JPH11183337A - Sample holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To position a sample, taking the inner periphery of the doughnut-like sample as a reference, by fitting a partial cylindrical surface to the inner periphery of the doughnut-like sample to position the sample, and abutting the center hole contact surface of a movable member against the inner periphery of the doughnut-like sample. SOLUTION: A doughnut-like sample Sd is supported by a sample placing surface 4c of an upper sample support member 4. The diameter of a partial cylindrical surface 3i of a pair of projecting part 3h is fitted to the inner periphery of the sample Sd. Therefore, the sample Sd placed on the sample placing surface 4c is fixed by a center hole contact surface 14e of a movable member 12. The sample on the sample placing surface 4c is thus positioned by using the center hole of the sample Sd, so that a sample Sd larger than the outside diameter of the sample placing surface 4c is placed and positioned. Accordingly, a sample Sd with a large outside diameter can be observed and analyzed by use of the sample holder with a small outside diameter.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample holder for use in an apparatus for performing precision work on a sample (an electron microscope, an analyzer using electrons, X-rays, etc.), and more particularly, to a donut-shaped sample. It relates to a sample holder.

[0002]

2. Description of the Related Art X-ray microanalyzers and EDS (En
Quantitative analysis and observation of donut-shaped and thin-shaped specimens such as compact disks and hard disks using a scanning electron microscope with ergy dispersive X-ray spectrometry) is about 100% at first. Using a sample holder on which a standard sample of purity is mounted, a spectrum for calibration is created based on the standard sample.
Next, the target sample is replaced with another sample holder to which a target sample (a doughnut-shaped thin sample-shaped sample) can be mounted, a target object is observed, and quantitative analysis is performed using the calibration spectrum. As a sample holder used when analyzing and observing the donut-shaped sample in the form of a flake, the following technique (J01) is conventionally known.

(J01) Technology shown in FIGS. 12 to 14 FIG. 12 is a schematic explanatory view of a conventional example of a sample holder used in an apparatus (such as an electron microscope) for performing precision work on a sample. FIG. 13 is an explanatory view of a sample stage supporting a sample holder, as viewed from the direction of the arrow XIII in FIG. FIG. 14 is an enlarged explanatory view of a conventional sample holder.
A is a plan view of the sample holder, and FIG. 14B is a front view of the sample holder. In order to facilitate understanding of the following description, in the drawings, the front-back direction is the X-axis direction, and the left-right direction is the Y-axis direction.
The axis direction and the vertical direction are defined as the Z-axis direction, and arrows X, -X, Y,
The directions or sides indicated by −Y, Z, and −Z are front, rear, left, right, upper, lower, or front, rear, left, right, upper, and lower, respectively. In the figure,
The one with "•" in "O" means an arrow heading from the back of the paper to the front, and the one with "X" in "O" means an arrow pointing from the front to the back of the paper. Shall mean.

In FIG. 12 and FIG. 13, a vacuum sample chamber (vacuum work chamber) used when performing precision work on a sample.
A sample stage ST is arranged in A1. The sample stage ST has an axis 01 extending in the X-axis direction (front-back direction).
(See FIG. 13) There is a tilt table 03 connected to the swing arm 02 so as to be rotatable around it. The tilt table 03 has a Y-axis moving table 0 that moves in parallel in the Y-axis direction.
4. The X-axis moving table 06 supported on the Y-axis moving table upper surface is respectively supported. On the X-axis movement table 06, a holder holding table 07 is provided. As shown in FIG. 13, a trapezoidal ridge 08 (see FIG. 13) is formed on the upper surface of the holder holding table 07 rotatable about the vertical axis, the upper base having a width larger than the lower base. I have. On the upper surface of the trapezoidal ridge 08, a positioning recess 08a is formed. The elements indicated by reference numerals 02 to 08 constitute the sample stage ST.

[0005] In FIG. 12, a sample exchange chamber (preliminary exhaust chamber) A2 is connected to the vacuum sample chamber (vacuum working chamber) A1. An internal gate valve 013 is provided between the vacuum sample chamber A1 and the sample exchange chamber A2. The internal gate valve 013 is
It is composed of cross-section wedge-shaped members 014, 016 and tension springs 017, 017 connecting them. A gate valve opening / closing shaft 018 is connected to the upper surface of the wedge-shaped member 014. A piston 019 of a hydraulic cylinder is connected to an upper end of the gate 018 for opening and closing the gate valve. The piston 019 is normally at the position shown in FIG. 12, and can be moved vertically by hydraulic pressure.

