JPH11186636A - Laser oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser oscillator which is constituted in such a way that the oscillator can control the output of laser beams according to the purpose. SOLUTION: A laser oscillator has a first optical resonator 1 which is provided with a first high-reflection mirror 2 and a first output mirror 3 and in which a plurality of excitation heads 4 and 5 are arranged in series. The oscillator also has a double-sided reflecting mirror 12 which is driven forward and backward along the optical paths of the laser beams emitted from the heads 4 and 5 and, when the mirror 12 enters the optical paths of the laser beams, reflects the laser beams from the heads 4 and 5 in prescribed directions, a second output mirror 14 which is provided on the optical path of the laser beam reflected by one surface of the mirror 12 and forms a second optical resonator 13 together with the first high-reflection mirror 2, and a second high- reflection mirror 16 which is provided on the optical path of the laser beam reflected by the other surface of the mirror 12 and forms a third optical resonator 15 together with the first output mirror 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser oscillating device which oscillates and outputs laser light by controlling the intensity of the laser light.

[0002]

2. Description of the Related Art For example, YA using a solid laser medium
In order to obtain high output laser light in a G laser,
Generally, as shown in FIG. 3, a plurality of excitation heads 53 having the solid laser medium 51 and a plurality of excitation lamps 52 for exciting the solid laser medium 51 are connected to a high reflection mirror.
It is arranged in series in an optical resonator 56 composed of an output mirror 54 and an output mirror 55.

A power supply 57 is connected to each of the excitation lamps 52 of each excitation head 53, and the power supply 57 causes the excitation lamps 52 to emit light to optically excite the solid-state laser medium 51, thereby producing laser light L1. , L2.
Then, by combining these laser lights L1 and L2 and oscillating and outputting them from the output mirror 55, a high output laser light L3 is obtained.

According to such a configuration, it is possible to obtain laser light L3 having a higher intensity in accordance with the number of excitation heads 53 than the intensity of laser light L1 or L2 output from one excitation head 53. Therefore, it is often used as a very effective means for obtaining high-intensity laser light L3.

However, when laser light is used for laser processing, for example, not only is high-intensity laser light L3 required, but also in terms of intensity, the intensity of the intensity output from one excitation head 53 is high. There are cases where it is desired to simultaneously process a plurality of locations with the laser light L1 or L2, or when processing with a plurality of laser lights having different pulse waveforms.

When it is desired to process a plurality of portions of the workpiece at the same time, the laser beam L3 oscillated and output from the output mirror 55 of the optical resonator 56 is converted into two laser beams L by the half mirror 58.
It is divided into 3a and L3b, and each is led to a desired part. However, if the laser beam L3 output from the output mirror 55 is divided by the half mirror 58, the divided laser beams L3a, L3a,
Since the pulse waveform of L3b is the same, it may not be possible to process a plurality of processing points with laser light having different pulse waveforms.

When a plurality of processing points are processed by laser beams having different waveforms, as shown in FIG.
4 and a plurality of optical resonators 61 and 6 comprising an output mirror 55
The pumping heads 63 and 64 are respectively disposed in the pump head 2 and the laser beams L1 and L2 are taken out from the pumping heads 63 and 64 in parallel to obtain laser beams L1 and L2 having different pulse waveforms. I have. In other words, different pulse waveforms
A plurality of lasers capable of oscillating and outputting the light L1 and L2.
The oscillation device is used.

However, when a plurality of laser oscillators are used in parallel, the laser beams L1 and L2 having different pulse waveforms are used.
Although L2 can be obtained, a plurality of excitation heads 63, 6
In some cases, it is not easy to combine the outputs of the laser beams L1 and L2 from the laser beam 4 and obtain a high-output laser beam L3.

[0009]

As described above, in a laser oscillator, it is sometimes desired to irradiate one portion with high-output laser light or to radiate a plurality of portions with separate laser light. Although there is a desire to irradiate, there has hitherto not been developed a laser oscillation device capable of easily performing both of these.

The present invention provides a laser oscillating device which can irradiate one portion with high-power laser light or irradiate a plurality of portions with separate laser light. It is in.

