomes long. Was.

On the other hand, in the above-described handling robot A2 of the _second prior art, the two carrier units 20 are used.
Since the transfer tables 8a and 8b are moved in and out in the same direction, the above-described problem in the first related art is solved.

However, in the handling robot A2 of the _second prior art, during the transfer operation, one of the transfer tables passes over the other transfer table, and
Since the rotation fulcrum connecting the arm and the link of one carrier is higher than the positions of the carriers 8a and 8b of both carriers, the wafer is placed on the carrier. There is a problem in that dust (particles) generated from one of the transfer tables and from the rotation fulcrum drops and contaminates the dust.

The handling robot A3 according to the _third prior art described above is provided with two carriage units 28a and 28b.
Extremely high degree of freedom of the transporting operation by, there is an advantage of high versatility, even in the handling robot A _3, as described above, the upper conveyor table of one carrier table apparatus, the other carrier table Since the rotating fulcrum connecting the link with the transfer table and the arm of the device frequently passes, the dust generated at each of the above-mentioned parts falls onto the wafer placed on the lower transfer table and contaminates it. There is a problem that is.

The present invention has been made in view of the above, and it is only necessary to rotate the handling robot at a small angle of about 45 ° to 60 ° with respect to one process chamber station, and the processed robot in the station is processed. Wafers and unprocessed wafers in the transfer chamber can be exchanged, dust scattered on one of the transfer tables or joints will not fall to the transfer table side, and a handling robot will be installed. It is an object of the present invention to provide a handling robot capable of effectively utilizing a space in a height direction of a transfer chamber.

[0035]

In order to achieve the above object, according to the first aspect of the present invention, there is provided a handling robot, comprising: a transfer table (8a, 8b) for placing an object to be transported at a tip end; ), The first and second robot link mechanisms comprising an arm and a link for moving the respective carriages (8a, 8b) in and out of the respective carriages (8a, 8b) are coaxially pivotably provided. The robot link mechanism moves up and down in a direction displaced in the turning direction, and passes over the other transported object at the time of the retracting operation, of the rotation fulcrum connecting each arm of each robot link mechanism and the link. The rotation fulcrum connected to the link is located below the transported object.

In this configuration, the first and second transfer tables are moved in and out of the direction slightly shifted in the turning direction by extending and contracting the first and second robot link mechanisms. Then, both robot link mechanisms are turned integrally.

At this time, the two robot link mechanisms are
The transport tables do not overlap in the vertical direction, and the rotation fulcrum connecting each arm of each robot link mechanism and the link does not pass above the transport table that moves in and out.

Therefore, according to this configuration, each of the two robot link mechanisms comes and goes in a direction in which the positions are shifted in the turning direction, so that the respective carriages of the two robot link mechanisms do not overlap each other vertically. It is possible to eliminate an adverse effect such as dust scattered on one transfer table side falling on a transferred object on the other transfer table side.

Further, when the robot link mechanism moves in and out, the rotation fulcrum connecting the arm and the link constituting the robot link mechanism does not pass above the transfer table. It is possible to prevent contamination of the transferred object on the transfer table from falling dust.

The handling robot according to a second aspect of the present invention is the handling robot according to the first aspect, wherein, of the links connected to the respective carriages of the first and second robot link mechanisms, When each robot link mechanism moves up and down, the connecting portion to the arm of the link that passes above one of the conveyed objects is formed into a U-shape so as to straddle the operating range of the one conveyed object, and The tip of the arm was connected at a lower position. Thus, one of the transfer tables and the arm and the link connected thereto are passed through the inside of the curved link without interfering with them.

The handling robot according to claim 3 is the handling robot described above,
The first and second robot link mechanisms are configured such that the respective transport tables are displaced in the turning direction over a range that does not overlap in the vertical direction. In this configuration, the first and second two Each transfer table of the robot link mechanism can alternately project and retract in a slightly rotated direction, thereby turning the handling robot to a single station over a small rotation angle. Just replace the processed wafers in the process chamber station with the unprocessed wafers in the transfer chamber, greatly reducing the cycle time for exchanging workpieces for both wafers. it can.

Further, in the handling robot according to the fourth aspect, the transfer tables of the first and second robot link mechanisms are arranged on the same plane in the direction of the turning axis. Thereby, the transfer table that moves in and out of the transfer chamber by the robot link mechanism becomes the same mechanism in the height direction, whereby the height width of the gate of the transfer chamber can be reduced to one transfer table. This can be reduced in size.