[0006] A pressing spring 021 is provided above the wedge-shaped member 014. The wedge-shaped member 014 is normally pressed downward by the pressing spring 21, and the pressing force with which the wedge-shaped member 014 is pressed downward is the wedge-shaped member 01.
At the contact surface between the wedge-shaped member 4 and the wedge-shaped member 016, the wedge-shaped member 016 acts to press forward in FIG. At this time, the wedge-shaped member 016 is connected to the vacuum sample chamber 0.
1 is pressed against the outer wall 022 and the internal gate valve 013 is closed. When opening the internal gate valve 013, the piston 019 is moved upward. As the piston 019 moves upward, the wedge-shaped member 014 moves upward. At this time, the wedge-shaped member 014 connected by the extension springs 017, 017 also moves upward, and the internal gate valve 013 is opened. The sample exchange chamber A2 is connected to the outside atmosphere via an external gate valve (not shown). The sample exchange chamber A2 is configured to be evacuated by a vacuum device (not shown).

A sample exchange rod 024 slidably supported by an exchange rod support member 023a which is detachably attached to the outer wall 023 of the sample exchange chamber A2 has an inner end portion which is connected to the sample exchange chamber A2.
2 and its outer end is located outside the sample exchange chamber A2. A holder support portion 026 is provided at the inner end of the sample exchange rod 024. A screw is formed in the holder support portion 026, and the screw is screwed into a supported hole 028 (see FIG. 14) of the sample holder 027, and the sample holder 02 is screwed.
7 is held. An operation unit 029 is provided at the outer end of the sample exchange rod 024.

In FIG. 14, a trapezoidal groove 031 fitted in the trapezoidal ridge 8 shown in FIG.
Are formed. 12 and 14, a holder fixing member receiving hole 032 is formed inside the sample holder 027, and a holder fixing ball 033 is received in the holder fixing member receiving hole 032. The holder fixing ball 033 is pressed by a compression spring 034, and the trapezoidal groove 031 is formed in the trapezoidal ridge 08 of the sample stage ST.
When the sample holder 027 is slidably fitted to the sample holder 027, the sample holder 027 is positioned by contacting the positioning recess 08a (see FIG. 13) of the trapezoidal ridge 08. In FIG. 14, the sample holder 027 has a circular sample mounting part 035 on the upper part. The sample mounting portion 035 supports a donut-shaped sample 036. A sample positioning plate 037, 037 and a sample pressing plate 038 are provided on the side surface of the sample mounting portion 035.
Is provided. The sample pressing plate 038 is pulled toward the center side of the circular sample mounting portion 035 by a tension spring 039.
38 presses against the sample positioning plates 037, 037.

[0009]

The technique (J01) has the following problems. (A) Most of the donut-shaped samples 036 are manufactured with reference to the inner peripheral side. Therefore, the sample holder 0
The sample holder 02 is set on the basis of the outer periphery of the donut-shaped sample 036 by the 27 sample positioning plates 037, 037.
7, the coordinate axes of the sample holder 027 and the coordinate axes on the sample 036 based on the inner circumference do not match,
When observing and analyzing the sample 036 by moving the sample holder 027, there is a problem in that the position of the observation and analysis point on the sample 036 cannot be accurately positioned. (B) Since the sample holder 027 positions the outer periphery of the sample 036 and fixes it to the sample holder 027, the sample mounting portion 035 of the sample holder 027 becomes larger than the size of the sample 036. When the sample mounting part 035 becomes large, the sample holder 027 becomes large and heavy. Further, when the sample mounting portion 035 is larger than the sample, there is a problem that the moving range of the sample 036 fixed to the sample holder 027 in the vacuum sample chamber A1 in the XY directions is narrowed.

(C) When the sample holder 027 is large and heavy, when it is fixed to the sample stage ST,
There is a problem that a load is applied to the sample stage ST, and a problem that attenuation characteristics of vibration applied to the sample holder 027 and the sample stage ST deteriorates. (D) Since the donut-shaped sample cannot be mounted on the sample holder with the standard sample, a sample holder on which a standard sample of about 100% purity is mounted first is used, and then the donut-shaped sample is mounted on another sample holder. Since the sample is observed and analyzed, there is a problem that it takes time and work efficiency is poor.

[0011] The present invention has been made in view of the above circumstances, and has the following content as an object. (O01) To provide a sample holder capable of positioning the sample with reference to the inner periphery of the donut-shaped sample. (O02) To be able to continuously measure both the standard sample and the donut-shaped sample without replacing the sample holder.