[0011]

According to the first aspect of the present invention, a laser is provided.
In a laser oscillation device for controlling the output of laser light, a first high-reflection mirror and a first output mirror are provided.
, A first optical resonator in which the laser beams are opposed to each other at a predetermined interval, a laser medium, and excitation means for exciting the laser medium to output laser light. A plurality of excitation heads arranged in series in the first optical resonator with the axes of the media aligned, and provided at a predetermined inclination angle between a pair of adjacent excitation heads and output from each excitation head A double-sided reflection mirror for reflecting laser light from a pair of excitation heads in respective predetermined directions when the laser light is driven forward and backward with respect to the optical path of the laser light and enters the optical path, and one surface of the double-sided reflection mirror A second output mirror which is provided in the optical path of the laser light reflected by the second surface and oscillates and outputs a part of the laser light reflected by the one surface, and is reflected by the other surface of the double-sided reflection mirror. Laser light provided on the optical path of the laser light and reflected by the other surface Second high reflective mirror back to the original optical path - characterized by comprising a.

According to a second aspect of the present invention, there is provided a laser oscillation device for controlling the output of laser light, comprising a first high-reflection mirror and a first output mirror. A first optical resonator disposed so as to be spaced apart from the laser medium, a laser medium, and excitation means for exciting this laser medium and outputting laser light, and the axis of each laser medium. And a pair of excitation heads arranged in series in the first optical resonator, and a laser beam output from each excitation head provided at a predetermined inclination angle between the pair of excitation heads. A double-sided reflection mirror that reflects laser light from a pair of excitation heads in a predetermined direction when the laser beam is driven forward and backward with respect to the optical path and enters the optical path, and a laser that reflects on one surface of the double-sided reflection mirror. The second high-reflection mirror is provided in the optical path of the A second output mirror forming the vessel - and,
A second high-reflection mirror provided on the optical path of laser light reflected by the other surface of the double-sided reflection mirror and forming a third optical resonator with the first output mirror; It is characterized by the following.

According to a third aspect of the present invention, in the first or the second aspect of the present invention, each excitation head outputs laser light having a different pulse waveform.
According to the first and second aspects of the present invention, if the double-sided reflection mirror is retracted from the optical path of the laser beam, the laser beams from the plurality of excitation heads are combined and oscillated and output. The intensity of the laser light can be increased, and if the above-mentioned double-sided reflection mirror enters the optical path of the laser light, the laser from each excitation head can be used.
The light can be separately oscillated and output.

According to the second aspect of the invention, in addition to the above operation, when the laser light is separately oscillated and output from each excitation head, laser light having a different pulse waveform can be obtained.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. The laser oscillation device according to the present invention shown in FIG. 1 includes a first optical resonator 1. The first optical resonator 1 includes a first high reflection mirror-2 and a first output mirror.
3 are arranged so that their reflection surfaces face each other in parallel at a predetermined interval. In the first optical resonator 1, a first excitation head 4 and a second excitation head 5 are arranged in series.

Each of the excitation heads 4, 5 has a solid laser medium 6a, 6b made of a YAG rod. A pair of excitation lamps 7 are provided around the solid-state laser media 6a and 6b, respectively.
a and 7b are arranged at 180 degree intervals in the circumferential direction.

The excitation lamps 7a, 7 of the excitation heads 4, 5
b is connected to power supplies 8a and 8b, respectively. A pulse signal is supplied from each of the power supplies 8a and 8b to each of the excitation lamps 7a and 7b. Thereby, each excitation lamp 7a, 7b
Pulse emits light to excite the solid-state laser media 6a and 6b, so that the first and second solid-state laser media 6a and 6b
The second laser beams L1 and L2 are output.

Each of the excitation heads 4 and 5 has these solid lasers.
Solid-state lasers such that the optical axes of the first and second laser beams L1 and L2 output from the mediums 6a and 6b coincide with each other.
The media 6a and 6b are arranged so that their axes are aligned.

The intensity and pulse waveform of the first and second laser beams L1 and L2 generated from the respective excitation heads 4 and 5 can be set by the respective power sources 8a and 8b. In this embodiment, the first pumping head 4 outputs a first laser beam L1 having a pulse waveform W1 with an output P1 and the second pumping head 5 outputs an output P2. Thus, the second laser light L2 having the pulse waveform W2 is output.