Further, in the handling robot according to the fifth aspect, the transfer table (8a,
8b), the first and second robot link mechanisms including the arms and the links that move in and out of each of the transfer tables (8a, 8b) can be coaxially turned by extending and retracting. The transfer tables (8a, 8b) are provided at the same position in the turning direction and displaced in the vertical direction, and each robot link mechanism moves out and in at the same position in the turning direction, and is connected to each arm of each robot link mechanism. The rotation fulcrum connecting the links is located at a position lower than each transported object.

In this configuration, the carrier table is moved up and down in the same direction while being vertically displaced by the moving operation of the robot link mechanism. In this configuration, since the rotation fulcrum connecting each arm of each robot link mechanism and the link is at a lower position than each carrier, the dust dropped from the rotation fulcrum part falls to each carrier. Therefore, contamination of the transferred object such as a wafer transferred by the transfer table with the dust can be prevented.

[0045]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to FIGS. 18 to 26, a first embodiment shown in FIGS. 27 to 34, a second embodiment shown in FIGS. 27 to 34, a third embodiment shown in FIG. Further FIG.
The fourth embodiment will be described with reference to FIGS. 7 and 38, and the fifth embodiment will be described with reference to FIGS. In this description, the same components as those in the above-described conventional configuration are denoted by the same reference numerals, and description thereof is omitted.

(First Embodiment) FIGS. 18 to 21 show a handling robot A according to a first embodiment of the present invention.
₄ , three first, second, and third ring-shaped bosses 40a, 40b, and 40 at the center of the transfer chamber 1.
40c are concentrically superimposed in order from the bottom and are rotatably supported individually via bearings (not shown).

The ring-shaped bosses 40a, 40
A disc-shaped boss 4 is provided on the inside where b and 40c face each other.
The transfer chambers 1a, 41b, and 41c are individually rotatably supported on the frame 1a side of the transfer chamber 1 via bearings (not shown).

Each of the ring-shaped bosses 40a opposed to each other
To 40c and the disc-shaped bosses 41a to 41c are magnetically coupled by magnet couplings 42a, 42b, 42c. In order to maintain a vacuum state in the transfer chamber 1, a sealing partition 17 is provided between the ring-shaped boss and the disc-shaped boss. Note that when the inside of the transfer chamber 1 in a handling robot A ₄ is good in the same atmosphere, the partition wall 17 is not necessary, so that each ring-shaped boss and a circular plate-shaped boss may be in an integral structure Become. This is the same in each of the following embodiments.

Each of the disk-shaped bosses 41a to 41c is provided with a rotating shaft 43 concentrically arranged on these shaft centers.
a, 43b, 43c. Among these rotation shafts, the first and second rotation shafts 43a and 43b are hollow, and the second rotation shaft 43b is inserted into the first rotation shaft 43a, and the second rotation shaft 43b The third rotating shaft 43
c is inserted.

Then, the first and third rotating shafts 43a, 43c
Is connected to the output shaft 45a of the first motor unit 44a via a connection mechanism such as a timing belt. The second rotating shaft 43b is connected to the output shaft 45b of the second motor unit 44b via a connecting mechanism such as a timing belt.

As the motor units 44a and 44b, a combination of a servomotor and a speed reducer such as a harmonic drive is used, and the respective output shafts 45a and 45b are used.
Is decelerated with an extremely large reduction ratio, and forward rotation and reverse rotation are accurately controlled. Each output shaft 45a, 45b and each rotation shaft 43a, 43b, 43
and the connection rotation ratio of the connection mechanism for connecting the connection mechanism c and the connection mechanism c is the same.

The first ring-shaped boss 40a has a first arm 46a, the second ring-shaped boss 40b has second and third arms 46b and 46c, and the third ring-shaped boss 40c. Has a fourth arm 46d projecting in the radial direction. The lower surfaces of the distal ends of the first and second arms 46a and 46b are the third and fourth arms 46a and 46b.
Each of the upper surfaces of the distal ends of the arms 46c and 46d serves as a rotation fulcrum.