[0012]

Next, a description will be given of the present invention which has solved the above-mentioned problems. In the description of the present invention, reference numerals in parentheses added after constituent elements of the present invention denote constituent elements of the present invention. Reference numerals of corresponding components of the embodiment described later. The reason why the present invention is described in correspondence with the reference numerals of the components of the embodiments described later is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(The present invention) In order to solve the above problems, a sample holder of the present invention has the following requirements. (A01) A donut shape having a circular center hole formed in the center. A sample mounting surface (4c) on which the sample (Sd) is mounted;
The sample (Sd) mounted on the sample mounting surface (4c) has a partial cylindrical surface (3i) fitted into the center hole and has a movable member guide groove (3g) extending in the radial direction. A sample supporting member (2) having a pair of protrusions (3h) arranged on opposite sides of each other and a standard sample accommodation hole (31) for accommodating a standard sample (Ss) formed on the upper surface of the protrusion (3h). ), (A02) slidably disposed in the movable member guide groove (3g) extending in the radial direction, and comes into contact with the center hole of the donut-shaped sample (Sd) so as to contact the sample (S2).
(a) a movable member (12) having a center hole contact surface (14e) for fixing d), and (A03) a sample fixing urging means (18) for urging the movable member (12) outward in the radial direction; A04) A movement restricting member (4) for restricting the movement of the movable member (12) outward in the radial direction when no sample is mounted on the sample mounting surface (4c), (A05) the sample fixing. Movable member operating section (13) for moving the movable member (12) radially inward against the urging force of the urging means (18).
b).

(Operation of the present invention) In the sample holder of the present invention having the above-mentioned features, a donut in which a circular center hole is formed in the center of the sample mounting surface (4c) of the sample support member (2). A sample (Sd) in a shape of is placed. Sample support member (2)
A pair of protrusions (3h) arranged on opposite sides of the movable member guide groove (3g) extending in the radial direction has a partial cylindrical surface (3i), and has a partial cylindrical surface (3i).
Is the sample (S) mounted on the sample mounting surface (4c).
The sample (Sd) is positioned by fitting into the center hole of d). A pair of protrusions (3h) of the sample support member (2)
The standard sample accommodation hole (3l) formed on the upper surface accommodates the standard sample (Ss). The movable member (12) slidably disposed in the movable member guide groove (3g) extending in the radial direction is urged radially outward by the sample fixing urging means (18). When the sample is not placed on the sample placing surface (4c), the movement of the movable member (12) outward in the radial direction is regulated by the movement regulating member (4). When a sample is placed on the sample placing surface (4c), the center hole contact surface (14e) of the movable member (12) urged outward in the radial direction is the donut shape. The donut-shaped sample (Sd) is fixed by contacting the center hole of the sample (Sd). Accordingly, the partial cylindrical surface (3i) is fitted to the inner periphery of the donut-shaped sample (Sd) to position the sample (Sd), and the movable member (1
Since the center hole contact surface (14e) of 2) abuts on the inner periphery of the donut-shaped sample (Sd) to fix the sample (Sd), the inner periphery of the donut-shaped sample (Sd) is used as a reference. Thus, the sample (Sd) can be positioned.

The sample (S) on the sample mounting surface (4c)
When performing the desorption work of d), the movable member operation unit (13b)
Is pressed inward in the radial direction, the movable member (12)
Moves radially inward against the urging force of the urging means (18) for fixing the sample. At this time, the movable member (1
The center hole contact surface (14e) and the partial cylindrical surface (3i) of 2) can be easily arranged in the center hole of the donut-shaped sample (Sd). Therefore, the sample is attached to and detached from the sample mounting surface (4c) in this state. Further, since the sample holder (1) of the present invention is also provided with an accommodation hole (31) for accommodating the standard sample (Ss), the sample holder for supporting the standard sample (Ss) is different from the conventional one. There is no need to separately use a sample holder for supporting the donut-shaped sample (Sd). For this reason, it is not necessary to replace the sample holder for the standard sample (Ss) with the sample holder for the donut-shaped sample (Sd), and the efficiency of the observation and analysis work is improved.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION

Next, examples (embodiments) of embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments. (Embodiment 1) FIG. 1 is an overall explanatory view of a sample holder of Embodiment 1 of the present invention. FIG. 1A is a plan view of the sample holder of Embodiment 1, and FIG. It is. 2 is an explanatory view of the sample holder shown in FIG. 1, FIG. 2A is a view seen from the direction of arrow IIA in FIG. 1A, and FIG. 2B is an enlarged view of a part shown by arrow IIB in FIG. 1B. . FIG. 3 is an explanatory view of a lower sample supporting member constituting a sample holder, FIG. 3A is a plan view of the lower sample supporting member, and FIG. 3B is FIG.
FIG. 3 is a diagram viewed from the direction of arrow IIIB. FIG. 4 is a view of the lower sample supporting member shown in FIG.
4A is a cross-sectional view taken along the line IVA-IVA in FIG. 3A, FIG. 4B is a view as viewed from the direction of the arrow IVB in FIG. 4A, and FIG.
It is the elements on larger scale of A. FIG. 5 is an explanatory view of an upper sample supporting member constituting the sample holder. FIG. 5A is a plan view of the upper sample supporting member, and FIG. 5B is a cross-sectional view taken along line VB-VB of FIG. 5A. FIG. 6 is a perspective view of the operation movable member. 7A and 7B are explanatory views of the movable member, FIG. 7A is a plan view of the movable member, and FIG.
FIG. 7B is a sectional view taken along the line VIIB-VIIB in FIG. 7A. FIG. 8 is an operation explanatory view of the sample holder according to the first embodiment of the present invention.
FIG. 8B is a diagram illustrating a state in which a donut-shaped sample is to be mounted on the sample holder, and FIG. 8B is a diagram illustrating a state in which a donut-shaped sample is mounted on the sample holder.