A driving source 10 moves between the first excitation head 4 and the second excitation head 5 in a direction in which the optical path of the first and second laser beams L1 and L2 advances and retreats. A driving table 11 as driving means to be driven is provided,
In this drive table 11, a double-sided reflection mirror 12 is arranged at a predetermined inclination angle, for example, 45 degrees with respect to the optical path of the first and second laser beams L1 and L2. . That is, this double-sided reflection mirror 12 is the first reflection surface 1
2a is directed toward the first excitation head 4 and the second reflection surface 12
b is directed to the second excitation head 5 side.

When the double-sided reflection mirror 12 is retracted from the optical paths of the first and second laser beams L1 and L2 as shown by the solid line in FIG. First and second laser beams L1, L2 output from the excitation head 5
2 are combined to form a third laser beam L3, which is oscillated and output from the first output mirror-3. At this time, the output of the third laser light L3 is P3, which is the sum of the output P1 of the first laser light L1 and the output P2 of the second laser light L2, and the waveform W3 is also 1. Waveform W of second laser light L1, L2
1 and W2 are combined.

When the double-sided reflection mirror 12 enters the optical path of the first and second laser beams L1 and L2 as shown by the chain line in FIG. The first laser light L1 is reflected by the first reflection surface 12a of the double-sided reflection mirror 12. The first light reflected on the first reflection surface 12a
Of the first high reflection mirror in the traveling direction of the laser beam L1.
2 and a second output mirror forming a second optical resonator 13.
14 are arranged.

Therefore, the first laser beam L1 output from the first pumping head 4 is output from the second output mirror 14 of the second optical resonator 13 with an output P1 and a waveform W1. Is done.

The second laser light L2 output from the second excitation head 5 is reflected by the second reflection surface 12b of the double-sided reflection mirror 12. In the reflection direction of the second laser light L2, a second high reflection mirror 16 which forms a third optical resonator 15 with the first output mirror 3 is arranged.

Therefore, the second laser beam L2 output from the second pumping head 5 is output as the output P2 and the waveform W2 from the first output mirror-3 of the third optical resonator 15 as the oscillation output. Is done.

The laser beams L1, L2, L3 oscillated and output from the output mirrors 3, 14 are guided to a target portion by a light guiding means such as an optical fiber or an optical arm (not shown). Has become.

Next, a description will be given of a case where, for example, a workpiece (not shown) is laser-processed by using the laser oscillation device having the above-described configuration. First, the above-mentioned workpiece is converted into a high-output third
When processing with the laser light L3, the driving table 11
Is operated to retract the double-sided reflection mirror 12 from the optical paths of the first and second laser beams L1 and L2.

Next, the power supplies 8a and 8b are operated to
To the excitation head 4 and the second excitation head 5. Thereby, the excitation lamps 7a, 7 of each excitation head 4, 5
b is supplied with a pulse signal, and these excitation lamps 7a, 7
b emits light and the respective solid-state laser media 6a and 6b are each photo-excited.
The laser beam L1 and the second laser beam L2 are output.

The laser beams L 1 and L 2 output from the respective excitation heads 4 and 5 are supplied to the first high-reflection mirror of the first optical resonator 1.
2 and the first output mirror-3 are repeatedly reflected to be combined and amplified, and the third output mirror-3 to the third output mirror-3 are amplified.
The oscillation light is output as the light L3.

The third laser light L3 is obtained by combining the first laser light L1 and the second laser light L2, and the output P3 is the first laser light L3. The output P1 of L1 and the output P2 of the second laser beam L2 become a combined high output. Therefore, the workpiece can be irradiated with the high output third laser beam L3.

When it is desired to irradiate two or two workpieces with laser light having different pulse waveforms, the drive table 11 is operated to operate the double-sided reflection mirror-1.
2 enter the optical paths of the first and second laser beams L1 and L2.

As a result, the first laser beam L1 output from the first excitation head 4 is reflected by the double-sided reflection mirror-1.
Since the light path is changed by being reflected by the second first reflection surface 12a, the light is amplified by the second optical resonator 13 formed by the first high-reflection mirror-2 and the second output mirror-14, and the second high-reflection mirror-2 is amplified. 2 output mirror
Oscillation is output from 14.

On the other hand, the second laser light L2 output from the second excitation head 5 is transmitted to the second reflection mirror 12 by the second laser beam L2.
The light path is changed by being reflected by the reflecting surface 12b of
The third mirror formed by the output mirror-3 and the second high-reflection mirror-16
And is oscillated and output from the first output mirror-3.