The radius of the rotation fulcrum of each of the arms 46a to 46d (the length from the center of the boss to the rotation fulcrum,
(The same applies hereinafter.) R has the same dimensions. And the first
The rotation fulcrums of the second arms 46a and 46b are at the same position in the axial direction of the rotation center of the ring-shaped boss, and the rotation fulcrums of the third and fourth arms 46c and 46d are the rotation center of the ring-shaped boss. At the same position in the axial direction, and higher than those of the first and second arms 46a and 46b.

One end of each of first, second, third, and fourth links 47a, 47b, 47c, and 47d having substantially the same rotation radius is rotatably connected to the rotation fulcrum of each of the arms 46a to 46d. Have been. That is, the first and second arms 4
6a and 46b are provided at the rotation fulcrum provided on the lower surface side of the tip.
-The tips of the second links 47a and 47b are connected. The tip portion is bent upward in an overhanging shape at the rotation fulcrum portion to the outside, thereby forming a U-shape. The first transfer table 8a is connected to the lower surfaces of the distal ends of the two links 47a and 47b via a transfer table attitude regulating mechanism, thereby forming a ^first robot link mechanism B1. At this time, the first and second links 47a, 47
The U-shaped rising height of b is such that the transfer table 8a is located above the ring-shaped boss, and the transfer table 8b of the _second robot link mechanism B2 described later, the links 47c and 47d, and the arms 46c and 46d. the first robotic link mechanism _{B 1} of the arm 46a, 46b and links 47a, are set to be a height that can be moved slip through between the respective 47b.

The third and fourth arms 46c, 4
One end of each of the third and fourth links 47c and 47d is connected to a rotation fulcrum provided on the upper surface of the tip of 6d.
The second transport table 8b is connected to the upper end side of the fourth link 47c, 47d via a transport table attitude regulating mechanism.
This second robotic link mechanism B ₂ is constructed.

At this time, the first robot link mechanism B ₁
The transfer table 8a is, for example, the first and second arms 46.
In a state in which a and 46b are in a straight line in the diameter direction, they are moved to the ring-shaped boss side, that is, in a so-called standby state. Similarly, the second robot link mechanism B
_{The second} transfer table 8b includes third and fourth arms 46c and 46d.
Are in a standby state when they are linearly aligned in the diameter direction.

The two carriages 8a and 8b are positioned on the same plane in the axial direction of the ring-shaped boss, and are displaced in the rotational direction of the ring-shaped boss by, for example, 45 °. FIG. 20 shows a stand-by state. From the stand-by state of the handling robot, the rotation of each ring-shaped boss causes the respective carriages 8a and 8b to move in and out in the radial direction of the ring-shaped boss. Is turned. Then, at this time, when one of the transport tables is made to protrude, the other transport table moves further inward from the standby state.

That is, the first and second ring-shaped bosses 40
a, a 40b, by rotating in opposite directions so as to approach the first carrier table 8a side of the robot link mechanism B ₁ coupled thereto, the first robotic link mechanism B ₁
Operates in the direction in which the transfer table 8a protrudes. The second robotic link mechanism B ₂ at this time performs the operation of this the carrier table 8b is retracted into the upper ring-shaped boss from the standby state.

Conversely, the second and third ring-shaped bosses 40b, 4
0c is connected to a second robot link mechanism B ₂ connected thereto.
By the rotation in opposite directions in a direction toward the transfer table 8b side, robotic link mechanism B ₂ of the second operates in the direction in which the carrier table 8b side projecting movement. The first robotic link mechanism B ₁ at this time, this the carrier table 8a
Performs an operation of sinking above the ring-shaped boss from the standby state.

In the movement of the carriages 8a and 8b of the two robot link mechanisms B ₁ and B ₂ , the distal ends of the third and fourth arms 46c and 46d are connected to the first and second arms 46.
a, 46b, so that they do not interfere with each other. Also, in the standby state shown in FIG.
By rotating .about.40c in the same direction, the handling robot is turned in the transfer chamber 1.

At this time, both robot link mechanisms B
_1, the carrier table 8a of B _2, the rotational direction of the deviation of 8b are slightly and for example 45 °, the turning angle of the entire robot at the time of wafer exchange for a single station corner at 45 °, the wafer The exchange cycle time can be shortened.

Further, since the two carriages 8a and 8b are displaced in the rotational direction, even if dust drops from one carriage, no adverse effect is exerted on the other carriage.