In FIG. 1, the sample holder 1 of the present embodiment has a sample support member 2 (see FIG. 1B). The sample support member 2 includes a lower sample support member 3 and an upper sample support member 4 fixed to the upper surface of the lower sample support member 3. 1 to 4, a trapezoidal groove 3a is formed in the lower part of the lower sample supporting member 3. The trapezoidal groove 3a is a groove that fits into a trapezoidal ridge (not shown) similar to the trapezoidal ridge 08 of the sample stage ST shown in FIGS. As shown in FIG. 4B, the trapezoidal groove 3a is formed so that the trapezoidal groove 3a can be easily fitted with the trapezoidal ridge (not shown).
Is formed so that the width of the front end portion of the front end portion becomes larger toward the front end (X end).

At the center of the lower sample supporting member 3, a holder fixing member receiving hole 3b opening toward the trapezoidal groove 3a is formed. A female screw (see FIG. 4C) is formed on the inner peripheral surface of the holder fixing member receiving hole 3b. 1 to 4, the lower sample support member 3 has an exchange rod mounting hole 3c.
(See FIG. 2A). This replacement rod mounting hole 3
c is a hole in which a sample exchange rod (not shown) similar to the sample exchange rod 024 of FIG. Also,
Compression spring support surfaces 3d, 3d (see FIGS. 3B and 4B) are formed on both left and right side surfaces of the lower sample support member 3.

The lower sample support member 3 has a flange portion 3e on its upper part. 3 and 4, the left and right side surfaces of the flange portion 3e are formed as flat surfaces, the front and rear side surfaces are formed as circular arc surfaces, and cut portions 3f and 3f are formed at the center of each of the circular arc surfaces. ing. In FIG. 3A,
A guide groove 3g is formed on the upper surface of the flange 3e so as to pass through the center of the upper surface and extend in the left-right direction. A pair of protrusions 3h projecting upward (in the Z direction) are formed on both front and rear sides of the guide groove 3g at the center of the upper surface of the flange 3e, and each protrusion 3h has a partial cylindrical surface 3i. I have. Four screw holes 3j are formed on the upper surface of the flange 3e.

2B and 4C, the upper surfaces of the pair of protrusions 3h are arranged in the vertical direction (Z-axis direction), that is, in the direction of the trapezoidal groove 3a of the lower sample support member 3 from the upper surface of the pair of protrusions 3h. A plurality of standard sample accommodation holes 31 penetrating therethrough are formed. In FIG. 4C, the standard sample receiving hole 3l
Is an opening 3l formed on the upper surface side of the pair of protrusions 3h.
1, a standard sample container 312 having a diameter larger than the inner diameter of the opening 311 below the opening 311 (in the -Z direction), and an inner peripheral surface below the standard sample container 312 (in the -Z direction). And a screw portion 3l3 in which a screw is formed.

The flange portion 3e of the lower sample supporting member 3
A substantially disk-shaped upper sample support member 4 is disposed on the upper surface. In FIG. 5, in the front-rear direction of the upper sample support member 4, cut portions 4a, 4a of the upper sample support member 4 are formed at positions corresponding to the cut portions 3f, 3f of the flange portion 3e. A protrusion fitting hole 4b is formed at the center of the upper sample support member 4, and a pair of protrusions 3h of the lower sample support member 3 are fitted. On the upper surface of the upper sample support member 4, a ring-shaped inner sample mounting surface 4c1 is formed along the outer peripheral portion of the projecting portion fitting hole 4b at the center thereof, and a ring-shaped inner sample mounting surface 4c is formed along the outer peripheral edge thereof. An outer sample mounting surface 4c2 is formed. The ring-shaped inner sample mounting surface 4c1 and outer sample mounting surface 4c2 form a sample mounting surface 4c. The upper surface of the upper sample support member 4 is formed as a flat concave portion 4d which is recessed downward between the ring-shaped inner sample mounting surface 4c1 and the outer sample mounting surface 4c2. In the recess 4d, a screw through hole 4e is formed at a position corresponding to the screw hole 3j on the upper surface of the flange 3e, and the upper sample support member 4 is provided on the upper surface of each of the screw through holes 4e and the upper surface of the flange 3e. A screw 6 (see FIG. 1) that is screwed into each screw hole 3j
) Is fixed to the upper surface of the flange portion 3e.
The sample support member 2 includes a lower sample support member 3 and an upper sample support member 4 fixed by the screws 6.