The first laser light L1 is oscillated and output with an output P1 and a waveform W1, and the second laser light L2 is output with an output P2.
Oscillation is output with the waveform W2. Therefore, two workpieces or two workpieces of one workpiece can be laser-processed with the first laser light L1 and the second laser light L2 having different pulse waveforms.

As described above, according to the laser oscillation device of the present invention, by driving the double-sided reflection mirror 12 forward and backward with respect to the optical paths of the laser beams L1 and L2, the third laser of high output can be obtained. The laser light L3 is oscillated and output from the first optical resonator 1, or the first laser light L1 and the second laser light L2 having different waveforms are transmitted to the second optical resonator 13 and the third laser light L3. Can be separately oscillated and output from the optical resonator 15, and can be used in a desired form according to the application.

FIG. 2 shows another embodiment of the present invention.
In this embodiment, the same portions as those of the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted. That is, in the laser oscillation device of this embodiment, the first to third excitation heads 4, 5, and 5A to which the power supplies 8a to 8c are connected are respectively provided inside the first optical resonator 1. They are arranged in series. Adjacent first excitation head 4 and second excitation head 5 and second excitation head 5 and third excitation head 5A
Between them, a first double-sided reflection mirror 12A and a second double-sided reflection mirror 12B are driven forward and backward with respect to the optical axis by a drive source (not shown).

The excitation heads 4, 5, and 5A output first to third laser beams L1 to L3 having different waveforms, respectively, and a pair of double-sided reflection mirrors 12A and 12B.
Is retracted from the optical path, the first output mirror-3 oscillates and outputs the fourth laser light L4. The fourth laser light L4 has an output and a waveform in which the first to third laser lights L1 to L3 are combined.

In the direction in which the first laser beam L1 from the first excitation head 4 is reflected on one surface 12a of the first double-sided reflection mirror 12A, the first laser beam L1 is reflected by the first high reflection mirror-2. A second output mirror 14 forming the second optical resonator 13 is arranged, and the third laser beam L3 from the third excitation head 5A is applied to the other surface of the second double-sided reflection mirror 12B. In the direction of reflection at 12b, the third optical resonator 15 is coupled with the first output mirror-3.
The second high reflection mirror 16 is formed.

A third high-reflection mirror 21 is disposed in a direction in which the second laser beam L2 from the second excitation head 5 is reflected on the other surface 12b of the first double-sided reflection mirror 12A. ,
A third output mirror 22 is arranged in a direction of reflection on one surface 12a of the second double-sided reflection mirror 12B.

Therefore, the third high reflection mirror-21
And the third output mirror 22 form a fourth optical resonator 23, and the second laser light L from the second excitation head 5
2 can be oscillated and output from the third output mirror 22.

According to such a configuration, if the first double-sided reflection mirror 12A and the second double-sided reflection mirror 12B are retracted from the optical path, the signals are output from the three excitation heads 4, 5, and 5A. An output obtained by combining the first to third laser lights L1 to L3 and a fourth laser light L4 having a waveform are output to a first output mirror-3.
Oscillation output.

If the first double-sided reflecting mirror 12A and the second double-sided reflecting mirror 12B enter the optical path, the first output mirror 3 oscillates and outputs the third laser light L3. The second output mirror 14 oscillates and outputs the first laser light L1. Further, a second laser beam L2 is oscillated and output from the third output mirror 22.

That is, the first to third laser beams L1 to L3 output from the three excitation heads 4, 5, and 5A can be combined and oscillated and output, or can be separately oscillated and output. Further, when only one of the first double-sided reflection mirror 12A and the second double-sided reflection mirror 12B, for example, only the first double-sided reflection mirror 12A, enters the optical path, the first
The first laser beam L1 from the excitation head 4 of FIG.
Is output from the output mirror 14.

The second laser light L2 output from the second excitation head 5 and the third laser light L3 output from the third excitation head 5A are connected to the first output mirror-3. The light is combined by the optical resonator formed by the third high-reflection mirror 21 and oscillated and output from the first output mirror 3.

If only the second double-sided reflecting mirror 12B is made to enter the optical path instead of the first double-sided reflecting mirror 12A,
The third laser beam L3 from the third pumping head 5A can be oscillated and output from the first output mirror 3 alone, and the third laser beam L3 from the first pumping head 4 and the second pumping head 5 can be output. The first laser beam L1 and the second laser beam L2 are combined by the optical resonator formed by the first high-reflection mirror-2 and the third output mirror 22, and the third output mirror is formed. Oscillation can be output from -22.