Further, all of the rotation fulcrums of the arms 46a to 46d and the links 47a to 47d are
a, since it is positioned below the 8b, even dust is dropped from the bearing structural part such as a ball bearing provided on the respective rotation support, even when turning the handling robot A _4, carrier table 8a , 8b do not traverse the falling dust, and therefore can protect the transfer tables 8a, 8b also from the dust falling from the rotation fulcrum, and the wafer mounted on the transfer tables 8a, 8b. Cleanliness can be maintained.

The amount of displacement of the transfer tables 8a, 8b of the robot link mechanisms B ₁ , B ₂ in the turning direction should be such that at least the transfer tables 8a, 8b do not overlap the turning direction of the center of rotation of the boss. Preferably, each carrier 8a, 8b
When a wafer is placed on the wafer, the amount of shift is set so that the two wafers can be shifted over a range where they do not interfere with each other.

[0065] Figure 26 Figure 22 shows the working steps in the first embodiment, in a state of mounting the wafer W ₁ unprocessed conveying platform of one of the robotic link mechanism B _1,
If you do not place the wafer, i.e., the vacant transport of robots linkage B ₂ has to rotate in a standby state so as to face the process chamber station 2e there is processed wafer W ₂ (Figure 22).

[0066] Then vacant towards the transport of robots linkage B ₂ the process chamber station 2e
By plunge within, it is placed on the unloading the wafer W ₂ of the treated (Figure 23). Next, the robot link mechanism B ₁ carrying table on which the unprocessed wafer W ₁ is placed is moved to
The whole rotates so as to face the process chamber station 2e for performing this processing (FIG. 24). The rotation angle at this time is only the amount of shift in the rotation direction of the two carriages, for example, about 4
5 °.

[0067] projects into the conveying platform of the robot link mechanism B ₁ that mounts the wafer W ₁ unprocessed in this state into the process chamber station stations within 2e sets the wafer W ₁ into the process chamber station ( (FIG. 25). Then, the empty carrier is immersed in the transfer chamber, and the processed wafer W on the other carrier is
₂ rotates toward the process chamber station 2a for performing the next process, and repeats the same operation as described above (FIG. 2).
6).

At the time of these operations, as described above, since the two transfer tables 8a and 8b do not overlap each other in the vertical direction, even if dust falls from one of the transfer tables, Is not contaminated, and since both of the carriages 8a and 8b are located at a position higher than the rotation fulcrum connecting the arms and the links, dust from the carriages 8a and 8b is removed from the upper surfaces of the carriages 8a and 8b. The wafer is protected.

In this configuration, since the height positions of the transfer tables 8a and 8b of both robot link mechanisms B ₁ and B ₂ are the same, the gate 6 of the transfer chamber 1 is
The transfer positions of the transfer tables 8a and 8b with respect to are the same.
Therefore, the size of the gate 6 in the height direction is large enough to allow one carrier to enter and exit, and can be reduced in the height direction.

[0070] Figure 30 (second embodiment) FIG. 27 shows a second embodiment the handling robot A ₅ of the present invention, the side surface of the first ring-shaped boss 50a first, second
Of the second ring-shaped boss 50b
A third arm 56c is provided on the side surface of the first arm, and a fourth arm 56d is provided on the top surface of the second ring-shaped boss 50b via a pillar 56e in a radial direction. The lower surface of the distal end of 56a is a rotation fulcrum, and the other arm is the rotation fulcrum of the upper surface of the distal end of each arm.

The radius R of the rotation fulcrum of each of the arms 56a to 56d is the same. The first, second, third, and fourth links 57a, 57b, and 5 of substantially the same length are provided at the rotation fulcrum of each of the arms 56a to 56d.
One end of each of 7c and 57d is rotatably connected. The distal end of the first link 57a connected to the rotation fulcrum provided on the lower surface side of the distal end of the first arm 56a is bent upward to overhang the rotation fulcrum at the distal end to form a U-shape. It has become. This first link 57a
The first transfer table 8a is connected to the lower surface of the distal end of the fourth link 57d via a transfer table attitude regulating mechanism.
This first robotic link mechanism B ₁ is being configured. At this time, the U-shaped rising height of the first link 57a is such that the transfer table 8a is located above the ring-shaped boss and the second robot link mechanism B ₂ described later.
Transfer table 8b and one arm 56c and link 57c
Can be moved through the space between the first arm 57a and the link 57a. Further, a second transfer table 8b is connected to the upper surfaces of the distal ends of the second and third links 57b and 57c via a transfer table attitude regulating mechanism, thereby forming a _second robot link mechanism B2. . And the transfer table 8 of these two robot link mechanisms B ₁ and B ₂
a and 8b are at the same position in the vertical direction without overlapping in the turning direction.