As shown in FIG. 1B, a holder fixing ball 7 is accommodated in the holder fixing member accommodating hole 3b formed with a female screw. The holder fixing ball 7 is pressed downward by a compression spring 8, and the holder fixing ball 7 pressed by the compression spring 8 is supported by a ball support member 9 so as not to jump out. The sphere support member 9 is supported so that a part of the spherical surface of the holder fixing sphere 7 comes out of the central through hole.
It is screwed into the female screw at the lower end of b. FIG.
B, As shown in FIG. 2B, a standard sample holding member 11 on which a standard sample Ss is mounted is housed in the standard sample holding unit 31. The standard sample holding member 11 has a concave portion for accommodating the standard sample Ss at an upper end thereof, and a screw portion 3l at a lower portion thereof.
It has a male screw that is screwed into 3.

In FIGS. 1, 2 and 8, a pair of left and right movable members 12 is provided in a guide groove 3g on the upper surface of the flange portion 3e.
It is slidably supported in the axial direction. Each of the movable members 12 includes an L-shaped operation movable member 13 (see FIG. 6) and a sample fixing movable member 14 connected to an inner end of the operation movable member 13. As can be seen from FIGS. 6 and 8, two connection screw holes 13 a are formed at the center side end of each of the operation movable members 13, and the outer side end of each of the operation movable members 13 is formed. A movable member operating portion 13b extending downward is formed in the portion. The movable member operating portion 13b has one screw hole 13c for adjusting spring pressure.

In FIG. 7, each of the sample fixing movable members 14 has a screw hole forming portion 14a, and the screw hole forming portion 14a has screw through holes 14b, 14b through which the movable member connecting screws 15 pass. Are formed. In FIGS. 1 and 2, the center side end of each of the operation movable members 13 and the sample fixing movable member 14 are connected by a movable member connection screw 15 screwed into each of the movable member connection screw holes 13 a. ing. The sample fixing movable member 14 has a partial cylindrical outer surface 14c (see FIG. 7B) having the same curvature as the partial cylindrical surfaces 3i of the pair of protrusions 3h. An engaging portion 14d is provided at an upper end of the outer surface 14c, and a center hole contact surface 14e that is inclined outward as it goes upward is formed in the engaging portion 14d. The lower end of the center hole contact surface 14e is smoothly connected to the upper end of the outer surface 14c. As shown in FIG. 2B, the center hole contact surface 14e has a circumference including the partial cylindrical surfaces 3i, 3i of the pair of protrusions 3h when the donut-shaped sample Sd is mounted on the sample holder 1. To abut the center hole of the donut-shaped sample Sd to fix the donut-shaped sample Sd.

In FIG. 1B and FIG. 8, the screw portion 1 of the spring pressure adjusting screw 16 is inserted into the spring pressure adjusting screw through hole 13c.
6a is screwed and penetrates from outside to inside. The spring pressure adjusting screw 16 has a small-diameter distal end portion 16b having a smaller diameter than the outer diameter of the screw portion 16a on the distal end side of the screw portion 16a. A spring receiving washer 17 is mounted on a boundary between the screw portion 16a and the small-diameter tip portion 16b. A compression spring (a biasing means for fixing the sample) is provided around the small diameter tip portion 16b.
The compression spring 18 has an inner end supported by the compression spring support surface 3d and an outer end supported by the spring receiving washer 17. The compression spring 18 constantly presses the operation movable member 13 outward through the spring receiving washer 17 and the spring pressure adjusting screw 16.
Therefore, the movable member 12 constituted by the operation movable member 13 and the sample fixing movable member 14 is constantly urged outward.

In FIG. 1B, when the donut-shaped sample Sd is not mounted on the sample mounting surface 4c, the movable member 12 which is constantly urged outward is positioned inside the projecting member fitting hole 4b. Movement is restricted by contacting the periphery. Therefore, in the first embodiment, the upper sample support member 4 in which the projecting member fitting hole 4b is formed has a function as a movement restricting member for restricting the movable member 12 from moving outward. . Note that the movement restricting member can be configured using another member. The pair of compression springs 18, 18 for urging the pair of movable members 12 arranged in the left and right direction of the sample holder 1 outward have the same spring pressure. If the spring pressures of the springs 18 and 18 are different from each other,
Can be adjusted by moving it to the left or right.