That is, according to the embodiment shown in FIG. 2, by arranging three pumping heads 4 and 5A in series, the laser light from each pumping head can be oscillated and output independently or synthesized. Not only can it oscillate and output, but also can oscillate and output it by combining a single laser beam and a combined laser beam.

The laser medium of the excitation head used in the laser oscillation device is not limited to a solid laser medium, but may be a gas laser medium or another laser medium. The point is that a laser medium (excitation head) suitable for the intended use of the laser light may be used. Further, the number of excitation heads arranged in series is not limited to two or three, but may be four or more.

[0048]

According to the first and second aspects of the present invention, a double-sided reflection mirror is provided between excitation heads arranged in series so as to be able to advance and retreat with respect to the optical path of laser light. −
Backward from the optical path of the laser light, the laser lights from the plurality of excitation heads are combined and oscillated and output, and if the double-sided reflection mirror enters the optical path of the laser light, The laser light from the excitation head can be separately oscillated and output.

For this reason, by moving the double-sided reflection mirror back from the optical path of the laser light, lasers from a plurality of excitation heads are returned.
High-power laser light can be oscillated by synthesizing the laser light, and the laser light from a plurality of excitation heads can be separately oscillated and output by making the double-sided reflection mirror enter the optical path. Can be.

According to the third aspect of the present invention, a double-sided reflection mirror is provided.
When the laser beam is caused to enter the laser beam path and each excitation head separately oscillates and outputs laser light, each excitation head can output laser light having a different pulse waveform.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a laser oscillation device according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a laser oscillation device showing another embodiment of the present invention.

FIG. 3 is a configuration diagram showing a conventional laser oscillation device.

FIG. 4 is a configuration diagram showing a laser oscillation device having another conventional structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... 1st optical resonator 2 ... 1st high reflection mirror 3 ... 1st output mirror 4 ... 1st excitation head 5 ... 2nd excitation head 6a, 6b ... Solid-state laser medium 7a, 7b Excitation lamp (excitation means) 8a, 8b Power supply 12 Double-sided reflection mirror 13 Second optical resonator 14 Second output mirror 15 Third optical resonator 16 Second high reflection Mira

Claims (3)

[Claims] 1. A laser oscillation device for controlling the output of a laser beam, comprising: a first high reflection mirror and a first output mirror; A first optical resonator disposed, a laser medium, and excitation means for exciting the laser medium and outputting laser light, wherein the axes of the respective laser media are matched to each other, A plurality of excitation heads arranged in series in the first optical resonator, and a predetermined inclination angle between a pair of adjacent excitation heads and an optical path of laser light output from each excitation head. When the laser beam is driven forward and backward and enters the optical path, a double-sided reflection mirror that reflects the laser beams from the pair of excitation heads in a predetermined direction, respectively, and a laser beam reflected by one surface of the double-sided reflection mirror Oscillates part of the laser light that is provided in the optical path and reflected on this one surface A second output mirror to be applied, and a second output mirror provided on an optical path of laser light reflected on the other surface of the double-sided reflection mirror and returning the laser light reflected on the other surface to the original optical path. A high-reflection mirror. 2. A laser oscillation device for controlling the output of a laser beam, comprising: a first high-reflection mirror and a first output mirror; A first optical resonator disposed, a laser medium, and excitation means for exciting the laser medium to output laser light, and aligning the axes of the respective laser medium with each other. A pair of excitation heads arranged in series within the first optical resonator; and a pair of excitation heads provided at a predetermined inclination angle between the pair of excitation heads to advance and retreat with respect to an optical path of laser light output from each excitation head. When driven and enters the optical path, a double-sided reflection mirror that reflects the laser light from the pair of excitation heads in a predetermined direction, respectively, and an optical path of the laser light reflected on one surface of the double-sided reflection mirror. A second optical resonator is provided together with the first high-reflection mirror. A second output mirror provided on the optical path of laser light reflected by the other surface of the double-sided reflection mirror and the first output mirror forming a third optical resonator. A laser oscillation device comprising a reflection mirror. 3. The laser oscillation device according to claim 1, wherein laser beams having different pulse waveforms are output from the respective excitation heads.