At this time, the handling robot A
_5, so that the second second-third arm 56b of the robot link mechanism B _2, 56c is in a standby state when it is straight in the diameter direction. The two transfer tables 8a and 8b in this standby state are displaced in the rotation direction of the ring-shaped boss, and this state (FIG. 29) becomes the standby state of the handling robot. From this state, the rotation of each ring-shaped boss is started. As in the first embodiment, each transfer table 8
The a and 8b are moved in and out in the radial direction of the ring-shaped boss, and the handling robot is turned in this standby state. The amount of displacement of the two carriages 8a and 8b in the rotation direction is the same as in the first embodiment. The position of the pedestal 56e is a position which is shifted from the axis of the ring-shaped boss in the middle of the shift angle α between the two transfer tables 8a and 8b and in a direction away from the transfer tables 8a and 8b.

FIGS. 31 and 32 show an example of actual use of the second embodiment, in which each of the robot link mechanisms B ₁ , B
_{The second} arm and link are curved in the horizontal direction so as not to interfere with the gate 6 of the transfer chamber 1 or the pillar 56e provided on the top surface of the ring-shaped boss 50b when the arm and the link move.

[0074] and Figure 33 (a), (b) , as shown in (c), when the first robot link mechanism _{B 1} is operated projects, the first link 57a of this second robotic link While moving the upper conveyor table 8b mechanism B _2, the rotation fulcrum and the first link 57a and the first arm 56a is connected is located below the second carrier table 8b Even if dust is dropped from the fulcrum, the wafer on the transfer table 8b will not be contaminated.

In this embodiment, the rotation fulcrum of the connecting portion between the fourth arm 56d and the link 57d connected to the carrier 8a of the _first robot link mechanism B1 is the first fulcrum.
Although the position is higher than the second transfer tables 8a and 8b,
Since this rotation fulcrum is farther from the first carrier 8a and does not pass above the second carrier 8b during the retracting operation, there is no effect even if dust is dropped therefrom.

Further, in the second embodiment, the fourth arm 56d does not depend on the pillar 56e.
As shown in FIG. 34, the fourth arm 56d is fixed to the third ring-shaped boss 50b.
c (or the outer peripheral surface of the ring-shaped boss 50b at a position adjacent to the base of the arm 56c), the same operations as described above can be performed, and the respective carriers 8a, 8b are immersed. The movement in the direction can be further increased.

[0077] (Third Embodiment) FIG. 35 is shows a handling robot A ₆ according to a third embodiment of the present invention, the side surface of the first ring-shaped boss 60a first and second arms 66a, 66b are provided with third and fourth arms 66c, 66d radially protruding from the side surface of the second ring-shaped boss 60b, respectively. And each of the arms 66a-
The first, second, and third substantially equal lengths are provided at the 66d rotation fulcrum.
-One end of the fourth link 67a, 67b, 67c, 67d is rotatably connected. And the first arm 66
a connected to a rotation fulcrum provided on the lower surface side of the tip
Of the link 67a is bent upward to overhang the rotation fulcrum portion at the front end to form a U-shape. The tip lower surface side of the first link 67a and the fourth link 67d, the first and transfer table 8a is connected via a carrier table posture regulating mechanism, which first robotic link mechanism B ₁ is the It is configured. At this time,
The U-shaped rising height of the first link 67a is:
Arm 66c of _second robot link mechanism B2 described later
And the link 67c are connected to the first arm 67a and the arm 66.
It is designed to be able to move through the space between a. A second transfer table 8b is connected to the upper surface of the distal end of each of the second and third links 67b and 67c via a transfer table attitude regulating mechanism, thereby forming a _second robot link mechanism B2. .

At this time, the first robot link mechanism B ₁
The transfer table 8a includes first and fourth arms 66a, 66d.
Are immersed in the ring-shaped boss side in a state of being linear in the diameter direction, that is, a so-called standby state.
Similarly, the transfer table 8 of the _second robot link mechanism B2
b is in a standby state when the second and third arms 66b and 66c are aligned in the diameter direction. The two transfer tables 8a and 8b in this standby state are displaced in the rotation direction of the ring-shaped boss, and this state becomes the standby state of the handling robot.
By the rotation of each ring-shaped boss, each of the transport tables 8a and 8b is moved in and out in the radial direction of the ring-shaped boss similarly to the first embodiment, and the handling robot is rotated in this standby state. I have. Both transfer tables 8a, 8b
Are the same as those in the first embodiment.