1 and 2, a donut-shaped sample Sd (2) is set by the sample mounting surface 4c of the upper sample support member 4.
(Indicated by a dashed line) is supported. The diameter of the partial cylindrical surfaces 3i of the pair of protrusions 3h is set to a size that fits into the inner periphery of the donut-shaped sample Sd. Therefore, the donut-shaped sample Sd mounted on the sample mounting surface 4c is fixed by the center hole contact surface 14e of the movable member 12.
In the first embodiment, the donut-shaped sample Sd on the sample mounting surface 4c
Is performed using the center hole of the donut-shaped sample Sd, so that the sample Sd larger than the outer diameter of the sample mounting surface 4c can be mounted and positioned. Therefore, observation of a sample with a large outer diameter using the sample holder 1 with a small outer diameter,
Analysis is possible.

(Operation of Embodiment 1) In FIGS. 1 and 2, the standard sample holding section 3h2 in each of the standard sample receiving holes 3l formed on the upper surface of the pair of protrusions 3h holds the standard sample Ss. The standard sample holding member 11 is fixed by inserting the members 11 respectively. In FIG. 8A, when the observer presses any one of the pair of left and right operation movable members 13 on the outer end side of the movable member operation portion 13b toward the inner end side, the inner end of the operation movable member 13 The connected movable member 14 for sample fixing slides within the guide groove 3g, and at this time, the engaging portion 14d of the movable member 14 for sample fixing is moved to the circle of the partial cylindrical surfaces 3i, 3i of the pair of protrusions 3h. Move inside the circumference. In this state, the donut-shaped sample Sd can be mounted on the sample mounting surface 4c of the upper sample support member 4. Therefore, next, the donut-shaped sample Sd is mounted on the sample mounting surface 4c. In this state, the inner periphery of the center hole of the donut-shaped sample Sd fits into the partial cylindrical surfaces 3i, 3i of the pair of protrusions 3h and the center hole contact surface 14e which is not moved inward.

In FIG. 8B, when the observer releases the pressure on the inside of the movable member operating portion 13b, the operation movable member 13 and the movable member 13 are pressed by a compression spring 18 which urges the operation movable member 13 to the outer end side. The sample fixing movable member 14 moves outward. At this time, the engaging portion 14d of the sample fixing movable member 14 moves toward the outside of the circumference of the pair of partial cylindrical surfaces 3i, 3i. At this time, the contact surfaces 14e of the pair of left and right sample fixing movable members 14 are
The donut-shaped sample Sd is fixed in contact with the inner peripheral edge of the center hole. That is, the donut-shaped sample Sd is fixed with reference to the inner peripheral edge of the center hole.

The donut-shaped sample Sd is placed in the sample holder 1.
When the operation movable member 13 is to be removed from the inside, the operation movable member 13 is pressed toward the inner end side and moved inside the circumference of the partial cylindrical surfaces 3i, 3i. At this time, the center hole contact surface 1 of the engaging portion 14d
4e moves inside the circumference of the arcuate partial cylindrical surfaces 3i, 3i to release the abutment with the inner circumference of the donut-shaped sample Sd. In this state, the donut-shaped sample Sd can be taken out of the sample holder 1. In the first embodiment,
Since the positioning of the donut-shaped sample Sd on the sample holder 1 is performed with reference to the inner periphery of the center hole of the donut-shaped sample Sd,
The coordinate axes of the sample holder 1 and the coordinate axes based on the inner circumference of the donut-shaped sample Sd can be matched. Therefore, it is possible to accurately move the coordinates of the observation, length measurement, or analysis point on the donut-shaped sample Sd on the coordinate axes based on the inner circumference of the donut-shaped sample Sd to the electron beam irradiation position. Become.

Since the donut-shaped sample Sd is positioned with reference to the inner peripheral side, the sample holder 1 of the first embodiment can be used even if the outer diameter of the upper sample support member 4 is smaller than the outer diameter of the sample Sd. Can be used for observation and the like. Therefore, when the sample holder 1 is large, the movement range of the sample is not limited due to the restriction of the movement of the sample holder 1 in the XY directions in the vacuum sample chamber. Also, since the sample holder 1 is not large and heavy,
When mounted on the sample stage, the load is not applied to the sample stage, and the seismic resistance does not deteriorate. further,
Since the sample holder 1 is provided with the accommodation hole 31 for accommodating the standard sample Ss, the labor for exchanging the sample holder for the standard sample Ss and the sample holder for the donut-shaped sample Sd can be omitted.

(Embodiment 2) FIG. 9 is an explanatory view of a sample holder of Embodiment 2 of the present invention. FIG. 9A is a plan view of the sample holder of Embodiment 2, and FIG. 9B is a cross section taken along line IXB-IXB of FIG. 9A. FIG. In the description of the second embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The second embodiment differs from the first embodiment in the following points, but has the same configuration as the first embodiment in other points. On the right side (−Y side) of the movable member guide groove 3g formed on the upper surface of the pair of protrusions 3h of the second embodiment, a sample fixing member is used instead of the sample fixing movable member 14 of the first embodiment. 14 'is fixed. Therefore, the right side (−Y side) of the first embodiment.
The operation movable member 13, the spring pressure adjusting screw 16 and the compression spring 18 connected to the sample fixing movable member 14 are omitted. The second embodiment has the same operation as the first embodiment.

(Embodiment 3) FIG. 10 is an explanatory view of a sample holder of Embodiment 3 of the present invention. FIG. 10A is a plan view of the sample holder of Embodiment 3, and FIG. 10B is a cross section taken along line XB-XB of FIG. 10A. FIG. 10C is a perspective view of a movable member of the sample holder, and FIG. 10D is a view seen from the arrow XD direction of FIG. 10A. In the description of the third embodiment, the first embodiment
The same reference numerals are given to constituent elements corresponding to the above-mentioned constituent elements, and detailed description thereof will be omitted. The third embodiment differs from the first embodiment in the following points, but has the same configuration as the first embodiment in other points. In FIG. 10, in the third embodiment, the movable member 12 includes a movable member 23 for operation and a movable member 24 for fixing the sample. The operation movable member 23 is formed of an L-shaped bent shaft having a circular cross section, and an inner end portion of the operation movable member 23 has a flat outer surface with a circular outer surface cut off.
(See FIG. 10C). A movable member operating portion 23 extending downward is provided at an outer end of the movable member 23 for operation.
b is provided. At the lower end of the movable member operating portion 23b, both sides of an outer surface having a circular cross section are cut off to form a flat plate portion, and a screw hole 23c is formed in the flat plate portion.

The movable member 24 for fixing a sample, which is constituted by a pin connected to the flat portion 23a, has a conical shape whose upper end portion 24a is formed in a columnar shape and whose lower portion has a diameter which is slightly reduced as it goes downward. Is formed. A screw 24b having a small diameter is formed at the lower end. The screw 24b is a portion that is screwed into the screw hole of the flat portion 23a and fixed. The sample fixing movable member 24
The cylindrical upper end portion 24a is formed to have a width capable of fitting and sliding in the movable member guide groove 3g formed between the pair of protrusions 3h. To the right (-Y direction) of the sample fixing movable member 24, a sample fixing fixing member 24 'is provided.
Is fixed to the guide groove 3g. The sample fixing fixing member 24 ′ is formed in a shape in which the sample fixing movable member 24 is elongated, and is directly fixed to the lower sample supporting section 3.

The screw hole 23 of the operation movable member 23
A screw 16 for adjusting the spring pressure is threaded through c.
The tip of the spring pressure adjusting screw 16 abuts on a leaf spring 27 fixed to the sample support member 2. The leaf spring 27
Is fixed to the back side of the flange portion 3e of the sample holder 1. The third embodiment also has the same operation as the second embodiment.

(Embodiment 4) FIG. 11 is an explanatory view of a sample holder of Embodiment 4 of the present invention. FIG. 11A is a plan view of the sample holder of Embodiment 4, and FIG. 11B is a cross section taken along the line XIB-XIB of FIG. 11A. FIG. In the description of the fourth embodiment, the same reference numerals are given to the components corresponding to the components of the second embodiment, and the detailed description is omitted. Example 4
The second embodiment is different from the second embodiment shown in FIG. 9 in the following points, but is configured similarly to the second embodiment in other points.
In the sample holder 1 of the fourth embodiment, the fixing member 14 'for fixing the sample of the second embodiment is omitted. Also in the fourth embodiment, the inner periphery of the donut-shaped sample Sd is fitted into the protruding portion 3h to position the sample Sd. Then, the contact surface 14e of the sample fixing movable member 14 contacts the inner peripheral edge of the center hole of the donut sample Sd, and the donut sample Sd is fixed to the sample mounting surface 4c of the sample holder 1. Therefore, the fourth embodiment has the same operation as the second embodiment.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) In each of the above embodiments, the sample supporting member 2 may be divided into three or more, instead of being divided into the lower sample supporting member 3 and the upper sample supporting member 4 or divided. It is possible to form an integral structure without performing this. (H02) In each of the above embodiments, the case where six standard sample receiving holes 31 are formed is illustrated, but one or a plurality of the standard sample receiving holes 31 may be formed. (H03) In the first to fourth embodiments, instead of restricting the movement of the movable member for fixing the sample of the movable member, the movement of the operation movable member 13 may be restricted. (H04) It is possible to use a tension spring or another elastic member (a leaf spring or the like) instead of the compression spring 18 as the urging means for fixing the sample. Instead of acting on 13, it is possible to act on the movable member for fixing the sample. (H05) Instead of forming the movable member for fixing the sample and the movable member for operation separately and then connecting them, they can be integrally formed.