[0079] In the third embodiment, as in the second embodiment, when the first robot link mechanism B ₁ is operated retractable coupling portion between the first arm 66a and the link 67a is Since it does not pass over the second transfer table 8b, contamination of this portion is prevented.

In the first to third embodiments of the present invention, the connection between the U-shaped link and the arm is performed on the lower surface of the tip of the arm. May be performed on the top surface side of the tip. As a result, the field product required for coupling the connecting portion between the arm and the link can be reduced.

FIG. 36 shows an example in which the distal end of a link whose distal end is curved in a U-shape is connected to the upper surface of the distal end of this arm. This is the case according to the second embodiment described above,
The distal end of a first link 57a having a U-shaped distal end is connected to the upper surface of the distal end of the first arm 56a.

In this case, the first link 57a is connected so that the distal end of the first link 57a protrudes from the upper surface of the first arm 56a toward the longitudinal direction of the arm 56a. Therefore, as shown in FIG. The tip of the arm 56a and the first link 57a
Are connected so that the line L connecting to the tip of the inner side is inclined so that the lower part inside is lower.

For this reason, a gate valve disposed at an inclined position in the transfer chamber 1 as shown in FIG. 36 in order to open and close the gate 6 of the transfer chamber 1 from an obliquely lower position. 58, and the positional relationship between the distal end of the first arm 56a and the first link 57a located at the lowermost position in the transfer chamber 1 and the gate valve 58,
The space inside the transfer chamber 1 can be accommodated without generating a useless space.

[0084] (Fourth Embodiment) FIG. 37, FIG. 38 shows a handling robot _{A 7} of the fourth embodiment of the present invention.
This is of the same-direction operation type as in the above-mentioned second prior art, in which the first and second transfer tables 8a and 8b are arranged vertically at the same position in the turning direction.

Of the first and second ring-shaped bosses 70a and 70b arranged vertically and concentrically, the first and second arms 76a and 76 are provided on the side surfaces of the lower first ring-shaped boss 70a.
b, the third ring-shaped bosses 76c are respectively provided on the side surfaces of the second ring-shaped boss 70b so as to protrude in the radial direction. The fourth arm 71d is fixed to the base of the third arm 76c.

The radius of each rotation fulcrum of each of the arms 71a to 71d is the same. The first, second, third, and fourth links 77a, 77b, 77 having substantially the same length are provided at the rotation fulcrum of each of the arms 76a to 76d.
One ends of c and 77d are rotatably connected. The distal end of the first link 77a connected to the rotation fulcrum provided on the top surface of the distal end of the first arm 76a is bent upward at the rotation fulcrum at the distal end so as to overhang outward. It has become. The tip lower surface side of the first link 77a and the fourth link 77d, the first and transfer table 8a is connected via a carrier table posture regulating mechanism, which first robotic link mechanism B ₁ is the It is configured. At this time, the U-shaped rising height of the first link 77a is such that the transfer table 8a is located above the ring-shaped boss, and the transfer table 8b of the _second robot link mechanism B2 and one of the ones described later. The arm 76c and the link 77c can move through the space between the first arm 77a and the arm 77a. Further, a second transfer table 8b is connected to the upper surfaces of the distal ends of the second and third links 77b and 77c via a transfer table attitude regulating mechanism, thereby forming a _second robot link mechanism B2. .

The operation of the fourth embodiment is similar to the operation of the second embodiment.
Is substantially the same as the embodiment of, by the operation of both the robotic link mechanism B _1, B _2, first and second carrier table 8a, 8
b is moved in and out from the same position in the same direction.

In this embodiment, as shown in FIG. 37, a rotation fulcrum, which is a connecting portion between each arm and each link, is a first fulcrum.
By being lower than the second transfer tables 8a and 8b, dust falling from these rotation fulcrums is reduced.
8b does not fall on the wafer.

[0089] Figure 41 Figure 39 (Fifth Embodiment) shows a handling robot A ₈ according to a fifth embodiment of the present invention, which first and second robotic link mechanism B
_1, B ₂ is obtained by adapted to operate independently, it relates to an improvement of the third handling robot of prior art shown in Figures 10-12.