[0038]

The sample holder of the present invention described above has the following effects. (E01) The sample can be positioned with reference to the inner periphery of the donut-shaped sample. (E02) Measurement of both the standard sample and the donut-shaped sample can be performed continuously without replacing the sample holder.

[Brief description of the drawings]

FIG. 1 is an overall explanatory view of a sample holder according to a first embodiment of the present invention; FIG. 1A is a plan view of the sample holder according to the first embodiment;
FIG. 1B is a sectional view taken along the line IB-IB of FIG. 1A.

2 is an explanatory view of the sample holder shown in FIG. 1; FIG. 2A is a view seen from the direction of arrow IIA in FIG. 1;
B is an enlarged view of a portion indicated by an arrow IIB in FIG. 1B.

3 is an explanatory view of a lower sample supporting member constituting the sample holder, FIG. 3A is a plan view of the lower sample supporting member, and FIG. 3B is a view seen from the direction of the arrow IIIB in FIG. 3A. .

FIG. 4 is an explanatory view of another portion of the lower sample supporting member shown in FIG. 3, and FIG. 4A is a diagram showing IVA-IV of FIG. 3A.
FIG. 4B is a cross-sectional view taken along the line A, FIG. 4B is a view seen from the direction of the arrow IVB in FIG. 4A, and FIG.

5 is an explanatory view of an upper sample support member, FIG. 5A is a plan view of the upper sample support member, and FIG. 5B is FIG. 5A.
FIG. 5 is a sectional view taken along line VB-VB of FIG.

FIG. 6 is a perspective view of a movable member for operation.

7 is an explanatory view of the movable member, FIG. 7A is a plan view of the movable member, and FIG. 7B is a sectional view taken along the line VIIB-VIIB of FIG. 7A.

8A and 8B are explanatory diagrams of the operation of the sample holder according to the first embodiment of the present invention. FIG. 8A is a diagram showing a state where a donut-shaped sample is to be mounted on the sample holder, and FIG. 8B is a donut-shaped sample holder. FIG. 6 is a diagram showing a state where the sample is mounted.

FIG. 9 is an explanatory view of a sample holder according to a second embodiment of the present invention. FIG. 9A is a plan view of the sample holder of the second embodiment, and FIG. 9B.
FIG. 9B is a sectional view taken along line IXB-IXB of FIG. 9A.

FIG. 10 is an explanatory view of a sample holder according to a third embodiment of the present invention. FIG. 10A is a plan view of the sample holder according to the third embodiment.
10B is a sectional view taken along line XB-XB of FIG.
10C is a perspective view of a movable member of the sample holder, and FIG. 10D is a view as seen from the direction of the arrow XD in FIG. 10A.

FIG. 11 is an explanatory view of a sample holder according to a fourth embodiment of the present invention. FIG. 11A is a plan view of the sample holder according to the fourth embodiment.
FIG. 11B is a sectional view taken along line XIB-XIB of FIG. 11A.

FIG. 12 is a schematic explanatory view of a conventional example of a sample holder used in an apparatus (such as an electron microscope) for performing a precision operation on a sample.

FIG. 13 is an explanatory view of a sample stage supporting a sample holder, as viewed from the direction of arrow XIII in FIG. 12;

FIG. 14 is an enlarged explanatory view of a conventional sample holder, FIG. 14A is a plan view of the sample holder, and FIG. 14B is a front view of the sample holder.

[Explanation of symbols]

Sd: donut-shaped sample, Ss: standard sample, 2: sample support member 2, 4c: sample mounting surface, 3g: movable member guide groove, 3
h: Projection, 3i: Partial cylindrical surface, 3l: Standard sample accommodation hole,
4: movement restricting member, 13: operation movable member, 18: sample fixing urging means

Claims (1)

[Claims] 1. A sample holder characterized by the following requirements: (A01) a sample mounting surface for mounting a donut-shaped sample having a circular center hole formed in the center thereof; A pair of protrusions having a partial cylindrical surface fitted into the center hole of the sample mounted on the mounting surface and arranged on opposite sides of a movable member guide groove extending in a radial direction; (A02) a sample support member having a standard sample accommodation hole for accommodating a standard sample formed on the upper surface of the portion, and slidably disposed in the movable member guide groove extending in the radial direction;
A movable member having a center hole contact surface for fixing the sample by contacting the center hole of the donut-shaped sample; (A03) a sample fixing urging means for urging the movable member radially outward; (A04) a movement restricting member for restricting the movement of the movable member outward in the radial direction when the sample is not placed on the sample placing surface; (A05) a movement regulating member for regulating the urging force of the sample fixing urging means; A movable member operation unit for moving the movable member radially inward in opposition to the movable member operation unit;