That is, four rotating bosses 80a, 80b, 80c, and 80d, each of which is independently rotatable, are provided coaxially, and the first and second rotating bosses 80a to 80d are respectively provided on the side surfaces thereof. 2nd, 3rd, 4th arm 86
a, 86b, 86c, and 86d are projected radially, and the upper surfaces of the respective tips serve as rotation fulcrums.

The first, second, third, and third rotating shafts having substantially the same rotating radius are provided at the rotating fulcrum of each of the arms 86a to 86d.
One ends of the fourth links 87a, 87b, 87c, 87d are rotatably connected. That is, the distal ends of the first and second links 87a and 87b connected to the rotation fulcrums provided on the upper surfaces of the distal ends of the first and second arms 86a and 86b are connected. This tip portion is bent upward at the rotation fulcrum portion so as to overhang outwardly, and has a U-shape. Then, on the upper surface side of the tip of both links 87a, 87b,
The first transfer table 8a is connected to the first transfer table 8a via the transfer table attitude regulating mechanism, and thereby the first robot link mechanism B _{1 is connected.}
Is configured. At this time, the U-shaped rising height of the first and second links 87a and 87b is
a is located above the ring-shaped boss, and a second
Arm 86c of the robot link mechanism _{B 2} of, 86d and the link 87c, 87d is the respective link 87a, 87b and arms 86a, are to be moved to slip through between 86b.

The third and fourth arms 86c, 8c
One end of each of the third and fourth links 87c and 87d is connected to a rotation fulcrum provided on the upper surface of the tip of 6d.
Fourth link 87c, which is connected the second carrier table 8b via a transfer table attitude regulating mechanism to the tip top of the 87d, whereby the second robot link mechanism B ₂ is constructed.

[0093] In this fifth embodiment, first and second rotatable boss 80a, 80b is first robotic link mechanism B ₁ by are rotated in the opposite directions, which the carrier table 8a infested dynamic Bosses 80a, 8
0b is by rotating in the same direction, the first robotic link mechanism B ₁ is being pivoted.

Similarly, the third and fourth rotary bosses 80c, 80
By rotating d as described above, the carriage 8b of the _second robot link mechanism B2 operates so as to move in and out, and is turned.

In the fifth embodiment, both the first and second transfer tables 8a and 8b are vertically displaced.
Also in this embodiment, since both the carriages 8a and 8b are higher than the rotation fulcrum connecting the respective arms and the links, the dust falling from the respective rotation fulcrum is carried by the carriages 8a and 8b. The transferred object is protected. Further, by preventing the upper and lower transport tables from overlapping during the expansion / contraction operation, dust from the upper transport table attitude regulating mechanism does not fall on the lower transported object.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a handling robot according to the first conventional technique.

FIG. 3 is a perspective view showing a first prior art handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIG. 5 is a cross-sectional view showing an arm rotating mechanism of a handling robot according to a first conventional technique.

FIGS. 6 (a) and (b) are explanatory diagrams of the operation of a handling robot according to a first conventional technique.

FIG. 7 is a plan view of a second prior art handling robot.

FIG. 8 is a sectional view of a second prior art handling robot.

FIGS. 9 (a), (b), (c), (d), and (e) are explanatory diagrams of the operation.

FIG. 10 is a front view of a third prior art handling robot.

FIG. 11 is a plan view of a third prior art handling robot.

FIG. 12 is a perspective view of a third prior art handling robot.

FIG. 13 is an operation explanatory diagram of one handling station of the first prior art handling robot.

FIG. 14 is an operation explanatory view of one handling station of the first prior art handling robot.

FIG. 15 is an explanatory diagram of the operation of one handling robot according to the first prior art with respect to one station.

FIG. 16 is an explanatory diagram of an operation for one station of the handling robot of the first conventional technique.

FIG. 17 is a diagram illustrating the operation of one handling robot according to the first prior art with respect to one station.

FIG. 18 is a sectional view showing a boss according to the first embodiment of the present invention.

FIG. 19 is a front view showing the first embodiment of the present invention.

FIG. 20 is a plan view showing the first embodiment of the present invention.

FIG. 21 is a perspective view showing a first embodiment of the present invention.

FIG. 22 is an operation explanatory diagram for one station in the first embodiment of the present invention.

FIG. 23 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 24 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 25 is an operation explanatory diagram for one station in the first embodiment of the present invention.

FIG. 26 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 27 is a sectional view showing a boss according to a second embodiment of the present invention.

FIG. 28 is a front view showing a second embodiment of the present invention.

FIG. 29 is a plan view showing a second embodiment of the present invention.

FIG. 30 is a perspective view showing a second embodiment of the present invention.

FIG. 31 is a plan view showing a modification of the second embodiment of the present invention.

FIG. 32 is an operation explanatory view showing a modification of the second embodiment of the present invention.

FIGS. 33 (a), (b) and (c) are action explanatory views showing a modification.

FIG. 34 is a perspective view showing a modification of the second embodiment of the present invention.

FIG. 35 is a perspective view showing a third embodiment of the present invention.

FIG. 36 is a sectional view showing a positional relationship between a handling robot and a gate valve according to a second embodiment of the present invention.

FIG. 37 is a front view showing a fourth embodiment of the present invention.

FIG. 38 is a perspective view showing a fourth embodiment of the present invention.

FIG. 39 is a front view showing a fifth embodiment of the present invention.

FIG. 40 is a plan view showing a fifth embodiment of the present invention.

FIG. 41 is a perspective view showing a fifth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Transfer chamber 2a, 2b, 2c, 2d, 2e ... Process chamber station 3 ... Work transfer station 5 ... Partition wall 6 ... Gate 7a, 7b, 23a, 23b, 24a, 24b, 30
a, 30b, 30c, 30d, 46a, 46b, 46
c, 46d, 56a, 56b, 56c, 56d, 66
a, 66b, 66c, 66d, 76a, 76b, 76
c, 76d, 86a, 86b, 86c, 86d: Arms 8a, 8b: Carriers 9a, 9b, 21a, 21b, 22a, 22b, 31
a, 31b, 31c, 31d, 28a, 28b, 32
a, 32b, 35a, 35b, 47a, 47b, 47
c, 47d, 57a, 57b, 57c, 57d, 67
a, 67b, 67c, 67d, 77a, 77b, 77
c, 77d, 87a, 87b, 87c, 87d ... links 20a, 20b, 28a, 28b ... carrier units 26a, 26b ... rotary shafts 10a, 10b, 40a, 40b, 40c, 50a, 5
0b, 60a, 60b, 70a, 70b, 80a, 80
b, 80c, 80d ... ring boss 58 ... valve gates _{A 1, A 2, A 3} , A 4, A 5, A 6, A 7, A 8 ... handling robot B _1, B 2 _... robot linkage W ₁ , W ₂ ... wafer

Claims (5)

[Claims] A transport table (8) for placing an object to be transported at its tip.
a, 8b), and the first and second robot link mechanisms comprising an arm and a link for moving the respective carriages (8a, 8b) in and out by extending and retracting the respective carriages (8a, 8b) are coaxially rotatably provided. The robot link mechanisms are moved in and out in a direction displaced in the turning direction, and one of the rotation fulcrums connecting each arm of each robot link mechanism and the link is moved on the other conveyed object during the movement. A rotation fulcrum connected to a link passing through the object is positioned below the transported object. 2. A link connected to each of the transfer tables (8a, 8b) of the first and second robot link mechanisms, which passes above one of the objects to be conveyed when each robot link mechanism moves in and out. The connecting part of the link to the arm is formed in a U-shape so as to straddle the operation range of the one transferred object, and the tip end of the arm is connected at a position lower than the transferred object. Item 4. The handling robot according to Item 1. 3. The handling according to claim 1, wherein the respective transfer tables of the first and second robot link mechanisms are arranged so as to be displaced in the turning direction over a range not overlapping in the vertical direction. For robots. 4. The handling robot according to claim 3, wherein the transfer tables of the first and second robot link mechanisms are arranged on the same plane in the direction of the turning axis. 5. A transfer table (8) on which an object to be transferred is placed at the tip end.
a, 8b), the first and second robot link mechanisms comprising an arm and a link which move up and down each of the transfer tables (8a, 8b) can be coaxially swiveled by expanding and contracting. In addition, the transfer tables (8a, 8b) are provided at the same position in the turning direction and displaced in the vertical direction, and each robot link mechanism operates at the same position in the turning direction, and each of the robot link mechanisms has A handling robot, wherein a rotation fulcrum connecting the arm and the link is located at a position lower than each transported object.